Door body

Abstract

The present invention provides a door body for semiconductor containers that can identify the operating state when locked or unlocked and has a tamper-proof design. [Solution] The door body 10, which is arranged to be coupled to a semiconductor container, includes a latch device 30 and an operation indicator member 40. The latch device is provided on the door body and is used to lock or unlock the door body relative to the semiconductor container. The operation indicator member is provided on the latch device and is used to identify the operating state. This protects the door body during locking or unlocking and prevents damage to the door body or the latch device thereon. More preferably, gripping portions are provided on both sides of the door body so that the latch and gripping portions can be used in combination, further improving the protective capacity of the door body and the semiconductor container to which it is applied.

Description

Technical Field

[0001] The present invention relates to a door body, and particularly to a door body applied to a semiconductor container, which can identify the operation state during locking or unlocking and has a destruction prevention design.

Background Art

[0002] In the semiconductor industry, electronic component-related products, such as semiconductor components like circuit boards, wafers, and glass, often require containers for housing, protecting, placing, or transporting these components. Containers for placing these electronic component-related products or semiconductor manufacturing process-related components require a good protection measure design to prevent damage to the semiconductor components stored and placed inside.

[0003] To protect the components stored inside the semiconductor container, a latch mechanism is provided on the door body to prevent the semiconductor components from falling out of the semiconductor container during transportation. The semiconductor container needs to frequently open and close the door body of the container in each process of the manufacturing process in order to take in and out the semiconductor components and perform each manufacturing process at each process station. However, in the conventional door body of the semiconductor container, during opening and closing, excessive force is concentrated on the door body fixing mechanism, so the door body or the fixing mechanism is often damaged. For example, when driving and opening the latch fixing mechanism provided on the door body with a key, conventionally, after releasing the latch state with the key, the key and the door body are pulled together to open the door body. When opening the door body by pulling it with the key, most of the weight of the door body itself is supported by the key and the latch fixing mechanism. Therefore, the internal components of the door body and / or the latch fixing mechanism are likely to be pressed by the force and deformed or damaged.

[0004] Furthermore, conventional door latch mechanisms are often damaged by excessive operating strokes or improper operation during opening and closing. Taking a latch mechanism with an operating member and a latch member as an example, the operating member moves the latch member in a linear motion, for example, using a cam. However, in conventional latch mechanisms, for example, when a user operates the operating member with a key, excessive unlocking or improper application of force can cause the operating stroke of the latch mechanism's components to become excessive, leading to deformation or damage to the components, which can further lead to failure of the door latch mechanism or damage to other components.

[0005] Furthermore, conventional semiconductor containers have the problem that the locking status of the door cannot be confirmed. For example, because it is not possible to confirm whether the latch locking mechanism, which is opened and closed with a key, is locked or unlocked, the door is prone to being improperly secured or falling, which can damage the semiconductor container or door, putting the semiconductor components stored and transported inside at risk. [Overview of the project]

[0006] The present invention provides a door for a semiconductor container. This door is capable of identifying the operating state during opening, closing, locking, or unlocking operations and preventing damage to the door. It solves problems such as damage caused by excessive force concentration on the latch when grasping the door, extends the service life of the semiconductor container, and improves the storage quality of semiconductor components by avoiding damage to the semiconductor components stored inside due to damage to the door of the semiconductor container.

[0007] In view of this, the door body provided in the present invention avoids the weight of the container door body concentrating on the fixing point of the latch device when opening and closing the container door body, avoids excessive operating stroke of the latch fixing mechanism, and directly and clearly identifies the locked or unlocked state of the door body, thereby improving the problem of damage to the door body and its internal components, and improving the service life of the semiconductor container and door body, as well as the storage quality of semiconductor components.

[0008] One aspect of the present invention provides a door body applicable to a semiconductor container, comprising: a latch device provided on the door body for locking or unlocking the door body relative to the semiconductor container; and an operation indicator member provided on the latch device for identifying the operating state.

