Flow meter with moisture detection function

Abstract

To provide a flow meter with a moisture detection function that can both monitor gas flow rate and detect moisture contained in the gas, while keeping costs down. [Solution] The flow meter 1A with moisture detection function comprises a flow path section 3 through which gas flows, a measuring section 4 for measuring the flow rate of the gas flowing through the flow path section 3, and a detection section 5 capable of detecting moisture contained in the gas flowing through the flow path section 3.

Description

Technical Field

[0001] The present invention relates to a flow meter with a moisture detection function.

Background Art

[0002] In devices and equipment used in various fields such as industry, medicine, and research, the flow rate of gas may be monitored. In this case, a flow meter is provided in the path through which the gas flows. For example, Patent Document 1 discloses a configuration in which a light emitting unit and a light receiving unit are arranged to face each other across a tube of a float type flow meter, and the flow rate is monitored according to the presence or absence of light shielding caused by the light from the light emitting unit being blocked by the float.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in the above-described devices and equipment, it may be necessary to detect moisture contained in the gas. When attempting to perform both monitoring of the gas flow rate and detection of moisture contained in the gas, there is a problem that it is necessary to provide both a flow meter and a sensor or the like for detecting moisture contained in the gas, which increases the cost. The present invention has been made in view of the above circumstances, and an object thereof is to provide a flow meter with a moisture detection function that can perform both monitoring of the gas flow rate and detection of moisture contained in the gas while suppressing costs.

Means for Solving the Problems

[0005] As a means of solving the above problems, a first aspect of the present invention provides a flow meter with a moisture detection function, characterized by comprising a flow path section through which gas flows, a measuring section for measuring the flow rate of the gas flowing through the flow path section, and a detection section capable of detecting moisture contained in the gas flowing through the flow path section. With this configuration, the flow meter with moisture detection function comprises a measuring unit and a detection unit. The measuring unit measures the flow rate of the gas flowing through the flow path, while the detection unit detects the moisture contained in the gas flowing through the flow path. Therefore, it is possible to monitor the gas flow rate and detect the moisture contained in the gas while reducing the number of parts and lowering costs.

[0006] A second aspect of the present invention is characterized in that, in the first aspect described above, the detection unit is a metal-organic structure composed of copper ions and benzene-1,3,5-tricarboxylic acid, and has a detection element whose color reversibly changes upon contact with the moisture contained in the gas. In this configuration, the detection element of the detection unit is formed using a metal-organic structure composed of copper ions and benzene-1,3,5-tricarboxylic acid, and its color reversibly changes upon contact with moisture contained in the gas. This allows for easy and reliable recognition of the detection of moisture contained in the gas flowing through the channel. Generally speaking, metal-organic structures are also called Metal-Organic Frameworks (MOFs) and are known as a group of porous materials formed by coordination bonds between metal ions and organic ligands.

[0007] A third aspect of the present invention is characterized in that, in the second aspect described above, the flow channel is formed of a material that is at least partially transparent to light, and the measuring unit and the detection unit are provided so as to be visible from outside the flow channel through the flow channel. With this configuration, since the flow channel is light-transmitting, when the detection unit comes into contact with moisture contained in the gas and the color changes reversibly, the color change can be seen from outside the flow channel.

[0008] A fourth aspect of the present invention is characterized in that, in the third aspect described above, the measuring unit comprises a float that is displaced in the direction of extension of the flow path within the flow path according to the flow rate of the gas. With this configuration, the float in the measuring unit is displaced within the flow path in accordance with the gas flow rate, allowing the gas flow rate to be confirmed based on the position of the float, which can be seen from outside the flow path.

[0009] A fifth aspect of the present invention is characterized in that, in the fourth aspect described above, the float is the detection body. With this configuration, since the float acts as the sensing element, when it comes into contact with moisture contained in the gas, the color of the float reversibly changes, and this color change can be visually observed from outside the flow path. Moreover, the float serves both the function of indicating the gas flow rate and the function of indicating that moisture has been detected. Therefore, both gas flow rate monitoring and detection of moisture contained in the gas can be performed at a lower cost.

