Information processing method, information processing device, control method for semiconductor manufacturing system, semiconductor manufacturing system, semiconductor manufacturing method, program, and recording medium.

Abstract

Prioritize processing the second batch, which has a higher priority than the first batch. [Solution] In an information processing method for calculating the processing order of multiple lots in a semiconductor manufacturing facility, the method predicts the first required time for the first lot, predicts the second required time for the second lot, determines whether or not to start the first processing based on the first waiting time limit and the first required time for the first lot, determines whether or not to start the first processing based on the second waiting time limit and the second required time for the second lot, and if it is determined that the first processing can be started for the first lot, and the priority of the second lot is higher than the priority of the first lot, it is determined to wait for the first processing of the first lot to start and to start the first processing of the second lot.

Description

Technical Field

[0001] The present invention relates to an information processing method, an information processing apparatus, a control method for a semiconductor manufacturing system, a semiconductor manufacturing system, a semiconductor manufacturing method, a program, and a recording medium.

Background Art

[0002] In recent years, in a manufacturing process for manufacturing semiconductors, for example, one FOUP (Front Opening Unified Pod) that holds a plurality of wafers is regarded as one lot, and a method has been proposed for automatically controlling the order in which a plurality of lots are flowed through each processing apparatus in the manufacturing process (see Patent Document 1). In this Patent Document 1, it is disclosed that a processing apparatus in the next process is reserved so that the standing time of a lot processed by one processing apparatus is equal to or less than the standing limit time.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the case of making a reservation so as to observe the standing limit time for one lot as in Patent Document 1 above, since the reservation is made based on the availability of the next processing apparatus, even if there is a lot with a higher manufacturing priority among other lots, no consideration is given. Therefore, there is a problem that even if there is a lot with a high manufacturing priority, it is difficult for it to be prioritized.

[0005] Therefore, an object of the present invention is to provide an information processing method, an information processing apparatus, a control method for a semiconductor manufacturing system, a semiconductor manufacturing system, a semiconductor manufacturing method, a program, and a recording medium that can prioritize the processing of a second lot having a higher priority than a first lot. [Means for solving the problem]

[0006] One aspect of the present invention is an information processing method in which a control unit performs processing to calculate the processing order of multiple lots in a semiconductor manufacturing facility, the information processing method comprising: a first prediction step in which the control unit predicts a first required time until the waiting restriction is lifted for a first lot; a second prediction step in which the control unit predicts a second required time until the waiting restriction is lifted for a second lot; a first determination step in which the control unit determines whether or not to start the first processing in the manufacturing facility for the first lot based on a first waiting restriction time, which is the time the first lot can be left unattended, and the first required time; a second determination step in which the control unit determines whether or not to start the first processing for the second lot based on a second waiting restriction time, which is the time the second lot can be left unattended, and the second required time; and an order determination step in which, if the control unit has determined in the first determination step that the first processing can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, it determines to wait for the first processing to start for the first lot and to start the first processing for the second lot.

[0007] One aspect of the present invention is an information processing device comprising a control unit that performs processing for calculating the processing order of multiple lots in a semiconductor manufacturing facility, wherein the control unit performs: a first prediction process for predicting a first required time until the waiting restriction is lifted for a first lot; a second prediction process for predicting a second required time until the waiting restriction is lifted for a second lot; a first determination process for determining whether or not to start the first processing in the manufacturing facility for the first lot based on a first waiting restriction time, which is the time the first lot can be left unattended, and the first required time; a second determination process for determining whether or not to start the first processing for the second lot based on a second waiting restriction time, which is the time the second lot can be left unattended, and the second required time; and, in the case where the first determination process determines that the first processing can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, an order determination process that determines to wait for the first lot to start the first processing and to start the first processing for the second lot.

[0008] One aspect of the present invention relates to a control method for a semiconductor manufacturing system comprising: a manufacturing facility having a plurality of processing units for performing various processing operations for manufacturing semiconductors; a management device for managing the plurality of processing units; and an information processing device having a control unit that performs a process for calculating the processing order of a plurality of lots in the manufacturing facility and outputs the processing order information to the management device, wherein the control unit performs a first prediction step of predicting a first required time until the unattended restriction is lifted for a first lot; a second prediction step of predicting a second required time until the unattended restriction is lifted for a second lot; and the control unit, for the first lot, performs a first unattended restriction time which is the time the first lot can be left unattended and the first required time based on the first unattended restriction time and the first required time. The control method for a semiconductor manufacturing system is characterized by comprising: a first determination step of determining whether or not to start the first process in the manufacturing equipment; a second determination step of the control unit determining whether or not to start the first process for the second lot based on a second waiting time, which is the time the second lot can be left unattended, and a second required time; and a sequence determination step of the control unit determining, in the first determination step, that the first process can be started for the first lot, and that the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, to wait for the first process to start for the first lot and to start the first process for the second lot.

[0009] One aspect of the present invention comprises a manufacturing facility having a plurality of processing units for each processing operation used to manufacture semiconductors, a management device for managing the plurality of processing units, and an information processing device having a control unit that performs a process to calculate the processing order of a plurality of lots in the manufacturing process and outputs the processing order information to the management device, wherein the control unit performs a first prediction process to predict the first required time until the unattended restriction is lifted for the first lot, a second prediction process to predict the second required time until the unattended restriction is lifted for the second lot, and, for the first lot, based on the first unattended restriction time, which is the time the first lot can be left unattended, and the first required time, the manufacturing facility The semiconductor manufacturing system is characterized by performing: a first determination process for determining whether or not to start the first process in a lot; a second determination process for determining whether or not to start the first process for a second lot based on a second waiting time, which is the time the second lot can be left unattended, and a second required time; and, if the first determination process determines that the first process can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, a sequence determination process for determining whether to wait for the first process to start for the first lot and to start the first process for the second lot. [Effects of the Invention]

[0010] According to the present invention, the processing of the second lot, which has a higher priority than the first lot, can be prioritized. [Brief explanation of the drawing]

[0011] [Figure 1] This is a schematic diagram showing the configuration of the semiconductor manufacturing system according to this embodiment. [Figure 2] This block diagram shows the flow prediction process in the flow simulator according to this embodiment. [Figure 3] This is an explanatory diagram illustrating lot flow. [Figure 4] This is an explanatory diagram showing the lot flow when the storage time limit is exceeded. [Figure 5] This is an explanatory diagram showing the settings for the idle time limit. [Figure 6] This is an explanatory diagram showing the determination of when to start the first processing step for a standard lot. [Figure 7] This is an explanatory diagram showing the determination of when to start the first processing step when an express batch arrives after a regular batch. [Figure 8] This sequence diagram shows the control process flow when an express batch arrives after a regular batch. [Modes for carrying out the invention]

[0012] The following embodiment will be described with reference to the drawings. Note that the following embodiment is merely an example and can be modified in various ways.

