Vacuum device

Abstract

To provide a vacuum device capable of adjusting both the inclination of a shaft and the position of the shaft in the horizontal direction. [Solution] The vacuum device 10 comprises a vacuum chamber 11, a first shaft 12 arranged along a reference axis L1 in a manner penetrating an outer wall 23 of the vacuum chamber 11, and having a first end located inside the vacuum chamber 11 and a second end 12b located outside the vacuum chamber 11, a first functional part provided at the first end of the first shaft 12, and an adjustment mechanism 16 connected to the first shaft 12 outside the vacuum chamber 11 and capable of adjusting both the inclination of the first shaft 12 with respect to the reference axis L1 and the position of the first shaft 12 in a horizontal direction D1 perpendicular to the reference axis L1.

Description

[Technical Field]

[0001] The present disclosure relates to vacuum devices. [Background technology]

[0002] For example, the vacuum device disclosed in Patent Document 1 includes a vacuum chamber and a shaft that penetrates the outer wall of the vacuum chamber. Inside the vacuum chamber, a functional part that functions as, for example, a susceptor is provided at the end of the shaft. The shaft is supported by a spherical roller bearing against the outer wall of the vacuum chamber. Therefore, the shaft and the functional part are configured so that the inclination of the shaft and the functional part relative to a reference axis of the vacuum chamber can be adjusted by the spherical roller bearing. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6802191 Summary of the Invention [Problem to be solved by the invention]

[0004] In the vacuum device described above, although it is possible to adjust the inclination of the shaft relative to the reference axis using the spherical roller bearing, it is not possible to adjust the position of the shaft in the horizontal direction perpendicular to the reference axis. [Means for solving the problem]

[0005] A vacuum device that solves the above problem includes a vacuum chamber, a shaft that is arranged along a reference axis and penetrates the outer wall of the vacuum chamber, and has a first end located inside the vacuum chamber and a second end located outside the vacuum chamber, a functional part that is arranged at the first end of the shaft, and an adjustment mechanism that is connected to the shaft outside the vacuum chamber and is capable of adjusting both the inclination of the shaft with respect to the reference axis and the position of the shaft in a horizontal direction perpendicular to the reference axis.

[0006] With this configuration, the adjustment mechanism can adjust both the tilt of the shaft relative to the reference axis and the horizontal position of the shaft, thereby enabling the position of the functional unit within the vacuum chamber to be suitably adjusted by adjusting the tilt and horizontal position of the shaft. [Effects of the Invention]

[0007] The vacuum device of the present disclosure makes it possible to adjust both the inclination of the shaft relative to the reference axis and the position of the shaft in the horizontal direction. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic side view showing a vacuum device according to one embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view showing the vacuum device of the same embodiment. [Figure 3] FIG. 3 is a schematic cross-sectional view for explaining the operation of the vacuum device of the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] An embodiment of a vacuum device will be described below with reference to the drawings. Note that for the sake of convenience, some of the components may be exaggerated or simplified in the drawings. Furthermore, the dimensional ratios of the various components may differ from the actual ratios.

[0010] (Configuration of vacuum device 10) As shown in FIG. 1, the vacuum device 10 of this embodiment includes a vacuum chamber 11 having a vacuum inside, a first shaft 12, a first functional part 13, a second shaft 14, a second functional part 15, and an adjustment mechanism 16.

[0011] The vacuum chamber 11 has an outer wall 23 including an upper wall 21 and a lower wall 22. The outer wall 23 forms an internal space of the vacuum chamber 11 that is evacuated. Note that the designations upper wall 21 and lower wall 22 do not necessarily imply that the vacuum chamber 11 is disposed so that the upper wall 21 faces upward. The upper wall 21 of the vacuum chamber 11 has a through-hole 21a (see FIG. 2) that penetrates the upper wall 21 along the reference axis L1 of the vacuum device 10. The lower wall 22 of the vacuum chamber 11 has a through-hole (not shown) that penetrates the lower wall 22 along the reference axis L1.

[0012] The first shaft 12 is inserted along the reference axis L1 through a through-hole 21a in the top wall 21 of the vacuum chamber 11. That is, the first shaft 12 penetrates the top wall 21 of the vacuum chamber 11 along the reference axis L1. The diameter of the through-hole 21a is set to be sufficiently larger than the outer diameter of the first shaft 12 so that the inclination of the first shaft 12 with respect to the reference axis L1 can be changed.

[0013] The first shaft 12 has a first end 12a located inside the vacuum chamber 11 and a second end 12b located outside the vacuum chamber 11. The first end 12a and the second end 12b are opposite ends in the longitudinal direction of the first shaft 12. The first functional portion 13 is provided at the first end 12a of the first shaft 12.

