Image sensor and electronic device including the same

Abstract

The present invention provides an image sensor and an electronic device including the same. [Solution] The disclosed image sensor includes a sensor substrate including a plurality of photosensitive elements, and a nano-optical lens array including a plurality of nanostructures arranged to separate light of different wavelength bands from the incident light and focus it onto each of the plurality of photosensitive elements. The plurality of photosensitive elements include a first main photosensitive element and a first corner photosensitive element that detect light of a first wavelength band and are arranged adjacent to each other in a first diagonal direction, the nano-optical lens array includes a first main meta region corresponding to the first main photosensitive element and a first corner meta region corresponding to the first corner photosensitive element, and the nanostructures arranged in the first corner meta region are arranged to have symmetry with a first axis passing through the center of the first corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the first corner meta region and parallel to a second diagonal direction different from the first diagonal direction as axes of symmetry.

Description

Technical Field

[0001] The present invention relates to an image sensor and an electronic device including the same.

Background Art

[0002] An image sensor usually senses the color of incident light using a color filter. However, since the color filter absorbs the light of the remaining colors except the light of the color, there is a risk that the light utilization efficiency decreases. For example, when using an RGB color filter, only 1 / 3 of the incident light is transmitted, and the remaining 2 / 3 is absorbed, so the light utilization efficiency is only about 33%. Therefore, in the case of a color display device or a color image sensor, most of the light loss occurs in the color filter.

Summary of the Invention

Problems to be Solved by the Invention

[0003] The problem to be solved by the present invention is to provide an image sensor having improved light efficiency with a nano-optical lens array and an electronic device including the same.

Means for Solving the Problems

[0004] According to the embodiment, the sensor includes a sensor substrate having a plurality of photosensitive elements, and a nanooptical lens array including a plurality of nanostructures arranged to separate light in a first wavelength band, light in a second wavelength band different from the first wavelength band, and light in a third wavelength band different from the first and second wavelength bands from the incident light, and to focus them onto the plurality of photosensitive elements, wherein the plurality of photosensitive elements detect light in the first wavelength band and include a first main photosensitive element and a first corner photosensitive element arranged adjacently in a first diagonal direction, and the first corner photosensitive element is the first main An image sensor is provided, having a size smaller than a photosensitive element, wherein the nano-optical lens array includes a first main meta region corresponding to the first main photosensitive element and a first corner meta region corresponding to the first corner photosensitive element, and among the plurality of nanostructures, the nanostructures arranged in the first corner meta region are arranged to have symmetry with a first axis passing through the center of the first corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the first corner meta region and parallel to a second diagonal direction different from the first diagonal direction as the axis of symmetry.

[0005] The nanostructures in the first corner meta region are arranged such that their size distribution along the first axis and their size distribution along the second axis are different from each other.

[0006] The nanostructures in the first corner meta region are such that the number located on the first axis is different from the number located on the second axis.

[0007] The plurality of photosensitive elements further include a second main photosensitive element and a second corner photosensitive element for detecting light in the second wavelength band, a third main photosensitive element and a third corner photosensitive element for detecting light in the third wavelength band, and a fourth main photosensitive element and a fourth corner photosensitive element for detecting light in the first wavelength band, wherein the first to fourth main photosensitive elements are arranged in a 2x2 array configuration along a first direction that forms a 45° angle with the second diagonal direction and a second direction perpendicular to the first direction, the second corner photosensitive element is arranged adjacent to the second main photosensitive element in the first diagonal direction, the third corner photosensitive element is arranged adjacent to the third main photosensitive element in the first diagonal direction, and the fourth corner photosensitive element is arranged adjacent to the fourth main photosensitive element in the first diagonal direction.

[0008] The nano-optical lens array further includes a second main meta region corresponding to the second main photosensitive element and a second corner meta region corresponding to the second corner photosensitive element, wherein the nanostructures of the second corner meta region are arranged to have symmetry with respect to a first axis passing through the center of the second corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the second corner meta region and parallel to the second diagonal direction.

[0009] The nanostructures in the second corner meta region are arranged such that their size distribution along the first axis of the second corner meta region is different from that along the second axis of the second corner meta region.

[0010] The nano-optical lens array further includes a third main meta region corresponding to the third main photosensitive element and a third corner meta region corresponding to the third corner photosensitive element, wherein the nanostructures of the third corner meta region are arranged to have symmetry with respect to a first axis passing through the center of the third corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the third corner meta region and parallel to the second diagonal direction, and the size distribution on the first axis of the third corner meta region and the size distribution on the second axis of the third corner meta region are different from each other.

[0011] The nano-optical lens array further includes a second main meta region corresponding to the second main photosensitive element, a third main meta region corresponding to the third main photosensitive element, a fourth main meta region corresponding to the fourth main photosensitive element, a second corner meta region corresponding to the second corner photosensitive element, a third corner meta region corresponding to the third corner photosensitive element, and a fourth corner meta region corresponding to the fourth corner photosensitive element, wherein the arrangement of nanostructures in the first main meta region and the fourth main meta region are identical, and the arrangement of nanostructures in the first corner meta region and the fourth corner meta region are identical.

[0012] The first main photosensitive element and the fourth main photosensitive element detect green light, the second main photosensitive element detects red light, and the third main photosensitive element detects blue light.

[0013] The nano-optical lens array includes a first main green light focusing region that focuses green light onto the first main photosensitive element, a first corner green light focusing region that focuses green light onto the first corner photosensitive element, a main red light focusing region that focuses red light onto the second main photosensitive element, a corner red light focusing region that focuses red light onto the second corner photosensitive element, a main blue light focusing region that focuses blue light onto the third main photosensitive element, and a corner blue light focusing region that focuses blue light onto the third corner photosensitive element.

[0014] The width of the first corner green light focusing region in the first diagonal direction is less than or equal to the width of the first corner meta region in the first diagonal direction.

[0015] The width of the first corner green light focusing region in the second diagonal direction is greater than the width of the first corner meta region in the second diagonal direction.

[0016] The size of the first corner green light focusing region is no more than three times the size of the first corner meta region.

[0017] The nanostructures in the first corner green light focusing region are arranged such that their size distribution along the first axis and their size distribution along the second axis are different from each other.

[0018] The width of the first main green light focusing region in the first diagonal direction is greater than or equal to the width of the first main meta region in the first diagonal direction, and the width of the first main green light focusing region in the second diagonal direction is greater than the width of the first main meta region in the second diagonal direction.

[0019] The nano-optical lens array further includes a second corner meta region corresponding to the second corner photosensitive element, the size of the corner red light focusing region is larger than the second corner meta region, and the width of the corner red light focusing region in the second diagonal direction is greater than or equal to the width of the corner red light focusing region in the first diagonal direction.

[0020] The nano-optical lens array further includes a second main meta region corresponding to the second main photosensitive element, the size of the main red light focusing region is larger than the second main meta region, and the width of the main red light focusing region in the second diagonal direction is greater than or equal to the width of the main red light focusing region in the first diagonal direction.

[0021] The nano-optical lens array further includes a third corner meta region corresponding to the third corner photosensitive element, the size of the corner blue light focusing region is larger than the third corner meta region, and the width of the corner blue light focusing region in the second diagonal direction is greater than or equal to the width of the corner blue light focusing region in the first diagonal direction.

[0022] Of the plurality of nanostructures, the nanostructures arranged in the first main meta-region are arranged to have symmetry with an axis passing through the center of the first main meta-region and parallel to the first diagonal direction, and an axis passing through the center of the first main meta-region and parallel to the second diagonal direction as axes of symmetry, or they are arranged to have symmetry with an axis passing through the center of the first main meta-region and parallel to a first direction that makes a 45° angle with the second diagonal direction, and an axis passing through the center of the first main meta-region and parallel to a second direction that is orthogonal to the first direction as axes of symmetry.

[0023] According to the embodiment, the image sensor includes a lens assembly that forms an optical image of a subject, an image sensor that converts the optical image formed by the lens assembly into an electrical signal, and a processor that processes the signal generated by the image sensor. The image sensor includes a sensor substrate having a plurality of photosensitive elements, and a nanooptical lens array that includes a plurality of nanostructures arranged to separate light in a first wavelength band, light in a second wavelength band different from the first wavelength band, and light in a third wavelength band different from the first and second wavelength bands from the incident light, and to focus them onto the plurality of photosensitive elements. The plurality of photosensitive elements detect light in the first wavelength band and process the first diagonal. An electronic device is provided, comprising a first main photosensitive element and a first corner photosensitive element arranged adjacent to each other in the direction, wherein the first corner photosensitive element is smaller in size than the first main photosensitive element, the nanooptical lens array comprises a first main meta region corresponding to the first main photosensitive element and a first corner meta region corresponding to the first corner photosensitive element, and among the plurality of nanostructures, the nanostructures arranged in the first corner meta region are arranged to have symmetry with a first axis passing through the center of the first corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the first corner meta region and parallel to a second diagonal direction different from the first diagonal direction. [Effects of the Invention]

[0024] The image sensor according to this embodiment improves light utilization efficiency by incorporating a nano-optical lens array that performs both color separation and light focusing functions.

[0025] With the nano-optical lens array provided in the image sensor according to the embodiment, light of the same color or different colors can be efficiently separated and condensed onto adjacent pixels in the diagonal direction with different sizes.

[0026] The image sensor according to the embodiment can dynamically utilize pixels in both low-illumination environments and high-illumination environments, and can be applied to, for example, HDR (high dynamic range) sensors.

Brief Description of the Drawings

[0027] [Figure 1] It is a schematic block diagram of an image sensor according to the embodiment. [Figure 2] It is a plan view exemplarily showing the pixel arrangement of the pixel array of the image sensor according to the embodiment. [Figure 3A] It is a plan view exemplarily showing another pixel arrangement applicable to the pixel array of the image sensor according to the embodiment. [Figure 3B] It is a plan view exemplarily showing another pixel arrangement applicable to the pixel array of the image sensor according to the embodiment. [Figure 3C] It is a plan view exemplarily showing another pixel arrangement applicable to the pixel array of the image sensor according to the embodiment. [Figure 4] It is a plan view showing the arrangement of a plurality of photosensitive elements on a sensor substrate provided in the pixel array of the image sensor according to the embodiment. [Figure 5] It is a plan view showing the area division of the nano-optical lens array provided in the pixel array of the image sensor according to the embodiment. [Figure 6A] It is a plan view exemplarily showing the arrangement of nanostructures included in the nano-optical lens array provided in the pixel array of the image sensor according to the embodiment. [Figure 6B] It is a plan view showing in detail the nanostructure arrangement of the corner meta region shown in FIG. 6A. [Figure 7A]This is a cross-sectional view of the pixel array of the image sensor according to the embodiment, taken from the A-A' section in Figure 6A. [Figure 7B] This is a cross-sectional view of the pixel array of the image sensor according to the embodiment, taken from the B-B' section in Figure 6A. [Figure 8] This is a plan view illustrating the corner focusing region formed by the nano-optical lens array of the pixel array of an image sensor according to an embodiment. [Figure 9] This is a plan view illustrating the main light-gathering region formed by the nano-optical lens array of the pixel array of an image sensor according to an embodiment. [Figure 10A] This is a plan view illustrating an exemplary red light focusing region formed by a nano-optical lens array of a pixel array in an image sensor according to an embodiment. [Figure 10B] This is a plan view illustrating an exemplary green light focusing region formed by a nano-optical lens array of the pixel array of an image sensor according to an embodiment. [Figure 10C] This is a plan view illustrating an example of a blue light focusing region formed by a nano-optical lens array of a pixel array in an image sensor according to an embodiment. [Figure 11A] This graph shows the color separation performance of the image sensor according to the embodiment compared to a comparative example. [Figure 11B] This graph shows the color separation performance of the image sensor according to the embodiment compared to a comparative example. [Figure 12A] This is a plan view showing another example of a red light focusing region formed by a nano-optical lens array according to another embodiment. [Figure 12B] This is a plan view showing another example of a green light focusing region formed by a nano-optical lens array according to another embodiment. [Figure 12C] This is a plan view showing another example of a blue light focusing region formed by a nano-optical lens array according to another embodiment. [Figure 13] Furthermore, this is a plan view illustrating the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment. [Figure 14]Furthermore, this is a plan view illustrating the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment. [Figure 15] Furthermore, this is a plan view illustrating the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment. [Figure 16] Furthermore, this is a plan view illustrating the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment. [Figure 17A] Furthermore, this is a plan view illustrating the axis of symmetry applicable to the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment. [Figure 17B] This is a plan view illustrating a nano-optical lens array in which nanostructures are arranged along the same axis of symmetry as in Figure 17A. [Figure 18A] Furthermore, this is a plan view illustrating the axis of symmetry applicable to the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment. [Figure 18B] This is a plan view illustrating a nano-optical lens array in which nanostructures are arranged along the same axis of symmetry as in Figure 18A. [Figure 19] This is a cross-sectional view showing an image sensor pixel array equipped with a nano-optical lens array according to another embodiment. [Figure 20] This is a schematic block diagram showing an electronic device including an image sensor according to an embodiment. [Figure 21] This is a schematic block diagram showing the camera module installed in the electronic device shown in Figure 20. [Figure 22] This is a block diagram of an electronic device including a multi-camera module. [Figure 23] Figure 22 is a detailed block diagram of one camera module installed in the electronic device. [Modes for carrying out the invention]

[0028] The embodiments will be described in detail below with reference to the attached drawings. The embodiments described are merely illustrative, and various modifications are possible from these embodiments. In the following drawings, the same reference numerals refer to the same components, and the dimensions of each component in the drawings may be exaggerated for clarity and convenience of explanation.