[0010] A sixth aspect of the present invention is characterized in that, in the third or fourth aspect described above, the detection unit is provided downstream of the measurement unit. In this configuration, the flow rate of the gas flowing through the channel is measured by the measurement unit, and then moisture is detected by the detection unit located downstream. This allows for easy recognition of both the gas flow rate and the moisture detection result by visually observing the channel from the outside.

[0011] A seventh aspect of the present invention is characterized in that, in any one of the second to sixth aspects described above, the device further comprises a detection unit for detecting a change in the color of the detection unit, and a notification unit for notifying the outside that moisture has been detected when the detection unit detects a change in the color of the detection unit. With this configuration, when moisture is detected, the detection unit changes color, and when the detection unit detects this change, the notification unit notifies the outside that moisture has been detected, thus ensuring reliable recognition of moisture detection.

[0012] An eighth aspect of the present invention is characterized in that, in any one of the second to sixth aspects described above, the detection unit comprises a light source that irradiates the detection object with visible light, a detector that measures the intensity of transmitted or reflected light from the detection object, and a display unit that converts the intensity of the transmitted or reflected light into a moisture concentration and displays it. This configuration allows for the detection of changes in the color of a sensor by irradiating the sensor with visible light and measuring the intensity of transmitted or reflected light. The results can then be converted into a moisture concentration for analysis. This enables the use of a thermal flow meter, allowing for flow rate measurement even in a darkroom environment.

[0013] A ninth aspect of the present invention is characterized in that, in any one of the second to eighth aspects described above, the metal-organic structure is supported on a substrate containing at least one of glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime. According to this configuration, a metal-organic structure is supported on a substrate containing at least one of the following: glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime. This allows for the realization of a detection body whose color reversibly changes upon contact with moisture contained in the gas.

[0014] A tenth aspect of the present invention is, in any one of the second to ninth aspects described above, the detection body having a dark blue color and changing to a light blue color when moisture is detected. It is characterized by the following: This configuration makes it easy to recognize when moisture has been detected. [Effects of the Invention]

[0015] According to the present invention, it is possible to provide a flow meter with a moisture detection function that can perform both gas flow rate monitoring and detection of moisture contained in the gas, while keeping costs down. [Brief explanation of the drawing]

[0016] [Figure 1]This is a diagram showing an installation example of a flowmeter with a moisture detection function according to each embodiment of the present invention. [Figure 2] This is a perspective view of a flowmeter with a moisture detection function according to the first embodiment of the present invention. [Figure 3] This is a side view of the above flowmeter with a moisture detection function as seen from the second direction. [Figure 4] This is a front view of the above flowmeter with a moisture detection function as seen from the other side in the first direction. [Figure 5] This is a front view of a flowmeter with a moisture detection function according to the second embodiment of the present invention as seen from the other side in the first direction. [Figure 6] This is a side view of a flowmeter with a moisture detection function according to the third embodiment of the present invention as seen from the second direction. [Figure 7] This is a side view of a first example of a flowmeter with a moisture detection function using a thermal measurement unit. [Figure 8] This is a side view of a second example of a flowmeter with a moisture detection function using a thermal measurement unit.

Mode for Carrying Out the Invention

[0017] Hereinafter, each embodiment of the present invention will be described with reference to the drawings. The flowmeter with a moisture detection function of each embodiment is suitably used in various facilities and devices using, for example, nitrogen gas, oxygen gas, argon gas, helium gas, hydrogen gas, air (dry air), etc., but the present invention may also be applied to other uses.

[0018] <First Embodiment> FIG. 1 is a diagram showing an installation example of a flowmeter with a moisture detection function according to each embodiment of the invention. As shown in Figure 1, the flow meter 1A with moisture detection function is installed, for example, in equipment 100 that produces various goods. Equipment 100 comprises a plurality of devices 101. The plurality of devices 101 are supplied with at least one gas from among, for example, nitrogen gas, oxygen gas, argon gas, helium gas, hydrogen gas, and air (including dry air) through piping 120. In this embodiment, piping 120 branches into a plurality of systems 121. The plurality of devices 101 are connected to each system 121. Here, the piping 120 does not necessarily have to branch into multiple systems 121. Also, there is no limit to the number of devices 101 connected to each system 121; for example, there may be only one. Furthermore, the multiple devices 101 may be of the same type, or they may be of multiple types with different uses. Moreover, there is no limit to the goods produced by the facility 100. The facility 100 may be used not only for the production of goods, but also for various research activities, for example.

