Evaluation method and evaluation device

Abstract

To evaluate a semiconductor device efficiently.SOLUTION: An evaluation method comprises: acquiring first information representing a defect state of a member, having a defect, in a semiconductor device; generating third information including the place of the defect and the kind of the defect in the semiconductor device based upon the first information and second information, which is information stored in advance while the position of the defect and the kind of the defect are made to correspond to the first information; controlling whether information specifying the kind of the defect of the semiconductor device is returned to a control device controlling the semiconductor device based upon an access request from the control device and the third information; and evaluating the operation of the control device after the information specifying the kind of the defect of the semiconductor device is returned.SELECTED DRAWING: Figure 7

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