Light source device, exposure device, and method for manufacturing articles

Abstract

The present invention provides an advantageous technique for uniformly controlling the temperature of multiple light-emitting elements in a light-emitting device. [Solution] The light-emitting device comprises a substrate having a first surface and a second surface, a plurality of light-emitting elements arranged on the first surface, a cooling chamber arranged on the side of the second surface to cool the plurality of light-emitting elements, and a circulation path for circulating a coolant through the cooling chamber, wherein the cooling chamber has an inlet and an outlet, and a space from the inlet to the outlet, and in an orthogonal projection onto the second surface, the entire plurality of light-emitting elements are arranged inside the smallest rectangle enclosing the space, and the space has a changing portion in which the cross-sectional area changes on a plane perpendicular to the path from the inlet to the outlet.

Description

Technical Field

[0001] The present invention relates to a light source device, an exposure device, and an article manufacturing method.

Background Art

[0002] An exposure device is used in the manufacture of articles such as semiconductor devices and display panels. Currently, it is expected to use solid light-emitting elements (hereinafter referred to as light-emitting elements) such as LEDs (Light Emitting Diodes) as the light source of the exposure device. Since the light output per light-emitting element is small, an array in which a plurality of light-emitting elements are arranged can be used to constitute the light source of the exposure device. The light-emitting element has temperature characteristics in which the light emission efficiency and the peak wavelength of the generated light change according to the temperature change. Therefore, the temperature distribution in the array can cause non-uniformity of illuminance and non-uniformity of peak wavelength. Considering a cooling system in which an array in which a plurality of light-emitting elements are arranged is cooled by a refrigerant, the refrigerant moving along the array will have a higher temperature toward the downstream.

[0003] Patent Document 1 describes a heat sink having a fin base and a cover that form a refrigerant flow, a plurality of fins formed on the fin base that partition the refrigerant flow path into a plurality of small flow paths, and an adjustment plate disposed at the inlet or outlet of the small flow path to adjust the flow path cross-sectional area of the small flow path. However, with such a configuration, it is considered difficult to equalize the temperature over the entire heat-generating component because the flow of the refrigerant is not adjusted after entering the refrigerant flow path through the inlet.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present invention aims to provide a technique advantageous for uniformly controlling the temperature of multiple light-emitting elements in a light-emitting device. [Means for solving the problem]

[0006] One aspect of the present invention relates to a light-emitting device, the light-emitting device comprising a substrate having a first surface and a second surface, a plurality of light-emitting elements arranged on the first surface, a cooling chamber arranged on the side of the second surface to cool the plurality of light-emitting elements, and a circulation path for circulating a coolant through the cooling chamber, wherein the cooling chamber has an inlet and an outlet, and a space from the inlet to the outlet, and in an orthogonal projection onto the second surface, the entire plurality of light-emitting elements are arranged inside the smallest rectangle enclosing the space, and the space has a variable portion in which the cross-sectional area changes on a plane perpendicular to the path from the inlet to the outlet. [Effects of the Invention]

[0007] According to the present invention, an advantageous technique is provided for uniformly controlling the temperature of multiple light-emitting elements in a light-emitting device. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic diagram showing the configuration of the light source device of the first embodiment. [Figure 2] A schematic diagram showing the configuration of the light source device of the first embodiment. [Figure 3] A schematic diagram showing the configuration of a light source device in a first modified example of the first embodiment. [Figure 4] A schematic diagram showing the configuration of a light source device in a second modified example of the first embodiment. [Figure 5] A diagram illustrating a method for adjusting the flow path cross-sectional area according to the temperature distribution of the refrigerant and the heat density distribution of the array. [Figure 6] A schematic diagram showing the configuration of a light source device in a third modification of the first embodiment. [Figure 7] A schematic diagram showing the configuration of the fourth light source device of the first embodiment. [Figure 8]A schematic diagram showing the configuration of the light source device of the first embodiment. [Figure 9] A schematic diagram showing the configuration of an exposure apparatus in one embodiment. [Modes for carrying out the invention]

[0009] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, identical or similar configurations are given the same reference numerals, and redundant descriptions are omitted.

[0010] In the following description and accompanying drawings, the configuration and relative positions of multiple components are shown illustratively in the XYZ coordinate system. The XY plane may or may not coincide with the horizontal plane and can be arbitrarily defined.

[0011] The light source device 1 of the first embodiment will be described with reference to Figures 1 and 2. Figures 1 and 2 are diagrams showing the configuration of the light source device 1 of the first embodiment, with a portion shown in cross-section. The light source device 1 may include a substrate 2, a plurality of light-emitting elements 3, and a cooling chamber 5. A plurality of light-emitting elements 3 may be arranged on the substrate 2. The substrate 2 may be provided with a drive circuit for driving the plurality of light-emitting elements 3, and a wiring pattern for connecting the drive circuit and the plurality of light-emitting elements 3. The wiring pattern may be made of copper, for example. The light-emitting elements 3 may be, for example, LEDs (Light Emitting Diodes) or laser diodes. The light-emitting elements 3 may generate light having a predetermined peak wavelength. The light-emitting elements 3 may generate, for example, g-line (436 nm), h-line (405 nm), or i-line (365 nm).

