Mounting structure of structural components

Abstract

The present invention provides a mounting structure for structural components that can reduce the likelihood of incorrect mounting of structural components in a substrate processing apparatus. [Solution] When the structural component is attached to the substrate processing device, multiple divided parts are combined to function as a functional component. In the mounting structure of the structural component, the divided parts have mounting portions 41A and 42A. The multiple divided parts have different shapes from each other. The substrate processing device is provided with a first receiving portion 51 to which the mounting portions 41A and 42A are detachably attached. A first engaging projection 63A is formed on one of the mounting portions 41A and 42A and the first receiving portion 51. A first receiving recess 43A is formed on the other of the mounting portions 41A and 42A and the first receiving portion 51, which engages with the first engaging projection 63A when a specific divided part from the multiple divided parts is attached to the first receiving portion 51.

Description

Technical Field

[0001] The present invention relates to an attachment structure for structural components.

Background Art

[0002] A substrate processing apparatus has a polishing apparatus that performs chemical mechanical polishing (CMP) on a substrate (see, for example, Patent Document 1). The polishing apparatus may include a plurality of polishing units for miniaturization of the apparatus and improvement of throughput.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When assembling the polishing units for maintenance work or the like, there is a possibility of misidentifying the structural components of the plurality of polishing units. For example, it is conceivable to attach the structural components of the first polishing unit and the structural components of the second polishing unit to the polishing unit in an incorrect combination. When the structural components are incorrectly attached, interference between the components may occur.

[0005] An aspect of the present invention aims to provide an attachment structure for structural components that can make it difficult to cause misattachment of the structural components in a substrate processing apparatus.

Means for Solving the Problems

[0006] A mounting structure for a structural component according to Embodiment 1 of the present invention is a mounting structure for a structural component that functions as a functional component when mounted on a substrate processing apparatus, wherein the divided body has a mounting portion, the divided body has a different shape from the others, the substrate processing apparatus is provided with a receiving portion to which the mounting portion is detachably attached, a protrusion is formed on one of the mounting portion and the receiving portion, and a recess is formed on the other of the mounting portion and the receiving portion that engages with the protrusion when a specific divided body from the multiple divided body is attached to the receiving portion.

[0007] The mounting structure for structural components according to aspect 2 of the present invention is the mounting structure for structural components described in aspect 1, wherein a plurality of mounting parts are attached to at least one of the receiving parts.

[0008] The mounting structure for a structural component according to embodiment 3 of the present invention is the mounting structure for a structural component according to embodiment 1 or 2, wherein the direction of protrusion of the convex portion is perpendicular to the mounting direction of the mounting portion.

[0009] A mounting structure for a structural component according to aspect 4 of the present invention is a mounting structure for a structural component according to any one of aspects 1 to 3, wherein the receiving portion has a main portion having a main surface along the mounting direction of the mounting portion, and a restricting projection that protrudes from the main surface and restricts the movement of the mounting portion in the mounting direction.

[0010] The mounting structure for a structural component according to aspect 5 of the present invention is a mounting structure for a structural component according to any one of aspects 1 to 4, wherein at least one of the mounting portion and the receiving portion is a transparent member formed to be transparent in at least a part thereof, and the convex portion and the concave portion are visible through the transparent member when the mounting portion is attached to the receiving portion.

[0011] The mounting structure for structural components according to aspect 6 of the present invention is a mounting structure for structural components according to any one of aspects 1 to 5, wherein the number of divided bodies is n, n setting locations for forming the protrusions are formed in the receiving portion, and the protrusions are formed in at least one of the setting locations.

[0012] The mounting structure for a structural component according to aspect 7 of the present invention is the mounting structure for a structural component according to aspect 6, wherein the protrusion is formed by the head portion of a fastener having a head portion and a screw shaft, and the setting location is a screw hole into which the screw shaft is screwed.

[0013] The mounting structure for a structural component according to aspect 8 of the present invention is a mounting structure for a structural component described in any one of aspects 1 to 7, wherein identification information is formed on at least one of the mounting portion and the receiving portion.

[0014] The mounting structure for a structural component according to aspect 9 of the present invention is a mounting structure for a structural component according to any one of aspects 1 to 8, wherein the substrate processing apparatus comprises a table that supports a substrate to be processed by the substrate processing apparatus, and the structural component is a cylindrical cover surrounding the table.

[0015] The mounting structure for a structural component according to aspect 10 of the present invention is the mounting structure for a structural component described in aspect 9, wherein at least a portion of the surface of the structural component is water-repellent, hydrophobic, or hydrophilic.

[0016] The mounting structure for a structural component according to aspect 11 of the present invention is a mounting structure for a structural component described in any one of aspects 1 to 10, wherein the recess is U-shaped or C-shaped. [Effects of the Invention]

[0017] One aspect of the present invention provides a mounting structure for structural components that can reduce the likelihood of incorrect mounting of structural components in a substrate processing apparatus. [Brief explanation of the drawing]

[0018] [Figure 1] This is a plan view of a substrate processing apparatus that uses the mounting structure for structural components according to the embodiment. [Figure 2] This is a schematic perspective view of the polishing unit. [Figure 3]It is a configuration diagram of a polishing unit. [Figure 4] It is a perspective view of the polishing unit. [Figure 5] It is an exploded perspective view of the polishing unit. [Figure 6] It is a perspective view of the table cover. [Figure 7] It is a perspective view of the table cover. [Figure 8] It is a plan view of the table cover and the receiving part. [Figure 9] It is a plan view of the table cover and the receiving part. [Figure 10] It is a perspective view of the table cover. [Figure 11] It is a perspective view of the table cover. [Figure 12] It is a perspective view of the receiving part. [Figure 13] It is a perspective view of the receiving part. [Figure 14] It is a perspective view of the table cover and the receiving part seen from the inside. [Figure 15] It is a perspective view of the table cover and the receiving part seen from the inside. [Figure 16] It is a perspective view of the table cover and the receiving part seen from the inside. [Figure 17] It is a perspective view of the table cover and the receiving part seen from the inside. [Figure 18] It is a perspective view showing the mounting method of the table cover. [Figure 19] It is a side view showing the mounting method of the table cover. [Figure 20] It is a perspective view of the table cover and the receiving part. [Figure 21] It is a perspective view of the table cover and the receiving part. [Figure 22] It is a plan view of a modified example of the table cover and the receiving part. [Figure 23] It is a plan view of a modified example of the table cover and the receiving part.

Embodiments for Carrying Out the Invention

[0019] The mounting structure for structural components according to the embodiment of the present invention will be described below with reference to the drawings.

