High-voltage amplifier and mass spectrometer equipped therewith

Abstract

To provide a high-voltage amplifier that operates stably at high speed, and a mass spectrometer equipped with the same. [Solution] A high-voltage amplifier comprising: an error amplification circuit that outputs a control signal based on an input signal and a feedback signal; a voltage conversion circuit that adjusts the potential of the control signal output from the error amplification circuit; a multi-stage transistor output circuit that outputs a supply high voltage based on the output of the voltage conversion circuit; a feedback circuit that outputs a feedback signal to be input to the error amplification circuit based on the supply high voltage; and an open-loop gain control circuit having a plurality of resistive elements and a capacitive element connected in parallel with at least one of the plurality of resistive elements to add poles and zeros to the open-loop gain, which generates a gain control signal that controls the voltage conversion circuit based on the supply high voltage output from the multi-stage transistor output circuit. Also, a mass spectrometer equipped therewith.

Description

Technical Field

[0001] The present invention relates to a high-voltage amplifier and a mass spectrometer equipped with the same.

Background Art

[0002] Research is underway to apply a mass spectrometer, which is mainly used for identifying a measurement target substance based on a mass-to-charge ratio, to clinical examination applications. When using a mass spectrometer as a medical device, high throughput performance capable of processing a huge number of specimens is also emphasized.

[0003] In a mass spectrometer, a high voltage is applied to an ion generator called an ion source when ionizing a specimen, and a mass analysis unit composed of multipole electrodes. A high-voltage amplification circuit for supplying a high voltage generally employs a multi-stage amplification circuit, but the circuit operation may become unstable due to the multi-stage configuration. Therefore, in a conventional high-voltage amplification circuit as described in Patent Document 1, a feedback circuit is provided to ensure circuit stability.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Conventional high-voltage amplification circuits attempt to stabilize circuit operation by incorporating a feedback circuit. However, this stabilization comes at the cost of reduced response characteristics due to the feedback circuit, potentially causing a delay in the circuit's operating speed. On the other hand, in mass spectrometers, high voltage is applied to an ion generator called an ion source and a mass spectrometry unit consisting of multi-pole electrodes when ionizing a sample. In this case, it is necessary to switch between positive and negative high voltages at high speed and with high precision to match the optimal ionization voltage and polarity for each component in the sample. Conventional high-voltage amplification circuits with feedback circuits are unsuitable (insufficient) for mass spectrometers.

[0006] The present invention aims to provide a high-voltage amplifier that operates stably at high speed, and a mass spectrometer equipped with the same. [Means for solving the problem]

[0007] A brief overview of some of the representative inventions disclosed in this application is as follows:

[0008] A high-voltage amplifier comprising: an error amplification circuit that outputs a control signal based on an input signal and a feedback signal; a voltage conversion circuit that adjusts the potential of the control signal output from the error amplification circuit; a multi-stage transistor output circuit that outputs a supply high voltage based on the output of the voltage conversion circuit; a feedback circuit that outputs a feedback signal to be input to the error amplification circuit based on the supply high voltage; and an open-loop gain control circuit having a plurality of resistive elements and a capacitive element connected in parallel with at least one of the plurality of resistive elements to add poles and zeros to the open-loop gain, which generates a gain control signal that controls the voltage conversion circuit based on the supply high voltage output from the multi-stage transistor output circuit; and a mass spectrometer equipped therewith. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a high-voltage amplifier that operates stably at high speed, and a mass spectrometer equipped with the same. [Brief explanation of the drawing]

[0010] [Figure 1A] A diagram showing the overall circuit block of the high-voltage amplification circuit according to the embodiment. [Figure 1B] A diagram showing another example of the overall circuit block of the high-voltage amplifier circuit according to the embodiment. [Figure 2] A diagram illustrating a conventional circuit in which a phase compensation circuit is added to the feedback circuit. [Figure 3A] A diagram illustrating the design specifications for the gain in a high-voltage amplifier circuit according to an embodiment. [Figure 3B] This diagram illustrates why conventional high-voltage designs cannot handle high speeds. [Figure 4] This figure illustrates an example in which a voltage divider resistor Ro2 is added between Ro1 and Rg in the open-loop gain control circuit of a high-voltage amplifier circuit. [Figure 5] This figure illustrates how the noise level increase can be suppressed in the high-voltage amplification circuit according to the embodiment. [Figure 6A] This figure illustrates an example in which an inductive load is driven using two high-voltage amplification circuits. [Figure 6B] Figure 6A is a diagram illustrating the details of the high-voltage amplifier circuit. [Figure 7] This figure illustrates an example in which the high-voltage amplification circuit of the present invention is applied to a mass spectrometer. [Figure 8] This diagram illustrates that as Δm increases, the rise time of the ion signal slows down, and the measurement sensitivity decreases. [Figure 9] This figure illustrates how the high-voltage amplification circuit of this embodiment enables high-speed measurement without causing a decrease in measurement sensitivity. [Figure 10] A diagram illustrating the overshoot observed in conventional high-voltage amplification circuits. [Modes for carrying out the invention]

