Thermoelectric conversion device

Abstract

To provide a highly efficient thermoelectric conversion device.SOLUTION: A thermoelectric conversion device 100 has a substrate 1, a unileg-type first thermoelectric conversion element 10A on the substrate, a unileg-type second thermoelectric conversion element 10B on the substrate, a first connection section 5A connecting the first thermoelectric conversion element and the second thermoelectric conversion element, and a coating part 6 coating the first connection section. The first connection section contains a thermoelectric conversion material. The thermal conductivity of the coating part is lower than that of the first connection section.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to a thermoelectric conversion device. [Background technology]

[0002] Thermoelectric conversion elements, which generate electricity by converting the large amounts of unused thermal energy present in the environment into electrical energy, have a thermoelectric conversion layer that generates electromotive force by utilizing the temperature difference between two heat sources with different temperatures. The thermoelectric conversion layer generates electromotive force by creating a temperature difference between both ends. This effect of the thermoelectric conversion layer is called the Seebeck effect. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-27061 [Patent Document 2] Japanese Patent Application Laid-Open No. 2017-152691 [Patent Document 3] Japanese Patent Application Laid-Open No. 2017-135278 Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide a highly efficient thermoelectric conversion device. [Means for solving the problem]

[0005] A thermoelectric conversion device according to an embodiment includes a substrate, a first uni-leg thermoelectric conversion element on the substrate, a second uni-leg thermoelectric conversion element on the substrate, a first connection portion connecting the first thermoelectric conversion element and the second thermoelectric conversion element, and a covering portion covering the first connection portion. The first connection portion includes a thermoelectric conversion material. The thermal conductivity of the covering portion is lower than the thermal conductivity of the first connection portion. It has. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a schematic cross-sectional view of a thermoelectric conversion device according to an embodiment. [Figure 2] FIG. 1 is a schematic perspective view of a thermoelectric conversion device according to an embodiment. [Figure 3] 1 is a schematic cross-sectional view of a thermoelectric conversion device according to an embodiment. [Figure 4] 1 is a schematic cross-sectional view of a thermoelectric conversion device according to an embodiment. [Figure 5] 1 is a schematic cross-sectional view of a thermoelectric conversion device according to an embodiment. [Figure 6] 1 is a schematic cross-sectional view of a thermoelectric conversion device according to an embodiment. [Figure 7] 1 is a schematic cross-sectional view of a thermoelectric conversion device according to an embodiment. [Figure 8] 3 is a flowchart of a method for manufacturing a thermoelectric conversion device according to an embodiment. [Figure 9] 5A to 5C are process diagrams illustrating the thermoelectric conversion device according to the embodiment. [Figure 10] 5A to 5C are process diagrams illustrating the thermoelectric conversion device according to the embodiment. [Figure 11] 5A to 5C are process diagrams illustrating the thermoelectric conversion device according to the embodiment. [Figure 12] 5A to 5C are process diagrams illustrating the thermoelectric conversion device according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, the same components will be denoted by the same reference numerals, and the description of components that have already been described will be omitted as appropriate.

[0008] The physical properties in this specification are values ​​at a temperature of 25°C and a pressure of 1 atom. The thickness and composition ratio of each component are the average values ​​for the distance in the stacking direction.

[0009] (First embodiment) The first embodiment relates to a thermoelectric converter. FIG. 1 shows a schematic cross-sectional view of a thermoelectric converter 100 according to the first embodiment. The thermoelectric converter 100 shown in FIG. 1 includes a substrate 1, a uni-leg first thermoelectric converter element 10A on the substrate 1, a uni-leg second thermoelectric converter element 10B on the substrate 1, a first connection portion 5A connecting the first thermoelectric converter element 10A and the second thermoelectric converter element 10B, and a covering portion 6 covering the first connection portion 5A. The thermoelectric converter 100 further includes an electrode (fifth electrode 2C) and a second connection portion 5B. FIG. 2 shows a schematic perspective view of the thermoelectric converter 100 according to the first embodiment. In the schematic perspective view of FIG. 2, the first connection portion 5A and the second connection portion 5B are enclosed by a dashed line and are further indicated by light gray hatching.

[0010] In the first embodiment, the number of thermoelectric conversion elements included in the thermoelectric conversion device 100 is illustrated as two for the sake of simplicity. Modifications of the first embodiment also include thermoelectric conversion devices including three or more thermoelectric conversion elements. In the case of a thermoelectric conversion device including three or more thermoelectric conversion elements, it is preferable to repeat the connection between the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B multiple times.

[0011] The stacking direction of the substrate 1 and the first thermoelectric conversion element 10A (or the second thermoelectric conversion element 10B) is defined as the first direction X. The direction in which the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B are aligned is defined as the second direction Y. The direction perpendicular to the plane formed by the first direction X and the second direction Y is defined as the third direction Z. The first direction X and the second direction Y preferably intersect and are orthogonal to each other. As shown in the perspective schematic diagram of FIG. 2 , the substrate 1, the first thermoelectric conversion element 10A, the second thermoelectric conversion element 10B, the first connecting portion 5A, and the second connecting portion 5B also extend in the third direction Z. The longitudinal direction of the first thermoelectric conversion element 10A and the longitudinal direction of the second thermoelectric conversion element 10B preferably coincide with the third direction Z.

[0012] It is preferable that the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B are electrically connected in series.

[0013] The substrate 1 is a member that supports the first thermoelectric conversion element 10A, the second thermoelectric conversion element 10B, and the fifth electrode 2C. The substrate 1 is, for example, an insulating substrate. The substrate 1 is preferably made of ceramic or a resin containing a synthetic resin. The substrate 1 is, for example, a part of the exterior material of the thermoelectric conversion device 100. The exterior material provided on the side opposite to the substrate 1 side of the thermoelectric conversion device 100 is not shown in FIG. 1.

[0014] The surface of the substrate 1 on which the first thermoelectric conversion elements 10A are provided is preferably a flat surface or a substantially flat surface. The surface of the substrate 1 on which the second thermoelectric conversion elements 10B are provided is preferably a flat surface or a substantially flat surface. The surface of the substrate 1 on which the first thermoelectric conversion elements 10A are provided and the surface on which the second thermoelectric conversion elements 10B are provided are preferably flat surfaces or a substantially flat surface. The surface of the substrate 1 on which the first thermoelectric conversion elements 10A and the second thermoelectric conversion elements 10B are provided is preferably a flat surface or a substantially flat surface.

[0015] The first thermoelectric conversion element 10A is provided on the substrate 1. The first thermoelectric conversion element 10A is a thermoelectric power generation element or a Peltier element.

[0016] The first thermoelectric conversion element 10A includes a first electrode 2A, a first thermoelectric conversion layer 3A, and a third electrode 4A. The first electrode 2A is provided on the substrate 1 side of the first thermoelectric conversion element 10A. The third electrode 4A is provided on the side of the first thermoelectric conversion element 10A opposite to the substrate 1 side. The first thermoelectric conversion layer 3A is provided between the first electrode 2A and the third electrode 4A. The first electrode 2A, the first thermoelectric conversion layer 3A, and the third electrode 4A are aligned in a first direction X.

[0017] The first electrode 2A is provided between the substrate 1 and the first thermoelectric conversion layer 3A. The first electrode 2A is electrically insulated from the substrate 1 and the covering portion 6. The first electrode 2A is electrically connected to the first thermoelectric conversion layer 3A and the first connecting portion 5A. The first electrode 2A is preferably in direct contact with the first thermoelectric conversion layer 3A and the first connecting portion 5A. A member with high thermal conductivity (not shown) may be provided between the first electrode 2A and the substrate 1.

[0018] The first electrode 2A is a conductive member containing one or more thermoelectric conversion materials selected from the group consisting of one or more metals selected from the group consisting of Cu, Ag, Al, etc., or alloys containing one or more metals selected from the group consisting of Cu, Ag, Al, etc. The first electrode 2A preferably contains one or more metals selected from the group consisting of Cu, Ag, Al, etc. The first electrode 2A is preferably made of one or more metals selected from the group consisting of Cu, Ag, Al, etc. The one or more metals selected from the group consisting of Cu, Ag, Al, etc. include alloys.

[0019] The first electrode 2A is preferably in ohmic contact with the first thermoelectric conversion layer 3A and the first connection portion 5A.

[0020] The thickness of the first electrode 2A is preferably 100 nm or more and 10,000 nm or less, and more preferably 1,000 nm or more and 5,000 nm or less. The thickness of the first electrode 2A is the thickness in the first direction X, and is, for example, the distance between the surface of the first thermoelectric conversion layer 3A facing the substrate 1 and the surface of the substrate 1 facing the first thermoelectric conversion layer 3A. The thickness of the first electrode 2A is preferably 0.0001 to 100 times the length of the first connection portion 5A in the first direction X, and is preferably 0.0001 to 100 times the thickness of the first thermoelectric conversion layer 3A.

[0021] The first electrode 2A is preferably a flat plate-like member. The first electrode 2A may have minute irregularities on its surface, but preferably does not include steps that are 1 / 10 or more of the thickness of the first electrode 2A. The first electrode 2A is preferably a flat plate-like member that is neither L-shaped nor stepped.

[0022] The surface of the first electrode 2A facing the substrate 1 is preferably a flat or approximately flat surface.

[0023] The surface of the first electrode 2A facing away from the substrate 1 is preferably a flat or approximately flat surface.

[0024] The surface of the first electrode 2A facing the substrate 1 and the surface of the first electrode 2A facing the first thermoelectric conversion layer 3A (the surface opposite to the substrate 1 side) preferably have the same or approximately the same shape. The shape of the surface of the first electrode 2A facing the substrate 1 and the shape of the surface of the first electrode 2A facing the first thermoelectric conversion layer 3A (the surface opposite to the substrate 1 side) preferably are similar or approximately similar.

[0025] It is preferable that there are no protrusions between the substrate 1 and the first electrode 2A that would cause the shape of the first electrode 2A to become non-flat (for example, protrusions that would cause the first electrode 2A to deform into an L-shape or non-fine protrusions that would cause the first electrode 2A to deform into a staircase shape).If a member (not shown) is provided between the substrate 1 and the first electrode 2A, it is preferable that the member provided between the substrate 1 and the first electrode 2A be a flat member so that no protrusions are formed on the first electrode 2A.

[0026] The thermal conductivity [W / (m·K)] of the first electrode 2A is preferably 100 [W / (m·K)] or more and 450 [W / (m·K)] or less. When the first electrode 2A contains one or more metals selected from the group consisting of Cu, Ag, Al, etc., the thermal conductivity [W / (m·K)] of the first electrode 2A is preferably 200 [W / (m·K)] or more and 450 [W / (m·K)] or less.

[0027] The first thermoelectric conversion layer 3A is provided between the first electrode 2A and the third electrode 4A. The first thermoelectric conversion layer 3A is a semiconductor layer having the Seebeck effect. The substrate 1 side of the first thermoelectric conversion layer 3A is electrically connected to the first electrode 2A. The opposite side of the first thermoelectric conversion layer 3A to the substrate 1 side is electrically connected to the third electrode 4A and the second connection portion 5B.