[0029] In the following, "upper" or "above" refers not only to items that are in contact and directly above, but also to items that are not in contact and are located above.

[0030] The terms "1st," "2nd," etc., may be used to describe various components, but are used solely for the purpose of distinguishing one component from others. These terms do not limit the components to differences in material or structure.

[0031] A singular expression includes multiple expressions unless the context clearly indicates otherwise. Furthermore, when a part "contains" a component, this means, unless otherwise specified, that it can contain other components, rather than excluding them.

[0032] Furthermore, terms such as "~part" and "~module" used in the specification refer to a unit that processes at least one function or operation, which may be embodied in hardware or software, or in a combination of hardware and software.

[0033] The use of the term "the aforementioned" and similar demonstrative terms applies to both singular and plural nouns.

[0034] The steps constituting the method may be performed in any order unless explicitly stated otherwise. Furthermore, the use of all illustrative terms (e.g., etc.) is solely for the purpose of detailing the technical idea and does not limit the scope of rights unless limited by a claim.

[0035] Figure 1 is a schematic block diagram of an image sensor according to one embodiment. Referring to Figure 1, the image sensor 1000 includes a pixel array 1100, a timing controller 1010, a row decoder 1020, and an output circuit 1030. The image sensor may be a CCD (charge coupled device) image sensor or a CMOS (complementary metal oxide semiconductor) image sensor.

[0036] The pixel array 1100 includes pixels arranged in a two-dimensional array along multiple rows and columns. The row decoder 1020 selects one of the rows of the pixel array 1100 in response to a row address signal output from the timing controller 1010. The output circuit 1030 outputs a light-sensing signal from multiple pixels arranged along the selected row, on a column-by-column basis. For this purpose, the output circuit 1030 includes a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 1030 includes multiple ADCs arranged column by column between the column decoder and the pixel array 1100, or a single ADC located at the output terminal of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented as a single chip or as separate chips. A processor for processing the video signal output through the output circuit 1030 may also be implemented as a single chip together with the timing controller 1010, the row decoder 1020, and the output circuit 1030.

[0037] The pixel array 1100 includes multiple pixels that sense light of different wavelengths. The arrangement of pixels can be implemented in various ways.

[0038] The pixel array 1100 includes multiple pixels that sense light of different wavelengths. The pixel arrangement can be implemented in various ways. For example, Figure 2 illustrates the pixel arrangement of the pixel array 1100 of an image sensor 1000 according to one embodiment. Referring to Figure 2, the pixel array 1100 includes main pixels based on a Bayer pattern structure commonly adopted in image sensors, and corner pixels between the main pixels. The pixel array 1100 includes a plurality of two-dimensionally arranged unit pixel structures, each of which includes a main pixel and a corner pixel.

[0039] The main pixels include a first green main pixel G1a, a red main pixel Ra, a blue main pixel Ba, and a second green main pixel G2a, arranged in a 2x2 array configuration along a first direction (X) and a second direction (Y). Within the unit pixel structure, the red main pixel Ra and the blue main pixel Ba may be arranged in the second diagonal direction D2, and the first green main pixel G1a and the second green main pixel G2a may be arranged in the first diagonal direction D1, which intersects the second diagonal direction D2.

[0040] Looking at the overall arrangement of the main pixels, the first row consists of multiple first green main pixels G1a and multiple red main pixels Ra arranged alternately along the first direction (X direction), and the second row consists of multiple blue main pixels Ba and multiple second green main pixels G2a arranged alternately along the first direction. These rows are repeated along the second direction (Y direction), which is perpendicular to the first direction. The first and second directions are the directions in which the pixel array 1100 extends on a plane. For example, one side of the pixel array 1100 extends along the first direction, and the other side extends along the second direction. The second diagonal direction D2 and the first diagonal direction D1 are directions between the first and second directions. The first diagonal direction D1 is the direction that makes a 45° angle with the second direction (Y direction). The second diagonal direction D2 is the direction that intersects the first diagonal direction and is perpendicular to the first diagonal direction D1.

[0041] Corner pixels can be positioned adjacent to their corresponding main pixels in the first diagonal direction D1. For example, a corner pixel may include a first green corner pixel G1b positioned adjacent to a first green main pixel G1a in the first diagonal direction D1, a red corner pixel Rb positioned adjacent to a red main pixel Ra in the first diagonal direction D1, a blue corner pixel Bb positioned adjacent to a blue main pixel Ba in the first diagonal direction D1, and a second green corner pixel G2b positioned adjacent to a second green main pixel G2a in the first diagonal direction D1. Considering only the corner pixels, multiple first green corner pixels G1b and multiple red corner pixels Rb may be arranged alternately along the first direction, and in cross-sections with different positions in the second direction, multiple blue corner pixels Bb and multiple second green corner pixels G2b may be arranged alternately along the first direction.

[0042] Looking at the overall pixel arrangement of the pixel array 1100, the first green main pixel G1a, the first green corner pixel G1b, the second green main pixel G2a, and the second green corner pixel G2b may be arranged alternately along one cross section in the first diagonal direction D1. Therefore, only green pixels may be arranged in one cross section in the first diagonal direction D1. The first green corner pixel G1b may be placed between the first green main pixel G1a and the second green main pixel G2a in the first diagonal direction D1, and the second green corner pixel G2b may be placed between the second green main pixel G2a and the first green main pixel G1a in the first diagonal direction D1. In addition, red main pixels Ra, red corner pixels Rb, blue main pixels Ba, and blue corner pixels Bb may be arranged alternately in other cross sections parallel to the first diagonal direction D1. The red corner pixel Rb may be positioned between the red main pixel Ra and the blue main pixel Ba in the first diagonal direction D1, and the blue corner pixel Bb may be positioned between the blue main pixel Ba and the red main pixel Ra in the first diagonal direction D1.

[0043] Furthermore, in one cross-section in the second diagonal direction D2, the first green main pixel G1a, red corner pixel Rb, second green main pixel G2a, and blue corner pixel Bb may be arranged alternately. Therefore, in the second diagonal direction D2, the red corner pixel Rb and the blue corner pixel Bb may be positioned between two green main pixels. In the other cross-section parallel to the second diagonal direction D2, the red main pixel Ra, first green corner pixel G1b, blue main pixel Ba, and second green corner pixel G2b may be arranged alternately. Therefore, in the second diagonal direction D2, the first green corner pixel G1b and the second green corner pixel G2b may be positioned between the red main pixel Ra and the blue main pixel Ba.

[0044] The main pixels are more than three times larger in size (e.g., width or side length) than the corner pixels. For example, the width of a main pixel is approximately 3 μm or more, while the width of a corner pixel is approximately 1 μm. Therefore, because the light-receiving area of ​​the main pixels is larger than that of the corner pixels, the sensitivity of the main pixels is higher than that of the corner pixels. An image sensor 1000 including a pixel array 1100 having such a pixel arrangement is, for example, an HDR (High Dynamic Range) image sensor. In this case, in a low-light environment, an image can be generated mainly using the signal output from the main pixels, and in a high-light environment, an image can be generated using all the signals output from both the main pixels and the corner pixels. Therefore, by using main pixels with relatively high sensitivity and corner pixels with relatively low sensitivity, the contrast ratio of the image can be significantly improved.

[0045] Figures 3A to 3C are illustrative plan views showing other pixel arrays that may be applied to the pixel array of the image sensor according to the embodiment.

[0046] Figure 3A shows an RGBW substrate array, which includes main pixels and corner pixels representing green (G), red (R), blue (B), and white (W).

[0047] Figure 3B shows the RYYB substrate array, which includes main pixels and corner pixels representing yellow (Y), red (R), blue (B), and yellow (Y).

[0048] Figure 3C shows a CMYY substrate array, i.e., it includes main pixels and corner pixels representing yellow (Y), magenta (M), and yellow (C).

[0049] The pixel arrangement of the image sensor described below will be illustrated using Figure 2 as an example, but it can also be transformed into configurations like those shown in Figures 3A to 3C.

[0050] Figure 4 is a plan view showing the arrangement of multiple photosensitive elements on a sensor substrate provided in the pixel array of an image sensor according to an embodiment.

[0051] The sensor substrate 110 includes a plurality of photosensitive elements that sense incident light. The sensor substrate 110 includes a first main photosensitive element 111a and a first corner photosensitive element 111b, which are arranged adjacent to each other, detect light of the same wavelength, and are of different sizes.

[0052] The sensor substrate 110 includes a plurality of first main photosensitive elements 111a, a plurality of second main photosensitive elements 112a, a plurality of third main photosensitive elements 113a, and a plurality of fourth main photosensitive elements 114a. The sensor substrate 110 may further include a plurality of first corner photosensitive elements 111b, a plurality of second corner photosensitive elements 112b, a plurality of third corner photosensitive elements 113b, and a plurality of fourth corner photosensitive elements 114b.

[0053] Referring to Figure 2, Figure 4 can be explained as follows: The first main photosensitive element 111a corresponds to the first green main pixel G1a, the first corner photosensitive element 111b corresponds to the first green corner pixel G1b, the second main photosensitive element 112a corresponds to the red main pixel Ra, the second corner photosensitive element 112b corresponds to the red corner pixel Rb, the third main photosensitive element 113a corresponds to the blue main pixel Ba, the third corner photosensitive element 113b corresponds to the blue corner pixel Bb, the fourth main photosensitive element 114a corresponds to the second green main pixel G2a, and the fourth corner photosensitive element 114b corresponds to the second green corner pixel G2b. Therefore, the explanation of the arrangement of the first green main pixel G1a, the first green corner pixel G1b, the red main pixel Ra, the red corner pixel Rb, the blue main pixel Ba, the blue corner pixel Bb, the second green main pixel G2a, and the second green corner pixel G2b can be directly applied to the first main photosensitive element 111a, the first corner photosensitive element 111b, the second main photosensitive element 112a, the second corner photosensitive element 112b, the third main photosensitive element 113a, the third corner photosensitive element 113b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b.