[0012] Multiple light-emitting elements 3 can be arranged to form a one-dimensional or two-dimensional array 4. Figures 1 and 2 show an example in which multiple light-emitting elements 3 are arranged to form a one-dimensional array 4 along the X-axis. Each light-emitting element 3 may be a semiconductor chip. Multiple light-emitting elements 3 can be driven by a drive circuit 10. The drive circuit 10 can control the light emission intensity of the multiple light-emitting elements 3, for example, by controlling at least one of the voltage and current supplied to the column composed of the multiple light-emitting elements 3.

[0013] As shown in Figure 2, the substrate 2 has a first surface S1 and a second surface S2, and a plurality of light-emitting elements 3 may be arranged or mounted on the first surface S1. The light source device 1 may include a cooling chamber 5 positioned on the side of the second surface S2 to cool the plurality of light-emitting elements 3. The first surface S1 of the substrate 2 faces the plurality of light-emitting elements 3, and the second surface S2 of the substrate 2 faces the cooling chamber 5. The substrate 2 may constitute part of the container 55 of the cooling chamber 5. As shown in Figure 1, the light source device 1 may include a circulation path 12 for circulating a coolant through the cooling chamber 5. The cooling chamber 5 may have an inlet 7 and an outlet 8, and a space 13 extending from the inlet 7 to the outlet 8. In other words, the cooling chamber 5 may have a container 55 that defines the space 13 communicating from the inlet 7 to the outlet 8. The refrigerant that enters the space 13 from the inlet 7 flows toward the outlet 8, absorbing the heat generated by the multiple light-emitting elements 3, is discharged from the cooling chamber 5 through the outlet 8, and can re-enter the space 13 from the inlet 7 via the circulation path 12.

[0014] Here, in the orthogonal projection onto the second plane S2 (in Figure 1, the orthogonal projection onto the XY plane, i.e., the plan view), it is preferable that the entirety of the multiple light-emitting elements 3 be arranged inside the minimum rectangle 51 that encloses the space 13. In the examples shown in Figures 1 and 2, the outer edge of the space 13 and the minimum rectangle 51 that encloses the space 13 coincide. The configuration in which the entirety of the multiple light-emitting elements 3 are arranged inside the minimum rectangle 51 that encloses the space 13 is advantageous for uniformly cooling the entirety of the multiple light-emitting elements 3. Furthermore, such a configuration can reduce or eliminate vortices generated in the coolant flowing through the region overlapping with the multiple light-emitting elements 3 in the orthogonal projection onto the second plane S2. This is advantageous for uniformly cooling the temperature of the multiple light-emitting elements 3.

[0015] The light source device 1 may include a cooler 6 (e.g., a refrigerator) for cooling the refrigerant flowing through the circulation path 12. The cooler 6 is located between the outlet 8 and the inlet 7 of the cooling chamber 5 in the circulation path 12. The light source device 1 may also include a flow controller 11. The flow controller 11 may be located, for example, between the cooler 6 and the inlet 7 of the cooling chamber 5. The flow controller 11 adjusts the flow rate of the refrigerant flowing through the circulation path 12 to a target flow rate. The drive circuit 10 can drive the multiple light-emitting elements 3 so that the light emission intensity of the multiple light-emitting elements 3 reaches a target intensity. When the target intensity is changed, the amount of heat recovery required to cool the multiple light-emitting elements 3 changes. Therefore, when the target intensity is changed, the flow controller 11 can control the target flow rate accordingly.

[0016] In order to increase the efficiency of heat recovery from the plurality of light-emitting elements 3, the substrate 2 and the cooling chamber 5 can be formed of a material with high thermal conductivity (for example, copper or aluminum). The light-emitting element 3 may have temperature characteristics in which the light-emitting efficiency and the peak wavelength of the emitted light change according to temperature changes. In an example where the light-emitting element 3 is composed of a specific LED, when the temperature of the light-emitting element 3 rises by 20 °C, the peak wavelength shifts about 1 nm to the longer wavelength side. When using a wavelength filter, since light outside the desired wavelength band among the light from the light source device 1 is cut off, when the peak wavelength shifts, the illuminance for illuminating the target object decreases. That is, as the temperature of the plurality of light-emitting elements 3 rises, the illuminance for illuminating the target object decreases.

[0017] Considering such characteristics, it is preferable to keep the temperature low throughout the region where the plurality of light-emitting elements 3 are arranged (at least the region of the first surface S1 where the plurality of light-emitting elements 3 are arranged). Also, if the temperatures of the plurality of light-emitting elements 3 have variations, the peak wavelengths will vary, so in an exposure apparatus using the light source device 1, a decrease in resolution or the like may occur. Therefore, it is preferable to keep the temperature constant throughout the region where the plurality of light-emitting elements 3 are arranged (at least the region of the first surface S1 where the plurality of light-emitting elements 3 are arranged).

[0018] When the heat recovery amount Q [W] transferred from the light-emitting element 3 to the refrigerant through the substrate 2, the temperature of the surface of the cooling chamber 5 in contact with the substrate 2 is T1 [K], the temperature of the refrigerant is T2 [K], and the thermal resistance of the refrigerant between the light-emitting element 3 and the surface of the cooling chamber 5 is R [K / W], the following formula (1) is satisfied.

