Flow meter with specific component detection function

Abstract

To provide a flow meter with a specific component detection function that can both monitor gas flow rate and detect specific gas components contained in the gas, while keeping costs down. [Solution] The flow meter 1A with a specific component detection function comprises a flow path section 3 through which gas flows, a measuring section 4 for measuring the flow rate of the gas flowing through the flow path section 3, and a detection section 5 capable of detecting specific gas components contained in the gas flowing through the flow path section 3.

Description

Technical Field

[0001] The present invention relates to a flowmeter with a specific component detection function.

Background Art

[0002] In devices and equipment used in various fields such as industry, medicine, and research, the flow rate of gas may be monitored. In this case, a flowmeter is provided in the path through which the gas flows. For example, Patent Document 1 discloses a configuration in which a light emitting unit and a light receiving unit are arranged so as to face each other with a tube of a float type flowmeter interposed therebetween, and the flow rate is monitored according to the presence or absence of light shielding caused by the light from the light emitting unit being blocked by the float.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in the above-described devices and equipment, it may be necessary to detect a specific component contained in the gas. When attempting to perform both monitoring of the gas flow rate and detection of a specific component contained in the gas, it is necessary to provide both a flowmeter and a sensor or the like for detecting the specific component contained in the gas, which results in a problem of high cost. The present invention has been made in view of the above circumstances, and an object thereof is to provide a flowmeter with a specific component detection function that can perform both monitoring of the gas flow rate and detection of a specific gas component contained in the gas while suppressing costs.

Means for Solving the Problems

[0005] As a means of solving the above problems, a first aspect of the present invention provides a flow meter with a specific component detection function, characterized by comprising: a flow path section through which gas flows; a measuring section for measuring the flow rate of the gas flowing through the flow path section; and a detection section capable of detecting specific gas components contained in the gas flowing through the flow path section. With this configuration, the flow meter with a specific component detection function comprises a measuring unit and a detection unit. The measuring unit measures the flow rate of the gas flowing through the flow path, while the detection unit detects specific gas components contained in the gas flowing through the flow path. Therefore, it is possible to monitor the gas flow rate and detect specific gas components contained in the gas while reducing the number of parts and lowering costs.

[0006] A second aspect of the present invention is characterized in that, in the first aspect described above, the detection unit is a metal-organic structure composed of copper ions and benzene-1,3,5-tricarboxylic acid, and has a detection body whose color irreversibly changes upon contact with the specific gas component contained in the gas. In this configuration, the detection element of the detection unit is formed using a metal-organic structure composed of copper ions and benzene-1,3,5-tricarboxylic acid, and its color irreversibly changes upon contact with a specific gas component contained in the gas. This allows for easy and reliable recognition of the detection of a specific gas component contained in the gas flowing through the channel. Generally speaking, metal-organic structures are also called Metal-Organic Frameworks (MOFs) and are known as a group of porous materials formed by coordination bonds between metal ions and organic ligands.

[0007] A third aspect of the present invention is characterized in that, in the second aspect described above, the flow channel is formed of a material that is at least partially transparent to light, and the measuring unit and the detection unit are provided so as to be visible from outside the flow channel through the flow channel. With this configuration, since the flow channel is light-transmitting, if the color changes irreversibly when the detection unit comes into contact with a specific gas component contained in the gas, the color change can be seen from outside the flow channel.

[0008] A fourth aspect of the present invention is characterized in that, in the third aspect described above, the measuring unit comprises a float that is displaced in the direction of extension of the flow path within the flow path according to the flow rate of the gas. With this configuration, the float in the measuring unit is displaced within the flow path in accordance with the gas flow rate, allowing the gas flow rate to be confirmed based on the position of the float, which can be seen from outside the flow path.

[0009] A fifth aspect of the present invention is characterized in that, in the fourth aspect described above, the float is the detection body. With this configuration, since the float acts as the detection element, when it comes into contact with a specific gas component contained in the gas, the color of the float changes irreversibly, and this color change can be visually observed from outside the flow path. Moreover, the float serves both the function of indicating the gas flow rate and the function of indicating the detection of a specific gas component. Therefore, both gas flow rate monitoring and detection of specific gas components contained in the gas can be performed at a lower cost.

