Concentration calculation device

Abstract

This technology can improve convenience by enabling the measurement of droplet concentration during operation of equipment that generates droplets, and by improving the accuracy of the measurement. [Solution] The object to be measured is attached to a predetermined surface of the prism. The optical mechanism sends light to the prism to which the object to be measured is attached. The camera photographs the predetermined surface of the prism and acquires an image. The housing integrates the prism, the optical mechanism, and the camera. The density calculation unit corrects the absorption spectrum, which is measured by passing the light sent by the optical mechanism through the prism and causing total internal reflection at the predetermined surface, based on the image captured by the camera, and calculates the density of the object to be measured based on the corrected absorption spectrum.

Description

Technical Field

[0001] The present invention relates to a concentration calculation device.

Background Art

[0002] ATR (Attenuated Total Reflection) is one of the methods for optically measuring the concentration of a small amount of substance. In ATR, incident light from a light source is made to totally reflect on the surface where the measurement object and the prism are in contact after passing through the prism, and is emitted as outgoing light. In total reflection, the incident light penetrates into the measurement object by the penetration depth and obtains the light absorption information of the measurement object. Therefore, by measuring the outgoing light, an absorption spectrum caused by the measurement object can be obtained.

[0003] However, ATR assumes that the measurement object exists continuously at least in the range where the light hits the prism. Therefore, in a conventional concentration calculation device using ATR, when the measurement objects are scattered in the range where the light hits, accurate measurement is difficult due to the influence of the coverage rate of the measurement object substance. Thus, a technique for calculating the coverage rate of the measurement object substance on the prism and calculating the concentration after correcting the absorption spectrum using the coverage rate has been studied. As a method for calculating the coverage rate, a method using an image obtained by photographing the state of the target substance can be considered.

[0004] As a concentration calculation device, a technique has been proposed in which the absorption spectral intensity of a sample is measured using the total internal reflection attenuation method with light incident from a light source, and the concentration is calculated by correcting the measured absorption intensity based on the difference in absorption intensity when it passes through a normalization filter (for example, Patent Document 1). Another technique has been proposed in which the ratio of the area where the object to be measured is located to the area of ​​the area where the incident light of the total internal reflection method strikes in a camera image is calculated, and the concentration is calculated by correcting the absorbance spectrum measured by the total internal reflection method based on this ratio (for example, Patent Document 2). Furthermore, a technique has been proposed in which infrared rays transmitted through a substrate to which a chemical substance is attached or infrared rays reflected from the surface of the substrate are analyzed to determine the amount of chemical substance attached to the substrate, and the concentration of the chemical substance is calculated based on the amount attached (for example, Patent Document 3). [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2012-132745 [Patent Document 2] Japanese Patent Publication No. 2021-162380 [Patent Document 3] Japanese Patent Publication No. 2002-286636 [Overview of the project] [Problems that the invention aims to solve]

[0006] However, no camera with built-in ATR functionality exists, and concentration calculation devices must be designed with separate cameras and ATR-based concentration measurement mechanisms, making it difficult to correct for concentration based on coverage. Therefore, it is difficult to perform measurements of droplet concentration during operation of equipment that generates droplets, and to improve the accuracy of these measurements, making it difficult to improve the convenience of concentration calculation devices.

[0007] Furthermore, in techniques that use absorption intensity during filter passage for correction, the coverage rate of the prism of the object being measured, which is a problem in total internal reflection, is not taken into consideration, making it difficult to correct the concentration in concentration measurements using total internal reflection. Similarly, in techniques that use infrared light to calculate the amount of chemical substances deposited on a substrate, the coverage rate is not taken into consideration, making it difficult to correct the concentration in concentration measurements using total internal reflection. Moreover, in techniques that use camera images to calculate the area ratio of the portion where the object being measured is present, the camera and the concentration measurement mechanism using ATR are arranged separately, making it difficult to measure droplet concentration during operation of equipment that generates droplets, or to improve the measurement accuracy of concentration measurements. Therefore, even with the above techniques, it is difficult to improve the convenience of concentration calculation devices.

[0008] One aspect of the present invention is to improve convenience by enabling highly accurate measurement of droplet concentration during operation of equipment that generates droplets. [Means for solving the problem]

[0009] The concentration calculation device for one side has the following parts: A prism has a predetermined surface on which the object to be measured adheres. An optical mechanism sends light to the prism on which the object to be measured adheres. A camera photographs the predetermined surface of the prism and acquires an image. A housing integrates the prism, the optical mechanism, and the camera. The concentration calculation unit corrects the absorption spectrum, which is measured by passing the light sent by the optical mechanism through the prism and causing total internal reflection at the predetermined surface, based on the image captured by the camera, and calculates the concentration of the substance contained in the object to be measured based on the corrected absorption spectrum. [Effects of the Invention]

[0010] According to the present invention, convenience can be improved. [Brief explanation of the drawing]

[0011] [Figure 1] This figure shows a concentration calculation device, including the external appearance of an ATR device with a camera. [Figure 2] It is a configuration diagram of an ATR device with a camera according to the first embodiment. [Figure 3] It is a cross-sectional view taken along the line A-A' of the ATR with a camera. [Figure 4] It is a block diagram of the arithmetic unit. [Figure 5] It is a sequence diagram of the density calculation process using the absorption data and the image data. [Figure 6] It is a timing chart showing an example of the density calculation process. [Figure 7] It is a diagram showing the arrangement of the camera and the lens in the ATR device with a camera according to the modified example. [Figure 8] It is a configuration diagram of an ATR device with a camera according to the second embodiment. [Figure 9] It is a configuration diagram of an ATR device with a camera according to the third embodiment. [Figure 10] It is a configuration diagram of an ATR device with a camera according to the fourth embodiment. [Figure 11] It is a diagram showing the details of the cooling mechanism. [Figure 12] It is a hardware configuration diagram of the arithmetic unit.

