electrostatic chuck

Abstract

We provide an electrostatic chuck that allows for precise temperature control using a heater. [Solution] The electrostatic chuck 10 comprises a dielectric substrate 100 and a heater unit 300 for heating the dielectric substrate 100. In a top view, the heater unit 300 has heating elements 331, which are conductors individually and linearly routed in each of a plurality of regions HA that are separated so as not to overlap each other. The plurality of regions HA include a first region HA1 located at the outermost position and a second region HA2 located at a position closer to the inner circumference than the first region HA1. The line width of the heating elements 331 routed in the first region HA1 is smaller than the line width of the heating elements 331 routed in the second region HA2.

Images