Semiconductor transport tray storage container, semiconductor transport tray transport device, and method for manufacturing semiconductor devices using the same

Abstract

The trays were stacked and could be stored and removed through a stopper that could be opened and closed by sliding, which was installed on the bottom surface. However, when the trays were stored, the stopper supported the load of the stacked trays. As a result, the visibility of storing and removing the trays was obstructed, and the load of the stacked trays acted to deform the stopper. As a result, the ease of storing and retrieving the trays was compromised, and there was a risk that multiple stacked trays might fall when the stopper deformed. [Solution] The semiconductor transport tray storage container 1 according to the present disclosure comprises a tray storage section 4 capable of storing a plurality of semiconductor transport trays 10, a tray support base 5 that supports the bottom surface 12 of the semiconductor transport tray, an opening 1d through which the semiconductor transport trays 10 can be stored and removed, and a shutter section 2 that can open and close the opening 1d.

Description

Technical Field

[0001] The present disclosure relates to a tray storage container for semiconductor transportation, a tray transportation device for semiconductor transportation, and a method for manufacturing a semiconductor device using these.

Background Art

[0002] In a conventional tray storage container for semiconductor transportation, storage and removal of a plurality of stacked trays are enabled through an openable and closable stopper installed on the bottom surface. Also, when storing the trays, the stopper supports the load of the plurality of stacked trays (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since the conventional technology enables storage and removal of a plurality of stacked trays through a stopper that can be opened and closed by a sliding structure installed on the bottom surface, and the stopper supports the load of the plurality of stacked trays when storing the trays, the visibility of storing and removing the trays is obstructed, and the load of the plurality of stacked trays acts to deform the stopper.

[0005] As a result, it has the problems of impairing the workability of storing and removing the trays and the risk of the plurality of stacked trays falling when the stopper is deformed.

Means for Solving the Problems

[0006] The semiconductor transport tray storage container according to this disclosure comprises a tray storage section capable of storing a plurality of semiconductor transport trays, a tray support base that supports the bottom surface of the semiconductor transport trays, an opening for storing and removing semiconductor transport trays, and a shutter section that can open and close the opening. [Effects of the Invention]

[0007] This disclosure was made to solve the problems described above, and aims to provide a highly reliable semiconductor transport tray storage container that offers excellent workability and prevents multiple stacked trays from falling. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view showing the tray storage container in Embodiment 1. [Figure 2] This is a front view showing the tray storage container in Embodiment 1. [Figure 3] This is a cross-sectional view showing the tray stored in the tray storage container according to Embodiment 1. [Figure 4] This is a top view showing a tray on which a semiconductor device, to be stored in a tray storage container in Embodiment 1, is placed. [Figure 5] (a) A flowchart relating to the manufacturing method of the tray storage container in Embodiment 1. (b) A flowchart relating to the manufacturing method of the tray storage container in Embodiment 1. [Figure 6] This is a front view showing the shutter section of the tray storage container of Embodiment 2, which has a boss and a shutter fixing shaft. [Figure 7] This is a cross-sectional view showing the bottom portion of the tray storage container of Embodiment 2, which has two through grooves. [Figure 8] This is a cross-sectional view showing the bottom portion of a tray storage container, which is a modified example of Embodiment 2, and has three through holes. [Figure 9] This is a front view showing a tray storage container of Embodiment 3, which has multiple shutter sections at both vertical ends. [Figure 10] This is a front view showing less than half of the shutter portion of the tray storage container of Embodiment 3. [Figure 11] This is a front view showing a tray storage container of Embodiment 3, which has multiple shutter sections at both diagonal ends of the tray storage container. [Figure 12] This is a front view showing a tray storage container of Embodiment 3, which has multiple shutter sections at both horizontal ends. [Figure 13] This is a cross-sectional view showing a tray transport device of Embodiment 4 in which a tray storage container and an engagement device are engaged. [Figure 14] This is a bottom view of the tray storage container in the tray transport device of Embodiment 4. [Figure 15] This is a cross-sectional view showing the connection between the tray storage container and the actuator provided in the engagement device of the tray transport device according to Embodiment 4. [Figure 16] This is a cross-sectional view showing the operation of the lifter in the tray transport device of Embodiment 4, where the tray storage container and the engagement device are engaged. [Figure 17] This is a flowchart relating to a method for manufacturing a semiconductor device using a tray storage container and an engagement device, which are part of the tray transport device of Embodiment 4. [Modes for carrying out the invention]

[0009] The embodiments relating to this disclosure will be described below with reference to the drawings.