[0010] A sixth aspect of the present invention is characterized in that, in the third or fourth aspect described above, the detection unit is provided downstream of the measurement unit. In this configuration, the flow rate of the gas flowing through the channel is measured by the measurement unit, and then a detection unit located downstream detects specific gas components. This allows for easy recognition of both the gas flow rate and the detection results of specific gas components by visually observing the channel from the outside.

[0011] A seventh aspect of the present invention is characterized in that, in any one of the second to sixth aspects described above, the device further comprises a detection unit for detecting a change in the color of the detection unit, and a notification unit for notifying the outside that the specific gas component has been detected when the detection unit detects a change in the color of the detection unit. With this configuration, when the detection unit detects a change in color in the detection unit that occurs when a specific gas component is detected, the notification unit notifies the outside that a specific gas component has been detected, thereby ensuring that the detection of a specific gas component is reliably recognized.

[0012] An eighth aspect of the present invention is characterized in that, in any one of the second to seventh aspects described above, the metal-organic structure is supported on a substrate containing at least one of glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime. According to this configuration, a metal-organic structure is supported on a substrate containing at least one of glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime, thereby realizing a detection body whose color irreversibly changes upon contact with a specific gas component contained in the gas.

[0013] A ninth aspect of the present invention is characterized in that, in any one of the second to eighth aspects described above, the detection body has a purple to blue color and changes to a brown to black color when the specific gas component is detected. This configuration makes it easier to recognize the detection of specific gaseous components.

[0014] A tenth aspect of the present invention is characterized in that, in any one of the first to ninth aspects described above, the specific gas component is at least one of a sulfur-containing compound, a basic gas, and an acidic gas. With this configuration, the purity of the gas can be controlled by detecting in the detection unit whether the gas flowing through the flow path contains at least one of the following: a sulfur-containing compound, a basic gas, or an acidic gas. [Effects of the Invention]

[0015] According to the present invention, it is possible to provide a flow meter with a specific component detection function that can perform both monitoring of gas flow rate and detection of specific gas components contained in the gas, while keeping costs down.

Brief Description of the Drawings

[0016] [Figure 1] It is a figure showing an installation example of a flowmeter with a specific component detection function of each embodiment of the present invention. [Figure 2] It is a perspective view of a flowmeter with a specific component detection function of the first embodiment of the present invention. [Figure 3] It is a side view of the above flowmeter with a specific component detection function seen from the second direction. [Figure 4] It is a front view of the above flowmeter with a specific component detection function seen from the other side in the first direction. [Figure 5] It is a front view of a flowmeter with a specific component detection function of the second embodiment of the present invention seen from the other side in the first direction. [Figure 6] It is a side view of a flowmeter with a specific component detection function of the third embodiment of the present invention seen from the second direction.

Modes for Carrying Out the Invention

[0017] Hereinafter, each embodiment of the present invention will be described with reference to the drawings. The flowmeter with a specific component detection function of each embodiment is suitably used in various equipment and devices using, for example, nitrogen gas, oxygen gas, argon gas, helium gas, hydrogen gas, air (dry air), etc., but the present invention may be applied to other uses.

[0018] <First Embodiment> FIG. 1 is a figure showing an installation example of a flowmeter with a specific component detection function of each embodiment of the invention. As shown in this FIG. 1, a flowmeter 1A with a specific component detection function is provided, for example, in equipment 100 for producing various articles. The equipment 100 includes a plurality of devices 101. At least one kind of gas among, for example, nitrogen gas, oxygen gas, argon gas, helium gas, hydrogen gas, and air (including dry air) is supplied to the plurality of devices 101 through a pipe 120. In the present embodiment, the pipe 120 branches into a plurality of lines 121. A plurality of devices 101 are connected to each line 121. Here, the piping 120 does not necessarily have to branch into multiple systems 121. Also, there is no limit to the number of devices 101 connected to each system 121; for example, there may be only one. Furthermore, the multiple devices 101 may be of the same type, or they may be of multiple types with different uses. Moreover, there is no limit to the goods produced by the facility 100. The facility 100 may be used not only for the production of goods, but also for various research activities, for example.

