Semiconductor equipment

Abstract

This invention provides a method for manufacturing a semiconductor device and a semiconductor device that offer high reliability in the dicing of SiC wafers using a dicing blade. [Solution] A method for manufacturing a semiconductor device includes the steps of: preparing a semiconductor substrate 101 having a first main surface 105 on one side and a second main surface 106 on the other side, and having a plurality of device formation regions and cutting lines that demarcate the plurality of device formation regions; forming a first electrode 102 that covers the first main surface in each device formation region; forming a second electrode 104 that covers the second main surface; partially removing the second electrode along the cutting lines to expose the semiconductor substrate and forming a removal portion 109 that extends along the cutting lines; and cutting the semiconductor substrate along the removal portion using a blade 110.

Description

[Technical Field]

[0001] This application corresponds to Japanese Patent Application No. 2020-155578, filed with the Japan Patent Office on September 16, 2020, and the full disclosure of this application is incorporated herein by reference. The present invention relates to a method for manufacturing a semiconductor device and a semiconductor device. [Background technology]

[0002] In semiconductor device manufacturing methods, a step is sometimes performed in which a semiconductor wafer is divided into chip units using a dicing blade (see, for example, Patent Document 1). [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2014-13812 [Overview of the project] [Problems that the invention aims to solve]

[0004] One embodiment provides a method for manufacturing a semiconductor device and a semiconductor device with high reliability. [Means for solving the problem]

[0005] One embodiment provides a method for manufacturing a semiconductor device, comprising the steps of: preparing a semiconductor substrate having a first main surface on one side and a second main surface on the other side, and having a plurality of device formation regions and planned cutting lines that demarcate the plurality of device formation regions; forming a first electrode covering the first main surface in each of the device formation regions; forming a second electrode covering the second main surface; partially removing the second electrode along the planned cutting lines to expose the semiconductor substrate and form a removal portion extending along the planned cutting lines; and cutting the semiconductor substrate along the removal portion.

[0006] One embodiment provides a semiconductor device including a semiconductor substrate having a first main surface on one side and a second main surface on the other side, a first electrode covering the first main surface, and a second electrode covering the second main surface and spaced apart from the periphery of the second main surface so as to expose the peripheral portion of the second main surface.

[0007] The above-described or further other objects, features, and effects will be clarified by the description of the embodiments described below with reference to the accompanying drawings.

Brief Description of the Drawings

[0008] [Figure 1] FIG. 1 is a plan view of a semiconductor wafer according to an embodiment. [Figure 2] FIG. 2 is a cross-sectional view of a semiconductor wafer according to an embodiment. [Figure 3] FIG. 3 is a cross-sectional view showing a manufacturing process of a semiconductor device according to an embodiment. [Figure 4] FIG. 4 is a cross-sectional view showing a manufacturing process of a semiconductor device according to an embodiment. [Figure 5] FIG. 5 is a cross-sectional view showing a manufacturing process of a semiconductor device according to an embodiment. [Figure 6] FIG. 6 is a cross-sectional view showing a manufacturing process of a semiconductor device according to an embodiment. [Figure 7] FIG. 7 is a view showing a planar and cross-sectional structure of a semiconductor device according to an embodiment. [Figure 8A] FIG. 8A is a cross-sectional view of another example of a semiconductor wafer according to an embodiment. [Figure 8B] FIG. 8B is a cross-sectional view of another example of a semiconductor device according to an embodiment. [Figure 9A] FIG. 9A is a cross-sectional view of another example of a semiconductor wafer according to an embodiment. [Figure 9B] FIG. 9B is a cross-sectional view of another example of a semiconductor device according to an embodiment. [Figure 10] FIG. 10 is a view showing a planar and cross-sectional structure of another example of a semiconductor device according to an embodiment. [Figure 11]Figure 11 is a cross-sectional view showing an implementation structure according to an embodiment. [Figure 12] Figure 12 is a cross-sectional view showing another example of the implementation structure according to the embodiment. [Figure 13] Figure 13 is a plan view of a modified example of the semiconductor device according to the embodiment. [Figure 14] Figure 14 is a cross-sectional view of a diode according to an embodiment. [Figure 15] Figure 15 is a cross-sectional view of a transistor according to an embodiment. [Figure 16] Figure 16 is a cross-sectional view of an IGBT according to an embodiment. [Figure 17] Figure 17 shows the planar and cross-sectional structures of a semiconductor device including an IGBT according to an embodiment. [Modes for carrying out the invention]

[0009] The embodiments described below are all comprehensive or specific examples. The numerical values, shapes, materials, components, arrangement and connection configurations of components, steps, and the order of steps shown in the following embodiments are examples only and are not intended to limit the invention. Furthermore, components in the following embodiments that are not described in an independent claim are described as optional components.

[0010] The attached drawings are schematic diagrams and not necessarily strictly accurate. For example, the scales do not necessarily match between the attached drawings. In the attached drawings, substantially identical components are denoted by the same reference numerals, and redundant explanations are omitted or simplified.

[0011] In this specification, terms indicating relationships between elements, such as vertical or horizontal, terms indicating the shape of elements, such as rectangles, and numerical ranges are not expressions that represent only strict meanings, but rather expressions that include substantially equivalent ranges.

[0012] In this specification, the terms "upper" and "lower" do not refer to the absolute spatial directions of upward (vertically upward) and downward (vertically downward), but are defined by the relative positional relationship based on the stacking order in the stacked configuration. For example, the first main surface side of a semiconductor layer is described as the upper side (upper), and the second main surface side as the lower side (lower). In actual use of a semiconductor device (vertical transistor), the first main surface side may be the lower side (lower), and the second main surface side may be the upper side (upper). Of course, the semiconductor device (vertical transistor) may be used in an orientation where the first and second main surfaces are inclined or perpendicular to the horizontal plane.

[0013] The terms “above” and “below” apply not only when two components are spaced apart vertically with another component in between, but also when two components are positioned vertically so that they are in close contact with each other.

[0014] This embodiment describes a method for cutting a semiconductor wafer with a dicing blade so that the semiconductor wafer is divided into chip units (also called semiconductor chips or semiconductor devices). First, the configuration of the semiconductor wafer will be described. Figure 1 is a top view of a semiconductor wafer 10 according to this embodiment.

[0015] The semiconductor wafer 10 is, for example, a SiC (silicon carbide) semiconductor wafer containing a SiC single crystal. The SiC single crystal may be a hexagonal SiC single crystal. The SiC single crystal may also be a 4H-SiC single crystal. The unit cell of a 4H-SiC single crystal contains a tetrahedral structure in which one Si atom and four C atoms are bonded in a four-faceted arrangement. The unit cell of a SiC single crystal contains a tetrahedral structure in which four C atoms are bonded to one Si atom in a tetrahedral arrangement (regular tetrahedral arrangement). The unit cell has an atomic arrangement in which the tetrahedral structure is stacked in four periods.

[0016] The unit cell has a hexagonal silicon face, a hexagonal carbon face, and a hexagonal prism structure with six sides connecting the silicon and carbon faces. The silicon face is an end face terminated by Si atoms. In the silicon face, one Si atom is located at each of the six vertices of the hexagon, and one Si atom is located at the center of the hexagon. The carbon face is an end face terminated by C atoms. In the carbon face, one C atom is located at each of the six vertices of the hexagon, and one C atom is located at the center of the hexagon.

[0017] The silicon plane is the (0001) plane. The carbon plane is the (000-1) plane. The (0001) plane and the (000-1) plane are collectively referred to as the c plane. The

[0001] direction and the [000-1] direction are collectively referred to as the c axis direction. The (11-20) plane and the (-1-120) plane are collectively referred to as the a plane. The [11-20] direction and the [-1-120] direction are collectively referred to as the a axis direction. The (1-100) plane and the (-1100) plane are collectively referred to as the m plane. The [1-100] direction and the [-1100] direction are collectively referred to as the m axis direction.

[0018] The semiconductor wafer 10 includes a plurality of semiconductor device formation regions 100 (device formation regions) and dicing street regions 200 as an example of cutting lines. Each semiconductor device formation region 100 has a semiconductor device structure formed therein that will become a semiconductor device after being diced into individual pieces. The semiconductor device is, for example, a vertical power semiconductor device. Specifically, the semiconductor device is a vertical diode or a vertical transistor. The vertical diode may include a vertical SBD (Schottky Barrier Diode). The vertical transistor may include a vertical MISFET (Metal Insulator Semiconductor Field Effect Transistor).

