Processing system and transfer method

Abstract

To provide a processing system and transfer method for efficiently replacing a consumption member in a processing chamber.SOLUTION: A processing system PS comprises: a chamber in which a consumable member is installed; a storage module SM for storing the consumable member; a position detection sensor for detecting a position of the consumable member; vacuum transfer modules TM1, TM2 that are connected to the chamber and the storage module and have transfer robots TR1, TR2 for transferring the consumable member between the chamber and the storage module; and a control unit CU. The control unit executes: a process (a) of controlling the transfer robots to transfer the consumable member installed in the chamber to the storage module; a process (b) of detecting the position of the consumable member being transferred to the storage module using the position detection sensor; and a process (c) of controlling the transfer robots to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the position of the consumable member detected in the process (b).SELECTED DRAWING: Figure 1

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