[0020] Figure 1 is a plan view of a substrate processing apparatus using the mounting structure for structural components according to the embodiment. Figure 2 is a schematic perspective view of the polishing unit. Figure 3 is a configuration diagram of the polishing unit.

[0021] [Substrate processing equipment] As shown in Figure 1, the substrate processing apparatus 100 comprises a housing 1, a load / unload unit 2, a polishing unit 3, a cleaning unit 4, and a control unit 5. Housing 1 encloses the polishing section 3, the cleaning section 4, the control section 5, etc. The internal space of housing 1 is partitioned by partition walls 1a and 1b.

[0022] The load / unload section 2 is equipped with multiple front load sections 20. Each front load section 20 is equipped with a wafer cassette for storing a large number of wafers (substrates). A travel mechanism 21 is laid out in the load / unload section 2 along the arrangement of the front load sections 20. Two transport robots (loaders) 22 are mounted on the travel mechanism 21. The transport robots 22 can access the wafer cassettes mounted on the front load sections 20 by moving along the travel mechanism 21.

[0023] The polishing unit 3 performs polishing (planarization) of the wafer. The polishing unit 3 comprises a first polishing unit 3A, a second polishing unit 3B, a third polishing unit 3C, and a fourth polishing unit 3D. The first polishing unit 3A, the second polishing unit 3B, the third polishing unit 3C, and the fourth polishing unit 3D are arranged along the longitudinal direction of the substrate processing apparatus 100.

[0024] The first polishing unit 3A comprises a polishing table 30A, a top ring 31A, a polishing fluid supply nozzle 32A, a dresser 33A, an atomizer 34A, and a table cover 35A (see Figures 3 and 4). A polishing pad 10A having a polishing surface is mounted on the polishing table 30A. The top ring 31A polishes the wafer by pressing it against the polishing pad 10A on the polishing table 30A. The polishing fluid supply nozzle 32A supplies polishing fluid and dressing fluid (e.g., pure water) to the polishing pad 10A. The dresser 33A dresses the polishing surface of the polishing pad 10A. The atomizer 34A sprays a mixed fluid of liquid (e.g., pure water) and gas (e.g., nitrogen gas) or liquid (e.g., pure water) in a mist onto the polishing surface.

[0025] The second polishing unit 3B includes a polishing table 30B to which a polishing pad 10A is attached, a top ring 31B, a polishing fluid supply nozzle 32B, a dresser 33B, an atomizer 34B, and a table cover 35B (see Figure 4). The third polishing unit 3C includes a polishing table 30C to which a polishing pad 10A is attached, a top ring 31C, a polishing fluid supply nozzle 32C, a dresser 33C, an atomizer 34C, and a table cover 35A (see Figure 4). The fourth polishing unit 3D includes a polishing table 30D to which a polishing pad 10A is attached, a top ring 31D, a polishing fluid supply nozzle 32D, a dresser 33D, an atomizer 34D, and a table cover 35B (see Figure 4).

[0026] The polishing tables 30A, 30B, 30C, and 30D are provided on the mounting surface 36 (see Figure 4). The polishing tables 30A, 30B, 30C, and 30D are examples of tables that support wafers. The table covers 35A and 35B are covers that surround the polishing tables.

[0027] As shown in Figures 2 and 3, the polishing table 30A rotates around its axis. The wafer W is held on the lower surface of the top ring 31A. During polishing, polishing fluid is supplied from the polishing fluid supply nozzle 32A to the polishing surface of the polishing pad 10A. The wafer W is pressed against the polishing surface of the polishing pad 10A by the top ring 31A and polished.

[0028] As shown in Figure 1, the first linear transporter 6 is positioned adjacent to the first polishing unit 3A and the second polishing unit 3B. The first linear transporter 6 transports wafers between the first transport position TP1, the second transport position TP2, the third transport position TP3, and the fourth transport position TP4. A temporary storage table 180 is provided near the first linear transporter 6.

[0029] A second linear transporter 7 is positioned adjacent to the third polishing unit 3C and the fourth polishing unit 3D. The second linear transporter 7 transports wafers between the fifth transport position TP5, the sixth transport position TP6, and the seventh transport position TP7.

[0030] A lifter 11 is positioned at the first transport position TP1 to receive wafers from the transport robot 22. The lifter 11 transfers the wafer from the transport robot 22 to the first linear transporter 6. The swing transporter 12 transfers the wafer from the first linear transporter 6 to the second linear transporter 7. The wafer is then transported by the second linear transporter 7 to at least one of the third polishing unit 3C and the fourth polishing unit 3D. The wafer polished in the polishing unit 3 is then transported to the cleaning unit 4 via the swing transporter 12.

[0031] The washing section 4 is divided into a first washing chamber 190, a first transport chamber 191, a second washing chamber 192, a second transport chamber 193, and a drying chamber 194. The first washing chamber 190 is equipped with a primary washing module 201. The first transport chamber 191 is equipped with a first transport robot 209. The second washing chamber 192 is equipped with a secondary washing module 202. The second transport chamber 193 is equipped with a second transport robot 210. The drying chamber 194 is equipped with a drying module 205.

[0032] The first transport robot 209 transports the wafer W between the temporary placement table 180, the primary cleaning module 201, and the secondary cleaning module 202. The second transport robot 210 transports the wafer W between the secondary cleaning module 202 and the drying module 205. The control unit 5 controls the processing operation of the wafer W.

[0033] [Mounting structure for structural components] Figure 4 is a perspective view of the first and second polishing units. Figure 5 is an exploded perspective view of the first and second polishing units. Figures 6 and 7 are perspective views of the table cover. Figure 8 is a plan view of the table cover and support section. Figure 9 is a plan view of the table cover and support section. Figures 10 and 11 are perspective views of the table cover. Figures 12 and 13 are perspective views of the support section. Figures 14 to 17 are perspective views of the table cover and support section viewed from the inside.

[0034] As shown in Figure 4, the table cover 35A of the first polishing unit 3A is formed in a cylindrical shape. The table cover 35A is positioned to surround the polishing table 30A. The table cover 35A is positioned concentrically with the polishing table 30A. The table cover 35A can receive splashes of liquid (polishing liquid, dressing liquid, etc.) from the polishing table 30A.

[0035] The table cover 35B of the second polishing unit 3B is formed in a cylindrical shape. The table cover 35B is positioned to surround the polishing table 30B. The table cover 35B is positioned concentrically with the polishing table 30B. The table cover 35B can receive splashes of liquid (polishing liquid, dressing liquid, etc.) from the polishing table 30B.