[0028] When the first thermoelectric conversion element 10A is a thermoelectric power generation element, the first thermoelectric conversion layer 3A generates electricity due to a temperature difference between the substrate 1 side of the first thermoelectric conversion layer 3A and the side of the first thermoelectric conversion element 10A opposite to the substrate 1 side. The temperature difference can be generated by bringing a high-temperature heat medium into contact with one surface of the thermoelectric conversion device 100 (for example, the surface on the substrate 1 side) and cooling the opposite surface (for example, the surface opposite to the substrate 1 side).

[0029] The first thermoelectric conversion layer 3A contains a thermoelectric conversion material. The first thermoelectric conversion layer 3A is preferably mainly made of a thermoelectric conversion material. 95 wt% to 100 wt% of the first thermoelectric conversion layer 3A is preferably made of a thermoelectric conversion material. The first thermoelectric conversion layer 3A is preferably made of a thermoelectric conversion material. The first thermoelectric conversion layer 3A is not particularly limited to a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS), a thiophene-based polycyclic aromatic compound, a bismuth-tellurium compound, or a skutterudite compound. 95 wt% to 100 wt% of the first thermoelectric conversion layer 3A is preferably made of a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) or a thiophene-based polycyclic aromatic compound. Preferably, 95 wt % to 100 wt % of the first thermoelectric conversion layer 3A is a dispersion of polyethylenedioxythiophene and polystyrene sulfonic acid (PEDOT:PSS).

[0030] The thickness of the first thermoelectric conversion layer 3A is preferably 0.1 μm or more and 1000 μm or less, and more preferably 1 μm or more and 100 μm or less. The thickness of the first thermoelectric conversion layer 3A is the thickness in the first direction X. With regard to the thickness of the first thermoelectric conversion layer 3A, the length of the first thermoelectric conversion layer 3A in the second direction Y and the length of the first thermoelectric conversion layer 3A in the third direction Z are not taken into consideration.

[0031] The thermal conductivity [W / (m·K)] of the first thermoelectric conversion layer 3A is preferably 0.1 [W / (m·K)] or more and 2 [W / (m·K)] or less.

[0032] The volume of the first thermoelectric conversion layer 3A is preferably 0.01 times or more and 10000 times or less, and more preferably 0.1 times or more and 100 times or less, the volume of the first electrode 2A.

[0033] The first thermoelectric conversion layer 3A preferably has a rectangular parallelepiped shape. The first thermoelectric conversion layer 3A is preferably (substantially) hexahedral. The surface of the first thermoelectric conversion layer 3A may have minute irregularities whose height is 0.0001 to 0.01 times the thickness of the first thermoelectric conversion layer 3A.

[0034] When the first thermoelectric conversion layer 3A and the second connection portion 5B are in direct contact with each other, the boundary between the first thermoelectric conversion layer 3A and the second connection portion 5B is defined as the position where the side surface of the first thermoelectric conversion layer 3A facing the second connection portion 5B extends in the first direction X. When a crystal interface is not observed at the boundary between the first thermoelectric conversion layer 3A and the second connection portion 5B because the first thermoelectric conversion layer 3A and the second connection portion 5B are made of the same thermoelectric conversion material, the boundary between the first thermoelectric conversion layer 3A and the second connection portion 5B is defined as the position where the side surface of the first thermoelectric conversion layer 3A facing the second connection portion 5B extends in the first direction X.

[0035] The third electrode 4A is provided on the surface of the first thermoelectric conversion layer 3A opposite to the first electrode 2A side. The third electrode 4A and the first electrode 2A are not in direct contact. The third electrode 4A is electrically connected to the first thermoelectric conversion layer 3A and the second connection portion 5B. It is preferable that the surface of the third electrode 4A facing the substrate 1 is in direct contact with the first thermoelectric conversion layer 3A. If the first thermoelectric conversion layer 3A and the second connection portion 5B are in direct contact, the third electrode 4A can be omitted.

[0036] The third electrode 4A is preferably made of one or more metals selected from the group consisting of Cu, Ag, Al, etc. The one or more metals selected from the group consisting of Cu, Ag, Al, etc. include alloys.

[0037] The third electrode 4A is preferably in ohmic contact with the first thermoelectric conversion layer 3A and the second connection portion 5B.

[0038] The thickness of the third electrode 4A is preferably 100 nm or more and 10,000 nm or less, and more preferably 1,000 nm or more and 5,000 nm or less. The thickness of the first electrode 2A is, for example, the distance between the surface of the first thermoelectric conversion layer 3A facing the substrate 1 and the surface of the substrate 1 facing the first thermoelectric conversion layer 3A.

[0039] The third electrode 4A is preferably a flat plate-like member. The third electrode 4A may have minute irregularities on its surface, but preferably does not include a step that is 1 / 10 or more of the thickness of the third electrode 4A. The third electrode 4A is preferably a flat plate-like member that is neither L-shaped nor stepped.

[0040] The surface of the third electrode 4A facing the first thermoelectric conversion layer 3A is preferably a flat or approximately flat surface.

[0041] The surface of the third electrode 4A facing the opposite side to the first thermoelectric conversion layer 3A is preferably a flat or approximately flat surface.

[0042] The surface of the third electrode 4A facing the first thermoelectric conversion layer 3A and the surface of the third electrode 4A opposite to the first thermoelectric conversion layer 3A side preferably have the same or substantially the same shape. The shape of the surface of the third electrode 4A facing the first thermoelectric conversion layer 3A and the shape of the surface of the third electrode 4A opposite to the first thermoelectric conversion layer 3A side preferably are similar or substantially similar.

[0043] The thermal conductivity [W / (m·K)] of the third electrode 4A is preferably 100 [W / (m·K)] or more and 450 [W / (m·K)] or less.

[0044] The second thermoelectric conversion element 10B is provided on the substrate 1. The second thermoelectric conversion element 10B is a thermoelectric power generation element or a Peltier element.

[0045] The second thermoelectric conversion element 10B includes a fourth electrode 2B, a second thermoelectric conversion layer 3B, and a second electrode 4B. The fourth electrode 2B is provided on the substrate 1 side of the second thermoelectric conversion element 10B. The second electrode 4B is provided on the side of the second thermoelectric conversion element 10B opposite to the substrate 1 side. The second thermoelectric conversion layer 3B is provided between the fourth electrode 2B and the second electrode 4B. The fourth electrode 2B, the second thermoelectric conversion layer 3B, and the second electrode 4B are aligned in the first direction X.

[0046] The fourth electrode 2B is provided between the substrate 1 and the second thermoelectric conversion layer 3B. The fourth electrode 2B is electrically insulated from the substrate 1 and the covering portion 6. The fourth electrode 2B is electrically connected to the second thermoelectric conversion layer 3B and the first connecting portion 5A. The fourth electrode 2B is preferably in direct contact with the second thermoelectric conversion layer 3B and the first connecting portion 5A. A member with high thermal conductivity (not shown) may be provided between the fourth electrode 2B and the substrate 1. The fourth electrode 2B can be used as an external (output) terminal. The fourth electrode 2B can be connected to an external (output) terminal (not shown).

[0047] The fourth electrode 2B is a conductive member containing one or more thermoelectric conversion materials selected from the group consisting of one or more metals or alloys selected from the group consisting of Cu, Ag, Al, etc. The fourth electrode 2B preferably contains one or more metals selected from the group consisting of Cu, Ag, Al, etc. The fourth electrode 2B is preferably made of one or more metals selected from the group consisting of Cu, Ag, Al, etc. The one or more metals selected from the group consisting of Cu, Ag, Al, etc. include alloys.

[0048] The thickness of the fourth electrode 2B is preferably 100 nm or more and 10,000 nm or less, and more preferably 1,000 nm or more and 5,000 nm or less. The thickness of the fourth electrode 2B is the thickness in the first direction X, and is, for example, the distance between the surface of the second thermoelectric conversion layer 3B facing the substrate 1 and the surface of the substrate 1 facing the second thermoelectric conversion layer 3B. The thickness of the fourth electrode 2B is preferably 0.0001 to 100 times the length of the first connection portion 5A in the first direction X, and is preferably 0.0001 to 100 times the thickness of the first thermoelectric conversion layer 3A.

[0049] The fourth electrode 2B is preferably a flat plate-like member. The fourth electrode 2B may have minute irregularities on its surface, but preferably does not include a step that is 1 / 10 or more of the thickness of the fourth electrode 2B. The fourth electrode 2B is preferably a flat plate-like member that is neither L-shaped nor stepped.

[0050] The surface of the fourth electrode 2B facing the substrate 1 is preferably a flat or substantially flat surface.

[0051] The surface of the fourth electrode 2B facing away from the substrate 1 is preferably a flat or approximately flat surface.

[0052] The surface of fourth electrode 2B facing substrate 1 and the surface of fourth electrode 2B facing second thermoelectric conversion layer 3B (the surface opposite to substrate 1) preferably have the same or approximately the same shape. The shape of the surface of fourth electrode 2B facing substrate 1 and the shape of the surface of fourth electrode 2B facing second thermoelectric conversion layer 3B (the surface opposite to substrate 1) preferably are similar or approximately similar.

[0053] It is preferable that there be no protrusions between the substrate 1 and the fourth electrode 2B that would cause the shape of the fourth electrode 2B to become non-flat (for example, protrusions that cause the fourth electrode 2B to deform into an L-shape or protrusions that cause the fourth electrode 2B to deform into a staircase shape). If a member (not shown) is provided between the substrate 1 and the fourth electrode 2B, it is preferable that the member provided between the substrate 1 and the fourth electrode 2B be a flat member so that no protrusions are formed on the fourth electrode 2B.

[0054] The thermal conductivity [W / (m·K)] of fourth electrode 2B is preferably 100 [W / (m·K)] or more and 450 [W / (m·K)] or less. When fourth electrode 2B contains one or more metals selected from the group consisting of Cu, Ag, Al, etc., the thermal conductivity [W / (m·K)] of fourth electrode 2B is preferably 200 [W / (m·K)] or more and 450 [W / (m·K)] or less.

[0055] The second thermoelectric conversion layer 3B is provided between the fourth electrode 2B and the second electrode 4B. The second thermoelectric conversion layer 3B is a semiconductor layer having the Seebeck effect. The substrate 1 side of the second thermoelectric conversion layer 3B is electrically connected to the fourth electrode 2B. The opposite side of the second thermoelectric conversion layer 3B to the substrate 1 side is electrically connected to the second electrode 4B and the first connection portion 5A.

[0056] When the second thermoelectric conversion element 10B is a thermoelectric power generating element, the second thermoelectric conversion layer 3B generates electricity due to the temperature difference between the substrate 1 side of the second thermoelectric conversion layer 3B and the side of the second thermoelectric conversion element 10B opposite to the substrate 1 side. When the second thermoelectric conversion element 10B is a thermoelectric power generating element, it is preferable that the first thermoelectric conversion element 10A is also a thermoelectric power generating element.