[0054] The sensor substrate 110 includes a plurality of unit structures arranged in two dimensions along a first direction and a second direction, each unit structure including a first main photosensitive element 111a, a second main photosensitive element 112a, a third main photosensitive element 113a, and a fourth main photosensitive element 114a arranged in a 2x2 array configuration. Furthermore, each unit structure includes a first corner photosensitive element 111b positioned adjacent to the first main photosensitive element 111a in the first diagonal direction D1, a second corner photosensitive element 112b positioned adjacent to the second main photosensitive element 112a in the first diagonal direction D1, a third corner photosensitive element 113b positioned adjacent to the third main photosensitive element 113a in the first diagonal direction D1, and a fourth corner photosensitive element 114b positioned adjacent to the fourth main photosensitive element 114a in the first diagonal direction D1. Furthermore, the first main photosensitive element 111a is larger than the first corner photosensitive element 111b, the second main photosensitive element 112a is larger than the second corner photosensitive element 112b, the third main photosensitive element 113a is larger than the third corner photosensitive element 113b, and the fourth main photosensitive element 114a is larger than the fourth corner photosensitive element 114b.

[0055] Figure 5 is a plan view showing the regional divisions of a nano-optical lens array provided in the pixel array of an image sensor according to an embodiment.

[0056] The nano-optical lens array 130 can be configured to color-separate incident light. For example, the nano-optical lens array 130 can separate incident light into a first wavelength band (e.g., green light), a second wavelength band different from the first wavelength band (e.g., red light), and a third wavelength band different from the first and second wavelength bands (e.g., blue light), and allow them to travel along different paths. The nano-optical lens array 130 can also be configured to act as a lens that focuses the color-separated light of the first wavelength band, the second wavelength band, and the third wavelength band onto the photosensitive elements corresponding to each light.

[0057] Referring to Figure 4, Figure 5 can be explained as follows: The nano-optical lens array 130 may include multiple meta-regions corresponding to multiple photosensitive elements of the sensor substrate 110. For example, the nano-optical lens array 130 includes multiple first main meta-regions 131a corresponding to multiple first main photosensitive elements 111a, multiple first corner meta-regions 131b corresponding to multiple first corner photosensitive elements 111b, multiple second main meta-regions 132a corresponding to multiple second main photosensitive elements 112a, multiple second corner meta-regions 132b corresponding to multiple second corner photosensitive elements 112b, multiple third main meta-regions 133a corresponding to multiple third main photosensitive elements 113a, multiple third corner meta-regions 133b corresponding to multiple third corner photosensitive elements 113b, multiple fourth main meta-regions 134a corresponding to multiple fourth main photosensitive elements 114a, and multiple fourth corner meta-regions 134b corresponding to multiple fourth corner photosensitive elements 114b.

[0058] A cluster of arranged first main meta-regions 131a, first corner meta-regions 131b, second main meta-regions 132a, second corner meta-regions 132b, third main meta-regions 133a, third corner meta-regions 133b, fourth main meta-regions 134a, and fourth corner meta-regions 134b can form a single unit meta-structure. The first main meta region 131a, the first corner meta region 131b, the second main meta region 132a, the second corner meta region 132b, the third main meta region 133a, the third corner meta region 133b, the fourth main meta region 134a, and the fourth corner meta region 134b may be arranged to face the corresponding first main photosensitive elements 111a, the first corner photosensitive element 111b, the second main photosensitive element 112a, the second corner photosensitive element 112b, the third main photosensitive element 113a, the third corner photosensitive element 113b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b along a third direction (Z direction) perpendicular to the first and second directions.

[0059] In other words, within a unit metastructure, the arrangement of the first main meta region 131a, the first corner meta region 131b, the second main meta region 132a, the second corner meta region 132b, the third main meta region 133a, the third corner meta region 133b, the fourth main meta region 134a, and the fourth corner meta region 134b can be the same as the positions of the corresponding first main photosensitive element 111a, the first corner photosensitive element 111b, the second main photosensitive element 112a, the second corner photosensitive element 112b, the third main photosensitive element 113a, the third corner photosensitive element 113b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b within a unit pixel pattern. Furthermore, the first main meta region 131a is larger than the first corner meta region 131b, the second main meta region 132a is larger than the second corner meta region 132b, the third main meta region 133a is larger than the third corner meta region 133b, and the fourth main meta region 134a is larger than the fourth corner meta region 134b.

[0060] The first main meta region 131a, first corner meta region 131b, second main meta region 132a, second corner meta region 132b, third main meta region 133a, third corner meta region 133b, fourth main meta region 134a, and fourth corner meta region 134b, which constitute the nano-optical lens array 130, can be configured to separate light in the first wavelength band from the incident light and focus it on the first main photosensitive element 111a, first corner photosensitive element 111b, fourth main photosensitive element 114a, and fourth corner photosensitive element 114b, respectively; separate light in the second wavelength band and focus it on the second main photosensitive element 112a and second corner photosensitive element 112b; and separate light in the third wavelength band and focus it on the third main photosensitive element 113a and third corner photosensitive element 113b.

[0061] For this purpose, the nano-optical lens array 130 may include a plurality of nanostructures arranged according to a predetermined rule. The plurality of nanostructures may be divided and arranged into a first main meta region 131a, a first corner meta region 131b, a second main meta region 132a, a second corner meta region 132b, a third main meta region 133a, a third corner meta region 133b, a fourth main meta region 134a, and a fourth corner meta region 134b that constitute the nano-optical lens array 130.

[0062] Figure 6A is a plan view illustrating the arrangement of nanostructures included in a nano-optical lens array provided in the pixel array of an image sensor according to an embodiment, and Figure 6B is a plan view showing in detail the arrangement of nanostructures in the corner meta region shown in Figure 6A.

[0063] The first main meta region 131a, the second main meta region 132a, the third main meta region 133a, and the fourth main meta region 134a each contain one or more nanostructures NP. The first corner meta region 131b, the second corner meta region 132b, the third corner meta region 133b, and the fourth corner meta region 134b each contain one or more nanostructures NP.

[0064] The number of nanostructures NP located in the first main meta-region 131a is greater than the number of nanostructures NP located in the first corner meta-region 131b. Similarly, the number of nanostructures NP located in the second main meta-region 132a, the third main meta-region 133a, and the fourth main meta-region 134a is greater than the number of nanostructures NP located in the second corner meta-region 132b, the third corner meta-region 133b, and the fourth corner meta-region 134b, respectively. However, this is illustrative and not limited to these examples.

[0065] The nanostructure NP located in the first corner meta region 131a may have symmetry with respect to the first axis AX1 and the second axis AX2. The first axis AX1 is an axis passing through the center of the first corner meta region 131b and parallel to the first diagonal direction D1, and the second axis AX2 is an axis passing through the center of the first corner meta region 131b and parallel to the second diagonal direction D2.

[0066] The nanostructures NP in the first corner meta region 131b may be arranged such that their size distribution on the first axis AX1 is different from their size distribution on the second axis AX2. As shown in detail in Figure 6B, nanostructures NP of different sizes may be arranged in the first corner meta region 131b. Nanostructures NP of the same size are indicated by the same number, and their size distribution on the first axis AX1 is different from their size distribution on the second axis AX2.

[0067] In Figures 6A and 6B, the number of nanostructures NP in the first corner meta region 131b located on the first axis AX1 is the same as the number located on the second axis AX2, but this is not limited to this. The number of nanostructures NP in the first corner meta region 131b located on the first axis AX1 and the number located on the second axis AX2 may be different. Similar to the detailed representation of the first corner meta region 131b in Figure 6B, the nanostructures in the second corner meta region 132b, the third corner meta region 133b, and the fourth corner meta region 134b may also have similar arrangement patterns.

[0068] Within the second corner meta region 132b, the third corner meta region 133b, and the fourth corner meta region 134b, a first axis AX1 passing through the center of each region and parallel to the first diagonal direction D1, and a second axis AX2 parallel to the second diagonal direction can be defined.

[0069] The nanostructures NP arranged in the second corner meta region 132b can have symmetry with respect to the first axis AX1 and the second axis AX2 of the second corner meta region 132b. The nanostructures NP arranged in the second corner meta region 132b can be arranged such that their size distribution on the first axis AX1 and their size distribution on the second axis AX2 are different.

[0070] The number of nanostructures NP in the second corner meta region 132b located on the first axis AX1 and the number located on the second axis AX2 are different, but are not limited to this, and may be the same.

[0071] The nanostructures NP located in the third corner meta region 133b may have symmetry with respect to the first axis AX1 and the second axis AX2 of the third corner meta region 133b. The nanostructures NP located in the third corner meta region 133b may be arranged such that their size distribution on the first axis AX1 and their size distribution on the second axis AX2 are different.

[0072] The number of nanostructures NP in the third corner meta region 133b located on the first axis AX1 and the number located on the second axis AX2 are different, but are not limited to this, and may be the same.

[0073] The nanostructures NP located in the fourth corner meta region 134b may have symmetry with respect to the first axis AX1 and the second axis AX2 of the fourth corner meta region 134b. The nanostructures NP located in the fourth corner meta region 134b may be arranged such that their size distribution on the first axis AX1 and their size distribution on the second axis AX2 are different.

[0074] As shown in Figure 6A, the nanostructure NP located in the first corner meta region 131b and the nanostructure NP located in the fourth corner meta region 134b have the same arrangement configuration. However, this is not limited to this configuration. The arrangement configurations of the nanostructure NPs in the first corner meta region 131b and the fourth corner meta region 134b may be 180 degrees rotationally symmetric to each other.

[0075] Figures 7A and 7B are cross-sectional views of the pixel array of the image sensor according to the embodiment, taken from the A-A' and B-B' sections of Figure 6A.

[0076] Referring to Figures 7A and 7B, the pixel array 1100 includes a sensor substrate 110 and a nano-optical lens array 130 disposed on the sensor substrate 110. A spacer layer 120 may be disposed between the sensor substrate 110 and the nano-optical lens array 130. A color filter layer 140 may be disposed between the sensor substrate 110 and the spacer layer 120. The color filter layer 140 may be omitted.

[0077] As described in detail in the plan view of Figure 4, the sensor substrate 110 includes a first main photosensitive element 111a, a second main photosensitive element 112a, a third main photosensitive element 113a, and a fourth main photosensitive element 114a, and may also include a first corner photosensitive element 111b, a second corner photosensitive element 112b, a third corner photosensitive element 113b, and a fourth corner photosensitive element 114b. Figures 7A and 7B show the A-A' and B-B' cross-sections of Figure 6A, respectively, and the second corner photosensitive element 112b and the third corner photosensitive element 113b are not shown.

[0078] The spacer layer 120 is positioned between the sensor substrate 110 and the nano-optical lens array 130 and plays a role in maintaining a constant distance between the sensor substrate 110 and the nano-optical lens array 130. The spacer layer 120 can be made of a dielectric material that is transparent to visible light, such as PMMA (poly methyl methacrylate), siloxane-based glass (SOG; siloxane-based spin on glass), SiO2, Si3N4, Al2O3, etc., which has a lower refractive index than the nanostructure NP described later and has low absorption in the visible light band.

[0079] The color filter layer 140 may include a plurality of color filters that transmit light in a specific wavelength band and absorb light in other wavelength bands. For example, the color filter layer 140 may include a green color filter GF that transmits green light and absorbs light in other wavelength bands, a red color filter RF that transmits red light and absorbs light in other wavelength bands, and a blue color filter BF that transmits blue light and absorbs light in other wavelength bands.

[0080] The green color filter GF is arranged on the first main photosensitive element 111a, the first corner photosensitive element 111b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b; the red color filter RF is arranged on the second main photosensitive element 112a and the second corner photosensitive element 112b; and the blue color filter BF is arranged on the third main photosensitive element 113a and the third corner photosensitive element 113b. Because the nano-optical lens array 130 separates colors as the amount of incident light increases, absorption loss by the color filter layer 140 can be kept low even when the color filter layer 140 is used. Furthermore, color purity can be improved by using the nano-optical lens array 130 and the color filter layer 140 in combination.