[0019] Figure 2 is a cross-sectional view of AA shown in Figure 1. As shown in Figure 2, the semiconductor wafer 10 includes a semiconductor substrate 101, a first electrode 102, a protective film 103, and a second electrode 104.

[0020] The semiconductor substrate 101 is, for example, a SiC substrate containing a SiC single crystal. The semiconductor substrate 101 has a first main surface 105 and a second main surface 106 opposite to the first main surface. Preferably, the first main surface 105 is the (0001) plane (silicon plane) and the second main surface 106 is the (000-1) plane (carbon plane). Such a configuration is effective when the semiconductor device includes SiC-MOSFETs or SiC-SBDs. The first electrode 102 is a metal electrode formed on the first main surface 105 of the semiconductor substrate 101 for each semiconductor device formation region 100 (for each semiconductor device).

[0021] The protective film 103 is formed to surround the first electrode 102 in a plan view, thereby protecting the area around the first electrode 102. The protective film 103 is an organic film containing, for example, polyimide or PBO (polybenzoxazole). The protective film 103 may also be an inorganic film containing, for example, silicon nitride (SiN) or silicon oxide (SiO2). The protective film 103 may have a single-layer structure or may be formed by laminating multiple types of materials. For example, the protective film 103 may have a laminated structure containing inorganic and organic films laminated in this order from the semiconductor substrate 101 side.

[0022] The second electrode 104 is a metal electrode uniformly formed on the second main surface 106 of the semiconductor substrate 101. In other words, the second electrode 104 is commonly formed in multiple semiconductor device formation regions 100 on the semiconductor wafer 10. The second electrode 104 may cover the entire area of ​​the second main surface 106. The second electrode 104 is formed, for example, by a laminated film of titanium (Ti), nickel (Ni), palladium (Pd), and gold (Au). Of course, the second electrode 104 may be formed from other materials such as aluminum, copper, silver, titanium nitride, or tungsten.

[0023] The second electrode 104 preferably has a single-layer structure or a laminated structure including at least one of a Ti layer, a Ni layer, a Ni alloy layer, and an Au layer. It is particularly preferable that the second electrode 104 has a single-layer structure or a laminated structure including either or both of a Ni layer and a Ni alloy layer. For example, the second electrode 104 may have a laminated structure including a Ti layer, a Ni layer, and an Au layer stacked in this order from the second main surface 106 side.

[0024] The second electrode 104 may have a laminated structure including a NiSi layer, a Ti layer, and a Ni layer stacked in this order from the second main surface 106 side. The second electrode 104 may have a laminated structure including a Ni layer, a Ti layer, and a Ni layer stacked in this order from the second main surface 106 side. It may have a laminated structure including a Ni layer, a Ti layer, and a NiV layer stacked in this order from the second main surface 106 side. It may have a laminated structure including a Ni layer and an Au layer stacked in this order from the second main surface 106 side.

[0025] For example, the thickness of the second electrode 104 may be 500 nm or more. The thickness of the second electrode 104 may be 1500 nm or less. In the laminated structure, the second electrode 104 may be configured such that the total thickness of the Ni layer or Ni alloy layer is 500 nm or more. In the laminated structure, the second electrode 104 may be configured such that the Ni layer alone is 500 nm or more. If the second electrode 104 includes a Ti layer, the second electrode 104 may be configured such that the Ti layer is 50 nm or more and 100 nm or less.

[0026] Here, an example of a semiconductor element having two electrodes (e.g., a diode) is described, but a semiconductor element having three or more electrodes (e.g., a transistor) may also be used. When a semiconductor element has three or more electrodes, one semiconductor element in the semiconductor wafer 10 has two or more first electrodes 102 formed on the first main surface 105.

[0027] Known configurations and manufacturing methods are employed for the semiconductor wafer 10, the semiconductor element configuration, and their manufacturing methods. First, a semiconductor substrate 101 made of SiC is prepared. The semiconductor substrate 101 may have a configuration in which a semiconductor layer having a lower impurity concentration than the semiconductor substrate is formed on a semiconductor substrate having a relatively high impurity concentration by an epitaxial growth method.

[0028] Next, an internal structure corresponding to the function of the semiconductor element is formed on the surface layer of the semiconductor substrate 101. Then, a plurality of first electrodes 102 are formed on the first main surface 105 of the semiconductor substrate 101. Next, a protective film 103 is formed around the first electrodes 102 on the first main surface 105. Next, a second electrode 104 is formed on the second main surface 106 of the semiconductor substrate 101. The second electrode 104 is formed over the entire area of ​​the second main surface 106 (the entire surface of the semiconductor wafer 10).

[0029] Here, the entire area of ​​the second main surface 106 (the entire surface of the semiconductor wafer 10) does not necessarily have to be the entirety of the second main surface 106, and includes cases where the second electrode 104 is not formed in some areas, such as the peripheral part of the semiconductor wafer 10. The semiconductor substrate 101 may be adjusted to a predetermined thickness by grinding or the like before the process of forming the second electrode 104.

[0030] Of course, when Si-based devices are used, a semiconductor substrate 101 made of silicon may be provided instead of SiC. Also, when the semiconductor element is an IGBT, a back surface structure such as a collector layer is formed on the surface layer of the second main surface 106 before the formation process of the second electrode 104. Detailed examples of the configuration of the semiconductor element will be described later with reference to Figures 15, 16, and 17.

[0031] The semiconductor wafer 10 is cut by a dicing blade along a dicing street 121, which is an example of a planned cutting line shown in Figure 1, and divided into multiple semiconductor devices (semiconductor chips). The dicing street is set up to demarcate the area on the semiconductor substrate 101 that should be separated into individual semiconductor devices 20. Specifically, dicing streets are set up in both the X and Y directions as shown in Figure 1, and the blade dicing method is performed in both the X and Y directions.

[0032] The dicing direction may be in the positive or negative directions of the X and Y axes. Here, the X and Y directions shown in Figure 1, etc., are, for example, the 11-20 direction (a-axis direction) and the 1-100 direction (m-axis direction) of a SiC single crystal. In other words, the dicing street 121 extends along the 11-20 direction and the 1-100 direction.

[0033] Next, a method for dividing a semiconductor wafer 10 into multiple semiconductor devices (semiconductor chips) will be explained. Figures 3 to 6 are diagrams illustrating the process of dividing the semiconductor wafer 10.

[0034] First, as shown in Figure 3, the semiconductor wafer 10, which includes the semiconductor substrate 101, the first electrode 102, the protective film 103, and the second electrode 104, is held (supported) by the holding member 107 (support member). The semiconductor substrate 101 is held by the holding member 107 from the first main surface 105 side with the second main surface 106 side facing upwards. In other words, the semiconductor wafer 10 is held by the holding member 107 in an inverted position compared to the position shown in Figure 2.

[0035] Next, as shown in Figures 3 and 4, a partial cutting process is performed using the blade dicing method with the first blade 108. In the partial cutting process, the second electrode 104 is partially removed along the dicing street 121 so as to expose the semiconductor substrate 101. Specifically, in the partial cutting process, a portion of the second electrode 104 and a portion of the semiconductor substrate 101 are removed along the dicing street, penetrating the second electrode 104 from the second main surface 106 side and reaching the middle of the semiconductor substrate 101 in the thickness direction.

[0036] In the partial cutting process, a portion of the second electrode 104 is removed along the dicing street from the second main surface 106 side so as to leave a portion of the semiconductor substrate 101, thereby forming a removal region 109 (groove). Preferably, at least a portion or all of the removal region 109 is located outside the outer edge of the protective film 103 so as not to overlap with the protective film 103 in a plan view.

[0037] The partial cutting process removes the portion of the second electrode 104 located on the dicing street, as well as a portion of the semiconductor substrate 101. The depth of the removal region 109 shown in Figure 4 is an example and is not limited thereto. For example, the depth d of the removal region 109 in the semiconductor substrate 101 may be 70% or less of the thickness t of the semiconductor substrate 101. If the semiconductor substrate 101 has an epitaxial layer, it is preferable that the depth d does not reach the epitaxial layer.

