Light source device and method for controlling light source device

Abstract

To provide a light source device capable of acquiring a state of a target holding part.SOLUTION: A light source device 1 according to the present disclosure includes a target holding part 10 having a holding surface 17 holding a target material 12 that forms plasma 11 by irradiation of excitation light LR, and an acquisition unit 20 that acquires the state information of the target holding part 10. The acquisition unit 20 includes illumination means 23 that illuminates the target holding part 10 with illumination light L1, detection means 21 that detects the illumination light L1 from the target holding part 10 illuminated with illumination light L3, and a processing unit 22 that processes a detection result of the detection means 21. The target material 12 is held on the holding surface 17 of the moving target holding part 10 and moves with the movement of the target holding part 10.SELECTED DRAWING: Figure 1

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