[0019] The flow meter 1A with a specific component detection function is installed, for example, at the end of the piping 120 and at the end of each system 121.

[0020] Figure 2 is a perspective view of a flow meter with a specific component detection function according to the first embodiment of the present invention. Figure 3 is a side view of the flow meter with a specific component detection function viewed from a second direction. Figure 4 is a front view of the flow meter with a specific component detection function viewed from the other side of the first direction. As shown in Figures 2 to 4, the flow meter 1A with a specific component detection function comprises a housing 2, a cylindrical body (flow channel section) 3A, a measuring section 4A, and a detection section 5A. In the following description, the extension direction of the cylindrical body 3A will be referred to as the vertical direction Dv, the direction intersecting the vertical direction Dv will be referred to as the first direction D1, and the direction intersecting both the vertical direction Dv and the first direction D1 will be referred to as the second direction D2.

[0021] The housing 2 comprises a first end block 21, a second end block 22, an intermediate frame 23, and a cover member 24. The housing 2 as a whole extends in the vertical direction Dv.

[0022] The first end block 21 and the second end block 22 are spaced apart in the vertical direction Dv. The first end block 21 is located at the lower end of the housing 2. The first end block 21 is rectangular in shape and, as shown in Figure 3, has a connecting passage 21r between its upper surface 21t and its rear surface 21b facing one side in the first direction D1. A joint 25 is connected to one end of the connecting passage 21r which opens to the rear surface 21b. An inlet pipe (not shown) for introducing gas into the flow meter 1A with specific component detection function is connected to the joint 25.

[0023] The second end block 22 is provided at the upper end of the housing 2. The second end block 22 is rectangular in shape and has a connecting passage 22r that connects its lower surface 22d, its rear surface 22b facing one side of the first direction D1, and its front surface 22f facing the other side of the first direction D1. A fitting 26 is connected to one end of the connecting passage 22r that opens to the rear surface 22b. An outlet pipe (not shown) that discharges gas from the flow meter 1A with a specific component detection function is connected to the fitting 26. In addition, a flow control valve 27 capable of adjusting the flow rate of gas flowing through the connecting passage 22r is provided at one end of the connecting passage 22r that opens to the front surface 22f.

[0024] The intermediate frame 23 extends in the vertical direction Dv and connects the first end block 21 and the second end block 22. The intermediate frame 23 connects the ends of the first end block 21 and the second end block 22 on one side in the first direction D1.

[0025] The cover member 24 is provided on the other side of the first direction D1 relative to the intermediate frame 23. As shown in Figure 2, the cover member 24 is formed in a U-shape when viewed from the vertical direction Dv. The cover member 24 has a front portion 24f facing the other side of the first direction D1, and a pair of side portions 24s extending from both ends of the front portion 24f in the second direction D2 toward one side of the first direction D1. The cover member 24 covers the cylindrical body 3A from the other side of the first direction D1 between the first end block 21, the second end block 22, and the intermediate frame 23. The cover member 24 is made of a light-transmitting (transparent) material such as glass or various synthetic resins.

[0026] As shown in Figures 2 to 4, the cylindrical body 3A is provided between the first end block 21 and the second end block 22. The cylindrical body 3A is a circular tube extending in the vertical direction Dv. The lower end of the cylindrical body 3A communicates with a passage 22r that opens to the upper surface 21t of the first end block 21 via a packing 32. The upper end of the cylindrical body 3A communicates with a passage 22r that opens to the lower surface 22d of the second end block 22 via a packing 33. The cylindrical body 3A is made of a light-transmitting (transparent) material such as glass or various synthetic resins. This cylindrical body 3A forms a flow path through which gas flows from the inlet side piping via the joint 25 into the communication passage 21r of the first end block 21. The gas that has passed through the cylindrical body 3A flows out to the outlet side piping via the communication passage 22r and joint 26 of the second end block 22.