[0010] Embodiment 1. FIG. 1 is a perspective view showing the tray storage container 1 in Embodiment 1, FIG. 2 is a front view showing the tray storage container 1 in Embodiment 1, FIG. 3 is a cross-sectional view showing a state where the tray 10 is stored in the tray storage container 1 in Embodiment 1, FIG. 4 is a top view showing the tray 10 on which the semiconductor device 15 to be stored in the tray storage container 1 in Embodiment 1 is placed, FIG. 5(a) is a flowchart relating to the manufacturing method of the tray storage container 1 in Embodiment 1, and FIG. 5(b) is a flowchart relating to the manufacturing method of the tray storage container 1 in Embodiment 1.

[0011] In FIG. 1, the tray storage container 1 is used for transportation between the processes of the electrical characteristic test, transportation between the processes of the appearance characteristic test, transportation from the chip test process to the shipping and packing, etc.

[0012] As shown in FIG. 1, the tray storage container 1 is composed of the following articles. The tray storage container 1 has a box shape and has a tray storage portion 4 inside, and can store a plurality of trays 10. This tray storage container 1 includes a tray pedestal 5 that supports the tray bottom surface 12, a side surface portion 1b having an opening 1d, and a shutter portion 2 that can open and close the opening 1d. The shutter portion 2 can open the opening 1d by rotating a shutter shaft 2a around which the shutter portion 2 can be wound, and can close the opening 1d by winding out the shutter portion 2 by rotating the shutter shaft 2a in the opposite direction to the winding case. Also, a large load such as the load of the stacked trays 10 is supported by the tray pedestal 5 composed of rigid fixed parts. Due to the configuration of the tray pedestal 5, the parts are not easily deformed, and the tray storage container 1 can be used for a long time in a safe state. The shape, size, number, etc. of the flange 3 and the flange shaft 3a that connects the flange 3 and the upper plate 1a are changed according to the transportation form.

[0013] As shown in FIGS. 1 and 2, the tray storage container 1 can be opened and closed by a slide shutter that can wind up and unwind a shutter portion 2 capable of opening and closing an opening 1d located on the side surface portion 1b in the horizontal direction. With this design of providing the shutter portion 2 on the side surface portion 1b, the accessibility to the tray storage portion 4 and the visibility of the storage and removal operations of the tray 10 can be improved. By enhancing the visibility, it has the feature that the manual insertion and removal of the tray 10 can be easily performed. By providing the opening 1d on the side surface portion 1b, the storage and removal of the trays 10 stacked horizontally without large vertical movement are possible. Here, the shutter portion 2 may use a folding shutter that performs an opening and closing operation in the horizontal direction as shown in FIGS. 1 and 2, a roll-up shutter that performs an opening and closing operation in the vertical direction, or a hanging shutter.

[0014] Next, as shown in FIG. 4, the tray 10 to be stored in the tray storage container 1 has a plurality of tray pockets 10a, an outer edge portion 13, and a tray information storage portion 14. One semiconductor device 15 can be stored in one tray pocket 10a, and since there are 25 tray pockets 10a in the tray 10 shown in FIG. 4, a total of 25 semiconductor devices 15 can be placed. The tray information storage portion 14 can store information on the semiconductor devices 15 stored in the tray 10, and by reading the tray information storage portion 14, information that cannot be known from the appearance can be obtained. Here, the information stored in the tray information storage portion 14 may store not only information on the semiconductor devices 15 but also other information.

[0015] Also, in order to open the tray storage container 1 as shown in FIG. 3, it is necessary to rotate the shutter shaft 2a. By rotating the shutter shaft 2a, the shutter portion 2 can be wound up and the tray storage container 1 can be opened.

[0016] By opening the tray storage section 4, the tray storage section 4 is exposed, and the trays 10 can be stored in the tray storage section 4. When storing the trays 10 in the tray storage section 4, the bottom surface 12 of the bottom tray 10 is placed in the tray storage container 1 so that it is in contact with the tray support base 5. Subsequent trays 10 are stacked on top of the trays 10 already stored in the tray storage container 1. Regarding the durability of the tray support base 5, it is assumed that the tray storage container 1 will store approximately 52 trays 10. Therefore, a rigid material will be used for the tray support base 5 so that it does not deform even when at least 52 trays 10 and semiconductor devices 15 are stacked on top of it. By making the tray support base 5 a rigid fixing part in this way, it is possible to prevent the trays 10 from falling due to deformation of the part, and the tray storage container 1 can be used safely for a long period of time.

[0017] After storing the tray 10, the shutter shaft 2a, which is located in the open tray storage container 1, is rotated in the opposite direction to the winding direction, thereby unwinding the shutter section 2 and closing the tray storage container 1 as shown in Figure 2.

[0018] Once the shutter section 2 is fully extended and the tray storage container 1 is closed, the shutter fixing section 2b located at the end of the shutter section 2 operates, fixing the shutter section 2 in the closed position. Here, the shutter fixing section 2b can be any device that can fix the shutter section 2 in the closed position, such as attaching a magnet or similar to the shutter section 2 and the tray storage container 1, or attaching a lever to the shutter fixing section 2b. Furthermore, the position of the shutter fixing section 2b does not have to be at the end of the shutter section 2; it is sufficient to install it in a position where the shutter section 2 can be stably fixed in the closed position.

