Device manufacturing system, semiconductor manufacturing system, and exhaust pipe joint unit

Abstract

To provide a device manufacturing system capable of accurately estimating a deposition amount of a component deposited in a flow path for guiding gas.SOLUTION: A semiconductor manufacturing system 11, which is an embodiment of a device manufacturing system, includes a first apparatus 13 having a chamber 12 that holds a gas, a second apparatus 14 connected to the chamber 12 and disposed in a flow path that guides a gas containing a deposition component, a joint 21 that at least partially defines the flow path upstream or downstream of the second apparatus 14, and a pressure measuring device 35 that is coupled to the joint 21 and measures a pressure in the flow path at a detection position 36 set in the flow path.SELECTED DRAWING: Figure 1

Images