[0027] The measuring unit 4A measures the flow rate of gas circulating inside the cylindrical body 3A. The measuring unit 4A includes a float 41 and a float support 42.

[0028] The float 41 is, for example, spherical in shape. The float 41 is displaced in the vertical direction Dv, which is the extension direction of the cylinder 3A, according to the flow rate of the gas circulating within the cylinder 3A. The float 41 floats upward within the cylinder 3A due to the gas flowing from bottom to top within the cylinder 3A. The greater the gas flow rate, the greater the amount the float 41 floats within the cylinder 3A, i.e., the greater the upward displacement. Since the cylinder 3A and the cover member 24 are light-transmitting, i.e., transparent, the position of the float 41 inside the cylinder 3A can be seen from outside the cylinder 3A and the cover member 24. The cylinder 3A is provided with a scale 3m (see Figure 4) to indicate the gas flow rate according to the position of the float 41.

[0029] The float support 42 is provided at the lower end inside the cylindrical body 3A. The float support 42 supports the float 41 from below when gas does not flow inside the cylindrical body 3A. The float support 42 is configured to be cross-shaped when viewed from, for example, the vertical direction Dv, and to allow gas flowing into the cylindrical body 3A to pass through.

[0030] The detection unit 5A is capable of detecting specific gas components contained in the gas flowing through the cylindrical body 3A. In this embodiment, the detection unit 5A has a detection body 51 whose color irreversibly changes upon contact with specific gas components contained in the gas.

[0031] In this embodiment, the detection body 51 is formed by providing a metal-organic framework (MOF) on the surface of a spherical float 41. The metal-organic framework is, for example, divalent copper ions (Cu 2+ It is formed from ) and 1,3,5-benzenetricarboxylic acid (BTC). In other words, the float 41 is the detection body 51 of the detection unit 5A. The detection body 51 comprises a base material and a metal-organic structure provided on the surface of the base material.

[0032] The substrate contains at least one of the following: glass, cellulose, polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), alumina, diatomaceous earth, and soda lime. The metal-organic structure is supported on the surface of the substrate. The metal-organic structure is formed to cover the entire surface of the detection body 51.

[0033] Such a detection element 51 has a purple to blue color. When a specific gas component comes into contact with the metal-organic structure of the detection element 51, the color irreversibly changes from purple to blue to brown to black. In this embodiment, the detector 51 detects sulfur-containing compounds, basic gases, or acidic gases as specific gas components. Examples of sulfur-containing compounds include hydrogen sulfide (H2S), sulfur dioxide (SO2), and methyl mercaptan (CH3SH). An example of a basic gas is ammonia (NH3). Examples of acidic gases include hydrogen chloride (HCl) and hydrogen fluoride (HCl).

[0034] The detection element 51 changes color from purple to blue to brown to black when it comes into contact with at least one of the specific gas components described above. In this embodiment, the detection element 51 changes color from purple to blue to brown to black when the concentration of the specific gas component in the gas is 1 ppb or higher.

[0035] The detection element 51 is visible from the outside through the light-transmitting cylindrical body 3A and the cover member 24. The detection unit 5A detects that the gas flowing through the cylindrical body 3A contains at least one of the following specific gas components: sulfur-containing compounds, basic gases, and acidic gases, when the color of the detection element 51 (float 41) changes from purple to blue to brown to black.

[0036] As described above, the flow meter 1A with a specific component detection function in the first embodiment comprises a cylindrical body 3A through which gas flows, a measuring unit 4A for measuring the flow rate of gas flowing through the cylindrical body 3A, and a detection unit 5A capable of detecting specific gas components contained in the gas flowing through the cylindrical body 3A. In this configuration, the flow meter 1A with a specific component detection function comprises a measuring unit 4A and a detection unit 5A. This allows the measuring unit 4A to measure the flow rate of the gas flowing through the cylindrical body 3A, while the detection unit 5A can detect specific gas components contained in the gas flowing through the cylindrical body 3A. Therefore, it is possible to monitor the gas flow rate and detect specific gas components contained in the gas while keeping costs down.