[0019] The tray storage container 1 is configured to include a tray storage container information storage unit 9 that stores ID (Identification) information for each container. This configuration allows for the management of identification information for each tray storage container 1, facilitating information management in the manufacturing process and improving quality control and production efficiency. Furthermore, as shown in Figure 4, each tray 10 stored in the tray storage container 1 may be provided with a tray information storage unit 14 that stores ID information. In this case, for example, the tray 10 is assumed to have a configuration in which the tray information storage unit 14 is attached to the outer edge 13, which is the outer periphery of the tray pocket 10a that stores the semiconductor device 15. This structure allows for information management for each tray 10 in addition to the tray storage container 1, further improving quality control and production efficiency. In addition, the tray storage container information storage unit 9 provided in the tray storage container 1 and the tray information storage unit 14 provided in the tray 10 are assumed to use methods such as two-dimensional codes such as barcodes or information recording media such as RFID (Radio Frequency Identification), but other methods may be adopted. Furthermore, the tray storage container information storage unit 9 and the tray information storage unit 14 may also be formed by directly printing barcodes, etc., onto the tray storage container 1 and the tray 10 using laser processing or the like.

[0020] As shown in Figure 1, the tray storage container 1 has a flange 3 and a flange shaft 3a, which allows for easy transport. In the manufacturing process of semiconductor devices 15 and the like, not only is human transport performed, but automated transport by machines such as AMRs (Autonomous Mobile Robots), OHTs (Overhead Hoist Transfers), and AGVs (Automated Guided Vehicles) is also used. Therefore, the structure and size of the flange 3 and flange shaft 3a are designed to allow for easy transport by humans, as well as to allow for transport by connecting to machines such as the aforementioned AMRs.

[0021] The operation of the tray storage container 1 according to Embodiment 1 will be described below with reference to Figures 5(a) and 5(b).

[0022] First, Figure 5(a) describes the steps involved in storing the tray 10 in the tray storage container 1.

[0023] As shown in step S11 of Figure 5(a), trays 10 on which semiconductor devices 15 are placed are stacked. Here, the tray storage container 1 of this application is intended to store approximately 52 trays 10 for semiconductor devices. Therefore, in step S11, approximately 52 or fewer trays 10 are stacked.

[0024] Next, as shown in step S12 of Figure 5(a), the shutter shaft 2a of the tray storage container 1 is rotated to wind up the shutter section 2 of the tray storage container 1 and open it. Here, in Embodiment 1, it is assumed that the shutter shaft 2a is rotated manually, but in reality, the shutter shaft 2a may be rotated using an external actuator 22. Also, the shutter section 2 may be of a different form, such as a folding type, instead of a winding type.

[0025] Next, as shown in step S13 of Figure 5(a), the trays 10 are stacked and stored on the tray support 5 of the tray storage section 4. As mentioned in step S11, the tray storage container 1 is designed to store approximately 52 trays 10. Therefore, the tray support 5 of the tray storage container 1 is made of a rigid material that will not deform even when at least 52 trays 10 are stacked on top of it.

[0026] Finally, as shown in step S14 of Figure 5(a), the shutter shaft 2a is rotated in the opposite direction to the operation of opening the shutter section 2, thereby unwinding the shutter section 2 of the tray storage container 1 and closing it.

[0027] Next, Figure 5(b) describes the steps involved in removing tray 10 from tray storage container 1.

[0028] First, in step S21 of Figure 5(b), the shutter shaft 2a of the tray storage container 1 is rotated in the same way as in step S11, thereby winding up the shutter section 2 of the tray storage container 1 and opening it. Here, in Embodiment 1, it is assumed that the shutter shaft 2a is rotated manually, but in reality, the shutter shaft 2a may be rotated using an external actuator 22. Also, the shutter section 2 may be of other forms, such as a folding type instead of a winding type.

[0029] Next, as shown in step S22 of Figure 5(b), the tray 10 is removed from the tray storage container 1. Here, since the tray storage container 1 has an opening 1d on its side portion 1b, the tray 10 can be removed from the side.

[0030] Finally, in step S23 of Figure 5(b), similar to step S14, the shutter shaft 2a is rotated in the opposite direction to the operation of opening the shutter section 2, thereby unwinding the shutter section 2 of the tray storage container 1 and closing it.

[0031] As described above, the tray storage container 1 according to Embodiment 1 includes a tray storage section 4 capable of storing and removing multiple semiconductor transport trays 10, a tray support base 5 that supports the bottom surface 12 of the semiconductor transport trays, a side section 1b having an opening 1d, and a shutter section 2 that can open and close the opening 1d. By having these configurations, the workability of storing and removing the trays 10 is improved, and it is possible to prevent multiple stacked trays 10 from falling when the stopper is deformed, as described in Reference Document 1.

