Laser array excitation and multichannel detection in spectroscopy

Abstract

A spectrometer comprising multiple excitation light sources (e.g., multiple laser light sources), multiple detector elements, and / or multiple excitation light sources and multiple detector elements is provided. In one embodiment, for example, the spectrometer includes a light source adapted to provide an excitation incident beam, a detector adapted to detect a spectroscopic signal, and an optical system adapted to direct the sample toward the excitation incident beam, receive the spectroscopic signal from the sample, and provide the spectroscopic signal to the detector. The light source includes multiple laser sources adapted to provide the multiple excitation incident beams through the optical system and / or the detector comprising the multiple detector elements.

Description

[Background technology]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 401,709, entitled "Laser Array Excitation and Multichannel Detection," filed August 28, 2022, and U.S. Provisional Patent Application No. 63 / 404,975, entitled "Laser Array Excitation and Multichannel Detection," filed September 9, 2022, each of which is incorporated by reference herein as if fully set forth herein.

[0002] Field The present disclosure relates to spectrometers that use laser arrays for excitation and / or multi-channel detection.

[0003] A typical raster system in a spectrometer moves the excitation beam over the surface of the sample via a moving part. Rather than producing a discrete spectrum, a raster system moves the excitation beam over an area of ​​the sample in one acquisition and averages it over the surface. Summary of the Invention

[0004] A spectrometer comprising multiple excitation light sources (e.g., multiple laser light sources), multiple detector elements, and / or multiple excitation light sources and multiple detector elements is provided. In one embodiment, for example, the spectrometer includes a light source adapted to provide an excitation incident beam, a detector adapted to detect a spectroscopic signal, and an optical system adapted to direct the sample toward the excitation incident beam, receive the spectroscopic signal from the sample, and provide the spectroscopic signal to the detector. The light source includes multiple laser sources adapted to provide the multiple excitation incident beams through the optical system and / or a detector comprising multiple detector elements.

[0005] In another embodiment, the spectrometer comprises a light source adapted to provide an excitation incident beam and a detector adapted to detect a spectroscopic signal, the optical system being adapted to direct the excitation incident beam towards the sample, receive the spectroscopic signal from the sample, and provide the spectroscopic signal to the detector, the optical system having a beam expander adapted to expand the excitation incident beam.

[0006] These and other aspects, features, details, utilities, and advantages of the present invention will become apparent from a reading of the following description and claims, and from a review of the accompanying drawings. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 illustrates an embodiment of the optical system of a spectrometer, including but not limited to a Raman spectrometer, as an example.

[0008] [Figure 2] FIG. 1 illustrates an exemplary laser array used to provide multiple excitation beams.

[0009] [Figure 3] FIG. 1 shows an example of laser excitation of a sample from an array excitation laser source.

[0010] [Figure 4] FIG. 10 shows an example of fitting a circle to a known line on a two-dimensional spectrometer detector.

[0011] [Figure 5A] FIG. 1 illustrates an embodiment of a spectrometer equipped with a two-dimensional detector. [Figure 5B] FIG. 1 illustrates an embodiment of a spectrometer equipped with a two-dimensional detector.

[0012] [Figure 6] FIG. 1 shows an example of curvature (aberration) (top) and a corrected linearized image (bottom).

[0013] [Figure 7] FIG. 1 shows an example of a detector made up of pixels with a particular well depth and an example of a digital readout where overflow includes values ​​greater than the pixel well depth, resulting in aberrations.

[0014] [Figure 8] FIG. 10 illustrates an exemplary embodiment of a method for generating a flattened optical image of a detector that is used to generate a digital readout of the detector pixels without pixel well depth overflow.

[0015] [Figure 9] FIG. 1 illustrates an embodiment of a spectrometer in which a diode laser array is used to excite the sample and a two-dimensional (2-D) detector array is also used.

[0016] [Figure 10] FIG. 1 shows examples of samples that are difficult to image using Raman spectroscopy.

[0017] [Figure 11] FIG. 1 illustrates an example of a system and method adapted for detecting one or more targets within a complex sample.

[0018] [Figure 12] FIG. 1 illustrates an embodiment of a spectrometer in which Raman collection is obtained using a two-dimensional array.