[0009] In one embodiment, the operation instruction member enters a first state in response to a locking operation by the latch device and enters a second state in response to an unlocking operation.

[0010] In one embodiment, the operation indicator member has different colors to identify the first state or the second state.

[0011] In one embodiment, the latch device includes an unlocked position limiting member and a locked position limiting member, wherein the latch device is in a first state when a locking operation is performed on the locked position limiting member, and the latch device is in a second state when an unlocking operation is performed on the unlocked position limiting member.

[0012] In one embodiment, the latch device further includes an operating member, at least one latch member coupled to the operating member, and an unlocking part and a locking part located on the operating member, wherein the latch device is moved linearly by operation of the operating member, and the unlocking part or the locking part is driven synchronously so that the unlocking part moves in accordance with an unlocking position limiting member to limit the unlocking position, or the locking part moves in accordance with a locking position limiting member to limit the locking position.

[0013] In one embodiment, the door further includes a door body and a sealing plate, and the latch device is provided within the accommodating space defined by the door body and the sealing plate, the sealing plate having an opening for observing an operating instruction member.

[0014] In one embodiment, the door body further includes at least two gripping parts, each positioned adjacent to the door body on both sides, the gripping parts being for gripping the door body.

[0015] Another aspect of the present invention provides a door body applicable to a semiconductor container and arranged to be coupled to the semiconductor container, the door body comprising: a latching device provided on the door body for locking or unlocking the door body relative to the container body; an operating indicator member provided on the latching device for identifying the operating state; and at least two gripping portions, each positioned on either side adjacent to the door body, for grasping the door body.

[0016] In one embodiment, the gripping portion is a gripping groove.

[0017] In one embodiment, the gripping groove includes an insertion groove and a gripping flange.

[0018] In one embodiment, the gripping part is a gripping handle.

[0019] The door body according to the present invention, by being equipped with a latch device and an operating indicator member, has many advantages, including preventing excessive force from concentrating on the container door body or the latch device on it during opening and closing the door body and locking and unlocking the latch device, thereby preventing damage to the door body or the fixing mechanism such as the latch device, and preventing damage to the container door body or the latch device on it due to excessive operating stroke while the container door body is locked and fixed, and more preferably, allowing for clear identification of the locked or unlocked state of the door body at any time, confirming whether the container door body is locked to the container body, and preventing accidental application of force to the container door body, or preventing the container door body from coming off, falling, and being damaged. [Brief explanation of the drawing]

[0020] [Figure 1] Figure 1 shows an exploded perspective schematic of a semiconductor container in one embodiment of the present invention. [Figure 2a] Figure 2a shows a partially exploded schematic diagram of a door body in one embodiment of the present invention. [Figure 2b] Figure 2b shows a partially exploded schematic diagram of a door body in one embodiment of the present invention. [Figure 3a]FIG. 3a shows a perspective schematic view of a door body in an embodiment of the present invention. [Figure 3b] FIG. 3b shows a perspective schematic view of an operation instruction member in an embodiment of the present invention. [Figure 4a] FIG. 4a shows a schematic view of a lock position restriction operation in an embodiment of the present invention. [Figure 4b] FIG. 4b shows a schematic view of a lock position restriction operation in an embodiment of the present invention. [Figure 5a] FIG. 5a shows a schematic view of an unlocking position restriction operation in an embodiment of the present invention. [Figure 5b] FIG. 5b shows a schematic view of an unlocking position restriction operation in an embodiment of the present invention. [Figure 6] FIG. 6 shows a perspective schematic view of a door body in an embodiment of the present invention. [Figure 7] FIG. 7 shows a schematic structural view of a gripping portion of a door body in an embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

[0021] To explain the technical content of the present invention in detail, the following further description will be made with reference to embodiments and drawings. Those skilled in the art can understand the purpose, features and effects of the present invention from the content disclosed in this specification. It should be noted that the present invention can be implemented or applied by other different specific embodiments, and each detail of this specification can be modified and changed in various ways without departing from the spirit of the present invention based on different viewpoints and uses. In the following embodiments, the related technical content of the present invention will be described in more detail, but the disclosed content does not limit the scope of the claims of the present invention.

