Holding fixtures and processing equipment

Abstract

To provide a holding jig and processing apparatus that are less likely to damage the workpiece. [Solution] A holding jig according to one aspect of the present disclosure comprises a base portion 1 and a holding portion. The base portion is made of a magnetic metal and has a first surface 11 and a second surface 12 located opposite the first surface. The holding portion is made of resin and has a third surface 21 joined to the second surface of the base portion and a fourth surface 22 located opposite the third surface. The holding jig holds the workpiece on the fourth surface.

Description

Technical Field

[0001] The present disclosure relates to a holding jig and a processing apparatus.

Background Art

[0002] As a processing apparatus for performing processing such as grinding and polishing, after placing a workpiece on a magnet table, the workpiece is processed in a state where the workpiece is sandwiched and fixed by a plurality of iron blocks that are magnetically attracted to the magnet table (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above-described technique, when fixing a workpiece with a fixing member such as an iron block, in order to adjust the height of the workpiece, a holding jig may be disposed between the workpiece and the magnet table.

[0005] However, in such a case, stress is generated at the contact portion between the workpiece and the holding jig due to the processing resistance when processing the workpiece, and as a result, there is a risk that scratches or dents may occur at the contact location between the workpiece and the holding jig.

[0006] Therefore, there is room for improvement in the above-described technique in terms of providing a holding jig that is less likely to damage the workpiece.

[0007] The present disclosure provides a holding jig and a processing apparatus that are less likely to damage a workpiece.

Means for Solving the Problems

[0008] A holding jig according to one aspect of the present disclosure comprises a base portion and a holding portion. The base portion is made of a magnetic metal and has a first surface and a second surface located opposite the first surface. The holding portion is made of resin and has a third surface joined to the second surface of the base portion and a fourth surface located opposite the third surface. The holding jig holds the workpiece at the fourth surface. [Effects of the Invention]

[0009] According to this disclosure, it is possible to provide a holding jig and processing apparatus that are less likely to damage the workpiece. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a plan view showing an example of the configuration of a processing apparatus according to an embodiment. [Figure 2] Figure 2 is a perspective view showing an example of the configuration of a fixing jig according to the embodiment. [Figure 3] Figure 3 is a perspective view showing an example of the configuration of a holding jig according to the embodiment. [Figure 4] Figure 4 is a cross-sectional view taken along the line IV-IV shown in Figure 1. [Modes for carrying out the invention]

[0011] The following describes in detail, with reference to the drawings, embodiments for implementing the holding jig and processing apparatus according to this disclosure (hereinafter referred to as "embodiments"). However, this disclosure is not limited by these embodiments. Furthermore, each embodiment can be combined as appropriate, provided that the processing content is not inconsistent. Also, the same parts are denoted by the same reference numerals in each of the following embodiments, and redundant descriptions are omitted.

[0012] Furthermore, in the embodiments described below, expressions such as "constant," "orthogonal," "perpendicular," or "parallel" may be used, but these expressions do not require strict adherence to "constant," "orthogonal," "perpendicular," or "parallel" conditions. In other words, each of the above expressions allows for deviations, for example, in manufacturing accuracy or installation accuracy.

[0013] <First Embodiment> First, the configuration of the processing apparatus 100 according to the embodiment will be described with reference to Figure 1. Figure 1 is a plan view showing an example of the configuration of the processing apparatus 100 according to the embodiment.

[0014] As shown in Figure 1, the processing apparatus 100 may have a plurality of fixing jigs 10, a plurality of holding jigs 60, and a magnetic table 70. The fixing jig 10 may have a base portion 1, a support portion 2, and a contact member 3. In Figure 1, the processing apparatus 100 has, for example, three fixing jigs 10 and four holding jigs 60. The processing apparatus 100 only needs to have at least two fixing jigs 10. The number of holding jigs 60 is not particularly limited and may be, for example, one or multiple.

[0015] The processing apparatus 100 may be, for example, a processing apparatus for performing grinding, polishing, cutting, slicing, blasting, and painting. Such a processing apparatus 100 has a processing mechanism (not shown) for processing the workpiece 50. As shown in Figure 1, the workpiece 50 may be, for example, a disc-shaped member. However, the workpiece 50 is not limited to a disc-shaped member, but may also be a rectangular plate-shaped member, a cylindrical member, a rectangular prismatic member, etc.