[0019] Q = (T1 - T2) / R ···(1) Also, the thermal resistance R [K / W] is related to the thermal conductivity h [W / m 2 K], and the area of the region of the surface of the cooling chamber 5 in contact with the substrate 2 is A [m 2 , and is obtained by the following formula (2).

[0020] R = 1 / (h·A) ···(2) From equation (2), the thermal resistance R can be determined by the thermal conductivity h and the area A, so it can be seen that the thermal resistance R is determined by the material and shape. When the heat generation of multiple light-emitting elements 3 is uniform and the multiple light-emitting elements 3 are arranged in one direction along the flow path of the refrigerant in the space 13 within the cooling chamber 5, the refrigerant temperature rises as the refrigerant flows from the upstream side to the downstream side of the space 13. When the heat generation of each LED chip is equal, in order to equalize the temperature of the multiple light-emitting elements 3, it is desirable that the amount of heat recovered from each of the multiple light-emitting elements 3 be equal, but the amount of heat recovered decreases as the refrigerant temperature T2 increases. Therefore, the temperature of the light-emitting elements 3 on the downstream side becomes higher than that on the upstream side, which reduces the amount of heat recovered Q, and as a result, a difference in the peak wavelength of light occurs depending on the position where the light-emitting elements 3 are placed. To solve this problem, it is effective to change the heat transfer coefficient h in accordance with the change in the temperature difference between the temperature T1 of the wall surface of the cooling chamber 5 and the temperature T2 of the refrigerant. Also, when the heat generation of the arranged multiple light-emitting elements 3 differs from place to place, the amount of heat recovered to equalize the temperature of the multiple light-emitting elements 3 differs from place to place. Therefore, the following describes a method for adjusting the heat transfer coefficient h according to the required heat recovery amount Q and refrigerant temperature T2 for each region of the array 4 in order to equalize the temperature of the array 4 composed of multiple light-emitting elements 3.

[0021] The refrigerant flows through the space 13 within the cooling chamber 5 from the inlet 7 to the outlet 8, removing heat from the substrate 2 through heat exchange and cooling the light-emitting element 3. The refrigerant can be, for example, a liquid primarily composed of water, which has excellent cooling properties, or a liquid primarily composed of oil, which has excellent electrical insulation properties.

[0022] When there is a temperature difference between the light-emitting element 3 and the refrigerant, the temperature changes significantly in the contact region between the two (the inner surface of the cooling chamber 5). This region is called the thermal boundary layer, and the faster the refrigerant flow rate on the inner surface of the cooling chamber 5, the thinner the thermal boundary layer becomes. The heat transfer coefficient is approximately equal to (thermal conductivity of the refrigerant) / (thermal boundary layer thickness), and the heat transfer coefficient increases as the thermal boundary layer thickness decreases. In other words, as the refrigerant flow rate increases, the heat recovery efficiency from the light-emitting element 3 to the refrigerant improves.

[0023] In the first embodiment, the space 13 within the cooling chamber 5 has a change portion CP in which the cross-sectional area (hereinafter referred to as the flow path cross-sectional area) changes on a plane perpendicular to the path from the inlet 7 to the outlet 8 (a path along the X axis) (a plane parallel to the YZ plane). This adjusts the flow velocity of the refrigerant flowing through the space 13 within the cooling chamber 5. More specifically, in the first embodiment, the cooling chamber 5 has a third surface S3 extending along the second surface S2 of the substrate 2 to define the space 13, and a fourth surface S4 facing the third surface S3 to define the space 13. The fourth surface S4 may include an inclined surface IS inclined with respect to the third surface S3. The inclined surface IS may be inclined such that the flow path cross-sectional area decreases as it moves away from the inlet 7. The inclined surface IS may have a constant gradient or a changing gradient. In other words, the change portion CP may be a portion in which the flow path cross-sectional area decreases from the inlet 7 to the outlet 8. This causes the flow velocity of the refrigerant to increase in the space 13 as it moves away from the inlet 7.

[0024] The first modified light source device 1 of the first embodiment will be described below with reference to Figures 1 and 3. Figures 1 and 3 are diagrams showing the configuration of the first modified light source device 1, respectively, with a portion shown in cross-section. Matters not mentioned as part of the configuration of the first modified light source device 1 may follow the first embodiment.

[0025] In the first modified example, the cooling chamber 5 has a third surface S3 extending along the second surface S2 of the substrate 2 to define the space 13, and a fourth surface S4 facing the third surface S3 to define the space 13, the fourth surface S4 may include a stepped surface SS. The fourth surface S4 may be configured such that the flow path cross-sectional area decreases in stages from the inlet 7 to the outlet 8. In other words, the change portion CP may be the portion in which the flow path cross-sectional area decreases in stages from the inlet 7 to the outlet 8. As a result, in the space 13, the flow velocity of the refrigerant increases as it moves away from the inlet 7. The number and dimensions of the steps in the stepped surface SS may be designed based on the characteristics of the array 4 and the target temperature distribution, etc.

