Liquid dispensing head, head module, liquid dispensing device

JP2026097487APending Publication Date: 2026-06-16RICOH CO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
RICOH CO LTD
Filing Date
2024-12-04
Publication Date
2026-06-16

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Abstract

The objective of this invention is to suppress deformation of the first substrate. [Solution] A liquid discharge head 101 comprising a nozzle substrate 10 having a plurality of nozzles 11, a flow path substrate 20 having a pressure chamber 21 communicating with the nozzles 11, a first substrate 60 having a common flow path 61 formed thereon, and a second substrate 70 joined to the first substrate 60 on the side opposite to the flow path substrate 20, wherein the first substrate 60 has a first high-rigidity portion and a first low-rigidity portion having lower rigidity than the first high-rigidity portion, and the second substrate 70 has a second high-rigidity portion and a second low-rigidity portion having lower rigidity than the second high-rigidity portion, the first high-rigidity portion being joined to the second low-rigidity portion and the first low-rigidity portion being joined to the second high-rigidity portion.
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Description

Technical Field

[0001] The present invention relates to a liquid ejection head, a head module, and a liquid ejection device.

Background Art

[0002] A liquid ejection head is formed by laminating a nozzle substrate (nozzle member) having a plurality of nozzles, a flow path substrate (pressure chamber member) in which a pressure chamber communicating with the nozzles is formed, a common flow path member (first substrate) in which a common flow path communicating with the pressure chamber is formed, a damper frame (second substrate) joined to the common flow path member with a damper member interposed therebetween, and the like.

[0003] In such a liquid ejection head, grooves or the like are formed in the members, so that the rigidity can vary depending on the location. For this reason, for example, when stress is applied to the members by heating during adhesion of these members and subsequent cooling, etc., large deformations such as warping occur in the portions with low rigidity.

[0004] For example, the piezoelectric element provided in the liquid ejection head of Patent Document 1 (Japanese Patent No. 4257842) is provided with a plurality of slits extending in the longitudinal direction in which the piezoelectric element is divided into a plurality of parts. In addition to the above slits, this piezoelectric element is provided with a plurality of slits intersecting the slits, suppressing warping in the longitudinal direction during joining of the piezoelectric element.

[0005] In addition to the deformation of the piezoelectric element as in Patent Document 1, there is a problem that deformation such as warping of the first substrate occurs when joining the common flow path member (first substrate) and the damper frame (second substrate) by the common flow path formed in the first substrate.

Summary of the Invention

Problems to be Solved by the Invention

[0006] An object of the present invention is to suppress deformation of the first substrate.

Means for Solving the Problems

[0007] To solve the above problems, the present invention provides a liquid discharge head comprising a nozzle member having a plurality of nozzles, a pressure chamber member having a pressure chamber communicating with the nozzles, a first substrate having a common flow path formed thereon, and a second substrate joined to the first substrate on the side opposite to the pressure chamber member, wherein the first substrate has a first high-rigidity portion and a first low-rigidity portion having lower rigidity than the first high-rigidity portion, and the second substrate has a second high-rigidity portion and a second low-rigidity portion having lower rigidity than the second high-rigidity portion, the first high-rigidity portion being joined to the second low-rigidity portion, and the first low-rigidity portion being joined to the second high-rigidity portion. [Effects of the Invention]

[0008] According to the present invention, deformation of the first substrate can be suppressed. [Brief explanation of the drawing]

[0009] [Figure 1] This is an exploded perspective view of a head module equipped with a liquid dispensing head according to one embodiment of the present invention. [Figure 2] Exploded perspective view of the head module as seen from the nozzle side. [Figure 3] This is a cross-sectional view of the head module shown above, along the shorter side of the head. [Figure 4] This is a cross-sectional view showing the configuration of the retaining substrate. [Figure 5] This is a plan view showing the nozzle-side surface of the first substrate. [Figure 6] This is a plan view showing the side of the second substrate facing the first substrate, which differs from the embodiment of the present invention. [Figure 7] (a) Figure is a diagram corresponding to the A-A' cross-section in Figure 5, showing the second substrate in Figure 6 and the first substrate having the same configuration as the embodiment in Figure 7 joined together, and (b) Figure is a diagram showing the ink ejection speed Vj from each nozzle. [Figure 8] This is a plan view showing the frame member side of the second substrate according to an embodiment of the present invention. [Figure 9]This diagram shows the protrusions on the first substrate, which form the pseudo-channels of the second substrate, superimposed in the actual stacking direction of the liquid discharge head. [Figure 10] (a) Figure is a diagram corresponding to the B-B' cross-section in Figure 8 showing the state in which the first substrate and the second substrate are joined together according to one embodiment of the present invention, and (b) Figure is a diagram showing the ink ejection speed Vj from each nozzle. [Figure 11] This is a cross-sectional view showing the depth of the common channel in the first substrate and the depth of the pseudo-channel in the second substrate. [Figure 12] This is a schematic diagram showing a liquid dispensing device according to one embodiment of the present invention. [Figure 13] Figure 12 is a plan view of the liquid dispensing device. [Figure 14] This is a plan view of a main part showing another example of the liquid dispensing device of the present invention. [Figure 15] Figure 14 is a side view of the main part of the liquid dispensing device. [Figure 16] This is a plan view showing a liquid dispensing unit according to one embodiment of the present invention. [Figure 17] Figure 16 is a front view of the liquid dispensing unit. [Modes for carrying out the invention]

[0010] Embodiments of the present invention will be described below with reference to the drawings. In each figure, the same or corresponding parts are denoted by the same reference numerals, and redundant explanations will be simplified or omitted as appropriate.

