Piezoelectric laminate and method for manufacturing piezoelectric laminate
JP2026019668APending Publication Date: 2026-02-05SUMITOMO CHEM CO LTD
Patent Information
- Application Number
- JP2024121390
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-07-26
- Publication Date
- 2026-02-05
AI Technical Summary
Technical Problem
Piezoelectric films made of KNN-based ferroelectric materials exhibit low DC stress resistance in high-temperature, high-humidity environments, limiting the operational lifespan of actuators and sensors.
Method used
A piezoelectric laminate structure is designed with a piezoelectric film composed of KNN, where the surface region has a higher total atomic concentration of K and Na compared to the bulk region, achieved through a two-stage sputtering process with targets of varying power application.
Benefits of technology
The laminate provides improved DC stress life under high temperature and high humidity conditions, extending the time to dielectric breakdown to over 1000 hours, enhancing the reliability and versatility of piezoelectric devices.
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Abstract
To improve a DC stress life of a piezoelectric film containing potassium, sodium, niobium, and oxygen under a high temperature and high humidity environment.SOLUTION: The piezoelectric element is provided with a substrate, a lower electrode film on the substrate, and a piezoelectric film on the lower electrode film, the piezoelectric film being represented by the general formula ABO3 and composed of a perovskite-type oxide wherein the A site contains K and Na and the B site contains Nb, wherein when the piezoelectric film is divided into a surface layer region extending from the upper surface of the piezoelectric film toward the substrate to a predetermined depth and a bulk region which is a region other than the surface layer region, the total atomic concentration of K and Na in the surface layer region is higher than the total atomic concentration of K and Na in the bulk region.SELECTED DRAWING: Figure 1
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Citation Information
Patent Citations
Piezoelectric thin film-attached laminate board, piezoelectric thin-film device and manufacturing method thereof
JP2017076730A
Laminate board with piezoelectric film, element with piezoelectric film, and method for manufacturing laminate board with piezoelectric film
JP2018207055A