[0013] First, the overall schematic configuration of the semiconductor manufacturing system for producing semiconductors will be explained using Figure 1. Figure 1 is a schematic diagram showing the configuration of the semiconductor manufacturing system according to this embodiment.

[0014] As shown in Figure 1, the semiconductor manufacturing system 1 according to this embodiment broadly includes a flow simulator 100, a dispatcher 200, a manufacturing line 300, a lot / equipment status database (hereinafter simply referred to as "database") 400, etc. This semiconductor manufacturing system 1 is a system that manufactures semiconductors by processing lots 500, in which multiple (for example, 25 or fewer) semiconductor wafers are housed in transport boxes such as FOUPs, with each processing device 310 that performs each processing step on the manufacturing line 300. Here, flow refers to the flow of wafers and lots in the semiconductor manufacturing line 300, and indicates the processing status of wafers and lots.

[0015] The above-mentioned flow simulator 100 is a computer, which has a CPU 100a as a control unit, and a ROM 100b, a RAM 100c, and a HDD (hard disk drive) 100d as a recording unit or a recording medium. That is, the CPU 100a is configured to achieve the function as the flow simulator 100 by executing a program stored in, for example, the ROM 100b or the HDD 100d. The flow simulator 100 performs a flow prediction process 109 (see FIG. 2).

[0016] Note that this flow simulator 100 is an information processing method that executes a process in which the CPU 100a calculates the processing order of a plurality of lots 500 in a manufacturing line 300 for manufacturing a semiconductor wafer. In other words, the flow simulator 100 performs a flow simulation. Further, the flow simulator 100 is also an information processing device that performs a process of calculating the processing order of a plurality of lots 500 in a manufacturing line 300 for manufacturing a semiconductor wafer. In addition, although the program for executing these information processes is described as being stored in the ROM 100b or the HDD 100d, it may be stored in a recording medium capable of external connection such as an optical medium or a flash memory.

[0017] The above-mentioned dispatcher 200 is, for example, a computer different from the above-mentioned flow simulator 100, and is communicably connected to the flow simulator 100, a database 400, and a plurality of processing devices 310 of the manufacturing line 300. That is, the dispatcher 200 is configured as a management device that manages the processing devices 310 (manufacturing line 300) by transmitting a flow instruction to the plurality of processing devices 310. Note that a flow instruction based on the information of the flow prediction result is output from the dispatcher to each processing device 310 that performs each process of the manufacturing line 300 (output step).

[0018] The manufacturing line 300 is manufacturing equipment for semiconductor wafers installed in a factory or the like. The manufacturing line 300 has a plurality of processing apparatuses 310 that perform various processes on the wafer, such as surface oxidation, thin film formation, resist coating, exposure, etching, resist stripping, ion implantation, planarization, electrode formation, assembly and inspection. A semiconductor wafer constitutes one lot 500, for example, by being stored in a carrier box in a quantity of about 1 to 25 pieces. And during manufacturing, a plurality of lots 500 are input into the manufacturing line 300 for processing. Inputting and processing a plurality of lots 500 into the manufacturing line 300 is also referred to as flowing the lots. The plurality of processing apparatuses 310 in the manufacturing line 300 are arranged in series in the direction in which the lot 500 flows, but depending on the processing content, there may be one apparatus, or a plurality of apparatuses (for example, three or more) may be installed in parallel. That is, in the manufacturing line 300, particularly for the processing apparatus 310 that performs a process with a long processing time, there are often a plurality of them arranged in parallel.

[0019] The database 400 is, for example, a computer different from the flow simulator 100 or the dispatcher 200, or a so-called file server. The database 400 stores information such as records when the lot 500 is processed by each processing apparatus 310 in the manufacturing line 300, and transmits the information to the flow simulator 100 and the dispatcher 200. The database 400 feeds back the information to the flow simulator 100 and the dispatcher 200. Specifically, the database 400 holds the history of which processing apparatus 310 each lot 500 was processed by and information on the status of each processing apparatus 310 (for example, being under maintenance).

[0020] Next, the general operation of the semiconductor manufacturing system 1 will be explained. First, the flow simulator 100 receives flow parameters 600, which are information such as production targets, from the user (factory manager, etc.) at predetermined information acquisition timings. The predetermined interval may be, for example, once a day (24 hours). The flow simulator 100 also reads work-in-progress information for multiple lots 500, actual performance information for lot 500, and equipment information for each processing unit 310, which are stored in the database 400, at this information acquisition timing. This work-in-progress information, actual performance information, and equipment information correspond to recipe information 101, product lot progress information 102, equipment information 103, equipment maintenance information 104, floor-to-floor travel time information 105, and process-to-process waiting time limit information 107, etc., as shown in Figure 2 below. The flow parameters 600 correspond to the product lot completion target 106, etc. The information acquisition timing is not limited to once a day; it can be set at any time interval, such as once every few hours, once every hour, or once every few minutes. However, it is preferable to acquire the information at a frequency that corresponds to the computational load of the fluid simulator 100.

[0021] The flow simulator 100 calculates a flow prediction result 110 (see Figure 2) from the various input information, as will be described in detail later, at intervals such as once a day. The flow simulator 100 then outputs this flow prediction result 110 as an instruction file (instruction information) to the dispatcher 200. This instruction information may be output periodically, such as once a day, after the calculation is completed. The information held by the dispatcher 200 may be updated periodically. The calculation of the flow prediction result 110 and its output to the dispatcher 200 may occur at intervals corresponding to the information acquisition timing described above; in other words, output to the dispatcher 200 may occur each time the flow prediction result 110 is calculated from newly acquired information.

[0022] The dispatcher 200 issues flow instructions to each processing unit 310 on the manufacturing line 300, based on the flow prediction results 110 input from the flow simulator 100 and the work-in-progress information in the database 400, so that the flow occurs in the time calculated by the flow prediction results 110. In other words, it instructs which lot 500 to process and in what order. As a result, multiple lots 500 (i.e., semiconductor wafers) are manufactured according to the flow prediction results 110 calculated by the flow simulator 100.

[0023] Next, the flow prediction process in the flow simulator 100 described above will be explained using Figure 2. Figure 2 is a block diagram showing the flow prediction process in the flow simulator according to this embodiment.