[0038] For example, the semiconductor substrate 101 may include a substrate (SiC substrate) and an epitaxial layer (SiC epitaxial layer) stacked in this order from the second main surface 106 side toward the first main surface 105 side. In this case, it is preferable that the removal region 109 is formed on the substrate on the second main surface 106. It is also preferable that the removal region 109 is formed on the substrate with a gap between it and the epitaxial layer toward the second main surface 106 side. In a plan view, it is preferable that the removal region 109 surrounds the inner part of the epitaxial layer within each semiconductor device formation region 100 (i.e., the internal structure of the semiconductor device).

[0039] The thickness t of the semiconductor substrate 101 may be, for example, 350 μm or less, 200 μm or less, 150 μm or less, or 100 μm or less. The depth d is preferably sufficient to reliably remove the second electrode 104. For example, the depth d is preferably 5 μm or more. For example, if the thickness of the second electrode 104 is 500 nm or more and 1500 nm or less, the distance from the surface of the second electrode 104 to the bottom of the groove (i.e., the sum of the thickness of the second electrode 104 and the depth d) may be 10 μm or more. Of course, only the second electrode 104 may be removed without removing the semiconductor substrate 101.

[0040] Next, as shown in Figures 5 and 6, a full-cut process using the blade dicing method with the second blade 110 is performed in the removal region 109, and the semiconductor substrate 101 is divided into multiple semiconductor devices 20. Specifically, the blade dicing method brings the second blade 110 into contact with the removal region 109, and the semiconductor substrate 101 is cut from the second main surface 106 side so as to penetrate the semiconductor substrate 101. This produces multiple semiconductor devices 20. After that, as shown in Figure 6, the retaining member 107 is removed from the semiconductor substrate 101, and the multiple semiconductor devices 20 are obtained.

[0041] Thus, in this embodiment, the dicing process is performed from the second main surface 106 side. This makes it possible to smooth the cut surface and suppress the occurrence of chipping, especially when the semiconductor substrate 101 is a SiC substrate, compared to when dicing is performed from the first main surface 105 side.

[0042] When dicing is performed from the side of the second main surface 106, burrs may occur on the side of the second main surface 106 of the cut surface. In particular, when using a dicing blade with a small abrasive grain size, the probability of burr generation increases. This burr is a residue of the second electrode 104 made of a ductile metal, and in some cases, it may have a length of about several hundred micrometers. When this burr reaches from the second main surface 106 to the first main surface 105, a problem occurs where the second electrode 104 shorts to the first electrode 102. Also, this problem becomes more prominent as the thickness of the semiconductor substrate 101 decreases.

[0043] In this embodiment, since two cutting processes, a partial cut process and a full cut process, are performed, the occurrence of such problems is suppressed. Specifically, the metal on the dicing street is removed in advance by the partial cut process, and the full cut process is performed on the removed part of the metal, so that the generation of burrs reaching from the second main surface 106 to the first main surface 105 can be suppressed. Therefore, the manufacturing method according to this embodiment can achieve an improvement in the yield of the semiconductor device 20. That is, a manufacturing method of a highly reliable semiconductor device 20 in which the generation of burrs is suppressed can be provided. Also, a highly reliable semiconductor device 20 with the generation of burrs suppressed can be manufactured and provided.

[0044] Also, as shown in FIGS. 3 and 5, the first thickness w1 of the first blade 108 used in the partial cut process is thicker than the second thickness w2 of the second blade 110 used in the full cut process. That is, the second thickness w2 is less than the first thickness w1 (w2 < w1). As a result, the cut surface in the full cut process is located at a different position from the cut surface in the partial cut process (that is, the position in the X direction of the cut surface in FIG. 6 and the like is different). Thereby, compared with the case where the thickness of the blade is the same, the full cut process can be surely performed on the removed part of the metal.

[0045] Therefore, the generation of burrs extending from the second main surface 106 to the first main surface 105 can be further suppressed. This effect is particularly effective when applied to vertical power semiconductor elements having a breakdown voltage of 650V or more and a substrate thickness of 150μm or less. Examples of vertical power semiconductor elements having a breakdown voltage of 650V or more include SiC-MOSFETs, SiC-SBDs, and Si-IGBTs.

[0046] The first thickness w1 and the second thickness w2 may be equal. In this case, the abrasive grain size of the first blade 108 may be larger than that of the second blade 110. In other words, the first blade 108 may have a coarser grit than the second blade 110. This makes it possible to achieve the same effect as when the first thickness w1 is greater than the second thickness w2.

[0047] The first thickness w1 may be greater than the second thickness w2, and the abrasive grain size of the first blade 108 may be greater than the abrasive grain size of the second blade 110. Increasing the abrasive grain size improves the cutting speed and suppresses the generation of burrs. Also, even if burrs do occur, their length can be shortened. Furthermore, increasing the blade thickness suppresses blade deterioration. On the other hand, decreasing the abrasive grain size allows for smoother cutting surfaces.

[0048] In a preferred embodiment, the blade thickness in the partial cutting process (half-cut process) is greater than the blade thickness in the full-cut process. Also, in a preferred embodiment, the abrasive grain size in the partial cutting process (half-cut process) is greater than the abrasive grain size in the full-cut process. In other words, it is preferable that the surface roughness of the removal area 109 due to grinding marks is greater than the surface roughness of the semiconductor substrate 101 due to grinding marks. This makes it possible to achieve smoothness of the cut surface while suppressing the generation of burrs.

[0049] Of course, the same type of blade may be used in both the partial cutting and full cutting processes. Even in this case, as described above, the process is carried out in two separate dicing processes, reducing the possibility of a continuous burr being generated. This suppresses the generation of burrs that extend from the second main surface 106 to the first main surface 105. In this embodiment, it is not necessary to use an ultrasonic blade in both the partial cutting and full cutting processes. In this case, the dicing process can be carried out with a simple configuration without an ultrasonic vibration mechanism.

[0050] When the second electrode 104 contains a large amount of relatively ductile metal material (e.g., nickel), and / or when the total thickness of the second electrode 104 is thick (e.g., 500 nm or more), the rate of burr formation increases, making the dicing method according to the present invention more effective.

[0051] As a specific example, the second electrode 104 may have a laminated structure including a Ti layer, a Ni layer, and an Au layer stacked in this order from the SiC substrate side. As a specific example, the second electrode 104 may have a laminated structure including a NiSi layer, a Ti layer, and a Ni layer stacked in this order from the SiC substrate side. As a specific example, the second electrode 104 may have a laminated structure including a Ni layer, a Ti layer, and a Ni layer stacked in this order from the SiC substrate side. As a specific example, the second electrode 104 may have a laminated structure including a Ni layer, a Ti layer, and a NiV layer stacked in this order from the SiC substrate side.

[0052] In these layered structures, the second electrode 104 may have a configuration in which the total thickness of the Ni or nickel alloy layers is 500 nm or more. The second electrode 104 may have a configuration in which the Ni layer alone is 500 nm or more. The second electrode 104 may have a configuration in which the Ti layer is 50 nm or more and 100 nm or less.

[0053] Next, the configuration of the semiconductor device 20 manufactured by the above manufacturing method will be described. Figure 7 is a diagram showing the configuration of the semiconductor device 20 according to this embodiment. This semiconductor device 20 includes a semiconductor substrate 101, a first electrode 102, a protective film 103, and a second electrode 104.

[0054] The semiconductor substrate 101 has a first main surface 105, a second main surface 106 opposite to the first main surface 105, and a plurality of side surfaces 101a connecting the first main surface 105 and the second main surface 106. For example, the semiconductor substrate 101 is a SiC substrate. The periphery of the first main surface 105 is preferably angular. The plurality of side surfaces 101a are preferably ground surfaces having grinding marks. The first electrode 102 is provided on the first main surface 105 of the semiconductor substrate 101. The protective film 103 is formed to surround the first electrode 102.

[0055] In this embodiment, the protective film 103 covers the peripheral edge of the first electrode 102. Specifically, the protective film 103 is formed in an annular shape that extends along the peripheral edge of the first electrode 102 so as to expose the inner portion of the first electrode 102. Preferably, in a plan view, the protective film 103 is formed with a gap inward from the peripheral edge (multiple side surfaces 101a) of the first main surface 105.