[0019] The flow meter 1A with moisture detection function is installed, for example, at the end of the piping 120 and at the end of each system 121.

[0020] Figure 2 is a perspective view of a flow meter with moisture detection function according to the first embodiment of the present invention. Figure 3 is a side view of the flow meter with moisture detection function viewed from a second direction. Figure 4 is a front view of the flow meter with moisture detection function viewed from the other side of the first direction. As shown in Figures 2 to 4, the flow meter 1A with moisture detection function comprises a housing 2, a cylindrical body (flow channel section) 3A, a measuring section 4A, and a detection section 5A. In the following description, the extension direction of the cylindrical body 3A will be referred to as the vertical direction Dv, the direction intersecting the vertical direction Dv will be referred to as the first direction D1, and the direction intersecting both the vertical direction Dv and the first direction D1 will be referred to as the second direction D2.

[0021] The housing 2 comprises a first end block 21, a second end block 22, an intermediate frame 23, and a cover member 24. The housing 2 as a whole extends in the vertical direction Dv.

[0022] The first end block 21 and the second end block 22 are spaced apart in the vertical direction Dv. The first end block 21 is located at the lower end of the housing 2. The first end block 21 is rectangular in shape and, as shown in Figure 3, has a connecting passage 21r between its upper surface 21t and its rear surface 21b facing one side in the first direction D1. A joint 25 is connected to one end of the connecting passage 21r which opens to the rear surface 21b. An inlet pipe (not shown) for introducing gas into the flow meter 1A with moisture detection function is connected to the joint 25.

[0023] The second end block 22 is provided at the upper end of the housing 2. The second end block 22 is rectangular in shape and has a connecting passage 22r that connects its lower surface 22d, its rear surface 22b facing one side of the first direction D1, and its front surface 22f facing the other side of the first direction D1. A fitting 26 is connected to one end of the connecting passage 22r that opens to the rear surface 22b. An outlet pipe (not shown) that discharges gas from the flow meter 1A with moisture detection function is connected to the fitting 26. In addition, a flow control valve 27 that can adjust the flow rate of gas flowing through the connecting passage 22r is provided at one end of the connecting passage 22r that opens to the front surface 22f.

[0024] The intermediate frame 23 extends in the vertical direction Dv and connects the first end block 21 and the second end block 22. The intermediate frame 23 connects the ends of the first end block 21 and the second end block 22 on one side in the first direction D1.

[0025] The cover member 24 is provided on the other side of the first direction D1 relative to the intermediate frame 23. As shown in Figure 2, the cover member 24 is formed in a U-shape when viewed from the vertical direction Dv. The cover member 24 has a front portion 24f facing the other side of the first direction D1, and a pair of side portions 24s extending from both ends of the front portion 24f in the second direction D2 toward one side of the first direction D1. The cover member 24 covers the cylindrical body 3A from the other side of the first direction D1 between the first end block 21, the second end block 22, and the intermediate frame 23. The cover member 24 is made of a light-transmitting (transparent) material such as glass or various synthetic resins.

[0026] As shown in Figures 2 to 4, the cylindrical body 3A is provided between the first end block 21 and the second end block 22. The cylindrical body 3A is a circular tube extending in the vertical direction Dv. The lower end of the cylindrical body 3A communicates with a passage 22r that opens to the upper surface 21t of the first end block 21 via a packing 32. The upper end of the cylindrical body 3A communicates with a passage 22r that opens to the lower surface 22d of the second end block 22 via a packing 33. The cylindrical body 3A is made of a light-transmitting (transparent) material such as glass or various synthetic resins. This cylindrical body 3A forms a flow path through which gas flows from the inlet side piping via the joint 25 into the communication passage 21r of the first end block 21. The gas that has passed through the cylindrical body 3A flows out to the outlet side piping via the communication passage 22r and joint 26 of the second end block 22.

[0027] The measuring unit 4A measures the flow rate of gas circulating inside the cylindrical body 3A. The measuring unit 4A includes a float 41 and a float support 42.