[0024] The aforementioned flow simulator 100 acquires various information from the database 400 at the information acquisition timing, and also acquires flow parameters 600 via an input terminal (not shown) (see Figure 1). Specifically, as shown in Figure 2, the flow simulator 100 inputs recipe information 101, product lot progress information 102, equipment information 103, and equipment maintenance information 104. The flow simulator 100 also inputs information on movement time between floors 105, product lot completion target 106, and waiting time limit between processes 107. The product lot completion target 106 includes, for example, production target information. The information acquisition process is configured to acquire information including at least information on the manufacturing priority of normal lot 500-1 and information on the manufacturing priority of express lot 500-2 by acquiring various information from the database 400 and acquiring flow parameters 600. Here, express and normal refer to processing priority. An express lot means a lot that should be processed with priority over a normal lot and completed early. Note that the priority levels are not limited to these two; multiple levels of priority may be set.

[0025] Of these, recipe information 101 is information on how to process lot 500 of semiconductor wafers. Product lot progress information 102 is information on the processing progress of each lot 500 transmitted from each processing unit 310 of the manufacturing line 300. Equipment information 103 is information on the status of each processing unit 310 transmitted from each processing unit 310 of the manufacturing line 300. Equipment maintenance information 104 is information when maintenance times are set in advance, and is stored in database 400, for example. Inter-floor transfer time information 105 is information on the transfer time when moving lot 500 from each processing unit 310 to each processing unit 310 that will perform the next processing, and is stored in database 400, for example.

[0026] The product lot completion target 106 is information for achieving production targets, including the priority of the regular lot 500-1 as the first lot and the priority of the express lot 500-2 as the second lot. The information 107 regarding the waiting time limit between processes includes information on the waiting time limit. The waiting time limit is the maximum time that lot 500 (semiconductor wafers) can be left unattended after processing in each processing unit 310. In other words, the waiting time limit can be said to be the time to limit the waiting time of lot 500. It is advisable to set a sufficient margin (e.g., about 10%) in the waiting time limit to prevent, for example, a deterioration in the semiconductor wafer quality of lot 500. In other words, it is preferable to set the waiting time limit to a time shorter than the time at which a deterioration in semiconductor wafer quality occurs.

[0027] Then, based on the various pieces of information mentioned above, the flow simulator 100 performs flow prediction processing 109 on a virtual manufacturing line and calculates a flow prediction for the virtual lot in relation to the virtual process and virtual time. This allows the user to know which process each lot 500 is in at what point, when it will be completed, etc.

[0028] Furthermore, in the flow forecast, lot 500, which is waiting to be fed into a process subject to the waiting restriction on the virtual manufacturing line (hereinafter referred to as the "process subject to the waiting restriction"), can be recorded in the waiting lot list 108 for the process subject to the waiting restriction, which is located on the HDD 100d or the like. Details of the decision process for when to feed a waiting lot into the processing unit in this simulation will be described later.

[0029] Please note that the following explanation pertains to a simulation performed virtually in the fluid simulator 100. In other words, lot 500 and processing unit 310 are all virtual, but for the sake of explanation, they will be referred to as lot 500 and processing unit 310.

[0030] Next, lot flow and the standing time limit that occurs during lot flow will be explained using Figures 3, 4, and 5. Figure 3 is an explanatory diagram showing lot flow. Figure 4 is an explanatory diagram showing lot flow when the standing time limit is exceeded. Figure 5 is an explanatory diagram showing the setting state of the standing time limit. In the following explanation, when distinguishing between lot 500 and processing device 310, a hyphen and subscript will be added. When distinction is not necessary, the symbols will be used as they are without hyphens or subscripts.

[0031] As shown in Figure 3, lot 500 waits until processing unit 310-A ​​becomes available (W1). Once processing unit 310-A ​​is available, lot 500 is fed into it and processed (PR1). After processing in processing unit 310-A ​​is complete, lot 500 is moved to processing unit 310-B, which is assigned to the next manufacturing process (M1). If processing unit 310-B is not available, lot 500 waits until it becomes available (W2). Once processing unit 310-B becomes available, lot 500 is fed into it and processed (PR2). In this way, lot 500 moves towards completion by progressing through each process in the manufacturing process.

[0032] Furthermore, processing units 310-A ​​and 310-B do not impose any waiting restrictions on lot 500 after processing is completed. In this case, for example, multiple lots 500 may be waiting until processing unit 310-A ​​or processing unit 310-B becomes available. If any of these lots 500 have a high priority, such as a short delivery time, then the high-priority lot will be fed into processing unit 310-A ​​or processing unit 310-B before the other lots. In other words, since there is no waiting time restriction as described later, lot 500 is not made to wait considering the waiting time restriction. Therefore, there is no need to determine when to feed into processing unit 310 considering the waiting time restriction, and it is possible to simply feed into the available processing unit 310 according to priority.

[0033] Next, we will explain the case where there is a waiting time limit, using Figure 4. Typically, the waiting time limit exists as a time limit between the completion of a certain process in the manufacturing process and the start of the next process. The waiting time limit can also be described as the time until the quality deteriorates due to oxidation or hardening of the surface of the semiconductor wafer, for example. In the example in Figure 4, a waiting time limit is set, which is determined as the maximum time that a lot of 500 semiconductor wafers can be left unattended after processing by the processing device 310-1.

[0034] In the example shown in Figure 4, lot 500-A waits until processing unit 310-1 becomes available (W1), but after processing unit 310-1 finishes, a waiting time limit TA is set. Under these conditions, for example, lot 500-A is loaded into processing unit 310-1, processing is completed, and it moves towards processing unit 310-2 (M1). In the meantime, suppose another lot, lot 500-B, is loaded into processing unit 310-2 and processing (PR2) begins. Lot 500-A must wait until processing unit 310-2 becomes available (W2), but if processing of lot 500-B (PR2) is not completed, there is a risk of exceeding the waiting time limit TA. Therefore, before loading lot 500-A into processing unit 310-1, the time from the end of processing unit 310-1 to the start of processing unit 310-2 is predicted. Furthermore, if this exceeds the waiting time limit TA, it is necessary to prevent the input of lot 500-A to processing unit 310-1. The time from the end of processing unit 310-1 to the start of processing unit 310-2 is predicted by considering the availability of those devices.

[0035] Here, we will explain the calculation of the idle time limit TA using Figure 5. The vertical axis in Figure 5 represents the process, and the band in Figure 5 indicates which processes have the idle time limit L set. Idle time limits can occur in a nested manner when multiple processes (also referred to here as "processes") are performed consecutively. That is, as shown in Figure 5, suppose a lot 500 is fed into a process where idle time limit L1 occurs at process number PR104. Suppose that idle time limit TA1 is set for this idle time limit L1. This indicates that lot 500 must proceed to the next process before the limit at process number PR110 expires.