[0056] The second electrode 104 is provided on the second main surface 106 of the semiconductor substrate 101. The second electrode 104 is removed along with a portion of the semiconductor substrate 101 in the outer peripheral region (periphery) of the semiconductor substrate 101. In other words, the second electrode 104 is formed with a gap inward from each side surface 101a of the semiconductor substrate 101 so as to expose the outer peripheral region (periphery) of the second main surface 106. The outer peripheral region is a region having a predetermined width W in a plan view. The width W of the outer peripheral region is the width in a direction perpendicular to the direction in which the outer peripheral region extends in a plan view.

[0057] The outer peripheral region, in a plan view, has outer edges that coincide with each side surface 101a of the semiconductor substrate 101 and is formed in an annular shape extending along the four sides of the semiconductor substrate 101. In other words, the outer peripheral region surrounds the second electrode 104 in a plan view. The outer peripheral region may also surround the first electrode 102 in a plan view. The outer peripheral region may also surround the protective film 103 in a plan view.

[0058] The semiconductor substrate 101 has a notch 111 formed in the outer peripheral region. Preferably, the notch 111 is made of a ground surface having grinding marks. The notch 111 may have a surface roughness different from the surface roughness of the multiple side surfaces 101a. In this case, it is preferable that the surface roughness of the notch 111 is greater than the surface roughness of the multiple side surfaces 101a.

[0059] The notch 111 is recessed from the periphery of the second main surface 106 toward the periphery of the first main surface 105. The notch 111 is formed to be continuous with the periphery of the second electrode 104. In other words, the notch 111 has a wall surface that is partitioned by the second electrode 104 and the semiconductor substrate 101.

[0060] The second electrode 104 covers the central portion of the second main surface 106 in a plan view and has an outer peripheral end (circumferential end) formed to be separated by a predetermined width W from each of the sides 101a of the semiconductor substrate 101. In this embodiment, the second electrode 104 is formed in a rectangular shape defined by an outer peripheral region (notch portion 111) in a plan view.

[0061] In other words, the notch 111 (outer peripheral region) surrounds the second electrode 104 in a plan view. The notch 111 may also surround the first electrode 102 in a plan view. The notch 111 may also surround the protective film 103 in a plan view. Preferably, the notch 111 is formed such that at least part or all of it does not overlap the protective film 103 in a plan view.

[0062] The second electrode 104 is not formed in the region outside its outer peripheral edge (i.e., the outer peripheral region). In other words, the outer peripheral edge of the second electrode 104 is spaced apart from each of the multiple side surfaces 101a of the semiconductor substrate 101 in a plan view. To put it another way, a notch 111 is provided at the outer peripheral edge of the second main surface 106 of the semiconductor substrate 101, extending continuously around its entire circumference. The width W of the outer peripheral region may be the same or different on each of the four sides of the semiconductor substrate 101.

[0063] The shape of the inner surface (wall) of the notch 111 is determined by the shape of the blade used in the partial cutting process. In the above embodiment, an example was shown in which the inner surface (wall) of the notch 111 is a recess consisting of a curved surface, but the size and shape of the blade used in the partial cutting process can be arbitrarily selected.

[0064] Figure 8A corresponds to Figure 4 and is a cross-sectional view of the wafer when a bevel cut is used. Figure 8B is a cross-sectional view of the semiconductor device in this case. As shown in Figure 8A, the side surface of the removal area 109 may be a slope. In other words, the removal area 109 may have a wall surface that slopes diagonally downward with respect to the second main surface 106. That is, as shown in Figure 8B, the notch 111 may be a slope connecting the second main surface 106 of the semiconductor substrate 101 and the side surface 101a of the semiconductor substrate 101 (i.e., a slope that slopes diagonally downward from the second main surface 106 toward the side surface 101a).

[0065] Figure 9A corresponds to Figure 4 and is a cross-sectional view of the wafer when a step cut is used. Figure 9B is a cross-sectional view of the semiconductor device in this case. As shown in Figure 9B, the notch 111 may be a step having a side surface and a bottom surface. The side surface of the notch 111 may be formed substantially perpendicular to the second main surface 106. The bottom surface of the notch 111 may be formed substantially parallel to the second main surface 106.

[0066] Thus, in this embodiment, the notch 111 is a concept that includes a step (for example, Figure 9B), a recess (for example, Figures 7, 8B, and 9B), or a slope (for example, Figure 8B) formed in the outer peripheral region. In other words, the notch 111 has a cross-sectional shape of an arc, a straight line (specifically, a straight line extending in a direction intersecting the second main surface 106), or an L-shaped cross-section. The notch 111 may also have a cross-sectional shape composed of one or more straight lines and one or more arcs.

[0067] The notch 111 is formed to surround the entire periphery of the second electrode 104 in a plan view. In other words, the notch 111 is formed on the entire periphery (the entire peripheral area) of the second main surface 106 side of the semiconductor substrate 101. Here, the peripheral region and the notch 111 correspond to the removal region 109 in the manufacturing process. That is, the notch 111 is formed by the remainder of the removal region 109.

[0068] The notch 111 forms a continuous groove shape with the end face of the second electrode 104. In other words, the surface of the notch 111 is formed continuously with the end face of the second electrode 104. The notch 111 also has a vertical surface portion 111a perpendicular to the second main surface 106 of the semiconductor substrate 101, and a connecting portion 111b that connects the vertical surface portion 111a to the side surface 101a of the semiconductor substrate 101.

[0069] In other words, the notch 111 has a first wall portion extending in the thickness direction of the semiconductor substrate 101, and a second wall portion extending in a direction perpendicular to the thickness direction (see Figures 7 to 9B). The second wall portion is a portion that extends along the first main surface 105 so as to face the first main surface 105 in a plan view. The second wall portion communicates with the side surface 101a of the semiconductor substrate 101 at a position spaced apart from the second main surface 106 side toward the first main surface 105 side. At least a part or all of the notch 111 (outer peripheral region) is formed in a location that does not overlap with the protective film 103 in a plan view.

[0070] Of course, as shown in Figure 10, the notch 111 (outer peripheral region) may be formed up to the region that overlaps with the protective film 103 in a plan view. In other words, the portion of the notch 111 (outer peripheral region) located on the inner side of the second main surface 106 may overlap with the protective film 103 in a plan view. Therefore, the notch 111 (outer peripheral region) only needs to be formed in a location where at least a part of it (the edge on the side surface 101a side of the semiconductor substrate 101) does not overlap with the protective film 103 in a plan view. This further reduces the effect of burrs.

[0071] The dimensions of the depth of the notch 111 and the thickness of the semiconductor substrate 101 shown in Figure 7 are the same as the dimensions of the depth d of the removal region 109 and the thickness t of the semiconductor substrate 101 shown in Figure 4. That is, the depth d of the notch 111 is 70% or less of the thickness t of the semiconductor substrate 101. If the semiconductor substrate 101 has an epitaxial layer, it is preferable that the depth d is such that it does not reach the epitaxial layer. In other words, it is preferable that the notch 111 is formed with a gap between it and the epitaxial layer on the second main surface 106 side.

[0072] The thickness t of the semiconductor substrate 101 may be, for example, 350 μm or less, 200 μm or less, 150 μm or less, or 100 μm or less. The depth d is preferably 5 μm or more. When the thickness of the second electrode 104 is 500 nm or more and 1500 nm or less, for example, the distance from the surface of the second electrode 104 to the bottom of the notch 111 (i.e., the sum of the thickness of the second electrode 104 and the depth d) may be 10 μm or more. The width W of the notch 111 may be smaller than the depth d. Of course, the width W may be the same as the depth d, or it may be larger than the depth d.

[0073] Figure 11 is a cross-sectional view showing a mounting structure (encapsulation structure) according to an embodiment. This mounting structure comprises the semiconductor device 20 described above and a substrate 113 made of a conductive material. The substrate 113 is made of a metal such as a copper frame. The second electrode 104 of the semiconductor device 20 is bonded to the substrate 113 via a bonding layer 112 made of a conductive material. Figure 11 shows an example in which solder is used as the conductive material for the bonding layer 112. Figure 12 shows an example in which a sintered metal layer such as an Ag sintered layer (silver sintered metal layer) is used as the conductive material for the bonding layer 112.

[0074] As shown in Figures 11 and 12, a notch 111 is formed at the outer peripheral edge of the second main surface 106 of the semiconductor device 20, so that a space S (gap) is formed between the semiconductor substrate 101 and the bonding layer 112 due to the notch 111. The first electrode 102 is electrically connected to a substrate (not shown) other than the substrate 113 by a conductive member 115 such as a bonding wire. The other substrate is made of a metal such as a copper frame that is electrically isolated from the substrate 113. The conductive member 115 connecting the first electrode 102 and the other substrate is not limited to a bonding wire, but may also be solder or a sintered metal layer.

