Vibration generating device

Abstract

To provide a vibration generating device capable of achieving downsizing while ensuring favorable vibration characteristics.SOLUTION: A vibration generating device comprises: a stage on which a vibration target object can be mounted or placed; an actuator that displaces the stage in a first direction; a pair of fixed portions which is provided spaced apart from each other on both sides in a second direction intersecting the first direction so as to sandwich the stage; and a plurality of plate-like spring portions which is provided spaced apart in the first direction so as to sandwich the stage. Each of the spring portions has: a first end portion connected to the fixed portion; a second end portion connected to the stage; and a bent portion formed so as to bend or curve between the first end portion and the second end portion.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a vibration device. [Background technology]

[0002] Patent Document 1 discloses a configuration including a vibrating body that vibrates by a coil portion and elastic bodies provided on both sides of the vibrating body in the vibration direction of the vibrating body. In this configuration, the elastic bodies elastically support the vibrating body that vibrates in the vibration direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-134512 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the inventors have found that when a vibrator is supported by elastic bodies arranged on both sides of the transverse direction of the vibrator, shortening the length of the elastic bodies in the transverse direction causes distortion in the vibration waveform generated in the vibrator. Therefore, in order to suppress distortion in the vibration waveform and obtain good vibration characteristics, the length of the elastic bodies must be increased to a certain extent, which poses a problem of increasing the size of the device.

[0005] The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a vibration device that can be made smaller while maintaining good vibration characteristics. [Means for solving the problem]

[0006] In order to solve the above problem, the vibration device according to aspect 1 of the present invention comprises a stage on which an object to be vibrated can be attached or placed, an actuator that displaces the stage in a first direction, a pair of fixed portions arranged spaced apart on both sides of a second direction intersecting the first direction so as to sandwich the stage therebetween, and a plurality of plate-shaped spring portions arranged spaced apart in the first direction so as to sandwich the stage therebetween, each of the spring portions having a first end connected to the fixed portion, a second end connected to the stage, and a bending portion formed to bend or curve between the first end and the second end.

[0007] A second aspect of the present invention is a vibration device according to the first aspect, wherein the number of the spring portions is four, and the four spring portions form two rectangular spring members when viewed from a third direction intersecting the first direction and the second direction, and the two spring members are spaced apart in the first direction so as to sandwich the stage therebetween, and each of the two spring members has a pair of first side portions spaced apart in the second direction and extending in the first direction, and a pair of second side portions spaced apart in the first direction and connecting both ends of the pair of first side portions, and the bending portion is arranged at the connection between the first side portions and the second side portions. [Effects of the Invention]

[0008] According to the above aspects of the present invention, it is possible to achieve size reduction while ensuring good vibration characteristics. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a perspective view of a vibration device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a plan view of the vibration device according to the present embodiment. [Figure 3] FIG. 4 is a plan view of a vibration device according to a first modified example of the present embodiment. [Figure 4] FIG. 10 is a plan view of a vibration device according to a second modified example of the present embodiment. [Figure 5] FIG. 10 is a plan view of a vibration device according to a third modified example of the present embodiment. [Figure 6] FIG. 10 is a plan view of a vibration device according to a fourth modified example of the present embodiment. [Figure 7] FIG. 10 is a plan view of a vibration device according to a fifth modified example of the present embodiment. [Figure 8] FIG. 10 is a diagram showing a simulation result of an example. DETAILED DESCRIPTION OF THE INVENTION

[0010] The vibration device according to this embodiment will be described below with reference to the drawings. 1 and 2, the vibration device 1A is provided on an upper surface 9t of a base 9. The vibration device 1A includes a stage 2, an actuator 3, a pair of fixing parts 5, and a pair of spring members 7A.

[0011] (direction definition) In this specification, a direction parallel to a drive axis direction M of the actuator 3 (described later) in a plane parallel to the upper surface 9t of the base 9 is referred to as a first direction D1. Furthermore, a direction perpendicular to the first direction D1 in a plane parallel to the upper surface 9t of the base 9 is referred to as a second direction D2. Furthermore, a direction perpendicular to the first direction D1 and the second direction D2 is referred to as a third direction D3. Hereinafter, the third direction D3 may also be referred to as a vertical direction. In the vertical direction, the side facing the upper surface 9t may be referred to as an upper side, and the opposite side may be referred to as a lower side.

