Electrostatic chuck

Abstract

To provide an electrostatic chuck that allows easy removal of a ring-shaped member.SOLUTION: An electrostatic chuck 10 includes a first portion 101 including a surface 110 on which a substrate W is placed, and a second portion 102 extending further outward from the outer peripheral edge of the first portion 101 and including a surface 180 on which a ring member RE is placed. A roughened portion 182 is provided on a part of the surface 180, which facilitates the ingress of gas from the surrounding area between the roughened portion 182 and the ring member RE compared to other parts of surface 180.SELECTED DRAWING: Figure 2

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