[0037] In the above-described flow meter 1A with a specific component detection function, the detection unit 5A has a detection body 51 formed using a metal-organic structure made of divalent copper ions and 1,3,5-benzenetricarboxylic acid, which irreversibly changes color upon contact with a specific gas component contained in the gas. In this configuration, the detection element 51 of the detection unit 5A is formed using a metal-organic structure made of divalent copper ions and 1,3,5-benzenetricarboxylic acid, and its color irreversibly changes upon contact with a specific gas component contained in the gas. This makes it easy and reliable to recognize that a specific gas component contained in the gas flowing through the cylindrical body 3A has been detected.

[0038] In the above-described flow meter 1A with specific component detection function, the cylindrical body 3A is formed from a material that is at least partially transparent to light, and the measuring unit 4A and the detection unit 5A are provided so that they can be seen from outside the cylindrical body 3A through the cylindrical body 3A. With this configuration, the measuring unit 4A and the detection unit 5A, located inside the cylindrical body 3A, can measure the flow rate of the gas and detect specific gas components contained in the gas. Since the cylindrical body 3A is light-transmitting, if the color changes irreversibly when the detection unit 5A comes into contact with a specific gas component contained in the gas, the color change can be visually observed from outside the cylindrical body 3A.

[0039] In the above-described flow meter 1A with specific component detection function, the measuring unit 4A includes a float 41 that is displaced within the cylindrical body 3A in the direction of extension of the cylindrical body 3A according to the gas flow rate. With this configuration, the float 41 of the measuring unit 4A is displaced within the cylindrical body 3A in accordance with the gas flow rate, and the gas flow rate can be confirmed based on the position of the float 41 that is visible from outside the cylindrical body 3A.

[0040] In the above-described flow meter 1A with specific component detection function, the float 41 is the detection body 51. With this configuration, since the float 41 is the detection body 51, when it comes into contact with a specific gas component contained in the gas, the color of the float 41 changes irreversibly, and this color change can be seen from outside the cylindrical body 3A. Moreover, the float 41 has both the function of indicating the gas flow rate and the function of indicating that a specific gas component has been detected. Therefore, both gas flow rate monitoring and detection of specific gas components contained in the gas can be performed at a lower cost.

[0041] In the above-described flow meter 1A with specific component detection function, the metal-organic structure is supported on a substrate containing at least one of the following: glass, cellulose, polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), alumina, diatomaceous earth, and soda lime. According to this configuration, a metal-organic structure is supported on a substrate containing at least one of glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime, thereby realizing a detection body 51 whose color irreversibly changes upon contact with a specific gas component contained in the gas.

[0042] In the above-described flow meter 1A with specific component detection function, the detection element 51 has a purple to blue color and changes to a brown to black color when a specific gas component is detected. This configuration makes it easier to recognize the detection of specific gaseous components.

[0043] In the above-mentioned flow meter 1A with specific component detection function, the specific gas components are sulfur-containing compounds, basic gases, or acidic gases. With this configuration, the purity of the gas can be controlled by detecting in the detection unit 5A that the gas flowing through the cylindrical body 3A contains at least one of the following: a sulfur-containing compound, a basic gas, and an acidic gas.

[0044] In the above-mentioned flow meter 1A with specific component detection function, the concentration of a specific gas component in the gas is 1 ppb or higher. With this configuration, the purity of the gas can be controlled at a high level by detecting trace amounts of specific gas components, such as those with a concentration of 1 ppb or higher, using the detection unit 5A.

[0045] In the above-described flow meter 1A with specific component detection function, the gas is at least one of the following: air, nitrogen gas, oxygen gas, argon gas, helium gas, and hydrogen gas. This configuration allows for low-cost detection of the flow rate of at least one of the following gases commonly used in various industries and research: air, nitrogen gas, oxygen gas, argon gas, helium gas, and hydrogen gas, as well as detection of specific components. Note that moisture does not fall under the category of the specific gas being detected.

[0046] <Second Embodiment> Next, a second embodiment of the present invention will be described with reference to the drawings. Figure 5 is a front view of the flow meter with a specific component detection function according to the second embodiment of the present invention, as seen from the other side in the first direction. As shown in Figure 5, the flow meter 1B with specific component detection function comprises a housing 2, a cylindrical body 3B, a measuring unit 4B, and a detection unit 5B.