[0011] Other examples of the liquid discharge head of the present invention and a head module equipped with this liquid discharge head will be described with reference to Figures 1 to 3. Figure 1 is an exploded perspective view of a head module according to one embodiment, Figure 2 is an exploded perspective view of the head module viewed from the nozzle side, and Figure 3 is a cross-sectional view of the head module along the short side of the head.

[0012] As shown in FIGS. 1 and 2, the head module 100 includes a plurality of heads 101 which are liquid ejection heads for ejecting liquid, a base member 102, a cover member 103, a manifold 105, a printed circuit board (PCB) 106, and a module case 107.

[0013] As shown in FIG. 3, the head 101 includes a nozzle substrate 10 as a nozzle member, a flow path substrate 20 as a pressure chamber member, a diaphragm 30, a holding substrate 50, a frame member 80, and the like. The head 101 is an example of the liquid ejection head of the present embodiment.

[0014] The nozzle substrate 10 has a plurality of nozzles 11 formed thereon. The flow path substrate 20 has pressure chambers 21 and the like formed therein that communicate with the nozzles 11. The pressure chamber 21 may also be referred to as an individual liquid chamber or the like. The diaphragm 30 forms a part of the pressure chamber 21 and vibrates by a piezoelectric element 40. The holding substrate 50 is laminated on the diaphragm 30. The frame member 80 is laminated on the holding substrate 50.

[0015] The flow path substrate 20, together with the pressure chamber 21, forms a supply-side individual flow path 22 that communicates with the pressure chamber 21 and a recovery-side individual flow path 24 that communicates with the pressure chamber 21. The flow path substrate 20 may also be referred to as an individual flow path board or the like.

[0016] The supply port 81 communicates with the supply-side common flow path on the holding substrate 50 side through the flow path 151 of the manifold 105. Also, the recovery port 82 communicates with the recovery-side common flow path on the holding substrate 50 side through the flow path 〔52 of the manifold 105.

[0017] The printed circuit board 106 and the piezoelectric element 40 of the head 101 are connected via a flexible wiring member 90, and a driver IC 91 (drive circuit) is mounted on the flexible wiring member 90 (see FIG. 2).

[0018] In this embodiment, as shown in Figures 1 and 2, multiple heads 101 are attached to a base member 102 at intervals. The heads 101 are attached to the base member 102 by inserting them into openings provided in the base member 102 and joining and fixing the peripheral edge of the nozzle substrate 10 of the head 101 to a cover member 103 which is joined and fixed to the base member 102. In addition, the flange portion 80a provided on the outside of the frame member 80 of the head 101 is joined and fixed to the base member 102.

[0019] The fixing structure for the head 101 and the base member 102 is not limited to adhesive, crimping, screw fixing, etc.

[0020] Here, it is preferable that the base member 102 is made of a material with a low coefficient of thermal expansion. For example, 42 alloy, which is iron with added nickel, or Invar material can be used. In this embodiment, Invar material is used. As a result, even if the head 101 generates heat and the temperature of the base member 102 rises, the amount of expansion of the base member 102 is small, so the nozzle is less likely to shift from the predetermined nozzle position, and the deviation of the impact position can be suppressed.

[0021] The nozzle substrate 10, the flow channel substrate 20, and the diaphragm 30 are formed from a silicon single crystal substrate, and the coefficient of linear expansion of the base member 102 is made approximately the same. This reduces nozzle displacement due to thermal expansion.

[0022] As shown in Figure 4, the holding substrate 50 is constructed by stacking a first substrate 60, a damper member 51, and a second substrate 70. The first substrate 60 has a supply channel, which will be described later. This common channel communicates with the pressure chamber 21 via a supply port and supplies ink as a liquid to the pressure chamber 21.

[0023] Each piezoelectric element 40 faces each pressure chamber 21 via a diaphragm 30. The piezoelectric element 40 is an electromechanical conversion element and a pressure generating means that deforms the diaphragm 30 to pressurize the ink in the pressure chamber 21. When the ink in each pressure chamber 21 is pressurized, ink is discharged from the nozzle 11 that communicates with the pressure chamber 21.

[0024] The damper member 51 is held between the first substrate 60 and the second substrate 70. A damper space 52 is formed by recesses formed in each of the first substrate 60 and the second substrate 70. The damper member 51 vibrates within the damper space 52, damping the vibrations in the liquid discharge head generated by the pressure of the piezoelectric element 40.

[0025] Figure 5 is a plan view showing the side of the damper member of the first substrate 60 (the upper side in Figure 4). Note that the recess that forms the damper chamber is omitted in Figure 5. In Figure 5, the left-right direction X is the longitudinal direction of the first substrate 60 and the second substrate. In Figure 5, the up-down direction Y is the short-side direction of the first substrate 60 and the second substrate. The direction perpendicular to the plane of the paper in Figure 5 (direction Z in Figure 4) is also the thickness direction of the first substrate 60 and the second substrate, or the stacking direction of these components, and the direction parallel to the liquid discharge direction from the nozzle. These longitudinal, short-side, and thickness directions are perpendicular to each other.

[0026] As shown in Figure 5, the first substrate 60 is provided with recesses that form a common channel 61. The common channel 61 extends in the longitudinal direction of the first substrate 60 and has a supply-side main channel 62 that leads to a supply port, a plurality of supply-side branch channels 63 that branch off from the supply-side main channel 62, a recovery-side main channel 54 that leads to a recovery port, and a plurality of recovery-side branch channels 65 that branch off from the recovery-side main channel 54. Each supply-side branch channel 63 is provided with a plurality of supply ports 66 that communicate with each pressure chamber. Each recovery-side branch channel 65 is provided with a plurality of recovery ports 67 that communicate with each pressure chamber. In other words, the wall portion 68 in Figure 5 and the outer periphery of the first substrate 60 that separate each channel portion are convex portions of the first substrate 60, and the other portions, especially the common channel 61 portion, are concave portions. The first substrate 60 has an uneven shape consisting of these convex and concave portions.