[0019] [Figure 13] 10 illustrates the Raman collection possible using a laser array, whereby a sample can be illuminated over a relatively large area, while collection can be from a relatively small area that is a subset of the illuminated area.

[0020] [Figure 14] FIG. 10 shows another embodiment in which stand-off excitation is provided.

[0021] [Figure 15] FIG. 1 illustrates a method for automatically triggering a sample in a fixed focus standoff spectrometer (e.g., a Raman spectrometer).

[0022] [Figure 16] 1 includes diagrams of an exemplary spectrometer and of the spectrometer in use. [Figure 17] 1 includes diagrams of an exemplary spectrometer and of the spectrometer in use.

[0023] [Figure 18] FIG. 1 illustrates one embodiment of an optical system for imaging a laser array (e.g., a VCSEL or diode laser array) onto a two-dimensional array detector.

[0024] [Figure 19] FIG. 1 illustrates an embodiment of a Raman spectroscopy system including a combination of a laser array and a two-dimensional detector.

[0025] [Figure 20] FIG. 1 shows an example of spectroscopic collection using an addressable two-dimensional laser array and an addressable two-dimensional array detector.

[0026] [Figure 21] FIG. 10 shows another example of a spectroscopic collection method using an addressable two-dimensional laser array and an addressable two-dimensional array detector.

[0027] [Figure 22] FIG. 10 shows another example of a spectroscopic collection method using an addressable two-dimensional laser array and an addressable two-dimensional array detector.

[0028] [Figure 23] FIG. 1 shows an example of fluorescence removal by BDM (background decomposition method).

[0029] [Figure 24] FIG. 2 illustrates an exemplary spectroscopic signal. [Figure 25] FIG. 2 illustrates an exemplary spectroscopic signal. [Figure 26] FIG. 2 illustrates an exemplary spectroscopic signal. [Figure 27] FIG. 2 illustrates an exemplary spectroscopic signal.

[0030] [Figure 28] FIG. 1 illustrates the origin of fluorescence in Raman spectroscopy applications.

[0031] [Figure 29] FIG. 2 is a diagram illustrating an example of a spectroscopic signal.

[0032] [Figure 30] FIG. 1 illustrates an example of the operation of the Hadamard transform. DETAILED DESCRIPTION OF THE INVENTION

[0033] The following description is provided as an enabling teaching of the invention in its best currently known embodiment. To this end, those skilled in the relevant art will recognize and appreciate that many changes can be made to the various aspects of the invention described herein while still obtaining the beneficial results of the invention. It will also become apparent that some of the features of the invention can be selected to obtain some of the desired advantages of the invention without utilizing other features. Thus, those skilled in the art will recognize that many modifications and adaptations to the invention are possible and may even be desirable in certain circumstances and are a part of the present invention. The following description is therefore provided as an example of the principles of the invention, not of limitation.

[0034] As used throughout, the singular forms "a," "an," and "the" include plural references unless the context clearly dictates otherwise. Thus, for example, reference to "a" component can include two or more such components unless the context dictates otherwise. Additionally, the terms "proximal" and "distal" are used to describe items or portions of items that are closer and farther from a user or operator, such as a surgeon, respectively. Thus, for example, the tip or free end of a device may be referred to as the distal end, while the generally opposing end or handle may be referred to as the proximal end.

[0035] All directional references (e.g., top, bottom, upward, downward, left, right, leftward, rightward, top, bottom, up, down, vertical, horizontal, clockwise, and counterclockwise) are used for identification purposes only to aid the reader in understanding the present invention and are not intended to create any particular limitation on the location, orientation, or use of the present invention. Joined references (e.g., attached, coupled, and connected, etc.) should be interpreted broadly and may include intermediate members between the connection of elements and relative movement between elements. As such, joined references do not necessarily infer that two elements are directly connected and in a fixed relationship to each other.

[0036] Ranges can be expressed herein as from "about" one particular value, and / or to "about" another particular value. When such a range is expressed, another aspect includes from the one particular value and / or to the other particular value. Similarly, when values ​​are expressed as approximations, by use of the preceding term "approximately," it is to be understood that the particular value forms another aspect. Further, it is to be understood that the end points of each range are valid both in relation to the other end point, and independently of the other end point.