[0012] The stage 2 is plate-shaped and extends in the first direction D1 and the second direction D2. When viewed from the third direction D3, the stage 2 is, for example, rectangular. When viewed from the third direction D3, the stage 2 may be polygonal, circular, elliptical, or other shapes other than rectangular. An object to be vibrated by the vibration device 1A can be attached or placed on the stage 2. The object to be vibrated is not particularly limited, but may be, for example, a sensor to be inspected.

[0013] The actuator 3 drives the stage 2. The actuator 3 has, for example, a pair of voice coil motors 31, a motor fixing portion 32, and a stage support portion 33. Note that the number of voice coil motors 31 may be one. The pair of voice coil motors 31 are spaced apart in the first direction D1 with the stage support 33 sandwiched therebetween. Each of the pair of voice coil motors 31 has a mover 31s that is driven to move back and forth in the drive axis direction M (first direction D1). Each of the pair of voice coil motors 31 is fixed to a motor fixing portion 32. The motor fixing portions 32 are disposed on both sides of the pair of voice coil motors 31 in the first direction D1. Each motor fixing portion 32 is fixed to the upper surface 9t of the base 9 by a bolt or the like (not shown). The pair of voice coil motors 31 are disposed facing opposite each other in the first direction D1. In other words, the mover 31s of the voice coil motor 31 disposed on one side in the first direction D1 and the mover 31s of the voice coil motor 31 disposed on the other side in the first direction D1 face each other with the stage support 33 in between.

[0014] The stage support part 33 is disposed between the pair of voice coil motors 31. The stage support part 33 has, for example, a hollow rectangular parallelepiped shape. The movers 31s of the pair of voice coil motors 31 are connected to the stage support part 33. The stage support part 33 connected to the pair of voice coil motors 31 is spaced above the upper surface 9t of the base 9. When the pair of voice coil motors 31 operate in synchronization, the stage support part 33 is reciprocated integrally with the movers 31s of the pair of voice coil motors 31 in the first direction D1 at a predetermined amplitude.

[0015] The stage 2 is fixed onto a stage support 33 by bolts or the like (not shown). As a result, the stage 2 is reciprocated in a first direction D1 with a predetermined amplitude by an actuator 3 having a pair of voice coil motors 31.

[0016] The stage support part 33 has mounting surfaces 33f facing both sides in the second direction D2. The mounting surfaces 33f are formed with recesses 33m into which engaging protrusions 71t (described later) are fitted. The recesses 33m are formed so as to be recessed inward in the second direction D2 from the mounting surfaces 33f.

[0017] The pair of fixed portions 5 are arranged spaced apart on either side in the second direction D2, sandwiching the stage 2 and the actuator 3 therebetween. The fixed portion 5 is shaped like a rectangular parallelepiped block. The fixed portion 5 is fixed to the upper surface 9t of the base 9 via bolts or the like (not shown). The fixed portion 5 has a mounting surface 5f facing inward in the second direction D2. A groove 5m extending in the third direction D3 is formed in the mounting surface 5f. The groove 5m is formed so as to be recessed from the mounting surface 5f outward in the second direction D2.

[0018] A pair of spring members 7A are provided on both sides in the second direction D2, sandwiching the stage 2 and the stage support part 33 therebetween. Each spring member 7A is formed from a metal material such as an aluminum alloy or steel. In this embodiment, each spring member 7A is formed by cutting. However, the spring member 7A may also be formed by bending a plate-shaped spring, for example. Each spring member 7A is a plate spring. Each spring member 7A has a predetermined plate thickness in the first direction D1 or the second direction D2, and a predetermined height in the third direction D3, thereby providing the rigidity to support the load of the stage 2, the vibration target, etc.