[0022] It should be noted that, in this specification, terms such as "first," "second," and "third" are used to distinguish between parts, and are not used to limit the parts themselves or to indicate a specific order of parts. Also, in this specification, unless a specific number is specified, the expression "one" refers to one or more parts. Furthermore, each step described in this application may be performed sequentially, in reverse order, or in any order that may be changed or skipped during the control process.

[0023] Furthermore, the term "connection" as used herein can mean "direct connection" and / or "indirect connection." Specifically, "the first element is positioned to connect with the second element" can mean "the first element is positioned to connect directly to the second element" and / or "the first element is positioned to connect indirectly to the second element." It should also be noted that terms such as "up," "down," "left," "right," "front," and "back" as used herein are merely illustrative descriptions of relative directions, and the reference direction can be changed at will and is not limited to absolute directions.

[0024] To facilitate understanding, the following describes various embodiments and schematic diagrams of the door body of the semiconductor container according to the present invention.

[0025] Figure 1 shows an exploded perspective schematic of a semiconductor container in one embodiment of the present invention. One aspect of the present invention provides a door body 10 to be applied to a semiconductor container 1. The semiconductor container 1 is, for example, a wafer cassette, a photomask cassette, a carrier substrate cassette, or a transport and processing device for other component carriers in a semiconductor manufacturing process, and is not limited to these. The semiconductor container 1 has a container body 20, and the door body 10 is coupled to the container body 20 and arranged to form a container housing space for housing each component in a semiconductor manufacturing process.

[0026] Please also refer to Figures 1, 2(a), 2(b), 3(a), and 3(b). Figures 2(a) and 2(b) show partially exploded schematic diagrams of a door body in one embodiment of the present invention, and Figures 3(a) and 3(b) show perspective schematic diagrams of a door body and an operation indicator member in one embodiment of the present invention. One aspect of the present invention provides a door body 10 including a latch device 30 and an operation indicator member 40 which can be used as a protective device 2 for the door body 10.

[0027] The latch device 30 is provided on the door body 10 and is arranged to selectively lock and fix the door body 10 to the container body 20. That is, the latch device 30 is used to lock or unlock the door body 10 to the container body 20. The operation indicator member 40 is provided on the latch device 30 and is used to identify the operating state. When the door body 10 is locked and fixed to the container body 20 by the locking operation of the latch device 30, the operation indicator member 40 enters a first state 100(a) in response to the locking operation of the latch device 30. When the door body 10 is not locked and fixed to the container body 20 by the unlocking operation of the latch device 30, the operation indicator member 40 enters a second state 100(b) in response to the unlocking operation of the latch device 30. That is, as shown in Figure 2(b), when the door body 10 is locked and fixed to the container body 20, it is in the first state 100(a), and when the door body 10 is unlocked and not fixed to the container body 20, it is in the second state 100(b).

[0028] In one embodiment, due to the large volume and heavy weight of existing semiconductor carriers, the door body 10 is provided with one or more sets of latch devices 30 to effectively support the weight and stabilize the latch. In this embodiment, the case where there are two sets of identical latch devices 30 is given as an example, and the same configuration, operating method, and functionality will not be described redundantly. Of course, the number of latch devices 30 and their placement on the door body 10 are not limited. The door body 10 further includes a door body 12 and a sealing plate 14, and the latch devices 30 are provided in the accommodation space S defined by the door body 12 and the sealing plate 14. The latch device 30 includes an operating member 31, at least one latch member 32 coupled to the operating member 31, and an unlocking part 33 and a locking part 34 located on the operating member 31. The sealing plate 14 includes a keyhole 142, and a robot arm or key performs a locking or unlocking operation by passing the operating member 31 through the keyhole 142. By operating the operating member 31, the latch member 32 is moved in a linear motion, and the unlocking position restriction by the unlocking unit 33 or the locking position restriction by the locking unit 34 is performed synchronously. As a result, in this invention, the door body 10 can be locked or unlocked relative to the container body 20 by moving the latch member 32 in a linear motion to make it protrude from or retract into the door body 10.

