Flow rate measuring device

Abstract

To provide a flow rate measuring device capable of saving a space of a flexible substrate.SOLUTION: This flow measuring instrument is provided with a micro flow sensor 11 having a detecting part 11a for detecting the flow of a fluid and electrodes 11a and 11d provided on both right and left sides of the detecting part 11c. The micro flow sensor 11 includes a header 12 having a slit 11c and a slit 11d respectively provided outside the electrodes 12c and 12d of the micro flow sensor 11, and a flexible substrate 13 connecting the micro flow sensor 11 and the circuit substrate 14, wherein the flexible substrate 13 includes a base 13a connected to the circuit substrate 14, and two branch portions 13a and 12c respectively branched from the base 12d in two different directions, passing through the slits and 11c, and respectively connected to the corresponding electrodes and. 11d 13b 13c.SELECTED DRAWING: Figure 1

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