[0019] In this embodiment, each spring member 7A is formed in a rectangular frame shape when viewed from the third direction D3. The spring member 7A has a pair of first side portions 71A, 71B and a pair of second side portions 72. The pair of first side portions 71A, 71B are spaced apart in the second direction D2. Each of the pair of first side portions 71A, 71B has the second direction D2 as its thickness direction and extends in the first direction D1. The pair of second side portions 72 are spaced apart in the first direction D1. Each of the pair of second side portions 72 has the first direction D1 as its thickness direction and extends in the second direction D2. Each of the pair of second side portions 72 connects the ends of the pair of first side portions 71A, 71B in the first direction D1.

[0020] Hereinafter, one of the pair of first sides 71A, 71B may be referred to as the fixed-side first side 71A. Furthermore, the other of the pair of first sides 71A, 71B may be referred to as the stage-side first side 71B. The fixed-side first side 71A is located outward in the first direction D1 from the stage-side first side 71B. A central portion of the fixed-side first side 71A in the first direction D1 is connected to the fixed part 5. An engaging protrusion 71s that protrudes outward in the second direction D2 is formed in the central portion of the fixed-side first side 71A in the first direction D1. The engaging protrusion 71s is formed in a rectangular shape when viewed from the second direction D2. The engaging protrusion 71s is fitted into a groove 5m of the fixed part 5. This positions the fixed part 5 and the fixed-side first side 71A.

[0021] The center of the stage-side first side 71B in the first direction D1 is connected to the stage 2 via the stage support 33. An engaging protrusion 71t that protrudes inward in the second direction D2 is formed at the center of the first side 71B in the first direction D1. The engaging protrusion 71t is formed in a rectangular shape when viewed from the second direction D2. The engaging protrusion 71t is fitted into a recess 33m of the stage support 33. This positions the stage support 33 and the stage-side first side 71B.

[0022] Furthermore, the fixed-side first edge portion 71A and the fixed portion 5, and the stage-side first edge portion 71B and the stage support portion 33 are each fastened by two bolts 77 arranged at an interval in the first direction D1. In this way, by fixing the spring member 7A by two bolts 77 arranged at an interval in the first direction D1, the spring member 7A is prevented from rotating around an axis extending in the second direction D2.

[0023] Each of the pair of spring members 7A includes a plurality of (two in this embodiment) plate-shaped spring portions 8A spaced apart in the first direction D1. Hereinafter, one of the two spring portions 8A included in each spring member 7A may be referred to as a first spring portion 8A1, and the other may be referred to as a second spring portion 8A2. The first spring portion 8A1 and the second spring portion 8A2 are each formed by a second side portion 72, a portion of the fixed-side first side portion 71A, and a portion of the stage-side first side portion 71B.

[0024] Each of the spring portions 8A includes two bent portions 85. These bent portions 85 are located at both ends of the second side portion 72 in the second direction D2. That is, the bent portions 85 are located at the connection between the first side portions 71A, 71B and the second side portion 72. In this embodiment, the bent portions 85 are portions of the spring portion 8A that are bent at right angles. Because each of the spring portions 8A includes two right-angle bent portions 85, the spring portions 8A each have a U-shape when viewed from the third direction D3. However, the bending angle of the bent portions 85 is not limited to a right angle and can be changed. Each of the spring portions 8A also has a first end portion 81A connected to the fixed portion 5 and a second end portion 81B connected to the stage. In each of the spring portions 8A, the bent portion 85 is located between the first end portion 81A and the second end portion 81B.

[0025] As described above, the vibration device 1A, which includes a pair of spring members 7A, has a total of four spring portions 8A. When the actuator 3 applies vibration to the stage 2 in the first direction D1 via the stage support portion 33 at a predetermined amplitude and frequency, the stage 2, which is elastically supported by the spring portions 8A, is displaced in the first direction D1. Since each spring portion 8A has a bending portion 85, the amount of displacement that follows Hooke's law with respect to stress increases, allowing the amplitude to be increased without distorting the vibration waveform of the vibration target. In other words, when the vibration target follows the movement of the actuator 3, the spring portions 8A behave in a manner similar to the ideal Hooke's law, allowing sinusoidal vibrations with larger amplitude and fewer distortion components to be applied to the vibration target.