[0075] In the examples shown in Figures 11 and 12, the semiconductor device 20, the bonding layer 112, and the conductive member 115 are sealed with a resin 114 as a sealing member. In this case, the resin 114 is filled into the space S formed by the notch 111. Since the resin 114 is fitted (engaged) into the notch 111, peeling of the resin 114 from the substrate 113 or the bonding layer 112 can be suppressed. This makes it possible to provide a highly reliable power semiconductor device.

[0076] The mounting structure may contain multiple fillers within the resin 114. In this case, the width W and depth d of the notch 111 are preferably larger than the average particle size of the fillers. This ensures that the resin 114 is reliably filled into the space S.

[0077] FIG. 13 is a plan view of a semiconductor device 20 when the semiconductor element is a transistor (MOSFET). As shown in FIG. 13, the semiconductor device 20 includes two first electrodes 102a, 102b and one second electrode 104. For example, the first electrode 102a is a gate electrode, and the first electrode 102b is a source electrode. In this case, the second electrode 104 is a drain electrode.

[0078] The broken line 122 shown in FIG. 13 indicates the position of the end of the notch 111 formed on the second main surface 106 side (the position corresponding to the vertical surface portion 111a in FIG. 7). For example, the plan view of the second main surface 106 side is the same as the example shown in FIG. 7, and even when the semiconductor element is a transistor, a notch 111 is formed in the outer peripheral region in the same manner as the example shown in FIG. 7.

[0079] Next, the detailed configuration of the semiconductor element will be described. FIG. 14 is a cross-sectional view of a semiconductor device 20 including a diode (SiC-SBD). In FIG. 14, the illustration of the protective film 103 is omitted. This semiconductor device 20 includes a semiconductor substrate 101, a first electrode 102, and a second electrode 104. The semiconductor substrate 101 consists of an n + -type SiC semiconductor substrate 201 and an n - -type SiC epitaxial layer 202. The impurity density of the semiconductor substrate 101 may be, for example, about 1×10 18 cm -3 ~ about 1×10 21 cm -3 . The impurity density of the SiC epitaxial layer 202 may be, for example, about 5×10 14 cm -3 ~ about 5×10 16 cm -3 .

[0080] The SiC epitaxial layer 202 may include a buffer layer disposed on the SiC semiconductor substrate 201 and a drift layer disposed on the buffer layer. The semiconductor device 20 includes a second electrode 104 as a cathode electrode formed so as to cover the entire area of the second main surface 106 ((000-1)C plane) of the semiconductor substrate 101.

[0081] The semiconductor device 20 includes a field insulating film 204 formed on the first main surface 105 ((0001)Si surface) of the semiconductor substrate 101. The field insulating film 204 may be made of SiO2 (silicon oxide). Of course, the field insulating film 204 may be made of other insulators such as silicon nitride (SiN). The semiconductor device 20 includes a first electrode 102 as an anode electrode formed on the field insulating film 204. The first electrode 102 is connected to the anode terminal.

[0082] The first electrode 102 has a laminated structure including a first electrode layer 205 and a second electrode layer 206 stacked in this order from the SiC epitaxial layer 202 side. The first electrode layer 205 is formed on the SiC epitaxial layer 202 and the field insulating film 204. For example, the first electrode layer 205 may contain at least one of aluminum, copper, an aluminum alloy, or a copper alloy. The first electrode layer 205 may contain at least one of an aluminum-silicon alloy, an aluminum-silicon-copper alloy, or an aluminum-copper alloy.

[0083] The second electrode layer 206 is formed on the first electrode layer 205. The second electrode layer 206 may have a single-layer structure including a nickel layer or a copper layer. The second electrode layer 206 may have a multilayer structure including a nickel layer and a copper layer. The second electrode layer 206 is harder than the first electrode layer 205.

[0084] The semiconductor device 20 includes a p-type JTE (Junction Termination Extension) structure 203 formed near the surface (surface layer) of the SiC epitaxial layer 202 so as to be in contact with the first electrode layer 205 of the first electrode 102.

[0085] Figure 15 is a cross-sectional view of a semiconductor device 20 including a transistor (SiC-MOSFET). In Figure 15, the protective film 103 is not shown. This semiconductor device 20 includes a semiconductor substrate 101, a first electrode 102, and a second electrode 104.

[0086] In this form, the semiconductor substrate 101 is n + The semiconductor substrate 101 has a laminated structure including an n-type SiC semiconductor substrate 301 and an n-type SiC epitaxial layer 302. The second main surface 106 of the semiconductor substrate 101 is formed by the SiC semiconductor substrate 301. The first main surface 105 of the semiconductor substrate 101 is formed by the SiC epitaxial layer 302. The second main surface 106 of the semiconductor substrate 101 may be a ground surface.

[0087] The n-type impurity concentration in the SiC epitaxial layer 302 is less than or equal to the n-type impurity concentration in the SiC semiconductor substrate 301. The n-type impurity concentration in the SiC epitaxial layer 302 is 1.0 × 10⁻⁶ 15 cm -3 The above 1.0 × 10 18 cm -3 The following configuration may also be used: The SiC semiconductor substrate 301 is formed as the drain region of the MISFET. The SiC epitaxial layer 302 is formed as the drift region of the MISFET.

[0088] In this embodiment, the SiC epitaxial layer 302 has multiple regions having different n-type impurity concentrations along the direction normal to the first main surface 105 of the semiconductor substrate 101. More specifically, the SiC epitaxial layer 302 includes a high-concentration region 302a having a relatively high n-type impurity concentration, and a low-concentration region 302b having a lower n-type impurity concentration than the high-concentration region 302a.

[0089] The high-concentration region 302a is formed in the region on the first main surface 105 side. The low-concentration region 302b is formed in the region on the second main surface 106 side of the semiconductor substrate 101 relative to the high-concentration region 302a. The n-type impurity concentration in the high-concentration region 302a is 1 × 10⁻⁶ 16 cm -3 The above 1 x 10 18 cm -3 The following may also apply: The n-type impurity concentration in the low-concentration region 302b is 1 × 10⁻⁶. 15 cm -3 The above 1 x 10 16 cm -3 The following is also acceptable.

[0090] The semiconductor device 20 includes a second electrode 104 as a drain electrode connected to the second main surface 106 of the semiconductor substrate 101. The second electrode 104 may include at least one of a Ti (titanium) layer, a Ni (nickel) layer, an Au (gold) layer, or an Ag (silver) layer. The second electrode 104 may have a four-layer structure including a Ti layer, a Ni layer, an Au layer, and an Ag layer stacked in this order from the second main surface 106 of the semiconductor substrate 101. The second electrode 104 may have a four-layer structure including a Ti layer, an Al (aluminum)Cu (alloy of Al and Cu) layer, a Ni layer, and an Au layer stacked in this order from the second main surface 106 of the semiconductor substrate 101.

[0091] The second electrode 104 may have a four-layer structure including a Ti layer, an AlSi (silicon)Cu (alloy of Al, Si, and Cu) layer, a Ni layer, and an Au layer, stacked in this order from the second main surface 106 of the semiconductor substrate 101. The second electrode 104 may have a TiN (titanium nitride) layer instead of the Ti layer, or a stacked structure including a Ti layer and a TiN layer.

[0092] The semiconductor device 20 includes a p-type body region 303 formed on the surface layer of the first main surface 105 of the semiconductor substrate 101. The p-type impurity concentration in the body region 303 is 1 × 10⁻⁶ 17 cm -3 The above 1 x 10 20 cm -3 The following is also acceptable.

[0093] The semiconductor device 20 includes a plurality of gate trenches 304 formed on the surface layer of the first main surface 105 of the semiconductor substrate 101. The plurality of gate trenches 304 are formed in a stripe pattern in a plan view. Each gate trench 304 penetrates the body region 303 and reaches the SiC epitaxial layer 302.

[0094] The semiconductor device 20 includes a gate insulating layer 305 and a gate electrode layer 306 formed within each gate trench 304. The gate insulating layer 305 contains silicon oxide. The gate insulating layer 305 may also contain other insulating films such as silicon nitride. The gate electrode layer 306 is embedded in the gate trench 304, sandwiching the gate insulating layer 305. The gate electrode layer 306 may contain conductive polysilicon. Instead of conductive polysilicon, the gate electrode layer 306 may contain at least one of tungsten, aluminum, copper, aluminum alloys, and copper alloys.