[0029] Following the above, in order to realize a technical function that enables the unlocking position to be restricted by the unlocking unit 33 or the locking position to be restricted by the locking unit 34, and to synchronize the identification of the operating state by the operation instruction member 40, the latch device 30 further includes an unlocking position limiting member 35 and a locking position limiting member 36. The unlocking unit 33 and the unlocking position limiting member 35 are combined with each other to perform the unlocking function. The locking unit 34 and the locking position limiting member 36 are combined with each other to perform the locking function. The operation instruction member is preferably designed to be provided on the latch member 32. Of course, in the present invention, the installation position and number of the operation instruction member 40 are not limited. Referring to Figure 2(b), when the latch device 30 is in a locked state, the operation instruction member 40 can identify it as a locked first state 100(a) based on the position of the latch member 32, and locking to the container body 20 can be performed by making a part of the latch member 32 protrude from the door body 10. When the latch device 30 is in the unlocked state, the operation instruction member 40 can identify it as the unlocked second state 100(b) based on the position of the latch member 32, and the lock to the container body 20 can be released by pulling a part of the latch member 32 into the door body 10.

[0030] Furthermore, as shown in Figures 3(a) and 3(b), the sealing plate 14 has an opening 144 for observing the operation indicator member 40. In this embodiment, each set of latch devices 30 includes two opposing latch members 32, so the sealing plate 14 has four openings 144 corresponding to the number of latch members 32. In the present invention, the position and number of openings 144 are not limited. The openings 144 allow for visual observation of the state of the operation indicator member 40 to identify the operating state of the latch device 30. The operation indicator member 40 has different colors or patterns, and by displaying different colors or patterns in different operating states, the first state 100(a) and the second state 100(b) of the latch device 30 can be identified. Specifically, the operation indicator member 40 and the latch members 32 form an interlocking mechanism, and for example, the operation indicator member 40 directly or indirectly follows the movement of the latch members 32, causing the openings 144 to display different indications according to the linear movement stroke of the latch members 32. In this way, the operator can directly observe the operating state visually. Of course, the operation instruction member 40 and the latch member 32 can be designed with specific interlocking mechanisms and arrangement methods as needed. As can be seen from the above description, the present invention can reliably prevent damage to the door body 10, the latch device 30, and the container body 20 or any of the above due to improper operation during locking or unlocking in the first state 100(a) or the second state 100(b) of the door body 10. In other words, the present invention can solve the conventional problem that the door body cannot be latched accurately because it is not possible to know whether the force applied during operation is excessive or insufficient, as the only way to determine whether the door body is locked or unlocked is whether the key has rotated 90 degrees from the latch hole. Furthermore, in the conventional invention, there is a problem in that it is not possible to determine whether the latch is accurate, which can cause the door body 10 to detach from or fall from the semiconductor container 1, or cause damage to related parts. According to the operation instruction member 40 of one embodiment of the present invention, the latch state of the door body 10 can be intuitively and reliably determined from the appearance of the door body 10, and identification can be completed by an image capture device, image analysis module, machine vision, etc., thereby solving the above-mentioned conventional problems and effectively protecting the semiconductor container 1 and the door body 10.Furthermore, the present invention does not require any extra parts or mechanisms, and can achieve clear status indication with only a simple operation indicator member 40. The position of the opening 144 is provided in correspondence with the positions of the operation indicator member 40 and a part of the latch member 32, thereby shortening the required stroke and achieving space saving.