[0016] Multiple holding jigs 60 are positioned between the workpiece 50 and the magnetic table 70, holding the workpiece 50 from below. Multiple fixing jigs 10 fix the workpiece 50 held by the multiple holding jigs 60 by gripping its periphery. Specifically, as will be described later, the fixing jigs 10 are fixed to the magnetic table 70 by magnetic attraction using a base portion 1 made of magnetic metal. Similarly, the holding jigs 60 are fixed to the magnetic table 70 by magnetic attraction using a base portion 61 made of magnetic metal.

[0017] The magnet table 70 may be, for example, an electromagnet. According to such a configuration, by flowing a current through the magnet table 70, the fixing jig 10 and the holding jig 60 can be easily fixed to the magnet table 70. Not limited to this, the magnet table 70 may be a permanent magnet.

[0018] Next, referring to FIG. 2, the configuration of the fixing jig 10 according to the embodiment will be described. FIG. 2 is a perspective view showing an example of the configuration of the fixing jig 10 according to the embodiment. As shown in FIG. 2, the base portion 1 may be, for example, an angle member having a rectangular shape in plan view and an L-shaped shape in side view. The base portion 1 may have a first surface 11 and a second surface 12 located opposite to the first surface 11. The first surface 11 and the second surface 12 are surfaces parallel to the surface of the magnet table 70.

[0019] The base portion 1 holds the support portion 2. For example, the base portion 1 may hold the support portion 2 on the first surface 11. Also, the base portion 1 may be fixed to the magnet table 70 by magnetic adsorption on the second surface 12. That is, the first surface 11 of the base portion 1 may be the surface on which the support portion 2 is placed, and the second surface 12 of the base portion 1 may be the surface that contacts the magnet table 70.

[0020] The base portion 1 may have a plurality of screw holes 13 (see FIG. 4). The plurality of screw holes 13 may be located on the first surface 11. Only one screw hole 13 is shown in FIG. 4, but the base portion 1 may have, for example, five screw holes 13 corresponding to the five screws 4 shown in FIG. 2. Note that the number of the screws 4 and the screw holes 13 is not limited to five. According to such a configuration, the support portion 2 can be fixed to the base portion 1 by screwing.

[0021] The base portion 1 may be a member made of a magnetic metal. Thereby, the second surface 12 of the base portion 1 can be fixed to the magnet table 70 by magnetic adsorption. Thus, by positioning the base portion 1 made of a magnetic metal on the side contacting the magnet table 70, the fixing jig 10 can be easily fixed to the magnet table 70.

[0022] The magnetic metal constituting the base portion 1 may be, for example, SUS (Stein Useless Steel). Specifically, the magnetic metal constituting the base portion 1 may be, for example, SUS430, SUS410, or SUS440C. These SUSs are difficult to rust and thus have excellent durability.

[0023] The support portion 2 may be, for example, a thin plate-like member. Specifically, the support portion 2 may have a third surface 21, a fourth surface 22 located opposite to the third surface 21, and a fifth surface 23 located on the workpiece 50 side among the side surfaces connecting the third surface 21 and the fourth surface 22.

[0024] The support portion 2 may be held by the base portion 1 on the third surface 21. In other words, the third surface 21 may be a surface facing the first surface 11 of the base portion 1.

[0025] The fifth surface 23 may be an end surface of the support portion 2 facing the workpiece 50 side. The contact member 3 described later may be located on the fifth surface 23.

[0026] The fifth surface 23 of the support portion 2 may have a V shape in a plan view of the support portion 2. Specifically, in a plan view of the support portion 2, the fifth surface 23 may have a V shape in which both ends protrude toward the workpiece 50 side more than the center. According to such a configuration, the fixing jig 10 contacts the workpiece 50 at at least two points. Thereby, the workpiece 50 can be stably fixed. Therefore, the machining accuracy of the workpiece 50 can be improved.

[0027] The support portion 2 may have a plurality of through holes 24 extending from the third surface 21 to the fourth surface 22 (see Figure 4). The plurality of through holes 24 may each be provided at a position opposite to the screw holes 13 of the base portion 1. With this configuration, the support portion 2 can be screwed to the base portion 1 with screws 4. Specifically, the support portion 2 can be fixed to the base portion 1 by screwing the screws 4 inserted through the through holes 24 into the screw holes 13. In the first embodiment, the support portion 2 has five through holes 24 corresponding to five screw holes 13.

