Method and apparatus for mass flow verification - Patents.com

Abstract

Improved mass flow verification devices and methods are provided. A device and method for mass flow verification is provided. The mass flow verifier includes a chamber configured to receive a fluid, a critical flow nozzle upstream of the chamber, a chamber valve, a downstream valve, and a bypass valve. The chamber valve is configured to selectively allow fluid flow from the critical flow nozzle to the chamber. The downstream valve is configured to selectively allow fluid flow from the chamber to a downstream location. The bypass valve is configured to selectively allow fluid flow from the critical flow nozzle to a dump location. The mass flow verifier further includes a controller configured to verify a flow rate of the fluid based on a rate of pressure rise of the fluid detected by a pressure sensor in the chamber.

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