Endpoint detection system to enhance spectral data acquisition
The endpoint detection system with an optical bundle and achromatic lenses addresses precision and uniformity challenges in semiconductor manufacturing by enhancing spectral data acquisition, ensuring accurate substrate process monitoring and improved device quality.
JP2026113530APending Publication Date: 2026-07-07APPLIED MATERIALS INC
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Patent Information
- Application Number
- JP2026053087
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2021-06-10
- Filing Date
- 2026-03-27
- Publication Date
- 2026-07-07
AI Technical Summary
Technical Problem
Existing optical systems for endpoint control in semiconductor manufacturing fail to meet the increasing demands for precision and uniformity in substrate processes due to variations in etching speed and uniformity, leading to substandard devices.
Method used
An endpoint detection system with an optical bundle and collimator assembly that uses achromatic lenses to transmit and receive multiple incident and reflected light signals without beam splitters, enabling accurate spectral data acquisition for precise substrate profiling.
Benefits of technology
Enhances spectral data collection efficiency, reducing signal loss and providing more accurate substrate process monitoring, thereby improving device quality and uniformity.
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Smart Images
Figure 2026113530000001_ABST
Abstract
An endpoint detection system is provided to enhance spectral data acquisition. [Solution] The optical bundle coupled to the light source includes two or more sets of optical fibers, each containing an output light and an input optical fiber. The input optical fibers are positioned within the optical bundle at a pair angle with respect to each output optical fiber. The optical bundle is coupled to a collimator assembly including an achromatic lens. The achromatic lens receives the input light from the first output optical fiber and directs its spectral components to first and second portions of the substrate surface. The first and second portions are substantially the same. The achromatic lens collects the reflected spectral components generated by the spectral components directed to the first and second portions of the substrate surface, and further transmits the reflected spectral components to the first input fiber, which transmits the reflected spectral components to a photodetector component. A processing device coupled to the photodetector component determines the reflectance of the substrate surface.
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