[0095] The semiconductor device 20 includes a plurality of source trenches 307 formed on the first main surface 105 of the semiconductor substrate 101. Each source trench 307 is formed in the region between two adjacent gate trenches 304. The plurality of source trenches 307 are formed in a stripe pattern in plan view. Each source trench 307 penetrates the body region 303 and reaches the SiC epitaxial layer 302.

[0096] The semiconductor device 20 includes a source insulating layer 308 and a source electrode layer 309 formed within each source trench 307. The source insulating layer 308 may contain silicon oxide. The source electrode layer 309 is embedded in the source trench 307, sandwiching the source insulating layer 308. The source electrode layer 309 may contain the same conductive material as the gate electrode layer 306. The source electrode layer 309 may contain conductive polysilicon. Instead of conductive polysilicon, the source electrode layer 309 may contain at least one of tungsten, aluminum, copper, aluminum alloy, or copper alloy.

[0097] The semiconductor device 20 has multiple n formed on the surface layer of the first main surface 105 of the semiconductor substrate 101 +The structure includes a set of source regions 310. Specifically, the multiple source regions 310 are formed in the surface area of ​​the body region 303 along the gate trench 304. The multiple source regions 310 are formed in a striped pattern in plan view. Each source region 310 is exposed from the side walls of the gate trench 304 and the side walls of the source trench 307.

[0098] The semiconductor device 20 has multiple p formed on the surface layer of the first main surface 105 of the semiconductor substrate 101. + The semiconductor device includes a p-type contact region 311. Multiple contact regions 311 are formed along the sidewalls of each source trench 307. The p-type impurity concentration in the contact region 311 is greater than the p-type impurity concentration in the body region 303. The semiconductor device 20 includes a plurality of p-type deep well regions 312 formed on the surface layer of the first main surface 105 of the semiconductor substrate 101. Each deep well region 312 covers each source trench 307, sandwiching each contact region 311.

[0099] The semiconductor device 20 includes an interlayer insulating layer 313 formed on the first main surface 105 of the semiconductor substrate 101. The interlayer insulating layer 313 may contain silicon oxide or silicon nitride. The interlayer insulating layer 313 may also contain PSG (Phosphor Silicate Glass) and / or BPSG (Boron Phosphor Silicate Glass) as an example of silicon oxide.

[0100] The semiconductor device 20 includes a first electrode 102 as a source electrode formed on an interlayer insulating layer 313. The first electrode 102 has a laminated structure including a first electrode layer 316, a second electrode layer 317, and a third electrode layer 318, which are stacked in this order from the first main surface 105 side of the semiconductor substrate 101. The first electrode layer 316 may have a single-layer structure including a titanium layer or a titanium nitride layer. The first electrode layer 316 may have a laminated structure including a titanium layer and a titanium nitride layer, which are stacked in this order from the first main surface 105 side of the semiconductor substrate 101.

[0101] The thickness of the second electrode layer 317 is greater than the thickness of the first electrode layer 316. The second electrode layer 317 contains a conductive material having a resistance value lower than that of the first electrode layer 316. The second electrode layer 317 may contain at least one of aluminum, copper, an aluminum alloy, or a copper alloy. The second electrode layer 317 may contain at least one of an aluminum-silicon alloy, an aluminum-silicon-copper alloy, or an aluminum-copper alloy. In this embodiment, the second electrode layer 317 contains an aluminum-silicon-copper alloy.

[0102] The third electrode layer 318 may have a single-layer structure including a nickel layer or a copper layer. The third electrode layer 318 may have a multilayer structure including a nickel layer and a copper layer.

[0103] Modifications of this embodiment are described below. In the above description, an example was shown in which a SiC semiconductor substrate is used as the semiconductor substrate 101, but a semiconductor substrate made of another wide-bandgap semiconductor such as GaN may be used as the semiconductor substrate 101. A wide-bandgap semiconductor is a semiconductor that has a bandgap that exceeds the bandgap of silicon. Of course, the semiconductor substrate 101 may be made of a Si semiconductor substrate. When a semiconductor substrate 101 made of a Si semiconductor substrate is used, IGBTs may be formed on the semiconductor substrate 101.

[0104] Figure 16 is a cross-sectional view of a semiconductor device 20 including an IGBT. In an IGBT, n - An element structure is formed on the first main surface 105 side of the silicon substrate 403 (semiconductor substrate 101), and a back surface structure is formed on the second main surface 106 side. On the surface layer of the back surface (second main surface), an n-type buffer layer 402 and p + A collector layer 401 of type n is formed. The buffer layer 402 has a higher n-type impurity concentration than the impurity concentration of the silicon substrate 403 and is formed on the surface layer of the back surface (second main surface).

[0105] The collector layer 401 is formed in the front layer portion of the back surface (second main surface) in the region on the back surface (second main surface) side relative to the buffer layer 402. The IGBT includes a trench gate 404, a gate oxide film 405, a p-type channel layer 406, an n-type emitter layer 407, an interlayer 408, a first electrode 102 as a surface metal electrode, and a second electrode 104 as a back surface metal electrode.

[0106] Figure 17 shows the configuration of a semiconductor device 20 including an IGBT. In this embodiment, the notch 111 is formed in the same manner as in the above embodiment. The collector layer 401 has a thickness of 0.3 μm or more and 1.5 μm or less. The notch 111 is formed to a position deeper than the interface between the collector layer 401 and the buffer layer 402.

[0107] The notch 111 may be formed deeper than the interface between the buffer layer 402 and the silicon substrate 403 so as to reach the drift region (silicon substrate 403). Alternatively, the notch 111 may be formed to an intermediate depth in the buffer layer 402 so as not to reach the interface between the buffer layer 402 and the silicon substrate 403. Other manufacturing methods and structures are the same as those for the SiC substrate described above.

[0108] The above description describes an example in which two dicing steps are performed, including a partial cut step and a full cut step. However, instead of the partial cut step, the removal region 109 may be formed by removing a portion of the second electrode 104 from the second main surface 106 side by a method other than the dicing step. For example, a portion of the second electrode 104 may be removed by etching or lift-off. In the case of the lift-off method, a second electrode 104 is formed that exposes the dicing line. Therefore, in this case, the step of forming the second electrode 104 includes the step of removing the second electrode 104 (i.e., part or all of the step of forming the removal region 109).

[0109] Although a method for manufacturing a semiconductor device and a semiconductor device according to one or more embodiments have been described above based on these embodiments, the present invention is not limited to these embodiments. Without departing from the spirit of the present invention, various modifications that can be conceived by those skilled in the art, as well as combinations of various components in different embodiments, are also included within the scope of the present invention.

[0110] In each of the above embodiments, various modifications, substitutions, additions, and omissions may be made to the claims or their equivalents. For example, in each of the above embodiments, the shapes and depths of grooves and notches were mainly described based on examples of semiconductor device manufacturing methods using SiC substrates, but the same applies to descriptions of semiconductor devices using silicon substrates such as IGBTs.

[0111] The following are examples of features extracted from the above-mentioned embodiments and accompanying drawings. The following examples of features are just a few examples and are not intended to limit the features that can be extracted from the above-mentioned embodiments and accompanying drawings.

[0112] [A1] A method for manufacturing a semiconductor device, comprising the steps of: forming a first electrode in each of a plurality of semiconductor device forming regions on the first main surface of a semiconductor substrate having a first main surface and a second main surface opposite to the first main surface, and forming a protective film that surrounds the first electrode in a plan view; forming a second electrode on the entire surface of the second main surface of the semiconductor substrate; holding the first main surface side of the semiconductor substrate with a holding member after the first electrode, the protective film and the second electrode have been formed; forming a removal region by removing a part of the second electrode from the second main surface side along a dicing street while the semiconductor substrate is held by the holding member, leaving a part of the semiconductor substrate intact; and cutting the semiconductor substrate in the removal region by blade dicing to separate the semiconductor substrate into a plurality of semiconductor devices.

[0113] [A2] The method for manufacturing a semiconductor device according to A1, wherein the semiconductor substrate is a SiC substrate.