[0057] The second thermoelectric conversion layer 3B includes a thermoelectric conversion material. The second thermoelectric conversion layer 3B is preferably mainly composed of a thermoelectric conversion material. Preferably, 95 wt% to 100 wt% of the second thermoelectric conversion layer 3B is a thermoelectric conversion material. The second thermoelectric conversion layer 3B is preferably composed of a thermoelectric conversion material. The second thermoelectric conversion layer 3B is not particularly limited to a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS), a thiophene-based polycyclic aromatic compound, a bismuth-tellurium compound, or a skutterudite compound. Preferably, 95 wt% to 100 wt% of the second thermoelectric conversion layer 3B is a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) or a thiophene-based polycyclic aromatic compound. Preferably, 95 wt % to 100 wt % of the second thermoelectric conversion layer 3B is a dispersion of polyethylenedioxythiophene and polystyrene sulfonic acid (PEDOT:PSS).

[0058] The thickness of the second thermoelectric conversion layer 3B is preferably 0.1 μm or more and 1000 μm or less, and more preferably 1 μm or more and 100 μm or less. The thickness of the second thermoelectric conversion layer 3B is the thickness in the first direction X. With regard to the thickness of the second thermoelectric conversion layer 3B, the length of the second thermoelectric conversion layer 3B in the second direction Y and the length of the second thermoelectric conversion layer 3B in the third direction Z are not taken into consideration.

[0059] The thermal conductivity [W / (m·K)] of the second thermoelectric conversion layer 3B is preferably 0.1 [W / (m·K)] or more and 2 [W / (m·K)] or less.

[0060] The volume of the second thermoelectric conversion layer 3B is preferably 0.01 to 10,000 times, and more preferably 0.1 to 100 times, the volume of the fourth electrode 2B.

[0061] The second thermoelectric conversion layer 3B preferably has a rectangular parallelepiped shape. The second thermoelectric conversion layer 3B is preferably (substantially) hexahedral. The surface of the second thermoelectric conversion layer 3B may have minute irregularities whose height is 0.0001 to 0.01 times the thickness of the second thermoelectric conversion layer 3B.

[0062] When the second thermoelectric conversion layer 3B and the first connecting portion 5A are in direct contact with each other, the boundary between the second thermoelectric conversion layer 3B and the first connecting portion 5A is defined as a position where the side surface of the second thermoelectric conversion layer 3B facing the first connecting portion 5A extends in the first direction X. When a crystal interface is not observed at the boundary between the second thermoelectric conversion layer 3B and the first connecting portion 5A because the second thermoelectric conversion layer 3B and the first connecting portion 5A are made of the same thermoelectric conversion material, the boundary between the second thermoelectric conversion layer 3B and the first connecting portion 5A is defined as a position where the side surface of the second thermoelectric conversion layer 3B facing the first connecting portion 5A extends in the first direction X.

[0063] The second electrode 4B is provided on the surface of the second thermoelectric conversion layer 3B opposite to the fourth electrode 2B side. The second electrode 4B and the fourth electrode 2B are not in direct contact. It is preferable that the surface of the second electrode 4B facing the substrate 1 is in direct contact with the second thermoelectric conversion layer 3B. If the second thermoelectric conversion layer 3B and the first connection portion 5A are in direct contact, the second electrode 4B can be omitted.

[0064] The second electrode 4B is preferably made of one or more metals selected from the group consisting of Cu, Ag, Al, etc. The one or more metals selected from the group consisting of Cu, Ag, Al, etc. include alloys.

[0065] The second electrode 4B is preferably in ohmic contact with the second thermoelectric conversion layer 3B and the first connection portion 5A.

[0066] The thickness of the second electrode 4B is preferably 100 nm or more and 10,000 nm or less, and more preferably 1,000 nm or more and 5,000 nm or less. The thickness of the fourth electrode 2B is, for example, the distance between the surface of the second thermoelectric conversion layer 3B facing the substrate 1 and the surface of the substrate 1 facing the second thermoelectric conversion layer 3B.

[0067] The second electrode 4B is preferably a flat plate-like member. The second electrode 4B may have minute irregularities on its surface, but preferably does not include a step that is 1 / 10 or more of the thickness of the second electrode 4B. The second electrode 4B is preferably a flat plate-like member that is neither L-shaped nor stepped.

[0068] The surface of the second electrode 4B facing the second thermoelectric conversion layer 3B is preferably a flat or approximately flat surface.

[0069] The surface of the second electrode 4B facing the opposite side to the second thermoelectric conversion layer 3B is preferably a flat or approximately flat surface.

[0070] The surface of the second electrode 4B facing the second thermoelectric conversion layer 3B and the surface of the second electrode 4B opposite to the second thermoelectric conversion layer 3B side preferably have the same or approximately the same shape.The shape of the surface of the second electrode 4B facing the second thermoelectric conversion layer 3B and the shape of the surface of the second electrode 4B opposite to the second thermoelectric conversion layer 3B side preferably are similar or approximately similar.

[0071] The thermal conductivity [W / (m·K)] of second electrode 4B is preferably 100 [W / (m·K)] or more and 450 [W / (m·K)] or less.

[0072] The fifth electrode 2C is provided between the substrate 1 and the second thermoelectric conversion layer 3B. The fifth electrode 2C is electrically insulated from the substrate 1 and the covering portion 6. The fifth electrode 2C is electrically connected to the first thermoelectric conversion layer 3A and the second connecting portion 5B. The fifth electrode 2C is preferably in direct contact with the first thermoelectric conversion layer 3A and the second connecting portion 5B. A member with high thermal conductivity (not shown) may be provided between the fifth electrode 2C and the substrate 1. The fifth electrode 2C can be used as an external (output) terminal. The fifth electrode 2C can be connected to an external (output) terminal (not shown).

[0073] The fifth electrode 2C is a conductive member containing one or more thermoelectric conversion materials selected from the group consisting of one or more metals selected from the group consisting of Cu, Ag, Al, etc., or alloys containing one or more metals selected from the group consisting of Cu, Ag, Al, etc. The fifth electrode 2C preferably contains one or more metals selected from the group consisting of Cu, Ag, Al, etc. The fifth electrode 2C is preferably composed of one or more metals selected from the group consisting of Cu, Ag, Al, etc. The one or more metals selected from the group consisting of Cu, Ag, Al, etc. include alloys.

[0074] The thickness of the fifth electrode 2C is the thickness in the first direction X. The thickness of the fifth electrode 2C is preferably 100 nm or more and 1,000,000 nm or less, and more preferably 1,000 nm or more and 100,000 nm or less.

[0075] The fifth electrode 2C is preferably a flat plate-like member. The fifth electrode 2C may have minute irregularities on its surface, but preferably does not include a step that is 1 / 10 or more of the thickness of the fifth electrode 2C. The fifth electrode 2C is preferably a flat plate-like member that is neither L-shaped nor stepped.

[0076] The surface of the fifth electrode 2C facing the substrate 1 is preferably a flat or substantially flat surface.

[0077] The surface of the fifth electrode 2C facing the opposite side to the substrate 1 is preferably a flat or approximately flat surface.

[0078] It is preferable that the surface of fifth electrode 2C facing substrate 1 and the surface of fifth electrode 2C opposite to substrate 1 have the same or approximately the same shape. It is preferable that the shape of the surface of fifth electrode 2C facing substrate 1 and the shape of the surface of fifth electrode 2C opposite to substrate 1 are similar or approximately similar.

[0079] It is preferable that there be no protrusions between the substrate 1 and the fifth electrode 2C that would cause the shape of the fifth electrode 2C to become non-flat (for example, protrusions that cause the fifth electrode 2C to deform into an L-shape or protrusions that cause the fifth electrode 2C to deform into a staircase shape). If a member (not shown) is provided between the substrate 1 and the fifth electrode 2C, it is preferable that the member provided between the substrate 1 and the fifth electrode 2C be a flat member so that no protrusions are formed on the fifth electrode 2C.

[0080] The thermal conductivity [W / (m·K)] of fifth electrode 2C is preferably 100 [W / (m·K)] or more and 450 [W / (m·K)] or less. When fifth electrode 2C contains one or more metals selected from the group consisting of Cu, Ag, Al, etc., the thermal conductivity [W / (m·K)] of fifth electrode 2C is preferably 200 [W / (m·K)] or more and 450 [W / (m·K)] or less.

[0081] The first connection portion 5A is provided between the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B. The first connection portion 5A is wiring that electrically connects the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B. The first connection portion 5A electrically connects the substrate 1 side of the first thermoelectric conversion layer 3A to the side of the second thermoelectric conversion layer 3B opposite to the substrate 1 side.

[0082] The first connection portion 5A extends at least in the first direction X. The first connection portion 5A in FIG. 1 also extends in the second direction Y. The length of the first connection portion 5A in the first direction X is equal to or greater than the distance in the first direction X from the surface of the first thermoelectric conversion layer 3A facing the substrate 1 to the surface of the second thermoelectric conversion layer 3B on the opposite side from the substrate 1. It is preferable that the length of the first connection portion 5A in the first direction X is the distance in the first direction X from the surface of the first thermoelectric conversion layer 3A facing the substrate 1 to the surface of the second thermoelectric conversion layer 3B opposite the substrate 1 side, or that the length of the first connection portion 5A in the first direction X is at least the distance in the first direction X from the surface of the first thermoelectric conversion layer 3A facing the substrate 1 to the surface of the second thermoelectric conversion layer 3B opposite the substrate 1 side, and is at most the distance in the first direction X from the surface of the first thermoelectric conversion element 10A facing the substrate 1 side (for example, the surface of the first electrode 2A facing the substrate 1) to the surface of the second thermoelectric conversion element 10B opposite the substrate 1 side (the surface of the second electrode 4B opposite the substrate 1 side).

[0083] The first connection portion 5A extends from the high temperature side of the thermoelectric converter 100 (for example, the substrate 1 side or the opposite side) to the low temperature side (for example, the opposite side to the substrate 1 side or the opposite side).

[0084] The first connection portion 5A can be in direct contact with the second thermoelectric conversion layer 3B. The side of the first connection portion 5A opposite to the substrate 1 side can be in direct contact with the second electrode 4B and / or the second thermoelectric conversion layer 3B.

[0085] When the first connection portion 5A is in direct contact with the second electrode 4B and the second thermoelectric conversion layer 3B, the area of ​​direct contact between the second electrode 4B and the second thermoelectric conversion layer 3B is preferably 1,000 to 50,000 times the area of ​​direct contact between the second thermoelectric conversion layer 3B and the first connection portion 5A, more preferably 2,500 to 25,000 times, and even more preferably 3,000 to 10,000 times.

[0086] When the first connection portion 5A is in direct contact with the second thermoelectric conversion layer 3B, the area of ​​direct contact between the first connection portion 5A and the second thermoelectric conversion layer 3B is preferably 1,000 to 50,000 times the area of ​​the side surface of the second thermoelectric conversion layer 3B facing the first thermoelectric conversion element 10A, more preferably 2,500 to 25,000 times, and even more preferably 3,000 to 10,000 times.