[0011] Hereinafter, embodiments of the present invention will be described. Each of the embodiments described below is an example for realizing the present invention and does not limit the technical scope of the present invention. Problems, configurations, and effects other than those described above will be clarified by the description of the following embodiments.

[0012] In addition, in each of the following embodiments, components having the same function are denoted by the same reference numerals, and repeated descriptions thereof are omitted unless particularly necessary.

Example

[0013] FIG. 1A is a diagram showing an overall circuit block of a high-voltage amplification circuit (when referred to as a device, it is denoted as a "high-voltage amplifier") according to this example. The high-voltage amplification circuit 1 of this example includes an error amplification circuit 2 (also referred to as an "error amplifier") that compares an input signal with a feedback signal output from a feedback circuit 5 described later and outputs an error amplification signal, and a high-voltage circuit 7 that inputs the error amplification signal from the error amplification circuit 2. The error amplification signal from the error amplification circuit 2 is input to a multi-stage voltage conversion circuit 3 (also simply referred to as a "voltage conversion circuit") that adjusts the potential to a potential that can be handled by the multi-stage transistor output circuit 4 in the subsequent stage and outputs it as a control signal.

[0014] In the error amplification circuit 2, a low voltage of less than 300V, for example, a low voltage current of 5 to 12V flows, while in the high-voltage amplification circuit 1, a high voltage of 300V or more, for example, a high voltage on the order of kV, which is applied to a multipole electrode of a mass spectrometer (FIG. 7) described later, is applied. If the high voltage of the high-voltage circuit 7 is applied to the error amplification circuit 2 due to some malfunction, the error amplification circuit 2 is likely to be destroyed. Therefore, in order to prevent this, the high-voltage amplifier may provide the high-voltage circuit 7 and the low-voltage circuit 8 on separate printed circuit boards (PCB boards).

[0015] Another example of providing the high-voltage circuit 7 and the low-voltage circuit 8 as separate printed circuit boards will be described with reference to FIG. 1B. The feedback circuit 5 takes the supply high voltage as an input and converts it into a low voltage that is output to the error amplification circuit 2 within the feedback circuit 5. That is, even the same feedback circuit 5 can be divided into a high-voltage circuit and a low-voltage circuit. Therefore, as shown in FIG. 1B, among the feedback circuit 5, the high-voltage circuit portion is provided in the high-voltage circuit 7 (which can be referred to as a "high-voltage circuit board" as an article), the low-voltage circuit portion is provided in the low-voltage circuit 8 (which can be referred to as a "low-voltage circuit board" as an article), and they may be connected by their electrical wirings.

[0016] Also, among the multi-stage voltage conversion circuit 3, in order to prevent interference between the circuit that processes the signal (low-voltage signal) from the error amplification circuit 2 and the control signal output to the subsequent multi-stage transistor output circuit 4, the circuit that processes the low-voltage signal from the error amplification circuit 2 may be provided in the low-voltage circuit 8, and the circuit that generates the control signal output to the multi-stage transistor output circuit 4 may be provided in the high-voltage circuit 7. Regarding the open-loop gain control circuit 6 as well, the circuit portion that generates the low-voltage signal output to the multi-stage voltage conversion circuit may be provided in the low-voltage circuit 8, and the circuit portion that takes the supply high voltage as an input may be provided in the high-voltage circuit 7.

[0017] Of course, if there are reasons such as a small space for installing the printed circuit board, it is also possible to provide all the circuits on a single printed circuit board by devising the circuit wiring so that the high-voltage circuit 7 and the low-voltage circuit 8 are separated.

