Sensor device

Abstract

To allow the fluid flowing through the first channel to flow smoothly into the channel branching off from the first channel. [Solution] The sensor device 100 comprises a housing 120, a first flow path 30 that forms a fluid flow from opening 10a to opening 20a, a pressure changing section 80 formed in the first flow path 30 that changes the fluid pressure, a second flow path 41 that branches off from the first flow path 30 upstream of the pressure changing section 80, and a third flow path 50 that communicates with the second flow path 41 and in which the detection section 102 of the sensor chip 101 is located. The first flow path 30 is formed upstream of the pressure changing section 80 and has an arc-shaped curved section 60. The curved section 60 includes a first surface 60a and a second surface 60b that face each other in a cross section intersecting in the Z-axis direction, along the radius of curvature of the curved section 60. The second surface 60b is positioned close to the center of curvature O11 of the curved section 60, and a third opening, which is a connection between the first flow path 30 and the second flow path 40, is formed on the second surface 60b.

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