[0028] The float 41 is, for example, spherical in shape. The float 41 is displaced in the vertical direction Dv, which is the extension direction of the cylinder 3A, according to the flow rate of the gas circulating within the cylinder 3A. The float 41 floats upward within the cylinder 3A due to the gas flowing from bottom to top within the cylinder 3A. The greater the gas flow rate, the greater the amount the float 41 floats within the cylinder 3A, i.e., the greater the upward displacement. Since the cylinder 3A and the cover member 24 are light-transmitting, i.e., transparent, the position of the float 41 inside the cylinder 3A can be seen from outside the cylinder 3A and the cover member 24. The cylinder 3A is provided with a scale 3m (see Figure 4) to indicate the gas flow rate according to the position of the float 41.

[0029] The float support 42 is provided at the lower end inside the cylindrical body 3A. The float support 42 supports the float 41 from below when gas does not flow inside the cylindrical body 3A. The float support 42 is configured to be cross-shaped when viewed from, for example, the vertical direction Dv, and to allow gas flowing into the cylindrical body 3A to pass through.

[0030] The detection unit 5A is capable of detecting moisture contained in the gas flowing through the cylindrical body 3A. In this embodiment, the detection unit 5A has a detection element 51 whose color reversibly changes upon contact with moisture contained in the gas.

[0031] In this embodiment, the detection body 51 is formed by providing a metal-organic framework (MOF) on the surface of a spherical float 41. The metal-organic framework is, for example, divalent copper ions (Cu 2+ It is formed from ) and 1,3,5-benzenetricarboxylic acid (BTC). In other words, the float 41 is the detection body 51 of the detection unit 5A. The detection body 51 comprises a base material and a metal-organic structure provided on the surface of the base material.

[0032] The substrate contains at least one of the following: glass, cellulose, polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), alumina, diatomaceous earth, and soda lime. The metal-organic structure is supported on the surface of the substrate. The metal-organic structure is formed to cover the entire surface of the detection body 51.

[0033] Such a detection element 51 has a dark blue color. When moisture comes into contact with the metal-organic structure, the detection element 51 reversibly changes from dark blue to light blue. In this embodiment, the detection element 51 changes from dark blue to light blue when it comes into contact with water, acting as moisture. In this embodiment, as the moisture concentration in the gas increases within the range of 1 ppb to 100 ppm, the detection element 51 gradually changes from dark blue to light blue, while as the moisture concentration decreases, the detection element 51 gradually changes from light blue to dark blue.

[0034] The detection element 51 is visible from the outside through the light-transmitting cylindrical body 3A and the cover member 24. The detection unit 5A detects that moisture is present in the gas flowing through the cylindrical body 3A when the color of the detection element 51 (float 41) changes from dark blue to light blue. Furthermore, the moisture concentration in the gas can also be detected according to the intensity of the color of the detection element 51 as it changes from dark blue to light blue. Here, in order to accurately determine the color change of the detection element 51, it is preferable to determine the color of the detection element 51 by comparing it with a pre-prepared color sample.

[0035] As described above, the flow meter 1A with moisture detection function in the first embodiment comprises a cylindrical body 3A through which gas flows, a measuring unit 4A for measuring the flow rate of gas flowing through the cylindrical body 3A, and a detection unit 5A capable of detecting moisture contained in the gas flowing through the cylindrical body 3A. In this configuration, the flow meter 1A with moisture detection function comprises a measuring unit 4A and a detection unit 5A. This allows the measuring unit 4A to measure the flow rate of the gas flowing through the cylindrical body 3A, while the detection unit 5A can detect moisture contained in the gas flowing through the cylindrical body 3A. Therefore, it is possible to monitor the gas flow rate and detect moisture in the gas while keeping costs down.

[0036] In the above-described flow meter 1A with moisture detection function, the detection unit 5A has a detection body 51 formed using a metal-organic structure made of divalent copper ions and 1,3,5-benzenetricarboxylic acid, which changes color reversibly upon contact with moisture contained in the gas. In this configuration, the detection element 51 of the detection unit 5A is formed using a metal-organic structure made of divalent copper ions and 1,3,5-benzenetricarboxylic acid, and its color reversibly changes upon contact with moisture contained in the gas. This makes it easy and reliable to recognize that moisture contained in the gas flowing through the cylindrical body 3A has been detected.

