Electric wire / cable coating material, electric wire / cable, vacuum device for semiconductor manufacturing apparatus, semiconductor manufacturing apparatus, and method for manufacturing electric wire / cable coating material

JP2025185718APending Publication Date: 2025-12-22DAIKIN INDUSTRIES LTD +1
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Patent Information

Application Number
JP2025093473
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-06-10
Filing Date
2025-06-04
Publication Date
2025-12-22

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Patent Text Reader

Abstract

To provide: an electric wire / cable coating material for a semiconductor manufacturing apparatus, the material having a small outflow of an outgas component even when used in a vacuum state; an electric wire / cable using the same; a vacuum device for a semiconductor manufacturing apparatus; a semiconductor manufacturing apparatus; and a method for manufacturing an electric wire / cable coating material.SOLUTION: The present disclosure is an electric wire / cable coating material which is used in a vacuum device inside a semiconductor manufacturing apparatus and satisfies the following condition A. (Condition A) A gas emission rate per unit surface area of a sample after standing for 48 hours under conditions of 20 to 30°C and 1.0×10-2 to 1.0×10-4 P is 2.0×10-9 Pa m3 / s / cm2 or less.SELECTED DRAWING: None
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Citation Information

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