[0036] At least a portion of the surface of the table covers 35A and 35B may be water-repellent, hydrophobic, or hydrophilic. To impart surface properties such as water repellency, hydrophobicity, or hydrophilicity to the table covers 35A and 35B, the table covers 35A and 35B can be manufactured using materials that possess those properties. The surface properties of the table covers 35A and 35B can be selected according to the usage environment.

[0037] If the surface of table covers 35A and 35B is water-repellent or hydrophobic, dirt will be less likely to adhere to them. Therefore, the cleanliness of table covers 35A and 35B can be improved. If the surface of table covers 35A and 35B is hydrophilic, splashing of liquid from the polishing table will be less likely to occur. In this way, the functionality of table covers 35A and 35B can be enhanced by their surface properties.

[0038] As shown in Figure 5, the table cover 35A can be divided into a first segment 37A and a second segment 37B. When the table cover 35A is attached to the substrate processing apparatus, the first segment 37A and the second segment 37B are combined to function as a functional component. The first segment 37A and the second segment 37B are each formed in a semi-cylindrical shape. The first segment 37A and the second segment 37B are combined with their inner circumferences facing each other. The first segment 37A and the second segment 37B can be collectively referred to as "segments 37A, 37B". C1 is the central axis of the table cover 35A.

[0039] The table cover 35B can be divided into a third segment 37C and a fourth segment 37D. When the table cover 35B is attached to the substrate processing apparatus, the third segment 37C and the fourth segment 37D are combined to function as a functional component. The third segment 37C and the fourth segment 37D are each formed in a semi-cylindrical shape. The third segment 37C and the fourth segment 37D are combined with their inner circumferences facing each other. The third segment 37C and the fourth segment 37D can be collectively referred to as "segments 37C, 37D". C2 is the central axis of the table cover 35B.

[0040] As shown in Figure 6, a rectangular concave first notch 38A is formed on the upper edge of the first segment 37A of the table cover 35A. A rectangular concave second notch 38B is formed on the upper edge of the second segment 37B. The circumferential dimension of the second notch 38B is larger than the circumferential dimension of the first notch 38A.

[0041] As shown in Figure 7, a rectangular concave third notch 38C is formed on the upper edge of the third segment 37C of the table cover 35B. A rectangular concave fourth notch 38D is formed on the upper edge of the fourth segment 37D. The circumferential dimension of the fourth notch 38D is larger than the circumferential dimension of the third notch 38C.

[0042] Table covers 35A and 35B have equal diameters. Table covers 35A and 35B are examples of "structural components". The first segment 37A, the second segment 37B, the third segment 37C, and the fourth segment 37D are examples of "segments".

[0043] The circumferential position of the first notch 38A (see Figure 6) formed in the first segment 37A of the table cover 35A is different from the circumferential position of the third notch 38C (see Figure 7) formed in the third segment 37C of the table cover 35B. The circumferential position of the second notch 38B (see Figure 6) formed in the second segment 37B of the table cover 35A is different from the circumferential position of the fourth notch 38D (see Figure 7) formed in the fourth segment 37D of the table cover 35B. Thus, the four segments 37A to 37D differ in the size or position of their notches. Therefore, the shapes of the four segments 37A to 37D are different from each other.

[0044] As shown in Figure 5, the direction in which polishing tables 30A and 30B are aligned is defined as the X direction. One direction in the X direction (the direction from polishing table 30A towards polishing table 30B) is the +X side. The direction opposite to the +X side is the -X side. The direction perpendicular to the X direction in a plane parallel to the surface to be installed 36 is defined as the Y direction. One direction in the Y direction is the +Y side. The direction opposite to the +Y side is the -Y side. The +Y side is the rear side of the substrate processing apparatus. The -Y side is the front side of the substrate processing apparatus. The Z direction is perpendicular to the X and Y directions. The Z direction is parallel to the central axes C1 and C2 of the table covers 35A and 35B. The Z direction is the vertical direction (height direction). The plane defined by the X and Y directions is the XY plane.

[0045] A symmetry axis A1, parallel to the Y direction, is defined between polishing table 30A and polishing table 30B. Polishing table 30A and polishing table 30B are positioned symmetrically with respect to the symmetry axis A1.

[0046] As shown in Figures 5 and 8, the first segment 37A of the table cover 35A is oriented so as to be convex in a direction that is inclined outward (-X side) toward the front (-Y side). The second segment 37B is oriented so as to be convex in a direction that is inclined inward (+X side) toward the rear (+Y side).

[0047] The third division 37C of the table cover 35B is oriented so as to be convex in a direction that is inclined outward (+X side) toward the front (-Y side). The fourth division 37D is oriented so as to be convex in a direction that is inclined inward (-X side) toward the rear (+Y side). "Outward" refers to the direction in which the polishing tables 30A and 30B move away from each other. "Inward" refers to the direction in which the polishing tables 30A and 30B move closer to each other.

[0048] The first division 37A of table cover 35A and the third division 37C of table cover 35B are convex in a direction that is inclined outward toward the front (-Y side). The first division 37A and the third division 37C are positioned symmetrically with respect to the axis of symmetry A1.

[0049] The second division 37B of table cover 35A and the fourth division 37D of table cover 35B are convex in a direction that inclines inward toward the rear (+Y side). The second division 37B and the fourth division 37D are positioned symmetrically with respect to the axis of symmetry A1.

[0050] As shown in Figure 8, the first divided body 37A comprises a main body portion 40A, a first mounting portion 41A, and a second mounting portion 41B. The main body portion 40A is formed in a semi-cylindrical shape. The central axis of the main body portion 40A is the central axis C1. The first mounting portion 41A is formed on the outer circumferential surface of the portion including one end of the main body portion 40A. The second mounting portion 41B is formed on the outer circumferential surface of the portion including the other end of the main body portion 40A.

[0051] The second divided body 37B comprises a main body portion 40B, a first mounting portion 42A, and a second mounting portion 42B. The main body portion 40B is formed in a semi-cylindrical shape. The central axis of the main body portion 40B is the central axis C1. The first mounting portion 42A is formed on the outer circumferential surface of the portion including one end of the main body portion 40B. The second mounting portion 42B is formed on the outer circumferential surface of the portion including the other end of the main body portion 40B.

[0052] As shown in Figures 9 and 10, the first mounting portion 41A protrudes radially outward from the outer circumferential surface of the main body portion 40A. The thickness of the first mounting portion 41A increases as it moves away from one end 40A1 of the main body portion 40A in the circumferential direction. The outer surface 41A1 of the first mounting portion 41A is a plane parallel to the tangent to the main body portion 40A at one end 40A1 and to the central axis of the main body portion 40A. The outer surface 41A1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40A at one end 40A1.