[0037] In the above-described flow meter 1A with moisture detection function, the cylindrical body 3A is formed from a material that is at least partially transparent to light, and the measuring unit 4A and the detection unit 5A are provided so that they can be seen from outside the cylindrical body 3A through the cylindrical body 3A. With this configuration, the measuring unit 4A and the detection unit 5A, located inside the cylindrical body 3A, can measure the gas flow rate and detect moisture contained in the gas. Since the cylindrical body 3A is light-transmitting, when the detection unit 5A comes into contact with moisture contained in the gas, the color changes reversibly, and this color change can be visually observed from outside the cylindrical body 3A.

[0038] In the above-described flow meter 1A with moisture detection function, the measuring unit 4A includes a float 41 that is displaced within the cylindrical body 3A in the direction of extension of the cylindrical body 3A according to the gas flow rate. With this configuration, the float 41 of the measuring unit 4A is displaced within the cylindrical body 3A in accordance with the gas flow rate, and the gas flow rate can be confirmed based on the position of the float 41 that is visible from outside the cylindrical body 3A.

[0039] In the above-described flow meter 1A with moisture detection function, the float 41 is the detection body 51. With this configuration, since the float 41 is the detection element 51, when it comes into contact with moisture contained in the gas, the color of the float 41 changes reversibly, and this color change can be seen from outside the cylindrical body 3A. Moreover, the float 41 has both the function of indicating the gas flow rate and the function of indicating that moisture has been detected. Therefore, both gas flow rate monitoring and detection of moisture contained in the gas can be performed at a lower cost.

[0040] In the above-described flow meter 1A with moisture detection function, the metal-organic structure is supported on a substrate containing at least one of the following: glass, cellulose, polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), alumina, diatomaceous earth, and soda lime. According to this configuration, a metal-organic structure is supported on a substrate containing at least one of glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime, thereby realizing a detection body 51 whose color reversibly changes upon contact with moisture contained in the gas.

[0041] In the above-described flow meter 1A with moisture detection function, the detection element 51 has a dark blue color and changes to a light blue color when moisture is detected. This configuration makes it easy to recognize when moisture has been detected.

[0042] In the above-described flow meter 1A with moisture detection function, the moisture concentration in the gas is between 1 ppb and 100 ppm. With this configuration, the detection unit 5A can detect trace amounts of moisture, such as those with a concentration between 1 ppb and 100 ppm, thereby enabling high-level control of gas purity and moisture leakage.

[0043] In the above-described flow meter 1A with moisture detection function, the gas is at least one of the following: air, nitrogen gas, oxygen gas, argon gas, helium gas, and hydrogen gas. This configuration allows for low-cost detection of the flow rate and moisture content of at least one of the following gases commonly used in various industries and research: air, nitrogen gas, oxygen gas, argon gas, helium gas, and hydrogen gas.

[0044] <Second Embodiment> Next, a second embodiment of the present invention will be described with reference to the drawings. Figure 5 is a front view of the flow meter with moisture detection function according to the second embodiment of the present invention, as seen from the other side of the first direction. As shown in Figure 5, the flow meter 1B with moisture detection function comprises a housing 2, a cylindrical body 3B, a measuring unit 4B, and a detection unit 5B.

[0045] The cylindrical body 3B is provided between the first end block 21 and the second end block 22. In this embodiment, the cylindrical body 3B has a lower cylindrical body 34 and an upper cylindrical body 35. The lower cylindrical body 34 constitutes the lower part of the cylindrical body 3B. The upper cylindrical body 35 constitutes the upper part of the cylindrical body 3B. A support member 37 is sandwiched between the lower cylindrical body 34 and the upper cylindrical body 35 via a pair of packings 36. The support member 37 is formed, for example, radially or in a mesh pattern when viewed from the vertical direction Dv, allowing gas to flow from inside the lower cylindrical body 34 to inside the upper cylindrical body 35. The lower cylindrical body 34 and the upper cylindrical body 35 are made of a light-transmitting material such as glass or synthetic resin.

[0046] The measuring unit 4B is located inside the lower cylinder 34. The measuring unit 4B measures the flow rate of gas circulating inside the lower cylinder 34. The measuring unit 4B includes a float 41 and a float support 42.