[0031] Next, we will explain in more detail how the lock position limiting function is realized in the present invention. Please also refer to Figures 2, 4(a), and 4(b). Figures 4(a) and 4(b) show schematic diagrams of the lock position limiting operation in one embodiment of the present invention. Part of the protective device 2 includes a lock release position limiting member 35 and a lock position limiting member 36 of the latch device 30. First, the effect of the lock position limiting member 36 in this embodiment will be explained. By operating the operating member 31, the latch member 32 is moved in a linear motion, and the locking part 34 is driven synchronously to move in accordance with the lock position limiting member 36 to perform lock position limiting, so that a part of the latch member 32 protrudes from the door body 10, and the door body 10 is locked to the container body 20. At this time, the operation instruction member 40 can observe or identify whether the latch device 30 is in the first state 100(a) during the lock operation, and if it is in the first state 100(a), it indicates that the lock operation has been completed correctly.

[0032] Please also refer to Figures 2, 5(a), and 5(b). Figures 5(a) and 5(b) show schematic diagrams of the unlock position limiting operation in one embodiment of the present invention. Here, the effect of the unlock position limiting member 35 in this embodiment will be explained. By operating the operating member 31, the latch member 32 is moved in a linear motion, and the unlocking unit 33 is driven in sync with the unlock position limiting member 35 to move and limit the unlock position. As a result, a part of the latch member 32 is pulled into the door body 10, the door body 10 is detached from the container body 20 and unlocked. At this time, the operation instruction member 40 can be used to observe or identify whether the latch device 30 is in the second state 100(b) during the unlocking operation. If it is in the second state 100(b), it indicates that the unlocking operation has been successfully completed.

[0033] The unlock position limiting member 35 and the lock position limiting member 36 are preferably provided in the storage space S inside the door body in order to be combined with specific unlocking portion 33 and locking portion 34 of the operating member 31. The unlock position limiting member 35 and the lock position limiting member 36 are used to limit the range of the operating stroke of the latch device 30 and to limit the operating position when switching between the first state 100(a) and the second state 100(b). As a result, at least some parts of the latch device 30 can remain in the optimal position of the first state 100(a) or the second state 100(b) due to the restriction and blocking of the unlock position limiting member 35 and the lock position limiting member 36, so that they do not move, rotate or displace excessively during switching and exceed the optimal position of the first state 100(a) or the second state 100(b). The optimal position does not cause mechanical interference in the design of the latch device 30, so operation becomes smoother. As a result, during locking or unlocking of the door body 10, the protective device 2 can prevent excessive operating stroke or improper operation by the operator from causing impact, deformation, and damage to the parts of the door body 10 or the latch device 30 on it. Furthermore, it is possible to clearly define the operating position and stroke of the relevant parts of the latch device 30 on the door body 10 and ensure that the latch device 30 moves and rotates within a limited range. It should be noted that the arrangement of the number and shape of the protective devices is not limited to those shown in Figures 4 and 5, and all such devices that can block and limit the stroke and position of the latch device 30 fall within the scope of protection of the present invention.

[0034] In one embodiment, the unlocking portion 33 and the locking portion 34 can be located at different heights or on different planes on the operating member 31, and the unlocking position limiting member 35 and the locking position limiting member 36 provided on the door body 12 can also have contact position limiting surfaces that are at different heights or on different planes, corresponding to the unlocking portion 33 and the locking portion 34.

[0035] In one embodiment, for example, the operating member 31 may have a front and a back. The unlocking part 33 for position restriction during the unlocking operation may be provided on the back of the operating member 31 (for example, as shown in Figure 5(a)). The locking part 34 for position restriction during the locking operation may be provided on the front of the operating member 31 (for example, as shown in Figure 4(a)). The unlocking part 33 and the locking part 34 do not come into frictional contact with the unlocking position restriction member 35 and the lock position restriction member 36 during the unlocking or locking operation, and only come into contact with each other and restrict the contact position at the end of the operation.

[0036] In one embodiment, the unlock position limiting member 35 and the lock position limiting member 36 may be provided on the sealing plate 14 in order to reduce the number of parts and features of the door body 12 and to make effective use of space.

