Fixed assembly and substrate carrier using the same

Abstract

The objective is to provide a fixed assembly and a substrate carrier using the same. [Solution] A fixing assembly applicable to a substrate carrier, the fixing assembly is used to fix a positioning member of the substrate carrier to a base. The fixing assembly comprises a sleeve member and a pin member, the sleeve member being used to be inserted into a fixing hole in the positioning member and a through hole in the base. The pin member is used to be wedge-fitted into the sleeve member, causing the sleeve member to deform and lock into the positioning member and the base.

Description

【Technical Field】 【0001】 (Cross - reference to Related Applications) This invention claims priority to U.S. Patent Application No. 63 / 727,043, filed on December 2, 2024, titled "FIXING ASSEMBLY AND SUBSTRATE CARRIER USING THE SAME". The content of the said U.S. application is incorporated herein by reference and constitutes a part of this specification. 【0002】 The present invention relates to a fixing assembly, and particularly to a fixing assembly used in the semiconductor field and a substrate carrier using the same. 【Background Art】 【0003】 In industries related to semiconductor manufacturing, various substrates are widely used at all stages of the manufacturing process and are utilized to smoothly progress various semiconductor manufacturing processes. Regardless of whether it is the initial, intermediate, or late stage of the manufacturing process, substrates usually need to be transferred from one work station to another. In this process of transportation and transfer, in order to prevent the substrates from colliding and being exposed to contamination by the external environment, it is known in the industry to store the substrates using substrate carriers. 【0004】 Known substrate carriers include a carrier body and a base, and the base is fixed to the outer shell of the carrier body. The substrate carrier can receive support from an external device through the base and plays a role in assisting positioning between each work station. In existing application examples, a plurality of mechanical coupling (Kinematic Coupling, KC) elements, such as V - shaped KC grooves, are provided on the base to achieve precise positioning. 【0005】 As an example, a substrate carrier is used to support a wafer. According to the standards of the Semiconductor Manufacturing Equipment and Materials International (SEMI), three KC elements must be installed on the base of the substrate carrier. When the substrate carrier is placed in the wafer load port equipment, the three KC elements are coupled in correspondence with three KC positioning pins provided on the load port equipment side, enabling high-precision positioning of the carrier. However, KC elements (e.g., KC grooves) are prone to wear and damage from repeated use over long periods, leading to a decrease in positioning accuracy and requiring replacement. Therefore, KC elements are classified as consumable parts. 【0006】 In known technical configurations, the KC element is molded integrally with the base. Therefore, when replacing the KC element, the entire base must also be replaced, resulting in a significant increase in maintenance costs. 【0007】 In other known technical configurations, the KC elements are configured as independent parts and assembled and fixed to the base with screws. However, this screw-fixing method has the following drawbacks: (A) Assembly is complicated and time-consuming and requires additional tools such as screwdrivers. (B) The screws tend to loosen, causing the KC elements to become unstable and negatively impacting the overall assembly yield. (C) Metal screws increase the overall weight of the carrier, which is detrimental to transport and automated operation. 【0008】 Therefore, providing an improved fixing assembly and substrate carrier using the same, which simplifies the assembly process of KC elements, improves fixing stability, and reduces maintenance costs, is one of the most pressing issues in this field. [Overview of the project] [Problems that the invention aims to solve] 【0009】 The present invention has been made in view of the above circumstances, and provides a fixed assembly and a substrate carrier using the same. The fixed assembly comprises a sleeve member and a pin member, the pin member being wedge-fitted into the sleeve member, thereby deforming the sleeve member and locking it with the positioning member and base portion of the substrate carrier. This fixed assembly simplifies the assembly process without the use of screws or additional tools, contributing to improved efficiency in the semiconductor manufacturing process. [Means for solving the problem] 【0010】 In one aspect of the present invention, a fixing assembly applicable to a substrate carrier is proposed. The fixing assembly is used to fix a positioning member of the substrate carrier to a base. The fixing assembly comprises a sleeve member and a pin member, the sleeve member being inserted into a fixing hole in the positioning member and a through hole in the base, and the pin member being wedge-fitted into the sleeve member, thereby deforming the sleeve member and locking it with the positioning member and the base. 