Substrate transport device for transporting substrates within vacuum chamber

JP2025185681AActive Publication Date: 2025-12-22T ROBOTICS CO LTD
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Patent Information

Application Number
JP2024131823
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-06-10
Filing Date
2024-08-08
Publication Date
2025-12-22
Estimated Expiration
2044-08-08

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  • Figure 2025185681000001_ABST
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Abstract

To provide a vacuum transport mechanism capable of transporting a heavy-load substrate over a long distance and reducing sagging.SOLUTION: A substrate transport device TA includes a lifting robot 1000, a traveling robot 2000 connected to the lifting robot 1000, and a transport robot 3000 connected to the traveling robot 2000. This allows for accurate long-distance transport of heavy-duty substrates, reduces robot sagging, and reduces substrate slippage in the process stations.SELECTED DRAWING: Figure 2b
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Citation Information

Patent Citations

  • Substrate transfer device

    JP2014078693A

  • Travel robot for moving substrate transfer robot in vacuum chamber

    JP2022184738A

  • Substrate transfer robot for transferring substrate by vacuum chamber

    JP2022184739A

  • Traveling robot for running substrate transfer robot in vacuum chamber

    JP2023004870A

  • Substrate transfer robot for transferring substrate in vacuum chamber

    JP2023004871A

Cited By

  • A substrate transport device that transports substrates within a vacuum chamber.

    JP7866808B1