Mode for Carrying Out the Invention

[0012] Hereinafter, embodiments of the density calculation device will be described with reference to the drawings. In the following description, the same reference numerals are assigned to the same elements, and redundant descriptions will be omitted as appropriate. Also, the respective embodiments can be appropriately combined within a range without contradiction.

[0013] (First Embodiment) (Overall Configuration) FIG. 1 is a diagram showing a density calculation device including the external appearance of an ATR device with a camera. In FIG. 1, among the various components mounted on the ATR device with a camera 1, the components visible from the outside are exemplified. Details of the inside of the ATR device with a camera 1 will be described later. The density calculation device 10 includes the ATR device with a camera 1 and the arithmetic unit 2, and the ATR device with a camera 1 is connected to the arithmetic unit 2.

[0014] The ATR device 1 with a camera is a device that synchronously performs optical measurement of a substance to be subjected to concentration calculation by ATR and imaging of the substance to be subjected to concentration calculation. The ATR device 1 with a camera has a housing 100. The housing 100 stores, for example, a prism 105, a camera 111, a lens 112, a focus adjustment stage 113, and the like.

[0015] The ATR device 1 with a camera captures an image of the substance to be subjected to concentration calculation adhering to the prism 105 with the camera 111. Further, the ATR device 1 with a camera performs optical measurement of the substance to be subjected to concentration calculation adhering to the prism 105 by a mechanism that performs optical measurement by ATR having an XYZ stage 104 or the like.

[0016] For example, the ATR device 1 with a camera is installed in a chamber of an isolator used in pharmaceutical production, clinical trials, or the like. The chamber is decontaminated periodically using hydrogen peroxide water to remove microorganisms. The ATR device 1 with a camera performs optical measurement and imaging of the hydrogen peroxide water used for decontamination adhering to the prism 105.

[0017] The arithmetic unit 2 receives an input of the result of optical measurement of the substance to be subjected to concentration calculation and the image data of the captured image from the ATR device 1 with a camera. Then, the arithmetic unit 2 corrects the absorption spectrum obtained by optical measurement using the image data of the captured image, and calculates the concentration of the substance to be subjected to concentration calculation.

[0018] (ATR device with a camera) FIG. 2 is a configuration diagram of the ATR device with a camera according to the first embodiment. The ATR device 1 with a camera has a housing 100, a white light source 201, a spectroscope 202, an MPU (Micro Processing Unit) 203, and a lighting light source 204. The housing 100 stores collimating lenses 101 and 103, XYZ stages 102 and 104, a prism 105, and a camera unit 110.

[0019] The white light source 201 is a light source that emits white light containing wavelengths absorbed by the target substance P. The white light source 201 irradiates light toward the ATR fiber 211. The irradiated light is sent to the collimating lens 101 via the ATR fiber 211.

[0020] The collimating lens 101 receives light emitted from the ATR fiber 211. The light emitted from the ATR fiber 211 spreads radially due to the NA (Numerical Aperture) of the ATR fiber 211. Therefore, the collimating lens 101 receives the light emitted from the ATR fiber 211 and emits it as parallel light.

[0021] The XYZ stage 102 is a mechanism for adjusting the relative position between the collimating lens 101 and the ATR fiber 211. The XYZ stage 102 performs XY adjustment to align the center of the ATR fiber 211 with the center of the collimating lens 101, and Z adjustment to change the distance between them so that the light emitted from the collimating lens 101 becomes parallel light.

[0022] The prism 105 is manufactured from a material that satisfies the total internal reflection condition with respect to the target substance P. One surface of the prism 105 is exposed to the outside from the housing 100. The target substance P to be measured is attached to the surface of the prism 105 that is exposed to the outside. In this way, the target substance P to be measured is attached to a predetermined surface of the prism 105. Then, the prism 105 receives incident parallel light emitted from the collimating lens 101.

[0023] The light incident on prism 105 travels towards the surface exposed to the outside of prism 105 at a predetermined angle of incidence and is reflected by the surface of prism 105 attached to the target substance P. The light that strikes the portion of the incident light in which the target substance P is present generates evanescent light within the target substance P and is reflected as light containing the absorption information of the target substance P. The light that strikes the portion of the incident light other than the portion in which the target substance P is present is reflected as light that does not contain the absorption information of the target substance P. The incident light is reflected at least once at the surface in contact with prism 105 where the target substance P is present. The angle of incidence is adjusted so as to satisfy the total internal reflection condition at the surface of prism 105, under the conditions of the concentration of the target substance P and the refractive index of prism 105.

[0024] The reflected light is emitted from prism 105. The light emitted from prism 105 contains absorbance information of the target substance P that is within the depth range of the evanescent light penetration.

[0025] The collimating lens 103 receives the light emitted from the prism 105. The collimating lens 103 then focuses the emitted light and directs it onto the ATR fiber 212. The illuminated light is then sent to the spectrometer 202 via the ATR fiber 212.

[0026] The spectrometer 202 has a wavelength range that includes the wavelength absorbed by the target substance P, and has a measurement speed that can track changes in concentration. The spectrometer 202 measures the absorption spectrum. The spectrometer 202 then transmits the measured absorption spectrum to the computing unit 2.

[0027] The camera unit 110 is an imaging mechanism that photographs the target substance P attached to the surface of the prism 105 through the prism 105. The camera unit 110 includes a camera 111, a lens 112, a focus adjustment stage 113, and a mirror 114.

[0028] Figure 3 is a cross-sectional view of the ATR with camera along line segment A-A'. Figure 3 shows a cross-section of the ATR device 1 with camera shown in Figure 2 along line segment A-A'.

[0029] The mirror 114 is, for example, a triangular prism. The mirror 114 rotates the light that forms the image of the prism 105, to which the target substance P is attached, by 90 degrees and directs it towards the lens 112. Conversely, the mirror 114 rotates the optical axis of the camera 111 by 90 degrees and directs it perpendicular to the surface of the prism 105 to which the target substance P is attached.

[0030] The focus adjustment stage 113 is a mechanism for adjusting the focus of the camera 111. The focus adjustment stage 113 adjusts the focus of the camera 111 so that it matches the surface of the prism 105 to which the target substance P is attached.