[0047] The float 41 is, for example, spherical in shape. The float 41 is displaced within the lower cylinder 34 in the vertical direction Dv, which is the extension direction of the lower cylinder 34, according to the flow rate of the gas flowing through the lower cylinder 34. The lower cylinder 34 is provided with a scale 3m to indicate the gas flow rate according to the position of the float 41.

[0048] The float support 42 is provided at the lower end of the lower cylinder 34. The float support 42 supports the float 41 from below when gas does not flow through the lower cylinder 34. In addition, the amount of upward displacement of the float 41 is restricted by the support member 37. The measuring unit 4B can measure the gas flow rate by visually observing the position of the float 41 through the light-transmitting lower cylinder 34 and cover member 24.

[0049] The detection unit 5B is located inside the upper cylindrical body 35. The detection unit 5B has a detection body 51 located inside the upper cylindrical body 35. The detection body 51 is supported from below, for example, by a support member 37. The detection body 51 may be filled inside the upper cylindrical body 35.

[0050] The detection body 51 has an appropriate shape, such as a plate, a porous body, or a block. Similar to the first embodiment described above, the detection body 51 has a metal-organic structure and a substrate supporting the metal-organic structure.

[0051] The detection body 51 is visible from the other side of the first direction D1 through the light-transmitting upper cylindrical body 35 and cover member 24. The detection unit 5B detects that the gas flowing through the cylindrical body 3B contains moisture when the color of the detection body 51 changes from dark blue to light blue.

[0052] As described above, the flow meter 1B with moisture detection function in the second embodiment includes a measuring unit 4B and a detection unit 5B. This allows the measuring unit 4B to measure the flow rate of the gas flowing through the cylindrical body 3B, and the detection unit 5B to detect moisture contained in the gas flowing through the cylindrical body 3B, similar to the first embodiment. Therefore, it is possible to monitor the gas flow rate and detect moisture in the gas while keeping costs down.

[0053] In the above-described flow meter 1B with moisture detection function, the detection unit 5B is located downstream of the measurement unit 4B. In this configuration, after the gas flow rate is measured by the measuring unit 4B, moisture is detected by the detection unit 5B located downstream. This allows for easy recognition of the gas flow rate and the moisture detection result by visually observing the cylindrical body 3B from the outside. Furthermore, the detection unit 5B can suppress adverse effects on the flow rate measurement in the measuring unit 4B, enabling accurate flow rate measurement.

[0054] <Third Embodiment> Next, a third embodiment of the present invention will be described with reference to the drawings. Figure 6 is a side view of a flow meter with a moisture detection function according to the third embodiment of the present invention, viewed from a second direction. The third embodiment of the flow meter 1C with moisture detection function includes a detection unit 8 that detects a change in the color of the metal-organic structure of the detection body 51 of the detection unit 5A. The detection unit 8 is, for example, a transmissive or reflective visible light sensor. The visible light sensor irradiates the detection object 51 with visible light and measures the intensity of the transmitted or reflected light to detect when the color of the detection object 51 has changed from its original color (dark blue). When the detection unit 8 detects a change in the color of the detection object 51, it outputs a predetermined signal to the notification unit 9. The notification unit 9 is, for example, a lamp or buzzer, and notifies the outside that moisture has been detected by the detection unit 8 using a lamp or buzzer. The notification unit 9 may also be a computer device that notifies the outside of information indicating that moisture has been detected by the detection unit 8 by displaying it on a monitor device, sending a message, etc.

[0055] Here, the measuring unit 4A may be a heat-type measuring unit rather than a float-type measuring unit using a float 41.

[0056] As described above, the flow meter 1C with moisture detection function in the third embodiment includes a measuring unit 4A and a detection unit 5A. This allows the measuring unit 4A to measure the flow rate of the gas flowing through the cylindrical body 3A, and the detection unit 5A to detect moisture contained in the gas flowing through the cylindrical body 3A, similar to the first embodiment. Therefore, it is possible to monitor the gas flow rate and detect moisture contained in the gas while keeping costs down.