[0032] Embodiment 2. Figure 6 is a front view of the tray storage container 1 of Embodiment 2 showing the shutter portion 2 having a boss 6 and a shutter fixing shaft 2c, Figure 7 is a cross-sectional view of the tray storage container 1 of Embodiment 2 showing the bottom portion 1c having two through grooves, and Figure 8 is a cross-sectional view of the tray storage container 1, a modified example of Embodiment 2, showing the bottom portion 1c having three through holes.

[0033] Figures 6-8 show that the tray storage container 1 has a boss 6 fitted into an insertion opening 6a at the bottom of the shutter shaft 2a into which an external actuator 22 can be inserted, and a first through groove 7 in the bottom surface 1c of the tray storage container 1 into which the boss 6 fits, and a shutter fixing shaft 2c that can fix the shutter section 2 in the closed position, and a second through groove 8a in the bottom surface 1c of the tray storage container 1 into which the shutter fixing shaft 2c fits when the shutter section 2 is in the closed position. In a modified example, a third through hole 8b is provided into which the shutter fixing shaft 2c fits when the shutter section 2 is in the open position. By providing the boss 6 in the tray storage container 1, the shutter section 2 can be opened and closed by the external actuator 22, and by providing the shutter fixing shaft 2c, the shutter section 2 can be fixed in the closed position.

[0034] The second embodiment will be described in detail below. As shown in Figure 7, the tray storage container 1 of Embodiment 2 has two through grooves in its bottom surface 1c. As shown in Figure 6, a boss 6 is fitted into one of the first through grooves 7, and a shutter fixing shaft 2c is fitted into the other second through groove 8a. When opening the shutter section 2, the external actuator 22 is inserted into the insertion opening 6a of the boss 6 fitted into the first through groove 7. Subsequently, by pushing the boss 6 and the insertion opening 6a in direction A using the external actuator 22, the first through groove 7 and the boss 6 can be separated.

[0035] As the shutter shaft 2a is pulled up in direction A, the boss 6 and the first through groove 7 are separated, and the shutter fixing shaft 2c, which is positioned parallel to the shutter shaft 2a, is pulled out from the second through groove 8a of the bottom surface 1c, releasing the fixing of the shutter shaft 2a. At this time, the shutter shaft gripping part 2d grips the shutter part 2, and the shutter shaft 2a and the shutter part 2 are lifted in direction A. As the shutter part 2 is lifted, the shutter fixing shaft 2c is separated from the bottom surface 1c, making it possible to rotate the shutter shaft 2a. With the shutter fixing shaft 2c separated from the bottom surface 1c, the fixing of the shutter part 2 is released, and the actuator 22, which is fitted into the boss 6, rotates the shutter shaft 2a, making it possible to wind up the shutter part 2.

[0036] Furthermore, by connecting the external actuator 22 to a control device or motor, the shutter unit 2 can be automatically wound up and unwound. After storing the tray 10 in the storage container, if it is desired to close the opening 1d of the tray storage container 1, the external actuator 22 can be used to close it. In this case, the external actuator 22 inserted into the insertion opening 6a of the boss 6 is rotated in the opposite direction to when winding up the shutter unit 2. This allows the shutter unit 2 to be unwound. After the shutter unit 2 has been completely unwound and the tray storage container 1 is closed, the shutter unit 2 can be fixed in the closed position, similar to the open position, by again pulling the external actuator 22 out of the insertion opening 6a of the boss 6. The boss 6 and the shutter fixing shaft 2c are inserted into two types of through grooves 7 and 8a provided in the bottom surface 1c, respectively, and the shutter unit 2 is fixed in the closed position.

[0037] A modified example of Embodiment 2 will be explained using Figure 8. In this modified example of Embodiment 2, the tray storage section 4 is exposed by winding up the entire shutter section 2, and the tray storage container 1 is opened. Subsequently, by pulling the external actuator 22 out of the tray storage container 1, the boss 6 is engaged with the first through groove 7 of the bottom surface 1c, and at the same time, the shutter fixing shaft 2c is engaged with the second through groove 8b of the bottom surface 1c. The shutter fixing shaft 2c being engaged with the second through groove 8b of the bottom surface 1c makes it possible to fix the shutter section 2 in the open position.

[0038] As described above, the tray storage container 1 shown in Embodiment 2 has a boss 6 fitted into an insertion opening 6a into which an external actuator 22 can be inserted at the lower part of the shutter shaft 2a, a first through groove 7 in the bottom surface 1c of the tray storage container 1 into which the boss 6 fits, a shutter fixing shaft 2c that can fix the shutter in the open and closed states, a second through groove 8a in the bottom surface 1c of the tray storage container 1 into which the shutter fixing shaft 2c fits when it is in the closed state, and a second through groove 8b in which it fits when it is in the open state. By providing this configuration in the tray storage container 1, it becomes possible to open and close the shutter section 2 by the external actuator 22 and to fix the shutter section 2 in the closed and open states.