[0031] Lens 112 is, for example, a telecentric lens developed to measure the dimensions of a target substance P. Here, dimensions include information such as the individual area and perimeter of the target substance P attached to the prism 105.

[0032] However, lens 112 is not limited to a telecentric lens. For example, lens 112 may be a wide-angle lens. Since wide-angle lenses have a shorter barrel length than telecentric lenses, it is possible to miniaturize the housing 100 of the ATR device 1 with camera.

[0033] A lens 112 is attached to the camera 111. The optical axis of the camera 111 is directed towards the mirror 114 via the lens 112. The light that forms the image of the surface of the prism 105 to which the target substance P is attached is rotated by the mirror 114 and incident on the camera 111 via the lens 112. As a result, the camera 111 captures an image of the prism 105 to which the target substance P is attached. The image captured by the camera 111 is sent to the computing unit 2 via the MPU 203.

[0034] In this way, the optical axis of the camera 111 is set so that it can take images perpendicular to the prism 105 at the same location where the spectroscopic measurement by ATR is being performed. This allows the camera 111 to photograph the target substance P, which is a minute object attached to the prism 105. Furthermore, by rotating the optical axis of the camera 111 using the mirror 114, the degree of flexibility in the installation method of the camera 111 can be increased.

[0035] Here, the collimating lenses 101 and 103, and the XYZ stages 102 and 104 are examples of the "optical mechanism." That is, the optical mechanism sends light to the prism 105 to which the target substance P, which is to be measured, is attached. In other words, the housing 100 integrates the prism 105, the optical mechanism, and the camera 111. Here, the camera 111 and lens 112 can also be considered as an example of the "camera." Alternatively, the camera unit 110 can be considered as an example of the "camera." In that case, the housing 100 can be said to integrate the prism 105 and the optical mechanism with the camera unit 110, or the camera 111 and lens 112, as an integrated unit. Furthermore, the camera 111 has an optical axis parallel to the predetermined surface on which the target substance P is attached to the prism 105.

[0036] Furthermore, the mirror 114 is an example of an "optical axis rotation unit." The 90-degree rotation by the mirror 114 is an example of a "predetermined angle rotation." In other words, the optical axis rotation unit rotates the optical axis of the camera 111 by a predetermined angle so that it faces a predetermined plane of the prism 105. The optical mechanism included in the housing 100 may include the mirror 114, which is the optical axis rotation unit. The camera 111 can then capture images obtained via the optical axis rotation unit.

[0037] The illumination light source 204 is the light source for the camera unit 110 to take photographs. The light emitted from the illumination light source 204 is sent to the camera unit 110 via the fiber 214 and used to photograph the prism 105 to which the target substance P is attached.

[0038] The MPU203 is connected to the camera 111 via a USB cable 213. The MPU203 controls the camera 111's image capture. For example, the MPU203 receives instructions on the capture timing from the arithmetic unit 2 and causes the camera 111 to capture an image at the specified timing. The MPU203 may also be mounted on the arithmetic unit 2.

[0039] The computing device 2 is connected to the spectrometer 202 and camera 111 by wire or wireless connection and is capable of communicating with the spectrometer 202 and camera 111. The computing device 2 is, for example, a computer such as a personal computer or a server device. The computing device 2 has a processor such as a CPU (Central Processing Unit) and memory which is a storage device.

[0040] Figure 4 is a block diagram of the arithmetic unit. The arithmetic unit 2 includes an absorbance data processing unit 21, a timing controller 22, an image data processing unit 23, and a data storage unit 24. The program for executing the processing of this embodiment is loaded into memory and executed by the processor to realize the functions of the absorbance data processing unit 21, timing controller 22, and image data processing unit 23 in Figure 2. The arithmetic unit 2 may also be composed of multiple devices.

[0041] The image data processing unit 23 receives image data captured by the camera 111 from the camera 111. The image data processing unit 23 performs image processing, such as image feature calculation, on the received image data to enable it to distinguish between regions where the target substance P exists and regions where the target substance does not exist.

[0042] Here, the time taken by the camera 111 is shorter than the measurement time taken by the spectrometer 202. Therefore, the image data processing unit 23 calculates a correction value using the statistical values ​​of the image data of multiple images taken during the measurement by the spectrometer 202. Here, the interval between images taken by the camera 111 is an example of a "predetermined interval". For example, the image data processing unit 23 performs a smoothing process on the image data of multiple images taken during the measurement by the spectrometer 202. This smoothing process is an example of a "statistical calculation". Then, the image data processing unit 23 outputs the smoothed image data to the absorbance data processing unit 21.

[0043] The absorbance data processing unit 21 acquires the absorbance spectrum measured by total internal reflection from the spectrometer 202 via communication. The absorbance data processing unit 21 also receives the smoothed image data as input from the image data processing unit 23.

[0044] The absorbance data processing unit 21 analyzes the received smoothed image data and calculates the area ratio, which is the ratio of the area of ​​the droplet to the area of ​​the portion illuminated by the incident light in the total internal reflection measurement method. Here, if the area of ​​the portion illuminated by the incident light is equal to the area of ​​the portion captured by the camera 111, the absorbance data processing unit 21 can use the area of ​​the portion captured by the camera 111 as the area of ​​the portion illuminated by the incident light.

[0045] Here, even if a standard wide-angle lens is used for lens 112, the absorbance data processing unit 21 can calculate the coverage ratio using a similar calculation if the height of the target substance P is low. The information obtained from the image data for density calculation is the coverage ratio, which is the area ratio of the part of the target substance P that is in contact with the prism 105. Regarding this coverage ratio, both the part where the target substance P is attached and the part where it is not attached are magnified equally, so it is thought that a value similar to that obtained when using a telecentric lens can be obtained even when using a wide-angle lens for lens 112.