[0026] The following describes the second modified light source device 1 of the first embodiment with reference to Figures 1 and 4. Figures 1 and 4 are diagrams showing the configuration of the second modified light source device 1, respectively, with a portion shown in cross-section. Matters not mentioned as part of the configuration of the second modified light source device 1 may follow those of the first embodiment or the first modified embodiment.

[0027] In the second modified example, the space 13 within the cooling chamber 5 has a variable portion CP in which the flow path cross-sectional area changes. The light source device 1 may include an adjustment mechanism 40 for adjusting the flow path cross-sectional area at at least one location in the variable portion CP. The adjustment mechanism 40 may include a moving mechanism 42 for moving a member that defines the space 13. The moving mechanism 42 may include a mechanism that can be operated manually by a plunger or bolt, or it may include an actuator that can be controlled by a command signal. Since changing the flow path cross-sectional area changes the pressure loss in the flow path and thus changes the flow rate of the refrigerant, it is preferable that the light source device 1 includes a flow rate controller 11. The flow rate controller 11 may be located, for example, between the cooler 6 and the inlet 7 of the cooling chamber 5. The flow rate controller 11 adjusts the flow rate of the refrigerant flowing through the circulation path 12 to a target flow rate.

[0028] In one example, the cooling chamber 5 may have a third surface S3 extending along the second surface S2 of the substrate 2 to define the space 13, and a fourth surface S4 facing the third surface S3 to define the space 13. The fourth surface S4 may include a stepped surface SS. The fourth surface S4 may be configured such that the flow path cross-sectional area decreases gradually from the inlet 7 to the outlet 8. In other words, the change portion CP may be the portion in which the flow path cross-sectional area decreases gradually from the inlet 7 to the outlet 8. The fourth surface S4 may also include an inclined surface IS, as in the first modified example. This causes the refrigerant flow velocity to increase in the space 13 as you move away from the inlet 7.

[0029] Here, with reference to Figure 5, a method for adjusting the flow path cross-sectional area according to the temperature distribution of the refrigerant and the heat generation density distribution of the array 4 will be described. Here, we consider the temperature distribution of the refrigerant when the array pitch of the multiple light-emitting elements 3 is small, that is, when the array density is high. When the array density is high, the temperature distribution of the uncooled array 4 is such that, for example, as illustrated in Figure 5(a), the heat generated is superimposed on the light-emitting elements 3 in the central part R2 in the array direction (X direction) due to the influence of the light-emitting elements 3 surrounding R1 and R3. As a result, the light-emitting elements 3 in the central part R2 tend to become hotter than the light-emitting elements 3 surrounding R1 and R3. In such cases, as shown in Figure 5(b), it is preferable to make the flow path cross-sectional area of ​​the central part R2 smaller than the flow path cross-sectional areas of the outer parts R1 and R3. This makes it possible to recover more heat from the light-emitting elements 3 in the central part R2 than from the light-emitting elements 3 in the outer parts R1 and R3. Furthermore, considering that the temperature of the refrigerant increases as you approach the outlet 8 from the central part R2, it is preferable to make the flow path cross-sectional area on the outlet 8 side smaller than the flow path cross-sectional area on the inlet 7 side. This configuration is advantageous for equalizing the temperature of array 4.

[0030] The third modified light source device 1 of the first embodiment will be described below with reference to Figures 1 and 6. Figures 1 and 6 are diagrams showing the configuration of the third modified light source device 1, respectively, with a portion shown in cross-section. Matters not mentioned as part of the configuration of the third modified light source device 1 may follow those of the first embodiment, or the first or second modified embodiment.

[0031] In the third modification, the space 13 within the cooling chamber 5 has a variable portion CP in which the flow path cross-sectional area changes. The light source device 1 may include an adjustment mechanism 40 for adjusting the flow path cross-sectional area at at least one location in the variable portion CP. The adjustment mechanism 40 may include a moving mechanism 42 for moving a member that defines the space 13. The moving mechanism 42 may include a mechanism that can be operated manually by a plunger or bolt, or it may include an actuator that can be controlled by a command signal. Since changing the flow path cross-sectional area changes the pressure loss in the flow path and thus changes the flow rate of the refrigerant, it is preferable that the light source device 1 includes a flow rate controller 11. The flow rate controller 11 may be located, for example, between the cooler 6 and the inlet 7 of the cooling chamber 5. The flow rate controller 11 adjusts the flow rate of the refrigerant flowing through the circulation path 12 to a target flow rate.

[0032] The light source device 1 may include a temperature measuring unit 61 that measures the temperature distribution of multiple light-emitting elements 3, and a control unit 60 that controls the moving mechanism 42 based on the output of the temperature measuring unit 61. The temperature measuring unit 61 only needs to measure the temperature distribution of a portion that correlates with the temperature distribution of the multiple light-emitting elements 3. For example, it may form a temperature distribution in space 13. The control unit 60 can control the adjustment mechanism 40 so that the temperature distribution of the multiple light-emitting elements becomes a target temperature distribution, based on the temperature distribution measured by the temperature measuring unit 61, or the output of the temperature measuring unit 61. The control unit 60 can further adjust the flow rate controller 11 so that the flow rate of the refrigerant flowing through the circulation path 12 becomes a target flow rate.