[0087] When the first connection portion 5A and the second thermoelectric conversion layer 3B are in direct contact with each other, the position where the first connection portion 5A and the second thermoelectric conversion layer 3B are in contact will be described. The height of the second thermoelectric conversion layer 3B (the length of the second thermoelectric conversion layer 3B in the first direction X) is defined as L. 3B The position where the first connection portion 5A and the second thermoelectric conversion layer 3B are in contact is 0.10L in the first direction X from the upper end (the end on the opposite side from the substrate 1 side) of the second thermoelectric conversion layer 3B to the substrate 1 side. 3B The position where the first connection portion 5A and the second thermoelectric conversion layer 3B are in contact is preferably within a range of 0.05L in the first direction X on the substrate 1 side from the upper end (the end on the opposite side from the substrate 1 side) of the second thermoelectric conversion layer 3B. 3BThe position where the first connection portion 5A and the second thermoelectric conversion layer 3B are in contact is preferably within a range of 0.03L in the first direction X on the substrate 1 side from the upper end (the end on the opposite side from the substrate 1 side) of the second thermoelectric conversion layer 3B. 3B It is even more preferable that the distance is in the range up to the position of .

[0088] The first connecting portion 5A includes a thermoelectric conversion material. Preferably, the first connecting portion 5A is mainly composed of a thermoelectric conversion material. Preferably, 95 wt% to 100 wt% of the first connecting portion 5A is a thermoelectric conversion material. Preferably, the first connecting portion 5A is composed of a thermoelectric conversion material. The first connecting portion 5A is not particularly limited to a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS), a thiophene-based polycyclic aromatic compound, a bismuth-tellurium compound, or a skutterudite compound. Preferably, 95 wt% to 100 wt% of the first connecting portion 5A is a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) or a thiophene-based polycyclic aromatic compound. Preferably, 95 wt% to 100 wt% of the first connecting portion 5A is a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS).

[0089] The metal (metal element connected by a metallic bond) contained in the first connection portion 5A is preferably 0 [wt%] or more and 5 [wt%] or less, more preferably 0 [wt%] or more and 3 [wt%] or less, and even more preferably 0 [wt%] (metal is allowed as an unavoidable impurity).

[0090] The volume of the first connecting portion 5A is preferably 0.01 to 25 times the volume of the first thermoelectric conversion layer 3A, and 0.01 to 25 times the volume of the second thermoelectric conversion layer 3B. Since the volume of the first connecting portion 5A is smaller than the volumes of the first thermoelectric conversion layer 3A and the second thermoelectric conversion layer 3B, the amount of heat transferred via the first connecting portion 5A connecting the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B can be reduced. From this viewpoint, the volume of the first connecting portion 5A is more preferably 0.2 to 5 times the volume of the first thermoelectric conversion layer 3A, and 0.2 to 5 times the volume of the second thermoelectric conversion layer 3B. From the same viewpoint, it is even more preferable that the volume of the first connection portion 5A is 0.5 to 1 times the volume of the first thermoelectric conversion layer 3A, and that the volume of the first connection portion 5A is 0.5 to 1 times the volume of the second thermoelectric conversion layer 3B.

[0091] When the first connection portion 5A is in direct contact with the first electrode 2A, the area of ​​direct contact between the first electrode 2A and the first thermoelectric conversion layer 3A is preferably 0.01 to 25 times the area of ​​direct contact between the first electrode 2A and the first connection portion 5A, more preferably 0.01 to 25 times, and even more preferably 0.05 to 5 times.

[0092] It is preferable that the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B are connected only by the first connection portion 5A.

[0093] The wiring that connects the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B and extends in the first direction X is preferably made up of only the first connection portion 5A.

[0094] It is preferable that the wiring including the portion extending in the first direction X that connects the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B is composed only of the first connection portion 5A. Note that in the embodiment, for example, a member that extends in the YZ plane in the figure and whose thickness direction is in the first direction X is not considered to be wiring that connects the thermoelectric conversion elements.

[0095] The second connection portion 5B is provided between the fifth electrode 5C and the first thermoelectric conversion element 10A. The second connection portion 5B is a wiring that electrically connects the fifth electrode 2C and the first thermoelectric conversion element 10A. The second connection portion 5B electrically connects the substrate 1 side of the fifth electrode 2C to the side of the first thermoelectric conversion layer 3A opposite to the substrate 1 side.

[0096] The second connection portion 5B extends at least in the first direction X. The second connection portion 5B in FIG. 1 also extends in the second direction Y. The length of the second connection portion 5B in the first direction X is equal to or greater than the distance in the first direction X from the surface of the fifth electrode 2C facing the substrate 1 to the surface of the first thermoelectric conversion layer 3A opposite to the substrate 1 side. Preferably, the length of the second connection portion 5B in the first direction X is equal to or greater than the distance in the first direction X from the surface of the fifth electrode 5C facing the substrate 1 to the surface of the first thermoelectric conversion layer 3A opposite to the substrate 1 side, or the length of the second connection portion 5B in the first direction X is equal to or greater than the distance in the first direction X from the surface of the fifth electrode 5C facing the substrate 1 to the surface of the first thermoelectric conversion layer 3A opposite to the substrate 1 side, but is equal to or less than the distance in the first direction X from the surface of the fifth electrode 2C facing the substrate 1 to the surface of the first thermoelectric conversion element 10A opposite to the substrate 1 side (the surface of the third electrode 4A opposite to the substrate 1 side).

[0097] The second connection portion 5B extends from the high temperature side of the thermoelectric converter 100 (for example, the substrate 1 side or the opposite side) to the low temperature side (for example, the opposite side to the substrate 1 side or the opposite side).

[0098] The second connection portion 5B can be in direct contact with the first thermoelectric conversion layer 3A. The side of the second connection portion 5B opposite to the substrate 1 side can be in direct contact with the third electrode 4A and / or the first thermoelectric conversion layer 3A.

[0099] When the second connection portion 5B is in direct contact with the first thermoelectric conversion layer 3A, the area of ​​direct contact between the first connection portion 5A and the first thermoelectric conversion layer 3A is preferably 1,000 to 50,000 times the area of ​​the side surface of the first thermoelectric conversion layer 3A facing the second thermoelectric conversion element 10B, more preferably 2,500 to 25,000 times, and even more preferably 3,000 to 10,000 times.

[0100] When the second connection portion 5B and the first thermoelectric conversion layer 3A are in direct contact with each other, the position where the second connection portion 5B and the first thermoelectric conversion layer 3A are in contact will be described. The height of the first thermoelectric conversion layer 3A (the length of the first thermoelectric conversion layer 3A in the first direction X) is defined as L 3A The position where the second connection portion 5B and the first thermoelectric conversion layer 3A are in contact is 0.10L in the first direction X from the upper end (the end on the opposite side from the substrate 1 side) of the first thermoelectric conversion layer 3A to the substrate 1 side. 3A The position where the second connection portion 5B and the first thermoelectric conversion layer 3A are in contact is preferably within a range of 0.05L in the first direction X toward the substrate 1 from the upper end (the end on the opposite side from the substrate 1 side) of the first thermoelectric conversion layer 3A. 3A The position where the second connection portion 5B and the first thermoelectric conversion layer 3A are in contact is preferably within a range of 0.03L in the first direction X from the upper end (the end on the opposite side from the substrate 1 side) of the first thermoelectric conversion layer 3A to the substrate 1 side. 3A It is even more preferable that the distance is in the range up to the position of .

[0101] The second connecting portion 5B includes a thermoelectric conversion material. Preferably, the second connecting portion 5B is mainly composed of a thermoelectric conversion material. Preferably, 95 wt% to 100 wt% of the second connecting portion 5B is a thermoelectric conversion material. Preferably, the second connecting portion 5B is composed of a thermoelectric conversion material. The second connecting portion 5B is not particularly limited to a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS), a thiophene-based polycyclic aromatic compound, a bismuth-tellurium compound, or a skutterudite compound. Preferably, 95 wt% to 100 wt% of the second connecting portion 5B is a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS) or a thiophene-based polycyclic aromatic compound. Preferably, 95 wt% to 100 wt% of the second connecting portion 5B is a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid (PEDOT:PSS).

[0102] The metal contained in the second connection portion 5B (metal element connected by a metallic bond) is preferably 0 [wt%] or more and 5 [wt%] or less, more preferably 0 [wt%] or more and 3 [wt%] or less, and even more preferably 0 [wt%] (metal is allowed as an unavoidable impurity).

[0103] The volume of the second connecting portion 5B is preferably 0.01 to 25 times the volume of the first thermoelectric conversion layer 3A, and 0.01 to 25 times the volume of the second thermoelectric conversion layer 3B. Since the volume of the second connecting portion 5B is smaller than the volumes of the first thermoelectric conversion layer 3A and the second thermoelectric conversion layer 3B, the amount of heat transferred to the first thermoelectric conversion element 10A via the second connecting portion 5B can be reduced. From this viewpoint, the volume of the second connecting portion 5B is more preferably 0.2 to 5 times the volume of the first thermoelectric conversion layer 3A, and 0.2 to 5 times the volume of the second thermoelectric conversion layer 3B. From the same viewpoint, it is preferable that the volume of the second connection portion 5B is 0.5 to 1 times the volume of the first thermoelectric conversion layer 3A, and it is even more preferable that the volume of the second connection portion 5B is 0.5 to 1 times the volume of the second thermoelectric conversion layer 3B.

[0104] The covering portion 6 covers the first connecting portion 5A and the second connecting portion 5B. The covering portion 6 is insulating. The covering portion 6 preferably covers the first connecting portion 5A except for the portion where the first connecting portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B. The covering portion 6 preferably covers the entire surface of the first connecting portion 5A except for the portion where the first connecting portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B. The covering portion 6 preferably covers the second connecting portion 5B except for the portion where the second connecting portion 5B is connected to the first thermoelectric conversion element 10A and the fifth electrode 2C. The covering portion 6 preferably covers the entire surface of the second connecting portion 5B except for the portion where the second connecting portion 5B is connected to the first thermoelectric conversion element 10A and the fifth electrode 2C.

[0105] It is preferable that the first thermoelectric conversion element 10A and the fifth electrode 2C are connected only by the second connection portion 5B.

[0106] The wiring that connects the first thermoelectric conversion element 10A and the fifth electrode 2C and extends in the first direction X is preferably made up of only the second connection portion 5B.

[0107] The wiring including the portion that connects the first thermoelectric conversion element 10A and the fifth electrode 5C and extends in the first direction X is preferably composed of only the second connection portion 5B.

[0108] The thermal conductivity of the covering 6 is preferably lower than that of the first connecting portion 5A. If the thermal conductivity of the covering 6 is lower than that of the first connecting portion 5A, the temperature difference between the substrate 1 side of the first connecting portion 5A and the side opposite to the substrate 1 side of the first connecting portion 5A is reduced. Reducing the temperature difference in the first connecting portion 5A can prevent a current from flowing in the opposite direction to the current generated by the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B from occurring in the first connecting portion 5A. Reducing the temperature difference in the first connecting portion 5A contributes to improving the efficiency of the thermoelectric conversion device 100.

[0109] From the viewpoint of reducing the temperature difference between the substrate 1 side of the first connecting portion 5A and the side opposite to the substrate 1 side of the first connecting portion 5A, it is preferable that 90 vol% to 100 vol% of the gap (the gap does not include the first connecting portion 5A) between the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B is filled with the covering portion 6, more preferably 95 vol% to 100 vol% and even more preferably 98 vol% to 100 vol%. It is preferable that the entire gap between the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B is filled with the covering portion 6.

