Acoustic resonator rigidly mounted on high acoustic velocity substrate - Patents.com

Abstract

The present disclosure relates to a robust acoustic resonator device having a piezoelectric plate supported by a solid substrate. The device includes a substrate, a high acoustic velocity non-piezoelectric substrate layer such as diamond on the substrate, a dielectric layer on the substrate layer, a piezoelectric plate attached to the dielectric layer by a metal layer, and two sets of electrodes connected to first and second bus bars, respectively, and arranged alternately on the piezoelectric plate with a pitch p. The velocity V of a slow shear bulk wave propagating parallel to the surface of the substrate layer (perpendicular to the electrodes) is diam is the phase velocity V in the piezoelectric plate ph =2p*F R Higher than FR. LN / (2d LN ) is the operating frequency of the device. The pitch p is determined by p <V diam / V LN *d LN where V LN is the velocity of the bulk wave resonating in the piezoelectric plate, and d LN is the thickness of the piezoelectric plate.

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