[0033] The control unit 60 may, based on the output of the temperature measurement unit 61, acquire the temperature distribution of the junctions of the multiple light-emitting elements 3 as the temperature distribution of the multiple light-emitting elements 3, and control the system so that the temperature distribution of the junctions of the multiple light-emitting elements 3 becomes the target temperature distribution. Here, the interrelationships of multiple parameters such as the temperature distribution of the junctions of the multiple light-emitting elements 3, the distribution of the flow path cross-sectional area, and the flow rate of the refrigerant can be acquired in advance by simulation or the like. Based on this correlation, the flow path cross-sectional area and the flow rate of the refrigerant can be adjusted. When such a method of adjusting the flow path cross-sectional area is adopted, the temperature measurement unit is not indispensable for determining the flow path cross-sectional area.

[0034] Furthermore, in operation where the light emission intensity of the light source device 1 is not changed and the heat generation amount and heat density distribution of the multiple light-emitting elements 3 do not change, the temperature of the refrigerant remains constant. Therefore, the flow cross-sectional area can be fixed, and the pressure loss in space 13 is constant. In such cases, it is sufficient to install a valve that can be adjusted to a constant flow rate, and the flow controller 11 is not essential.

[0035] The following describes the fourth modified light source device 1 of the first embodiment with reference to Figure 7. Figures 7(a) and 7(b) show the configuration of the fourth modified light source device 1, respectively, with a portion shown in cross-section. Matters not mentioned as part of the configuration of the fourth modified light source device 1 may follow those of the first embodiment or the first to third modified embodiments.

[0036] In the fourth modification, the cooling chamber 5 may include a container 55 that defines a space 13 communicating with an inlet 7 and an outlet 8, and baffles 70 arranged within the container 55 to define the flow path cross-sectional area. The baffles 70 may include a plurality of columnar members 72. The columnar members 72 may have elongated shapes such as cylindrical shapes (including regular cylinders and elliptical cylinders) and prismatic shapes (including polygonal prisms such as triangular and square prisms). The flow path cross-sectional area can be adjusted by the arrangement density, number, dimensions, etc. of the columnar members 72. In parts with a narrow flow path cross-sectional area, the flow velocity of the refrigerant increases, and the heat recovery efficiency increases. Here, it is preferable that at least a portion of the baffles 70 is arranged in contact with the inner surface of the cooling chamber 5 or the container 55 in a way that allows heat transfer, as shown in Figure 7(b). By arranging the baffles 70 to define the space 13, the area in contact between the cooling chamber 5 and the refrigerant increases. This reduces thermal resistance and increases the amount of heat recovered from the array 4. Therefore, combined with the effect of increasing the flow velocity, it becomes possible to recover heat from the array 4 to the refrigerant even more effectively. The baffle 70, like the cooling chamber 5, can be made of a material such as copper or aluminum that has high thermal conductivity.

[0037] Placing baffle 70 inside cooling chamber 5 makes turbulence more likely to occur. The Reynolds number (a dimensionless number representing the ratio of the fluid's inertial force (fluid's momentum) to its viscous force (force that tries to suppress the flow)) is proportional to the refrigerant's velocity, and generally changes from laminar to turbulent flow at a Reynolds number of around 2300 to 4000. Turbulent flow has higher friction than laminar flow, resulting in higher heat exchange efficiency. From this perspective, placing baffle 70 is effective in improving the heat recovery capacity of the refrigerant.

[0038] Figure 7 merely schematically illustrates an example of the baffle 70 configuration. For example, whether or not multiple columnar members are used as the baffle 70, and if multiple columnar members are used, their arrangement, etc., can be changed depending on the purpose. In addition, a flow controller, a temperature measuring unit, a control unit, etc., may be provided.

[0039] The light source device 1 of the second embodiment will be described below with reference to Figure 8. Figure 8 is a diagram showing the configuration of the light source device 1 of the second embodiment, with a portion shown in cross-section. Matters not mentioned as part of the configuration of the light source device 1 of the second embodiment may follow the first embodiment (including the first to fourth modifications).

[0040] In the second embodiment, the plurality of light-emitting elements 3 are arranged in a two-dimensional array. Each of the plurality of light-emitting elements 3 may be a semiconductor chip. The cooling chamber corresponding to the cooling chamber 5 in the first embodiment is divided into a plurality of partial cooling chambers 5a, 5b, and 5c in the second embodiment. Partial cooling chamber 5a may have an inlet 7a and an outlet 8a, and a space 13 extending from the inlet 7a to the outlet 8a. Partial cooling chamber 5b may have an inlet 7b and an outlet 8b, and a space 13 extending from the inlet 7b to the outlet 8b. Each space 13 is equivalent to the space 13 in the first embodiment.

[0041] The refrigerant flowing through the circulation path 12 enters the multiple partial cooling chambers 5a, 5b, 5c through their respective inlets 7a, 7b, 7c. The refrigerant then exits the multiple partial cooling chambers 5a, 5b, 5c through their respective outlets 8a, 8b, 8c, before merging and entering the circulation path 12. The light source device 1 may further include a plurality of flow controllers 11a, 11b, 11c connected to the respective inlets 7a, 7b, 7c of the multiple partial cooling chambers 5a, 5b, 5c. The light source device 1 may also include a temperature measuring unit configured to measure the temperature distribution of a plurality of light-emitting elements, and a control unit that controls the plurality of flow controllers 11a, 11b, 11c based on the output of the temperature measuring unit, similar to the configuration shown in Figure 6.

