Control interface of mask sensing assembly
JP2025181683AActive Publication Date: 2025-12-11MICROPROGRAM INFORMATION CO LTD
Patent Information
- Application Number
- JP2025076556
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-05-31
- Filing Date
- 2025-05-02
- Publication Date
- 2025-12-11
- Estimated Expiration
- 2045-05-02
Smart Images
Figure 2025181683000001_ABST
Abstract
To provide a control interface of a mask sensing assembly.SOLUTION: A control interface of a mask sensing assembly comprises a mask-like sensing module 10 and a housing 12. The mask-like sensing module has a sensor and a storage unit. The sensor senses environment information in a simulating lithography process and generates a sensing signal to be stored in the storage unit. The housing is for disposing the mask-type sensing module and has a housing processor, a plurality of control buttons and indicators. The control buttons are manipulated to generate a predetermined command, and the command is transmitted to the mask-like sensing module in a wireless way to execute the command. After the command is executed, the mask-like sensing module generates and transmits a status signal to the housing processor, and causes the indicators to display specific information based on the status signal.SELECTED DRAWING: Figure 1
Need to check novelty before this filing date? Find Prior Art
Citation Information
Patent Citations
Sensing assembly capable of simulating photomask
CN219393345U
Sealed container and management system for container
JP2009200199A
EUV reticle stocker and its operation method
JP2023503435A
Closed container and control system for closed container
US20090211940A1