[0047] The cylindrical body 3B is provided between the first end block 21 and the second end block 22. In this embodiment, the cylindrical body 3B has a lower cylindrical body 34 and an upper cylindrical body 35. The lower cylindrical body 34 constitutes the lower part of the cylindrical body 3B. The upper cylindrical body 35 constitutes the upper part of the cylindrical body 3B. A support member 37 is sandwiched between the lower cylindrical body 34 and the upper cylindrical body 35 via a pair of packings 36. The support member 37 is formed, for example, radially or in a mesh pattern when viewed from the vertical direction Dv, allowing gas to flow from inside the lower cylindrical body 34 to inside the upper cylindrical body 35. The lower cylindrical body 34 and the upper cylindrical body 35 are made of a light-transmitting material such as glass or synthetic resin.

[0048] The measuring unit 4B is located inside the lower cylinder 34. The measuring unit 4B measures the flow rate of gas circulating inside the lower cylinder 34. The measuring unit 4B includes a float 41 and a float support 42.

[0049] The float 41 is, for example, spherical in shape. The float 41 is displaced within the lower cylinder 34 in the vertical direction Dv, which is the extension direction of the lower cylinder 34, according to the flow rate of the gas flowing through the lower cylinder 34. The lower cylinder 34 is provided with a scale 3m to indicate the gas flow rate according to the position of the float 41.

[0050] The float support 42 is provided at the lower end of the lower cylinder 34. The float support 42 supports the float 41 from below when gas does not flow through the lower cylinder 34. In addition, the amount of upward displacement of the float 41 is restricted by the support member 37. The measuring unit 4B can measure the gas flow rate by visually observing the position of the float 41 through the light-transmitting lower cylinder 34 and cover member 24.

[0051] The detection unit 5B is located inside the upper cylindrical body 35. The detection unit 5B has a detection body 51 located inside the upper cylindrical body 35. The detection body 51 is supported from below, for example, by a support member 37. The detection body 51 may be filled inside the upper cylindrical body 35.

[0052] The detection body 51 has an appropriate shape, such as a plate, a porous body, or a block. Similar to the first embodiment described above, the detection body 51 has a metal-organic structure and a substrate supporting the metal-organic structure.

[0053] The detection body 51 is visible from the other side of the first direction D1 through the light-transmitting upper cylindrical body 35 and cover member 24. The detection unit 5B detects that the gas flowing through the cylindrical body 3B contains at least one of the following specific gas components: a sulfur-containing compound, a basic gas, and an acidic gas, when the color of the detection body 51 changes from purple to blue to brown to black.

[0054] As described above, the flow meter 1B with specific component detection function in the second embodiment includes a measuring unit 4B and a detection unit 5B. This allows the measuring unit 4B to measure the flow rate of the gas flowing through the cylindrical body 3B, and the detection unit 5B to detect specific gas components contained in the gas flowing through the cylindrical body 3B, similar to the first embodiment. Therefore, it is possible to monitor the gas flow rate and detect specific gas components contained in the gas while keeping costs down.

[0055] In the above-described flow meter 1B with specific component detection function, the detection unit 5B is located downstream of the measurement unit 4B. In this configuration, after the gas flow rate is measured by the measuring unit 4B, a detection unit 5B located downstream detects specific gas components. This allows for easy recognition of the gas flow rate and the detection results of specific gas components by visually observing the cylindrical body 3B from the outside. Furthermore, the detection unit 5B minimizes adverse effects on the flow rate measurement in the measuring unit 4B, enabling accurate flow rate measurement.