[0027] Each supply-side branch 63 and recovery-side branch 65 extends from the lower left to the upper right of Figure 5 and is inclined with respect to the long and short sides of the first substrate 60. Therefore, on a plane perpendicular to the thickness direction of the first substrate 60, the rigidity of the first substrate 60 is relatively lower in the upper left and lower right areas of Figure 5. For example, if the first substrate 60 is divided into two parts along its long and short sides on the plane of Figure 5, and then divided into four regions horizontally and vertically, the rigidity of the upper left and lower right areas of the first substrate 60 will be lower compared to the rigidity of the lower left and upper right areas.

[0028] Figure 6 is a plan view showing the frame member side (upper side in Figure 4) of the second substrate 700, which differs from the embodiment described above. Figure 7(a) is a view corresponding to the A-A' cross section in Figure 5, showing the deformation that occurs on the longitudinal ends of these members when the second substrate 700 and the first substrate 60, which has the same configuration as in this embodiment, are joined together. Figure 7(b) is a diagram showing the ink ejection speed Vj from each nozzle. The left-right direction in Figure 7 is the nozzle arrangement direction or the longitudinal direction of the first and second substrates, and Figure 7(b) displays the values ​​of the ejection speed Vj of each nozzle connected as a line graph.

[0029] As shown in Figure 6, the second substrate 700 has a flat central surface with no recesses. In other words, there is no significant variation in rigidity from location to location on the second substrate 700.

[0030] As shown in Figure 7(a), the first substrate 60, damper member, second substrate 700, and frame member 80 are stacked and joined in this order. As mentioned above, the first substrate 60 has a bias in its rigidity due to the inclination of the common flow path, whereas the second substrate 700 does not have a large variation in rigidity. Therefore, even in the state where the first substrate 60 and the second substrate 700 are stacked as shown in Figure 7(a), the overall rigidity is biased by the amount of the bias in the rigidity of the first substrate 60.

[0031] Here, for example, while the frame member 80 is formed from a polymer resin, the first substrate 60 and the second substrate 700 are formed from silicon substrates, resulting in a significant difference in their coefficients of thermal expansion. Therefore, when an adhesive is applied between these members and heated and cured, the difference in their coefficients of thermal expansion causes stress to be generated in each member during cooling after heating and curing. When such stress is generated, the imbalance in rigidity in the state in which the first substrate 60 and the second substrate 700 are stacked causes twisting in the first substrate 60 and the second substrate 700. In other words, as shown in Figure 7(a), the right side of the first substrate 60, which has lower rigidity, or in other words, the upper left and lower right portions in Figure 5, deforms by bending in the direction of the arrow in Figure 5. As a result, in this deformed portion, a problem arises in which the ink ejection speed Vj decreases, as shown on the right side of Figure 7(b).

[0032] Figure 8 is a plan view showing the frame member side of the second substrate 70 in this embodiment (the upper side in Figure 4). Note that in Figure 8, other recesses provided on the frame member side of the second substrate 70 are omitted from the description.

[0033] As shown in Figure 8, the second substrate 70 of this embodiment is provided with recesses on its surface that form pseudo-channels 71. The pseudo-channels 71 are formed on the side of the second substrate 70 opposite to the first substrate 60 side, which is the side shown in Figure 8. The pseudo-channels 71 are not intended to allow ink to flow, but are rigidity adjustment sections provided to adjust the rigidity of the second substrate 70 at different locations due to their recessed shape.

[0034] The pseudo-channel 71 has a first pseudo-main channel 72 extending in the longitudinal direction of the second substrate 70, a plurality of first pseudo-tributary channels 73 branching from the first pseudo-main channel 72, a second pseudo-main channel 74 extending in the longitudinal direction of the second substrate 70, and a plurality of second pseudo-tributary channels 75 branching from the second pseudo-main channel 74. The walls separating each pseudo-channel portion of the second substrate 70 are convex portions, while the other portions, particularly the pseudo-channel 71 portions, are concave portions. The second substrate 70 has an uneven shape consisting of these convex and concave portions.

[0035] Each of the first pseudo-tributary sections 73 and the second pseudo-tributary section 75 is inclined from the upper left to the lower right in Figure 8. In other words, by forming the pseudo-channels 71 in the second substrate 70, the rigidity of the second substrate 70 becomes relatively weaker in the lower left and upper right portions of Figure 8 on a plane perpendicular to the thickness direction of the second substrate 70.

[0036] Figure 9 shows the protrusions forming the pseudo-channels 71 of the second substrate 70, as shown in Figure 8, superimposed on the first substrate 60 of Figure 5 in the actual stacking direction of the liquid discharge head 101. As mentioned above, the pseudo-channels 71 are provided on the side opposite to the first substrate 60, and the surface of the first substrate 60 where the common channel 61 is formed is joined to the non-contiguous surface of the second substrate 70 where the pseudo-channels 71 are not formed. In Figure 9, the pseudo-channels 71 are shown as dotted lines for convenience, but in reality, in the view in the direction of Figure 9, the surface of the second substrate 70 where the pseudo-channels 71 are formed (the upper surface of the second substrate 70 in Figure 4) is positioned closer to the viewer than the surface of the first substrate 60 where the common channel 61 is formed (the upper surface of the first substrate 60 in Figure 4). The common channel 61 and the pseudo-channels 71 are recesses that do not penetrate the first substrate 60 and the second substrate 70 in their thickness direction, except for the supply and return ports of the common channel 61.