[0036] Next, let's assume that lot 500 is entered into process number PR108, where the next idle time limit L2 occurs. Let's assume that idle time limit TA2 is set for this idle time limit L2. This indicates that lot 500 must proceed to the next process before the time limit for process number PR114 expires. Then, let's assume that lot 500 is entered into process number PR111, where the next idle time limit L3 occurs. Let's assume that time limit TA3 is set for this idle time limit L3. This indicates that lot 500 must proceed to the next process before the time limit for process number PR117 expires.

[0037] Thus, if it is necessary to perform the waiting restrictions L1, L2, and L3 as a series of processes, then from process number PR104 to process number PR117, once lot 500 is introduced, the process cannot be stopped midway. Therefore, in the flow prediction process of this embodiment, if there is a series of processes with such waiting restrictions, there is an overall waiting restriction Lt as shown in Figure 5, and the calculation assumes that a waiting restriction time TAt occurs.

[0038] Next, the processing start determination for the first process, which determines whether or not to feed the normal lot 500-1 into the processing device 310-1, will be explained using Figure 6 with reference to Figures 1 and 4. Figure 6 is an explanatory diagram showing the processing start determination for the first process for a normal lot.

[0039] In this explanation, we will assume that processing unit 310-1 performs the first processing step in the semiconductor wafer manufacturing process, and processing unit 310-2 performs the second processing step following the first processing step in the semiconductor wafer manufacturing process. In other words, the first processing step is described as a process that precedes the second processing step and is the process for which the idle time limit TA is set. Although we will assume that the process following the first processing step is the second processing step, this is not limited to this, and there may be one or more processes between the first and second processing steps that cause idle time limits. That is, as in the example shown in Figure 5, in cases where idle time limits occur in a nested manner, the end of the first processing step may trigger the start of the entire nested idle time limit TAt, and the second processing step may be a process that should be initiated before the idle time limit TAt has elapsed.

[0040] The CPU 100a of the fluid simulator 100 determines (checks) the availability of each processing unit 310 on the manufacturing line 300 at time intervals (e.g., 1-minute intervals) as a second set time (availability prediction process). Here, the 1-minute interval given as an example may be the initial setting value of the fluid simulator 100. Also, the 1-minute interval may be the smallest value among the time intervals that can be set in the fluid simulator 100. In this embodiment, we will explain using the smallest value as an example, so the time interval will be referred to as the minimum time interval below. However, the number of flowing lots 500 and the number of processing units 310 are enormous. Therefore, if the determination to start processing of the first process is performed at the minimum time interval (e.g., 1-minute intervals), there is a risk that the CPU 100a will be overloaded. Also, generally, the time it takes to process a lot 500 in the processing unit 310 varies depending on the processing content, but it can take anywhere from several tens of minutes to several hours. Therefore, even if the processing start determination for the first process is performed at the minimum time interval (e.g., 1 minute interval), there is a high possibility that no progress will be made and the calculation of the processing start determination will be unnecessary. Therefore, in this embodiment, the idle time check interval CTI (see Figure 6), which is the first set time at which the processing start determination for the first process is performed, is set to, for example, a 30-minute interval. While the user can individually set this idle time check interval CTI, it may also be set uniformly to half the idle time limit TA generated by each processing unit (50%). In this case, that is, if the idle time limit TA generated after the first processing of processing unit 310-1 is about 1 hour, the idle time check interval CTI will be automatically set to about 30 minutes. For example, the setting of the idle time check interval CTI may be changed depending on the length of the idle time limit TA. If the idle time limit TA is shorter than an arbitrary value, the idle time check interval CTI may be set to 25% of the idle time limit TA. If the idle time limit TA is longer than an arbitrary value, the idle time check interval CTI may be set to 80% of the idle time limit TA. The setting of the idle time check interval CTI can be changed according to the length of the idle time limit TA. Furthermore, this can be processed in two steps: determining the length of the idle time limit TA and setting the idle time check interval CTI accordingly.

[0041] Note that the minimum time interval (e.g., 1-minute intervals) and the CTI interval for checking idle time (e.g., 30-minute intervals) referred to here refer to the time of the simulation results (flow prediction results), and are therefore virtual times. Consequently, these time intervals are not actual time intervals as calculated by the flow simulator 100. For example, the flow simulator 100 performs flow prediction processing for several months on the manufacturing line 300 once every hour. However, since the dispatcher 200 controls the manufacturing line 300 using the flow prediction results, it ultimately becomes equivalent to actual time, and therefore, in the following explanation, it will be described as if it were actual time. Note that the prediction frequency and prediction period of the flow simulator 100 are not limited to the aforementioned 1 hour and several months. For example, it may perform a prediction for one day once a day.

[0042] First, let's explain the contents of the initial processing start determination CK1-1. As described above, CPU 100a predicts the availability of processing unit 310-2 at the minimum time interval. Here, CPU 100a predicts the required time TR1-1 as the first required time, from the time processing unit 310-1 finishes processing until processing unit 310-2 becomes available, assuming that a normal lot 500-1 is loaded into processing unit 310-1 (first prediction step, first prediction process). This required time TR1-1 is the sum of the time it takes to move the normal lot 500-1 from processing unit 310-1 to processing unit 310-2 (M1) and the time it takes for processing unit 310-2 to become available (W2) (see Figure 4). In other words, the required time TR1-1 can also be said to be the time from the time processing unit 310-1 finishes processing until the idle restriction is lifted. Furthermore, the required time TR1-1 varies depending on the number of processing units 310-2 that perform the next processing step (the second processing step), and also on the number of lots 500 that have started the second processing step of processing unit 310-2. Similarly, the required times TR1-2 to TR1-5 and TR2-1 (see Figure 7), which are described below, also vary depending on the availability (progress) of other lots 500 and multiple processing units 310-2.

[0043] Next, the CPU 100a obtains the idle time TA1-1 (information on idle time between processes 107) from the database 400 as the first idle time limit that occurs after the first processing of the normal lot 500-1 by the processing unit 310-1 is completed (see Figure 1). If the idle time limit is the total idle time due to the nested idle time limits described above, the CPU 100a may calculate it from the information on idle time between processes 107, or it may store the calculated data in the database 400 in advance. In this embodiment, the idle time limits TA1-1 to TA1-5 (see Figure 6) and idle time limit TA2-1 (see Figure 7) that occur after the same first processing are the same time. Therefore, the CPU 100a obtains one idle time limit TA1-1 from the database 400.