[0053] The first mounting portion 42A protrudes radially outward from the outer circumferential surface of the main body portion 40B. The thickness of the first mounting portion 42A increases as it moves away from one end 40B1 of the main body portion 40B in the circumferential direction. The outer surface 42A1 of the first mounting portion 42A is a plane parallel to the tangent to the main body portion 40B at one end 40B1 and to the central axis of the main body portion 40B. The outer surface 42A1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40B at one end 40B1.

[0054] As shown in Figure 10, the first mounting portion 41A and the first mounting portion 42A are rectangular in shape when viewed from the thickness direction of the main body portions 40A and 40B. The first mounting portion 41A and the first mounting portion 42A are identical in shape. The first mounting portion 41A and the first mounting portion 42A are at the same height. The first mounting portion 41A and the first mounting portion 42A are aligned in the circumferential direction of the main body portions 40A and 40B. The outer surface 41A1 of the first mounting portion 41A and the outer surface 42A1 of the first mounting portion 42A are flush. The first mounting portion 41A and the first mounting portion 42A can be collectively referred to as "mounting portion 41A, 42A".

[0055] As shown in Figure 8, the second mounting portion 41B protrudes radially outward from the outer circumferential surface of the main body portion 40A. The thickness of the second mounting portion 41B increases as it moves away from the other end of the main body portion 40A in the circumferential direction. The outer surface 41B1 of the second mounting portion 41B is a plane parallel to the tangent to the main body portion 40A at the other end and to the central axis of the main body portion 40A. The outer surface 41B1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40A at the other end.

[0056] The second mounting portion 42B protrudes radially outward from the outer circumferential surface of the main body portion 40B. The thickness of the second mounting portion 42B increases as it moves away from the other end of the main body portion 40B in the circumferential direction. The outer surface 42B1 of the second mounting portion 42B is a plane parallel to the tangent to the main body portion 40B at the other end and to the central axis of the main body portion 40B. The outer surface 42B1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40B at the other end.

[0057] The second mounting portions 41B and 42B are rectangular in shape when viewed from the thickness direction of the main body portions 40A and 40B. The second mounting portions 41B and 42B are aligned in the circumferential direction of the main body portions 40A and 40B. The outer surface 41B1 of the second mounting portion 41B and the outer surface 42B1 of the second mounting portion 42B are flush. The second mounting portions 41B and 42B can be collectively referred to as "mounting portions 41B and 42B".

[0058] As shown in Figure 11, a first receiving recess 43A (recess) is formed at one location on the outer surface 41A1, 42A1 of the mounting portions 41A, 42A. The first receiving recess 43A may be formed on the first mounting portion 41A or on the first mounting portion 42A. The first receiving recess 43A is formed to reach the lower edge of the mounting portions 41A, 42A. The first receiving recess 43A is formed to open on the outer and lower surfaces of the mounting portions 41A, 42A.

[0059] In the example shown in Figure 14, when viewed from the inside of the table cover, the first receiving recess 43A is formed in the left mounting portion (first mounting portion 42A) of the mounting portions 41A and 42A.

[0060] As shown in Figure 15, a second receiving recess 43B (recess) is formed at one location on the outer surface 41B1, 42B1 of the mounting portions 41B, 42B. The second receiving recess 43B may be formed on the second mounting portion 41B or on the second mounting portion 42B. The second receiving recess 43B is formed to reach the lower edge of the mounting portions 41B, 42B. The second receiving recess 43B is formed to open on the outer and lower surfaces of the mounting portions 41B, 42B.

[0061] The second receiving recess 43B is located in a different position from the first receiving recess 43A in the longitudinal direction (left-right direction in Figure 15) of the mounting portions 41B and 42B. In the example shown in Figure 15, when viewed from the inside of the table cover, the second receiving recess 43B is formed in the left mounting portion (second mounting portion 41B) of the mounting portions 41B and 42B. The second receiving recess 43B is located closer to the center compared to the first receiving recess 43A (see Figure 14).

[0062] As shown in Figure 8, the first polishing unit 3A comprises a first receiving portion 51 (receiving portion) and a second receiving portion 52 (receiving portion). The first receiving portion 51 and the second receiving portion 52 are provided on the mounting surface 36. The first receiving portion 51 and the second receiving portion 52 are in rotationally symmetrical positions (180° symmetrical positions) with respect to the central axis C1.

[0063] As shown in Figure 12, the first receiving portion 51 comprises a main portion 61, a regulating projection 62, and a first engaging projection 63A (projection). The main portion 61 is positioned perpendicular to the mounting surface 36. The main surface 61A of the main portion 61 is a plane parallel to the central axis of the main body portions 40A and 40B of the table cover 35A. The main surface 61A of the main portion 61 faces the outer surfaces 41A1 and 42A1 (see Figure 10) of the mounting portions 41A and 42A. The main portion 61 encloses the outer surfaces 41A1 and 42A1 of the mounting portions 41A and 42A1 when viewed from the thickness direction. The main portion 61 is formed in a rectangular shape with a long side that is aligned with the length direction of the outer surfaces 41A1 and 42A1 (tangential direction of the main body portions 40A and 40B).

[0064] As shown in Figures 12 and 13, multiple mounting holes 61a are formed on the main surface 61A of the main part 61. The mounting holes 61a are threaded holes with threads formed on their inner circumferential surface. The multiple mounting holes 61a are formed at different positions along the length of the main part 61. In this embodiment, there are four mounting holes 61a. The four mounting holes 61a are formed side by side with spacing between them along the length of the main part 61. The mounting holes 61a are examples of "setting locations".

[0065] As shown in Figure 13, the fastener 64 has a head portion 65 and a shaft portion 66 extending from the head portion 65. The shaft portion 66 is, for example, a screw shaft. The shaft portion 66 is inserted into the mounting hole 61a and is detachably screwed into the mounting hole 61a. The fastener 64 is, for example, a fastener attached to the mounting hole 61a by the screw of the shaft portion 66.

[0066] The fastener 64 is attached to one of the multiple mounting holes 61a. In the example shown in Figure 12, the fastener 64 is attached to the leftmost of the four mounting holes 61a. When the fastener 64 is attached to the mounting hole 61a, the head portion 65 becomes a first engaging projection 63A that protrudes inward (towards the polishing table) from the main surface 61A of the main portion 61. The direction of protrusion of the first engaging projection 63A is, for example, parallel to the XY plane and towards the polishing table.