【0011】 In one embodiment, the sleeve member comprises a head portion and a hollow cylindrical portion connected to the head portion, the head portion having a larger diameter than the hollow cylindrical portion, the hollow cylindrical portion being used for insertion into a fixing hole and a through hole, and the head portion contacting a positioning member when the hollow cylindrical portion is inserted to a predetermined position. 【0012】 In another embodiment, the pin member comprises a pin head and a pin shaft connected to the pin head, the pin head being used for fitting and fixing to the head portion, and the pin shaft being wedge-fitted into the hollow cylindrical portion, thereby deforming the hollow cylindrical portion by pushing it outwards from the inside, creating a space large enough to accommodate the pin shaft, and is used for locking the sleeve member to the positioning member and the base portion. 【0013】 In another aspect of the present invention, a substrate carrier is proposed comprising a housing, a base, a positioning member, and a fixing assembly. The housing has a bottom, the base is detachably assembled to the bottom, and the base has through holes. The positioning member is used to be installed on the base and has fixing holes communicating with a portion of the through holes. The fixing assembly is used to fix the positioning member to the base. The fixing assembly comprises a sleeve member and a pin member, the sleeve member being inserted into the fixing holes and the through holes, and the pin member being wedge-fitted into the sleeve member, thereby deforming the sleeve member and locking it with the positioning member and the base of the substrate carrier. 【0014】 In one embodiment, the sleeve member comprises a head portion and a hollow cylindrical portion connected to the head portion, the head portion having a larger diameter than the hollow cylindrical portion, and the hollow cylindrical portion being used for insertion into a fixing hole and a through hole; the pin member comprises a pin head portion and a pin shaft portion connected to the pin head portion, the pin head portion being used for fitting and fixing to the head portion, and the pin shaft portion being wedge-fitted into the hollow cylindrical portion, thereby pushing and deforming the hollow cylindrical portion from the inside to the outside, creating a space that can sufficiently accommodate the pin shaft portion, and thereby being configured to lock with the positioning member and the base portion. 【0015】 In another embodiment, the positioning member is composed of a grooved member and is used to position the substrate carrier on the external device by engaging with a positioning pin of the external device. 【0016】 In another embodiment, the base portion is provided with a first flange, and the bottom portion of the housing is provided with a second flange for fitting with the first flange, thereby locking the base portion and the housing together. 【0017】 In yet another embodiment, the first flange comprises a first section and a second section that are separated from each other. 【0018】 In another embodiment, a locking arm is provided on the base portion, and a stud for locking the locking arm is provided on the bottom of the housing. 【0019】 In yet another embodiment, a locking hole is provided in the locking arm, an inclined surface is formed on the stud, the locking arm slides along the inclined surface, and when the stud is inserted into the locking hole, the locking arm is locked to the stud. 【Advantages of the Invention】 【0020】 In the fixing assembly according to the embodiment of the present invention and the substrate carrier using the same, the pin member in the fixing assembly is wedge-fitted into the sleeve member, so that the sleeve member is deformed and locked to the positioning member and the base portion. As a result, the assembly operation can be simplified without using screws or additional tools, and the assembly efficiency can be improved. Overall, it contributes to the improvement of the efficiency of the semiconductor manufacturing process. Further, by not using screws, the generation of fine particles that may occur during screw fastening can be suppressed, which also contributes to the improvement of the cleanliness of the entire substrate carrier. 【0021】 To make the above features, other features, advantages and embodiments of the present invention clearer and easier to understand, the accompanying drawings will be described below. 【Brief Description of the Drawings】 【0022】 [Figure 1] It is a perspective view of a substrate carrier before assembly according to an embodiment of the present invention. [Figure 2] It is a perspective view of the substrate carrier after assembly. [Figure 3a] It is a perspective view of the sleeve member and the pin member. [Figure 3b] It is a perspective view of the sleeve member and the pin member after assembly. [Figure 4a] It is a schematic view of the base portion and the positioning member. [Figure 4b] It is a schematic view showing a configuration in which the sleeve member 〖152〗 is added to the state where the components shown in Fig. 4a are assembled. [Figure 4c] It is a schematic diagram showing a configuration in which a pin member is added to the state where the components shown in FIG. 4b are assembled. [Figure 4d] It is a schematic diagram showing the state after the components shown in FIG. 4c are assembled. [Figure 5] It is a schematic diagram of the housing and the base portion shown in FIG. 1. [Figure 6a] It is a schematic diagram showing the state before the base portion and the housing are fitted together. [Figure 6b] It is a schematic diagram showing the state where the base portion and the housing are fitted together. [Figure 6c] It is a schematic diagram showing the state after the base portion has moved a predetermined distance with respect to the housing. [Figure 6d] It is a schematic diagram showing the state after the base portion has moved a further predetermined distance with respect to the housing. [Figure 6e] It is a schematic diagram showing the state where the base portion and the housing are mutually locked. 