[0044] Then, as the first processing start determination CK1-1, the CPU 100a determines whether or not to start the first processing for normal lot 500-1 based on the predicted required time TR1-1 and the waiting time limit TA1-1 (first determination step, first determination process). That is, the CPU 100a compares the required time TR1-1 and the waiting time limit TA1-1, and if the required time TR1-1 is longer than the waiting time limit TA1-1, it determines that normal lot 500-1 should wait for the processing unit 310-1 to start the first processing (NG). At this point, since normal lot 500-1 is waiting to be fed into the process subject to the waiting time limit, the CPU 100a records normal lot 500-1 in the waiting lot list 108 (see Figure 2). If the required time TR1-1 is less than or equal to the waiting time limit TA1-1, the CPU 100a determines that the processing unit 310-1 can start the first processing (OK) for normal lot 500-1.

[0045] In this way, if the initial (first) processing start determination CK1-1 determines that the first processing of normal lot 500-1 should be put on hold, the second processing start determination CK1-2 is re-executed after a waiting time check interval CTI (for example, 30 minutes). Similar to the processing start determination CK1-1, this processing start determination CK1-2 also predicts the required time TR1-2 and compares the required time TR1-2 with the waiting time limit TA1-1. Then, as shown in Figure 6, if the required time TR1-2 is longer than the waiting time limit TA1-2, it is determined that the start of the first processing of normal lot 500-1 by the processing unit 310-1 should be put on hold (NG).

[0046] Similarly, if the processing start determination CK1-2 determines that the first processing of normal lot 500-1 should be put on hold, the idle time check interval CTI is set (for example, 30 minutes), and the third processing start determination CK1-3 is re-executed. In this processing start determination CK1-3, if the required time TR1-3 is longer than the idle time limit TA1-3, as shown in Figure 6, it is determined that the start of the first processing of normal lot 500-1 by the processing unit 310-1 should be put on hold (NG). Similarly, if the processing start determination CK1-3 determines that the first processing of normal lot 500-1 should be put on hold, the idle time check interval CTI is set (for example, 30 minutes), and the fourth processing start determination CK1-4 is re-executed. In this processing start determination CK1-4, if the required time TR1-4 is longer than the idle time limit TA1-4, as shown in Figure 6, it is determined that the start of the first processing of normal lot 500-1 by the processing unit 310-1 should be put on hold (NG).

[0047] Then, if the processing start determination CK1-4 determines that the first processing of normal lot 500-1 should be put on hold, the waiting time check interval CTI is set (for example, 30 minutes), and the fifth processing start determination CK1-5 is re-executed. In this processing start determination CK1-5, if the required time TR1-5 is shorter than the waiting time limit TA1-5, as shown in Figure 6, it is determined to start the first processing of normal lot 500-1 in the processing unit 310-1 (to OK). In other words, the flow prediction result reserves the input of normal lot 500-1 into the processing unit 310-1 at this timing. As a result, as shown in Figure 6, for normal lot 500-1, the interval between the completion time Ta of the first processing and the start time Tb when the second processing can be started is shorter than the waiting time limit TA1-5. Therefore, normal lot 500-1 will not be left unattended after the completion of the first processing and will not exceed the waiting time limit TA1-5, thus reducing quality degradation. Furthermore, once it is decided that lot 500-1 will be fed into processing unit 310-1, the record of lot 500-1 is deleted from the lot waiting list 108.

[0048] A lot input reservation means that a lot is reserved to be input into a processing unit at a specific time, and that no other lots are input into that processing unit at that time. However, in the case of a batch processing unit capable of processing multiple lots, it is possible to process additional lots within the limits of that unit.

[0049] Furthermore, the waiting time limits for regular lot 500-1 and express lot 500-2 do not necessarily have to be exactly the same. For example, as explained in Figure 5, when waiting time limits are nested, if there are overlapping waiting time limits, such as when some waiting time limits are the same, the waiting time limit will not be extended, so it is possible to prioritize feeding that lot. For example, if the waiting time limit is the same, and the waiting time limit that occurs when passing through processing unit 310-A, processing unit 310-B, and processing unit 310-C in that order can be cleared, then the waiting time limit when passing through processing unit 310-A ​​to processing unit 310-B can also be cleared.

[0050] Next, we will explain using Figure 7 the case where, while the processing device 310-1 is waiting for the start of its first processing (input) in the processing device 310-1, the express lot 500-2 arrives at the processing device 310-1. Figure 7 is an explanatory diagram showing the processing start determination for the first processing when the express lot arrives after the regular lot.

[0051] As shown in Figure 7, for a normal lot 500-1, processing start determinations CK1-1 to CK1-4 are performed, and if these determinations indicate that the required time TR1-1 to TR1-4 exceeds the waiting time limit TA1-1 to TA1-4, the lot is put awaiting input to the processing device 310-1. As mentioned above, after processing start determination CK1-1, the normal lot 500-1 is recorded in the input waiting lot list 108.

[0052] For example, after the execution of the processing start determination CK4, when the express lot 500-2 arrives at the processing unit 310-1, the CPU 100a performs the processing start determination CK2-1 for the express lot 500-2. That is, the CPU 100a predicts the required time TR2-1 for the express lot 500-2, which is the second required time from the completion of the first processing of the processing unit 310-1 until the second processing of the processing unit 310-2 can begin (second prediction step, second prediction processing). Then, it compares the required time TR2-1 with the waiting limit time TA2-1, which is the second waiting limit time, and determines that the required time TR2-1 is longer than the waiting limit time TA2-1 (i.e., NG) (second determination step, second determination processing). Then, it waits for the express lot 500-2 to be fed into the processing unit 310-1 (start of the first processing). Furthermore, this required time TR2-1 is the sum of the time (M1) for moving the normal lot 500-1 from processing unit 310-1 to processing unit 310-2 and the time (W2) for processing unit 310-2 to become available (see Figure 3). In other words, the required time TR2-1 can also be said to be the time from when processing unit 310-1 finishes processing until the idle time restriction is lifted.

[0053] In this embodiment, the waiting time limit TA2-1 for the express lot 500-2 is calculated as the same time as the waiting time limit TA1-1 for the regular lot 500-1. However, if, for example, the regular lot 500-1 contains 25 semiconductor wafers and the express lot 500-2 contains only one semiconductor wafer, the times may be slightly different, so the waiting time limit may be changed according to the number of semiconductor wafers. Also, since the CPU 100a has placed this express lot 500-2 awaiting input to the processing unit 310-1, it records it in the waiting lot list 108.

[0054] Next, for lot 500-1, CPU 100a performs a processing start determination CK1-5 because the waiting time check interval CTI (e.g., 30 minutes) has elapsed since the processing start determination CK1-4. In this processing start determination CK1-5, CPU 100a determines that the required time TR1-5 is shorter than the waiting time limit TA1-5, and that the first processing of processing unit 310-1 can be started (loaded) for lot 500-1.