[0067] As shown in Figure 14, the first engaging projection 63A is formed in a position that fits into the first receiving recess 43A (see Figure 11) formed in the mounting portions 41A and 42A of the table cover 35A. The first engaging projection 63A can be formed in a position that fits into the first receiving recess 43A by selecting the mounting hole 61a located opposite the first receiving recess 43A and attaching the fastener 64.

[0068] The restricting projection 62 is formed on the portion of the main part 61 that includes the lower edge. The restricting projection 62 protrudes inward (towards the polishing table) from the main surface 61A of the main part 61. The restricting projection 62 extends along the length of the main part 61. The restricting projection 62 can engage with the lower edges of the mounting parts 41A and 42A to restrict the downward movement of the mounting parts 41A and 42A.

[0069] As shown in Figure 15, the second receiving portion 52 comprises a main portion 61, a restricting projection 62, and a second engaging projection 63B (projection). The main surface 61A of the main portion 61 faces the outer surfaces 41B1 and 42B1 of the mounting portions 41B and 42B (see Figure 8). Common components with the first receiving portion 51 are denoted by the same reference numerals and their description is omitted.

[0070] The fastener 64 (see Figure 13) is attached to one of the multiple mounting holes 61a in the first receiving portion 51, but to a different mounting hole 61a from the one to which the fastener 64 is attached. In the example shown in Figure 15, the fastener 64 is attached to the second mounting hole 61a from the left among the four mounting holes 61a. The head portion 65 becomes a second engaging projection 63B that protrudes inward from the main surface 61A of the main portion 61. The second engaging projection 63B is formed in a position that fits into the second receiving recess 43B formed in the mounting portions 41B and 42B.

[0071] As shown in Figure 8, the third divided body 37C comprises a main body portion 40C, a first mounting portion 41C, and a second mounting portion 41D. The main body portion 40C is formed in a semi-cylindrical shape. The central axis of the main body portion 40C is the central axis C2. The first mounting portion 41C is formed on the outer circumferential surface of the portion including one end of the main body portion 40C. The second mounting portion 41D is formed on the outer circumferential surface of the portion including the other end of the main body portion 40C.

[0072] The fourth segment 37D comprises a main body 40D, a first mounting portion 42C, and a second mounting portion 42D. The main body 40D is formed in a semi-cylindrical shape. The central axis of the main body 40D is the central axis C2. The first mounting portion 42C is formed on the outer circumferential surface of the portion including one end of the main body 40D. The second mounting portion 42D is formed on the outer circumferential surface of the portion including the other end of the main body 40D.

[0073] The first mounting portion 41C protrudes radially outward from the outer circumferential surface of the main body portion 40C. The thickness of the first mounting portion 41C increases as it moves away from one end of the main body portion 40C in the circumferential direction. The outer surface 41C1 of the first mounting portion 41C is a plane parallel to the tangent to the main body portion 40C at one end and to the central axis of the main body portion 40C. The outer surface 41C1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40C at one end.

[0074] The first mounting portion 42C protrudes radially outward from the outer circumferential surface of the main body portion 40D. The thickness of the first mounting portion 42C increases as it moves away from one end of the main body portion 40D in the circumferential direction. The outer surface 42C1 of the first mounting portion 42C is a plane parallel to the tangent to the main body portion 40D at one end and to the central axis of the main body portion 40D. The outer surface 42C1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40D at one end.

[0075] The first mounting portion 41C and the first mounting portion 42C are rectangular in shape when viewed from the thickness direction of the main body portions 40C and 40D. The first mounting portion 41C and the first mounting portion 42C are identical in shape. The first mounting portion 41C and the first mounting portion 42C are at the same height. The first mounting portion 41C and the first mounting portion 42C are aligned in the circumferential direction of the main body portions 40C and 40D. The outer surface 41C1 of the first mounting portion 41C and the outer surface 42C1 of the first mounting portion 42C are flush. The first mounting portion 41C and the first mounting portion 42C can be collectively referred to as "mounting portion 41C, 42C".

[0076] The second mounting portion 41D protrudes radially outward from the outer circumferential surface of the main body portion 40C. The thickness of the second mounting portion 41D increases as it moves away from the other end of the main body portion 40C in the circumferential direction. The outer surface 41D1 of the second mounting portion 41D is a plane parallel to the tangent to the main body portion 40C at the other end and to the central axis of the main body portion 40C. The outer surface 41D1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40C at the other end.

[0077] The second mounting portion 42D protrudes radially outward from the outer circumferential surface of the main body portion 40D. The thickness of the second mounting portion 42D increases as it moves away from the other end of the main body portion 40D in the circumferential direction. The outer surface 42D1 of the second mounting portion 42D is a plane parallel to the tangent to the main body portion 40D at the other end and to the central axis of the main body portion 40D. The outer surface 42D1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40D at the other end.

[0078] The second mounting portion 41D and the second mounting portion 42D are rectangular in shape when viewed from the thickness direction of the main body portions 40C and 40D. The second mounting portion 41D and the second mounting portion 42D are aligned in the circumferential direction of the main body portions 40C and 40D. The outer surface 41D1 of the second mounting portion 41D and the outer surface 42D1 of the second mounting portion 42D are flush. The second mounting portion 41D and the second mounting portion 42D can be collectively referred to as "mounting portion 41D, 42D".

[0079] As shown in Figure 16, a third receiving recess 43C (recess) is formed at one location on the outer surface 41C1, 42C1 of the mounting portions 41C, 42C. The third receiving recess 43C may be formed on the first mounting portion 41C or on the first mounting portion 42C. The third receiving recess 43C is formed to reach the lower edge of the mounting portions 41C, 42C. The third receiving recess 43C is formed to open on the outer and lower surfaces of the mounting portions 41C, 42C.

[0080] The third receiving recess 43C is located in a position in the longitudinal direction (left-right direction in Figure 16) of the mounting portions 41C and 42C that is different from the first receiving recess 43A and the second receiving recess 43B. In the example shown in Figure 16, when viewed from the inside of the table cover, the third receiving recess 43C is formed in the right-hand mounting portion (first mounting portion 42C) of the mounting portions 41C and 42C.

[0081] As shown in Figure 17, a fourth receiving recess 43D (recess) is formed at one location on the outer surface 41D1, 42D1 of the mounting portions 41D, 42D. The fourth receiving recess 43D may be formed on the second mounting portion 41D or on the second mounting portion 42D. The fourth receiving recess 43D is formed to reach the lower edge of the mounting portions 41D, 42D. The fourth receiving recess 43D is formed to open on the outer and lower surfaces of the mounting portions 41D, 42D.