[0037] As shown in Figure 9, the branch portions 63 and 65 of the common channel 61 of the first substrate 60 (see Figure 5) are inclined from the lower left to the upper right in Figure 9, whereas the branch portions 73 and 75 of the pseudo-channel 71 (see Figure 8) are inclined from the lower right to the upper left in Figure 9, with the inclination directions being opposite. Therefore, as mentioned above, the rigidity of the upper left and lower right portions of the first substrate 60 in Figure 9 is low due to the common channel 61, while the rigidity of the lower left and upper right portions of the second substrate in Figure 9 is low due to the pseudo-channel 71, with the rigidity being reversed. By superimposing the two, the parts with high rigidity and parts with low rigidity can be superimposed, and the variation in rigidity at each position on a plane perpendicular to the thickness direction of the first substrate 60 can be reduced. In other words, pseudo-channels 71, which are rigidity adjustment parts, are formed on the second substrate 70 to adjust the rigidity at each location so that the variation in rigidity when the first substrate 60 and the second substrate 70 are superimposed is reduced.

[0038] Here, the first substrate 60 (or the second substrate 70) is divided at the longitudinal central position C1 and the short central position C2 of the first substrate 60 and the second substrate 70, and each is divided into four parts. That is, the first substrate 60 is divided into the upper left region 60A, the lower left region 60B, the upper right region 60C, and the lower right region 60D, and the second substrate 70 is divided into the upper left region 70A, the lower left region 70B, the upper right region 70C, and the lower right region 70D. In this case, in the first substrate 60, the lower left region 60B and the upper right region 60C are the first high-rigidity region with relatively high rigidity within the first substrate 60, and the upper left region 60A and the lower right region 60D are the first low-rigidity region with relatively low rigidity within the first substrate 60. Furthermore, in the second substrate 70, the lower left region 70B and the upper right region 70C are the second low-rigidity region, which has relatively low rigidity within the second substrate 70, while the upper left region 70A and the lower right region 70D are the second high-rigidity region, which has relatively high rigidity within the second substrate 70. In other words, in this embodiment, the first high-rigidity region of the first substrate 60 is superimposed on the low-rigidity region of the second substrate 70, and the first low-rigidity region of the first substrate 60 is superimposed on the high-rigidity region of the second substrate 70, and the two are joined together. This makes it possible to reduce the variation in rigidity at each position on a plane perpendicular to the thickness direction (on the plane in Figure 9) in the joined first substrate 60 and second substrate 70.

[0039] In this embodiment, the first high-rigidity region of the first substrate 60 is the first high-rigidity part, and the first high-rigidity region is the first low-rigidity part. The second high-rigidity region of the second substrate 70 is the second high-rigidity part, and the second high-rigidity region is the second low-rigidity part. In the present invention, by joining the first high-rigidity part and the second low-rigidity part, and the first low-rigidity part and the second high-rigidity part, in an overlapping state, variations in rigidity in the state of the holding substrate 50 in which the first substrate 60 and the second substrate 70 are joined can be reduced. This makes it possible to suppress deformation of the holding substrate 50 during heating and cooling during joining, in particular excessive deformation in certain areas. This makes it possible to suppress a decrease in the liquid discharge speed from the nozzle, in particular the liquid discharge speed of the nozzle on the longitudinal end side.

[0040] However, the first low-rigidity portion and the first high-rigidity portion, and the second low-rigidity portion and the second high-rigidity portion of the present invention do not necessarily have to be formed by the respective divided regions of the first substrate and the second substrate, as in the embodiments described above. Only a portion of the first substrate or the second substrate may be designated as the first low-rigidity portion, the second low-rigidity portion, etc. For example, the portion of the first substrate 60 in which the concave portion is formed, that is, the portion in which the common channel 61 is formed, may be designated as the first low-rigidity portion, and the other convex portion as the first high-rigidity portion. The concave portion of the second substrate 70, that is, the portion of the pseudo-channel 71, may be designated as the second low-rigidity portion, and the other convex portion of the second substrate may be designated as the second high-rigidity portion. Then, a portion of the first high-rigidity portion and a portion of the second low-rigidity portion, and a portion of the first low-rigidity portion and a portion of the second high-rigidity portion may be joined together in a state in which they overlap when viewed in the stacking direction, to form the holding substrate 50. This reduces variations in rigidity in the holding substrate 50 formed by joining the first substrate 60 and the second substrate 70, and suppresses deformation of the first substrate 60. In this embodiment, "small variation in rigidity in the state of the holding substrate 50 formed by joining the first substrate 60 and the second substrate 70" means that the holding substrate 50 formed by joining the first substrate 60 and the second substrate 70 has a small deviation in rigidity at each position on a plane perpendicular to its stacking direction, and in particular, the difference in rigidity between the position with maximum rigidity and the position with minimum rigidity is small. For example, as described above, by joining a region with high rigidity of the first substrate to a region with low rigidity of the second substrate, and a region with low rigidity of the first substrate to a region with high rigidity of the second substrate, it is possible to join the parts with high rigidity and parts with low rigidity on a region-by-region basis, thereby reducing variation in rigidity.

[0041] Furthermore, the thickness of part or all of the upper left region 70A and lower right region 70D of the second substrate 70, which are joined to the low-rigidity region of the first substrate 60, may be made greater than the thickness of the lower left region 70B and upper right region 70C. This makes it possible to further increase the rigidity of the second substrate 70 in the portion corresponding to the low-rigidity region of the first substrate 60, and to reduce variations in rigidity in the state of the holding substrate 50 when the first substrate 60 and the second substrate 70 are joined. Consequently, deformation of the first substrate 60 can be suppressed, and a decrease in the liquid discharge speed from the nozzle can be suppressed.