[0055] Here, the CPU 100a refers to the waiting lot list 108 and determines that the express lot 500-2 is recorded in the waiting lot list 108. Then, the CPU 100a refers to the priority of the regular lot 500-1 and the express lot 500-2 from information such as the product lot completion target 106, and determines that the express lot 500-2 has a higher priority. Therefore, the CPU 100a decides to start the first processing of the processing unit 310-1 with the express lot 500-2 instead of starting the first processing of the processing unit 310-1 with the regular lot 500-1 (order determination step, order determination process).

[0056] As a result, it is determined that the start of the first processing of processing unit 310-1 will be put on hold for the regular lot 500-1, and that the first processing of processing unit 310-1 will start for the express lot 500-2 before the regular lot 500-1. Therefore, as shown in the flow prediction results in Figure 2, the express lot 500-2, which has a higher priority than the regular lot 500-1, can be given priority, meaning that the processing order is intentionally overtaken, and the first processing of processing unit 310-1 begins. Thus, the express lot 500-2 can be processed preferentially on the manufacturing line 300 while reducing the excess waiting time TA2-1.

[0057] Next, we will explain the control process flow when an express lot arrives after a regular lot, as described above, using Figure 8. Figure 8 is a sequence diagram showing the control process flow when an express lot arrives after a regular lot.

[0058] As shown in Figure 8, a normal lot 500-1 arrives at the processing unit 310-1 after completing preprocessing (S1). The CPU 100a then calculates and predicts the required time TR1-1 (S2) and determines that the required time TR1-1 exceeds the waiting time limit TA1-1 (S3). As a result, the normal lot 500-1 is placed awaiting the start of the first processing of the processing unit 310-1 and recorded in the waiting lot list 108.

[0059] Next, for the normal lot 500-1, the CPU 100a performs a processing start determination CK1-2 after the idle time check interval CTI has elapsed since the processing start determination CK1-1. Then, the CPU 100a calculates and predicts the required time TR1-2 (S4), and if it determines that the required time TR1-2 exceeds the idle time limit TA1-2 (S5), the normal lot 500-1 is put into a waiting state for the processing unit 310-1 to start its first processing.

[0060] Similarly, for normal lot 500-1, CPU 100a performs a processing start determination CK1-3 after the idle time check interval CTI has elapsed since the processing start determination CK1-2. Then, CPU 100a calculates and predicts the required time TR1-3 (S6), and if it determines that the required time TR1-3 exceeds the idle time limit TA1-3 (S7), normal lot 500-1 is put into a waiting state for the processing unit 310-1 to start its first processing.

[0061] Similarly, for regular lot 500-1, CPU 100a performs a processing start determination CK1-4 after the idle time check interval CTI has elapsed since the processing start determination CK1-3. Then, CPU 100a calculates and predicts the required time TR1-4 (S8), and if it determines that the required time TR1-4 exceeds the idle time limit TA1-4 (S9), regular lot 500-1 is put into a waiting state for the processing unit 310-1 to start its first processing.

[0062] At this point, the express lot 500-2 has finished its preprocessing and arrived at the processing unit 310-1 (S10). The CPU 100a then calculates and predicts the required time TR2-1 (S11) and determines that the required time TR2-1 exceeds the waiting time limit TA2-1 (S12). As a result, the express lot 500-2 is placed on standby for the start of the first processing of the processing unit 310-1 and is recorded in the waiting lot list 108.

[0063] Next, for the regular lot 500-1, the CPU 100a performs a processing start determination CK1-5 because the waiting time check interval CTI has elapsed since the processing start determination CK1-4. Then, the CPU 100a calculates and predicts the required time TR1-5 (S13) and determines that the required time TR1-5 falls within the waiting time limit TA1-5 (S14). At this point, the CPU 100a refers to the waiting lot list 108 and checks the priority of another lot that has arrived, namely the express lot 500-2 (S15). Then, the CPU 100a determines the start of the first processing for the high-priority express lot 500-2 and instructs the processing unit 310-1 to load the express lot 500-2 (S16). Consequently, the first processing of the processing unit 310-1, which is the next processing for the express lot 500-2, begins (S17). Furthermore, if the waiting time limits for regular lots and express lots differ, the process may include a step after step S15 and before step S16 to predict the required time for express lot 500-2 and a step to determine whether the required time falls within the waiting time limit. If the required time does not fall within the waiting time limit, the regular lot may be processed before the express lot.

[0064] On the other hand, for normal lot 500-1, CPU 100a instructs that the start of the first process of processing unit 310-1 be put on hold, meaning that the process start determination (prediction of required time) should continue in subsequent processes (S18). Therefore, for normal lot 500-1, the next process start determination is made as the idle time check interval CTI elapses from the process start determination CK1-5. Then, CPU 100a calculates and predicts the next required time (S19), and if it determines that the required time exceeds the idle time limit (S20), normal lot 500-1 will be put on hold for the start of the first process of processing unit 310-1.

[0065] As a result of the processing described above, it is determined that the start of the first processing of the processing unit 310-1 will be put on hold for the regular lot 500-1, and that the first processing of the processing unit 310-1 will be started for the express lot 500-2 before the regular lot 500-1. Therefore, the express lot 500-2, which has a higher priority than the regular lot 500-1, can be given priority, meaning that the processing order is intentionally overtaken, and the first processing of the processing unit 310-1 begins. Thus, the processing of the production line 300 will proceed preferentially for the express lot 500-2 while reducing the likelihood of exceeding the waiting time limit TA2-1.

[0066] In the embodiment described above, the estimated required time was calculated from the time from the completion of the first process of the processing device 310-1 to the start of the second process of the processing device 310-2. However, the calculation is not limited to this, and for example, the processing time of the first process may also be included in the estimated required time. In this case, the idle time limit will also be calculated to include the processing time of the first process. Alternatively, for example, the processing time of the second process may also be included in the estimated required time. In this case, the idle time limit will also be calculated to include the processing time of the second process.

[0067] Furthermore, in the embodiment described above, a system was described in which it is determined to start the first process when the required time is shorter than the waiting time limit. However, the system is not limited to this, and it may also be determined only when the required time is longer than the waiting time, that is, only when waiting to start the first process. Conversely, a system was described in which it is determined to wait to start the first process when the required time is longer than the waiting time limit, but the system is not limited to this, and it may also be determined only when the required time is shorter than the waiting time, that is, only when starting the first process. In other words, when the CPU 100a of the fluid simulator 100 makes a determination, it is not necessarily required to make a determination for both, and the determination result of one can be used to determine the other.

[0068] This disclosure can also be implemented by supplying a program that implements one or more of the functions of the above-described embodiments to a system or device via a network or storage medium, and by having one or more processors in the computer of that system or device read and execute the program. It can also be implemented by a circuit (e.g., an ASIC) that implements one or more functions.