[0046] Furthermore, when a standard wide-angle lens is used for lens 112, it is preferable to perform dimensional correction based on the location in the image in order to measure the dimensions of the target substance P. Therefore, when a wide-angle lens is used for lens 112, the absorbance data processing unit 21 can measure the dimensions of the target substance P by adding a trapezoidal correction process on a plane that corrects for spread from the center outwards.

[0047] Next, the absorbance data processing unit 21 calculates a correction value by providing one or more parameters, including the calculated area ratio, to a pre-given formula. The correction value is a value that has a negative correlation with the area ratio, and the smaller the area ratio, the greater the degree of correction. By using the calculated correction value, the absorbance data processing unit 21 can obtain an absorbance spectrum similar to that obtained when the target substance P is present throughout the entire prism 105.

[0048] Furthermore, when a telecentric lens that measures the dimensions of the target substance P is used as the lens 112, the absorbance data processing unit 21 can obtain height information of the target substance P by performing a luminance analysis of the target substance P. Therefore, the absorbance data processing unit 21 can calculate a correction value considering the height information of the target substance P. This makes it possible to improve the accuracy of concentration calculation when the target substance P attached to the prism 105 is small.

[0049] The absorbance data processing unit 21 calculates the absorbance spectrum of the target substance P by correcting the received absorbance spectrum with a calculated correction value. For example, the absorbance data processing unit 21 calculates the absorbance spectrum of the target substance P by multiplying the absorbance spectrum by a correction value. Subsequently, the absorbance data processing unit 21 stores the concentration data, including the calculated absorbance spectrum of the target substance P, in the data storage unit 24. Alternatively, the absorbance data processing unit 21 may display the calculated concentration data on a monitor or the like (not shown) and provide it to the user.

[0050] In this embodiment, the area ratio was calculated based on image data that had been smoothed by the image data processing unit 23. However, the absorbance data processing unit 21 may calculate the area ratio for each image data and then perform the smoothing process on the calculated area ratio.

[0051] The timing controller 22 controls the timing of image data processing and the calculation of concentration data including the absorbance spectrum in the absorbance data processing. The timing controller 22 monitors the progress of absorbance data processing by the absorbance data processing unit 21. While absorbance data processing is being performed, the timing controller 22 causes the image processing of the image data processing unit 23 to be repeated and accumulate a group of image data. Then, when the absorbance data processing by the absorbance data processing unit 21 is completed, the timing controller 22 causes the image data processing unit 23 to perform smoothing processing using the accumulated image data. After that, the timing controller 22 causes the image data after the smoothing process to be transmitted to the absorbance data processing unit 21.

[0052] The absorbance data processing unit 21 and the image data processing unit 23 are examples of a "density calculation unit." Specifically, the density calculation unit corrects the absorbance spectrum, which is measured by passing light sent by the optical mechanism through the prism 105 and causing total internal reflection at a predetermined surface, based on the image captured by the camera 111. Then, the density calculation unit calculates the density of the object to be measured based on the corrected absorbance spectrum.

[0053] Furthermore, while the concentration calculation unit acquires the absorbance spectrum, the timing controller 22 accumulates a group of images captured by the camera unit 110 at predetermined intervals, and provides the group of images to the concentration calculation unit when the acquisition of the absorbance spectrum by the concentration calculation unit is complete. The concentration calculation unit then calculates the concentration based on the group of images and the absorbance spectrum provided by the timing controller 22. The concentration calculation unit also performs statistical calculations on the group of images provided by the timing controller 22 and calculates the concentration based on the statistical values ​​and the absorbance spectrum.

[0054] Furthermore, the camera 111 can take images using a wide-angle lens, and the density calculation unit can perform trapezoidal correction processing to calculate the dimensions of the object to be measured.

[0055] (Concentration calculation process) Figure 5 is a sequence diagram of the concentration calculation process using absorbance data and image data. Next, the flow of the concentration calculation process using absorbance data and image data will be explained with reference to Figure 5. In Figure 5, the leftmost axis represents the absorbance data system processing, which uses absorbance data. The central axis in Figure 5 represents the timing control process, which adjusts the timing between the absorbance data system processing and the image data system processing. The rightmost axis in Figure 5 represents the image data system processing, which uses image data.

[0056] The process of acquiring absorbance data is performed (step S11) in which light emitted from the white light source 201 passes through the collimating lens 101, undergoes total internal reflection at the surface of the prism 105 to which the target substance P is attached, and then passes through the collimating lens 103 before being incident on the spectrometer 202.

[0057] Next, the spectrometer 202 performs absorbance data processing to obtain an absorbance spectrum from the acquired absorbance data (step S12).

[0058] The timing controller 22 monitors the progress of absorbance data processing by the spectrometer 202 (step S13). Then, when the absorption data processing by the spectrometer 202 is completed, the timing controller 22 executes a timing control process that instructs the image data processing unit 23 to transmit the image data (step S14).

[0059] The timing controller 22 determines whether or not to terminate the concentration calculation process for the target substance P (step S15). If the concentration calculation process is not terminated (step S15: negative), the timing controller 22 returns to step S14 and repeats the process. If the concentration calculation process is terminated (step S15: positive), the timing controller 22 terminates the timing control process.

[0060] Camera 111 photographs the surface of prism 105 to which the target substance P is attached and acquires image data (step S16).

[0061] Next, the image data processing unit 23 performs image processing on the acquired image data (step S17).

[0062] Next, the image data processing unit 23 determines whether or not the timing for transmitting image data has arrived, based on whether or not it has received an instruction from the timing controller 22 to transmit image data (step S18).

[0063] If the timing for transmitting image data has not yet arrived (step S18: negative), the image data processing unit 23 temporarily stores the image data in its own storage buffer (step S19).

[0064] Subsequently, the image data processing unit 23 determines whether or not to terminate the concentration calculation process of the target substance P (step S20). If the concentration calculation process is not terminated (step S20: negative), the image data processing returns to step S16 and the process is repeated. If the concentration calculation process is terminated (step S20: positive), the image data processing unit 23 terminates the processing of the image data.