[0014] The second shaft 14 is inserted along the reference axis L1 into the through-hole in the bottom wall 22 of the vacuum chamber 11. That is, the second shaft 14 penetrates the bottom wall 22 of the vacuum chamber 11 along the reference axis L1. The second functional unit 15 is provided at one end of the second shaft 14 located inside the vacuum chamber 11.

[0015] Inside the vacuum chamber 11, the first functional unit 13 and the second functional unit 15 face each other in a direction along the reference axis L1 (hereinafter simply referred to as the axial direction). The second shaft 14 is configured to be movable, for example, along its own length direction, and such movement of the second shaft 14 changes the position of the second functional unit 15 in the axial direction. In other words, the second functional unit 15 moves in a direction toward and away from the first functional unit 13.

[0016] The functions of the first functional unit 13 and the second functional unit 15 may be, for example, such that a workpiece (not shown) is placed on either the first functional unit 13 or the second functional unit 15, and the second functional unit 15 moves in the axial direction as described above, thereby sandwiching and pressing the workpiece between the first functional unit 13 and the second functional unit 15. Alternatively, for example, the second functional unit 15 may move in the axial direction to move toward and away from the first functional unit 13, and when the first functional unit 13 and the second functional unit 15 come into contact with each other, they may be electrically connected to function.

[0017] (Configuration of adjustment mechanism 16) The adjustment mechanism 16 is provided outside the vacuum chamber 11 in correspondence with the first shaft 12. The adjustment mechanism 16 is configured to be able to adjust both the inclination of the first shaft 12 with respect to the reference axis L1 and the position of the first shaft 12 in the horizontal direction D1 perpendicular to the reference axis L1.

[0018] As shown in Figures 1 and 2, the adjustment mechanism 16 includes a base member 31 connected to the first shaft 12, a plurality of height adjustment sections 32 arranged in a circumferential direction (hereinafter simply referred to as the circumferential direction) centered on the reference axis L1, and a flexible sealing member 33.

[0019] A flange portion 12c provided on the second end portion 12b of the first shaft 12 is fixed to a base member 31. This allows the base member 31 and the first shaft 12 to move integrally. The base member 31 is, for example, plate-shaped. The base member 31 has, for example, a plurality of bolt insertion holes 34 that penetrate in the axial direction. The number of bolt insertion holes 34 provided is the same as the number of height adjustment portions 32.

[0020] (Configuration of height adjustment unit 32) A plurality of height adjustment units 32 (for example, four in this embodiment) are provided at equal angular intervals in the circumferential direction, for example. Each height adjustment unit 32 is configured to be able to adjust the height of the base member 31 in the axial direction (position in the axial direction) at each position of each height adjustment unit 32 in the circumferential direction. Furthermore, the base member 31 is connected to each height adjustment unit 32 so as to be movable in the horizontal direction D1.

[0021] 2, each height adjustment unit 32 includes, for example, a bolt 41, a pair of nuts 42, and a pair of spherical washers 43. The bolt 41 extends axially from the upper surface of the upper wall 21 of the vacuum chamber 11. The bolt 41 is inserted into a bolt insertion hole 34 of the base member 31. The diameter of each bolt insertion hole 34 is set to be sufficiently larger than the outer diameter of the bolt 41 so that the base member 31 can move in the horizontal direction D1. As a result, when the pair of nuts 42 is loosened, the base member 31 can move in the horizontal direction D1.

[0022] In each height adjustment unit 32, a pair of nuts 42 is attached to the bolt 41 so as to sandwich the base member 31. In each height adjustment unit 32, a pair of spherical washers 43 inserted into the bolt 41 is provided between the base member 31 and the pair of nuts 42. In each height adjustment unit 32, by moving the pair of nuts 42 and the pair of spherical washers 43 along the axial direction of the bolt 41, it is possible to adjust the height (position in the axial direction) of the base member 31 in each height adjustment unit 32 (see FIG. 3).

[0023] Each spherical washer 43 has a first part 44 that contacts the base member 31 and a second part 45 that contacts the nut 42. The surfaces of the spherical washer 43 where the first part 44 and the second part 45 contact each other are spherical, and the first part 44 and the second part 45 can be relatively displaced along the spherical surface. This makes it possible to clamp and fix the base member 31 by the axial force of the pair of nuts 42, even if the base member 31 is tilted with respect to the reference axis L1 (see FIG. 3).