[0039] Embodiment 3. Figure 9 is a front view of the tray storage container 1 of Embodiment 3, which has multiple shutter sections 2 at both vertical ends; Figure 10 is a front view of the tray storage container 1 of Embodiment 3, which shows less than half of the shutter sections 2; Figure 11 is a front view of the tray storage container of Embodiment 3, which has multiple shutter sections at both diagonal ends of the tray storage container; and Figure 12 is a diagram showing the tray storage container 1 of Embodiment 3, which has multiple shutter sections 2 at both horizontal ends.

[0040] In Embodiment 3, as shown in Figure 9-12, the shutter portion 2 is smaller than the shutter portion 2 of the tray storage container 1 shown in Embodiment 1, and has a smaller area than the opening 1d. By providing this configuration in the tray storage container 1, it is possible to reduce the risk of actuator 22 failure due to the weight of the shutter portion 2 and to reduce the manufacturing cost of the tray storage container 1. Here, regarding the area of ​​the shutter portion 2, for example, it is sufficient if it is designed to be less than half, or about one-third, of the opening 1d, as long as the trays 10 stored inside the storage container do not fall out of the tray storage container 1 during transport.

[0041] The third embodiment will be described in detail below with reference to the figures. In the tray storage container 1 shown in Figure 12, the shutter sections 2 are located at two locations, at both horizontal ends of the opening 1d. In the tray storage container 1 shown in Figure 11, the shutter sections 2 are located at both diagonal ends of the tray storage container. The shutter sections 2 located at both horizontal ends of the opening 1d and at both diagonal ends of the tray storage container each have a shutter shaft 2a, a shutter fixing shaft 2c, and a shutter gripping section, respectively, and can be opened and closed independently. For each operation, the shutter section 2 can be wound up and unwound by rotating the shutter shaft 2a, similar to the tray storage container 1 described in Embodiment 1. The same operation can be performed independently by each shutter section 2 located at both horizontal ends or at both diagonal ends of the tray storage container. In the case of the tray storage container 1 shown in Figure 12, the tray 10 can be stored and removed by opening the two shutter sections 2 at both horizontal ends.

[0042] As shown in Figure 10, in the tray storage container 1, the shutter section 2k is located only on one horizontal side of the opening 1d and has a shutter section 2k that is less than half the size of the opening 1d. Here, the shutter section 2k designed to be less than half the size as shown in Figure 10 only needs to be large enough so that the tray 10 does not fall out when the tray 10 is stored in the tray storage container 1 and transported. In the tray storage container 1 shown in Figure 10, the shutter section 2k is located only on the left side and has a structure in which the shutter section 2k and the shutter shaft 2a are connected. In terms of operation, the shutter section 2 can be wound up and unwound by rotating the shutter shaft 2a, similar to the tray storage container 1 described in Embodiment 1. Here, as shown in Figure 10, in the tray storage container 1, the shutter section 2k is located only on one horizontal side of the opening 1d and has a shutter section 2k that is less than half the size of the opening 1d. This structure reduces the weight of the shutter section 2k, which reduces the risk of failure of the external actuator 22 due to the weight of the shutter section 2k and reduces the manufacturing cost of the tray storage container 1.

[0043] Next, as shown in Figure 9, the tray storage container 1 has shutter sections 2 located at both ends in a direction perpendicular to the opening 1d. In the case of the tray storage container 1 as shown in Figure 9, there are cases where each shutter section 2 has a shutter fixing section 2b, and cases where only the lower shutter section 2 has a shutter fixing section 2b.

[0044] In the tray storage container 1 shown in Figure 11, only the lower first shutter section 2i has a shutter fixing section 2f. Furthermore, when it is desired to wind up or unwind only the lower first shutter section 2i, the first shutter shaft 2h connected to the lower first shutter section 2i is pushed up in direction A, as in Embodiment 1, and the first shutter shaft 2h is rotated. At this time, as the first shutter shaft 2h is pushed up, the first shutter fixing shaft 2f, which is located parallel to the second shutter shaft 2h, is pulled out from the second through groove 8a of the bottom surface 1c. In this case, the upper second shutter section 2e has a recess 2g that is large enough not to collide with the first shutter fixing shaft 2f, so that the first shutter fixing shaft 2f does not collide with it. In this way, even when winding up only the lower first shutter section 2i, it is possible to fix the shutter section 2i during unwinding and winding without interfering with the upper second shutter section 2e. Here, the shutter fixing axis 2c may be provided not only by the lower first shutter section 2i but also by the upper second shutter section 2e.