[0018] The multi-stage transistor output circuit 4 is a circuit block that outputs the supply high voltage based on the control signal that is the output of the multi-stage voltage conversion circuit.

[0019] The feedback circuit 5 is a circuit that outputs a feedback signal based on the supply high voltage, and is also a circuit that controls the overall gain of the high-voltage amplification circuit 1.

[0020] The open-loop gain control circuit 6 is a core and important circuit block of the present invention. It generates an open-loop control signal based on the supply high voltage and a gain control signal that is input to the multi-stage voltage conversion circuit 3.

[0021] The open-loop gain control circuit 6 includes resistive elements Ro1 and Rg. As shown in Figure 1, it generates an open-loop gain control signal by dividing the supply high voltage between Ro1 and Rg.

[0022] Furthermore, to add phase compensation characteristics to the open-loop gain control, capacitor Co1 is connected in parallel with Ro1 to create a circuit with phase characteristics that have poles and zeros. Note that there does not need to be one of each element corresponding to Ro1, Co1, and Rg; equivalent functions can be achieved by a combination of multiple elements.

[0023] The poles and zeros generated by this open-loop gain control circuit 6 do not affect the overall gain of the high-voltage amplifier circuit 1 or the high-speed operation of the circuits directly connected to it. In other words, the addition of the open-loop gain control circuit 6 does not slow down the high-voltage amplifier circuit in the desired operating bandwidth.

[0024] To explain the advantages of employing the high-voltage amplification circuit of this embodiment, we will describe them below in comparison with the disadvantages of a conventional multi-stage high-voltage amplification circuit, as shown in Figure 2.

[0025] As described in [Background Technology], conventional high-voltage amplifier circuits include a feedback circuit to ensure circuit stability.

[0026] Figure 3A shows the frequency and gain characteristics of a high-voltage amplifier circuit. To stabilize the high-voltage amplifier circuit, it is desirable that the circuit gain be 0 dB or less at frequency 21, where the phase reaches 180° in the loop gain. This is because if the circuit gain is 0 dB or less at frequency 21, the circuit will be stably controlled without abnormal operation (abnormal oscillation). In Figure 3A, compared to the ideal gain characteristics shown by the solid line, a conventional high-voltage amplifier circuit with a feedback circuit as shown in Figure 2 performs phase compensation by reducing the gain as shown by the dashed line. However, with the level of gain reduction shown in "Conventional Countermeasure (1)", the gain at the frequency where the phase reaches 180° does not fall below 0 dB. Therefore, in conventional high-voltage amplifier circuits, as shown in "Conventional Countermeasure (2)" in Figure 3B, it is necessary to further reduce the circuit gain so that the gain at the frequency where the phase reaches 180° is 0 dB or less. However, this results in a significant decrease in the gain over the desired operating bandwidth, which has the disadvantage of leading to excessive slowdown of the circuit operation.

[0027] In contrast, by providing the open-loop gain control circuit 6 shown in Figures 1A and 1B, the circuit gain can be freely controlled near the frequency 21 where the phase reaches 180°. Therefore, as shown by the dashed line in Figure 3A, the gain is reduced sharply from outside the desired operating band 22 to near the frequency 21 where the phase reaches 180°. By setting the resistance values ​​of the resistors Ro1 and Rg, and the capacitance of the capacitor Co1 connected in parallel with Ro1, it is possible to reduce the gain to 0 before reaching frequency 21. In other words, by appropriately designing the open-loop gain control circuit, it is possible to achieve the gain change 23.

[0028] Furthermore, as shown in Figure 2, even when a phase compensation function is added to the error amplification circuit, the speed must be reduced in order to ensure stability, making it highly likely that it cannot handle high speeds. Moreover, in conventional circuits in which a phase compensation circuit is added to the feedback circuit, the feedback circuit is a high-voltage circuit, and the components used in the phase compensation circuit require high voltage resistance, so the usable component values ​​are limited, and stable design can be difficult. [Examples]

[0029] Example 2 of the present invention will be explained using Figure 4.

[0030] Figure 4 shows an example in which a voltage divider resistor Ro2 is added between Ro1 and Rg in the open-loop gain control circuit 6 of the high-voltage amplifier circuit 1 shown in Figure 1. In the absence of Ro2, the potential of xb is equal to the potential of the xa contact.