[0110] The thermal conductivity [W / (m·K)] of the covering portion 6 is preferably 0.01 [W / (m·K)] or more and 1.5 [W / (m·K)] or less, and more preferably 0.01 [W / (m·K)] or more and 0.5 [W / (m·K)] or less.

[0111] The coating 6 preferably contains at least one resin selected from the group consisting of epoxy resins, phenol resins, polyimide resins, polyamide resins, acrylic resins, polybenzoxazole resins, silicone resins, and benzocyclobutene resins. Examples of epoxy resins include, but are not limited to, bisphenol-type epoxy resins such as bisphenol A, bisphenol F, bisphenol AD, and bisphenol S; novolac-type epoxy resins such as phenol novolac and cresol novolac; resorcinol-type epoxy resins; aromatic epoxy resins such as trisphenolmethane triglycidyl ether; naphthalene-type epoxy resins; fluorene-type epoxy resins; dicyclopentadiene-type epoxy resins; polyether-modified epoxy resins; benzophenone-type epoxy resins; aniline-type epoxy resins; NBR-modified epoxy resins; CTBN-modified epoxy resins; and hydrogenated versions of these.

[0112] The covering portion 6 may contain an insulating filler having a thermal conductivity [W / (m·K)] of 0.01 [W / (m·K)] or more and 1.5 [W / (m·K)] or less. The insulating filler is, for example, an inorganic filler.

[0113] Next, the relationship between the thermal conductivities [W / (m·K)] of the first electrode 2A, the first connecting portion 5A, and the covering portion 6 will be described. From the viewpoint of reducing the temperature difference between the substrate 1 side of the first connecting portion 5A and the opposite side of the substrate 1 side, it is preferable that the thermal conductivity of the first electrode 2A, the thermal conductivity of the first thermoelectric conversion layer 3A, the thermal conductivity of the first connecting portion 5A, and the thermal conductivity of the covering portion 6 satisfy the following relationship: When the thermal conductivity [W / (m·K)] of the first electrode 2A is λ 2A The thermal conductivity [W / (m·K)] of the first thermoelectric conversion layer 3A is expressed as λ 3A The thermal conductivity [W / (m K)] of the first connecting portion 5A is expressed as λ 5A The thermal conductivity of the coating 6 [W / (m·K)] is expressed as λ6.

[0114] From the above perspective, λ 2A is λ 5A From the above viewpoint, λ is preferably 50 times or more and 4500 times or less. 2Ais λ 3A From the above viewpoint, λ is preferably 50 times or more and 4500 times or less. 5A is preferably 1 to 200 times λ6. 2A is preferably 66 times or more and 45,000 times or less than λ6.

[0115] From the viewpoint of reducing the difference in temperature between the substrate 1 side of the first connecting portion 5A and the opposite side of the substrate 1 side of the first connecting portion 5A, λ 5A From this perspective, it is effective to satisfy λ 5A >λ6 and preferably covers the entire surface of the first connecting portion 5A except for the portion where the first connecting portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B. 5A It is preferable that the thickness satisfies λ>λ6 and that the entire surface of the first connecting portion 5A is covered except for the portion where the first connecting portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B.

[0116] λ 2A , λ 5A and λ6 is λ 2A >λ 5A >λ6. From this viewpoint, the first electrode 2A is preferably a metal electrode containing one or more selected from the group consisting of Cu, Ag, and Al. From this viewpoint, when the first thermoelectric conversion layer 3A, the second thermoelectric conversion layer 3B, the first connecting portion 5A, and the second connecting portion 5B are made of the same thermoelectric conversion material, λ 2A >λ 5A It is preferable that the relationship of λ > λ6 is satisfied.

[0117] From the above perspective, λ 2A , λ 5A and λ6 is λ 2A >λ 5A >λ6, and λ 2A is λ 5A λ is preferably 50 times or more and 4500 times or less. 5A is preferably greater than 1 time and less than 200 times λ6, 2Ais preferably 66 times or more and 45,000 times or less than λ6.

[0118] From the above perspective, λ 2A , λ 5A and λ6 is λ 2A >λ 5A >λ6, and λ 2A is λ 5A More preferably, λ is 100 times or more and 2000 times or less. 5A is more preferably 2 times or more and 100 times or less than λ6, 2A is more preferably 200 times or more and 100,000 times or less than λ6.

[0119] From the above perspective, λ 2A , λ 5A and λ6 is λ 2A >λ 5A >λ6, and λ 2A is λ 5A It is even more preferable that λ is 200 times or more and 1000 times or less. 5A is even more preferably 4 times or more and 50 times or less than λ6, 2A is even more preferably 500 times or more and 1000 times or less than λ6.

[0120] In addition to the above relationship, λ 2A , λ 3A and λ6 is λ 2A >λ 3A It is preferable that the relationship of λ > λ6 is satisfied, or independently of the above relationship, λ 2A , λ 3A and λ6 is λ 2A >λ 3A It is preferable that the relationship of λ > λ6 is satisfied.

[0121] From the above perspective, λ 2A , λ 3A and λ6 is λ 2A >λ 3A >λ6, and λ 2A is λ 3A λ is preferably 50 times or more and 4500 times or less. 3Ais preferably more than 1 time and not more than 200 times λ6, 2A is preferably 66 times or more and 4500 times or less than λ6.

[0122] From the above perspective, λ 2A , λ 3A and λ6 is λ 2A >λ 3A >λ6, and λ 2A is λ 3A More preferably, λ is 100 times or more and 2000 times or less. 3A is more preferably 2 times or more and 100 times or less than λ6, 2A is more preferably 200 times or more and 10,000 times or less than λ6.

[0123] From the above perspective, λ 2A , λ 3A and λ6 is λ 2A >λ 3A >λ6, and λ 2A is λ 3A It is even more preferable that λ is 200 times or more and 1000 times or less. 3A is even more preferably 4 to 50 times λ6, 2A is even more preferably 500 times or more and 1000 times or less than λ6.

[0124] By satisfying the above relationship, it is possible to effectively reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference between the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 100.

[0125] Next, the thermal conductivity [W / (m·K)] of the second electrode 4B is calculated as λ 4B The thermal conductivity [W / (m·K)] of the second thermoelectric conversion layer 3B is expressed as λ 3B From the above viewpoint, λ 4B is λ 5A From the above viewpoint, λ is preferably 50 times or more and 4500 times or less. 4B is λ 3BIt is preferable that the concentration is 50 times or more and 4500 times or less.

[0126] λ 4B , λ 5A and λ6 is λ 4B >λ 5A >λ6. From this viewpoint, the second electrode 4B is preferably a metal electrode containing one or more selected from the group consisting of Cu, Ag, and Al. From this viewpoint, when the first thermoelectric conversion layer 3A, the second thermoelectric conversion layer 3B, the first connecting portion 5A, and the second connecting portion 5B are made of the same thermoelectric conversion material, λ 4B >λ 5A It is preferable that the relationship of λ > λ6 is satisfied.

[0127] From the above perspective, λ 4B , λ 5A and λ6 is λ 4B >λ 5A >λ6, and λ 4B is λ 5A λ is preferably 50 times or more and 4500 times or less. 5A is preferably more than 1 time and not more than 200 times λ6, 4B is preferably 66 times or more and 45,000 times or less than λ6.

[0128] From the above perspective, λ 4B , λ 5A and λ6 is λ 4B >λ 5A >λ6, and λ 4B is λ 5A More preferably, λ is 100 times or more and 2000 times or less. 5A is more preferably 2 times or more and 100 times or less than λ6, 4B is more preferably 200 times or more and 10,000 times or less than λ6.

[0129] From the above perspective, λ 4B , λ 5A and λ6 is λ 4B >λ 5A >λ6, and λ 4B is λ 5AIt is even more preferable that λ is 200 times or more and 1000 times or less. 5A is even more preferably 4 times or more and 50 times or less than λ6, 4B is even more preferably 500 times or more and 1000 times or less than λ6.

[0130] In addition to the above relationship, λ 4B , λ 3B and λ6 is λ 4B >λ 3B It is preferable that the relationship of λ > λ6 is satisfied, or independently of the above relationship, λ 4B , λ 3B and λ6 is λ 4B >λ 3B It is preferable that the relationship of λ > λ6 is satisfied.

[0131] From the above perspective, λ 4B , λ 3B and λ6 is λ 4B >λ 3B >λ6, and λ 4B is λ 3B λ is preferably 50 times or more and 4500 times or less. 3B is preferably more than 1 time and not more than 200 times λ6, 4B is preferably 66 times or more and 45,000 times or less than λ6.

[0132] From the above perspective, λ 4B , λ 3B and λ6 is λ 4B >λ 3B >λ6, and λ 4B is λ 3B More preferably, λ is 100 times or more and 2000 times or less. 3B is more preferably 2 times or more and 100 times or less than λ6, 4B is more preferably 200 times or more and 10,000 times or less than λ6.

[0133] From the above perspective, λ 4B , λ 3B and λ6 is λ 4B >λ 3B >λ6, and λ 4Bis λ 3B It is even more preferable that λ is 200 times or more and 1000 times or less. 3B is even more preferably 4 times or more and 50 times or less than λ6, 4B is even more preferably 500 times or more and 1000 times or less than λ6.

[0134] By satisfying the above relationship, it is possible to effectively reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference between the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 100.

[0135] Next, the thermoelectric conductivity [W / (m K)] of the third electrode 4A is calculated as λ 3B The thermal conductivity [W / (m·K)] of the second connecting portion 5B is expressed as λ 5B From the above viewpoint, λ 4A is λ 5B From the above viewpoint, λ is preferably 50 times or more and 4500 times or less. 4A is λ 3A From the above viewpoint, λ is preferably 50 times or more and 4500 times or less. 5B is preferably more than 1 time and not more than 200 times λ6. 4A is preferably 66 times or more and 45,000 times or less than λ6.

[0136] λ 4A , λ 5B and λ6 is λ 4A >λ 5B >λ6. From this viewpoint, the third electrode 4A is preferably a metal electrode containing one or more selected from the group consisting of Cu, Ag, and Al. From this viewpoint, when the first thermoelectric conversion layer 3A, the second thermoelectric conversion layer 3B, the first connecting portion 5A, and the second connecting portion 5B are made of the same thermoelectric conversion material, λ 4A >λ 5B It is preferable that the relationship of λ > λ6 is satisfied.

[0137] From the above perspective, λ 4A , λ 5B and λ6 is λ4A >λ 5B >λ6, and λ 4A is λ 5B λ is preferably 50 times or more and 4500 times or less. 5B is preferably more than 1 time and not more than 200 times λ6, 4A is preferably 66 times or more and 45,000 times or less than λ6.

[0138] From the above perspective, λ 4A , λ 5B and λ6 is λ 4A >λ 5B >λ6, and λ 4A is λ 5B More preferably, λ is 100 times or more and 2000 times or less. 5B is more preferably 2 times or more and 100 times or less than λ6, 4A is more preferably 200 times or more and 10,000 times or less than λ6.