【Mode for Carrying Out the Invention】 【0023】 Hereinafter, the technical content of the present invention will be described in detail. In the description, reference will be made to the accompanying drawings. The content described in the embodiments is merely an example of the present invention and does not limit the present invention. In fact, the present invention can be implemented in various modes, and the technical scope of the present invention should not be construed as being limited to these embodiments. The description of these embodiments is for the purpose of enabling a clearer and more complete understanding of the technical features of the present invention and for fully disclosing it so that those skilled in the art can implement the present invention. In the detailed description of the embodiments, the same reference numerals indicate the same or similar components. Also, in this specification, the singular forms "a", "one", "the foregoing", etc. are to be construed as including the plural forms as well, unless there is a specific description in the context. Further, as used in this specification, the terms "comprising", "including", "having" do not exclude the presence or addition of other features, steps, components, parts and / or groups, etc. 【0024】 Please refer to Figures 1 to 3b. Figure 1 is a perspective view of a substrate carrier according to one embodiment of the present invention before assembly. Figure 2 is a perspective view of the substrate carrier after assembly. Figure 3a is a perspective view of the sleeve member and pin member. Figure 3b is a perspective view of the sleeve member and pin member after assembly. The substrate carrier 100 according to an embodiment of the present invention comprises a housing 170, a base portion 110, a positioning member 130, and a fixing assembly 140. The housing 170 has a bottom portion 179, and the base portion 110 is detachably assembled to the bottom portion 179. The base portion 110 is provided with a through hole 110a, and the positioning member 130 is used to be installed on the base portion 110 and has a fixing hole 130a that communicates with a part of the through hole 110a. The number of fixing holes 130a and through holes 110a is one or more, and regardless of whether the number of the two is the same or not, as long as the fixing holes 130a communicate with at least a part of the through holes 110a, it is included in the technical scope of the present invention. The fixing assembly 140 is used to fix the positioning member 130 to the base portion 110. The fixing assembly 140 comprises a sleeve member 152 and a pin member 151. The sleeve member 152 is inserted into the fixing hole 130a and the through hole 110a, and the pin member 151 is wedge-fitted into the sleeve member 152, causing the sleeve member 152 to deform and lock into the positioning member 130 and the base portion 110. 【0025】 In this embodiment, the sleeve member 152 comprises a head portion 154 and a hollow cylindrical portion 156 connected to the head portion 154. The head portion 154 has a larger diameter than the hollow cylindrical portion 156, and the hollow cylindrical portion 156 is used to be inserted into the fixing hole 130a and the through hole 110a. When the hollow cylindrical portion 156 is inserted to a predetermined position, the head portion 154 abuts against the positioning member 130. The pin member 151 in this embodiment comprises a pin head 153 and a pin shaft portion 155 connected to the pin head 153. The pin head 153 is used to be fitted and fixed to the head portion 154, and the pin shaft portion 155 is wedge-fitted into the hollow cylindrical portion 156, thereby pushing and deforming the hollow cylindrical portion 156 from the inside to the outside, creating a space that can sufficiently accommodate the pin shaft portion 155. The sleeve member 152 is used to be locked to the positioning member 130 and the base portion 110. In this way, the fixed assembly 140 according to this embodiment is configured as a push-lock mechanism 150 that is locked by pressing. 【0026】 Furthermore, the pin member 151 is equipped with a locking claw 157, and the sleeve member 152 is equipped with a locking hole 158. The pin member 151 is configured to be inserted into the sleeve member 152 along the axial direction A. When the pin member 151 is wedge-fitted to a predetermined position, the locking claw 157 engages with the locking hole 158, thereby fitting and fixing the pin head 153 to the head portion 154. At this time, the pin shaft portion 155, which is wedge-fitted into the hollow cylindrical portion 156, pushes the hollow cylindrical portion 156 outward from the inside along the radial direction r. As a result, the hollow cylindrical portion 156 expands outward and engages with the through hole 110a and the fixing hole 130a. 