[0082] The fourth receiving recess 43D is located in a different position from the first to third receiving recesses 43A, 43B, and 43C in the longitudinal direction (left-right direction in Figure 17) of the mounting portions 41D and 42D. In the example shown in Figure 17, when viewed from the inside of the table cover, the third receiving recess 43C is formed on the right mounting portion (second mounting portion 41D) of the mounting portions 41D and 42D. The fourth receiving recess 43D is located closer to the center compared to the third receiving recess 43C (see Figure 16).

[0083] As shown in Figures 11, 14 to 17, the shapes of the receiving recesses 43A to 43D may be inverted U-shapes, C-shapes, semicircular shapes, rectangular shapes, etc. If the shape of the receiving recesses 43A to 43D is inverted U-shapes or C-shapes, the receiving recesses 43A to 43D can be formed by cutting using a rotary tool. Therefore, the receiving recesses 43A to 43D can be easily formed.

[0084] As shown in Figure 8, the second polishing unit 3B includes a third receiving portion 53 (receiving portion) and a fourth receiving portion 54 (receiving portion). The third receiving portion 53 and the fourth receiving portion 54 are provided on the mounting surface 36. The third receiving portion 53 and the fourth receiving portion 54 are in rotationally symmetrical positions (180° symmetrical positions) with respect to the central axis C2.

[0085] As shown in Figure 16, the third receiving portion 53 comprises a main portion 61, a regulating projection 62, and a third engaging projection 63C (projection). Components common to the first receiving portion 51 are denoted by the same reference numerals and their descriptions are omitted.

[0086] The main portion 61 is positioned perpendicular to the mounting surface 36. The main surface 61A of the main portion 61 is a plane parallel to the central axis of the main body portions 40C and 40D of the table cover 35A. The main surface 61A of the main portion 61 faces the outer surfaces 41C1 and 42C1 of the mounting portions 41C and 42C. The main portion 61 encloses the outer surfaces 41C1 and 42C1 of the mounting portions 41C and 42C1 when viewed from the thickness direction. The main portion 61 is formed in a rectangular shape with a long side that is aligned with the length direction of the outer surfaces 41C1 and 42C1 (tangential direction of the main body portions 40C and 40D).

[0087] The fastener 64 (see Figure 13) is attached to one of the multiple mounting holes 61a, different from the mounting holes 61a to which the fastener 64 is attached in the first receiving portion 51 and the second receiving portion 52. In the example shown in Figure 16, the fastener 64 is attached to the rightmost of the four mounting holes 61a. The head portion 65 of the fastener 64 is a third engaging projection 63C that protrudes inward from the main surface 61A of the main portion 61. The third engaging projection 63C is formed in a position that fits into the third receiving recess 43C formed in the mounting portions 41C and 42C of the table cover 35A.

[0088] As shown in Figure 17, the fourth receiving portion 54 comprises a main portion 61, a regulating projection 62, and a fourth engaging projection 63D (projection). The main surface 61A of the main portion 61 faces the outer surfaces 41D1 and 42D1 of the mounting portions 41D and 42D (see Figure 8). Common components with the first receiving portion 51 are denoted by the same reference numerals and their description is omitted.

[0089] The fastener 64 (see Figure 13) is attached to a different mounting hole 61a from the first receiving portion 51, the second receiving portion 52, and the third receiving portion 53, among the multiple mounting holes 61a to which the fastener 64 is attached. In the example shown in Figure 17, the fastener 64 is attached to the second mounting hole 61a from the right among the four mounting holes 61a. The head portion 65 becomes a fourth engaging projection 63D that protrudes inward from the main surface 61A of the main portion 61. The fourth engaging projection 63D is formed in a position that fits into the fourth receiving recess 43D formed in the mounting portions 41D and 42D.

[0090] As shown in FIGS. 14 to 17, the distances from the center in the length direction of the main part 61 to the first engaging convex part 63A, the second engaging convex part 63B, the third engaging convex part 63C, and the fourth engaging convex part 63D are different from each other. Let the distance between the center of the first engaging convex part 63A and the center in the length direction of the main part 61 be L1 (see FIG. 14). Let the distance between the center of the second engaging convex part 63B and the center in the length direction of the main part 61 be L2 (see FIG. 15). Let the distance between the center of the third engaging convex part 63C and the center in the length direction of the main part 61 be L3 (see FIG. 16). Let the distance between the center of the fourth engaging convex part 63D and the center in the length direction of the main part 61 be L4 (see FIG. 17). The distances L1 to L4 are different from each other. For example, the distances L1 to L4 have a relationship of L2 < L3 < L1 < L4.

[0091] Since the distances L1 to L4 are different from each other, if a split body is mistakenly used, it becomes difficult for the receiving concave part to engage with the engaging convex part. Therefore, it is possible to make it difficult to accidentally attach the table covers 35A and 35B incorrectly.

[0092] [Method of attaching structural parts] FIG. 18 is a perspective view showing a method of attaching a table cover. FIG. 19 is a side view showing a method of attaching a table cover. FIGS. 20 and 21 are perspective views of a table cover and a receiving part.

[0093] The method of attaching the table cover 35A will be described with reference to FIGS. 18 to 21. First, the method of attachment when the correct first split body 37A and second split body 37B are selected will be described.

[0094] As shown in FIGS. 18 and 19, the first split body 37A and the second split body 37B are moved downward toward the first receiving part 51 and the second receiving part 52 (see FIG. 8). The outer surfaces 41A1 and 42A1 of the attachment parts 41A and 42A face the main surface 61A of the main part 61 of the first receiving part 51.

[0095] As shown in Figure 20, the first engaging projection 63A is formed in a position that fits the first receiving recess 43A, so as the mounting portions 41A and 42A move downward, the first engaging projection 63A enters the first receiving recess 43A. Therefore, the downward movement of the mounting portions 41A and 42A is not hindered until it reaches the regulating projection 62. As shown in Figure 15, in the second receiving portion 52 as well, the second engaging projection 63B enters the second receiving recess 43B, so the downward movement of the mounting portions 41B and 42B is not hindered.

[0096] When the mounting portion reaches the regulating projection 62, the first segment 37A and the second segment 37B are positioned and attached to the first receiving portion 51 and the second receiving portion 52. The first segment 37A and the second segment 37B are combined to form the table cover 35A (see Figure 4).