[0042] In particular, in this embodiment, in the view shown in Figure 9, that is, in the stacking direction view of the actual liquid discharge head, the pseudo-channel 71 formed on the second substrate 70 overlaps with the common channel 61 of the first substrate 60 when rotated 180 degrees around the longitudinal central position C1 as an axis. This configuration can reduce variations in rigidity, especially in the state of the holding substrate 50 to which the first substrate 60 and the second substrate 70 are joined, and can further suppress deformation of the first substrate 60. However, the overlap of the pseudo-channel 71 with the common channel 61 is not limited to cases where their shapes are exactly the same. For example, it may be the case when the main parts, such as the parts of each branch channel, overlap.

[0043] Figure 10(a) is a diagram corresponding to the B-B' cross-section in Figure 8, showing the state of deformation occurring on the longitudinal ends of these components when the first substrate 60 and the second substrate 70 of this embodiment are joined together. Figure 10(b) is a diagram showing the ink ejection speed Vj from each nozzle. The solid line in Figure 10(b) shows the ejection speed in this embodiment, and the dotted line shows the ejection speed in Figure 7(b) for comparison.

[0044] As shown by the solid line in Figure 10(a), by reducing the rigidity deviation, similar deformation occurs at both ends in the longitudinal direction for both the first substrate 60 and the second substrate 70. Therefore, as can be seen by comparing the solid and dotted lines in Figure 10(b), the configuration of this embodiment results in a smaller drop in the discharge speed Vj on the right side of Figure 10(b). In this way, the second substrate 70 of this embodiment can suppress partial excessive deformation of the first substrate 60 and suppress the drop in the discharge speed Vj.

[0045] In this embodiment, the pseudo-channel 71 is provided on the frame member side of the second substrate 70, opposite to the first substrate 60 side (the upper side in Figure 4). By providing the pseudo-channel 71 in such a way that the respective channels do not overlap when they are joined, the joining area between the first substrate 60 and the second substrate 70 (in this embodiment in particular the joining area with the damper member in between) can be increased, and a decrease in the joining strength between the two due to the formation of the pseudo-channel 71 can be prevented.

[0046] As shown in Figure 11, the damper member 51 has a damper-side common channel 53 that communicates with the common channel 61 of the first substrate 60 and together forms a common channel for ink. If the depth of the damper-side common channel 53 is D3, it is preferable that the recess depth D2 of the pseudo-channel 71 of the second substrate 70 be greater than the common channel depth, which is the sum of the recess depth D1 of the common channel 61 of the first substrate 60 and the depth D3 of the damper-side common channel 53. This effectively suppresses the rigidity deviation caused by the common channel 61 and the damper-side common channel 53. The recess depth D2 of the pseudo-channel 71 is the distance in the thickness direction from the convex wall portion 78 to the bottom surface of the concave pseudo-channel 71. The recess depth D1 of the common channel 61 is the distance in the thickness direction from the convex wall portion 68 to the bottom surface of the concave common channel 61.

[0047] In this embodiment, the first substrate 60 and the second substrate 70 are joined via a damper member 51. Thus, "the first substrate and the second substrate are joined" in this invention may also refer to a case where they are joined via another member, as in the above embodiment. Furthermore, the first substrate and the second substrate may be joined directly without the use of other members such as a damper member. In this case, it is preferable to make the recess depth D2 of the pseudo-flow channel 71 in Figure 11 larger than the recess depth D1 of the common flow channel 61. This effectively suppresses the rigidity deviation caused by the common flow channel 61.

[0048] Next, an example of a liquid dispensing device according to the present invention will be described with reference to Figures 12 and 13. Figure 12 is a schematic diagram of the device, and Figure 13 is a plan view of an example of the head unit of the device.

[0049] This liquid dispensing device, the printing device 500, includes a loading means 501 for loading the continuous body 510, a guiding and transporting means 503 for guiding and transporting the continuous body 510 loaded from the loading means 501 to the printing means 505, a printing means 505 for dispensing liquid onto the continuous body 510 to form an image, a drying means 507 for drying the continuous body 510, and an unloading means 509 for unloading the continuous body 510.

[0050] The continuous body 510 is fed out from the winding roller 511 of the loading means 501, guided and transported by the rollers of the loading means 501, the guiding and transporting means 503, the drying means 507, and the unloading means 509, and then wound up by the winding roller 591 of the unloading means 509.

[0051] In the printing means 505, the continuum 510 is transported on the transport guide member 559 facing the head unit 550, and an image is printed by the liquid discharged from the head unit 550.

[0052] Here, the head unit 550 is equipped with two head modules 100A and 100B according to the present invention on a common base member 552, as shown in Figure 13.

[0053] Then, when the direction in which the heads 101 are arranged perpendicular to the transport direction of the head module 100 (the direction of the arrow in Figure 13) is defined as the head array direction, the head rows 1A1 and 1A2 of head module 100A dispense liquid of the same color. Similarly, the head rows 1B1 and 1B2 of head module 100A are paired, the head rows 1C1 and 1C2 of head module 100B are paired, and the head rows 1D1 and 1D2 are paired, and the liquid of the required color is dispensed from each of them.

[0054] Next, another example of the liquid dispensing device according to the present invention will be described with reference to Figures 14 and 15. Figure 14 is a plan view illustrating the main part of the device, and Figure 15 is a side view illustrating the main part of the device.

[0055] This device is a serial type device, and the carriage 403 reciprocates in the main scanning direction (direction of the double arrows in Figure 14) by the main scanning movement mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, etc. The guide member 401 is stretched across the left and right side plates 491A and 491B and holds the carriage 403 in a movable position. The carriage 403 is then reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 stretched between the drive pulley 406 and the driven pulley 407.

