Substrate conveyance device, substrate conveyance system, and substrate conveyance method

Abstract

To improve substrate conveyance efficiency by enabling reduction in installation area.SOLUTION: A substrate conveyance device 28 includes a fixed element 11 comprising a plurality of coil units 17, a first movable element 35 that comprises first magnet units 41A, 41B and floats and moves over the fixed element 11, a second movable element 37 that comprises second magnet units 43A, 43B and floats and moves over the fixed element 11, a bearing 39 for guiding the first movable element 35 and the second movable element 37 so as to be relatively operational, and a substrate support unit 21A that is connected to the first movable element 35 and the second movable element 37 to support a substrate W.SELECTED DRAWING: Figure 6

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