[0097] Thus, when a specific segment (segment 37A, 37B) from among the multiple segments 37A to 37D is attached to the receiving parts 51, 52, the receiving recesses 43A, 43B engage with the engaging protrusions 63A, 63B, respectively. Therefore, segments 37A, 37B are attached in the correct position. The table cover 35B (see Figure 8) can also be attached to the substrate processing device in the same manner as the table cover 35A.

[0098] Next, we will explain the installation method when at least one of the first segment 37A and the second segment 37B is mistakenly replaced with the other segment. The following explanation will use the case where the other segment is used instead of the first segment 37A as an example.

[0099] As shown in Figure 21, in the other parts, which are different from the first part 37A, the receiving recess of the mounting portion is not formed in a position that fits the first engaging projection 63A. Therefore, the mounting portion hits the first engaging projection 63A before reaching the regulating projection 62 and is unable to move downward. As a result, this part cannot be attached to the first receiving portion 51. This allows the user to recognize that the part is incorrect.

[0100] [Effects of the mounting structure for structural components according to the embodiment] According to the mounting structure of the structural component of this embodiment, a first engaging projection 63A is formed on the first receiving portion 51. A second engaging projection 63B is formed on the second receiving portion 52. A first receiving recess 43A and a second receiving recess 43B are formed on the mounting portions of the divided bodies 37A and 37B. When the correct divided bodies (divided bodies 37A and 37B) are attached to the receiving portions 51 and 52, the first receiving recess 43A engages with the first engaging projection 63A. The second receiving recess 43B engages with the second engaging projection 63B. Therefore, the divided bodies 37A and 37B can be attached to the receiving portions 51 and 52. On the other hand, if the wrong divided body is used, the receiving recess will not engage with the engaging projection, and therefore the divided body cannot be attached to the receiving portion. Thus, it is possible to reduce the likelihood of incorrect installation of the table cover.

[0101] Since the multiple divided parts 37A to 37D have different shapes from each other, incorrect installation can easily lead to problems such as interference between parts. In contrast, the mounting structure for structural parts according to this embodiment makes it less likely for the table cover to be installed incorrectly, thus avoiding problems such as interference between parts.

[0102] As shown in Figure 8, two mounting parts 41A and 42A are attached to the first receiving part 51. Similarly, two mounting parts are attached to the second receiving part 52, the third receiving part 53, and the fourth receiving part 54, respectively. With this mounting structure, since multiple mounting parts are attached to a common receiving part, the structure can be simplified compared to the case where one mounting part is attached to one receiving part.

[0103] This mounting structure allows multiple sections to be attached to a common receiving part, ensuring that the mounting orientation of the sections is aligned and enabling the table cover to be assembled with precision. Furthermore, because multiple mounting parts are attached to a common receiving part, the structural strength of the receiving part is increased compared to the case where one mounting part is attached to one receiving part, allowing for stable attachment of the sections.

[0104] The first engaging projection 63A, the second engaging projection 63B, the third engaging projection 63C, and the fourth engaging projection 63D protrude inward (towards the polishing table) relative to the main surface 61A of the main part 61 (see Figure 12). The protruding direction of the engaging projections 63A to 63D is perpendicular to the mounting direction (downward) of the mounting parts of the divided bodies 37A and 37B. Therefore, compared to the case where the protruding direction of the engaging projections is the same as the mounting direction (up and down), the vertical dimensions of the engaging projections 63A to 63D can be reduced. Consequently, the height dimension of the mounting structure can be reduced. Thus, the height of the substrate processing apparatus can be reduced.

[0105] The first receiving portion 51 and the second receiving portion 52 each have a main portion 61 and a restricting projection 62. The main portion 61 can restrict the mounting portion from moving laterally (in the direction along the XY plane). The restricting projection 62 can restrict the mounting portion from moving in the mounting direction (downward). Therefore, the accuracy of the mounting position of the divided parts 37A and 37B relative to the first receiving portion 51 and the second receiving portion 52 can be improved.

[0106] As shown in Figure 8, there are four segmented bodies 37A to 37D that are attached to the substrate processing apparatus. As shown in Figures 14 to 17, four mounting holes 61a (setting locations) are formed in the main part 61 of the first receiving part 51. The engaging protrusions 63A to 63D are formed in one of the four mounting holes 61a. With this configuration, structural differences can be given to the four segmented bodies with a small number of engaging protrusions, thus simplifying the mounting structure of the table covers 35A and 35B.

[0107] As shown in Figure 12, the engaging projection (for example, the first engaging projection 63A) is formed by a fastener 64 having a shaft portion 66 (screw shaft) and a head portion 65. Therefore, the engaging projection can be formed simply by screwing the fastener 64 into the mounting hole 61a. Thus, the formation of the engaging projection is made easy.

[0108] As shown in Figure 4, in this embodiment, the structural components are table covers 35A and 35B. Therefore, the table covers 35A and 35B can be installed in the substrate processing apparatus without error. Thus, the wafer polishing process can proceed smoothly.

[0109] [Receiving part] (modified version) Figure 22 is a plan view of a modified example of the table cover and support section. As shown in Figure 22, identification information 70 is formed on the upper surface of the first mounting portion 41A of the first divided body 37A. The identification information 70 indicates, for example, that it is the first mounting portion 41A of the first divided body 37A. The identification information 70 means, for example, that this mounting portion is a mounting portion of the first divided body 37A and is located on the front side of the substrate processing apparatus.

[0110] The identification information 70 is formed, for example, by characters, symbols, figures, or a combination of two or more of these. The identification information 70 is formed by ink, relief, etc. The identification information 70 can be formed, for example, by printing.

[0111] Using the first segment 37A on which identification information 70 is formed makes it easier to confirm the installation position of the first segment 37A. Therefore, it is possible to reduce the likelihood of incorrect installation of the table covers 35A and 35B.

[0112] [Table cover] (variant) Figure 23 shows a modified version of the table cover and a plan view of the receiving portion. As shown in Figure 23, the divided parts 37C and 37D may be transparent members in which at least a portion is formed to be transparent. The divided parts being transparent members allow visible light to pass through from the inner surface to the outer surface. At least the mounting portions 41D and 42D of the divided parts 37C and 37D are made transparent.

[0113] If the divided parts 37C and 37D are transparent, the engaging projection and receiving recess can be visually inspected from the inside of the divided parts 37C and 37D through the divided parts 37C and 37D while the mounting parts 41D and 42D are attached to the receiving part 54. Therefore, it is possible to confirm whether the engaging projection and receiving recess are engaged. Thus, it is possible to easily confirm whether the divided parts 37C and 37D are successfully attached to the receiving part.