[0028] The support portion 2 may be made of resin. If the support portion 2 is made of resin, the impact received by the workpiece 50 during processing can be suitably absorbed and dispersed by the support portion 2. For this reason, the fixing jig 10 having a support portion 2 made of resin can stably fix the workpiece 50. Consequently, the processing accuracy of the workpiece 50 can be improved.

[0029] The resin constituting the support portion 2 may be, for example, polyvinyl chloride, polyphenylene sulfide, or polyimide resin. As the polyimide resin, for example, Vesper® can be used.

[0030] The contact member 3 may be located on the fifth surface 23 of the support portion 2. Specifically, the contact member 3 may be fixed directly or indirectly to the fifth surface 23. For example, the contact member 3 may be indirectly joined to the fifth surface 23 by a bonding material (not shown). Also, if the contact member 3 is made of rubber, it may be directly heat-bonded to the fifth surface 23 by bringing the contact member 3 into contact with the fifth surface 23 while it is heated.

[0031] The contact member 3 is a member that comes into contact with the workpiece 50. The contact member 3 may be a sheet-like member made of an elastic material. The elastic material constituting the contact member 3 may be, for example, rubber. Specifically, it may be a relatively inexpensive rubber such as urethane rubber or natural rubber. Alternatively, it may be a fluororubber with high chemical resistance. Alternatively, the contact member 3 may be an elastic material other than rubber, such as a metal spring, silicone seal, polyurethane foam, elastomer, porous resin, etc.

[0032] With a fixing jig 10 having a contact member 3 made of an elastic material, the impact force transmitted from the workpiece 50 can be suitably absorbed and dispersed by the contact member 3. Furthermore, if the elastic material is rubber, the workpiece 50 is less likely to slip against the contact member 3. Therefore, the workpiece 50 can be stably fixed. Consequently, the processing accuracy of the workpiece 50 can be improved.

[0033] The fifth surface 23 of the support portion 2 to which the contact member 3 is fixed may be located on the workpiece 50 side of the base portion 1. In other words, the support portion 2 may be fixed to the base portion 1 with the fifth surface 23 protruding further toward the workpiece 50 than the base portion 1. With this configuration, the base portion 1, which has a relatively high Young's modulus, and the workpiece 50 are less likely to come into contact. Therefore, chipping or cracking is less likely to occur at the contact point between the workpiece 50 and the fixing jig 10. The Young's modulus of the base portion 1, which is made of SUS, may be, for example, around 190 to 210 GPa. The Young's modulus of the metal material may be measured in accordance with JIS Z 2280.

[0034] Next, the configuration of the holding jig 60 according to the embodiment will be described with reference to Figure 3. Figure 3 is a perspective view showing an example of the configuration of the holding jig 60 according to the embodiment. As shown in Figure 3, the holding jig 60 may have a base portion 61 and a holding portion 62.

[0035] The base portion 61 may be, for example, a rectangular timber in plan view. Specifically, it may have a sixth surface 611 and a seventh surface 612 located opposite the sixth surface 611. The base portion 61 may be fixed to the magnet table 70 by magnetic attraction at the sixth surface 611. A holding portion 62 may also be connected to the seventh surface 612. Note that the base portion 61 is not limited to a rectangular timber, but may also be, for example, a cylindrical member with a circular shape in plan view.

[0036] The base portion 61 may be made of a magnetic metal. This allows the sixth surface 611 of the base portion 61 to be fixed to the magnetic table 70 by magnetic attraction. In this way, by positioning the base portion 61 made of magnetic metal on the side that contacts the magnetic table 70, the holding jig 60 can be easily fixed to the magnetic table 70.

[0037] The magnetic metal constituting the base portion 61 may be, for example, SUS. Specifically, the magnetic metal constituting the base portion 61 may be, for example, SUS430, SUS410, or SUS440C. These SUS materials are rust-resistant and therefore have excellent durability.

[0038] The holding portion 62 may be, for example, a rectangular timber in plan view. Specifically, it may have an eighth face 621 and a ninth face 622 located opposite the eighth face 621. As shown in Figure 3, the eighth face 621 of the holding portion 62 may be substantially the same shape as the seventh face 612 of the base portion 61. Note that the holding portion 62 is not limited to a rectangular timber, but may also be, for example, a cylindrical member with a circular shape in plan view.