[0031] Let's consider the case where Ro2 is absent (corresponding to the configurations in Figures 1A and 1B). In this case, Co1 and Rg form a differentiating circuit, so if the supply high voltage (high voltage output) changes abruptly due to the operation of the high-voltage amplifier circuit (see Figure 5(a)), spike noise may be generated at contact xa due to the differentiating circuit (see Figure 5(b)).

[0032] Depending on the design guidelines and circuit configuration of the multi-stage voltage conversion circuit 3, the overall noise of the high-voltage amplification circuit may increase due to the influence of spike noise generated at the xa contact.

[0033] Here, by adding Ro2 for voltage division between Ro1 and Rg, even if spike noise occurs at contact xa, it can be reduced by voltage division. Ultimately, since the noise level of the open-loop control signal also depends on the noise at contact xb, the reduced spike noise is transmitted (see Figure 5(c)), thus reducing the impact on the multi-stage voltage conversion circuit 3 and suppressing the rise in the overall noise level of the high-voltage amplification circuit. Note that if the allowable noise voltage level of the multi-stage voltage conversion circuit 3 is Vn, the voltage division ratio of the voltage division circuit formed by Ro1, Ro2, and Rg must be such that the voltage level of xb is ≤Vn. The same design guidelines must be observed even when Ro3 is added in Example 3 described later. [Examples]

[0034] Embodiment 3 of the present invention will be explained using Figures 6A and 6B.

[0035] Figure 6A shows an embodiment in which an inductive load is driven using two high-voltage amplifier circuits 1 as shown in Figures 1A and 1B. That is, it is an example in which the high-voltage amplifier circuits 1 are connected to both ends of the inductive load, driving the inductive load on both the positive and negative sides.

[0036] The positive and negative circuits operate in opposite phases and supply power to the inductive load.

[0037] In devices or applications that supply high voltage using the high-voltage amplification circuit 1, parasitic capacitance components may be generated from the medium through which the supplied high voltage is transmitted. Furthermore, depending on the circuit implementation, the parasitic capacitance components generated on the positive and negative sides may not be the same, resulting in a characteristic imbalance between the positive and negative sides.

[0038] When this characteristic imbalance occurs, the charging and discharging current of the parasitic capacitance component may cause spike noise or characteristic deviations in the high-voltage amplification circuit. To counter this, in this embodiment, as shown in Figure 6A, a damping resistor Ro3 is added between Ro1 and the supply high voltage in the open-loop gain control circuit 6. By adding Ro3 near Co1 and between Co1 and the supply high voltage, the charging and discharging current from the parasitic capacitance component is reduced, and the influence of the current flowing into the open-loop gain control circuit is suppressed, thereby suppressing the occurrence of characteristic deviations and spike noise. [Examples]

[0039] An example 4 in which the high-voltage amplification circuit of the present invention is applied to a mass spectrometer will be described with reference to Figure 7.

[0040] The mass spectrometer of this embodiment includes an ion source 121 that ionizes the sample to be mass analyzed, an ion filter unit 126 that filters the ionized sample so that only ion molecules with the mass of the target to be analyzed are allowed to pass through, an ion control unit 128 that controls the orbits of ion molecules and causes them to collide with a conversion dynode 122 to obtain electrons, a scintillator 123 that converts the obtained electrons into photons, a photodetector (not shown) that acquires an electrical signal from the converted photons, an information processing unit 129 that calculates the mass from the obtained electrical signal, a first high-voltage amplification circuit 130 that applies voltage to the ion source 121, a second high-voltage amplification circuit 131 that applies voltage to the ion filter unit 126, a third high-voltage amplification circuit 132 that applies voltage to the conversion dynode 122, a fourth high-voltage amplification circuit 133 that applies voltage to the scintillator 123, and a mass spectrometer control unit 134 that controls the high-voltage amplification circuits.

[0041] The first high-voltage amplifier circuits 130 to the fourth high-voltage amplifier circuits 133 are composed of the high-voltage amplifier circuits described in Example 1. The mass spectrometer control unit 134 supplies the input signal shown in Figure 1A to the corresponding first high-voltage amplifier circuits 130 to the fourth high-voltage amplifier circuits 133, and each high-voltage amplifier circuit outputs a supply high voltage according to the supplied input signal.