[0056] The carriage 403 is equipped with a liquid discharge unit 440 that integrates a liquid discharge head 101 and a head tank 441 according to the present invention. The liquid discharge head 101 of the liquid discharge unit 440 discharges liquids of various colors, such as yellow (Y), cyan (C), magenta (M), and black (K). The liquid discharge head 101 is also mounted with a nozzle row consisting of multiple nozzles 11 arranged in a sub-scanning direction perpendicular to the main scanning direction, and with the discharge direction facing downward. For example, the above-described head 101 can be used as the liquid discharge head 101.

[0057] A supply mechanism 494 for supplying liquid stored outside the liquid discharge head 101 to the liquid discharge head 101 supplies the head tank 441 with liquid stored in the liquid cartridge 450.

[0058] The supply mechanism 494 consists of a cartridge holder 451, which is a filling section for mounting the liquid cartridge 450, a tube 456, a liquid delivery unit 452 including a liquid delivery pump, and the like. The liquid cartridge 450 is detachably mounted in the cartridge holder 451. Liquid is delivered from the liquid cartridge 450 to the head tank 441 via the tube 456 by the liquid delivery unit 452.

[0059] This device includes a transport mechanism 495 for transporting paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

[0060] The conveyor belt 412 attracts the paper 410 and transports it to a position opposite the liquid discharge head 101. This conveyor belt 412 is an endless belt and is stretched between the conveyor roller 413 and the tension roller 414. Attraction can be performed by electrostatic attraction or air suction.

[0061] Then, the conveyor belt 412 moves in a circular motion in the sub-scanning direction as the conveyor rollers 413 are rotationally driven by the sub-scanning motor 416 via the timing belt 417 and timing pulley 418.

[0062] Furthermore, a maintenance and recovery mechanism 420 for maintaining and recovering the liquid discharge head 101 is positioned on one side of the carriage 403 in the main scanning direction, next to the conveyor belt 412.

[0063] The maintenance and recovery mechanism 420 consists of, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzle 11 is formed) of the liquid discharge head 101, and a wiper member 422 that wipes the nozzle surface.

[0064] The main scanning movement mechanism 493, the supply mechanism 494, the maintenance and recovery mechanism 420, and the transport mechanism 495 are mounted on a housing that includes side plates 491A, 491B, and a back plate 491C.

[0065] In this configured device, the paper 410 is fed onto the transport belt 412 and picked up, and the paper 410 is transported in the sub-scanning direction by the circumferential movement of the transport belt 412.

[0066] Therefore, by moving the carriage 403 in the main scanning direction and driving the liquid ejection head 101 in accordance with the image signal, liquid is ejected onto the stationary paper 410 to form an image.

[0067] Thus, since this device is equipped with a liquid discharge head according to the present invention, it can stably form high-resolution images.

[0068] Next, another example of the liquid dispensing unit according to the present invention will be described with reference to Figure 16. Figure 16 is a plan view illustrating the main parts of the unit.

[0069] This liquid dispensing unit consists of a housing portion composed of side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493 that moves the carriage 403 in the main scanning direction (direction of the double arrows in Figure 16), the carriage 403, and a liquid dispensing head 101.

[0070] Furthermore, a liquid dispensing unit can also be configured by further attaching, for example, the side plate 491B of this liquid dispensing unit to at least one of the aforementioned maintenance and recovery mechanism 420 and supply mechanism 494.

[0071] Next, yet another example of the liquid dispensing unit according to the present invention will be described with reference to Figure 17. Figure 17 is a front view of the unit.

[0072] This liquid discharge unit consists of a liquid discharge head 101 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

[0073] The flow path component 444 is located inside the cover 442. A head tank 441 can be included instead of the flow path component 444. Furthermore, a connector 443 for electrical connection to the liquid discharge head 101 is provided on the upper part of the flow path component 444.

[0074] Although embodiments of the present invention have been described above, the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the present invention.

[0075] In this application, "liquid dispensing device" refers to a device that includes a liquid dispensing head or a liquid dispensing unit and drives the liquid dispensing head to dispense liquid. A liquid dispensing device includes not only devices that can dispense liquid onto objects to which liquid can adhere, but also devices that dispense liquid into air or into liquid.

[0076] This "liquid dispensing device" may also include means for feeding, transporting, and dispensing paper onto materials to which liquid can adhere, as well as pre-treatment devices, post-treatment devices, etc.

[0077] For example, "liquid ejection devices" include image forming devices that eject ink to form images on paper, and three-dimensional molding devices that eject molding liquid into a powder layer formed in layers to create three-dimensional objects.

[0078] Furthermore, the term "liquid dispensing device" is not limited to those that visualize meaningful images such as letters or figures through the dispensed liquid. For example, it also includes devices that form patterns that do not have meaning in themselves, or devices that create three-dimensional images.

[0079] The term "materials to which liquid can adhere" above refers to materials to which liquid can adhere, at least temporarily, including materials that adhere and solidify, or materials that adhere and penetrate. Specific examples include recording media such as paper, recording paper, film, and cloth; electronic components such as electronic circuit boards and piezoelectric elements; powder layers; organ models; and inspection cells. Unless otherwise specified, it includes all materials to which liquid can adhere.

[0080] The materials referred to as "materials to which liquid can adhere" above include paper, thread, fibers, fabrics, leather, metal, plastic, glass, wood, ceramics, building materials such as wallpaper and flooring, and textiles for clothing, as long as liquid can adhere to them, even temporarily.

[0081] Furthermore, "liquid" also includes inks, processing solutions, DNA samples, resists, patterning materials, binders, molding fluids, or solutions and dispersions containing amino acids, proteins, calcium, etc.

[0082] Furthermore, while "liquid dispensing device" includes devices in which the liquid dispensing head and the object to which the liquid can adhere move relative to each other, it is not limited to these. Specific examples include serial-type devices in which the liquid dispensing head moves, and line-type devices in which the liquid dispensing head does not move.