[0039] The holding portion 62 may be joined to the seventh surface 612 of the base portion 61 at the eighth surface 621. Specifically, the seventh surface 612 and the eighth surface 621 may be joined by, for example, a bonding material 63. As the bonding material 63, for example, epoxy or acrylic resin-based adhesives can be used. The holding portion 62 may also hold the workpiece 50 at the ninth surface 622. That is, the ninth surface 622 may be the surface on which the workpiece 50 is placed.

[0040] The holding portion 62 may be made of resin. If the holding portion 62 is made of resin, for example, compared to the case where the holding jig 60 is made of metal only, scratches and dents are less likely to occur on the workpiece 50. Specifically, by holding the workpiece 50 with a holding portion 62 made of resin, which has a lower Young's modulus than metal, the stress generated at the contact point between the workpiece 50 and the holding jig 60 can be reduced. Therefore, scratches, dents, etc., are less likely to occur on the workpiece 50.

[0041] The resin constituting the holding portion 62 may be, for example, polyphenylene sulfide or polyimide resin. As the polyimide resin, for example, Vesper® can be used.

[0042] These resins have a relatively small coefficient of thermal expansion. Specifically, the coefficient of thermal expansion of such resins is, for example, 60 ppm / °C or less. Therefore, even if the temperature of the holding jig 60 rises when processing the workpiece 50, the holding part 62 is less likely to deform due to heat, and the workpiece 50 can be held stably. Consequently, the processing accuracy of the workpiece 50 can be improved.

[0043] Furthermore, polyphenylene sulfide, a crystalline resin, has a moderately brittle nature. Specifically, when excessive stress is applied to such polyphenylene sulfide, the crystals partially delaminate. Therefore, if the holding portion 62 is made of polyphenylene sulfide, excessive stress is less likely to occur at the contact point between the workpiece 50 and the holding portion 62. Consequently, scratches and dents are less likely to occur on the workpiece 50.

[0044] The resin constituting the holding portion 62 is not limited to polyphenylene sulfide and polyimide resin. For example, other resins with a thermal expansion coefficient of 60 ppm / °C or less may be used for the holding portion 62.

[0045] The flatness of the ninth surface 622 may be, for example, 10 μm or less. With this configuration, the workpiece 50 held on the ninth surface 622 is less likely to vibrate. For example, if the flatness of the ninth surface 622 is too large, the ninth surface 622 and the workpiece 50 will only be in partial contact, making the workpiece 50 more susceptible to vibration relative to the ninth surface 622. Therefore, if the flatness of the ninth surface 622 is relatively small, the vibration of the workpiece 50 can be reduced, and the workpiece 50 can be held stably. Thus, the machining accuracy of the workpiece 50 can be improved.

[0046] The thickness of the holding portion 62 along the direction perpendicular to the ninth surface 622 may be, for example, 10 mm or more. With this configuration, if the ninth surface 622 deteriorates due to wear or the like, the accuracy of the ninth surface 622 can be maintained well by repeatedly polishing it. Specifically, the flatness of the ninth surface 622 can be maintained well. For this reason, the holding jig 60 having this configuration can stably hold the workpiece 50 for a long period of time. Consequently, the machining accuracy of the workpiece 50 can be maintained well for a long period of time.

[0047] As described above, the holding jig 60 according to the embodiment has a base portion 61 and a holding portion 62 that are separable from each other. With this configuration, if the holding portion 62 deteriorates due to wear or other reasons, the holding portion 62 can be easily replaced.

[0048] Figure 4 is a cross-sectional view taken along the line IV-IV shown in Figure 1. As shown in Figure 4, the holding jig 60 according to the embodiment may be positioned between the workpiece 50 and the magnetic table 70, and may hold the workpiece 50 from below. With this configuration, the height of the workpiece 50 relative to the magnetic table 70 can be adjusted by the holding jig 60.

[0049] Furthermore, with this configuration, compared to, for example, placing the workpiece 50 directly on the magnetic table 70, scratches and dents are less likely to occur on the workpiece 50. Specifically, as described above, by holding the workpiece 50 with the holding part 62 of the holding jig 60 made of resin, damage to the workpiece 50 can be reduced while placing the workpiece 50 on the magnetic table 70.