[0114] [A3] The method for manufacturing a semiconductor device according to A2, wherein the first main surface consists of a silicon surface (0001) of a SiC single crystal, and the second main surface consists of a carbon surface (000-1) of a SiC single crystal.

[0115] [A4] A method for manufacturing a semiconductor device according to any one of A1 to A3, wherein the step of forming the removal region includes the step of forming the removal region by removing the second electrode along the dicing street by blade dicing.

[0116] [A5] The method for manufacturing a semiconductor device according to any one of A1 to A4, wherein the step of removing the second electrode does not use an ultrasonic blade.

[0117] [A6] The method for manufacturing a semiconductor device according to any one of A1 to A5, wherein the individualization step does not use an ultrasonic blade.

[0118] [A7] The method for manufacturing a semiconductor device according to any one of A1 to A6, wherein the layer thickness of the second electrode is 500 nm or more.

[0119] [A8] The method for manufacturing a semiconductor device according to any one of A1 to A7, wherein the second electrode has a laminated structure including a Ti layer, a Ni layer, and an Au layer stacked in this order from the semiconductor substrate (SiC substrate) side.

[0120] [A9] The method for manufacturing a semiconductor device according to any one of A1 to A7, wherein the second electrode has a laminated structure including a NiSi layer, a Ti layer, and a Ni layer stacked in this order from the semiconductor substrate (SiC substrate) side.

[0121] [A10] The method for manufacturing a semiconductor device according to any one of A1 to A7, wherein the second electrode has a laminated structure including a Ni layer, a Ti layer, and a Ni layer stacked in this order from the semiconductor substrate (SiC substrate) side.

[0122] [A11] The method for manufacturing a semiconductor device according to any one of A1 to A7, wherein the second electrode has a laminated structure including a Ni layer, a Ti layer, and a NiV layer stacked in this order from the semiconductor substrate (SiC substrate) side.

[0123] [A12] The method for manufacturing a semiconductor device according to any one of A8 to A11, wherein the second electrode is configured such that the total thickness of the Ni or nickel alloy layers in the stacked structure is 500 nm or more.

[0124] [A13] The method for manufacturing a semiconductor device according to any one of A8 to A11, wherein the second electrode is configured such that the Ni layer alone is 500 nm or longer in the stacked structure.

[0125] [B1] A semiconductor device comprising a semiconductor substrate having a first main surface and a second main surface opposite to the first main surface, a first electrode provided on the first main surface of the semiconductor substrate, a protective film formed to surround the first electrode, and a second electrode provided on the second main surface of the semiconductor substrate, wherein, in a plan view, the outer edge of the second electrode is spaced apart from each of the multiple sides of the semiconductor substrate.

[0126] [B2] The semiconductor device according to B1, wherein the thickness of the second electrode is 500 nm or more and 1500 nm or less.

[0127] [B3] The semiconductor device according to B1 or B2, wherein a notch is formed in the semiconductor substrate in the peripheral region from the plurality of sides of the semiconductor substrate to the outer peripheral end of the second electrode.

[0128] [B4] The semiconductor device according to B3, wherein the notch forms a stepped portion having a side portion and a bottom portion.

[0129] [B5] The semiconductor device according to B3 or B4, wherein the notch forms a slope connecting the second main surface and the side surface.

[0130] [B6] The semiconductor device according to any one of B3 to B5, wherein the notch has a depth of 70% or less of the thickness of the semiconductor substrate.

[0131] [B7] The semiconductor device according to any one of B3 to B6, wherein the semiconductor substrate includes an epitaxial layer, and the notch has a depth that does not reach the epitaxial layer.

[0132] [B8] The semiconductor device according to any one of B3 to B7, wherein the depth of the notch is 5 μm or more.

[0133] [B9] A semiconductor device according to any one of B3 to B8, wherein the distance from the surface of the second electrode to the bottom of the notch is 10 μm or more.

[0134] [B10] The semiconductor device according to any one of B3 to B9, wherein the width of the notch is smaller than the depth of the notch.

[0135] [B11] The semiconductor device according to any one of B3 to B10, wherein the end face of the second electrode and the notch of the semiconductor substrate are formed in a continuous manner.

[0136] [C1] A mounting structure comprising a semiconductor device described in any one of B3 to B11, a conductive substrate, a sealing member for sealing the semiconductor device and the substrate, and a conductive bonding layer for joining the substrate and the second electrode of the semiconductor device, wherein the sealing member is filled in the notch.

[0137] [C2] The mounting structure according to C1, wherein the sealing member is made of a resin containing a filler.

[0138] [C3] The mounting structure according to C1 or C2, wherein the width and depth of the notch are greater than the average particle size of the filler.

[0139] [C4] The mounting structure according to any one of C1 to C3, wherein the bonding layer is either solder or a silver sintered metal layer.

[0140] [C5] The mounting structure according to any one of C1 to C4, wherein a space is formed between the bonding layer and the notch, and the space is filled with the resin.

[0141] [D1] A power semiconductor device comprising any one of B3 to B11, a conductive first substrate, a conductive second substrate electrically separated from the first substrate, a conductive bonding layer that bonds the first substrate and the second electrode of the semiconductor device, a conductive member that electrically connects the second substrate and the first electrode of the semiconductor device, and a sealing member that seals the semiconductor device, the first substrate, the second substrate, the bonding layer and the conductive member, wherein the sealing member is filled in the notch.

[0142] [D2] The power semiconductor device according to D1, wherein the sealing member is made of a resin containing a filler.

[0143] [D3] The power semiconductor device according to D1 or D2, wherein the width and depth of the notch are greater than the average particle size of the filler.

[0144] [D4] The power semiconductor device according to any one of D1 to D3, wherein the bonding layer is either solder or a silver sintered metal layer.

[0145] [D5] A power semiconductor device according to any one of D1 to D4, wherein a space is formed between the bonding layer and the notch, and the space is filled with the resin.

[0146] [D6] The conductive member is a bonding wire, as described in any one of D1 to D5, for the power semiconductor device.

[0147] [D7] The power semiconductor device according to any one of D1 to D5, wherein the conductive member is either solder or a silver sintered metal layer.

[0148] [D8] The power semiconductor device according to any one of D1 to D7, wherein either or both of the first substrate and the second substrate are made of a copper frame.

[0149] The alphanumeric characters in parentheses in the following [E1] to [E20] represent the corresponding components in the embodiments described above, but this is not intended to limit the scope of each item to the embodiments.

[0150] [E1] A method for manufacturing a semiconductor device (20), comprising the steps of: preparing a semiconductor substrate (101) having a first main surface (105) on one side and a second main surface (106) on the other side, and having a plurality of device formation regions (100) and a set of cutting lines (121) that demarcate the plurality of device formation regions (100); forming a first electrode (102) that covers the first main surface (105) on each of the device formation regions (100); forming a second electrode (104) that covers the second main surface (106); partially removing the second electrode (104) along the cutting lines (121) to expose the semiconductor substrate (101) and forming a removal portion (109) that extends along the cutting lines (121); and cutting the semiconductor substrate (101) along the removal portion (109).

[0151] [E2] The method for manufacturing a semiconductor device (20) according to E1, further comprising the step of forming a protective film (103) that covers the area around each first electrode (102) on the first main surface (105) of each apparatus forming region (100), prior to the step of forming the removal portion (109).

[0152] [E3] The method for manufacturing a semiconductor device (20) according to E2, wherein the step of forming the protective film (103) includes the step of forming the protective film (103) that exposes the planned cutting line (121), the step of forming the removal portion (109) includes the step of forming the removal portion (109) at a position that does not overlap the protective film (103) in a plan view, and the cutting step includes the step of cutting the semiconductor substrate (101) along the removal portion (109) located outside the protective film (103).

[0153] [E4] A method for manufacturing a semiconductor device (20) according to any one of E1 to E3, wherein the step of forming the removal portion (109) includes a step of forming the removal portion (109) that penetrates the second electrode (104) and reaches the middle of the thickness direction of the semiconductor substrate (101).

[0154] [E5] The method for manufacturing a semiconductor device (20) according to E4, wherein the cutting step includes cutting the semiconductor substrate (101) along the removal portion (109) such that a portion of the removal portion (109) remains as a notch (111).

[0155] [E6] A method for manufacturing a semiconductor device (20) according to any one of E1 to E5, wherein the step of forming the removal portion (109) includes a step of forming the removal portion (109) with a dicing blade (108).