[0042] The input signal is a low-voltage signal of less than 300V, while the supply high voltage is a high voltage of 300V or higher, suitable for controlling ionization and ion orbitals. Therefore, in each high-voltage amplification circuit, the maximum voltage handled by the low-voltage circuit 8 (Figure 1) is less than 300V, and the maximum voltage handled by the high-voltage circuit 7 (Figure 1) is 300V or higher.

[0043] Each voltage source—the ion source 121, the ion filter section 126, the conversion dynode 122, and the scintillator 123—requires a different high voltage value suitable for its respective purpose. Therefore, a corresponding high-voltage amplification circuit is installed for each voltage source. Specifically, the first high-voltage amplification circuit 130 outputs a supply high voltage to the ion source 121 according to its input signal, the second high-voltage amplification circuit 131 outputs a supply high voltage to the filter electrode 127 in the ion filter section 126 according to its input signal, the third high-voltage amplification circuit 132 outputs a supply high voltage to the conversion dynode 122 according to its input signal, and the fourth high-voltage amplification circuit 133 outputs a supply high voltage to the scintillator 123 according to its input signal.

[0044] Figure 7 illustrates an example in which high voltage is supplied from the high-voltage amplifier described in Example 1 to the ion source 121, ion filter section 126, conversion dynode 122, and scintillator 123. However, high voltage may be supplied from the high-voltage amplifier described in Example 1 to at least one of these components.

[0045] If it is sufficient to apply high voltages of equivalent voltage values ​​to each of the ion source 121, ion filter section 126, conversion dynode 122, and scintillator 123, then a single common high-voltage amplifier may be incorporated.

[0046] Mass spectrometers, especially those used in medical devices, require the measurement of a vast number of samples for different analytical parameters, i.e., different target substances. Therefore, it is necessary to rapidly switch the voltage applied to the multi-pole electrodes of the mass spectrometer to match the mass-to-charge ratio (m / z) of each target substance.

[0047] The left panel of Figure 8 plots the m / z of the ions being measured on the vertical axis and time on the horizontal axis. When measuring different target substances m1, m2, m3, and m4, Δm is largest, especially when switching from m3 to m4. When Δm is large, as shown in the right panel of Figure 8, the rise time of the ion signal becomes slower, which could lead to a decrease in measurement sensitivity. When using a conventional high-voltage amplification circuit, in order to ensure sensitivity, it is necessary to wait until the relative value of the ion amount increases to around 1 before starting the measurement, that is, to delay the start time of the measurement, but this has the problem of reducing the analysis throughput of the instrument.

[0048] By using the high-voltage amplification circuit according to this embodiment, the rise time of the supplied high voltage is increased, and as shown in Figure 9, the rise time of the measured ion amount is also increased, enabling high-speed measurement without causing a decrease in measurement sensitivity. Specifically, when ion analysis is performed and measurement is started at the measurement start time shown in the right diagram of Figure 8, conventional technology resulted in a signal loss of more than 20%, but with the mass spectrometer using the high-voltage amplification circuit of this embodiment, the signal loss could be reduced to less than 10%.

[0049] Another effect of the present invention is that it can improve waveform distortion when switching the supply high voltage. As shown in Figure 10, overshoot occurs when switching the supply high voltage using a conventional high-voltage amplification circuit. When using the high-voltage amplification circuit of this embodiment, no waveform distortion is observed, and improvements in voltage switching speed (time t1 until the output voltage reaches half of the predetermined voltage is reduced by 20%) and time to voltage stabilization (time t2 until the output voltage stabilizes at the predetermined voltage is reduced by 50%) can be achieved.

[0050] The high-voltage power supply module mounted in the mass spectrometer of this embodiment includes at least one high-voltage amplification circuit as described in Figures 1 to 5. This enables the provision of high-speed high voltage to various parts of a medical mass spectrometer where throughput is important, thereby providing a mass spectrometer capable of high-speed analysis. Furthermore, the detection sensitivity of a mass spectrometer is greatly influenced by the amount of noise in the high-voltage amplification circuit. Therefore, by incorporating a high-voltage amplification circuit with noise reduction means as described in Figures 2 and 5, a highly sensitive mass spectrometer can be provided.

[0051] Although various embodiments of the present invention have been described above, the present invention is not limited to the embodiments described above and includes various modifications. Furthermore, the embodiments described above are described in detail for the purpose of explaining the present invention in an easy-to-understand manner and are not necessarily limited to those having all the configurations described. In addition, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. All of these fall within the scope of the present invention. Moreover, the numerical values ​​and names included in the text and figures are merely examples, and using different ones will not impair the effects of the present invention.