[0042] Hereinafter, an exposure apparatus 100 including a light source device 1, as described exemplified as the first embodiment (including the first to fourth modified examples) and the second embodiment, will be described with reference to Figure 9. Figure 9 is a schematic diagram showing the configuration of an exposure apparatus 100 according to one embodiment. The exposure apparatus 100 can be used in a lithography process for manufacturing articles such as semiconductor devices and display devices. The exposure apparatus 100 is a lithography apparatus that forms a pattern on a substrate (wafer). The exposure apparatus 100 exposes the substrate through a master plate (mask) and transfers the pattern of the master plate to the substrate.

[0043] The exposure apparatus 100 may include a light source device 110, a light shielding mechanism 120, an illumination optical system 130, a master plate stage 140, a projection optical system 150, and a substrate stage 160. The light source device 110 may be the aforementioned light source device 1. The exposure apparatus 100 may also include an exposure control unit (not shown) that controls the operation of the exposure apparatus 100. The exposure apparatus 100 may use a step-and-repeat method, a step-and-scan method (scanning exposure apparatus), or other exposure methods.

[0044] To avoid degrading the resolution performance of the exposure apparatus 100, it is preferable that the variation in the peak wavelengths of light generated by the multiple light-emitting elements in the light source device 110 is ±1 nm or less. The light-shielding mechanism 120 is a mechanism for switching between blocking and passing light from the light source device 110, and is, for example, a shutter. When the exposure apparatus 100 is configured as a step-and-repeat system, in the exposure process in which the substrate 161 is exposed with the substrate stage 160 set up, the exposure light generated by the light source device 110 is irradiated onto the substrate 161. On the other hand, in the step process in which the substrate stage 160 is moved, the exposure light generated by the light source device 110 is not irradiated onto the substrate 161. The light-shielding mechanism 120 is placed between the light source device 110 and the master plate stage 140 and allows or blocks the exposure light. The light-shielding mechanism 120 allows the exposure light to pass through in the exposure process and blocks the exposure light in the step process. In the example shown in Figure 9, the light-shielding mechanism 120 is located in the optical path between the light source device 110 and the illumination optical system 130. However, it may be placed in any other location where it can block the light from the light source device 110. Alternatively, the light-shielding mechanism may be omitted, and the blocking of light may be replaced by stopping the emission of light from the LED light source. The illumination optical system 130 shapes the light from the light source device 110 into a predetermined shape suitable for exposure and illuminates the original plate 141. The illumination optical system 130 may include lenses, mirrors, optical integrators, apertures, etc., to perform functions such as uniform illumination of the original plate 141 and polarized illumination.

[0045] Here, the illumination optical system 130 may include a wavelength filter 131 that cuts out wavelengths other than those within the wavelength range suitable for the lens performance from the light source device 110. Because the wavelength filter 131 cuts out wavelengths other than those within the wavelength range, temperature unevenness within the light source device will cause wavelength unevenness, broadening the peak wavelength of the composite light and reducing the illuminance. When an LED array is used as a replacement for an i-line mercury lamp in the light source device 110, it is preferable to set the peak wavelength to 366±1nm, taking into account the i-line wavelength of 365nm and the wavelength shift of 1nm caused by a temperature rise of 20℃ in the LED array.

[0046] The master plate 141 has a pattern formed on it that corresponds to the pattern to be formed on the substrate 161. The master plate 141 is held on the master plate stage 140. The master plate stage 140 is positioned in a two-dimensional direction parallel to a plane perpendicular to the optical axis (Z axis) of the projection optical system 150 (i.e., the XY plane), and in rotation around the optical axis (Z axis) (i.e., the θZ direction), thereby allowing the master plate 141 to be positioned. The master plate 141 and the substrate 161 are positioned in an optically approximately conjugate position via the projection optical system 150. The projection optical system 150 is an optical system that projects an object onto the image plane. Reflective, refractive, and reflective-refractive systems can be applied to the projection optical system 150. The projection optical system 150 includes a plurality of optical elements and projects the pattern of the master plate 141 onto the substrate 161 at a predetermined magnification. A photosensitive material (resist) is applied to the substrate 161, and a latent image pattern is formed on the photosensitive material when the pattern of the original plate 141 is projected onto it.

[0047] A reflector (not shown) may be placed on the substrate stage 160. A laser interferometer (not shown) may be placed opposite the reflector. The position of the substrate stage 160 is measured in real time by the laser interferometer, and the measurement results may be provided to the control unit of the exposure apparatus. The control unit of the exposure apparatus can control the drive mechanism of the substrate stage 160 based on the measurement results from the laser interferometer to position the substrate 161 held by the substrate stage 160.

[0048] When the exposure apparatus 100 is configured as a stepper, in the exposure process in which the substrate 161 is exposed with the substrate stage 160 in a set position, the exposure light generated by the light source device 110 is irradiated onto the substrate 161. On the other hand, in the stepping process in which the substrate stage 160 is moved, the exposure light generated by the light source device 110 is not irradiated onto the substrate 161.