[0045] As described above, the tray storage container 1 shown in Embodiment 3 has a shutter portion 2 that is smaller than the shutter portion 2 of the tray storage container 1 shown in Embodiment 1, with an area of ​​less than half the area of ​​the opening 1d. By providing this configuration in the tray storage container 1, the weight of the shutter portion 2 is reduced, which reduces the risk of failure of the external actuator 22 due to the weight of the shutter portion 2 and makes it possible to reduce the manufacturing cost of the tray storage container 1.

[0046] Embodiment 4. Figure 13 is a cross-sectional view of the tray transport device of Embodiment 4 in which the tray storage container 1 and the engagement device 23 are engaged, Figure 14 is a bottom view of the bottom surface 1c of the tray storage container 1 of the tray transport device of Embodiment 4, Figure 15 is a cross-sectional view of the tray transport device of Embodiment 4 in which the tray storage container 1 and the actuator 22 of the engagement device 23 are connected, Figure 16 is a cross-sectional view of the tray transport device of Embodiment 4 in which the tray storage container 1 and the engagement device 23 are engaged and the operation of the lifter 11 is shown, and Figure 17 is a flowchart relating to the manufacturing method of a semiconductor device 15 using the tray storage container 1 and the engagement device 23 of the tray transport device of Embodiment 4.

[0047] Figure 13 shows a semiconductor transport tray transport device equipped with an engagement device 23 in addition to the tray storage container 1 of Embodiment 1. This configuration makes it possible to automatically store and remove the trays 10 using the engagement device 23.

[0048] The fourth embodiment will be described in detail below. In Embodiment 4, the engagement device 23 that engages with the tray storage container 1 comprises a positioning block 21, an actuator 22, and a lifter 11. Furthermore, the configuration allows the tray storage container 1 and the engagement device 23 to engage precisely according to the positioning block 21.

[0049] As shown in Figures 13 and 14, the four positioning blocks 21 provided on the engagement device 23 play a role in aligning the tray storage container 1 to the correct position on the engagement device 23 when engaging the tray storage container 1. The positioning blocks 21 are positioned at the four corners of the bottom surface 1c of the tray storage container 1 and function as engagement parts that accurately engage the tray storage container 1 and the engagement device 23. For this reason, the positioning block 21 shown in Figure 14 is L-shaped, and is structured so that the four corners of the tray storage container 1 can be accurately fitted into an L-shape. However, the positioning block 21 does not need to be L-shaped; any shape is acceptable as long as it is structured so that the four corners of the tray storage container 1 can be accurately fitted into. In addition, the positioning block 21 may be tapered in the direction of engagement with the tray storage container 1 to facilitate the placement of the tray storage container 1 and to make it easier for the tray storage container 1 to engage.

[0050] Next, as shown in Figure 13, when the tray storage container 1 and the engagement device 23 are accurately engaged by the positioning block 21, the actuator 22 provided on the engagement device 23 is positioned so that the boss 6 of the tray storage container 1 can be accurately engaged. When opening and closing the shutter section 2, as shown in Figure 15, the insertion part provided on the actuator 22 moves in direction A and is inserted into the insertion opening 6a provided on the boss 6 of the tray storage container 1. After the actuator 22 is inserted, the shutter section 2 can be automatically wound up and unwound by rotating the actuator 22 which is connected to a motor or the like. Here, the actuator 22 only needs to have an insertion part, and the insertion part should be movable along direction A and rotatable about direction A as an axis. In addition, the motor connected to the actuator 22 may be any drive device such as an engine or turbine, not just a motor.

[0051] Next, the lifter 11 provided in the engagement device 23 plays the role of supporting the tray bottom surface 12 of the tray 10 stored in the tray storage container 1. As shown in Figure 16, the lifter 11 moves up and down along direction A to store and remove the tray 10. In addition, as shown in Figures 7 and 14, the tray storage container 1 has a structure in which the lifter 11 can pass through the bottom surface 1c. The lifter 11 extends from the engagement device 23 through this space, and the lifter 11 and the tray bottom surface 12 come into contact, supporting the tray 10 stored in the tray storage container 1. Here, since it is conceivable that the tray storage container 1 can store about 52 trays 10, the lifter 11 should be capable of lifting at least about 52 trays 10.

[0052] Furthermore, the engagement device 23 can move horizontally along the BC plane defined by directions B and C, which are perpendicular to direction A. This horizontal movement enables the tray transport device connected to the engagement device 23 to automatically store, unpack, and transport the trays 10. In addition, the actuator 22 and the lifter 11 are connected to the control unit, which controls the storage and unpacking of the trays 10 into and out of the tray storage container 1. The lifter 11 can move along the direction of direction A, and the tray transport device can move along the BC plane defined by directions B and C; any drive device can be used. The engagement device 23 can also be equipped with multiple tray storage containers 1, and may have a structure that allows the shutter portion 2 of each tray storage container 1 to be opened and closed, enabling the loading and unloading of trays 10. Therefore, the engagement device 23 may be configured to include multiple positioning blocks 21, actuators 22, and lifters 11.