[0050] <Modified example of the holding part> Figure 3 illustrates the case where the base portion 61 is a solid rectangular timber. However, the base portion 61 may also have, for example, a through hole extending from the sixth surface 611 to the seventh surface 612. With such a configuration, the weight of the holding jig 60 can be reduced. Therefore, a holding jig 60 having such a configuration has excellent handling properties.

[0051] Figure 3 illustrates the case where the holding portion 62 is a solid rectangular timber. However, the holding portion 62 may also have, for example, a recess located on the eighth surface 621. With such a configuration, the weight of the holding jig 60 can be reduced. Therefore, a holding jig 60 having such a configuration has excellent handling properties.

[0052] Furthermore, this configuration allows for a reduction in the contact area between the base portion 61 and the holding portion 62. Specifically, the area of ​​the eighth surface 621 of the holding portion 62 that is joined to the seventh surface 612 of the base portion 61 can be reduced. Therefore, with a holding jig 60 having this configuration, the holding portion 62 can be attached to and detached from the base portion 61 more easily. Consequently, a holding jig 60 having this configuration offers excellent maintainability.

[0053] Although the present disclosure has been described in detail above, this disclosure is not limited to the embodiments described above, and various modifications and improvements are possible without departing from the gist of this disclosure.

[0054] The embodiments disclosed herein should be considered in all respects as illustrative and not restrictive. Indeed, the embodiments described above can be embodied in a variety of forms. Furthermore, the embodiments described above may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims.

[0055] Furthermore, this technology can also be configured as follows. (1) A jig for holding a workpiece, A base portion made of a magnetic metal, having a first surface (sixth surface 611 in the embodiment) and a second surface (seventh surface 612 in the embodiment) located opposite the first surface, A holding portion made of resin, having a third surface (eighth surface 621 in the embodiment) that is joined to the second surface of the base portion, and a fourth surface (ninth surface 622 in the embodiment) located opposite the third surface. It has, A holding jig for holding the workpiece on the fourth surface. (2) The holding jig according to (1), wherein the flatness of the fourth surface is 10 μm or less. (3) The retaining jig according to (1) or (2), wherein the base portion and the retaining portion are separable from each other. (4) The holding jig according to any one of (1) to (3) above, wherein the thickness of the holding portion along the direction perpendicular to the third surface is 10 mm or more. (5) The holding jig according to any one of (1) to (4) above, wherein the resin is polyphenylene sulfide or polyimide resin. (6) The holding jig according to any one of (1) to (5) above, wherein the coefficient of thermal expansion of the holding part is 60 ppm / °C or less. (7) The first surface of the base portion is fixed to a magnetic table, the holding jig according to any one of (1) to (6) above. (8) A processing apparatus having a holding jig described in any one of (1) to (7) above, and a magnetic table for fixing the holding jig. [Explanation of Symbols]

[0056] 1. Base section 2 Support part 3 Contact Member 4 screws 10 Fixing fixtures 11 Page 1 12 Side 2 13 screw holes 21 Page 3 22 Page 4 23 Page 5 24 Through holes 50 Workpiece 60 Holding fixture 61 Base section 62 Holding part 63 Bonding material 70 Magnetic Table 100 Processing equipment 611 Page 6 612 Page 7 621 Page 8 622 Page 9

Claims

1. A jig for holding a workpiece, A base portion made of a magnetic metal, having a first surface and a second surface located opposite the first surface, A retaining portion made of resin, having a third surface joined to the second surface of the base portion, and a fourth surface located opposite the third surface. It has, A holding jig for holding the workpiece on the fourth surface.

2. The holding jig according to claim 1, wherein the flatness of the fourth surface is 10 μm or less.

3. The holding jig according to claim 1, wherein the base portion and the holding portion are separable from each other.

4. The holding jig according to claim 1, wherein the thickness of the holding portion along the direction perpendicular to the third surface is 10 mm or more.

5. The holding jig according to claim 1, wherein the resin is polyphenylene sulfide or polyimide resin.

6. The holding jig according to claim 1, wherein the thermal expansion coefficient of the holding portion is 60 ppm / °C or less.

7. The holding jig according to claim 1, wherein the first surface of the base portion is fixed to a magnetic table.

8. A processing apparatus comprising a holding jig according to any one of claims 1 to 7, and a magnetic table for fixing the holding jig.

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