Apparatus and method for delivering molybdenum vapor
JP2025507082AInactive Publication Date: 2025-03-13ENTEGRIS INC
-1 Cites -1 Cited by
Patent Information
- Application Number
- JP2024553318
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-03-08
- Filing Date
- 2023-03-07
- Publication Date
- 2025-03-13
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 2025507082000001_ABST
Abstract
A device that can be exposed to a chemical vapor (e.g., molybdenum vapor, tungsten vapor, or any combination thereof) having a coating covering at least a portion of the device, the coating reducing or preventing a change in mass at an exterior surface of the device upon exposure to the vapor. In certain circumstances, the mass change is an increase in mass, and the coating reduces the mass change by less than 1×10 -5 gmm -2 The following is reduced or prevented:
Need to check novelty before this filing date? Find Prior Art