[0081] The nano-optical lens array 130 includes a plurality of nanostructures NP, and may further include a dielectric layer DL filled between the plurality of nanostructures NP. The plurality of nanostructures NP in the nano-optical lens array 130 can be configured in various ways in order for the nano-optical lens array 130 to perform the aforementioned color separation and light focusing functions. For example, the plurality of nanostructures NP can be arranged such that the phase of the transmitted light passing through the nano-optical lens array 130 differs depending on their position on the nano-optical lens array 130. The phase profile of the transmitted light embodied by the nano-optical lens array 130 can be determined by the cross-sectional size (e.g., width or diameter), cross-sectional shape and height of each nanostructure NP, and the arrangement period (or pitch) and arrangement configuration of the plurality of nanostructures NP. Furthermore, the behavior of the light transmitted through the nano-optical lens array 130 can be determined according to the phase profile of the transmitted light.

[0082] The nanostructure NP has a size smaller than the wavelength of visible light. For example, the nanostructure NP has a size smaller than the blue wavelength. For example, the cross-sectional width (or diameter) of the nanostructure NP is smaller than 400 nm, 300 nm, or 200 nm, and greater than about 80 nm. The height of the nanostructure NP is between about 500 nm and about 1500 nm, and the height is greater than the cross-sectional width.

[0083] Nanostructures NP may consist of materials that have a relatively high refractive index compared to the surrounding material and relatively low absorptivity in the visible light band. For example, nanostructures NP include c-Si, p-Si, a-Si, and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO2, SiN3, ZnS, ZnSe, Si3N4, and / or combinations thereof. Nanostructures NP may be filled with a dielectric layer DL that has a relatively lower refractive index than the surrounding nanostructures NP and relatively low absorptivity in the visible light band. For example, the dielectric layer DL may be filled with PMMA, siloxane glass (SOG), SiO2, Si3N4, Al2O3, air, etc.

[0084] The refractive index of the nanostructure NP is approximately 2.0 or higher for light with a wavelength of approximately 630 nm, while the refractive index of the dielectric layer DL may be between approximately 1.0 and less than 2.0 for light with a wavelength of approximately 630 nm. Furthermore, the difference between the refractive index of the nanostructure NP and the refractive index of the dielectric layer DL may be approximately 0.5 or higher. Nanostructures NP having a refractive index difference with the surrounding material can change the phase of light passing through them. This is due to a phase delay caused by the sub-wavelength shape and dimensions of the nanostructure NP, and the degree of phase delay is determined by the detailed shape, dimensions, and arrangement of the nanostructure NP.

[0085] The arrangement of the nanostructures NP determines the form of color separation and light focusing performed by the nano-optical lens array 130, which varies depending on the color of the photosensitive element on the sensor substrate 110 opposite the nano-optical lens array 130.

[0086] Although not shown in the diagram, an etch stop layer may be placed between the spacer layer 120 and the nano-optical lens array 130. Such an etch stop layer is provided in the manufacturing process of the nano-optical lens array 130 to protect the spacer layer 120, which is the underlying structure of the nano-optical lens array 130. When manufacturing the nano-optical lens array 130 on the spacer layer 120, a dielectric layer DL is formed entirely on the spacer layer 120 and then etched to a predetermined depth. At this time, there is a risk that the spacer layer 120 may be damaged by etching beyond the desired depth, and if the thickness of the spacer layer 120 no longer conforms to the distance requirement between the nano-optical lens array 130 and the sensor substrate 110, the color separation performance will decrease. The etch stop layer is made of a material with a lower etching selectivity ratio than the material layer being etched, and by remaining without being easily removed in the etching process, it can prevent damage to the spacer layer 120 due to the etching process. The etch stop layer contains HfO2. The thickness of the etch stop layer may be determined by considering the etching depth, i.e., the height of the nanostructure NP, or by considering the etching variation within the process wafer. The etch stop layer has a thickness of approximately 3 nm to 30 nm.

[0087] Although not shown in the diagram, a protective layer may be further arranged on the nano-optical lens array 130 to protect it. The protective layer consists of a material that acts as an anti-reflective layer. The anti-reflective layer can improve the light utilization efficiency of the pixel array 1100 by reducing the amount of incident light reflected from the upper surface of the nano-optical lens array 130. In other words, the anti-reflective layer ensures that light incident on the pixel array 1100 from the outside passes through the nano-optical lens array 130 without being reflected from the upper surface of the nano-optical lens array 130 and is detected by the sensor substrate 110. The anti-reflective layer may be a single layer or a structure of multiple layers stacked together. For example, it may be formed as a single layer of a material different from the material making up the nano-optical lens array 130, or it may be formed as multiple layers of materials with different refractive indices.

[0088] Referring to Figure 7A, the first corner meta region 131b can separate green light from the light incident not only on the first corner meta region 131b itself, but also on the adjacent third main meta region 133 and second main meta region 132a, and focus it on the first corner photosensitive element 111b. Similarly, the fourth corner meta region 134b can separate green light from the light incident not only on the fourth corner meta region 134b itself, but also on the adjacent second main meta region 132a and third main meta region 133a, and focus it on the fourth corner photosensitive element 114a.

[0089] The second main meta region 132a can separate red light from the light incident not only on the second main meta region 132a itself, but also on the adjacent first corner meta region 131b and fourth corner meta region 134b, and focus it on the second main photosensitive element 112a. Similarly, the third main meta region 133a can separate blue light from the light incident not only on the third main meta region 133a, but also on the first corner meta region 131b and fourth corner meta region 134b, and focus it on the third main photosensitive element 113a.

[0090] Thus, the region of the nano-optical lens array 130 is described as including a main blue light focusing region BLa, a first corner green light focusing region GLb1, a main red light focusing region RLa, and a second corner green light focusing region GLb2, and the width in the second diagonal direction D2 of the main blue light focusing region BLa, the first corner green light focusing region GLb1, the main red light focusing region RLa, and the second corner green light focusing region GLb2 may be larger than the width in the second diagonal direction D2 of the third main meta region 133a, the first corner meta region 131b, the second main meta region 132a, and the fourth corner meta region 134b, respectively.

[0091] Referring to Figure 7B, the first diagonal direction D1 is arranged with the first main photosensitive element 111a, the first corner photosensitive element 111b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b, all of which detect green light.

[0092] Therefore, the first corner meta region 131b separates green light from the light incident on the first corner meta region 131b and focuses it on the first corner photosensitive element 111b, while not capturing green light from the light incident on the first main meta region 131a and the fourth main meta region 134a adjacent to the first corner meta region 131b. Similarly, the fourth corner meta region 134b separates green light from the light incident on the fourth corner meta region 134b and focuses it on the fourth corner photosensitive element 114b, while not capturing green light from the light incident on the fourth main meta region 134a and the first main meta region 131a adjacent to the fourth corner meta region 134b.

[0093] The first main meta region 131a separates green light from the light incident on the first main meta region 131a and focuses it on the first main photosensitive element 111a, while not capturing green light from the light incident on the first corner meta region 131b and the fourth corner meta region 134b adjacent to the first main meta region 131a. Similarly, the fourth main meta region 134a separates green light from the light incident on the fourth main meta region 134a and focuses it on the fourth main photosensitive element 114a, while not capturing green light from the light incident on the first corner meta region 131b and the fourth corner meta region 134b adjacent to the fourth main meta region 134a.

[0094] Thus, the region of the nano-optical lens array 130 is described as including a first main green light focusing region GLa1, a first corner green light focusing region GLb1, a second main green light focusing region GLa2, and a second corner green light focusing region GLb2, where the width in the first diagonal direction D1 of the first main meta region 131a, the first corner meta region 131b, the second main meta region 132a, and the second corner green light focusing region GLb2 can be equal to the width of the first main meta region 131a, the first corner meta region 131b, the second main meta region 132a, and the second corner meta region 132b, respectively.

[0095] However, this is illustrative, and in modified embodiments, the first corner meta region 131b and the fourth corner meta region 134b do not capture green light incident on adjacent regions, while the first main meta region 131a and the fourth main meta region 134a may capture green light incident on adjacent regions. In other words, the width of the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2 in the first diagonal direction D1 is equal to the width of the first diagonal direction D1 of the first corner meta region 131b and the fourth corner meta region 134b, respectively, while the width of the first main green light focusing region GLa1 and the second main green light focusing region GLa2 in the first diagonal direction D1 is greater than the width of the first main meta region 131a and the fourth main meta region 134a, respectively.

[0096] The light-gathering region formed by the nano-optical lens array 130 can be described in more detail with reference to Figures 8 to 10C as follows.

[0097] Figure 8 is a plan view illustrating the corner focusing region formed by the nano-optical lens array of the pixel array of an image sensor according to an embodiment.

[0098] Referring to Figure 8, the nano-optical lens array 130 forms a first corner green light focusing region GLb1, a second corner green light focusing region GLb2, a corner red light focusing region RLb, and a corner blue light focusing region BLb.

[0099] The first corner green light focusing region GLb1 focuses the green light from the incident light onto the first corner photosensitive element 111b. The second corner green light focusing region GLb2 focuses the green light from the incident light onto the second corner photosensitive element 112b. The corner red light focusing region RLb focuses the red light from the incident light onto the second corner photosensitive element 112b. The corner blue light focusing region BLb focuses the blue light from the incident light onto the third corner photosensitive element 113b.

[0100] The first corner green light focusing region GLb1, the second corner green light focusing region GLb2, the corner red light focusing region RLb, and the corner blue light focusing region BLb each have different widths in the first diagonal direction D1 and the second diagonal direction D2. The widths in the first diagonal direction D1 and the second diagonal direction D2 can be set depending on whether adjacent regions face pixels of the same color.

[0101] The first corner green light focusing region GLb1, the second corner green light focusing region GLb2, the corner red light focusing region RLb, and the corner blue light focusing region BLb can each have a width in the second diagonal direction D2 that is greater than or equal to the width in the first diagonal direction D1.

[0102] In the first corner green light focusing region GLb1, the second corner green light focusing region GLb2, the corner red light focusing region RLb, and the corner blue light focusing region BLb, a first axis and a second axis are defined, as shown in Figures 6A and 6B, respectively. The size distribution of the nanostructures in each of these regions may differ between the first axis and the second axis.

[0103] The widths in the first diagonal direction D1 of the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2 may be the same as the widths in the first diagonal direction D1 of the first corner meta region 131b and the fourth corner meta region 134b, respectively. The widths in the second diagonal direction D2 of the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2 may be larger than the widths in the second diagonal direction D2 of the first corner meta region 131b and the fourth corner meta region 134b, respectively.

[0104] In the corner red light focusing region RLb, the width in the first diagonal direction D1 may be greater than the width in the first diagonal direction D1 of the second corner meta region 132b, and the width in the second diagonal direction D2 may be greater than the width in the first diagonal direction of the second corner meta region 132b. In the second corner meta region 132b, the width in the first diagonal direction D1 is smaller than the width in the second diagonal direction D2. This is because the second corner meta region 132b is adjacent to the second main meta region 132a in the first diagonal direction D1, and the second corner meta region 132b and the second main meta region 132a face pixels of the same red color.

[0105] In the corner blue light focusing region BLb, the width in the first diagonal direction D1 may be greater than the width in the first diagonal direction D1 of the third corner meta region 133b, and the width in the second diagonal direction D2 may be greater than the width in the first diagonal direction of the third corner meta region 133b. In the corner blue light focusing region BLb, the width in the first diagonal direction D1 is smaller than the width in the second diagonal direction D2. This is because the third corner meta region 133b is adjacent to the third main meta region 133a in the first diagonal direction D1, and the third corner meta region 133b is adjacent to the third main meta region 133a, and faces pixels of the same blue color.

[0106] In Figure 8, the sizes of the corner red light focusing region RLb and the corner blue light focusing region BLb, i.e., the area of ​​the cross-section perpendicular to the third direction (Z direction) perpendicular to the first direction X and the second direction Y, are shown to be larger than the sizes of the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2. However, this is illustrative and not limiting. Depending on the width of the second diagonal direction D2, the sizes of the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2 may be even larger than the sizes of the corner red light focusing region RLb and the corner blue light focusing region BLb.