[0114] In the example shown in Figure 23, the divided parts 37C and 37D are transparent members, but at least a portion of at least one of the mounting portion and the receiving portion may be formed transparent. For example, the receiving portion may be a transparent member, and the convex and concave portions may be visible from the outer surface through the receiving portion. Alternatively, both the mounting portion and the receiving portion may be transparent members. The transparent member may be entirely transparent, but only a portion of it may be transparent as long as the convex and concave portions can be seen.

[0115] Although the present invention has been described above based on the best mode, the present invention is not limited to the best mode described above, and various modifications are possible without departing from the spirit of the invention. For example, in the example shown in Figure 8, the number of segments attached to the substrate processing apparatus is four, but the number of segments is not particularly limited as long as it is a number that can be easily mistaken for another. In the example shown in Figure 12, the number of segments is four, and the number of mounting holes 61a (setting locations) is also four. When the number of segments is n (where n is an integer of 2 or more), the number of setting locations formed in the receiving portion may be n or a number greater than n. In the example shown in Figure 12, the number of first engaging protrusions 63A formed in the first receiving portion 51 is one, but the number of engaging protrusions formed in a single receiving portion may be multiple. In the example shown in Figure 8, the table covers 35A and 35B are each divided into two parts, but the number of divisions of a single structural component is not limited to two. The number of divisions of a structural component can be any number greater than or equal to two. For example, the table cover may be divided into three parts.

[0116] In the example shown in Figure 8, two mounting parts 41A and 42A are attached to the first receiving part 51. Similarly, two mounting parts are attached to the second receiving part 52, the third receiving part 53, and the fourth receiving part 54, respectively. The number of mounting parts attached to a single receiving part is not particularly limited. The number of mounting parts attached to a single receiving part may be one or multiple (any number of two or more).

[0117] In the examples shown in Figures 6 and 7, the shapes of the four segments 37A to 37D are different from each other, but at least two of the segments may have different shapes from each other.

[0118] In the examples shown in Figures 11 and 12, an engaging projection is formed on the receiving portion of the mounting portion and a receiving recess is formed on the mounting portion. However, the opposite may also be true: a projection may be formed on the mounting portion and a recess on the receiving portion. That is, a projection may be formed on one of the mounting portion and the receiving portion, and a recess that engages with the projection may be formed on the other.

[0119] In the example shown in Figure 13, the fastener 64 is screwed into the mounting hole 61a to form the engaging projection, but the structure of the engaging projection is not particularly limited. For example, the engaging projection may be attached to the mounting hole by interlocking grooves. The engaging projection may also be attached to the main surface of the main part by the magnetic attraction force.

[0120] In the example shown in Figure 19, the mounting portions 41A and 42A are restricted from moving downward by contacting the restricting projection 62 when attached to the first receiving portion 51, but the receiving portion does not necessarily have to have a restricting projection. For example, if the downward movement of the mounting portions 41A and 42A is restricted by the upper end of the first receiving recess 43A engaging with the first engaging projection 63A, the mounting portions 41A and 42A can be stably attached to the first receiving portion 51 even if the main portion 61 does not have a restricting projection 62. [Explanation of Symbols]

[0121] 30A, 30B, 30C, 30D… Polishing table (table), 35A, 35B… Table cover (cover), 37A… First segment (segment), 37B… Second segment (segment), 37C… Third segment (segment), 37D… Fourth segment (segment), 41A… First mounting part (mounting part), 41B… Second mounting part (mounting part), 41C… First mounting part (mounting part), 41D… Second mounting part (mounting part), 42A… First mounting part (mounting part), 42B… Second mounting part (mounting part), 42C… First mounting part (mounting part), 42D… Second mounting part (mounting part), 43A… First receiving recess (recess), 43B… 2 receiving recesses (recesses), 43C...3rd receiving recess (recess), 43D...4th receiving recess (recess), 51...1st receiving part (receiving part), 52...2nd receiving part (receiving part), 53...3rd receiving part (receiving part), 54...4th receiving part (receiving part), 61...Main part, 61a...Mounting hole (setting location), 61A...Main surface, 62...Restricting projection, 63A...1st engaging projection (projection), 63B...2nd engaging projection (projection), 63C...3rd engaging projection (projection), 63D...4th engaging projection (projection), 64...Fixing device (fastener), 65...Head part, 66...Shaft part (screw shaft), 70...Identification information, 100...Substrate processing device, W...Wafer (substrate)

Claims

1. A mounting structure for a structural component that functions as a functional component when multiple divided parts are combined when attached to a substrate processing device, The divided body has a mounting portion, The multiple divisions differ in shape from each other. The substrate processing apparatus is provided with a receiving portion to which the mounting portion is detachably attached, A protrusion is formed on one of the mounting portion and the receiving portion. The other of the mounting portion and the receiving portion has a recess formed therein that engages with the protrusion when a specific of the multiple divided bodies is attached to the receiving portion. Mounting structure for structural components.

2. Multiple mounting parts are attached to at least one of the receiving parts. Mounting structure for structural components according to claim 1.

3. The direction in which the protrusion of the aforementioned convex portion protrudes is perpendicular to the mounting direction of the mounting portion. Mounting structure for structural components according to claim 1.

4. The aforementioned receiving portion is A main part having a main surface along the mounting direction of the mounting part, It has a restricting projection that protrudes from the main surface and restricts the movement of the mounting portion in the mounting direction, Mounting structure for structural components according to claim 1.

5. At least one of the mounting portion and the receiving portion is a transparent member in which at least a part is formed to be transparent. The convex portion and the concave portion are visible through the transparent member when the mounting portion is attached to the receiving portion. Mounting structure for structural components according to claim 1.

6. The number of the aforementioned divisions is n, The receiving portion has n setting locations where the protrusions can be formed. The aforementioned protrusion is formed in at least one of the aforementioned setting locations. Mounting structure for structural components according to claim 1.

7. The aforementioned protrusion is formed by the head portion of a fastener having a head portion and a screw shaft, The aforementioned setting location is a screw hole into which the screw shaft is screwed. Mounting structure for structural components according to claim 6.

8. Identification information is formed on at least one of the mounting portion and the receiving portion. Mounting structure for structural components according to claim 1.

9. The substrate processing apparatus comprises a table for supporting the substrate to be processed by the substrate processing apparatus, The aforementioned structural component is a cylindrical cover surrounding the table. Mounting structure for structural components according to claim 1.

10. At least a portion of the surface of the aforementioned structural component is water-repellent, hydrophobic, or hydrophilic. Mounting structure for structural components according to claim 9.

11. The aforementioned recess is U-shaped or C-shaped. Mounting structure for structural components according to claim 1.

Images