【0027】 Next, the structure in which the sleeve member 152 is locked to the positioning member 130 and the base portion 110 will be described in detail with reference to Figures 4a to 4d. Figure 4a is a schematic diagram of the base portion 110 and the positioning member 130, Figure 4b is a schematic diagram showing the configuration with the sleeve member added to the assembled components shown in Figure 4a, Figure 4c is a schematic diagram showing the configuration with the pin member added to the assembled components shown in Figure 4b, and Figure 4d is a schematic diagram showing the state after the components of Figure 4c have been assembled. 【0028】 During assembly, as shown in Figure 4a, the base portion 110 is provided with a housing space 110b corresponding to the positioning member 130, and this housing space 110b is for housing the positioning member 130. During assembly, the positioning member 130 is aligned with the housing space 110b and moved downward to be inserted into the housing space 110b. 【0029】 As shown in Figure 4b, after the positioning member 130 is inserted into the housing space 110b, the through hole 110a on the base portion 110 is aligned with the fixing hole 130a of the positioning member 130. This allows the hollow cylindrical portion 156 of the sleeve member 152 to pass through both holes. When the sleeve member 152 is inserted downward and reaches a predetermined position after passing through the fixing hole 130a and the through hole 110a, the head portion 154 of the sleeve member 152 has a larger diameter than the hollow cylindrical portion 156, so the head portion 154 comes into contact with the surface of the positioning member 130. 【0030】 As shown in Figure 4c, when the sleeve member 152 is inserted to a predetermined position, the base portion 110, the positioning member 130, and the head portion 154 of the sleeve member 152 are stacked in that order. Next, the pin member 151 is inserted into the sleeve member 152. When the pin member 151 is inserted to a predetermined position, the pin head 153 is fitted and fixed to the head portion 154. In this embodiment, for example, the locking claw 157 provided on the pin member 151 engages with the locking hole 158 of the sleeve member 152, thereby fitting and fixing the pin head 153 to the head portion 154. 【0031】 As shown in Figure 4d, after the pin member 151 is wedge-fitted into the sleeve member 152, the pin shaft portion 155 is wedge-fitted into the inside of the hollow cylindrical portion 156 and is pushed outwards from the inside, deforming the hollow cylindrical portion 156 so that it can fully accommodate the pin shaft portion 155. The technical configuration in this embodiment is such that the hollow cylindrical portion 156 is expanded outwards to make it tightly fit into the fixing hole 130a and the through hole 110a, and is locked with the positioning member 130 and the base portion 110. With this locking structure, the fixing assembly 140 is configured as a push-lock mechanism 150 that is locked by pressing, and a locking effect can be obtained by a simple pressing operation. 【0032】 In this embodiment, the positioning member 130 is composed of, for example, a grooved member, and after the positioning member 130 is fixed to the base portion 110, it is possible to position the substrate carrier 100 on the external device by engaging with a positioning pin provided on the external device. For example, when a wafer is placed on the substrate carrier 100, the external device may be a wafer load port device equipped with a door opening and closing mechanism. The technical configuration of the external device and its positioning pin is not particularly limited in this invention. Furthermore, the fixed assembly 140 and the substrate carrier 100 using the present invention are not limited to wafer load port devices but are also applicable to other external devices that require relative positioning of the substrate carrier 100 with the positioning member 130. 【0033】 The fixed assembly and substrate carrier using the same according to the embodiment of the present invention employ a configuration in which a pin member is wedge-fitted into a sleeve member, enabling the fixed assembly to easily, quickly, and reliably fix the positioning member to the base. Since fastening with screws is not required and no additional tools are needed, the assembly process is simplified and assembly efficiency is improved, contributing to improved efficiency of the entire semiconductor manufacturing process. Furthermore, by not using screws, the generation of fine particles that occur during fastening can be suppressed, contributing to improved cleanliness of the substrate carrier. 【0034】 Please continue to refer to Figure 1. As mentioned above, the substrate carrier 100 according to this embodiment is configured to include a housing 170. Below, the technical configuration for locking the base portion 110 and the housing 170 in an embodiment of the present invention will be described. Please refer to Figures 5 and 6a to 6e. Figure 5 is a schematic diagram of the housing and base portion shown in Figure 1, Figure 6a is a schematic diagram showing the state before the base portion and housing are fitted together, Figure 6b is a schematic diagram showing the state after the base portion and housing are fitted together, Figure 6c is a schematic diagram showing the state after the base portion has moved a predetermined distance relative to the housing, Figure 6d is a schematic diagram showing the state after the base portion has moved another predetermined distance relative to the housing, and Figure 6e is a schematic diagram showing the state in which the base portion and housing are locked together. 