[0107] In Figure 8, the first corner green light focusing region GLb1, the corner red light focusing region RLb, the corner blue light focusing region BLb, and the second corner green light focusing region GLb2 are shown to be larger than the first corner meta region 131b, the second corner meta region 132b, the second corner meta region 132b, and the third corner meta region 133b, respectively. However, this is illustrative and not limited to these dimensions. If the widths D2 in the second diagonal direction of the first corner green light focusing region GLb1, the corner red light focusing region RLb, the corner blue light focusing region BLb, and the second corner green light focusing region GLb2 are smaller than the widths D2 in the second diagonal direction of the first corner meta region 131b, the second corner meta region 132b, the second corner meta region 132b, and the third corner meta region 133b, then the first corner green light focusing region GLb1, the corner red light focusing region RLb, the corner blue light focusing region BLb, and the second corner green light focusing region GLb2 may be smaller than the first corner meta region 131b, the second corner meta region 132b, the second corner meta region 132b, and the third corner meta region 133b, respectively.

[0108] The size of the first corner green light focusing region GLb1 may be approximately three times or less the size of the first corner meta region 131b. The size of the first corner green light focusing region GLb1 may be one-quarter or more the size of the first corner meta region 131b.

[0109] The size of the second corner green light focusing region GLb2 may be approximately three times or less the size of the fourth corner meta region 134b. The size of the second corner green light focusing region GLb2 may be more than half the size of the fourth corner meta region 134b.

[0110] The sizes of the corner red light focusing region RLb and the corner blue light focusing region BLb can be between 1 / 2 and 3 times the size of the second corner meta region 132b and the third corner meta region 133b, respectively.

[0111] Figure 9 is a plan view illustrating the main light-gathering region formed by the nano-optical lens array of the pixel array of an image sensor according to an embodiment.

[0112] Referring to Figure 9, the nano-optical lens array 130 forms a first main green light focusing region GLa1, a second main green light focusing region GLa2, a main red light focusing region RLa, and a main blue light focusing region BLa.

[0113] The first main green light focusing region GLa1 focuses the green light from the incident light onto the first main photosensitive element 111a. The second main green light focusing region GLa2 focuses the green light from the incident light onto the fourth main photosensitive element 114a. The main red light focusing region RLa focuses the red light from the incident light onto the second main photosensitive element 112a. The main blue light focusing region BLa focuses the blue light from the incident light onto the third main photosensitive element 113a.

[0114] The first main green light focusing region GLa1, the second main green light focusing region GLa2, the main red light focusing region RLa, and the main blue light focusing region BLa may have different widths in the first diagonal direction D1 and the second diagonal direction D2. The widths in the first diagonal direction D1 and the second diagonal direction D2 may be set depending on whether adjacent regions face pixels of the same color.

[0115] The first main green light focusing region GLa1, the second main green light focusing region GLa2, the main red light focusing region RLa, and the main blue light focusing region BLa may each have a width in the second diagonal direction D2 that is greater than or equal to the width in the first diagonal direction D1. The first main green light focusing region GLa1, the second main green light focusing region GLa2, the main red light focusing region RLa, and the main blue light focusing region BLa may each have a width in the second diagonal direction D2 that is greater than the width in the first diagonal direction D1.

[0116] The widths in the first diagonal direction D1 of the first main green light focusing region GLa1 and the second main green light focusing region GLa2 may be the same as the widths in the first diagonal direction D1 of the first main meta region 131a and the fourth main meta region 134a, respectively. The widths in the second diagonal direction D2 of the first main green light focusing region GLa1 and the second main green light focusing region GLa2 may be larger than the widths in the second diagonal direction D2 of the first main meta region 131a and the fourth main meta region 134a, respectively.

[0117] The width of the main red light focusing region RLa in the first diagonal direction D1 may be greater than the width of the second main meta region 132a in the first diagonal direction D1, and the width of the second diagonal direction D2 may be greater than the width of the second main meta region 132a in the first diagonal direction D1. The width of the main red light focusing region RLa in the first diagonal direction D1 may be smaller than the width of the second diagonal direction D2. This is because the second main meta region 132a is adjacent to the second corner meta region 132b in the first diagonal direction D1, and the second main meta region 132a and the second corner meta region 132b face pixels of the same red color.

[0118] The main blue light focusing region BLa may have a width in the first diagonal direction D1 that is greater than the width in the first diagonal direction D1 of the third main meta region 133a, and a width in the second diagonal direction D2 that is greater than the width in the first diagonal direction of the third main meta region 133a. The main blue light focusing region BLa may have a width in the first diagonal direction D1 that is smaller than the width in the second diagonal direction D2. This is because the third main meta region 133a is adjacent to the third corner meta region 133b in the first diagonal direction D1, and the third main meta region 133a and the third corner meta region 133b face pixels of the same blue color.

[0119] Figures 10A to 10C are illustrative plan views showing the red light focusing region, green light focusing region, and blue light focusing region formed by the nano-optical lens array of the pixel array of the image sensor according to the embodiment.

[0120] Referring to Figure 10A, the red light focusing region RL includes a main red light focusing region RLa and a corner red light focusing region RLb. The sizes of the main red light focusing region RLa and the corner red light focusing region RLb are as described in Figures 8 and 9. The nano-optical lens array 130 forms an array of these red light focusing regions RL that focus the red light from the incident light onto the red pixels.

[0121] Referring to Figure 10B, the first green light focusing region GL1 and the second green light focusing region GL2 are shown. The first green light focusing region GL1 includes the first main green light focusing region GLa1 and the first corner green light focusing region GLb1. The second green light focusing region GL2 includes the second main green light focusing region GLa2 and the second corner green light focusing region GLb2. The sizes of the first main green light focusing region GLa1, the first corner green light focusing region GLb1, the second main green light focusing region GLa2, and the second corner green light focusing region GLb2 are as described in Figures 8 and 9. The nano-optical lens array 130 forms an array of these green light focusing regions GL1 and GL2 that focus the green light from the incident light onto the green pixels.

[0122] Referring to Figure 10C, the blue light focusing region BL includes a main blue light focusing region BLa and a corner blue light focusing region BLb. The sizes of the main blue light focusing region BLa and the corner blue light focusing region BLb are as described in Figures 8 and 9. The nano-optical lens array 130 forms an array of these blue light focusing regions BL that focus the blue light from the incident light onto the blue pixels.

[0123] Figures 11A and 11B are graphs showing the color separation performance of the image sensor according to the embodiment compared to a comparative example.

[0124] Figure 11A shows the light spectra detected in the main pixels, i.e., the first main photosensitive element 111a, the second main photosensitive element 112a, the third main photosensitive element 113a, and the fourth main photosensitive element 114a, and Figure 11B shows the light spectra detected in the corner pixels, i.e., the first corner photosensitive element 111b, the second corner photosensitive element 112b, the third corner photosensitive element 113b, and the fourth corner photosensitive element 114b.

[0125] The comparative example is a case where the arrangement of nanostructures forming a light-collecting region, as in the embodiment, is not applied. The graph shows that the light efficiency is improved in the embodiment compared to the comparative example.

[0126] Figures 12A to 12C are plan views showing other examples of red light focusing regions, green light focusing regions, and blue light focusing regions formed by nano-optical lens arrays according to other embodiments.

[0127] Referring to Figure 12A, the nano-optical lens array 130' of this embodiment differs from that described in Figure 10A because the width of the first diagonal direction D1 of the corner red light focusing region RLb is further reduced, and the width of the first diagonal direction D1 of the main red light focusing region RLa is further increased.

[0128] Referring to Figure 12B, the nano-optical lens array 130 of this embodiment differs from that described in Figure 10B because the width of the first diagonal direction D1 of the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2 is further reduced, and the width of the first diagonal direction D1 of the first main green light focusing region GLa1 and the second main green light focusing region GLa2 is further increased.

[0129] Referring to Figure 12C, the nano-optical lens array 130' of this embodiment differs from that described in Figure 10C because the width of the first diagonal direction D1 of the corner blue light focusing region BLb is further reduced, and the width of the first diagonal direction D1 of the main blue light focusing region BLa is further increased.

[0130] Below, we will describe various examples of nanostructure arrangements for nano-optical lens arrays that form the light-gathering regions described above.

[0131] Figure 13 is a plan view illustrating the arrangement of multiple nanostructures in a nano-optical lens array according to yet another embodiment.

[0132] Referring to Figure 13, the corner focusing region formed by the nano-optical lens array 130A can be even larger than the corner focusing region formed by the nano-optical lens array 130 in Figure 8. For example, the width in the second diagonal direction D2 of the first corner green light focusing region GLb1 can be even larger than the width in the second diagonal direction of the first corner green light focusing region GLb1 of the nano-optical lens array 130 in Figure 8. Also, the width in the first diagonal direction D1 of the corner red light focusing region RLb and the corner blue light focusing region BLb can be even larger than the width in the first diagonal direction of the corner blue light focusing region BLb and the corner red light focusing region RLb of the nano-optical lens array 130 in Figure 8.

[0133] The number of nanostructures NP in the first corner meta region 131b arranged on the first axis AX1 may be different from the number located on the second axis AX2. The number of nanostructures NP in the fourth corner meta region 134b arranged on the first axis AX1 may be different from the number located on the second axis AX2. Figure 14 is a plan view illustrating the arrangement of multiple nanostructures in a nano-optical lens array according to yet another embodiment.

[0134] The nano-optical lens array 130B in Figure 14 is similar in size to the nano-optical lens array 130 in Figure 8 in terms of the size of the light-gathering region, but differs in the number and arrangement of detailed nanostructures.

[0135] Figure 15 is a plan view illustrating an arrangement of multiple nanostructures in a nano-optical lens array according to yet another embodiment.

[0136] The nano-optical lens array 130C of this embodiment differs from the nano-optical lens array 130 of Figure 8 in the shape of the corner focusing regions. The first corner green light focusing region GLb1, the corner red light focusing region RLb, the corner blue light focusing region BLb, and the second corner green light focusing region GLb2 each have a square shape in which the width in the first diagonal direction D1 and the width in the second diagonal direction D2 are approximately the same.

[0137] This embodiment can be considered from the perspective of adjusting the ratio of light efficiency between the main light-gathering region and the corner light-gathering regions. In this embodiment, the light efficiency of the first corner green light-gathering region GLb1, the corner red light-gathering region RLb, the corner blue light-gathering region BLb, and the second corner green light-gathering region GLb2 can be further improved.

[0138] Figure 16 is a plan view illustrating an example of the arrangement of multiple nanostructures in a nano-optical lens array according to yet another embodiment.

[0139] The nano-optical lens array 130D of this embodiment forms a square-shaped corner green light focusing region, and the first corner green light focusing region GLb1 and the second corner green light focusing region GLb2 have an enlarged area compared to the nano-optical lens array 130C in Figure 15.

[0140] Furthermore, the corner red light focusing region RLb has a rectangular shape, unlike in the case of the nano-optical lens array 130C in Figure 15, and the corner blue light focusing region Blb has a smaller square shape than in the case of the nano-optical lens array 130C in Figure 15. However, this is illustrative, and in other embodiments, the corner red light focusing region RLb1 may have a smaller square area compared to the case of the nano-optical lens array 130C in Figure 5, and the corner blue light focusing region Blb may have a rectangular shape.

[0141] Figure 17A is a plan view illustrating an axis of symmetry applicable to the arrangement of multiple nanostructures in a nano-optical lens array according to yet another embodiment, and Figure 17B is a plan view illustrating a nano-optical lens array in which nanostructures are arranged along the same axis of symmetry as in Figure 17A.

[0142] Within the first main meta region 131a, the second main meta region 132a, the third main meta region 133a, and the fourth main meta region 134a, a first axis AX1 and a second axis AX2 can be defined, passing through the center of each region and parallel to the first diagonal direction D1 and the second diagonal direction D2, respectively.

[0143] The nanostructures NP located in the first main meta region 131a, the second main meta region 132a, the third main meta region 133a, the fourth main meta region 134a, the first corner meta region 131b, the second corner meta region 132b, the third corner meta region 133b, and the fourth corner meta region 134b can be arranged to have symmetry with respect to the first axis AX1 and the second axis AX2, respectively.

