Laser processing equipment, laser processing method

JP2026096287APending Publication Date: 2026-06-15SUMITOMO HEAVY IND LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
SUMITOMO HEAVY IND LTD
Filing Date
2024-12-03
Publication Date
2026-06-15

AI Technical Summary

⚠Technical Problem

Existing laser processing technologies face issues with incomplete equalization of energy distribution, leading to adverse effects on the annealing process due to residual intensity unevenness.

⚗Method used

A laser processing apparatus that irradiates a workpiece with multiple lasers having different two-dimensional energy density distributions multiple times, reducing irregularities through cumulative irradiation to achieve a uniform energy distribution.

🎯Benefits of technology

This approach allows for appropriate laser processing by effectively reducing energy density distribution irregularities, ensuring consistent and uniform treatment of the workpiece.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a laser processing device that can appropriately perform laser processing on an object to be processed. [Solution] A laser annealing apparatus 1 that performs annealing on a semiconductor wafer 3 by irradiating it with a laser L includes a laser overlap irradiation unit 311 that irradiates a common irradiation area IR on the semiconductor wafer 3 with multiple lasers L having different two-dimensional energy density distributions. The laser overlap irradiation unit 311 includes a laser overlap driving unit 3111 that drives the laser L in at least two directions intersecting the irradiation direction so that the first irradiation spot and the second irradiation spot overlap with a shift in the first direction, the second irradiation spot and the third irradiation spot overlap with a shift in the second direction intersecting the first direction, and the third irradiation spot and the first irradiation spot overlap with a shift in the third direction intersecting the first and second directions.
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