[0139] From the above perspective, λ 4A , λ 5B and λ6 is λ 4A >λ 5B >λ6, and λ 4A is λ 5B It is even more preferable that λ is 200 times or more and 1000 times or less. 5B is even more preferably 4 times or more and 50 times or less than λ6, 4A is even more preferably 500 times or more and 1000 times or less than λ6.

[0140] In addition to the above relationship, λ 4A , λ 3A and λ6 is λ 4A >λ 3A It is preferable that the relationship of λ > λ6 is satisfied, or independently of the above relationship, λ 4A , λ 3A and λ6 is λ 4A >λ 3A It is preferable that the relationship of λ > λ6 is satisfied.

[0141] From the above perspective, λ 4A , λ3A and λ6 is λ 4A >λ 3A >λ6, and λ 4A is λ 3A λ is preferably 50 times or more and 4500 times or less. 3A is preferably more than 1 time and not more than 200 times λ6, 4A is preferably 66 times or more and 45,000 times or less than λ6.

[0142] From the above perspective, λ 4A , λ 3A and λ6 is λ 4A >λ 3A >λ6, and λ 4A is λ 3A More preferably, λ is 100 times or more and 2000 times or less. 3A is more preferably 2 times or more and 100 times or less than λ6, 4A is more preferably 200 times or more and 10,000 times or less than λ6.

[0143] From the above perspective, λ 4A , λ 3A and λ6 is λ 4A >λ 3A >λ6, and λ 4A is λ 3A It is even more preferable that λ is 200 times or more and 1000 times or less. 3A is even more preferably 4 times or more and 50 times or less than λ6, 4A is even more preferably 500 times or more and 1000 times or less than λ6.

[0144] By satisfying the above relationship, it is possible to effectively reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference between the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 100.

[0145] By satisfying the above relationship, it is possible to effectively reduce the difference in temperature between the second connecting portion 5B on the substrate 1 side and the temperature on the side of the second connecting portion 5B opposite to the substrate 1 side. Reducing the temperature difference between the second connecting portion 5B contributes to improving the efficiency of the thermoelectric converter 100.

[0146] Next, the thermoelectric conductivity [W / (m K)] of the fifth electrode 2C is calculated as λ 2C From the above viewpoint, λ 2C is λ 5B From the above viewpoint, λ is preferably 50 times or more and 4500 times or less. 2C is preferably 66 times or more and 45,000 times or less than λ6.

[0147] λ 2C , λ 5B and λ6 is λ 2C >λ 5B >λ6. From this viewpoint, the fifth electrode 2C is preferably a metal electrode containing one or more selected from the group consisting of Cu, Ag, and Al. From this viewpoint, when the first thermoelectric conversion layer 3A, the second thermoelectric conversion layer 3B, the first connecting portion 5A, and the second connecting portion 5B are made of the same thermoelectric conversion material, λ 2C >λ 5B It is preferable that the relationship of λ > λ6 is satisfied.

[0148] From the above perspective, λ 2C , λ 5B and λ6 is λ 2C >λ 5B >λ6, and λ 2C is λ 5B λ is preferably 50 times or more and 4500 times or less. 5B is preferably more than 1 time and not more than 200 times λ6, 2C is preferably 66 times or more and 45,000 times or less than λ6.

[0149] From the above perspective, λ 2C , λ 5B and λ6 is λ 2C >λ 5B >λ6, and λ 2C is λ 5BMore preferably, λ is 100 times or more and 2000 times or less. 5B is more preferably 2 times or more and 100 times or less than λ6, 2C is more preferably 200 times or more and 10,000 times or less than λ6.

[0150] From the above perspective, λ 2C , λ 5B and λ6 is λ 2C >λ 5B >λ6, and λ 2C is λ 5B It is even more preferable that λ is 200 times or more and 1000 times or less. 5B is even more preferably 4 times or more and 50 times or less than λ6, 2C is even more preferably 500 times or more and 1000 times or less than λ6.

[0151] By satisfying the above relationship, it is possible to effectively reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference between the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 100.

[0152] By satisfying the above relationship, it is possible to effectively reduce the difference in temperature between the second connecting portion 5B on the substrate 1 side and the temperature on the side of the second connecting portion 5B opposite to the substrate 1 side. Reducing the temperature difference between the second connecting portion 5B contributes to improving the efficiency of the thermoelectric converter 100.

[0153] (Second embodiment) The second embodiment relates to a thermoelectric converter. Fig. 3 shows a thermoelectric converter 101 of the second embodiment. The thermoelectric converter 101 of the second embodiment is a modified example of the thermoelectric converter 100 of the first embodiment. Descriptions of the contents common to the first and second embodiments will be omitted. The description of the second embodiment can be applied to the other embodiments.

[0154] The thermoelectric converter 101 has an insulating layer 7. The insulating layer 7 is preferably made of ceramic or a resin including a synthetic resin. The insulating layer 7 is provided on the side of the thermoelectric converter 101 opposite to the substrate 1 side. The substrate 1 and the insulating layer 7 can also be used as a sealing material or an exterior material for the thermoelectric converter 101. The insulating layer 7 can also be considered as the substrate 1.

[0155] The first connection portion 5A is in direct contact with the first electrode 2A and the first thermoelectric conversion layer 3A. The first connection portion 5A can be in direct contact with the first electrode 2A and / or the first thermoelectric conversion layer 3A. The first connection portion 5A is in ohmic contact with the first thermoelectric conversion layer 3A. The first connection portion 5A can be bent over the first electrode 2A and be in contact with the first electrode 2A.

[0156] When the first connection portion 5A is in direct contact with the first electrode 2A and the first thermoelectric conversion layer 3A, the area of ​​direct contact between the first electrode 2A and the first thermoelectric conversion layer 3A is preferably 1,000 to 50,000 times the area of ​​direct contact between the first thermoelectric conversion layer 3A and the first connection portion 5A, more preferably 2,500 to 25,000 times, and even more preferably 3,000 to 10,000 times.

[0157] When the first connection portion 5A is in direct contact with the first thermoelectric conversion layer 3A, the area of ​​direct contact between the first connection portion 5A and the first thermoelectric conversion layer 3A is preferably 1,000 to 50,000 times the area of ​​the side surface of the first thermoelectric conversion layer 3A facing the second thermoelectric conversion element 10B, more preferably 2,500 to 25,000 times, and even more preferably 3,000 to 10,000 times.

[0158] When the first connecting portion 5A and the first thermoelectric conversion layer 3A are in direct contact with each other, the position where the first connecting portion 5A and the first thermoelectric conversion layer 3A are in contact will be described. The height of the first thermoelectric conversion layer 3A (the length of the first thermoelectric conversion layer 3A in the first direction X) is defined as L 3A The position where the first connection portion 5A and the first thermoelectric conversion layer 3A are in contact is 0.10L in the first direction X from the lower end (end on the substrate 1 side) of the first thermoelectric conversion layer 3A. 3AThe position where the first connection portion 5A and the first thermoelectric conversion layer 3A are in contact is preferably within a range of 0.05L in the first direction X from the lower end (end on the substrate 1 side) of the first thermoelectric conversion layer 3A. 3A The position where the first connection portion 5A and the first thermoelectric conversion layer 3A are in contact is preferably within a range of 0.03L in the first direction X from the lower end (end on the substrate 1 side) of the first thermoelectric conversion layer 3A. 3A It is preferable that the position is in the range up to the position of

[0159] The first connection portion 5A is in direct contact with the side surface of the second electrode 4B facing the first thermoelectric conversion element 10A. The end face of the first connection portion 5A opposite to the substrate 1 side is in contact with the insulating layer .

[0160] From the above viewpoint, it is preferable to cover the entire surface of the first connection portion 5A except for the portion where the first connection portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B and the portion where the first connection portion 5A is in contact with the insulating layer 7.

[0161] The second connection portion 5B is in direct contact with the fifth electrode 2C. The second connection portion 5B is bent over the fifth electrode 2C and can be in contact with the third electrode 4A.

[0162] The second connection portion 5B is in direct contact with the side surface of the third electrode 4A opposite to the second thermoelectric conversion element 10B side. The end face of the second connection portion 5B opposite to the substrate 1 side is in contact with the insulating layer 7.

[0163] From the above viewpoint, it is preferable to cover the entire surface of the first connecting portion 5A except for the portion in contact with the insulating layer 7, in addition to the portion where the first connecting portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B.

[0164] From the above viewpoint, it is preferable to cover the entire surface of the first connection portion 5A except for the portion in contact with the insulating layer 7, in addition to the portion where the second connection portion 5A is connected to the first thermoelectric conversion element 10A and the fifth electrode 2C.

[0165] The thermoelectric converter 101 of the second embodiment can also reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side of the first connecting portion 5A and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference at the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 101. Furthermore, reducing the temperature difference at the second connecting portion 5B also contributes to improving the efficiency of the thermoelectric converter 101.

[0166] (Third embodiment) The third embodiment relates to a thermoelectric converter. Fig. 4 shows a thermoelectric converter 102 of the third embodiment. The thermoelectric converter 102 of the third embodiment is a modified example of the thermoelectric converter 100 of the first embodiment and the thermoelectric converter 101 of the second embodiment. Descriptions common to the first, second, and third embodiments will be omitted. The description of the third embodiment can be applied to the other embodiments.

[0167] The first connection portion 5A is in direct contact with the first electrode 2A and the first thermoelectric conversion layer 3A. The first connection portion 5A can be in contact with the first electrode 2A and the first thermoelectric conversion layer 3A without bending on the first electrode 2A.

[0168] The side of the first connection portion 5A opposite to the substrate 1 side can be in direct contact with the second thermoelectric conversion layer 3B.

[0169] The width of the second electrode 4B (the length of the second electrode 4B in the second direction Y) can be set to be equal to or less than the width of the second thermoelectric conversion layer 3B (the length of the second thermoelectric conversion layer 3B in the second direction Y).

[0170] The second connection portion 5B is in direct contact with the fifth electrode 2C. The second connection portion 5B can be in contact with the fifth electrode 2C without bending on the fifth electrode 2C.

[0171] The width of the third electrode 4A (the length of the third electrode 4A in the second direction Y) can be set to be equal to or less than the width of the first thermoelectric conversion layer 3A (the length of the first thermoelectric conversion layer 3A in the second direction Y).

[0172] The thermoelectric converter 102 of the third embodiment can also reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side of the first connecting portion 5A and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference at the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 102. Furthermore, reducing the temperature difference at the second connecting portion 5B also contributes to improving the efficiency of the thermoelectric converter 102.

[0173] (Fourth embodiment) The fourth embodiment relates to a thermoelectric converter. Fig. 5 shows a thermoelectric converter 103 of the fourth embodiment. The thermoelectric converter 103 of the fourth embodiment is a modified example of the thermoelectric converter 100 of the first embodiment, the thermoelectric converter 101 of the second embodiment, and the thermoelectric converter 102 of the third embodiment. Descriptions common to the first, second, third, and fourth embodiments will be omitted. The description of the fourth embodiment can be applied to the other embodiments.