[0049] The following describes a method for manufacturing articles using the exposure apparatus 100 described above. The article manufacturing method may include an exposure step of exposing a substrate using the exposure apparatus 100, a developing step of developing the substrate exposed in the exposure step, and a processing step of processing the substrate after the developing step to obtain an article. The processing step may include, for example, an etching step, a film formation step, a dicing step, a sealing step, etc. Furthermore, the exposure step and the developing step may be performed multiple times.

[0050] This specification and accompanying drawings include the following disclosures: (Item 1) A substrate having a first surface and a second surface, Multiple light-emitting elements arranged on the first surface, A cooling chamber is provided on the side of the second surface to cool the plurality of light-emitting elements, The system includes a circulation path for circulating a refrigerant through the aforementioned cooling chamber, The cooling chamber has an inlet and an outlet, and a space extending from the inlet to the outlet. In the orthogonal projection onto the second plane, the entirety of the plurality of light-emitting elements is arranged inside the smallest rectangle that encloses the space. The space has a changing portion in which the cross-sectional area changes in a plane perpendicular to the path from the entrance to the exit. A light source device characterized by the following features. (Item 2) The cooling chamber has a third surface extending along the second surface to define the space, and a fourth surface facing the third surface to define the space. The fourth surface includes an inclined surface that is inclined relative to the third surface. A light source device as described in item 1, characterized by the features described herein. (Item 3) The aforementioned changeable portion is the portion where the cross-sectional area decreases from the inlet to the outlet. The light source device according to item 2, characterized by the features described above. (Item 4) The cooling chamber has a third surface extending along the second surface to define the space, and a fourth surface facing the third surface to define the space. The fourth surface includes a stepped surface, A light source device as described in item 1, characterized by the features described herein. (Item 5) The aforementioned changeable portion is the portion where the cross-sectional area decreases in stages from the inlet to the outlet. The light source device described in item 4, characterized by the features described herein. (Item 6) The cooling chamber includes a container that defines the space communicating with the inlet and the outlet, and baffles arranged within the container to define the cross-sectional area. A light source device as described in item 1, characterized by the features described herein. (Item 7) The baffle includes a plurality of columnar members, A light source device as described in item 6, characterized by the features described herein. (Item 8) Each of the aforementioned columnar members has a cylindrical or rectangular prism shape. A light source device as described in item 7, characterized by the features described herein. (Item 9) The change in the cross-sectional area in the aforementioned change portion is given by the arrangement density of the plurality of columnar members. A light source device as described in item 7, characterized by the features described herein. (Item 10) The aforementioned changeable portion is the portion where the cross-sectional area decreases from the inlet to the outlet. The light source device according to item 9, characterized by the features described herein. (Item 11) The plurality of light-emitting elements are arranged in a two-dimensional array. A light source device according to any one of items 1 to 10, characterized by the features described herein. (Item 12) Each of the aforementioned plurality of light-emitting elements is a semiconductor chip. A light source device as described in item 11, characterized by the features described herein. (Item 13) The cooling chamber is divided into a plurality of partial cooling chambers, each partial cooling chamber having an inlet and an outlet. The refrigerant flowing through the circulation path enters the plurality of partial cooling chambers through the inlets of each of the plurality of partial cooling chambers, exits the plurality of partial cooling chambers through the outlets of each of the plurality of partial cooling chambers, merges, and enters the circulation path. A light source device according to item 11 or 12, characterized by the features described herein. (Item 14) The system further comprises a plurality of flow controllers connected to the respective inlets of the plurality of partial cooling chambers. A light source device as described in item 13, characterized by the features described herein. (Item 15) A temperature measuring unit for measuring the temperature distribution of the plurality of light-emitting elements, A control unit that controls the plurality of flow controllers based on the output of the temperature measuring unit, The light source device according to item 14, further comprising the following: (Item 16) The variation in the wavelength of light emitted by multiple light-emitting elements is ±1 nm or less. A light source device according to any one of items 1 to 15, characterized by the features described herein. (Item 17) The wavelength of light emitted by multiple light-emitting elements is 366 nm ± 1 nm. A light source device according to any one of items 1 to 15, characterized by the features described herein. (Item 18) The system includes an adjustment mechanism for adjusting the cross-sectional area at at least one location in the aforementioned change portion. A light source device according to any one of items 1 to 17, characterized by the features described herein. (Item 19) A substrate having a first surface and a second surface, Multiple light-emitting elements arranged on the first surface, A cooling chamber is provided on the second side to cool the plurality of light-emitting elements, and has an inlet and an outlet, and a space extending from the inlet to the outlet. An adjustment mechanism for adjusting the cross-sectional area in a plane perpendicular to the path from the entrance to the exit at at least one location in the space, A light source device characterized by comprising the following features. (Item 20) The adjustment mechanism includes a moving mechanism for moving the member that defines the space, A light source device as described in item 19, characterized by the features described herein. (Item 21) A temperature measuring unit for measuring the temperature distribution of the plurality of light-emitting elements, A control unit that controls the moving mechanism based on the output of the temperature measuring unit, The light source device according to item 20, further comprising the following: (Item 22) A light source device as described in any one of items 1 to 21, An illumination optical system that uses the light generated by the aforementioned light source device to illuminate the original plate, A projection optical system for projecting the pattern of the aforementioned master plate onto a substrate, An exposure apparatus characterized by comprising: (Item 23) An exposure process in which the substrate is exposed using the exposure apparatus described in item 22, A developing step for developing the substrate exposed in the exposure step, A processing step to obtain an article by processing the substrate that has undergone the development step, A method for manufacturing articles, characterized by including the following:

[0051] Although preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of its essence. [Explanation of symbols]

[0052] 1: Light source device, 2: Substrate, 3: Light-emitting element, 4: Array, 5: Cooling chamber, 7: Inlet, 8: Outlet, 12: Circulation path, 13: Space, CP: Change section

Claims

1. A substrate having a first surface and a second surface, Multiple light-emitting elements arranged on the first surface, A cooling chamber is provided on the side of the second surface to cool the plurality of light-emitting elements, The system includes a circulation path for circulating a refrigerant through the aforementioned cooling chamber, The cooling chamber has an inlet and an outlet, and a space extending from the inlet to the outlet. In the orthogonal projection onto the second plane, the entirety of the plurality of light-emitting elements is arranged inside the smallest rectangle that encloses the space. The space has a changing portion in which the cross-sectional area changes in a plane perpendicular to the path from the entrance to the exit. A light source device characterized by the following features.

2. The cooling chamber has a third surface extending along the second surface to define the space, and a fourth surface facing the third surface to define the space. The fourth surface includes an inclined surface that is inclined with respect to the third surface. The light source device according to feature 1.

3. The aforementioned changeable portion is the portion where the cross-sectional area decreases from the inlet to the outlet. The light source device according to claim 2.

4. The cooling chamber has a third surface extending along the second surface to define the space, and a fourth surface facing the third surface to define the space. The fourth surface includes a stepped surface, The light source device according to feature 1.

5. The aforementioned changeable portion is the portion where the cross-sectional area decreases in stages from the inlet to the outlet. The light source device according to feature 4.

6. The cooling chamber includes a container that defines the space communicating with the inlet and the outlet, and baffles arranged within the container to define the cross-sectional area. The light source device according to feature 1.

7. The baffle includes a plurality of columnar members, The light source device according to claim 6.

8. Each of the aforementioned columnar members has a cylindrical or rectangular prism shape. The light source device according to feature 7.

9. The change in the cross-sectional area in the aforementioned change portion is given by the arrangement density of the plurality of columnar members. The light source device according to feature 7.

10. The aforementioned changeable portion is the portion where the cross-sectional area decreases from the inlet to the outlet. The light source device according to feature 9.

11. The plurality of light-emitting elements are arranged in a two-dimensional array. The light source device according to feature 1.

12. Each of the aforementioned plurality of light-emitting elements is a semiconductor chip. The light source device according to feature 11.

13. The cooling chamber is divided into a plurality of partial cooling chambers, each partial cooling chamber having an inlet and an outlet. The refrigerant flowing through the circulation path enters the plurality of partial cooling chambers through the inlets of each of the plurality of partial cooling chambers, exits the plurality of partial cooling chambers through the outlets of each of the plurality of partial cooling chambers, merges, and enters the circulation path. The light source device according to feature 11.

14. The system further comprises a plurality of flow controllers connected to the respective inlets of the plurality of partial cooling chambers. The light source device according to claim 13.

15. A temperature measuring unit for measuring the temperature distribution of the plurality of light-emitting elements, A control unit that controls the plurality of flow controllers based on the output of the temperature measuring unit, The light source device according to claim 14, further comprising the above.

16. The variation in wavelength of light emitted by multiple light-emitting elements is ±1 nm or less. The light source device according to feature 1.

17. The wavelength of light emitted by multiple light-emitting elements is 366 nm ± 1 nm. The light source device according to feature 1.

18. The system includes an adjustment mechanism for adjusting the cross-sectional area at at least one location in the aforementioned change portion. The light source device according to feature 1.

19. A substrate having a first surface and a second surface, Multiple light-emitting elements arranged on the first surface, A cooling chamber is provided on the second side to cool the plurality of light-emitting elements, and has an inlet and an outlet, and a space extending from the inlet to the outlet. An adjustment mechanism for adjusting the cross-sectional area in a plane perpendicular to the path from the entrance to the exit at at least one location in the space, A light source device characterized by comprising the following features.

20. The adjustment mechanism includes a moving mechanism for moving the member that defines the space, The light source device according to feature 19.

21. A temperature measuring unit for measuring the temperature distribution of the plurality of light-emitting elements, A control unit that controls the moving mechanism based on the output of the temperature measuring unit, The light source device according to claim 20, further comprising the above.

22. A light source device according to any one of claims 1 to 21, An illumination optical system that uses the light generated by the aforementioned light source device to illuminate the original plate, A projection optical system for projecting the pattern of the aforementioned master plate onto a substrate, An exposure apparatus characterized by comprising:

23. An exposure step of exposing a substrate using the exposure apparatus described in claim 22, A developing step for developing the substrate exposed in the exposure step, A processing step to obtain an article by processing the substrate that has undergone the development step, A method for manufacturing articles, characterized by including the following:

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