[0069] This disclosure includes at least the following: (Method 1) In an information processing method in which a control unit performs a process to calculate the processing order of multiple lots in a semiconductor manufacturing facility, The control unit performs a first prediction step of predicting the first required time until the standing restriction is lifted for the first lot, The control unit performs a second prediction step of predicting the second required time until the standing restriction is lifted for the second lot, The control unit performs a first determination step in which it determines whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and a first required time. The control unit performs a second determination step in which it determines whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and a second required time, The control unit, in the first determination step, determines that the first processing can be started for the first lot, and if the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, it determines to wait for the start of the first processing for the first lot and to start the first processing for the second lot. An information processing method characterized by the following: (Method 2) The control unit, In the first prediction step, the time from the completion of the first process to the start of the second process following the first process for the first lot is predicted as the first required time. In the second prediction step, the time from the start of the first process to the start of the second process for the second lot is predicted as the second required time. In the first determination step, if the first required time is longer than the first waiting time limit, it is determined that the start of the first process should be delayed for the first lot. In the second determination step, if the second required time is longer than the second waiting time limit, it is determined that the start of the first process should be delayed for the second lot. The information processing method according to Method 1, characterized in that (Method 3) The control unit, In the first determination step, if the first required time is shorter than the first standing time limit, it is determined to start the first process for the first lot. In the second determination step, if the second required time is shorter than the second standing time limit, it is determined to start the first processing for the second lot. The information processing method according to method 2, characterized in that (Method 4) If the control unit determines in the sequence determination step that the first lot should wait to start the first process, the first determination step is re-executed when the first set time has elapsed. The information processing method according to method 2 or 3, characterized by the features described herein. (Method 5) If the control unit determines in the first determination step that the first lot should wait to start the first process, the first determination step is re-executed when the first set time has elapsed. An information processing method according to any one of methods 2 to 4, characterized in that... (Method 6) If the control unit, in the sequence determination step, determines in the second determination step that the start of the first process should be put on hold for the second lot, and then determines in the first determination step that the first process can be started for the first lot, it determines to start the first process for the second lot instead of the first lot. The information processing method according to method 5, characterized in that (Method 7) The control unit includes a vacancy prediction step that predicts the vacancy status of each processing unit that performs each of the manufacturing equipment each time a second set time has elapsed, The first setting time is set to be longer than the second setting time. The information processing method according to method 5 or 6, characterized by the features described above. (Method 8) The control unit, In the first prediction step, the first required time is predicted based on the availability status of each processing unit predicted in the availability prediction step. In the second prediction step, the second required time is predicted based on the availability status of each processing unit predicted in the availability prediction step. The information processing method according to method 7, characterized in that (Method 9) The control unit includes an information acquisition step that acquires information on the manufacturing priority of at least the first lot and the manufacturing priority of the second lot. An information processing method according to any one of methods 1 to 8, characterized by the above. (Method 10) The control unit acquires information on the status of each processing device that performs each processing in the manufacturing equipment during the information acquisition step. The information processing method according to method 9, characterized in that (Method 11) The control unit acquires information on the progress of each lot in the manufacturing equipment during the information acquisition process. The information processing method according to method 9 or 10, characterized by the features described herein. (Method 12) The control unit acquires information on the waiting time limits between each process in the manufacturing equipment during the information acquisition step. An information processing method according to any one of methods 9 to 11, characterized by the above. (Method 13) The control unit, in the information acquisition step, acquires information on the time it takes for a lot to move between each processing unit that performs each of the processing operations in the manufacturing equipment. An information processing method according to any one of methods 9 to 12, characterized by the above. (Method 14) The control unit includes an output step that outputs the information determined in the sequence determination step to a management device that manages each processing device that performs each of the manufacturing equipment's processes. An information processing method according to any one of methods 1 to 13, characterized by the above. (Composition 15) The equipment includes a control unit that performs processing to calculate the processing order of multiple lots in a semiconductor manufacturing facility. The control unit, A first prediction process predicts the first time required until the waiting restriction is lifted for the first lot, A second prediction process to predict the second time required until the waiting restriction is lifted for the second batch, With respect to the first lot, a first determination process is performed to determine whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and the first required time. With respect to the second lot, a second determination process is performed to determine whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and a second required time. If the first determination process determines that the first process can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, then the system executes a sequence determination process that determines to wait for the first process to start for the first lot and to start the first process for the second lot. An information processing device characterized by the following: (Method 16) A control method for a semiconductor manufacturing system comprising: a manufacturing facility having a plurality of processing units for each processing operation of semiconductor manufacturing; a management device for managing the plurality of processing units; and an information processing device having a control unit that performs processing to calculate the processing order of a plurality of lots in the manufacturing facility and outputs the processing order information to the management device, The control unit performs a first prediction step of predicting the first required time until the standing restriction is lifted for the first lot, The control unit performs a second prediction step of predicting the second required time until the standing restriction is lifted for the second lot, The control unit performs a first determination step in which it determines whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and a first required time. The control unit performs a second determination step in which it determines whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and a second required time, The control unit, in the first determination step, determines that the first processing can be started for the first lot, and if the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, it determines to wait for the start of the first processing for the first lot and to start the first processing for the second lot. A control method for a semiconductor manufacturing system characterized by the following features. (Composition 17) A manufacturing facility having multiple processing units for each process of semiconductor manufacturing, A management device for managing the aforementioned plurality of processing devices, The system includes an information processing device having a control unit that performs a process to calculate the processing order of multiple lots in the manufacturing process and outputs the processing order information to the management device, The control unit, A first prediction process predicts the first time required until the waiting restriction is lifted for the first lot, A second prediction process to predict the second time required until the waiting restriction is lifted for the second batch, With respect to the first lot, a first determination process is performed to determine whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and the first required time. With respect to the second lot, a second determination process is performed to determine whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and a second required time. If the first determination process determines that the first process can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, then the system executes a sequence determination process that determines to wait for the first process to start for the first lot and to start the first process for the second lot. A semiconductor manufacturing system characterized by the following features. (Method 18) A semiconductor is manufactured using the semiconductor manufacturing system described in Configuration 17. A semiconductor manufacturing method characterized by the following: (Composition 19) A program for causing a computer to execute the information processing method described in any one of Methods 1 to 14. (Composition 20) A computer-readable recording medium on which the program described in Configuration 19 is recorded. [Explanation of Symbols]

