Passive dispersion compensation for acousto-optic deflectors.

JP2025538063APending Publication Date: 2025-11-26ORBOTECH LTD
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Patent Information

Application Number
JP2024570996
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-11-04
Filing Date
2023-10-31
Publication Date
2025-11-26

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Abstract

The optical scanning device can include one or more acousto-optic deflectors (AODs) configured to deflect an optical beam along one or more scan directions, wherein a deflection angle of the optical beam from the one or more AODs is controllable by one or more drive signals applied to the one or more AODs. The scanning device can further include a dispersion compensator, wherein the dispersion from the dispersion compensator at least partially compensates for the dispersion from the one or more AODs such that a deflection angle of the optical beam at a particular setting of the one or more drive signals is constant within a first tolerance for wavelengths of the optical beam within a wavelength range, and at least one of the dispersion of the dispersion compensator or the transmittance of the dispersion compensator is independent of polarization of the optical beam within a second tolerance.
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Citation Information

Patent Citations

  • Ultrashort pulsed laser micromachining / submicromachining using an acoustooptic scanning device with dispersion compensation

    US20020023903A1

  • Compensator System and Method for Compensating Angular Dispersion

    US20150029578A1