[0144] Figure 18A is a plan view illustrating an axis of symmetry applied to the arrangement of multiple nanostructures in a nano-optical lens array according to yet another embodiment, and Figure 18B is a plan view illustrating a nano-optical lens array in which nanostructures are arranged along the same axis of symmetry as in Figure 18A.

[0145] Within the first main meta region 131a, the second main meta region 132a, the third main meta region 133a, and the fourth main meta region 134a, a third axis AX3 and a fourth axis AX4 can be defined, passing through the centers of each region and parallel to the first direction X and the second direction Y.

[0146] The nanostructures NP located in the first main meta region 131a, the second main meta region 132a, the third main meta region 133a, and the fourth main meta region 134a may be arranged to have symmetry with respect to the third axis AX3 and the fourth axis AX4.

[0147] The nanostructures NP located in the first corner meta region 131b, the second corner meta region 132b, the third corner meta region 133b, and the fourth corner meta region 134b can be arranged to have symmetry with respect to the first axis AX1 and the second axis AX2.

[0148] Figure 19 is a cross-sectional view showing an image sensor pixel array comprising a nano-optical lens array according to yet another embodiment.

[0149] The nano-optical lens array 130G includes a two-layer nanostructure. For example, the nanostructure NP of the nano-optical lens array 130G may be arranged in a first lens layer LE1 and a second lens layer LE2.

[0150] An etch stop layer may be placed between the first lens layer LE1 and the second lens layer LE2, although this is not shown in the diagram. The etch stop layer ES may be provided to prevent damage to the first lens layer LE1 during the manufacturing process of the second lens layer LE2. When forming the second lens layer LE2 on the first lens layer LE1, a dielectric layer DL is formed entirely on the first lens layer LE, and this is etched to a predetermined depth. At this time, there is a risk that the first lens layer LE1 may be damaged by etching beyond the desired depth, and if the height of the first lens layer LE1 no longer meets the desired height requirement, the color separation performance may decrease. The etch stop layer formed on the first lens layer LE1 consists of a material having a lower etching selectivity ratio than the material layer being etched, so that it is not completely removed during the etching process and remains partially, thereby preventing damage to the first lens layer LE1. The etch stop layer contains HfO2. The thickness of the etch stop layer may be determined considering the etching depth, i.e., the height of the second lens layer LE2, or it may be determined considering the etching variation within the process wafer. The etch stop layer has a thickness of approximately 3 nm to 30 nm.

[0151] Although the nanostructures NP in the first lens layer LE1 and the second lens layer LE2 were shown to have the same arrangement, this is illustrative and not limited to this arrangement. By arranging the nanostructures in two layers, the aspect ratio of the nanostructures NP can be substantially increased, and the design flexibility for the nano-optical lens array 130C can be increased.

[0152] The image sensor 1000 according to this embodiment can be used in a camera module with modular lenses of various performance levels and can be utilized in a variety of electronic devices.

[0153] Figure 20 is a block diagram showing an example of an electronic device ED01 including an image sensor 1000. Referring to Figure 20, in a network environment ED00, electronic device ED01 communicates with other electronic devices ED02 via a first network ED98 (such as a short-range wireless communication network), or with other electronic devices ED04 and / or server ED08 via a second network ED99 (such as a long-range wireless communication network). Electronic device ED01 communicates with electronic device ED04 via server ED08. Electronic device ED01 includes a processor ED20, memory ED30, input device ED50, sound output device ED55, display device ED60, audio module ED70, sensor module ED76, interface ED77, haptic module ED79, camera module ED80, power management module ED88, battery ED89, communication module ED90, subscriber identification module ED96, and / or antenna module ED97. Some of these components (such as the display device ED60) may be omitted from the electronic device ED01, or other components may be added. Some of these components may be implemented as a single integrated circuit. For example, the sensor module ED76 (such as a fingerprint sensor, iris sensor, or light sensor) may be implemented by being incorporated into the display device ED60 (such as a display).

[0154] The processor ED20 can execute software (such as program ED40) to control one or more other components (hardware, software components, etc.) of the electronic device ED01 connected to the processor ED20, and perform various data processing or calculations. As part of the data processing or calculations, the processor ED20 can load instructions and / or data received from other components (such as sensor module ED76, communication module ED90) into volatile memory ED32, process the instructions and / or data stored in volatile memory ED32, and store the resulting data in non-volatile memory ED34. The processor ED20 includes a main processor ED21 (central processing unit, application processor, etc.) and auxiliary processors ED23 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently or together with it. The auxiliary processor ED23 consumes less power than the main processor ED21 and can perform specialized functions.

[0155] The auxiliary processor ED23 can control functions and / or states related to some components of the electronic device ED01 (such as the display device ED60, sensor module ED76, and communication module ED90) on behalf of the main processor ED21 when the main processor ED21 is inactive (sleep state), or together with the main processor ED21 when the main processor ED21 is active (application execution state). The auxiliary processor ED23 (such as an image signal processor or communication processor) may be embodied as part of other functionally related components (such as a camera module ED80 or communication module ED90).

[0156] Memory ED30 can store various data required by the components of the electronic device ED01 (such as the processor ED20 and the sensor module ED76). This data includes, for example, software (such as the program ED40) and input and / or output data for related instructions. Memory ED30 includes volatile memory ED32 and / or non-volatile memory ED34.

[0157] Program ED40 is stored as software in memory ED30 and includes the operating system ED42, middleware ED44 and / or application ED46.

[0158] The input device ED50 receives instructions and / or data used by the components of the electronic device ED01 (such as the processor ED20) from an external source (such as a user). The input device ED50 includes a microphone, mouse, keyboard, and / or digital pen (such as a stylus pen).

[0159] The ED55 audio output device outputs an audio signal to the outside of the ED01 electronic device. The ED55 audio output device includes a speaker and / or a receiver. The speaker is used for general purposes such as multimedia playback or recording and playback, and the receiver may be used to receive incoming telephone calls. The receiver may be coupled to a part of the speaker or may be embodied in a separate, independent device.

[0160] The display device ED60 can visually provide information to the outside of the electronic device ED01. The display device ED60 includes a display, a hologram device, or a projector and a control circuit for controlling the device. The display device ED60 may also include a touch circuitry configured to sense touches and / or a sensor circuitry (such as a pressure sensor) configured to measure the intensity of the force generated by the touch.

[0161] The audio module ED70 can convert sound into electrical signals, or vice versa, convert electrical signals into sound. The audio module ED70 can acquire sound via the input device ED50, or output sound via the speakers and / or headphones of other electronic devices (such as electronic device ED02) directly or wirelessly connected to the sound output device ED55 and / or electronic device ED01.

[0162] The ED76 sensor module can sense the operating state of the electronic device ED01 (power, temperature, etc.) or external environmental conditions (user status, etc.), and generate electrical signals and / or data values ​​corresponding to the sensed state. The ED76 sensor module may include a gesture sensor, gyro sensor, barometric pressure sensor, magnetic sensor, accelerometer, grip sensor, proximity sensor, color sensor, IR (Infrared) sensor, biosensor, temperature sensor, humidity sensor, and / or illuminance sensor.

[0163] Interface ED77 can support one or more designated protocols that may be used to connect electronic device ED01 directly or wirelessly with other electronic devices (such as electronic device ED02). Interface ED77 includes HDMI® (High Definition Multimedia Interface), USB (Universal Serial Bus) interface, SD card interface, and / or audio interface.

[0164] The ED78 connector includes a connector that allows electronic device ED01 to be physically connected to other electronic devices (such as electronic device ED02). The ED78 connector includes an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (such as a headphone connector).

[0165] The ED79 haptic module can convert electrical signals into mechanical stimuli (such as vibration or movement) or electrical stimuli that can be perceived by the user through touch or kinesthetic sense. The ED79 haptic module includes a motor, a piezoelectric element, and / or an electrical stimulator.

[0166] The camera module ED80 can capture still images and videos. The camera module ED80 includes a lens assembly containing one or more lenses, an image sensor 1000 (Figure 1), an image signal processor, and / or a flash. The lens assembly included in the camera module ED80 can collect light emitted from the subject being imaged.

[0167] The power management module ED88 manages the power supplied to the electronic device ED01. The power management module ED88 can be implemented as part of a Power Management Integrated Circuit (PMIC).

[0168] Battery ED89 can supply power to the components of the electronic device ED01. Battery ED89 includes a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0169] The communication module ED90 can assist in establishing direct (wired) communication channels and / or wireless communication channels between electronic device ED01 and other electronic devices (such as electronic devices ED02, ED04, and server ED08), and in performing communication through the established communication channels. The communication module ED90 operates independently of processor ED20 (such as an application processor) and includes one or more communication processors that support direct and / or wireless communication. The communication module ED90 includes wireless communication modules ED92 (such as cellular communication modules, short-range wireless communication modules, and GNSS (Global Navigation Satellite System) communication modules) and / or wired communication modules ED94 (such as LAN (Local Area Network) communication modules and power line communication modules). Of these communication modules, the communication module can communicate with other electronic devices via a first network ED98 (such as a short-range communication network like Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)) or a second network ED99 (such as a cellular network, the Internet, or a long-range communication network like a computer network (LAN, WAN, etc.)). These various types of communication modules can be integrated as a single component (such as a single chip) or embodied as multiple separate components (multiple chips). The wireless communication module ED92 can verify and authenticate the electronic device ED01 within communication networks such as the first network ED98 and / or the second network ED99, using subscriber information (such as the International Mobile Subscriber Identifier (IMSI)) stored in the subscriber identification module ED96.

[0170] The antenna module ED97 transmits and / or receives signals and / or power to or from an external source (such as other electronic devices). The antenna includes a radiator consisting of a conductive pattern formed on a substrate (such as a PCB). The antenna module ED97 includes one or more antennas. If multiple antennas are included, the communication module ED90 may select from the multiple antennas an antenna suitable for the communication scheme used in a communication network such as the first network ED98 and / or the second network ED99. Signals and / or power may be transmitted and received between the communication module ED90 and other electronic devices via the selected antenna. Other components (such as an RFIC) may be included as part of the antenna module ED97.

[0171] Some of the components are interconnected by communication methods between peripheral devices (such as buses, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), and MIPI (Mobile Industry Processor Interface)), enabling them to exchange signals (commands, data, etc.) with each other.

[0172] Commands or data may be transmitted to or received between electronic device ED01 and external electronic device ED04 via server ED08 connected to the second network ED99. Other electronic devices ED02 and ED04 may be the same type of device as electronic device ED01 or different types of devices. All or part of the operations performed by electronic device ED01 may be performed by one or more of the other electronic devices ED02, ED04, and ED08. For example, if electronic device ED01 is to perform a certain function or service, instead of performing the function or service itself, it can request one or more other electronic devices to perform part or all of that function or service. One or more other electronic devices that receive the request can perform additional functions or services related to the request and communicate the results of their execution to electronic device ED01. Cloud computing, distributed computing, and / or client-server computing technologies may be used for this purpose.

[0173] Figure 21 is a block diagram illustrating a camera module ED80 provided in the electronic device ED01 of Figure 20. Referring to Figure 20, the camera module ED80 includes a lens assembly 1110, a flash 1120, an image sensor 1000, an image stabilizer 1140, a memory 1150 (such as buffer memory), and / or an image signal processor 1160. The lens assembly 1110 can collect light emitted from a subject that is the subject of image capture. The camera module ED80 may include multiple lens assemblies 1110, in which case the camera module ED80 may be a dual camera, a 360-degree camera, or a spherical camera. Some of the multiple lens assemblies 1110 may have the same lens characteristics (angle of view, focal length, autofocus, F-number, optical zoom, etc.) or different lens characteristics. The lens assembly 1110 may include a wide-angle lens or a telephoto lens.

[0174] The flash 1120 emits light used to enhance light emitted or reflected from the subject. The flash 1120 may emit visible light or infrared light. The flash 1120 includes one or more light-emitting diodes (such as RGB (Red-Green-Blue) LEDs, white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or a xenon lamp. The image sensor 1000 is the image sensor described in Figure 1, which can acquire an image corresponding to the subject by converting light emitted or reflected from the subject and transmitted through the lens assembly 1110 into an electrical signal.