[0024] (Configuration of flexible sealing member 33) The flexible sealing member 33 of the adjustment mechanism 16 has a substantially cylindrical shape that covers the outer periphery of the portion of the first shaft 12 that protrudes outside the vacuum chamber 11. The flexible sealing member 33 can be, for example, a bellows or a flexible tube. The lower end of the flexible sealing member 33 is connected to, for example, the upper wall 21 so as to surround the through-hole 21a. Airtightness is ensured between the lower end of the flexible sealing member 33 and the upper wall 21. The upper end of the flexible sealing member 33 is fixed to, for example, the flange portion 12c of the first shaft 12. Airtightness is ensured between the upper end of the flexible sealing member 33 and the flange portion 12c. The interior of the flexible sealing member 33 is in communication with the internal space of the vacuum chamber 11 through the through-hole 21a. The flexible sealing member 33 is capable of deforming to follow the attitude of the first shaft 12 (inclination relative to the reference axis L1 and movement in the horizontal direction D1) while keeping the portion including the through-hole 21a airtight, that is, maintaining the vacuum inside the vacuum chamber 11.

[0025] (Action of this embodiment) Hereinafter, the position adjustment of the first shaft 12 and the first functional portion 13 in the vacuum device 10 of this embodiment will be described.

[0026] In the vacuum device 10, due to manufacturing tolerances or the like, at least one of the first shaft 12 and the second shaft 14 may be assembled in a tilted state with respect to the reference axis L1. In this case, the parallelism between the first functional unit 13 and the second functional unit 15 deteriorates, so the positions of the first shaft 12 and the first functional unit 13 are adjusted to improve the parallelism.

[0027] First, in each height adjustment unit 32 of the adjustment mechanism 16, the nuts 42 are loosened to release the connection between the base member 31 and the first shaft 12. Then, the second shaft 14 is moved along its length so that the second functional unit 15 is pressed against the first functional unit 13. Because the first shaft 12 and the base member 31 are able to tilt relative to the reference axis L1, the first functional unit 13 is brought into a position parallel to the second functional unit 15 by being pressed against it. This state in which the first shaft 12 is tilted relative to the reference axis L1 is shown in FIG. 3, for example. The position of the first functional unit 13 in the horizontal direction D1 relative to the second functional unit 15 is also adjusted. Then, the base member 31 is fixed with a pair of nuts 42 in each height adjustment unit 32, completing the position adjustment of the first shaft 12 and the first functional unit 13.

[0028] (Effects of this embodiment) The effects of this embodiment will be described below. (1) The vacuum device 10 includes a vacuum chamber 11, a first shaft 12 extending along a reference axis L1 and penetrating an outer wall 23 of the vacuum chamber 11, the first shaft 12 having a first end 12a positioned inside the vacuum chamber 11 and a second end 12b positioned outside the vacuum chamber 11, a first functional unit 13 provided at the first end 12a of the first shaft 12, and an adjustment mechanism 16 coupled to the first shaft 12 outside the vacuum chamber 11 and capable of adjusting both the inclination of the first shaft 12 with respect to the reference axis L1 and the position of the first shaft 12 in a horizontal direction D1 perpendicular to the reference axis L1. With this configuration, the adjustment mechanism 16 can adjust both the inclination of the first shaft 12 with respect to the reference axis L1 and the position of the first shaft 12 in the horizontal direction D1. This allows the position of the first functional unit 13 within the vacuum chamber 11 to be suitably adjusted by adjusting the inclination of the first shaft 12 and its position in the horizontal direction D1.

[0029] (2) The adjustment mechanism 16 includes a base member 31 connected to the first shaft 12 and a plurality of height adjustment units 32 arranged in the circumferential direction centered on the reference axis L1. Each height adjustment unit 32 is configured to be able to adjust the height of the base member 31 in the direction along the reference axis L1 at its respective position in the circumferential direction. This makes it possible to adjust the inclination of the base member 31 and the first shaft 12 relative to the reference axis L1 by changing the height of the base member 31 at each height adjustment unit 32. Furthermore, the base member 31 is connected to each height adjustment unit 32 so as to be movable in the horizontal direction D1. This makes it possible to adjust the positions of the base member 31 and the first shaft 12 in the horizontal direction D1.

[0030] (3) Each height adjustment unit 32 includes a bolt 41 extending from the outer wall 23 of the vacuum chamber 11 along the reference axis L1, a pair of nuts 42 attached to each bolt 41 and sandwiching the base member 31, and a pair of spherical washers 43 provided between the base member 31 and the pair of nuts 42. With this configuration, the structure of each spherical washer 43 makes it possible to sandwich and fix the base member 31 with the axial force of the pair of nuts 42, even when the base member 31 is tilted with respect to the reference axis L1. Therefore, the adjustment mechanism 16 can adjust the tilt of the first shaft 12 with respect to the reference axis L1.