[0037] Please refer to Figure 6. Figure 6 shows a schematic perspective view of a door body in one embodiment of the present invention. Part of the protective device 2 includes a gripping portion 210. The gripping portion 210 is positioned to grip the door body 10 with an external force when the door body 10 is moving, thereby preventing the problem of deformation and damage to the door body 10 and / or the latch device 30 caused by the concentration of force on the latch device 30 when the door body 10 is gripped when the door body 10 is moving. In one embodiment, at least two gripping portions 210 are provided, and are positioned on both sides adjacent to the door body 10 in order to grip the door body 10.

[0038] Next, the principle by which the gripping part 210 protects the door body 10 will be explained. For example, it will be explained in comparison with the prior art. In the prior art, when attempting to open the door body 10, the operator opens and drives the latch device 30 provided on the door body 10 with a key, and after releasing the latch state, pulls the key and the door body 10 together. This causes the door body 10 to receive force, move, detach from the container body 20, and open the door body 10. However, in the prior art method of operation, when the operator pulls the key and the door body 10 together to open the door body 10, most of the weight of the door body 10 itself is supported by the key and keyhole 142. Since the keyhole 142 and the associated latch device 30 need to support the entire weight of the door body 10, the keyhole 142 and the associated parts of the latch device 30 are subjected to force, pressed, deformed, and easily damaged, which can further damage the door body 10.

[0039] According to the gripping portion 210 of the protective device 2 provided in one embodiment of the present invention, when an operator attempts to open and remove the door body 10, the operator inserts the key into the keyhole 142 to release the locked state of the door body 10, allowing the door body 10 to enter the second state 100(b), and the gripping portion 210 of the protective device 2 can then remove the door body 10. As a result, when the door body 10 is subjected to force and moves, that force is received entirely by the gripping portion 210 of the protective device 2, rather than by the key and the corresponding keyhole 142 or the latch device 30. Furthermore, damage caused by stress concentration on the latch device 30 when the door body 10 is unlocked, opened, moved, and removed can be effectively avoided. It should be noted that the use of the protective device 2 and its gripping portion 210 is not limited to the unlocking and removal of the door body 10, but can also be applied during the installation and locking process of the door body 10.

[0040] In one embodiment, the gripping portion 210 is provided adjacent to the latch device 30. For example, the gripping portion 210 is provided adjacent to the keyhole 142. This allows the operator to unlock the latch device 30 of the door body 10 with the key, and then move their hand directly to the adjacent gripping portion 210 with a small stroke to grab it, thereby achieving good unlocking and grabbing efficiency.

[0041] In one embodiment, there are two gripping parts 210, which are symmetrically provided on both sides of the door body 10. This allows the operator to efficiently and stably grasp the door body 10 with both hands (for example, as shown by the circle in Figure 6) after unlocking it. The operator can also grasp the door body 10 intuitively.

[0042] Figure 7 shows a schematic diagram of the structure of the door gripping section in an embodiment of the present invention. In one embodiment, the gripping section 210 is a gripping groove 211, as shown in Figure 7(a), for example, and the operator's hand can be partially inserted into the gripping groove 211 to grip the door 10. In one embodiment, the gripping groove 211 further includes an insertion groove R and a gripping flange P so that the operator's fingers can easily insert and grip it. In one embodiment, the dimensions and specifications of the gripping groove 211 conform to the SEMI Human Factors standard so that even an average operator can easily and efficiently grip the door 10. In one embodiment, the finger joint receiving height KH of the gripping groove 211 is at least 28 mm, the finger gripping length L is at least 18 mm, and the finger receiving height FH is at least 22 mm. In one embodiment, the gripping section 210 is a gripping handle 212, as shown in Figure 7(b), for example, and the operator's hand can directly grasp the gripping handle 212 to grasp the door body 10. In one embodiment, the gripping handle 212 includes a gripping bar T and a connecting bar C so that the operator's fingers can easily grasp the gripping handle 212. In one embodiment, the dimensions and specifications of the gripping handle 212 all conform to the SEMI Human Factors standard, and the finger-accommodating width W is at least 91 mm. It should be noted that the gripping and grasping operations described in each of the above embodiments may be completed by the operator's hand, or by a holder such as a robot arm or automated machine, but are not limited to the operations performed by the operator's hand as an example.

