Probe chuck

Abstract

This invention provides a prober chuck that enables uniform temperature distribution on the wafer holding surface. [Solution] A prober chuck (10) comprising a chuck body (16) having a holding surface capable of holding a wafer, an introduction channel (52) that guides air introduced from an air inlet (30) to heat exchange positions (46, 48, 50) dispersed at multiple locations in the in-plane direction of the holding surface inside the chuck body, and an outlet channel (54) that guides the air from each heat exchange position to an air outlet (34), wherein the air inlet is provided only at one end of the chuck body, and the air outlet is provided only at the other end of the chuck body, different from the one end.

Claims

1. A prober chuck for holding wafers, A chuck body having a holding surface capable of holding the wafer, An introduction channel guides the air introduced from the air inlet to multiple heat exchange positions distributed within the chuck body at the in-plane direction of the holding surface, An outlet channel that guides the air introduced to each of the heat exchange positions to the air outlet, Equipped with, The air inlet is provided only at one end of the chuck body. The air outlet is provided only at the other end of the chuck body, which is different from the one end mentioned above. Probe chuck.

2. The cross-sectional area of ​​the introduction channel at each of the heat exchange locations is formed to be larger than the cross-sectional area of ​​the outlet channel. Each of the heat exchange locations is provided with a heat exchange promoting surface, which is formed by a stepped surface between the introduction channel and the discharge channel. A prober chuck according to claim 1.

3. Each of the heat exchange positions is arranged on a concentric circle equidistant from the center of the chuck body. A prober chuck according to claim 1 or 2.

4. Each of the heat exchange positions is evenly distributed along the circumferential direction of the concentric circles. A prober chuck according to claim 3.

5. The heat exchange positions are distributed across at least three locations, including a first heat exchange position, a second heat exchange position, and a third heat exchange position. The introduction channel comprises a main channel extending from the air inlet to the first heat exchange position, a first branch channel branching from the main channel and extending to the second heat exchange position, and a second branch channel branching from the main channel and extending to the third heat exchange position. A prober chuck according to any one of claims 1 to 4.

6. The first branch channel and the second branch channel are provided along the same straight line perpendicular to the flow direction of the main channel. A prober chuck according to claim 5.

7. At least a portion of the aforementioned introduction channel is made of plastic pipe material. A prober chuck according to any one of claims 1 to 6.

8. The pipe material is positioned with a gap between it and the inner wall surface of the chuck body. A prober chuck according to claim 7.

9. The aforementioned pipe material is connected to the air inlet via a rubber gasket. A prober chuck according to claim 7 or 8.

10. The aforementioned outlet channels have communicating channels that are connected to each other on their way from each of the heat exchange positions to the air outlet. A prober chuck according to any one of claims 1 to 9.

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