[0037] As used herein, the term "optional" or "optionally" means that the subsequently described event or circumstance may or may not occur, and includes instances in which the event or circumstance occurs and instances in which the event or circumstance does not occur.

[0038] As used herein, the term "substantially" may be applied to modify any quantitative expression that may be permissibly varied without resulting in a change in the basic function to which it relates.

[0039] 1 illustrates one embodiment of the optical system of a spectrometer, such as, but not limited to, a Raman spectrometer 10. In this embodiment, an excitation light source 12 (e.g., a laser) provides an excitation beam 14. The excitation beam is directed through a lens (Lens 1) 16 and a beam expander 18 to a beam splitter 20 (e.g., a dichroic beam splitter mirror). The beam splitter 20 directs the excitation beam 14 through a focusing lens (Lens 2) 22 onto a sample 24. In this embodiment, the sample is placed in a container 26, or on or behind a layer such as a plastic bottle.

[0040] The spectroscopic signal 30 generated at the sample from the excitation beam is directed at least in part back to the focusing lens (lens 2) 22 and directed through the beam splitter 20 to another focusing lens (lens 3) 28 which focuses the spectroscopic signal 30 onto an aperture 32, where it is received by a spectrometer 34 for analysis.

[0041] In one embodiment, the intensity of Raman scattering from a material behind a light-transmitting barrier, such as a container, can be enhanced. One way is to excite the sample over a larger area than the collection area. This is possible with a beam expander formed by Lens 1 16 and Lens 2 22. This combination creates a large, extended laser illumination on the container. Lens 2 22 of the beam expander can also function as a collection lens for the Raman scattering resulting from excitation of Sample 24. When focusing a distance away from the sample equivalent to the focal length of Lens 2 22, a collimated beam is generated, which passes through a dichroic beam splitter to Lens 3 28 and focuses a small sampling area onto the aperture 32 of the spectrometer 34. The aperture 32 also functions as a spatial filter to remove off-axis radiation from the sample entering the spectrometer 34.

[0042] Raman in this example is proportional to the intensity (watts / area), and expanding the laser in this way reduces the laser's intensity, resulting in a lower Raman signal, or requires a relatively more intense laser than would be used in a system where the excitation signal is tightly focused on the sample. An expanded excitation laser signal can also be used to reduce laser hazards and provide an eye-safe standoff laser. Another method is to use an array of lasers to create a relatively large excitation area relative to the collection area.

[0043] Figure 2 shows an exemplary laser array 35 used to provide multiple excitation beams 36. Each of the multiple excitation beams is directed through delivery optics and through a surface to a sample 38. As shown in Figure 2, each of the multiple excitation beams 36 is directed toward the surface of the sample by delivery optics (optics), thereby dispersing the multiple excitation beams across the surface of the sample. If a target material is below the surface (e.g., a container such as a glass or plastic container), the multiple excitation beams may extend through the surface to the underlying target material (e.g., target particles) at multiple locations across the surface.

[0044] Figure 3 shows an example of laser excitation of a sample from an array excitation laser source. In one example, shown in the top array configuration, only a single laser in the laser array is turned on. In another example, shown in the center array configuration, all lasers in the array are turned on, and the spectrometer detects both light from the surface (aligned with the aperture) and subsurface light scattered from lasers not aligned with the aperture. In yet another example, shown in the bottom array configuration, combined laser excitation and detection is shown. In the bottom array configuration, the spectrometer collects the spectroscopic signal by turning on a laser spatially coincident with the excitation region, and may also laser illuminate a sample spatially offset from the collection region.

[0045] In one embodiment, for example, a linear slit aperture can produce conical diffraction from a diffraction grating due to the change in diffraction angle with the angle of incidence of light on the grating. Light off the perpendicular axis diffracts at a lower angle than on-axis light. This cone is projected onto the imager, resulting in a curved image. One way to correct for this curvature is to use a curved slit aperture.