【0035】 Referring to Figures 5 and 6a, the base portion 110 according to this embodiment is provided with a first flange 111, and the bottom portion 179 of the housing 170 is provided with a second flange 171 for fitting with the first flange 111, thereby locking the base portion 110 and the housing 170 together. Furthermore, the base portion 110 is provided with a locking arm 117, and the bottom portion 179 of the housing 170 is provided with a protruding column 177 for locking the locking arm 117. The locking arm 117 is provided with a locking hole 117a, and the protruding column 177 has an inclined surface 177a. The locking arm 117 slides along the inclined surface 177a, and the protruding column 177 is fitted into the locking hole 117a, thereby locking the locking arm 117 to the protruding column 177. 【0036】 Refer to Figure 6a. When locking the base portion 110 to the housing 170, first roughly align the base portion 110 with the housing 170 so that the first flange 111 is positioned near the second flange 171. Then, move the base portion 110 towards the housing 170 until at least one of the first flange 111 and the second flange 171 contacts the surface of the housing 170 or the base portion 110. In this embodiment, the second flange 171 contacts the surface of the base portion 110 (see Figure 6b). 【0037】 As shown in Figure 6b, after the base portion 110 makes contact with the housing 170, it is necessary to move the base portion 110 along the surface of the housing 170 in the locking direction L. 【0038】 As shown in Figure 6c, when the base portion 110 moves a predetermined distance in the locking direction L, the locking arm 117 comes into contact with the inclined surface 177a of the protruding column 177. The movement of the base portion 110 continues thereafter. 【0039】 As shown in Figure 6d, when the base portion 110 moves further in the locking direction L along the surface of the housing 170, the locking arm 117 slides along the inclined surface 177a and is pushed up by the protruding column 177. The movement of the base portion 110 continues in this state. 【0040】 As shown in Figure 6e, the base portion 110 moves further in the locking direction L along the surface of the housing 170, continuing to move so that the protruding column 177 is fitted into the locking hole 117a of the locking arm 117. At this time, the locking arm 117 locks the protruding column 177, and simultaneously the second flange 171 is inserted into the first flange 111, and the two are fitted together. In this way, the base portion 110 and the housing 170 can be locked together simply, quickly, and reliably. 【0041】 On the other hand, when removing the base portion 110, the locking arm 117 is operated to detach the protruding column 177 from the locking hole 117a, and the base portion 110 is moved in the opposite direction to the aforementioned locking direction L, thereby making it possible to easily remove the base portion 110 from the housing 170. 【0042】 In an embodiment of the present invention, the first flange 111 provided on the base portion 110 comprises a first section 111(1) and a second section 111(2) that are separated from each other, and these are arranged on opposite sides of the locking arm 117, respectively. As shown in Figure 6e, the first flange 111 on the left side of the figure is the first section 111(1), and the first flange 111 on the right side is the second section 111(2). This multi-section configuration of the first flange 111 improves the stability of the locking structure between the base portion 110 and the housing 170. As a corresponding structure, the housing 170 is also provided with a second flange 171 consisting of two sections, each configured to fit with the first flange 111 of the first section 111(1) and the second section 111(2). However, the embodiments of the present invention are not limited to this, and the first flange 111 and the second flange 171 may each include three or more sections, and by correspondingly fitting them together, even higher fitting stability can be achieved. Furthermore, the shape and structure of the first flange 111 and the second flange 171 are not limited to those shown in Figures 5 and 6a to 6e, and the present invention is applicable as long as the mechanical configuration allows for mutual engagement or fitting. 【0043】 In another aspect of the present invention, a fixed assembly is proposed. In one embodiment, the fixed assembly is applied to a substrate carrier and is used to fix a positioning member of the substrate carrier to the base portion of the substrate carrier. The fixed assembly comprises a sleeve member and a pin member. The sleeve member is used to be inserted into the fixing hole of the positioning member and a through hole on the base portion. The pin member is used to be wedge-fitted into the sleeve member, causing the sleeve member to deform and lock into the positioning member and the base portion. The technical details of the fixed assembly according to this embodiment are the same as those of the fixed assembly 140 described in the aforementioned substrate carrier 100 (see Figures 1 to 6e), so a detailed explanation is omitted here. 