[0052] Furthermore, it is possible to add, delete, or replace some of the configurations in each embodiment with other configurations. In addition, some or all of the above configurations, functions, circuits, etc., may be realized by designing them, for example, as integrated circuits or programmable semiconductor chips. [Explanation of Symbols]

[0053] 1: High-voltage amplification circuit 2: Error Amplifier Circuit 3: Multi-stage voltage conversion circuit 4: Multi-stage transistor output circuit 5: Feedback Circuit 6: Open-loop gain control circuit 7: High-voltage circuits 21: Frequency 22: Operating bandwidth 23: Gain Change 121: Ion source 122: Conversion Dynode 123: Scintillator 126: Ion filter section 128: Ion Control Unit 129: Information Processing Unit 130: First high-voltage power supply module 131: Second high-voltage power supply module 132: Third High Voltage Power Module 133: Fourth High Voltage Power Module 134: Mass Spectrometer Control Unit

Claims

1. An error amplification circuit that outputs a control signal based on the input signal and the feedback signal, A voltage conversion circuit that adjusts the potential of the control signal output from the error amplification circuit, A multi-stage transistor output circuit that outputs a supply high voltage based on the output of the voltage conversion circuit, A feedback circuit that outputs the feedback signal to be input to the error amplification circuit based on the supply high voltage, A high-voltage amplifier comprising: a plurality of resistive elements; and a capacitive element connected in parallel with at least one of the plurality of resistive elements, which imparts a phase characteristic having poles and zeros to the open-loop gain; and an open-loop gain control circuit which generates a gain control signal for controlling the voltage conversion circuit based on the supply high voltage output from the multi-stage transistor output circuit.

2. In the high-voltage amplifier according to claim 1, The open-loop gain control circuit is characterized in that the resistance values ​​of the plurality of resistive elements and the capacitance of the capacitive elements are set such that the gain is sharply reduced from outside the desired operating band to near the frequency where the phase becomes 180°, and the gain becomes 0 or less before reaching the aforementioned frequency.

3. In the high-voltage amplifier according to claim 1, A high-voltage amplifier characterized in that the supply high voltage is 300V or higher.

4. In the high-voltage amplifier according to claim 1, A high-voltage amplifier characterized by having a high-voltage circuit that operates at a high voltage of 300V or more and a low-voltage circuit that operates at a low voltage of less than 300V, each located in different areas on the same printed circuit board, or each located on a separate printed circuit board.

5. In the high-voltage amplifier according to claim 4, The high-voltage circuit includes the multi-stage transistor output circuit, a part of the voltage conversion circuit, and a part of the open-loop gain control circuit. The high-voltage amplifier is characterized in that the low-voltage circuit includes the error amplification circuit, a part of the voltage conversion circuit, and a part of the open-loop gain control circuit.

6. In the high-voltage amplifier according to claim 1, A high-voltage amplifier characterized in that, among the resistive elements of the open-loop gain control circuit, a resistive element Ro2 is provided between the feedback resistive element Ro1 that determines the open-loop gain and the ground resistive element Rg, for dividing and reducing the noise signal.

7. The invention comprises two high-voltage amplifiers as described in claim 1, wherein each high-voltage amplifier is configured to drive the same inductive load with an inverse phase voltage. A high-voltage amplifier characterized by having a damping resistor Ro3 between the output terminal of the supply high voltage output from each of the two high-voltage amplifiers and the feedback resistor Ro1 of the open-loop gain control circuit.

8. A mass spectrometer comprising an ion source for ionizing a sample, an ion filter for filtering ions, and a detector for detecting ions, A high-voltage amplifier that supplies a high voltage to at least one of the ion source, the ion filter, and the detector, A mass spectrometer characterized by including the high-voltage amplifier described in claim 1.

9. In the mass spectrometer according to claim 8, The mass spectrometer comprises a high-voltage amplifier corresponding to the ion source, the ion filter, and the detector, respectively.

10. In the mass spectrometer according to claim 8, The mass spectrometer is characterized in that the high-voltage amplifier has at least two boards: a high-voltage circuit board with a maximum voltage of 300V or more, and a low-voltage circuit board with a maximum voltage of less than 300V.

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