[0083] Other types of "liquid dispensing devices" include processing liquid coating devices that dispense processing liquid onto the surface of paper for purposes such as modifying the paper surface, and injection granulation devices that granulate fine particles of raw materials by spraying a compositional liquid, in which raw materials are dispersed in a solution, through a nozzle.

[0084] A "liquid dispensing unit" is a collection of components related to liquid dispensing, in which functional parts and mechanisms are integrated with a liquid dispensing head. For example, a "liquid dispensing unit" may include a combination of a liquid dispensing head with at least one of the following components: a head tank, carriage, supply mechanism, maintenance and recovery mechanism, and main scanning and moving mechanism.

[0085] Here, integration includes, for example, cases where the liquid dispensing head and functional components or mechanisms are fixed to each other by fastening, bonding, engaging, etc., or where one is held movably relative to the other. Furthermore, the liquid dispensing head and functional components or mechanisms may be configured to be detachable from each other.

[0086] For example, some liquid dispensing units, such as the liquid dispensing unit 440 shown in Figure 15, have a liquid dispensing head and head tank integrated into one unit. Others have a liquid dispensing head and head tank integrated into one unit, connected to each other by tubes or similar means. It is also possible to add a unit containing a filter between the head tank and the liquid dispensing head of these liquid dispensing units.

[0087] Additionally, some liquid dispensing units have an integrated liquid dispensing head and carriage.

[0088] Furthermore, some liquid dispensing units integrate the liquid dispensing head and the scanning mechanism by movably holding the liquid dispensing head in a guide member that constitutes part of the scanning mechanism. Additionally, as shown in Figure 16, some liquid dispensing units integrate the liquid dispensing head, carriage, and main scanning mechanism.

[0089] Furthermore, some liquid dispensing units integrate the liquid dispensing head, carriage, and maintenance / recovery mechanism by fixing a cap component, which is part of the maintenance / recovery mechanism, to a carriage to which the liquid dispensing head is attached.

[0090] Furthermore, as shown in Figure 17, some liquid discharge units have a head tank or a liquid discharge head to which a flow path component is attached, to which a tube is connected, integrating the liquid discharge head and the supply mechanism.

[0091] The main scanning movement mechanism shall include the guide member alone. The supply mechanism shall also include the tube alone and the loading section alone.

[0092] Furthermore, the "liquid discharge head" is not limited to any particular pressure generating means. For example, in addition to the piezoelectric actuator described in the above embodiment (which may use a multilayer piezoelectric element), a thermal actuator using an electrothermal conversion element such as a heating resistor, or an electrostatic actuator consisting of a diaphragm and a counter electrode may also be used.

[0093] Furthermore, in the terminology used in this application, image formation, recording, printing, copying, printing, and shaping are all considered synonymous.

[0094] Examples of the present invention are as follows: <1> A nozzle member having multiple nozzles, A pressure chamber member having a pressure chamber communicating with the nozzle, A first substrate in which a common channel is formed, A liquid discharge head comprising a second substrate joined to the first substrate on the side opposite to the pressure chamber member, The first substrate has a first high-rigidity portion and a first low-rigidity portion which has lower rigidity than the first high-rigidity portion. The second substrate has a second high-rigidity portion and a second low-rigidity portion which has lower rigidity than the second high-rigidity portion. The liquid discharge head is characterized in that the first high-rigidity portion is joined to the second low-rigidity portion, and the first low-rigidity portion is joined to the second high-rigidity portion. <2> At each position on a plane perpendicular to the stacking direction of the first and second substrates, the variation in the rigidity of the first and second substrates in their joined state is smaller than the variation in the rigidity of the first substrate alone. <1> This is the liquid dispensing head described. <3> The first substrate and the second substrate have an uneven shape consisting of a convex portion and a concave portion, In a view of the first and second substrates in the stacking direction, the first and second substrates are joined together such that the convex portion of the first substrate and the concave portion of the second substrate, and the concave portion of the first substrate and the convex portion of the second substrate, respectively, overlap. <1> or <2> This is the liquid dispensing head described. <4> In a view of the stacking direction of the first substrate and the second substrate, the uneven shape of the first substrate, when rotated 180 degrees around an axis parallel to the short side of the first substrate, will overlap with the uneven shape of the second substrate. <3> This is the liquid dispensing head described. <5> If the distance in the thickness direction from the convex portion to the concave portion in the first substrate and the second substrate is defined as the depth of the recess, The recess depth of the second substrate is deeper than the recess depth of the first substrate. <3> or <4> This is the liquid dispensing head described. <6> The uneven shape of the second substrate is formed on the side of the second substrate opposite to the side of the first substrate. <3> from <5> It is one of the liquid dispensing heads described above. <7> The common channel is formed by the uneven shape of the first substrate. The common channel has branch sections that extend in directions inclined in the longitudinal and transverse directions of the first substrate, The uneven shape of the second substrate is a rigidity adjustment section provided to adjust its rigidity, It has an inclined portion that slopes in the opposite direction to the aforementioned branch portion. <3> from <6> It is one of the liquid dispensing heads described above. <8> It further includes a damper member, The first substrate and the second substrate are joined together via a damper member. <1> from <7> It is one of the liquid dispensing heads described above. <9> The damper member has a damper-side common channel that communicates with the common channel of the first substrate and integrally forms a liquid channel. The first substrate and the second substrate have an uneven shape consisting of a convex portion and a concave portion, If the distance in the thickness direction from the convex portion to the concave portion in the second substrate is defined as the recess depth, and the sum of the depths of the common channel and the damper-side common channel is defined as the common channel depth, The depth of the recess in the second substrate is greater than the depth of the common channel. <8> This is the liquid dispensing head described. <10> If the first substrate and the second substrate are each divided into two equal parts in their longitudinal and transverse directions to form four regions, and the two regions with high rigidity within the first substrate are designated as the first high-rigidity region and the two regions with low rigidity as the first low-rigidity region, and the two regions with high rigidity within the second substrate are designated as the second high-rigidity region and the two regions with low rigidity as the second low-rigidity region, The first high-rigidity region and the second low-rigidity region are joined together, and the first low-rigidity region and the second high-rigidity region are joined together. <1> from <9> It is one of the liquid dispensing heads described above. <11> The thickness of the portion of the second substrate that is joined to the first low-rigidity region is greater than the thickness of the portion of the second substrate that is joined to the first high-rigidity region. <10> This is the liquid dispensing head described. <12> <1> from <11> This is a head module equipped with multiple liquid dispensing heads as described above. <13> <1> from <11> This is a liquid dispensing device equipped with one of the liquid dispensing heads described above. [Explanation of Symbols]