【0044】 In the fixed assembly and substrate carrier using the same according to an embodiment of the present invention, the pin member of the fixed assembly is wedge-fitted into the sleeve member, causing the sleeve member to deform and lock into the positioning member and the base. The advantage of this configuration is that the positioning member can be fixed to the base without using screws or additional tools, thus simplifying the assembly process and improving assembly efficiency, and contributing to an overall improvement in the efficiency of the semiconductor manufacturing process. Furthermore, by not using screws, the generation of fine particles during screw fastening can be suppressed, contributing to an improvement in the cleanliness of the entire substrate carrier. [Explanation of Symbols] 【0045】 100 substrate carriers 110 Base section 110a through hole 110b Containment space 111 First flange 111(1) Section 1 111(2) Section 2 117 Locking arm 117a Locking hole 130 Positioning member 130a fixing hole 140 Fixed Assembly 150 Push-lock mechanism 151 Pin component 152 Sleeve component 153 Pin head 154 Head section 155 Pin shaft 156 Hollow cylindrical section 157 Locking claw 158 Locking hole 170 cabinets 171 Second flange 177 Pillar 177a Slope 179 Bottom A-axis L Locking direction r radial direction

Claims

[Claim 1] Applicable to a substrate carrier, and used to fix the positioning member of the substrate carrier to the base portion of the substrate carrier. A sleeve member for insertion into the fixing hole of the positioning member and the through hole on the base portion, The pin member is wedge-fitted into the sleeve member, causing the sleeve member to deform and the pin member to engage with the positioning member and the base portion. A fixed assembly comprising: [Claim 2] The fixing assembly according to claim 1, wherein the sleeve member comprises a head portion and a hollow cylindrical portion connected to the head portion, the head portion having a larger diameter than the hollow cylindrical portion, the hollow cylindrical portion being used for insertion into the fixing hole and the through hole, and the head portion contacting the positioning member when the hollow cylindrical portion is inserted to a predetermined position. [Claim 3] The fixing assembly according to claim 2, wherein the pin member comprises a pin head and a pin shaft connected to the pin head, the pin head is used for fitting and fixing with the head, and the pin shaft is wedge-fitted into the hollow cylindrical portion, thereby pushing and deforming the hollow cylindrical portion from the inside out, creating a space that can adequately accommodate the pin shaft, and the sleeve member is used for locking with the positioning member and the base portion. [Claim 4] A housing having a bottom, A base portion having a through hole is detachably assembled to the bottom, A positioning member used for installation on the base portion, having a fixing hole that communicates with a part of the through hole, A fixing assembly is used to fix the positioning member to the base portion, comprising a sleeve member and a pin member, wherein the sleeve member is inserted into the fixing hole and the through hole, and the pin member is wedge-fitted into the sleeve member, causing the sleeve member to deform and lock into the positioning member and the base portion. A substrate carrier equipped with the following features. [Claim 5] The substrate carrier according to claim 4, wherein the sleeve member comprises a head portion and a hollow cylindrical portion connected to the head portion, the head portion having a larger diameter than the hollow cylindrical portion, and the hollow cylindrical portion being used for insertion into the fixing hole and the through hole; the pin member comprises a pin head portion and a pin shaft portion connected to the pin head portion, the pin head portion being used for fitting and fixing with the head portion, and the pin shaft portion being wedge-fitted into the hollow cylindrical portion, thereby pushing and deforming the hollow cylindrical portion from the inside out, creating a space that can sufficiently accommodate the pin shaft portion, and the sleeve member is used for locking with the positioning member and the base portion. [Claim 6] The substrate carrier according to claim 4, wherein the positioning member is composed of a grooved member and is used to position the substrate carrier on the external device by engaging with a positioning pin of the external device. [Claim 7] The substrate carrier according to claim 4, wherein the base portion is provided with a first flange, and the bottom portion of the housing is provided with a second flange for fitting with the first flange, thereby locking the base portion and the housing together. [Claim 8] The substrate carrier according to claim 7, wherein the first flange comprises a first section and a second section separated from each other. [Claim 9] The substrate carrier according to claim 4, wherein the base portion is provided with the locking arm, and the bottom portion of the housing is provided with a protruding column for locking the locking arm. [Claim 10] The substrate carrier according to claim 9, wherein the locking arm is provided with a locking hole, the protruding column has an inclined surface, the locking arm slides along the inclined surface, and the protruding column is fitted into the locking hole, thereby locking the locking arm to the protruding column.

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