[0053] As described above, the engagement device 23 shown in Embodiment 4 may be configured to include a plurality of positioning blocks 21, actuators 22, and lifters 11. By including a plurality of positioning blocks 21, actuators 22, and lifters 11, a single engagement device 23 can control the storage, retrieval, and transportation of multiple tray storage containers 1.

[0054] The operation of the tray storage container 1 and tray transport device according to Embodiment 4 will be described below with reference to Figure 17.

[0055] First, as shown in step S31 of Figure 17, the tray storage container 1 and the engagement device 23 are precisely positioned using the positioning block 21. Precise positioning allows the actuator 22, which appears in step S32, to engage precisely with the boss 6, and the lifter 11, which appears in steps S33 and S24, to support the tray bottom surface 12 at the correct position. This makes it possible to safely store and remove the tray 10.

[0056] Next, as shown in step S32 of Figure 17, the shutter portion 2 of the tray storage container 1 is opened by the actuator 22. The actuator 22 precisely engages with the boss 6 provided on the tray storage container 1, allowing the mechanism of the actuator 22, such as a motor, to automatically rotate the shutter shaft 2a.

[0057] Next, as shown in step S33 of Figure 17, the lifter 11 provided in the engagement device 23 stores some or all of the stacked trays 10 into the tray storage container 1. Here, since it is conceivable that the tray storage container 1 can store about 52 trays 10, the lifter 11 is designed to be able to lift at least about 52 trays 10.

[0058] Next, as shown in step S34 of Figure 17, the actuator 22 closes the shutter section 2 of the tray storage container 1. Similar to step S22, the actuator 22 precisely engages with the boss 6 on the tray storage container 1 and pulls the boss 6 out of the first through groove 7, thereby automatically rotating the shutter shaft 2a. Therefore, by rotating the shutter shaft 2a in the opposite direction to the opening direction of the shutter section 2, the shutter section 2 is unwound, and the tray storage container 1 can be closed.

[0059] Finally, as shown in step S35 of Figure 17, the tray storage container 1 containing the trays 10 is transported by the engagement device 23. The tray transport device having the engagement device 23 can accommodate multiple tray storage containers 1, and the shutter portion 2 of each tray storage container 1 can be opened and closed to allow the trays 10 to be inserted and removed.

[0060] As described above, the tray transport device shown in Embodiment 4 is a tray transport device that includes an engagement device 23 in addition to the tray storage container 1 of Embodiment 1. The engagement device 23 also includes a positioning block 21, an actuator 22, and a lifter 11. Furthermore, the tray storage container 1 and the engagement device 23 are configured to engage precisely according to the positioning block 21. By providing this configuration, the storage and removal of trays 10 can be performed automatically by the engagement device 23.

[0061] Furthermore, combining or omitting each embodiment as appropriate is also included within the technical scope shown in the embodiments.

[0062] The various aspects of this disclosure are summarized below as an appendix.

[0063] (Note 1) A tray storage section capable of storing semiconductor transport trays, A tray support that supports the bottom surface of the semiconductor transport tray, The aforementioned semiconductor transport tray has an opening that allows it to be stored and removed, A shutter section that can open and close the aforementioned opening, A tray storage container for transporting semiconductors, equipped with the following features. (Note 2) A semiconductor transport tray storage container according to claim 1, comprising a shutter shaft capable of winding up the aforementioned shutter section. (Note 3) A semiconductor transport tray storage container according to claim 1 or 2, further comprising a shutter fixing part for suppressing the operation of the shutter part. (Note 4) A semiconductor transport tray storage container according to any one of claims 1 to 3, comprising a boss having an insertion opening into which an external actuator for operating the shutter shaft can be engaged. (Note 5) A semiconductor transport tray storage container according to any one of claims 1 to 4, comprising a plurality of the shutter sections. (Note 6) The semiconductor transport tray storage container according to any one of claims 1 to 5, characterized in that the area of ​​the shutter portion is smaller than the opening. (Note 7) A semiconductor transport tray storage container according to any one of claims 1 to 6, further comprising one shutter portion at each of the vertical or horizontal ends of the opening. (Note 8) A semiconductor transport tray transport device comprising an engaging device for engaging with a semiconductor transport tray storage container as described in claim 1, A positioning block for determining the position in which the tray storage container and the engagement device are engaged, An actuator having an insertion portion for engaging with the boss and rotating the shutter shaft, A tray transport device for semiconductor transport equipped with the following features. (Note 9) The semiconductor transport tray transport device according to claim 8, further comprising a lifter capable of lifting the semiconductor transport tray up and down and transporting the semiconductor transport tray. (Note 10) A process of stacking multiple semiconductor transport trays on which semiconductor devices are placed, A step of storing the semiconductor transport tray on a tray support for a semiconductor transport tray storage container, The process of closing the shutter portion of the semiconductor transport tray storage container, The steps include opening the shutter portion of the semiconductor transport tray storage container, The process of removing the semiconductor transport tray from the semiconductor transport tray storage container, A method for manufacturing a semiconductor device comprising the same equipment. (Note 11) A method for manufacturing a semiconductor device, comprising transporting a semiconductor transport tray storage container using an engagement device that engages with the semiconductor transport tray storage container, The process involves engaging the engagement device with the semiconductor transport tray storage container using the positioning block provided by the engagement device, The process of opening the shutter portion of the semiconductor transport tray storage container by the actuator provided in the engagement device, A step of storing the semiconductor transport tray in the tray storage container using the lifter provided in the engagement device, The steps include: closing the shutter section using the actuator; A step of transporting the semiconductor transport tray storage container containing the semiconductor transport tray by the engagement device, A method for manufacturing a semiconductor device comprising the same equipment. [Explanation of Symbols]