[0065] In response to this, when the timing for transmitting image data arrives (step S18: affirmative), the image data processing unit 23 retrieves the accumulated image data stored in the holding buffer and performs a smoothing process (step S21).

[0066] The image data processing unit 23 then transmits the smoothed image data to the absorbance data processing unit 21. The absorbance data processing unit 21 receives the smoothed image data from the image data processing unit 23 (step S22).

[0067] Next, the absorbance data processing unit 21 analyzes the image data and calculates the area ratio, which is the ratio of the area of ​​the droplet to the area of ​​the area hit by the incident light of the total internal reflection measurement method. The absorbance data processing unit 21 calculates a correction value by providing one or more parameters, including the calculated area ratio, to a pre-given formula. Then, the absorbance data processing unit 21 calculates concentration data including the absorbance spectrum of the target substance P by correcting the absorbance spectrum with the calculated correction value. The absorbance data processing unit 21 performs the concentration data processing as described above (step S23).

[0068] Next, the absorbance data processing unit 21 stores the concentration data in the data storage unit 24 (step S24).

[0069] Subsequently, the absorbance data processing unit 21 determines whether or not to terminate the concentration calculation process for the target substance P (step S25). If the concentration calculation process is not terminated (step S25: negative), the absorbance data processing returns to step S11 and the process is repeated. If the concentration calculation process is terminated (step S25: positive), the absorbance data processing unit 21 terminates the processing of the absorbance data.

[0070] Figure 6 is a timing chart showing an example of the concentration calculation process. Next, the synchronization process in the concentration calculation process will be explained in detail with reference to Figure 6. Figure 6 shows that time progresses according to the direction indicated by the arrows on each axis. Also, each axis in Figure 6 indicates the timing at which a specific process included in the process attached to the start end is executed.

[0071] The absorption spectrum measurement process, in which the absorbance spectrum is calculated by the spectrometer 202 from the reflected light totally reflected off the surface to which the target substance P is attached to the prism 105, begins at time t10. The measurement process then ends at time t11.

[0072] Between time t10 and time t11, camera 111 performs the following imaging process. Camera 111 starts the first imaging process at the same time t30 as time t10 and finishes the first imaging process at time t31. The image data obtained in the first imaging process is sent to the image data processing unit 23 of the arithmetic unit 2.

[0073] At the same time t50 as at times t10 and t30, the image data processing unit 23 clears the buffer in the storage buffer. Then, at time t40, the image data processing unit 23 starts the image feature calculation process. Next, at time t41, the image data processing unit 23 finishes the image feature calculation process and stores the image data in the storage buffer at time t51.

[0074] Camera 111 starts the second image capture process at time t32 and finishes the second image capture process at time t33. The image data obtained in the second image capture process is sent to the image data processing unit 23 of the arithmetic unit 2.

[0075] The image data processing unit 23 starts the image feature calculation process at time t42. Next, the image data processing unit 23 finishes the image feature calculation process at time t43 and stores the image data in the storage buffer at time t52.

[0076] Next, camera 111 starts the third image capture process at time t34 and finishes the third image capture process at time t35. The image data obtained from the third image capture process is sent to the image data processing unit 23 of the arithmetic unit 2.

[0077] The image data processing unit 23 starts the image feature calculation process at time t44, which is after the measurement end time t11.

[0078] Since the measurement ends at time t11, the image data processing unit 23 receives an instruction from the timing controller 22 to transmit the image data at time t11. The image data processing unit 23 then retrieves the image data obtained from the first and second imaging processes that are stored in the holding buffer at that time. Then, at time t60, the image data processing unit 23 starts the image statistics calculation process to smooth the image data. After that, at time t61, the image data processing unit 23 finishes the image statistics calculation process and transmits the smoothed image data to the absorbance data processing unit 21 and the data storage unit 24.

[0079] The absorbance data processing unit 21 starts the concentration calculation process using the absorbance spectrum at the same time t21 as the measurement process ended at time t11. The absorbance data processing unit 21 acquires the smoothed image data transmitted from the image data processing unit 23. Then, the absorbance data processing unit 21 corrects the absorbance spectrum using the smoothed image data to calculate the concentration of the target substance P, and finishes the concentration calculation process at time t22. Finally, the absorbance data processing unit 21 transmits the calculated concentration information of the target substance P to the data storage unit 24.

[0080] The data storage unit 24 stores the image data transmitted from the image data processing unit 23 and the concentration information of the target substance P transmitted from the absorbance data processing unit 21 at time t0. At this time, the image data transmitted from the image data processing unit 23 and the concentration information of the target substance P transmitted from the absorbance data processing unit 21 may be displayed on a monitor or the like and provided to the user.

[0081] Furthermore, the next measurement process starts at time t12. At the same time t53 as t12, the image data processing unit 23 performs a buffer clear of the holding buffer.

[0082] The image data processing unit 23 completes the image feature calculation process at time t45 and stores the image data in the retention buffer at time t54.

[0083] Camera 111 starts its fourth imaging process at time t36, following the imaging process on the third day, and finishes the fourth imaging process at time t37. The image data obtained in the third imaging process is sent to the image data processing unit 23 of the arithmetic unit 2.

[0084] The image data processing unit 23 starts the image feature calculation process at time t46. Next, the image data processing unit 23 finishes the image feature calculation process at time t47 and stores the image data in the storage buffer at time t55.

[0085] Next, camera 111 starts the fifth image capture process at time t38 and finishes it at time t39. The image data obtained from the fifth image capture process is sent to the image data processing unit 23 of the computing unit 2. The image data processing unit 23 starts the image feature calculation process at time t48. This process is repeated until the concentration calculation process of the target substance P is completed.

