Measurement device, method for measurement, and method for manufacturing optical system

Abstract

To provide a measuring device that can measure the inter-surface distance of an optical system under test with high accuracy.SOLUTION: A measuring device 1 for measuring the position of a surface under test in an optical system under test includes: a measurement reference unit 500 having a reference surface; a light source 10 for emitting test light and reference light; an interferometer 400 having a detector 90 for acquiring a first interference signal and a second interference signal; adjustment means 70 for adjusting the intensity of at least one of the first interference signal and the second interference signal; and calculation means 100 for calculating the inter-surface distance on the basis of the first interference signal and the second interference signal, the first interference signal being a signal due to interference between reference light obtained by reflection of the test light from the reference surface and the reference light, and the second interference signal being a signal due to interference between measurement light obtained by reflection of the test light from the surface under test and the reference light.SELECTED DRAWING: Figure 1

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