[0046] For two-dimensional sensors, the curvature can be corrected in post-processing software by fitting a circle to a known line and using its radius to adjust the alignment of each pixel row with respect to the others. Figure 4 shows an example of fitting a circle to a known line.

[0047] Figures 5A and 5B show an embodiment of a spectrometer that includes a two-dimensional detector. In this embodiment, the detector collects Raman signals in rows that can be binned. In Figure 5A, the spectrometer design can produce curved Raman images that do not average (bin) well along the rows. In Figure 5B, the Raman signal can be digitally linearized and then properly averaged (binned) along the rows.

[0048] FIG. 6 shows an example of the curvature (aberration) (top) and the corrected linearized image (bottom).

[0049] FIG. 7 shows an example of a detector made up of pixels with a particular well depth, and an example of a digital readout where overflow includes values ​​greater than the pixel well depth, resulting in aberrations.

[0050] Figure 7 shows the result of overflow resulting in an inaccurate digital intensity profile. When digital intensities are determined by binning (adding) intensities, the resulting values ​​do not correlate with the input signal.

[0051] FIG. 8 illustrates an exemplary embodiment of a method for generating a flattened optical image of a detector that is free of pixel well depth overflow and is used to generate a digital readout of the detector pixels.

[0052] In Figure 8, optically flattening the input with a negative (concave) cylindrical lens spreads the intensity across the pixel and eliminates overflow, so that when the digital signal is binned it is proportional to the incoming radiation signal.

[0053] Figure 9 shows an embodiment of a spectrometer in which a diode laser array is used to excite the sample and a two-dimensional (2-D) detector array is also used. In this example, the sample is heterogeneous with only two particles of interest, and the surface also contributes to the signal. The signal from the pure substrate and the sample mixed with the spectral features from the substrate can be mathematically separated into pure sample spectra.

[0054] FIG. 9 shows a diagram of a spectrometer device including a two-dimensional (2D) diode laser array and a two-dimensional (2D) array detector. In this embodiment, the spectrometer is adapted to detect target samples in a heterogeneous sample. In this example, the heterogeneous sample includes multiple target materials disposed on a surface. Without a large sample area, the spectrometer may only detect the surface or a combination of surface and target. Even with illumination of a large area, the spectrum will be a convolution of the surface spectrum and the target spectrum. With the diode laser array and multi-channel detector, discrete spectra of the surface and target can be observed. Algorithms can be used to separate the spectra and accurately identify the target materials.

[0055] Figure 10 shows examples of samples that are difficult to image using Raman spectroscopy. In the first example shown on the left, the field sample has gaps or cracks that contain the sample target, but the surface material interferes in the spectrum. In the second example shown on the left, the sample contains multiple target sample particles arranged along the surface material in a heterogeneous manner, as described above with respect to Figure 9. In various embodiments, the spectrometer is adapted to separate the surface signal from the target.

[0056] Figure 11 shows an example of a system and method adapted for detecting one or more targets within a complex sample. Figure 11 illustrates the concept of a laser array coupled to a two-dimensional detector. The spectra of the target and the surface are distinguishable and can be separated as discrete spectra on the two-dimensional array.

[0057] In the embodiment shown in Figure 11, for example, a vertical cavity surface emitting laser (VCSEL) array provides multiple excitation optical signals. Each of the excitation optical signals passes through a beam splitter (e.g., a dichroic beam splitter) and is focused onto a portion of the composite sample via a collection lens as shown. The multiple spectroscopic signals (e.g., Raman excitation signals) are returned to the collection lens and directed back towards the beam splitter for collimation. The spectroscopic signals are reflected by the beam splitter to a two-dimensional (2D) detector (e.g., a multiple CMOS 2D detector array).

[0058] Figure 11 also shows that the laser array and two-dimensional detector have the ability to generate a unique discrete spectrum for each laser position (spatially separated on the surface), which is an advantage over methods that raster the area and generate an average of the surface and target spectra.

[0059] Laser arrays also provide excitation and detection for large arrays without moving parts. Current rastering systems use moving parts to move the beam over the surface, rastering the entire area in one acquisition, resulting in an averaged spectrum over the surface rather than producing a discrete spectrum. Current raster patterns are circular, but with individually addressable laser arrays, any pattern shape could be produced.