[0056] <Third Embodiment> Next, a third embodiment of the present invention will be described with reference to the drawings. Figure 6 is a side view of a flow meter with a specific component detection function according to the third embodiment of the present invention, viewed from a second direction. The third embodiment of the flow meter 1C with a specific component detection function includes a detection unit 8 that detects changes in the color of the metal-organic structure of the detection body 51 of the detection unit 5A. The detection unit 8 is, for example, a transmissive or reflective visible light sensor. The visible light sensor irradiates the detection object 51 with visible light and measures the intensity of the transmitted or reflected light to detect when the color of the detection object 51 has changed from its original color (purple to blue). When the detection unit 8 detects a change in the color of the detection object 51, it outputs a predetermined signal to the notification unit 9. The notification unit 9 is, for example, a lamp or buzzer, and notifies the outside that a specific gas component has been detected by the detection unit 8 using a lamp or buzzer. The notification unit 9 may also be a computer device that notifies the outside of information indicating that a specific gas component has been detected by the detection unit 8 by displaying it on a monitor device, sending a message, etc.

[0057] Here, the measuring unit 4A may be a heat-type measuring unit rather than a float-type measuring unit using a float 41.

[0058] As described above, the flow meter 1C with a specific component detection function in the third embodiment includes a measuring unit 4A and a detection unit 5A. This allows the measuring unit 4A to measure the flow rate of the gas flowing through the cylindrical body 3A, and the detection unit 5A to detect specific gas components contained in the gas flowing through the cylindrical body 3A, similar to the first embodiment. Therefore, it is possible to monitor the gas flow rate and detect specific gas components contained in the gas while keeping costs down.

[0059] The above-described flow meter 1C with specific component detection function includes a detection unit 8 that detects a change in the color of the detection unit 5A, and a notification unit 9 that, when the detection unit 8 detects a change in the color of the detection unit 5A, notifies the outside that a specific gas component has been detected. With this configuration, when the detection unit 8 detects a change in color of the detection unit 5A that occurs when a specific gas component is detected, the notification unit 9 notifies the outside that a specific gas component has been detected, thereby ensuring that the detection of a specific gas component is reliably recognized.

[0060] The configurations in the above embodiments are examples of the present invention, and various modifications are possible without departing from the spirit of the invention, such as replacing the components of each embodiment with well-known components. [Explanation of Symbols]

[0061] 1A~1C Flow meter with specific component detection function 3A, 3B Cylindrical body (flow path) 4A, 4B measurement section 5A, 5B Detection Unit 8 Detection unit 9 Hochi Department 41 Floats 51 Detectable objects

Claims

1. The gas flow path section, A measuring unit for measuring the flow rate of the gas flowing through the aforementioned flow path, The system includes a detection unit capable of detecting specific gas components contained in the gas flowing through the aforementioned flow path. A flow meter with a specific component detection function, characterized by the above features.

2. The detection unit, The detector is a metal-organic structure composed of copper ions and benzene-1,3,5-tricarboxylic acid, and its color irreversibly changes upon contact with the specific gas component contained in the gas. A flow meter with a specific component detection function as described in feature 1.

3. The aforementioned channel portion is formed from a material that is light-transmitting in at least a portion of it. The measuring unit and the detection unit are provided so as to be visible from outside the flow path through the flow path. The flow meter with a specific component detection function as described in feature 2.

4. The measuring unit includes a float that displaces within the flow path in the direction of extension of the flow path according to the flow rate of the gas. The flow meter with a specific component detection function as described in feature 3.

5. The float is the detection body. The flow meter with a specific component detection function as described in feature 4.

6. The detection unit is provided downstream of the measurement unit. A flow meter with a specific component detection function as described in claim 3 or 4.

7. A detection unit that detects a change in the color of the aforementioned detection unit, The system further includes a notification unit that, when the detection unit detects a change in the color of the detection unit, notifies the outside that the specific gas component has been detected. A flow meter with a specific component detection function as described in claim 2 or 3.

8. The aforementioned metal-organic structure is supported on a substrate containing at least one of the following: glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime. A flow meter with a specific component detection function as described in claim 2 or 3.

9. The detection element has a purple to blue color and changes to a brown to black color when it detects the specific gas component. A flow meter with a specific component detection function as described in claim 2 or 3.

10. The aforementioned specific gaseous component is It is at least one of a sulfur-containing compound, a basic gas, and an acidic gas. A flow meter with a specific component detection function as described in claim 1 or 2.

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