[0086] (effect) As described above, the concentration calculation device 10 according to this embodiment has a camera-equipped ATR device 1 in which a camera unit 110 and an optical mechanism that sends light to a prism 105 to which the target substance P used for concentration measurement using ATR is attached are mounted in a single housing 100. By mounting the mechanism for performing concentration measurement by ATR and the camera unit 110 in a single housing 100 and integrating them in this way, the design of the concentration calculation device 10 that performs concentration correction based on coverage rate becomes easier. Furthermore, by aligning the shooting location of the camera 111 with the measurement location by ATR, for example, it becomes possible to measure the concentration of the target substance P during the operation of equipment that generates the target substance P, and the measurement accuracy of the concentration measurement can be improved. Therefore, the convenience of the concentration calculation device 10 can be improved.

[0087] Furthermore, by using the mirror 114, the surface of the prism 105 to which the target substance P is attached can be positioned parallel to the optical axis of the camera 111, thereby enabling miniaturization of the ATR device 1 with camera. In particular, when a telecentric lens is used for the lens 112, the working distance also increases because the telecentric lens has a long lens length. Therefore, it is preferable to use the mirror 114 to miniaturize the housing 100.

[0088] (modified version) Next, a modified example of the ATR device 1 with a camera according to the first embodiment will be described. Figure 7 shows the arrangement of the camera and lens in the modified ATR device with a camera.

[0089] In this modified ATR device 1 with a camera, the optical axis direction of the camera 111, via the lens 112, coincides with the direction toward the surface of the prism 106 to which the target substance P is attached. In other words, the camera 111 is positioned opposite the surface of the prism 106 to which the target substance P is attached, via the lens 112. In this modified ATR device 1 with a camera, the mirror 114 used in the first embodiment may not be included.

[0090] Camera 111 receives light incident through lens 112 that forms an image of the surface of prism 105 to which the target substance P is attached. Then, camera 111 uses the incident light to capture an image of the surface of prism 105 to which the target substance P is attached.

[0091] (effect) Thus, even without using the mirror 114, it is possible to acquire image data by pointing the optical axis of the camera 111 directly towards the surface of the prism 106 to which the target substance P is attached, and the concentration of the target substance P can be calculated by correcting the coverage using this image data. Therefore, even with this configuration in which the camera 111 is positioned relative to the prism 105, the convenience of the concentration calculation device 10 can be improved.

[0092] (Second Embodiment) Next, the ATR device 1 with a camera according to the second embodiment will be described. Figure 8 is a configuration diagram of the ATR device with a camera according to the second embodiment. In the following description, the functions of each part, which are the same as in the first embodiment, will be omitted.

[0093] The ATR device 1 with a camera according to this embodiment has another mirror 115 in addition to the mirror 114. The mirrors 114 and 115 are, for example, triangular prisms.

[0094] Mirror 115 receives incident light that forms an image of the surface of prism 105 to which the target substance P is attached. Then, mirror 115 rotates the incident light by 90 degrees and emits the light towards mirror 114. In other words, mirror 115 rotates the optical axis of camera 111.

[0095] Mirror 114 receives incident light that has been rotated 90 degrees by the mirror 114 to form an image of the surface of the prism 105 to which the target substance P is attached. The mirror 115 then rotates the incident light by 90 degrees and emits it towards the optical axis of the camera 111. The light emitted from the mirror 114 passes through the lens 112 and enters the camera 111. In other words, the mirror 114 directs the optical axis of the camera 111 toward the surface of the prism 105 to which the target substance P is attached. As a result, the camera 111 captures an image of the prism 105 to which the target substance P is attached.

[0096] Here, mirror 115 is an example of a "first mirror," and mirror 114 is an example of a "second mirror." Also, a 90-degree rotation by mirror 115 is an example of a "first predetermined angle rotation," and a 90-degree rotation by mirror 114 is an example of a "second predetermined angle rotation." In other words, mirror 115, which is the first mirror, rotates the optical axis of camera 111 by a first predetermined angle, and mirror 114, which is the second mirror, further rotates the optical axis that has been rotated by the first predetermined angle by the first mirror by a second predetermined angle, directing it toward a predetermined surface of prism 105.

[0097] (effect) In this way, by combining multiple mirrors 114 and 115, the light that forms an image of the surface of the prism 105 to which the target substance P is attached can be directed into the camera 111 in alignment with the optical axis. By combining multiple mirrors 114 and 115 in this manner, it is possible to guide the light that forms an image of the surface of the prism 105 to which the target substance P is attached to a desired position. Therefore, the degree of freedom in the placement of the camera 111 can be increased. And by being able to place the camera 111 in a free position in this way, the convenience of the concentration calculation device 10 can be improved.

[0098] (Third embodiment) Next, the ATR device 1 with a camera according to the third embodiment will be described. Figure 9 is a configuration diagram of the ATR device with a camera according to the third embodiment. In the following description, the functions of each part, which are the same as in the first embodiment, will not be explained.

[0099] In the ATR device 1 with a camera according to this embodiment, the imaging mechanism is separated into an imaging unit 116 and a format conversion unit 117. The imaging unit 116 is included in the camera unit 110 which is located inside the housing 100. On the other hand, the format conversion unit 117 is located outside the housing 100.

[0100] The imaging unit 116 receives incident light through the lens 112, which forms an image of the surface of the prism 105 to which the target substance P is attached. The imaging unit 116 then converts the incident light through the lens 112 into an electrical signal to generate image data of the surface of the prism 105 to which the target substance P is attached. Next, the imaging unit 116 converts the image data, which is an electrical signal, into a planar image, which is a RAW signal.

[0101] Subsequently, the imaging unit 116 outputs the RAW signal image data to the format conversion unit 117. The imaging unit 116 is, for example, a CMOS (Complementary Metal Oxide Semiconductor) or a CCD (Charge Coupled Device).

[0102] The format conversion unit 117 receives image data output from the imaging unit 116. The format conversion unit 117 performs RAW conversion, converting the image data from a RAW signal to a format that can be handled by general data processing, such as JPEG or BitMap. Then, the format conversion unit 117 converts the RAW-converted image data into a transmission signal and outputs it to the MPU 203 using the USB cable 213.