[0060] 11 also shows a CMOS detector array. In one embodiment, a CMOS detector array can be used in conjunction with an FPGA to rapidly collect the entire spectrum and transfer it to memory. Using processing from the FPGA (Field Programmable Gate Array) provides speed improvements by performing operations on the device rather than sending the raw data to a processor that performs the operations.

[0061] DSERS Dynamic surface-enhanced Raman spectroscopy (DSERS) is described in B.L. Scott and K.T. Carron, "Dynamic Surface Enhanced Raman Spectroscopy (SERS): Extracting SERS from Normal Raman Scattering," Anal. Chem. 2012, 84, 8448-8451, which is incorporated by reference as if fully set forth herein. The DSERS concept has always suffered from the time required to acquire, read out, and store data from the CCD.

[0062] CMOS cameras are video devices with very high readout speeds. Using a CMOS or similar detector offers the ability to see smaller particles in a stream (microfluidics) or a stationary fluid (Brownian motion). Smaller particles usually move faster, so a faster readout speed is required from the device. A CMOS detector can improve that.

[0063] Figure 12 shows an embodiment of a spectrometer in which Raman collection is obtained in a two-dimensional array. In this example, eight lasers provide separate excitation beams, each of which excites the sample as in Figure 2. In this embodiment, the Raman signal from each of the eight lasers is collected along eight rows (regions of interest) of a two-dimensional detector, and the Raman signal is observed along the rows.

[0064] FIG. 13 shows another embodiment of a Raman spectrometer, where excitation is performed with a single diode laser and detection of the Raman signal is performed via a linear one-dimensional (1-D) detector.

[0065] Figure 13 shows Raman collection possible using a laser array. This allows a sample to be illuminated over a relatively large area, while collection occurs from a smaller area that is a subset of the illuminated area. This is also shown and described with reference to Figures 3 and 4. One advantage is that a semi-transparent container or barrier can transmit the illumination to a highly scattered power, allowing Raman to occur subsurface. This approach can enhance the subsurface signal relative to the container signal.

[0066] 14 shows another embodiment in which standoff excitation is provided. In this embodiment, a fixed focus standoff includes a Raman excitation laser and at least one visible targeting laser (in this embodiment, a pair of visible targeting lasers). The focus can be identified by the user by aligning the visible targeting laser with the target.

[0067] Figure 14 shows a mode of operation that uses the intersection of two visible laser beams to define the focal position of a fixed-focus standoff Raman system. In this mode, the operator can initiate acquisition when the beams are aligned. This can be difficult if two hands are required to hold the system and if the acquisition button must be pressed precisely when the beams are aligned.

[0068] FIG. 15 illustrates a method for automatically triggering a sample in a fixed-focus standoff spectrometer (e.g., a Raman spectrometer). In this embodiment, a photodiode detector receives a reflected signal from a visible aiming laser, and when the spectrometer is focused, a photodiode (or other detector) detects the signal and illuminates a Raman excitation laser to generate a spectroscopic signal for analysis. For example, in the embodiment shown in FIG. 15, when the spectrometer is focused on a sample, the visible laser signal is reflected along the detection axis of the spectrometer. The visible laser signal is reflected away from the photodetector portion of the spectrometer by a dichroic beam splitter and directed to a detector, such as the photodiode shown. In one embodiment, for example, the photodiode detects the signal and provides a leading edge or other signal indicating that the spectrometer is focused on a sample and illuminates a Raman excitation laser to begin spectroscopic sample analysis.

[0069] The embodiment shown in Figure 15 provides an improved solution for fixed standoff systems. In this case, one beam intersects with the laser excitation beam. A dichroic beam splitter is used to direct the visible laser beam to a photodiode, which generates a trigger to automatically initiate acquisition.

[0070] 16 and 17 include diagrams of an exemplary spectrometer and the spectrometer in use.

[0071] 18 is an illustration showing one embodiment of an optical system for imaging a laser array (e.g., a VCSEL or diode laser array) onto a two-dimensional array detector. In this embodiment, for example, individual lasers are directed to individual spatial locations on the surface, which can be mapped back to the detector location. In this embodiment, the purity of the spatial pattern can be scaled up or down, but is not scrambled.