[0174] The third electrode 4A of the first thermoelectric conversion element 10A is omitted. The surface of the first thermoelectric conversion layer 3A opposite to the substrate 1 side is in contact with the insulating layer .

[0175] The second electrode 4B of the second thermoelectric conversion element 10B is omitted. The surface of the second thermoelectric conversion layer 3B opposite to the substrate 1 side is in contact with the insulating layer .

[0176] The end face of the first connection portion 5A opposite to the substrate 1 side is in contact with the insulating layer 7. The first connection portion 5A is in contact with the side surface of the first electrode 2A, extends straight from the substrate 1 side in the first direction X, bends midway in the second direction Y, bends in the first direction X again, bends in the second direction Y again, and is connected to the second thermoelectric conversion layer 3B.

[0177] The end face of the second connection portion 5B opposite to the substrate 1 side is in contact with the insulating layer 7. The second connection portion 5B is in contact with the side face of the fifth electrode 2C, extends straight from the substrate 1 side in the first direction X, bends midway in the second direction Y, bends in the first direction X, bends again in the second direction Y, and is connected to the first thermoelectric conversion layer 3A.

[0178] By providing bent portions in the first connecting portion 5A and the second connecting portion 5B, the wiring length of the first connecting portion 5A and the wiring length of the second connecting portion 5B are increased. The increased wiring length reduces the temperature difference between the first connecting portion 5A and the second connecting portion 5B. This also makes it more difficult for the first connecting portion 5A and the second connecting portion 5B to pass current in the opposite direction, contributing to higher efficiency of the thermoelectric converter 103.

[0179] Furthermore, from the above-mentioned viewpoint, it is preferable to cover the entire surface of the first connection portion 5A except for the portion in contact with the insulating layer 7 and / or the portion in contact with the substrate 1, in addition to the portion where the first connection portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B.

[0180] From the above viewpoint, in addition to the portion where the second connection portion 5A is connected to the first thermoelectric conversion element 10A and the fifth electrode 2C,

[0181] From the above viewpoint, it is preferable to cover the entire surface of the first connecting portion 5A except for the portion in contact with the insulating layer 7, in addition to the portion where the first connecting portion 5A is connected to the first thermoelectric conversion element 10A and the second thermoelectric conversion element 10B.

[0182] From the above viewpoint, it is preferable to cover the entire surface of the first connection portion 5A except for the portion in contact with the insulating layer 7, in addition to the portion where the second connection portion 5A is connected to the first thermoelectric conversion element 10A and the fifth electrode 2C. It is preferable to cover the entire surface of the first connection portion 5A.

[0183] (Fifth embodiment) The fifth embodiment relates to a thermoelectric converter. Fig. 6 shows a thermoelectric converter 104 of the fifth embodiment. The thermoelectric converter 104 of the fifth embodiment is a modified example of the thermoelectric converter 100 of the first embodiment, the thermoelectric converter 101 of the second embodiment, the thermoelectric converter 102 of the third embodiment, and the thermoelectric converter 103 of the fourth embodiment. Descriptions common to the first, second, third, fourth, and fifth embodiments will be omitted. The description of the fifth embodiment can be applied to the other embodiments.

[0184] In the thermoelectric converter 104 of the fifth embodiment, the fifth electrode 2C and the second connection portion 5B are omitted. The third electrode 4A extends in the second direction Y. The third electrode 4A can be used as an external (output) terminal. The third electrode 4A can be connected to an external (output) terminal (not shown).

[0185] The first connection portion 5A may be configured not to be inclined and not to include any bent portions. The first connection portion 5A extends straight in the first direction X and is connected to the first electrode 2A and the second electrode 4B.

[0186] The thermoelectric converter 104 of the fifth embodiment can also reduce the difference in temperature between the substrate 1 side of the first connector 5A and the opposite side of the substrate 1 side of the first connector 5A. Reducing the temperature difference at the first connector 5A contributes to improving the efficiency of the thermoelectric converter 104. Furthermore, omitting the second connector 5B makes it possible to ignore the reverse current generated by the second connector 5B, which contributes to improving the efficiency of the thermoelectric converter 104.

[0187] (Sixth embodiment) The sixth embodiment relates to a thermoelectric converter. Fig. 7 shows a thermoelectric converter 105 of the fifth embodiment. The thermoelectric converter 105 of the sixth embodiment is a modified example of the thermoelectric converter 100 of the first embodiment, the thermoelectric converter 101 of the second embodiment, the thermoelectric converter 102 of the third embodiment, the thermoelectric converter 103 of the fourth embodiment, and the thermoelectric converter 104 of the fifth embodiment. Descriptions common to the first, second, third, fourth, fifth, and sixth embodiments will be omitted. The description of the sixth embodiment can be applied to the other embodiments.

[0188] In a thermoelectric conversion device 105 of the sixth embodiment, a plurality of first thermoelectric conversion elements 10A are connected by first connection portions 5A. The first connection portions 5A connecting the first thermoelectric conversion elements 10A to each other are similar to the first connection portions 5A connecting the first thermoelectric conversion elements 10A and the second thermoelectric conversion element 10B.

[0189] The thermoelectric converter 105 of the sixth embodiment can also reduce the difference in temperature between the first connecting portion 5A on the substrate 1 side of the first connecting portion 5A and the temperature on the side of the first connecting portion 5A opposite to the substrate 1 side. Reducing the temperature difference at the first connecting portion 5A contributes to improving the efficiency of the thermoelectric converter 105. Furthermore, reducing the temperature difference at the second connecting portion 5B also contributes to improving the efficiency of the thermoelectric converter 105.

[0190] (Eighth embodiment) The eighth embodiment relates to a manufacturing method for a thermoelectric converter 100. Fig. 8 shows a flowchart of the manufacturing method for the thermoelectric converter 100. The manufacturing method for the thermoelectric converter 100 includes the steps of forming electrodes on the substrate 1, forming an insulating film 6A, processing the insulating film 6A to form a covering portion 6, forming a thermoelectric conversion material, and forming electrodes on the thermoelectric conversion layer. The manufacturing method for the thermoelectric converter 100 will be described below with reference to the process schematic diagrams of Figs. 9 to 12.

[0191] The process of forming electrodes on the substrate 1 will be described with reference to the process schematic diagram of Fig. 9. A metal film is formed on the substrate 1, and a first electrode 2A, a fourth electrode 2B, and a fifth electrode 2C are formed on the substrate 1 by lithography to obtain the member shown in the process schematic diagram of Fig. 9.

[0192] The step of forming the insulating film 6A will be described with reference to the process schematic diagram of Fig. 10. The insulating film 6A, which is a precursor of the covering portion 6, is formed on the surface of the member shown in the process schematic diagram of Fig. 9 on which the electrodes are formed, to obtain the member shown in the process schematic diagram of Fig. 10.

[0193] The process of processing the insulating film 6A to form the covering portion 6 will be described with reference to the process schematic diagram of Fig. 11. The insulating film 6A of the member shown in the process schematic diagram of Fig. 10 is processed by lithography, and voids 6B, which will be regions where the first thermoelectric conversion layer 3A, the second thermoelectric conversion layer 3B, the first connecting portion 5A, and the second connecting portion 5B will be formed, are processed to form the covering portion 6, and the member shown in the process schematic diagram of Fig. 11 is obtained.

[0194] The process of forming the thermoelectric conversion material will be described with reference to the process schematic diagram of Fig. 12. Thermoelectric conversion materials that will become the first thermoelectric conversion layer 3A, the second thermoelectric conversion layer 3B, the first connecting portion 5A, and the second connecting portion 5B are formed in the gaps 6B of the covering portion 6 on the member shown in the process schematic diagram of Fig. 11, to obtain the member shown in the process schematic diagram of Fig. 12.

[0195] Then, in the step of forming electrodes on the thermoelectric conversion layer, a third electrode 4A and a second electrode 4B are formed, thereby obtaining the thermoelectric conversion device 100 shown in the schematic diagram of FIG.

[0196] The manufacturing method of the thermoelectric converter 100 shown in the eighth embodiment is applicable to the second to seventh embodiments. When the manufacturing method of the thermoelectric converter 100 shown in the eighth embodiment is applied to the second to sixth embodiments, techniques used in manufacturing methods of semiconductor devices can be employed, such as forming the insulating film 6A and processing the voids 6B multiple times, or performing etch-back.

[0197] Hereinafter, the embodiment will be described in detail with reference to examples. (Example) A 0.5 mm thick glass substrate 1 is used, and a 5 μm thick copper film is formed on the substrate 1. The formed copper film is processed to form a first electrode 2A, a third electrode 2B, and a fifth electrode 2C on the substrate 1. A 0.005 mm thick epoxy resin is formed as a covering 6 on the member on which the first electrode 2A, the third electrode 2B, and the fifth electrode 2C are formed on the substrate 1. Vias are then drilled in the covering 6 to form a first connecting portion 5A, a second connecting portion 5B, a first thermoelectric conversion layer 3A, and a second thermoelectric conversion layer 2B. The vias are drilled so that the volume ratio (volume of the first connecting portion 5A:volume of the second connecting portion 5B:volume of the first thermoelectric conversion layer:volume of the second thermoelectric conversion layer) is 1:1:5:5. The vias of the via-processed member are filled with PEDOT:PSS as a thermoelectric conversion material to form a first thermoelectric conversion layer 3A and a second thermoelectric conversion layer 3B each having a height (length in the second direction) of 0.005 mm, and a first connecting portion 5A and a second connecting portion 5B each having a width of 500 μm and a length of 2.5 mm. A copper film having a thickness of 5 μm is formed on the member on which the first connecting portion 5A, the second connecting portion 5B, the first thermoelectric conversion layer 3A, and the second thermoelectric conversion layer 2B are formed, and patterned to form a second electrode 4B electrically connecting the first connecting portion and the second thermoelectric conversion layer 3B, and a fourth electrode 4A electrically connecting the second connecting portion 5B and the first thermoelectric conversion layer 3A, thereby obtaining the thermoelectric conversion device of the embodiment having the configuration of FIG.

[0198] (Comparative Example) A 0.5 mm thick glass substrate 1 is used, and a 5 μm thick copper film is formed on the substrate 1. The formed copper film is processed to form a first electrode 2A, a third electrode 2B, and a fifth electrode 2C on the substrate 1. A 0.005 mm thick epoxy resin is formed as a covering 6 on the member on which the first electrode 2A, the third electrode 2B, and the fifth electrode 2C are formed on the substrate 1. Vias are then drilled to form the first thermoelectric conversion layer 3A and the second thermoelectric conversion layer 2B in the covering 6. PEDOT:PSS is filled into the vias of the member after via drilling as a thermoelectric conversion material to form the first thermoelectric conversion layer 3A and the second thermoelectric conversion layer 3B with a height (length in the second direction) of 0.005 mm. Vias are then drilled to form the first connection portion 5A (metal wiring) and the second connection portion 5B (metal wiring). Copper is deposited as a metal wiring material in the vias to form first connection portions 5A (metal wiring) and second connection portions 5B (metal wiring) with a width of 500 μm and a length of 2.5 mm. The vias are processed so that the volume ratio (volume of first connection portion 5A: volume of second connection portion 5B: volume of first thermoelectric conversion layer: volume of second thermoelectric conversion layer) is 1:1:5:5. A copper film with a thickness of 5 μm is formed on the member on which first connection portion 5A, second connection portion 5B, first thermoelectric conversion layer 3A, and second thermoelectric conversion layer 2B are formed, and then patterned to form a second electrode 4B electrically connecting to the first connection portion and second thermoelectric conversion layer 3B and a fourth electrode 4A electrically connecting to the second connection portion 5B and first thermoelectric conversion layer 3A, thereby obtaining the thermoelectric conversion device of the embodiment having the configuration shown in FIG. 1.