[0070] 1... Semiconductor manufacturing system / 100... Flow simulator (information processing device) / 100a... CPU (control unit) / 102... Product lot progress information (information on the progress of the lot) / 103... Equipment information (information on the status of the processing device) / 105... Information on movement time between floors (information on the movement time of the lot) / 106... Product lot completion target (information on the production target) / 107... Information on waiting time limit between processes (information on waiting time limit) / 200... Dispatcher (pipe) Processing equipment) / 300…Manufacturing line (manufacturing equipment) / 310…Processing equipment / 500…Lot / 500-1…Normal lot (1st lot) / 500-2…Express lot (2nd lot) / CTI…Standby time check interval (1st set time) / TA1-1~TA1-55…Standby time limit (1st standby time limit) / TA2-1…Standby time limit (2nd standby time limit) / TR1-1~TR1-5…Required time (1st required time) / TR2-1…Required time (2nd required time)

Claims

1. In an information processing method in which a control unit performs a process to calculate the processing order of multiple lots in a semiconductor manufacturing facility, The control unit performs a first prediction step of predicting the first required time until the standing restriction is lifted for the first lot, The control unit performs a second prediction step of predicting the second required time until the standing restriction is lifted for the second lot, The control unit performs a first determination step in which it determines whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and a first required time. The control unit performs a second determination step in which it determines whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and a second required time, The control unit, in the first determination step, determines that the first processing can be started for the first lot, and if the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, it determines to wait for the start of the first processing for the first lot and to start the first processing for the second lot. An information processing method characterized by the following:

2. The control unit, In the first prediction step, the time from the completion of the first process to the start of the second process following the first process for the first lot is predicted as the first required time. In the second prediction step, the time from the start of the first process to the start of the second process for the second lot is predicted as the second required time. In the first determination step, if the first required time is longer than the first waiting time limit, it is determined that the start of the first process should be delayed for the first lot. In the second determination step, if the second required time is longer than the second waiting time limit, it is determined that the start of the first process should be delayed for the second lot. The information processing method according to feature 1.

3. The control unit, In the first determination step, if the first required time is shorter than the first standing time limit, it is determined to start the first process for the first lot. In the second determination step, if the second required time is shorter than the second standing time limit, it is determined to start the first processing for the second lot. The information processing method according to feature 2.

4. If the control unit determines in the sequence determination step that the first lot should wait to start the first process, the first determination step is re-executed when the first set time has elapsed. The information processing method according to feature 2.

5. If the control unit determines in the first determination step that the first lot should wait to start the first process, the first determination step is re-executed when the first set time has elapsed. The information processing method according to feature 2.

6. If the control unit, in the sequence determination step, determines in the second determination step that the start of the first process should be put on hold for the second lot, and then determines in the first determination step that the first process can be started for the first lot, it determines to start the first process for the second lot instead of the first lot. The information processing method according to feature 5.

7. The control unit includes a vacancy prediction step that predicts the vacancy status of each processing device that performs each of the manufacturing equipment each time a second set time has elapsed, The first setting time is set to be longer than the second setting time. The information processing method according to feature 5.

8. The control unit, In the first prediction step, the first required time is predicted based on the availability status of each processing unit predicted in the availability prediction step. In the second prediction step, the second required time is predicted based on the availability status of each processing unit predicted in the availability prediction step. The information processing method according to feature 7.

9. The control unit includes an information acquisition step that acquires information on the manufacturing priority of at least the first lot and the manufacturing priority of the second lot. The information processing method according to feature 1.

10. The control unit acquires information on the status of each processing device that performs each processing in the manufacturing equipment during the information acquisition step. The information processing method according to feature 9.

11. The control unit acquires information on the progress of each lot in the manufacturing equipment during the information acquisition process. The information processing method according to feature 9.

12. The control unit acquires information on the waiting time limits between each process in the manufacturing equipment during the information acquisition step. The information processing method according to feature 9.

13. The control unit, in the information acquisition step, acquires information on the time it takes for a lot to move between each processing unit that performs each of the processing operations in the manufacturing equipment. The information processing method according to feature 9.

14. The control unit includes an output step that outputs the information determined in the sequence determination step to a management device that manages each processing device that performs each of the manufacturing equipment's processes. The information processing method according to feature 1.

15. The equipment includes a control unit that performs processing to calculate the processing order of multiple lots in a semiconductor manufacturing facility. The control unit, A first prediction process predicts the first time required until the waiting restriction is lifted for the first lot, A second prediction process to predict the second required time until the waiting restriction is lifted for the second batch, With respect to the first lot, a first determination process is performed to determine whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and a first required time. With respect to the second lot, a second determination process is performed to determine whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and the second required time. If the first determination process determines that the first process can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, then the system executes a sequence determination process that determines to wait for the first process to start for the first lot and to start the first process for the second lot. An information processing device characterized by the following:

16. A control method for a semiconductor manufacturing system comprising: a manufacturing facility having a plurality of processing units for each processing operation of semiconductor manufacturing; a management device for managing the plurality of processing units; and an information processing device having a control unit that performs processing to calculate the processing order of a plurality of lots in the manufacturing facility and outputs the processing order information to the management device, The control unit performs a first prediction step of predicting the first required time until the standing restriction is lifted for the first lot, The control unit performs a second prediction step of predicting the second required time until the standing restriction is lifted for the second lot, The control unit performs a first determination step in which it determines whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and a first required time. The control unit performs a second determination step in which it determines whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and a second required time, The control unit, in the first determination step, determines that the first processing can be started for the first lot, and if the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, it determines to wait for the start of the first processing for the first lot and to start the first processing for the second lot. A control method for a semiconductor manufacturing system characterized by the following features.

17. A manufacturing facility having multiple processing units for each process of semiconductor manufacturing, A management device for managing the aforementioned plurality of processing devices, The system includes an information processing device having a control unit that performs a process to calculate the processing order of multiple lots in the manufacturing process and outputs the processing order information to the management device, The control unit, A first prediction process predicts the first time required until the waiting restriction is lifted for the first lot, A second prediction process to predict the second required time until the waiting restriction is lifted for the second batch, With respect to the first lot, a first determination process is performed to determine whether or not to start the first process in the manufacturing equipment based on a first waiting limit time, which is the time the first lot can be left unattended, and a first required time. With respect to the second lot, a second determination process is performed to determine whether or not to start the first process based on a second waiting limit time, which is the time the second lot can be left unattended, and the second required time. If the first determination process determines that the first process can be started for the first lot, and the manufacturing priority of the second lot is higher than the manufacturing priority of the first lot, then the system executes a sequence determination process that determines to wait for the first process to start for the first lot and to start the first process for the second lot. A semiconductor manufacturing system characterized by the following features.

18. A semiconductor is manufactured using the semiconductor manufacturing system described in claim 17. A semiconductor manufacturing method characterized by the following:

19. A program for causing a computer to execute the information processing method described in claim 1.

20. A computer-readable recording medium on which the program described in claim 19 is recorded.

Images