[0072] FIG. 19 illustrates one embodiment of a Raman spectroscopy system including a combination laser array and a two-dimensional detector. The laser array may be composed of VCSEL lasers that emit light at a narrow frequency, but depending on manufacturing characteristics, may emit at unique, distinct wavelengths. In other words, there may be a set of lasers that each operate at a narrow frequency, but the wavelengths may vary within the set of lasers. This is illustrated on the left side of FIG. 20, which shows an example in which one or more subsets of the laser array are controllable. For example, individual lasers, rows of lasers, and / or columns of lasers may be individually controllable. In the example of FIG. 20, for example, all lasers may be on or off, except for the first addressable row of lasers, which are controlled to be off or on, respectively.

[0073] Due to the spatial purity created by the optical system, the Raman from these lasers is produced on the array as individual spectra with Raman features offset by wavelength variations, as shown in Figure 19. As a result, sets of Raman spectra collected simultaneously (in parallel) have slightly offset Raman features.

[0074] This data set is known for its ability to decompose into moving and non-moving data sets, which in Raman spectroscopy applications means that the slow or stationary fluorescence background can be separated from the fast-varying Raman peaks.

[0075] 20 illustrates an example of spectroscopic collection using a two-dimensional laser array and an addressable two-dimensional array detector. In one embodiment, for example, multiple lasers in the two-dimensional laser array are turned on, while the remaining lasers in the two-dimensional laser array are turned off. For example, a single addressable row of the laser array can be turned on or off, and the remaining lasers in the array can be turned off or on, respectively. Detector readout can similarly occur along the first multiple detectors of the two-dimensional array detector. For example, the laser array can be aligned in a row with the center laser turned off.

[0076] 21 shows another example of a spectroscopic collection method using an addressable two-dimensional laser array and an addressable two-dimensional array detector. In one embodiment, for example, all lasers except one can be off (or on), and a row readout of the detector array is performed along the row aligned with the lasers off to generate a Raman spectrum.

[0077] 22 shows another example of a spectroscopic collection method using an addressable two-dimensional laser array and an addressable two-dimensional array detector. In one embodiment, for example, all lasers in the two-dimensional laser array are on except for one row, which is off, and the readout of the detector array rows is performed along the rows aligned with the laser array rows that are off.

[0078] FIG. 23 shows an example of fluorescence removal through BDM (background decomposition method).

[0079] 24-27 and 29 show exemplary spectroscopic signals.

[0080] Figure 27 shows an example of the generation of a Raman spectroscopic signal for a sample using 1064 nm and 785 nm excitation sources. In this example, a method of fluorescence rejection is shown that results in better performance with 785BDM excitation than with 1064 nm excitation.

[0081] Figure 28 shows the origin of fluorescence in Raman spectroscopy applications. The small arrow labeled vibrational relaxation indicates that fluorescence is independent of excitation wavelength, while instantaneous Raman shifts with laser wavelength. This difference provides the mathematical basis for separating fluorescence and Raman.

[0082] Raman spectrum extraction by Hadamard transform

[0083] In one embodiment, Raman spectra can be extracted from a complex sample using mathematical operations such as the Hadamard transform. In this embodiment, the idea is to replicate the illumination of the entire sample with Hadamard patterns that generate different spatial components from the excitation laser pixels. This generates a differential Raman signal from each pattern that correlates to different spatial distances from a single pixel excitation.

[0084] One example of the conversion is described in Zibang Zhang, Xueying Wang, Guoan Zheng, and Jingang Zhong, "Hadamard single-pixel imaging versus Fourier single-pixel imaging," Optics Express, Vol. 25, No. 16, pp. 19619-19639, August 7, 2017, which is incorporated herein in its entirety as if fully set forth herein.