[0103] Thus, the camera unit 110 may have an imaging unit 116 and a lens 112 for taking images. The format conversion unit 117 is located outside the housing 100 and converts the data format of the image captured by the imaging unit 116. The density calculation unit then calculates the density based on the captured image whose data format has been converted by the format conversion unit 117.

[0104] In this embodiment, the format conversion unit 117 is provided separately from the MPU 203, but the MPU 203 may also have a RAW conversion function.

[0105] (effect) As described above, in this embodiment, the density calculation device 10 houses the imaging unit 116 of the imaging mechanism inside the housing 100, while the format conversion unit 117 is located outside the housing 100. Here, it is preferable to suppress heat generation in order to maintain high resolution, but RAW signals have a very low signal level and are susceptible to noise, making them unsuitable for high transfer speeds. Therefore, by locating the format conversion unit 117 outside the housing 100, heat generation inside the housing 100 due to the format conversion unit 117 can be suppressed, and the operation of the camera-equipped ATR device 1 can be stabilized. Thus, the convenience of the density calculation device 10 can be improved.

[0106] (Fourth Embodiment) Next, the ATR device 1 with a camera according to the fourth embodiment will be described. Figure 10 is a configuration diagram of the ATR device with a camera according to the fourth embodiment. In the following description, the functions of each part, which are the same as in the first embodiment, will not be explained.

[0107] The ATR device 1 with a camera according to this embodiment has a cooling mechanism 220 that cools the camera 111 and discharges the heat to the outside of the housing 100. Figure 11 is a diagram showing the details of the cooling mechanism. The cooling mechanism 220 has, for example, piping wrapped around the camera 111, as shown in Figure 11.

[0108] The refrigerant flows in through the inlet pipe 221 of the cooling mechanism 220. Here, the refrigerant used is a gas or liquid whose temperature is adjusted to prevent condensation inside the housing 100. If it is a gas, for example, air can be used. If it is a liquid, for example, water can be used. The refrigerant then passes through piping wrapped around the camera 111 and is discharged from the discharge pipe 222. The refrigerant absorbs heat from the camera 111, so that the heat generated by the camera 111 is discharged outside the housing 100, and the temperature rise of the camera-equipped ATR device 1 is suppressed.

[0109] In this way, the cooling mechanism 220 cools the camera 111. More specifically, the cooling mechanism 220 cools the camera 111 by circulating the air around it.

[0110] (effect) As described above, in this embodiment, the ATR device 1 with a camera has a cooling mechanism 220 that discharges heat from the camera 111 to the outside of the housing 100. This allows the temperature of the ATR device 1 with a camera to rise, and stabilizes the operation of the ATR device 1 with a camera. Therefore, the convenience of the concentration calculation device 10 can be improved.

[0111] (system) The processing procedures, control procedures, specific names, and various data and parameters shown in the above documents and drawings may be changed at will unless otherwise specified. Furthermore, each embodiment can be used in combination with others.

[0112] Furthermore, the components of each illustrated device are functionally conceptual and do not necessarily need to be physically configured as shown. In other words, the specific forms of distribution and integration of each device are not limited to those shown. That is, all or part of them can be functionally or physically distributed and integrated in any unit according to various loads and usage conditions.

[0113] Furthermore, each processing function performed by each device may be implemented, in whole or in part, by a CPU (Central Processing Unit) and a program executed by that CPU, or by wired logic hardware.

[0114] (Hardware) Next, an example of the hardware configuration of the arithmetic unit 2 will be described. Figure 12 is a hardware configuration diagram of the arithmetic unit. As shown in Figure 12, the arithmetic unit 2 has a processor 91, memory 92, HDD (Hard Disk Drive) 93, and communication device 94. The processor 91 is connected to the memory 92, HDD 93, and communication device 94 via a bus.

[0115] The communication device 94 is a network interface card or the like, and is used for communication with other devices. For example, the communication device 94 relays communication between the processor 91 and the spectrometer 202 and MPU 203.

[0116] HDD93 is an auxiliary storage device. HDD93 implements the functions of the data storage unit 24 illustrated in Figure 4. HDD93 also stores various programs, including programs for implementing the functions of the absorbance data processing unit 21, timing controller 22, and image data processing unit 23 illustrated in Figure 4.

[0117] The processor 91 reads various programs stored in the HDD 93, loads them into memory 92, and executes them. This allows the processor 91 to implement the functions of the absorbance data processing unit 21, timing controller 22, and image data processing unit 23, as illustrated in Figure 4. The processor 91 can also include the functions of the MPU 203.

[0118] Thus, the arithmetic unit 2 operates as an information processing device that performs various processing methods by reading and executing a program. Furthermore, the arithmetic unit 2 can also achieve the same functions as the embodiment described above by reading the program from the recording medium using a media reader and executing the read program. Note that the program referred to here is not limited to being executed by the arithmetic unit 2. For example, the present invention can be similarly applied when another computer or server executes the program, or when they cooperate to execute the program.

[0119] This program can be distributed via networks such as the Internet. Furthermore, this program can be recorded on computer-readable storage media such as hard disks, flexible disks (FDs), CD-ROMs, MO (Magneto-Optical disks), and DVDs (Digital Versatile Discs), and executed by reading the program from these media using a computer.

[0120] Some examples of the combinations of technical features that will be disclosed are listed below.