[0199] The substrate 1 side is brought into contact with a high-temperature heat medium, and the fourth electrode 4A and second electrode 2B side are brought into contact with a low-temperature heat medium to generate electricity using the thermoelectric converters of the example and comparative example. The temperature difference between the high-temperature and low-temperature heat medium is set to 100°C, and the amount of electricity generated up to 60 minutes later and the temperature difference between the first electrode 2A and the second electrode 4B after 60 minutes are evaluated.

[0200] When the thermoelectric converter of the example generates electricity, the temperature difference between the first electrode 2A and the second electrode 4B after 60 minutes is larger than the temperature difference between the first electrode 2A and the second electrode 4B after 60 minutes in the comparative example, and the amount of electricity generated is also larger.

[0201] By fabricating a thermoelectric converter with the configuration of the embodiment, heat conduction via the first connecting portion 5A and the second connecting portion 5B is suppressed, and the amount of power generation is improved.

[0202] The technical solutions of the embodiments are described below. Technical proposal 1 A substrate; a uni-leg type first thermoelectric conversion element on the substrate; a uni-leg type second thermoelectric conversion element on the substrate; a first connection portion that connects the first thermoelectric conversion element and the second thermoelectric conversion element; a covering portion that covers the first connection portion, the first connection portion includes a thermoelectric conversion material; The thermoelectric converter has a thermal conductivity of the covering portion lower than a thermal conductivity of the first connecting portion. Technical proposal 2 The thermoelectric conversion device according to Technical Solution 1, wherein the thermal conductivity of the first connection portion is more than 1 time and not more than 200 times the thermal conductivity of the covering portion. Technical proposal 3 the first thermoelectric conversion element has a first electrode provided on the substrate and a first thermoelectric conversion layer provided on the first electrode; the second thermoelectric conversion element has a second thermoelectric conversion layer, The thermoelectric conversion device according to Technical Scheme 1 or 2, wherein the first connection portion electrically connects the first electrode and the second thermoelectric conversion layer. Technical proposal 4 the second thermoelectric conversion element has a second electrode on a surface of the second thermoelectric conversion layer opposite to the substrate side, The thermoelectric conversion device according to Technical Proposal 3, wherein the first connection portion is in direct contact with the second thermoelectric conversion layer and / or the second electrode. Technical proposal 5 the volume of the first connection portion is 0.01 to 25 times the volume of the first thermoelectric conversion layer, The thermoelectric conversion device according to Technical Scheme 3 or 4, wherein the volume of the first connection portion is 0.01 to 25 times the volume of the second thermoelectric conversion layer. Technical proposal 6 the first connection portion is in direct contact with the first electrode, A thermoelectric conversion device described in any one of technical proposals 3 to 5, wherein the area of ​​direct contact between the first electrode and the first thermoelectric conversion layer is 1,000 to 50,000 times the area of ​​direct contact between the first electrode and the first connection portion. Technical proposal 7 a first direction is a direction from the substrate toward the opposite side of the first thermoelectric conversion layer from the substrate side; A thermoelectric conversion device described in any one of technical proposals 3 to 6, wherein the length in the first direction of the first connection portion is greater than or equal to the distance in the first direction from the surface of the first thermoelectric conversion layer facing the substrate to the surface of the second thermoelectric conversion layer opposite the substrate. Technical proposal 8 the thermal conductivity of the first electrode is 50 times or more and 4500 times or less than the thermal conductivity of the first connection portion; the thermal conductivity of the first electrode is 50 times or more and 4500 times or less than the thermal conductivity of the first thermoelectric conversion layer, the thermal conductivity of the first connection portion is more than 1 time and not more than 200 times the thermal conductivity of the covering portion; The thermoelectric conversion device according to any one of Technical Schemes 3 to 7, wherein the thermal conductivity of the first electrode is 66 to 45,000 times the thermal conductivity of the covering portion. Technical proposal 9 The thermoelectric conversion device according to any one of Technical Schemes 1 to 8, wherein the first connection portion is made of the thermoelectric conversion material. Technical proposal 10 The thermoelectric conversion device according to any one of Technical Schemes 3 to 8, wherein the first thermoelectric conversion layer and the second thermoelectric conversion layer contain the thermoelectric conversion material. Technical proposal 11 The thermoelectric conversion device according to Technical Proposal 10, wherein the first thermoelectric conversion layer and the second thermoelectric conversion layer are made of the thermoelectric conversion material. Technical proposal 12 a thickness of the first electrode that is 0.0001 times or more and 100 times or less the length of the first connection portion in the first direction; The thermoelectric conversion device according to Technical Solution 7, wherein the thickness of the first electrode is 0.0001 to 100 times the thickness of the first thermoelectric conversion layer. Technical proposal 13 the first thermoelectric conversion layer is mainly made of a p-type conductive polymer, the second thermoelectric conversion layer is mainly made of a p-type conductive polymer, The thermoelectric conversion device according to any one of Technical Schemes 3 to 8 and 10, wherein the first connection portion is mainly made of a p-type conductive polymer. Technical proposal 14 the first thermoelectric conversion layer is mainly composed of a dispersion of polyethylenedioxythiophene and polystyrene sulfonic acid, the second thermoelectric conversion layer is mainly composed of a dispersion of polyethylenedioxythiophene and polystyrene sulfonic acid, The thermoelectric conversion device according to Technical Schemes 3 to 8, 10 and 13, wherein the first connection portion is mainly composed of a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid. Technical proposal 15 The thermoelectric conversion device according to any one of technical proposals 1 to 14, wherein the first thermoelectric conversion element and the second thermoelectric conversion element are connected in series by the first connection portion.

[0203] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention described in the claims and their equivalents. [Explanation of symbols]

[0204] 1: Circuit board 2A: 1st electrode 2B: 4th electrode 2C: 5th electrode 3A: First thermoelectric conversion layer 3B: Second thermoelectric conversion layer 4A: 3rd electrode 4B: 2nd electrode 5A: First connection part 5B: Second connection part 5C: 5th electrode 6: Covering part 6A: insulating film 6B:Void 7: Insulating layer 10A: First thermoelectric conversion element 10B: Second thermoelectric conversion element 100: Thermoelectric conversion device 101: Thermoelectric conversion device 102: Thermoelectric conversion device 103: Thermoelectric conversion device 104: Thermoelectric conversion device 105: Thermoelectric conversion device

Claims

1. A substrate; a uni-leg type first thermoelectric conversion element on the substrate; a uni-leg type second thermoelectric conversion element on the substrate; a first connection portion that connects the first thermoelectric conversion element and the second thermoelectric conversion element; a covering portion that covers the first connection portion, the first connection portion includes a thermoelectric conversion material; The thermoelectric conversion device wherein the thermal conductivity of the covering portion is lower than the thermal conductivity of the first connection portion.

2. The thermoelectric converter according to claim 1 , wherein the thermal conductivity of the first connection portion is more than 1 time and not more than 200 times the thermal conductivity of the covering portion.

3. the first thermoelectric conversion element has a first electrode provided on the substrate and a first thermoelectric conversion layer provided on the first electrode, the second thermoelectric conversion element has a second thermoelectric conversion layer, The thermoelectric conversion device according to claim 1 or 2, wherein the first connection portion electrically connects the first electrode and the second thermoelectric conversion layer.

4. the second thermoelectric conversion element has a second electrode on a surface of the second thermoelectric conversion layer opposite to the substrate side, The thermoelectric conversion device according to claim 3 , wherein the first connection portion is in direct contact with the second thermoelectric conversion layer and / or the second electrode.

5. a volume of the first connection portion is 0.01 to 25 times the volume of the first thermoelectric conversion layer, The thermoelectric conversion device according to claim 3 , wherein the volume of the first connection portion is 0.01 to 25 times the volume of the second thermoelectric conversion layer.

6. the first connection portion is in direct contact with the first electrode, The thermoelectric conversion device according to claim 3, wherein the area of ​​direct contact between the first electrode and the first thermoelectric conversion layer is 1,000 to 50,000 times the area of ​​direct contact between the first electrode and the first connection portion.

7. a first direction is a direction from the substrate toward the opposite side of the first thermoelectric conversion layer from the substrate side; The thermoelectric conversion device described in claim 3, wherein the length of the first connection portion in the first direction is equal to or greater than the distance in the first direction from the surface of the first thermoelectric conversion layer facing the substrate to the surface of the second thermoelectric conversion layer opposite the substrate.

8. the thermal conductivity of the first electrode is 50 times or more and 4500 times or less than the thermal conductivity of the first connection portion; the thermal conductivity of the first electrode is 50 times or more and 4500 times or less than the thermal conductivity of the first thermoelectric conversion layer; the thermal conductivity of the first connection portion is more than 1 time and not more than 200 times the thermal conductivity of the covering portion; The thermoelectric converter according to claim 3 , wherein the thermal conductivity of the first electrode is 66 times or more and 45,000 times or less than the thermal conductivity of the covering portion.

9. The thermoelectric conversion device according to claim 1 or 2, wherein the first connection portion is made of the thermoelectric conversion material.

10. The thermoelectric conversion device according to claim 3 , wherein the first thermoelectric conversion layer and the second thermoelectric conversion layer contain the thermoelectric conversion material.

11. The thermoelectric conversion device according to claim 10 , wherein the first thermoelectric conversion layer and the second thermoelectric conversion layer are made of the thermoelectric conversion material.

12. a thickness of the first electrode is 0.0001 times or more and 100 times or less the length of the first connection portion in the first direction; The thermoelectric conversion device according to claim 7 , wherein the thickness of the first electrode is 0.0001 to 100 times the thickness of the first thermoelectric conversion layer.

13. the first thermoelectric conversion layer is mainly made of a p-type conductive polymer, the second thermoelectric conversion layer is mainly made of a p-type conductive polymer, The thermoelectric converter according to claim 3 , wherein the first connection portion is mainly made of a p-type conductive polymer.

14. the first thermoelectric conversion layer is mainly composed of a dispersion of polyethylenedioxythiophene and polystyrene sulfonic acid, the second thermoelectric conversion layer is mainly composed of a dispersion of polyethylenedioxythiophene and polystyrene sulfonic acid, The thermoelectric converter according to claim 3 , wherein the first connection portion is mainly made of a dispersion of polyethylenedioxythiophene and polystyrenesulfonic acid.

15. The thermoelectric conversion device according to claim 1 or 2, wherein the first thermoelectric conversion element and the second thermoelectric conversion element are connected in series by the first connection portion.

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