[0085] HIS (Hadamard Single-pixel Imaging) is based on the Hadamard transform. HSI obtains the Hadamard spectrum of an object image and applies the inverse Hadamard transform to reconstruct the object image. The Hadamard spectrum is composed of a set of Hadamard coefficients. Each coefficient corresponds to a unique Hadamard basis pattern. To determine a Hadamard coefficient, the corresponding Hadamard basis pattern can be projected onto the object and the resulting light intensity can be measured using a single pixel detector. The light intensity measurement of a single pixel is mathematically equivalent to the dot product between the Hadamard basis pattern and the object. Therefore, the Hadamard spectrum can be reconstructed based on the measurements of a single pixel. Image

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[0086] The sample Hadamard basis pattern shown in Figure 28 is

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[0087] A differential HSI is an embodiment of the HSI, where each Hadamard coefficient

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Claims

1. A light source adapted to provide an excitation incident beam; Detectors adapted to detect spectral signals; and An optical system adapted to direct the excitation incident beam toward the sample, receive a spectral signal from the sample, and provide the spectral signal to the detector. Equipped with, The light source has a plurality of laser sources adapted to provide a plurality of excitation incident beams through the optical system. Spectrometer.

2. The spectrometer according to claim 1, wherein the plurality of laser sources include a plurality of VCSEL laser sources.

3. The spectrometer according to claim 1, wherein the plurality of laser sources of the light source include a two-dimensional array of laser sources.

4. The spectrometer according to claim 3, wherein the two-dimensional array of the laser source includes a VCSEL laser array.

5. The spectrometer according to claim 1, wherein the optical system is adapted to provide the plurality of excitation incident beams to the sample and to receive a plurality of spectral signals from the sample corresponding to the plurality of excitation incident beams.

6. The spectrometer according to claim 1, wherein the optical system is adapted to provide the plurality of excitation incident beams across the surface of the sample.

7. The spectrometer according to claim 1, wherein at least one portion of the plurality of laser sources is addressable.

8. The spectrometer according to claim 7, wherein each of the laser sources is individually addressable.

9. The spectrometer according to claim 7, wherein at least two of the plurality of laser sources are individually addressable.

10. The spectrometer according to claim 1, wherein the detector has a plurality of detector elements.

11. The spectrometer according to claim 10, wherein the plurality of detector elements include a two-dimensional array of detector elements.

12. The spectrometer according to claim 10, wherein at least one portion of the plurality of detector elements is addressable.

13. The spectrometer according to claim 12, wherein each of the detector elements is individually addressable.

14. The spectrometer according to claim 12, wherein at least two portions of the plurality of detector elements are individually addressable.

15. The spectrometer according to claim 1, further comprising a controller adapted for processing one or more detector signals from the detector.

16. The spectrometer according to claim 15, wherein the controller is adapted to correct the curvature of the spectral signal in the detector.

17. The spectrometer according to claim 16, wherein the controller is adapted to correct the curvature by fitting the circle to a known line.

18. The spectrometer according to claim 15, wherein the controller is adapted to linearize the detected spectral signal received by the detector.

19. The spectrometer according to claim 1, wherein the optical system has a lens adapted to flatten the intensity profile of the spectral signal in the detector.

20. The spectrometer according to claim 1, wherein the detector has a plurality of detector elements adapted to detect a plurality of spectral signals corresponding to the plurality of excitation incident beams.

21. The spectrometer according to claim 20, further comprising a controller adapted for separating the spectra of a target substance and a second substance in a sample.

22. The spectrometer according to claim 21, wherein the sample includes a heterogeneous sample.

23. The spectrometer according to claim 21, wherein the second substance includes the surface of the sample.

24. The spectrometer according to any one of claims 1 to 23, wherein the optical system has a beam expander adapted to expand the plurality of excitation incident beams on the surface of the sample.

25. A method for determining at least one spectrum of a sample, wherein the method is A step of providing multiple excitation and incident beams from a light source having multiple light sources; The step of guiding the multiple excitation incident beams to the sample via the optical system; A step of receiving a spectral signal from the sample via the optical system; The step of guiding the spectral signal to the detector via the optical system; and A step of determining at least one spectrum corresponding to the aforementioned spectral signal. A method for providing this.

26. The method according to claim 25, wherein the operation of determining the at least one spectrum is performed via a controller.

27. The method according to claim 25, wherein the detector has a two-dimensional array of detector elements.

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