[0031] (4) The vacuum device 10 includes a pair of shafts 12, 14 and functional units 13, 15, each of which faces the other in a direction along the reference axis L1. Only one adjustment mechanism 16 is provided corresponding to the first shaft 12 of the pair of shafts 12, 14. With this configuration, by adjusting the inclination and position of the first shaft 12 in the horizontal direction D1, it is possible to improve the parallelism of the first functional unit 13 relative to the second functional unit 15 and align the position of the first functional unit 13 relative to the second functional unit 15 in the horizontal direction D1. Furthermore, the adjustment mechanism 16 is provided only for the first shaft 12, which is the fixed shaft of the first shaft 12 and the second shaft 14. In other words, no mechanism for moving the first shaft 12 in the longitudinal direction is provided around the first shaft 12, so the adjustment mechanism 16 for the first shaft 12 can be configured without increasing complexity.

[0032] (5) The outer wall 23 of the vacuum chamber 11 has a through-hole 21a through which the first shaft 12 passes. The adjustment mechanism 16 includes a flexible sealing member 33 that can deform to follow the posture of the first shaft 12 while maintaining airtightness in the portion including the through-hole 21a. With this configuration, even when the inclination of the first shaft 12 or its position in the horizontal direction D1 is changed, the flexible sealing member 33 that follows the posture of the first shaft 12 makes it possible to maintain the vacuum in the vacuum chamber 11.

[0033] (Other embodiments) The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other to the extent that no technical contradiction occurs.

[0034] Only one adjustment mechanism 16 may be provided corresponding to the second shaft 14 of the pair of shafts 12, 14. Alternatively, a pair of adjustment mechanisms 16 may be provided corresponding to each of the first shaft 12 and the second shaft 14.

[0035] The number of height adjustment units 32 in the adjustment mechanism 16 is not limited to that in the above embodiment, and may be three, five or more depending on the configuration of the vacuum device 10. The configuration of the height adjustment unit 32 is not limited to the above embodiment and can be modified as appropriate. For example, each height adjustment unit 32 may be configured to include a pair of movable bolts with curved tips that are movable along the axial direction, and the pair of movable bolts may clamp and fix the base member 31 in the axial direction. Even with this configuration, the adjustment mechanism 16 can adjust both the inclination of the first shaft 12 with respect to the reference axis L1 and the position of the first shaft 12 in the horizontal direction D1.

[0036] In the vacuum device 10 of the above embodiment, for example, the second shaft 14 and the second functional portion 15 may be omitted. The embodiments and modifications disclosed herein are illustrative in all respects, and the present invention is not limited to these examples. That is, the scope of the present invention is defined by the claims, and it is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0037] 10...Vacuum device 11...Vacuum chamber 12...First shaft (shaft) 12a...first end 12b…Second end 13...First functional unit (functional unit) 14...Second shaft (shaft) 15...Second functional section (functional section) 16...Adjustment mechanism 21a...Through hole 23...Exterior wall 31...Base member 32...Height adjustment section 33...Flexible sealing member 41...Bolt 42...Nut 43...Spherical washer D1…Horizontal direction L1…Reference axis

Claims

1. a vacuum chamber; a shaft extending along a reference axis and penetrating an outer wall of the vacuum chamber, the shaft having a first end positioned inside the vacuum chamber and a second end positioned outside the vacuum chamber; a functional portion provided at the first end of the shaft; an adjustment mechanism connected to the shaft outside the vacuum chamber, the adjustment mechanism being capable of adjusting both the inclination of the shaft relative to the reference axis and the position of the shaft in a horizontal direction perpendicular to the reference axis; Vacuum equipment.

2. the adjustment mechanism includes a base member connected to the shaft and a plurality of height adjustment units provided in a circumferential direction around the reference axis, each height adjustment portion is configured to be able to adjust a height of the base member in a direction along the reference axis at a position of each height adjustment portion in the circumferential direction; The base member is connected to each of the height adjustment units so as to be movable in the horizontal direction.

10. The vacuum device of claim 1.

3. Each of the height adjustment units includes a bolt extending from the outer wall of the vacuum chamber along the reference axis, a pair of nuts attached to the bolt and sandwiching the base member therebetween, and a pair of spherical washers respectively provided between the base member and the pair of nuts.

3. The vacuum device of claim 2.

4. the vacuum device includes a pair of the shaft and the functional portion, the functional portions of which face each other in a direction along the reference axis; The adjustment mechanism is provided corresponding to at least one of the pair of shafts.

10. The vacuum device of claim 1.

5. the outer wall of the vacuum chamber has a through hole through which the shaft passes; the adjustment mechanism includes a flexible sealing member that is deformable in accordance with the attitude of the shaft while maintaining airtightness of a portion including the through hole.

10. The vacuum device of claim 1.

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