[0175] The image stabilizer 1140 can respond to the movement of the camera module ED80 or the electronic device 1101 containing it by moving one or more lenses or image sensors 1000 included in the lens assembly 1110 in a specific direction, or by controlling the operating characteristics of the image sensors 1000 (such as adjusting the read-out timing) to compensate for adverse effects of the movement. The image stabilizer 1140 senses the movement of the camera module ED80 or the electronic device ED01 using a gyro sensor (not shown) or an accelerometer (not shown) located inside or outside the camera module ED80. The image stabilizer 1140 may be implemented optically.

[0176] Memory 1150 stores some or all of the image data acquired via the image sensor 1000 for image processing. For example, if multiple images are acquired at high speed, the original acquired data (Bayer-patterned data, high-resolution data, etc.) can be stored in memory 1150 and used to display only the low-resolution images, after which the original data of the selected (user-selected, etc.) image can be transmitted to the image signal processor 1160. Memory 1150 may be integrated into memory ED30 of the electronic device ED01, or it may be configured as a separate memory operating independently.

[0177] The image signal processor 1160 acquires an image using the electrical signal output from the image sensor 1000. For example, the image signal processor 1160 may work in conjunction with the image sensor 1000 to directly perform some of the image processing shown in Figures 23 to 26. Alternatively, depending on the desired image data format, the image signal processor 1160 may request image data in a specific format from the image sensor 1000.

[0178] The image signal processor 1160 may also perform further image processing on images acquired via the image sensor 1000 or image data stored in the memory 1150. Image processing includes generating depth maps, 3D modeling, panorama generation, feature extraction, image synthesis, and / or image compensation (such as noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, and softening). The image signal processor 1160 also performs control (such as exposure time control or readout timing control) of components included in the camera module ED80 (such as the image sensor 1000).

[0179] Images processed by the image signal processor 1160 can be stored again in memory 1150 for further processing, or provided to external components of the camera module ED80 (such as memory ED30, display device ED60, electronic device ED02, electronic device ED04, server ED08, etc.). The image signal processor 1160 can be integrated into processor ED20 or configured as a separate processor operating independently of processor ED20. If the image signal processor 1160 is configured as a separate processor from processor ED20, images processed by the image signal processor 1160 can be displayed via display device ED60 after further image processing by processor ED20.

[0180] Furthermore, the image signal processor 1160 receives two output signals independently from adjacent light-sensing cells within each pixel or subpixel of the image sensor 1000, and generates an autofocus signal from the difference between the two output signals. Based on the autofocus signal, the image signal processor 1160 controls the lens assembly 1110 so that the focus of the lens assembly 1110 precisely aligns with the surface of the image sensor 1000.

[0181] The electronic device ED01 may further include one or more additional camera modules, each having different characteristics or functions. Such camera modules may also include configurations similar to the camera module ED80 in Figure 28, and the image sensors provided therein may be embodied as CCD (Charged Coupled Device) sensors and / or CMOS (Complementary Metal Oxide Semiconductor) sensors, and may include one or more sensors selected from image sensors with different characteristics, such as RGB sensors, BW (Black and White) sensors, IR sensors, or UV sensors. In such a case, one of the multiple camera modules ED80 may be a wide-angle camera and another may be a telephoto camera. Similarly, one of the multiple camera modules ED80 may be a front camera and another may be a rear camera.

[0182] Figure 22 is a block diagram of an electronic device including a multi-camera module, and Figure 23 is a detailed block diagram of one camera module provided in the electronic device of Figure 22.

[0183] Referring to Figure 22, the electronic device 1200 includes a camera module group 1300, an application processor 1400, a PMIC (Power Management Integrated Circuit) 1500, an external memory 1600, and an image generator 1700.

[0184] The camera module group 1300 includes a plurality of camera modules 1300a, 1300b, and 1300c. While the drawings show an embodiment with three camera modules 1300a, 1300b, and 1300c, the embodiment is not limited thereto. In some embodiments, the camera module group 1300 is modified to include only two camera modules. Furthermore, in some embodiments, the camera module group 1300 may be modified to include N camera modules (where n is a natural number greater than or equal to 4).

[0185] The detailed configuration of camera module 1300b will be described in more detail below with reference to Figure 22, but the following description also applies to other camera modules 1300a and 1300c depending on the embodiment.

[0186] Referring to Figure 22, the camera module 1300b comprises a prism 1305, an optical path folding element (OPFE) 1310, an actuator 1330, an image sensing device 1340, and a storage unit 1350.

[0187] The prism 1305 is equipped with a reflective surface 1307 made of a light-reflecting material, which deforms the path of light L incident from the outside.

[0188] In some embodiments, the prism 1305 can change the path of light L incident in a first direction (X direction) to a second direction (Y direction) perpendicular to the first direction (X direction). The prism 1305 can also change the path of light L incident in a first direction (X direction) to a second direction (Y direction) perpendicular to the first direction (X direction) by rotating the reflective surface 1307 of the light-reflecting material in direction A about the central axis 1306, or by rotating the central axis 1306 in direction B. In this case, the OPFE 1310 also moves in a third direction (Z direction) perpendicular to the first direction (X direction) and the second direction (Y direction).

[0189] In some embodiments, as illustrated, the maximum rotation angle of the prism 1305 in the A direction is 15° or less in the positive (+) A direction and greater than 15° in the negative (-) A direction, but this embodiment is not limited thereto.

[0190] In some embodiments, the prism 1305 moves approximately 20° in the positive (+) or negative (-)B direction, or between 10° and 20°, or between 15° and 20°, where the angle of movement is either the same angle in the positive (+) or negative (-)B direction, or within a range of approximately 1° to about the same angle.

[0191] In some embodiments, the prism 1305 moves the reflective surface 1307 of the light-reflecting material in a third direction (e.g., the Z direction) parallel to the extension of the central axis 1306.

[0192] The OPFE 1310 includes, for example, m (where m is a natural number) groups of optical lenses. The m lenses move in a second direction (Y direction) to change the optical zoom ratio of the camera module 1300b. For example, if the basic optical zoom ratio of the camera module 1300b is Z, then moving the m optical lenses in the OPFE 1310 will change the optical zoom ratio of the camera module 1300b to 3Z, 5Z, or 10Z or higher.

[0193] The actuator 1330 moves the OPFE 1310 or optical lens (hereinafter referred to as the optical lens) to a specific position. For example, the actuator 1330 adjusts the position of the optical lens so that the image sensor 1342 is positioned at the focal length of the optical lens for accurate sensing.

[0194] The image sensing device 1340 comprises an image sensor 1342, control logic 1344, and memory 1346. The image sensor 1342 senses an image of the object to be sensed using light L provided through an optical lens. The control logic 1344 controls the overall operation of the camera module 1300b. For example, the control logic 1344 controls the operation of the camera module 1300b by control signals provided through the control signal line CSLb.

[0195] Memory 1346 stores information necessary for the operation of the camera module 1300b, such as calibration data 1347. Calibration data 1347 includes information necessary for generating image data using light L provided externally via the camera module 1300b. Calibration data 1347 includes, for example, the aforementioned information on rotation, focal length, and optical axis. If the camera module 1300b is implemented as a multi-state camera configuration in which the focal length changes depending on the position of the optical lens, calibration data 1347 includes the focal length values ​​for each position (or state) of the optical lens and information on autofocusing.

[0196] The storage unit 1350 stores image data sensed through the image sensor 1342. The storage unit 1350 is located outside the image sensing device 1340 and may be implemented in a stacked configuration with the sensor chip that constitutes the image sensing device 1340. In some embodiments, the storage unit 1350 may be implemented by an EEPROM (Electrically Erasable Programmable Read-Only memory), but the embodiments are not limited thereto.

[0197] Referring to both Figures 22 and 23, in some embodiments, each of the multiple camera modules 1300a, 1300b, and 1300c is equipped with an actuator 1330. Thus, each of the multiple camera modules 1300a, 1300b, and 1300c is equipped with equal or different calibration data 1347, depending on the operation of the actuator 1330 located inside it.

[0198] In some embodiments, one of the multiple camera modules 1300a, 1300b, and 1300c (e.g., 1300b) may be a folded lens camera module equipped with the aforementioned prism 1305 and OPFE 1310, while the remaining camera modules (e.g., 1300a and 1300b) may be vertical camera modules without the prism 1305 and OPFE 1310, but the embodiments are not limited thereto.

[0199] In some embodiments, one of the multiple camera modules 1300a, 1300b, and 1300c (for example, 1300c) is a vertical depth camera that extracts depth information using, for example, IR (Infrared Ray).

[0200] In some embodiments, at least two of the multiple camera modules 1300a, 1300b, and 1300c (e.g., 1300a and 1300b) have different fields of view (angles of view). In this case, for example, the optical lenses of at least two of the multiple camera modules 1300a, 1300b, and 1300c (e.g., 1300a and 1300b) are different from each other, but are not limited to this.

[0201] Furthermore, in some embodiments, the field of view of each of the multiple camera modules 1300a, 1300b, and 1300c is different from one another. In this case, the optical lenses provided in each of the multiple camera modules 1300a, 1300b, and 1300c are also different from one another, but are not limited to this.

[0202] In some embodiments, the multiple camera modules 1300a, 1300b, and 1300c are physically separated from each other. That is, the sensing area of ​​a single image sensor 1342 is not divided and used by the multiple camera modules 1300a, 1300b, and 1300c, but rather an independent image sensor 1342 may be placed inside each of the multiple camera modules 1300a, 1300b, and 1300c.

[0203] Referring again to Figure 22, the application processor 1400 comprises an image processing unit 1410, a memory controller 1420, and internal memory 1430. The application processor 1400 is implemented separately from the multiple camera modules 1300a, 1300b, and 1300c. For example, the application processor 1400 and the multiple camera modules 1300a, 1300b, and 1300c are implemented separately from each other by separate semiconductor chips.

[0204] The image processing device 1410 comprises a plurality of sub-image processors 1411, 1412, and 1413, and a camera module controller 1414.

[0205] Image data generated from each of the camera modules 1300a, 1300b, and 1300c is provided to the image processing unit 1410 via the respective separate image signal lines ISLa, ISLb, and ISLc. Such image data transmission is performed, for example, using a Camera Serial Interface (CSI) based on MIPI (Mobile Industry Processor Interface), but the embodiment is not limited thereto.

[0206] Image data transmitted to the image processing device 1410 may be stored in external memory 1600 before being transmitted to image processors 1411 and 1412. Image data stored in external memory 1600 may be provided to image processors 1411 and / or image processors 1412. Image processor 1411 corrects the received image data in order to generate a video. Image processor 1412 corrects the received image data in order to generate a still image. For example, image processors 1411 and 1412 perform pre-processing operations on the image data, such as color correction and gamma correction.

[0207] The image processor 1411 includes subprocessors. If the number of subprocessors is the same as the number of camera modules 1300a, 1300b, and 1300c, each subprocessor can process image data provided by one camera module. If the number of subprocessors is less than the number of camera modules 1300a, 1300b, and 1300c, at least one subprocessor can process image data provided by multiple camera modules using a time-sharing process. Image data processed by image processor 1411 and / or image processor 1412 may be stored in external memory 1600 before being transmitted to image processor 1413. Image data stored in external memory 1600 is transmitted to image processor 1412. Image processor 1412 performs post-processing operations on the image data, such as noise reduction and sharpening.

[0208] The image data processed by the image processor 1413 is provided to the image generator 1700. The image generator 1700 uses the image data provided by the image processor 1413, based on generating information or a mode signal, to produce the final image.

[0209] Specifically, the image generator 1700 merges at least a portion of the image data generated from camera modules 1300a, 1300b, and 1300c, each having a different field of view, based on image generation information or a mode signal, to produce an output image. Alternatively, the image generator 1700 may select one of the image data generated from camera modules 1300a, 1300b, and 1300c, each having a different field of view, based on image generation information or a mode signal, to produce an output image.