[0057] The above-described flow meter 1C with moisture detection function includes a detection unit 8 that detects a change in the color of the detection unit 5A, and a notification unit 9 that notifies the outside that moisture has been detected when the detection unit 8 detects a change in the color of the detection unit 5A. With this configuration, when the detection unit 8 detects a change in color of the detection unit 5A that occurs when moisture is detected, the notification unit 9 notifies the outside that moisture has been detected, thereby ensuring reliable recognition of moisture detection.

[0058] Figures 7 and 8 show flow meters 1D and 1E with a moisture detection function using a thermal measuring unit 4C. When using the thermal measuring unit 4C, flow rate can be measured even in a darkroom environment. The detection units 81 and 82 detect changes in the color of the metal-organic structure of the detection element 51, which is a moisture-detecting element in the detection unit 5B. The detection units 81 and 82 include a light source 81a that irradiates the detection element 51 with visible light, a detector 81b that measures the intensity of transmitted or reflected light from the detection element 51, and a moisture concentration display unit 15 that converts the intensity of the transmitted or reflected light into a moisture concentration and displays it. The detection unit 81 shown in Figure 7 measures the intensity of transmitted light from the detection element 51. The detection unit 82 shown in Figure 8 measures the intensity of reflected light from the detection element 51.

[0059] In the figure, 13a is a gas flow path for introducing gas from the inlet fitting 125 to the thermal measuring unit 4C, 14 is a flow rate display unit that displays the gas flow rate measured by the measuring unit 4C, 51A is a detector tube which is an analyzer containing the detection element 51, 13b is a gas flow path for introducing gas from the measuring unit 4C to the detector tube 51A, 15 is a moisture concentration display unit that displays the detected moisture concentration, 13c is a gas flow path for discharging gas from the detector tube 51A to the outlet fitting 126, and 16 is a housing that contains the above-mentioned equipment.

[0060] The configurations in the above embodiments are examples of the present invention, and various modifications are possible without departing from the spirit of the invention, such as replacing the components of each embodiment with well-known components. [Explanation of symbols]

[0061] 1A~1E Flow meter with moisture detection function 3A, 3B Cylindrical body (flow path) 4A, 4B measurement section 5A, 5B Detection Unit 8,81,82 Detection Unit 9 Hochi Department 15 Moisture concentration display section (display section) 41 Floats 51 Detectable objects 81a light source 81b detector

Claims

1. The gas flow path section, A measuring unit for measuring the flow rate of the gas flowing through the aforementioned flow path, A detection unit capable of detecting moisture contained in the gas flowing through the aforementioned flow path, A flow meter with a moisture detection function, characterized by being equipped with the following features.

2. The detection unit is The detector is a metal-organic structure composed of copper ions and benzene-1,3,5-tricarboxylic acid, and its color reversibly changes upon contact with the moisture contained in the gas. A flow meter with a moisture detection function as described in feature 1.

3. The aforementioned channel portion is formed from a material that is light-transmitting in at least a portion of it. The measuring unit and the detection unit are provided so as to be visible from outside the flow path through the flow path. The flow meter with moisture detection function according to feature 2.

4. The measuring unit includes a float that displaces within the flow path in the direction of extension of the flow path according to the flow rate of the gas. A flow meter with a moisture detection function as described in claim 3.

5. The float is the detection body. The flow meter with moisture detection function as described in feature 4.

6. The detection unit is provided downstream of the measurement unit. A flow meter with a moisture detection function as described in claim 3 or 4.

7. A detection unit that detects a change in the color of the aforementioned detection unit, The system further includes a notification unit that, when the detection unit detects a change in the color of the detection unit, notifies the outside that moisture has been detected. A flow meter with a moisture detection function as described in claim 2 or 3.

8. The flow meter with moisture detection function according to claim 2 or 3, characterized in that the detection unit comprises a light source that irradiates the detection object with visible light, a detector that measures the intensity of transmitted or reflected light from the detection object, and a display unit that converts the intensity of the transmitted or reflected light into a moisture concentration and displays it.

9. The aforementioned metal-organic structure is supported on a substrate containing at least one of the following: glass, cellulose, polytetrafluoroethylene, perfluoroalkoxyalkane, alumina, diatomaceous earth, and soda lime. A flow meter with a moisture detection function as described in claim 2 or 3.

10. The detection element has a dark blue color and changes to a light blue color when it detects moisture. A flow meter with a moisture detection function as described in claim 2 or 3.

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