[0095] 10. Nozzle substrate (nozzle component) 11 nozzles 20 Flow channel substrate (pressure chamber component) 21 Pressure Chamber 51 Damper Member 53 Damper-side common flow path 60 First board 60A, 60D First high rigidity area 60B, 60C First low rigidity area 61 Common channel (concave section) 63 Supply side tributary (tributary) 65. Recovery side tributary section (tributary section) 68 Wall section (convex section) 70 Second board 70A, 70D 2nd low rigidity area 70B, 70C Second high rigidity area 71. Pseudo-flow channel (rigidity adjustment section or concave section) 73 First pseudo tributary section (slope section) 75 Second pseudo tributary section (slope section) 78 Wall section (convex section) 100 head modules 101 Liquid dispensing head D1, D2 recess depth D3 Damper side common channel depth X Longitudinal direction of the first substrate Y First substrate, short side direction Z: Thickness direction (stack direction) of the first substrate [Prior art documents] [Patent Documents]

[0096] [Patent Document 1] Patent No. 4257842

Claims

1. A nozzle member having multiple nozzles, A pressure chamber member having a pressure chamber communicating with the nozzle, A first substrate in which a common channel is formed, A liquid discharge head comprising a second substrate joined to the first substrate on the side opposite to the pressure chamber member, The first substrate has a first high-rigidity portion and a first low-rigidity portion which has lower rigidity than the first high-rigidity portion. The second substrate has a second high-rigidity portion and a second low-rigidity portion which has lower rigidity than the second high-rigidity portion. A liquid discharge head characterized in that the first high-rigidity portion is joined to the second low-rigidity portion, and the first low-rigidity portion is joined to the second high-rigidity portion.

2. The liquid dispensing head according to claim 1, wherein, at each position on a plane perpendicular to the stacking direction of the first substrate and the second substrate, the variation in the rigidity of the first substrate and the second substrate in a joined state is smaller than the variation in the rigidity of the first substrate alone.

3. The first substrate and the second substrate have an uneven shape consisting of a convex portion and a concave portion, The liquid dispensing head according to claim 1, wherein, in a view of the stacking direction of the first substrate and the second substrate, the first substrate and the second substrate are joined together such that the convex portion of the first substrate and the concave portion of the second substrate, and the concave portion of the first substrate and the convex portion of the second substrate, respectively, overlap.

4. The liquid dispensing head according to claim 3, wherein, when viewed in the stacking direction of the first substrate and the second substrate, the uneven shape of the first substrate, when rotated 180 degrees around an axis parallel to the short side direction of the first substrate, overlaps with the uneven shape of the second substrate.

5. If the distance in the thickness direction from the convex portion to the concave portion in the first substrate and the second substrate is defined as the depth of the recess, The liquid dispensing head according to claim 3, wherein the depth of the recess in the second substrate is deeper than the depth of the recess in the first substrate.

6. The liquid dispensing head according to claim 3, wherein the uneven shape of the second substrate is formed on the side of the second substrate opposite to the side of the first substrate.

7. The common channel is formed by the uneven shape of the first substrate. The common channel has branch sections that extend in directions inclined in the longitudinal and transverse directions of the first substrate, The uneven shape of the second substrate is a rigidity adjustment section provided to adjust its rigidity, The liquid discharge head according to claim 3, having an inclined portion that is inclined in the opposite direction to the aforementioned branch portion.

8. It further includes a damper member, The liquid discharge head according to claim 1, wherein the first substrate and the second substrate are joined via a damper member.

9. The damper member has a damper-side common channel that communicates with the common channel of the first substrate and integrally forms a liquid channel, The first substrate and the second substrate have an uneven shape consisting of a convex portion and a concave portion, If the distance in the thickness direction from the convex portion to the concave portion in the second substrate is defined as the recess depth, and the sum of the depths of the common channel and the damper-side common channel is defined as the common channel depth, The liquid discharge head according to claim 8, wherein the depth of the recess in the second substrate is greater than the depth of the common channel.

10. If the first substrate and the second substrate are each divided in half along their longitudinal and transverse directions to form four regions, and the two regions with high rigidity within the first substrate are designated as the first high-rigidity region and the two regions with low rigidity as the first low-rigidity region, and the two regions with high rigidity within the second substrate are designated as the second high-rigidity region and the two regions with low rigidity as the second low-rigidity region, The liquid discharge head according to claim 1, wherein the first high-rigidity region and the second low-rigidity region are joined together, and the first low-rigidity region and the second high-rigidity region are joined together.

11. The liquid discharge head according to claim 10, wherein the thickness of the portion of the second substrate that is joined to the first low-rigidity region is greater than the thickness of the portion of the second substrate that is joined to the first high-rigidity region.

12. A head module comprising a plurality of liquid dispensing heads according to any one of claims 1 to 11.

13. A liquid dispensing device comprising a liquid dispensing head according to any one of claims 1 to 11.