[0026] As described above, the vibration device 1A of this embodiment comprises a stage 2 on which an object to be vibrated can be attached or placed, an actuator 3 that displaces the stage 2 in a first direction D1, a pair of fixed portions 5 spaced apart on both sides of the stage 2 in a second direction D2 that intersects with the first direction D1 so as to sandwich the stage 2 therebetween, and a plurality of plate-shaped spring portions 8A spaced apart in the first direction D1 so as to sandwich the stage 2 therebetween, and each of the spring portions 8A has a first end portion 81A connected to the fixed portion 5, a second end portion 81B connected to the stage 2, and a bending portion 85 formed to bend between the first end portion 81A and the second end portion 81B.

[0027] According to this configuration, the spring portion 8A has the bent portion 85 between the first end 81A and the second end 81B, so that good vibration characteristics can be obtained even if the length L of the spring portion 8A in the second direction D2 is short. Therefore, it is possible to provide a vibration exciter 1A that can be made smaller while maintaining good vibration characteristics.

[0028] In this embodiment, the number of spring portions 8A is four, and the four spring portions 8A constitute two rectangular spring members 7A when viewed from a third direction D3 intersecting the first direction D1 and the second direction D2. The two spring members 7A are spaced apart in the second direction D2 with the stage 2 sandwiched between them. Each of the two spring members 7A has a pair of first sides 71A, 71B extending in the first direction D1 and a second side 72 spaced apart in the first direction D1 and connecting both ends of the pair of first sides 71A, 71B, with a bent portion 85 disposed at the connection between the first sides 71A, 71B and the second side 72. This configuration results in the two spring members 7A being symmetrical with respect to the stage 2, thereby achieving better vibration characteristics.

[0029] The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

[0030] (First Modification of the Embodiment) For example, in the above embodiment, the pair of fixing portions 5 are arranged on both outer sides of the pair of spring members 7A in the second direction D2, but this is not limitative. 3, in a vibration excitation device 1B, each of a pair of fixed portions 5B may be disposed inside a rectangular spring member 7B. In this case, one first side portion 71A of each spring member 7B is connected to a fixed surface 5g of the fixed portion 5B that faces outward in the second direction D2. In this way, by accommodating the fixed portion 5B inside the spring member 7B, the size of the vibration exciter 1B in the second direction D2 can be reduced, and the vibration exciter 1B can be made more compact.

[0031] (Second Modification of the Embodiment) For example, in the above embodiment, the bent portion 85 is formed at right angles by a portion 71p of the first side portion 71A, a portion 71q of the first side portion 71B, and the second side portion 72 extending in the second direction D2, but this is not limited to this. For example, as shown in FIG. 4, the bending portion 86 in each spring portion 8C of the spring member 7C of the vibration device 1C may be formed in a semicircular arc shape when viewed from the third direction D3, and may have a curved connecting portion 73 connecting a portion 71p of the first side portion 71A and a portion 71q of the first side portion 71B. In the spring portion 8C having such a curved bent portion 86, similarly to the above embodiment, it is possible to ensure good vibration characteristics and reduce the size of the vibration exciter 1C.

[0032] (Third Modification of the Embodiment) As shown in FIG. 5, each spring portion 8D of a spring member 7D of the vibration excitation device 1D has a beam portion 84 and a bent portion 87 between a first end 81C connected to the fixed portion 5 and a second end 81D connected to the stage 2 via the stage support portion 33. The beam portion 84 extends in the second direction D2. The bent portion 87 is formed in an intermediate portion of the beam portion 84 in the second direction D2. The bent portion 87 of this modified example is U-shaped (gate-shaped) when viewed from the third direction D3, and integrally includes a pair of protruding pieces 87a protruding from the beam portion 84 in the first direction D1 and a connecting piece 87b extending in the second direction D2 and connecting the pair of protruding pieces 87a to each other. In the spring portion 8D having such a bent portion 87, similarly to the above embodiment, it is possible to ensure good vibration characteristics and reduce the size of the vibration exciter 1D.