[0156] [E7] A method for manufacturing a semiconductor device (20) according to any one of E1 to E6, wherein the cutting step includes a step of cutting the semiconductor substrate (101) with a dicing blade (110).

[0157] [E8] The method for manufacturing a semiconductor device (20) according to E7, wherein the cutting step includes cutting the semiconductor substrate (101) through the removal portion (109) with a dicing blade (108) having a thickness less than the width of the removal portion (109).

[0158] [E9] A method for manufacturing a semiconductor device (20) according to any one of E1 to E8, further comprising the step of supporting the semiconductor substrate (101) with a support member (107) from the first main surface (105) side prior to the step of forming the removal portion (109), wherein the step of forming the removal portion (109) includes the step of forming the removal portion (109) while the semiconductor substrate (101) is supported by the support member (107).

[0159] [E10] The semiconductor substrate (101) includes SiC, and the method for manufacturing a semiconductor device (20) according to any one of E1 to E9.

[0160] [E11] A semiconductor device (20) comprising: a semiconductor substrate (101) having a first main surface (105) on one side and a second main surface (106) on the other side; a first electrode (102) covering the first main surface (105); and a second electrode (104) covering the second main surface (106) spaced apart from the periphery of the second main surface (106) so as to expose the peripheral edge of the second main surface (106).

[0161] [E12] The semiconductor device (20) according to E11, further comprising: a first electrode (102) spaced apart from the periphery of the first main surface (105) and covering the first main surface (105); and a protective film (103) covering the periphery of the first main surface (105).

[0162] [E13] The semiconductor device (20) according to E12, wherein the protective film (103) covers the peripheral edge of the first main surface (105) at a distance from the periphery of the first main surface (105) in a plan view.

[0163] [E14] A semiconductor device (20) according to any one of E11 to E13, further comprising a notch (111) recessed toward the peripheral edge of the first main surface (105) at the peripheral edge of the second main surface (106).

[0164] [E15] The semiconductor device (20) described in E14, wherein the notch (111) is connected to the periphery of the second electrode (104).

[0165] [E16] The semiconductor device (20) according to E14 or E15, wherein the notch (111) is formed around the entire circumference of the peripheral edge of the second main surface (106) so as to surround the second electrode (104) in a plan view.

[0166] [E17] The semiconductor device (20) according to any one of E14 to E16, wherein the notch (111) has a first wall portion extending in the thickness direction of the semiconductor substrate (101), and a second wall portion extending from the first wall portion in a direction along the first main surface (105) so as to overlap the peripheral edge of the first main surface (105) in a plan view.

[0167] [E18] The peripheral edge of the first main surface (105) is angular, semiconductor device (20) as described in any one of E11 to E17.

[0168] [E19] The semiconductor substrate (101) is a semiconductor device (20) according to any one of E11 to E18, including SiC.

[0169] [E20] A sealing structure comprising: a conductive substrate (113); a semiconductor device (20) according to any one of E11 to E19, disposed on the substrate (113) in a position where the second electrode (104) faces the substrate (113); a conductive bonding material (112) interposed between the second electrode (104) and the substrate (113); and a sealing material (114) that seals the substrate (113), the semiconductor device (20), and the bonding material (112) so as to cover the portion of the second main surface (106) exposed from the second electrode (104).

[0170] The present invention has industrial applicability and can be applied to methods for manufacturing semiconductor devices and semiconductor devices, etc. Although embodiments of the present invention have been described in detail, these are merely specific examples used to clarify the technical content of the present invention, and the present invention should not be interpreted as being limited to these specific examples. The scope of the present invention is limited only by the appended claims. [Explanation of Symbols]

[0171] 10 Semiconductor wafers 20 Semiconductor equipment 100 Semiconductor device formation region 101 Semiconductor substrate 102 1st electrode 102a 1st electrode 102b 1st electrode 103 Protective film 104 2nd electrode 105 First Main Surface 106 Second Main Surface 107 Retaining member (support member) 108 First Blade (Blade) 110 Second Blade (Blade) 109 Removal area (removal part) 111 Notch 112 Bonding layer 113 Base material 114 Resin 121 Dicing Street

Claims

1. A step of preparing a semiconductor substrate having a first main surface on one side and a second main surface on the other side, and having a plurality of device formation regions and a set of cutting lines that demarcate the plurality of device formation regions, A step of forming a first electrode that covers the first main surface in each of the apparatus forming regions, A step of forming a second electrode that covers the second main surface, A step of partially removing the second electrode along the planned cutting line so as to expose the semiconductor substrate, thereby forming a removed portion extending along the planned cutting line, A method for manufacturing a semiconductor device, comprising the step of cutting the semiconductor substrate along the removal portion.

2. The method for manufacturing a semiconductor device according to claim 1, further comprising the step of forming a protective film that covers the periphery of each first electrode on the first main surface of each device formation region, prior to the step of forming the removal portion.

3. The step of forming the protective film includes the step of forming the protective film that exposes the planned cutting line, The step of forming the removal portion includes the step of forming the removal portion at a position that does not overlap with the protective film in a plan view, The method for manufacturing a semiconductor device according to claim 2, wherein the cutting step includes a step of cutting the semiconductor substrate along the removal portion located outside the protective film.

4. The method for manufacturing a semiconductor device according to any one of claims 1 to 3, wherein the step of forming the removal portion includes a step of forming the removal portion that penetrates the second electrode and reaches a portion in the thickness direction of the semiconductor substrate.

5. The method for manufacturing a semiconductor device according to claim 4, wherein the cutting step includes a step of cutting the semiconductor substrate along the removal portion such that a portion of the removal portion remains as a notch.

6. The method for manufacturing a semiconductor device according to any one of claims 1 to 5, wherein the step of forming the removal portion includes a step of forming the removal portion with a dicing blade.

7. The method for manufacturing a semiconductor device according to any one of claims 1 to 6, wherein the cutting step includes a step of cutting the semiconductor substrate with a dicing blade.

8. The method for manufacturing a semiconductor device according to claim 7, wherein the cutting step includes a step of cutting the semiconductor substrate through the removal portion with the dicing blade having a thickness less than the width of the removal portion.

9. Prior to the step of forming the removal portion, the process further includes supporting the semiconductor substrate from the first main surface side with a support member, The method for manufacturing a semiconductor device according to any one of claims 1 to 8, wherein the step of forming the removal portion includes the step of forming the removal portion while the semiconductor substrate is supported by the support member.

10. The method for manufacturing a semiconductor device according to any one of claims 1 to 9, wherein the semiconductor substrate includes SiC.

11. A semiconductor substrate having a first main surface on one side and a second main surface on the other side, A first electrode covering the first main surface, A semiconductor device comprising: a second electrode that covers the second main surface at a distance from the periphery of the second main surface so as to expose the periphery of the second main surface; and

12. The first electrode covers the first main surface, spaced apart from the periphery of the first main surface, The semiconductor device according to claim 11, further comprising a protective film covering the peripheral edge of the first main surface.

13. The semiconductor device according to claim 12, wherein the protective film, in a plan view, is spaced apart from the periphery of the first main surface and covers the peripheral edge of the first main surface.

14. The semiconductor device according to any one of claims 11 to 13, further comprising a notch recessed toward the peripheral edge of the first main surface at the peripheral edge of the second main surface.

15. The semiconductor device according to claim 14, wherein the notch is connected to the periphery of the second electrode.

16. The semiconductor device according to claim 14 or 15, wherein the notch is formed around the entire circumference of the peripheral edge of the second main surface so as to surround the second electrode in a plan view.

17. The semiconductor device according to any one of claims 14 to 16, wherein the notch has a first wall portion extending in the thickness direction of the semiconductor substrate, and a second wall portion extending from the first wall portion in a direction along the first main surface so as to overlap the peripheral edge of the first main surface in a plan view.

18. The semiconductor device according to any one of claims 11 to 17, wherein the periphery of the first main surface is angular.

19. The semiconductor device according to any one of claims 11 to 18, wherein the semiconductor substrate includes SiC.

20. A conductive substrate, A semiconductor device according to any one of claims 11 to 19, wherein the second electrode is disposed on the substrate in a position facing the substrate, A bonding material having conductivity and interposed between the second electrode and the substrate, A sealing structure comprising a sealing material that seals the substrate, the semiconductor device, and the bonding material so as to cover the portion of the second main surface exposed from the second electrode.

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