[0210] In some embodiments, the image generation information includes a zoom signal (or zoom factor). In some embodiments, the mode signal is, for example, a signal based on a mode selected by the user.

[0211] If the image generation information is a zoom signal (zoom factor), and each camera module 1300a, 1300b, and 1300c has a different field of view (field of view angle), the image generator 1700 can perform different operations depending on the type of zoom signal. For example, if the zoom signal is a first signal, the image data output from camera module 1300a and the image data output from camera module 1300c are merged, and then the merged image signal and the image data output from camera module 1300b that was not used in the merging are used to generate the output image. If the zoom signal is a second signal different from the first signal, the image generator 1700 does not perform such image data merging, but instead selects one of the image data output from each camera module 1300a, 1300b, and 1300c to generate the output image. However, this embodiment is not limited thereto, and the method of processing the image data can be modified as needed.

[0212] The camera module controller 1414 provides control signals to the respective camera modules 1300a, 1300b, and 1300c. The control signals generated by the camera module controller 1414 are provided to the corresponding camera modules 1300a, 1300b, and 1300c through the mutually separated control signal lines CSLa, CSLb, and CSLc.

[0213] In some embodiments, the control signals provided from the camera module controller 1414 to the multiple camera modules 1300a, 1300b, and 1300c include mode information via mode signals. Based on such mode information, the multiple camera modules 1300a, 1300b, and 1300c operate in a first operating mode and a second operating mode with respect to sensing speed.

[0214] Multiple camera modules 1300a, 1300b, and 1300c generate an image signal at a first speed in a first operating mode (for example, an image signal at a first frame rate), encode it at a second speed higher than the first speed (for example, encode an image signal at a second frame rate higher than the first frame rate), and transmit the encoded image signal to the application processor 1400. At this time, the second speed is 30 times or less the first speed.

[0215] The application processor 1400 stores the received image signal, in other words, the encoded image signal, in its internal memory 1430 or in its external memory 1600. Then, it reads the encoded image signal from memory 1430 or external memory 1600, decodes it, and displays the image data generated based on the decoded image signal. For example, the image processors 1411 and 1412 of the image processing unit 1410 perform decoding and then perform image processing on the decoded image signal.

[0216] Multiple camera modules 1300a, 1300b, and 1300c generate image signals in a second operating mode at a third speed lower than the first speed (for example, generating image signals at a third frame rate lower than the first frame rate) and transmit the image signals to the application processor 1400. The image signals provided to the application processor 1400 are unencoded signals. The application processor 1400 either performs image processing on the received image signals or stores the image signals in memory 1430 or external memory 1600.

[0217] The PMIC 1500 supplies power, such as a power supply voltage, to each of the multiple camera modules 1300a, 1300b, and 1300c. For example, under the control of the application processor 1400, the PMIC 1500 supplies first power to camera module 1300a via power signal line PSLa, second power to camera module 1300b via power signal line PSLb, and third power to camera module 1300c via power signal line PSLc.

[0218] The PMIC 1500 generates and adjusts the power levels for each of the multiple camera modules 1300a, 1300b, and 1300c in response to a power control signal PCON from the application processor 1400. The power control signal PCON includes power adjustment signals for each operating mode of the multiple camera modules 1300a, 1300b, and 1300c. For example, the operating mode includes a low-power mode, in which case the power control signal PCON includes information about the camera modules operating in low-power mode and the power levels to be set. The power levels provided to each of the multiple camera modules 1300a, 1300b, and 1300c are either equal or different. Furthermore, the power levels change dynamically.

[0219] Although the aforementioned image sensors and electronic devices including them have been described with reference to the embodiments shown in the drawings, these are merely illustrative, and those skilled in the art will understand that a variety of modifications and equivalent other embodiments are possible therefrom. Therefore, the disclosed embodiments should be considered in an explanatory rather than restrictive manner. The scope of rights is set forth in the claims, not in the foregoing description, and all differences within an equivalent scope should be construed as being included within the scope of rights. [Explanation of Symbols]

[0220] 1000 Image Sensors 1100 pixel array 110 Sensor board 120 Spacer layer 130, 130', 130A, 130B, 130C, 130D, 130E, 130E1, 130F, 130F1, 130G Nano Optical Lens Arrays 140 color filter layers

Claims

1. A sensor substrate having multiple photosensitive elements, A nanooptical lens array comprising a plurality of nanostructures arranged to separate light in a first wavelength band, light in a second wavelength band different from the first wavelength band, and light in a third wavelength band different from the first and second wavelength bands from the incident light, and to focus them onto the plurality of photosensitive elements, Includes, The plurality of photosensitive elements detect light in the first wavelength band and include a first main photosensitive element and a first corner photosensitive element arranged adjacently in a first diagonal direction, wherein the first corner photosensitive element has a smaller size than the first main photosensitive element. The nano-optical lens array includes a first main meta region corresponding to the first main photosensitive element and a first corner meta region corresponding to the first corner photosensitive element. An image sensor in which, among the plurality of nanostructures, the nanostructures arranged in the first corner meta region are arranged to have symmetry with a first axis passing through the center of the first corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the first corner meta region and parallel to a second diagonal direction different from the first diagonal direction.

2. The image sensor according to claim 1, wherein the nanostructures in the first corner meta region are arranged such that the size distribution on the first axis and the size distribution on the second axis are different from each other.

3. The image sensor according to claim 1, wherein the number of nanostructures in the first corner meta region located on the first axis and the number located on the second axis are different from each other.

4. The aforementioned multiple photosensitive elements are A second main photosensitive element and a second corner photosensitive element for detecting light in the second wavelength band, A third main photosensitive element and a third corner photosensitive element for detecting light in the third wavelength band, A fourth main photosensitive element and a fourth corner photosensitive element for detecting light in the first wavelength band, It further includes, The first to fourth main photosensitive elements are arranged in a 2x2 array configuration along a first direction that forms a 45° angle with the second diagonal direction and a second direction perpendicular to the first direction. The second corner photosensitive element is arranged adjacent to the second main photosensitive element in the first diagonal direction, The third corner photosensitive element is arranged adjacent to the third main photosensitive element in the first diagonal direction, The image sensor according to claim 1, wherein the fourth corner photosensitive element is arranged adjacent to the fourth main photosensitive element in the first diagonal direction.

5. The aforementioned nano-optical lens array is A second main meta region corresponding to the second main photosensitive element, The second corner meta region corresponding to the second corner photosensitive element, It further includes, The image sensor according to claim 4, wherein the nanostructures of the second corner meta region are arranged to have symmetry with respect to a first axis passing through the center of the second corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the second corner meta region and parallel to the second diagonal direction.

6. The image sensor according to claim 5, wherein the nanostructures of the second corner meta region are arranged such that the size distribution on the first axis of the second corner meta region and the size distribution on the second axis of the second corner meta region are different from each other.

7. The aforementioned nano-optical lens array is A third main meta region corresponding to the third main photosensitive element, The third corner meta region corresponding to the third corner photosensitive element, It further includes, The nanostructures in the third corner meta region are arranged to have symmetry with respect to a first axis passing through the center of the third corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the third corner meta region and parallel to the second diagonal direction. The image sensor according to claim 5, wherein the size distribution on the first axis of the third corner meta region and the size distribution on the second axis of the third corner meta region are arranged to be different from each other.

8. The aforementioned nano-optical lens array is A fourth main meta region corresponding to the fourth main photosensitive element, The fourth corner meta region corresponding to the fourth corner photosensitive element, It further includes, The arrangement of nanostructures in the first main meta region and the fourth main meta region are identical to each other. The image sensor according to claim 4, wherein the arrangement of nanostructures in the first corner meta region and the fourth corner meta region are identical to each other.

9. The first main photosensitive element and the fourth main photosensitive element detect green light, The second main photosensitive element detects red light, The image sensor according to claim 6, wherein the third main photosensitive element detects blue light.

10. The aforementioned nano-optical lens array is A first main green light focusing region that focuses green light onto the first main photosensitive element, A first corner green light focusing region that focuses green light onto the first corner photosensitive element, A main red light focusing region that focuses red light onto the preceding second main photosensitive element, A corner red light focusing region that focuses red light onto the two corner photosensitive elements, A main blue light focusing region that focuses blue light onto the aforementioned third main photosensitive element, A corner blue light focusing region that focuses blue light onto three corner photosensitive elements, The image sensor according to claim 9, including the image sensor described in claim 9.

11. The image sensor according to claim 10, wherein the width in the first diagonal direction of the first corner green light focusing region is less than or equal to the width in the first diagonal direction of the first corner meta region.

12. The image sensor according to claim 10, wherein the width in the second diagonal direction of the first corner green light focusing region is greater than the width in the second diagonal direction of the first corner meta region.

13. The image sensor according to claim 10, wherein the size of the first corner green light focusing region is three times or less the size of the first corner meta region.

14. The image sensor according to claim 10, wherein the nanostructures in the first corner green light focusing region are arranged such that the size distribution on the first axis and the size distribution on the second axis are different from each other.

15. The width of the first main green light focusing region in the first diagonal direction is greater than or equal to the width of the first main meta region in the first diagonal direction. The image sensor according to claim 10, wherein the width in the second diagonal direction of the first main green light focusing region is greater than the width in the second diagonal direction of the first main meta region.

16. The nano-optical lens array further includes a second corner meta region corresponding to the second corner photosensitive element, The size of the aforementioned corner red light focusing region is larger than that of the aforementioned second corner meta region. The image sensor according to claim 10, wherein the width in the second diagonal direction of the corner red light focusing region is greater than or equal to the width in the first diagonal direction of the corner red light focusing region.

17. The nano-optical lens array further includes a second main meta region corresponding to the second main photosensitive element, The size of the main red light focusing region is larger than that of the second main meta region. The image sensor according to claim 10, wherein the width in the second diagonal direction of the main red light focusing region is greater than or equal to the width in the first diagonal direction of the main red light focusing region.

18. The nano-optical lens array further includes a third corner meta region corresponding to the third corner photosensitive element, The size of the corner blue light focusing region is larger than that of the third corner meta region. The image sensor according to claim 10, wherein the width in the second diagonal direction of the corner blue light focusing region is greater than or equal to the width in the first diagonal direction of the corner blue light focusing region.

19. Of the plurality of nanostructures, the nanostructures arranged in the first main meta-region are arranged to have symmetry with respect to an axis passing through the center of the first main meta-region and parallel to the first diagonal direction, and an axis passing through the center of the first main meta-region and parallel to the second diagonal direction, or The image sensor according to claim 1, which is arranged to have symmetry with respect to an axis of symmetry passing through the center of the first main meta region and parallel to a first direction that makes an angle of 45° with the second diagonal direction, and an axis passing through the center of the first main meta region and parallel to a second direction that is perpendicular to the first direction.

20. A lens assembly that forms an optical image of the subject, An image sensor that converts the optical image formed by the lens assembly into an electrical signal, A processor that processes signals generated by the image sensor, Includes, The aforementioned image sensor is A sensor substrate containing multiple photosensitive elements, A nanooptical lens array comprising a plurality of nanostructures arranged to separate light in a first wavelength band, light in a second wavelength band different from the first wavelength band, and light in a third wavelength band different from the first and second wavelength bands from the incident light, and to focus them onto the plurality of photosensitive elements, Includes, The plurality of photosensitive elements detect light in the first wavelength band and include a first main photosensitive element and a first corner photosensitive element arranged adjacently in a first diagonal direction, wherein the first corner photosensitive element has a smaller size than the first main photosensitive element. The nano-optical lens array includes a first main meta region corresponding to the first main photosensitive element and a first corner meta region corresponding to the first corner photosensitive element. An electronic device in which, among the plurality of nanostructures, the nanostructures arranged in the first corner meta region are arranged to have symmetry with respect to a first axis passing through the center of the first corner meta region and parallel to the first diagonal direction, and a second axis passing through the center of the first corner meta region and parallel to a second diagonal direction different from the first diagonal direction.

Images