[0121] (1) A prism on which the object to be measured is attached to a predetermined surface, An optical mechanism that sends light to the prism to which the object to be measured is attached, A camera that photographs the predetermined surface of the prism and acquires an image, A housing that integrates the prism, the optical mechanism, and the camera, A concentration calculation unit calculates the concentration of the object to be measured by applying a correction to the absorption spectrum obtained by passing the light sent by the optical mechanism through the prism and causing total internal reflection at the predetermined surface, based on the image captured by the camera, and calculating the concentration of the object to be measured based on the corrected absorption spectrum. A concentration calculation device characterized by being equipped with the following features. (2) The optical mechanism further includes an optical axis rotation unit that rotates the optical axis of the camera by a predetermined angle so that it faces the predetermined surface of the prism. The camera captures an image obtained via the optical axis rotation unit. The concentration calculation device according to (1), characterized in that (3) The density calculation apparatus according to (2), characterized in that the camera has an optical axis parallel to the surface of the prism to which the object to be measured is attached. (4) The optical axis rotation section has a first mirror and a second mirror, The first mirror rotates the optical axis by a first predetermined angle, The second mirror rotates the optical axis, which has been rotated by the first predetermined angle by the first mirror, by a second predetermined angle, so that it is directed toward the predetermined surface of the prism. The concentration calculation device according to (2) or (3), characterized in that it is a concentration calculation device according to (2) or (3). (5) The aforementioned camera takes pictures using a wide-angle lens. The concentration calculation unit performs trapezoidal correction processing to calculate the dimensions of the object to be measured. A concentration calculation device according to any one of (1) to (4), characterized by the above. (6) The aforementioned camera has an imaging unit and a lens for taking pictures, The housing further comprises a format conversion unit, which is located outside the housing, for converting the format of the image data captured by the imaging unit. The density calculation unit calculates the density based on the captured image whose data format has been converted by the format conversion unit. A concentration calculation device according to any one of (1) to (5), characterized by the above. (7) The concentration calculation device according to any one of (1) to (6), further comprising a cooling mechanism for cooling the camera. (8) The concentration calculation device according to (7), characterized in that the cooling mechanism circulates a refrigerant around the camera to cool the camera. (9) The system further includes a timing controller that synchronizes the timing of the camera's shooting with the timing of the concentration calculation by the concentration calculation unit. The concentration calculation unit calculates the concentration based on the captured image and the absorbance spectrum, which are synchronized by the timing controller. A concentration calculation device according to any one of (1) to (8), characterized by the above. (10) The timing controller accumulates a group of images captured by the camera at predetermined intervals while the concentration calculation unit acquires the absorbance spectrum, and performs synchronization by providing the group of images to the concentration calculation unit at the timing when the concentration calculation unit has finished acquiring the absorbance spectrum. The concentration calculation unit calculates the concentration based on the image group and the absorbance spectrum provided by the timing controller. The concentration calculation device according to (9), characterized in that (11) The concentration calculation device according to (10), characterized in that the concentration calculation unit performs statistical calculations on the image group provided by the timing controller and calculates the concentration based on the statistical values ​​and the absorbance spectrum. [Explanation of Symbols]

[0122] 1. Camera-equipped ATR device 2 Arithmetic unit 10 Concentration calculation device 21 Absorption Data Processing Unit 22 Timing Controller 23 Image Data Processing Unit 24 Data storage unit 100 cabinets 101,103 Collimating Lenses 102,104 XYZ Stages 105 Prism 110 Camera Section 111 Camera 112 lenses 113 Focus adjustment stage 114,115 Miller 116 Imaging Unit 117 Format conversion section 201 White light source 202 Spectrometer 203 MPU 204 Light source 211,212 Fiber for ATR 213 USB cable 214 Fiber 220 Cooling mechanism 221 Inflow pipe 222 Discharge pipe P Target substance

Claims

1. A prism on which the object to be measured is attached to a predetermined surface, An optical mechanism that sends light to the prism to which the object to be measured is attached, A camera that photographs the predetermined surface of the prism and acquires an image, A housing that integrates the prism, the optical mechanism, and the camera, A concentration calculation unit calculates the concentration of the object to be measured by applying a correction to the absorption spectrum obtained by passing the light sent by the optical mechanism through the prism and causing total internal reflection at the predetermined surface, based on the image captured by the camera, and calculating the concentration of the object to be measured based on the corrected absorption spectrum. A concentration calculation device characterized by being equipped with the following features.

2. The optical mechanism further includes an optical axis rotation unit that rotates the optical axis of the camera by a predetermined angle so that it faces the predetermined surface of the prism. The camera captures an image obtained via the optical axis rotation unit. The concentration calculation device according to feature 1.

3. The density calculation apparatus according to claim 2, characterized in that the camera has an optical axis parallel to the surface of the prism to which the object to be measured is attached.

4. The optical axis rotation section has a first mirror and a second mirror, The first mirror rotates the optical axis by a first predetermined angle, The second mirror rotates the optical axis, which has been rotated by the first predetermined angle by the first mirror, by a second predetermined angle, so that it is directed toward the predetermined surface of the prism. The concentration calculation device according to feature 2.

5. The aforementioned camera takes pictures using a wide-angle lens. The concentration calculation unit performs trapezoidal correction processing to calculate the dimensions of the object to be measured. The concentration calculation device according to feature 1.

6. The aforementioned camera has an imaging unit and a lens for taking pictures, The housing further comprises a format conversion unit, which is located outside the housing, for converting the format of the image data captured by the imaging unit. The density calculation unit calculates the density based on the captured image whose data format has been converted by the format conversion unit. The concentration calculation device according to feature 1.

7. The concentration calculation apparatus according to claim 1, further comprising a cooling mechanism for cooling the camera.

8. The concentration calculation device according to claim 7, characterized in that the cooling mechanism cools the camera by circulating a refrigerant around the camera.

9. The system further includes a timing controller that synchronizes the timing of the camera's shooting with the timing of the concentration calculation by the concentration calculation unit. The concentration calculation unit calculates the concentration based on the captured image and the absorbance spectrum, which are synchronized by the timing controller. The concentration calculation device according to feature 1.

10. The timing controller accumulates a group of images captured by the camera at predetermined intervals while the concentration calculation unit acquires the absorbance spectrum, and performs synchronization by providing the group of images to the concentration calculation unit at the timing when the concentration calculation unit has finished acquiring the absorbance spectrum. The concentration calculation unit calculates the concentration based on the image group and the absorbance spectrum provided by the timing controller. The concentration calculation device according to feature 9.

11. The concentration calculation device according to claim 10, characterized in that the concentration calculation unit performs statistical calculations on the image group provided by the timing controller and calculates the concentration based on the statistical values ​​and the absorbance spectrum.

Images