[0064] 1 Tray storage container, 1a Top plate, 1b Side part, 1c Bottom part, 1d Opening, 2 Shutter part, 2a Shutter shaft, 2b Shutter fixing part, 2c Shutter fixing shaft, 2d Shutter shaft gripping part, 2e First shutter part, 2f Second shutter fixing shaft, 2g Recess, 2h Second shutter shaft, 2i Second shutter part, 2j Shutter gripping part, 2k Shutter part, 2l Shutter fixing shaft, 3 Flange, 3a Flange shaft, 4 Tray storage part, 5 Tray support base, 6 Boss, 6a Insertion opening, 7 First through groove, 8a Second through groove, 8b Third through groove, 9 Tray information storage part, 10 Tray, 10a Tray pocket, 11 Lifter, 12 Tray bottom surface, 13 Outer edge part, 14 Tray information storage part, 15 Semiconductor device, 21 Positioning block, 22 Actuator, 23 Engagement device

Claims

1. A tray storage section capable of storing semiconductor transport trays, A tray support that supports the bottom surface of the semiconductor transport tray, The aforementioned semiconductor transport tray has an opening that allows it to be stored and removed, A shutter section that can open and close the aforementioned opening, A tray storage container for transporting semiconductors, equipped with the following features.

2. A semiconductor transport tray storage container according to claim 1, comprising a shutter shaft capable of winding up the aforementioned shutter section.

3. A semiconductor transport tray storage container according to claim 1, further comprising a shutter fixing part for suppressing the operation of the shutter part.

4. A semiconductor transport tray storage container according to claim 2, further comprising a boss having an insertion opening into which an external actuator for operating the shutter shaft can be engaged.

5. A semiconductor transport tray storage container according to any one of claims 1 to 4, comprising a plurality of the shutter sections.

6. A semiconductor transport tray storage container according to any one of claims 1 to 4, characterized in that the area of ​​the shutter portion is smaller than the opening.

7. The semiconductor transport tray storage container according to claim 5, further comprising one shutter at each of the vertical or horizontal ends of the opening.

8. A semiconductor transport tray transport device comprising an engagement device for engaging with a semiconductor transport tray storage container as described in claim 1, A positioning block for determining the position in which the tray storage container and the engagement device are engaged, An actuator having an insertion portion for engaging with the boss and rotating the shutter shaft, A tray transport device for semiconductor transport equipped with the following features.

9. The semiconductor transport tray transport device according to claim 8, further comprising a lifter capable of lifting the semiconductor transport tray up and down and transporting the semiconductor transport tray.

10. A process of stacking multiple semiconductor transport trays on which semiconductor devices are placed, A step of storing the semiconductor transport tray on a tray support for a semiconductor transport tray storage container, The process of closing the shutter portion of the semiconductor transport tray storage container, The steps include opening the shutter portion of the semiconductor transport tray storage container, The process of removing the semiconductor transport tray from the semiconductor transport tray storage container, A method for manufacturing a semiconductor device comprising the same equipment.

11. A method for manufacturing a semiconductor device, comprising transporting a semiconductor transport tray storage container using an engagement device that engages with the semiconductor transport tray storage container, The process involves engaging the engagement device with the semiconductor transport tray storage container using the positioning block provided by the engagement device, The process of opening the shutter portion of the semiconductor transport tray storage container by the actuator provided in the engagement device, A step of storing the semiconductor transport tray in the tray storage container using the lifter provided in the engagement device, The steps include: closing the shutter section using the actuator; A step of transporting the semiconductor transport tray storage container containing the semiconductor transport tray by the engagement device, A method for manufacturing a semiconductor device comprising the same equipment.

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