[0043] As a result, the combination of the latch device and the operation instruction member provided on the door of the semiconductor container according to the present invention allows for intuitive and clear confirmation of whether the door is locked to the container body at any time during opening and closing of the door and locking and unlocking of the latch device, thereby preventing accidental application of force to the door, or the door from detaching, falling, and being damaged. The provision of the latch device and its lock / unlock position limiting member also prevents damage to the door or the latch device on it due to excessive operating stroke while the door is locked and fixed, due to positional restriction by the lock / unlock position limiting member. Furthermore, the provision of a gripping portion on the door also prevents damage to the door or the fixing mechanism such as the latch device due to excessive force concentration on the door or the latch device on it when external force is applied to the gripping portion. Thus, the latch device, operation instruction member, etc. provided on the door according to the present invention have the effect of protecting the door from damage and extending its service life.

[0044] Although the present invention has been disclosed by the above embodiments, those skilled in the art should understand that these embodiments are merely illustrative and should not be construed as limiting the scope of the invention. In particular, all modifications, substitutions, and combinations equivalent to those in these embodiments are all included within the scope of the invention. Therefore, the scope of protection of the invention is limited by the claims, which should be interpreted in the broadest sense to include all modifications, combinations, similar configurations, and processes. [Explanation of symbols]

[0045] 1. Semiconductor container 2 Protective device 10 Door Body 12 Door body 14 Sealing plate 142 Keyhole 144 openings 20 Container body 30 Latching device 31 Operating member 32 Latch member 33. Unlocking section 34 Locking mechanism 35. Lock release position limiting member 36 Lock position limiting member 40 Operation Indicator Member 100(a) First state 100(b) Second state S Containment space 210 Grasping section 211 Gripping groove 212 Gripping Handle C Connection Bar FH Finger storage height H Cutout section KH (Knockback Height) of Finger Joints L Finger grip length P Gripping flange R Insertion groove T-gripping bar W Finger-holding width

Claims

1. A door body applicable to a semiconductor container, A latching device provided on the door body for locking or unlocking the door body relative to the semiconductor container, A door body, which includes an operation indicator member provided on the latching device for identifying the operating state.

2. The door body according to claim 1, wherein the operation instruction member enters a first state in response to a locking operation by the latch device and enters a second state in response to an unlocking operation.

3. The door body according to claim 2, wherein the operation instruction member has different colors for identifying the first state or the second state.

4. The door body according to claim 2, wherein the latch device includes a lock release position limiting member and a lock position limiting member, the latch device is in the first state when a locking operation is performed on the lock position limiting member, and the latch device is in the second state when a lock release operation is performed on the lock release position limiting member.

5. The latch device further includes an operating member, at least one latch member coupled to the operating member, and a lock release portion and a lock portion located on the operating member, wherein the operation of the operating member moves the latch member in a linear motion, and the lock release portion or the lock portion is driven synchronously so that the lock release portion moves in accordance with the lock release position limiting member to limit the lock release position, or the lock portion moves in accordance with the lock position limiting member to limit the lock position.

6. The door body according to claim 1, further comprising a door body and a sealing plate, wherein the latch device is provided within a dwelling space defined by the door body and the sealing plate, and the sealing plate has an opening for observing the operation instruction member.

7. The door body according to claim 1, further comprising at least two gripping portions arranged on both sides adjacent to the door body, wherein the gripping portions are for gripping the door body.

8. A door body applied to a semiconductor container and arranged to be coupled to the semiconductor container, A latching device provided on the door body for locking or unlocking the door body relative to the semiconductor container, The latch device is provided with an operation indicator member for identifying the operating state, A door body, each having at least two gripping portions positioned on both sides adjacent to the door body, for grasping the door body.

9. The door body according to claim 8, wherein the gripping portion is a gripping groove.

10. The door body according to claim 9, wherein the gripping groove includes an insertion recess and a gripping flange.

11. The door body according to claim 8, wherein the gripping portion is a gripping handle.

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