[0033] (Fourth Modification of the Embodiment) As shown in FIG. 6, each spring portion 8E of the spring member 7E of the vibration device 1E has a beam portion 84 and a bent portion 88 between a first end portion 81C connected to the fixed portion 5 and a second end portion 81D connected to the stage 2 via the stage support portion 33. The bent portion 88 is formed in the middle in the second direction D2 of the beam portion 84. The bent portion 88 of this modified example protrudes from the beam portion 84 in the first direction D1 and is formed in a V-shape when viewed from the third direction D3. In the spring portion 8E having such a bent portion 88, similarly to the above embodiment, it is possible to ensure good vibration characteristics and reduce the size of the vibration exciter 1E.

[0034] (Fifth Modification of the Embodiment) As shown in Figure 7, each spring portion 8F of the spring member 7F of the vibration device 1F has a beam portion 84 and a bent portion 89 between a first end 81C connected to the fixed portion 5 and a second end 81D connected to the stage 2 via the stage support portion 33. The bent portion 89 is formed in the middle in the second direction D2 of the beam portion 84. The bent portion 89 of this modified example protrudes from the beam portion 84 in the first direction D1 and is formed in a U-shape (semicircular arc shape) when viewed from the third direction D3. In the spring portion 8F having such a bent portion 89, similarly to the above embodiment, it is possible to ensure good vibration characteristics and reduce the size of the vibration exciter 1F.

[0035] In addition, it is possible to replace the components in the above-described embodiments with well-known components as appropriate, and the above-described embodiments and variations may be combined as appropriate, without departing from the spirit of the present invention.

[0036] (Example of consideration) The vibration device described above was evaluated by simulation, and the results are shown below. As Example 1, a half model of a vibration excitation device 1C using a spring member 7C having a gate-shaped bent portion 87 shown in FIG. 5 was created. As Example 2, a half model of a vibration exciter 1E using a spring member 7E having a U-shaped bent portion 89 shown in FIG. 7 was created. As Example 3, a half model of a vibration excitation device 1D was created using a spring member 7D having a V-shaped bent portion 88 as shown in FIG. As a comparative example, a half model of a vibration excitation device was created using a plate-shaped spring member that did not have a bent portion. For each of Examples 1 to 3 and the Comparative Example, the amount of displacement when pressed with a load F of 10 N was evaluated by linear analysis and non-linear analysis.

[0037] As a result, as shown in FIG. 8, in the comparative example, the ratio of the deformation amount of the spring member in the nonlinear analysis to the deformation amount of the spring member in the linear analysis was 0.60. In contrast, in Examples 1 to 3, the ratio of the deformation amount of the spring member in the nonlinear analysis to the deformation amount of the spring member in the linear analysis was 0.99 or more, and it was confirmed that the difference between the displacement amount in the linear analysis and the displacement amount in the nonlinear analysis was significantly reduced. From this result, it is considered that the structures of Examples 1 to 3 can obtain better vibration characteristics than the comparative example. [Explanation of symbols]

[0038] 1A to 1F... Vibration device 2... Stage 3... Actuator 5, 5B... Fixed portion 7A to 7F... Spring member 8A, 8C, 8D, 8E, 8F... Spring portion 71A, 71B... Pair of first side portions 72... Second side portion 81A, 81C... First end portion 81B, 81D... Second end portion 85 to 89... Bent portion

Claims

1. a stage on which an object to be excited can be attached or placed; an actuator that displaces the stage in a first direction; a pair of fixing portions provided spaced apart on both sides in a second direction intersecting the first direction so as to sandwich the stage therebetween; a plurality of plate-shaped spring portions spaced apart in the first direction so as to sandwich the stage therebetween, Each of the spring portions is a first end connected to the fixed portion; a second end connected to the stage; a bending portion formed to bend or curve between the first end and the second end.

2. the number of the spring portions is four, and the four spring portions constitute two rectangular spring members when viewed from a third direction intersecting the first direction and the second direction; the two spring members are spaced apart in the first direction so as to sandwich the stage therebetween, Each of the two spring members has: a pair of first side portions spaced apart in the second direction and extending in the first direction; a pair of second side portions that are spaced apart in the first direction and connect both end portions of the pair of first side portions to each other; The vibration device according to claim 1 , wherein the bent portion is disposed at a connection portion between the first side portion and the second side portion.

Images