Inductively coupled plasma light source

Abstract

This invention provides a plasma chamber and light source that generate high-power and high-brightness EUV light in a configuration that enables integration with a wide range of applications and exhibits high stability and reliability. [Solution] The plasma chamber for the UV light source includes a plasma generation region defining a plasma confinement region. A port is positioned adjacent to the side of the plasma generation region, allowing the generated light to pass out of the chamber. A high-voltage region is coupled to the plasma generation region. A grounding region is coupled to the high-voltage region, defining an outer surface configured to be coupled to ground and dimensionally determined to receive a surrounding induction core. The width of the high-voltage region is greater than the width of the grounding region.

Description

Technical Field

[0001]

[0001] The headings of the chapters used in this specification are for purposes of organization only and should not be construed as in any way limiting the subject matter described in this application.

[0002] [Introduction]

[0002] A number of commercial and academic applications require high-intensity light in the extreme ultraviolet (EUV) region of the spectrum. For example, EUV light is required for a number of industrial applications such as metrology, accelerated testing, photoresists, defect inspection, and microscopy. Other applications of EUV light include microscopy, spectroscopy, area imaging, and blank mask inspection. These and other applications require EUV sources with high reliability, small physical size, low capital cost, low operating cost, and low complexity from these important sources of extreme ultraviolet photons.

Summary of the Invention

[0003]

[0003] A plasma chamber according to the present teachings that can be an ultraviolet light source includes a plasma generation region that defines a plasma confinement region. Ports are positioned adjacent to the side of the plasma generation region that allow the generated ultraviolet radiation to transmit out of the chamber. A gas supply port can be positioned proximate to the plasma generation region. A vacuum pump port can be positioned proximate to the plasma generation region.

[0004]

[0004] A high voltage region is coupled to the plasma generation region. A ground region is coupled to the high voltage region that defines an outer surface configured to be coupled to ground and is dimensioned to receive a surrounding induction core. The width of the high voltage region is greater than the width of the ground region. In various embodiments, the width of the high voltage region can be at least twice as large as the width of the ground region. The width of the plasma generation region can also be smaller than the width of the ground region.

[0005]

[0005] The insulating region may be coupled to the ground region and may be configured to be coupled to the ground potential. The insulating region may also have an aperture that allows ultraviolet light to pass through. The insulating region may be configured to decrease the negative potential in close proximity to the ground region in order to reduce the attraction of ions generated in the plasma generation region. A gas supply port for supplying gas to the plasma generation region may be located in the insulating region. A plasma diagnostic port may also be located in the insulating region. The ports in the insulating region may include an aperture that allows ultraviolet light to pass through.

[0006]

[0006] A mirror oriented to reflect at least some of the light generated in the plasma generation region back to the plasma generation region may be positioned adjacent to the grounding region. The mirror may be partially transparent so that some of the light generated in the plasma passes through the output port.

[0007]

[0007] An inner induction core that couples the current to the plasma loop may be positioned around the plasma generation region. An outer induction core may be positioned around the inner induction core. The induction core may be positioned around a portion of the grounding region and configured to prevent the current from flowing through the grounding region. [Brief explanation of the drawing]

[0008]

[0008] These teachings, along with their further advantages, will be described more specifically in the following detailed description in conjunction with the accompanying drawings, according to preferred and exemplary embodiments. Those skilled in the art will understand that the drawings described below are for illustrative purposes only. The drawings are not necessarily to scale, but rather are used as a whole to illustrate the principles of the teachings. The drawings are not intended to limit in any way the scope of the applicant's teachings. [Figure 1] This figure illustrates the plasma chamber according to this instruction for a Z-pinch ultraviolet light source. [Figure 2A]This diagram illustrates an ultraviolet light source including a plasma confinement region, a high-voltage region, a grounded region, and an insulating region, as described in this instruction. [Figure 2B] This figure illustrates a graph from an oscilloscope showing the pulsed operation of the ultraviolet light source embodiment described in this instruction. [Figure 3] This figure illustrates an embodiment of the ultraviolet light source according to this teaching, including a gas supply port coupled to an insulating region. [Figure 4A] This figure illustrates an embodiment of the ultraviolet light source according to this teaching, including a diagnostic probe port coupled to an insulating region. [Figure 4B] This figure illustrates another embodiment of the ultraviolet light source according to this teaching, which includes a laser source having an output optically coupled to an insulating region. [Figure 5] This figure illustrates an embodiment of an ultraviolet light source according to this teaching, including a port having a transparent region for allowing generated ultraviolet light, coupled to an insulating region, to pass through. [Figure 6] This figure illustrates an embodiment of the ultraviolet light source according to this teaching, including a mirror for reflecting the generated ultraviolet light back into the plasma confinement region. [Modes for carrying out the invention]

[0009] [Description of various embodiments]

[0017] This instruction will be described in more detail with reference to exemplary embodiments as shown in the accompanying drawings. While this instruction will be described in conjunction with various embodiments and examples, it is not intended to be limited to such embodiments. Conversely, this instruction will encompass various alternative forms, modifications, and equivalents as will be understood by those skilled in the art. Those skilled in the art who can utilize the instruction herein will recognize additional implementations, modifications, and embodiments, as well as other fields of use, that fall within the scope of this disclosure as described herein.

[0010]

[0018] Any reference in this specification to “one embodiment” means that a particular feature, structure, or characteristic described in relation to that embodiment is included in at least one embodiment of this teaching. The phrase “in one embodiment” appearing in various parts of this specification does not necessarily refer to the same embodiment.

[0011]

[0019] It should be understood that the individual steps of the method in this instruction may be performed in any order and / or simultaneously, as long as this instruction remains operational. Furthermore, it should be understood that the apparatus and method in this instruction may include any number of the described embodiments or all of the described embodiments, as long as this instruction remains operational.

[0012]

[0020] Extreme ultraviolet (EUV) light sources play a crucial role in numerous optical measurement and exposure applications. It is desirable that these sources be configured to accommodate a wide range of use cases. One challenge is to generate high-power and high-brightness EUV light in a configuration that enables integration with numerous applications while also exhibiting high stability and reliability.

[0013]

[0021] Extreme ultraviolet (EUV) radiation is referred to by various names by those skilled in the art. Some have sometimes referred to it as high-energy ultraviolet radiation, which can be abbreviated as XUV. Extreme ultraviolet radiation generally refers to electromagnetic radiation that is nominally part of the electromagnetic spectrum, with wavelengths ranging from 124 nm to 10 nm. There is some overlap between extreme ultraviolet radiation and what is considered the optical spectrum. One specific EUV wavelength of interest is 13.5 nm, because this wavelength is commonly used for lithography. The extreme ultraviolet radiation sources according to this teaching are not limited to the generation of EUV radiation. As is known in the art, plasma can be used to generate photons over a wide spectral range. For example, the plasma generated according to this teaching can also be used to generate soft X-ray photons (SXR), which include, for example, photons with wavelengths less than 10 nm.

[0014]

[0022] So-called Z-pinch plasmas with axial current have been shown to be effective in generating EUV and SXR light. However, the most well-known sources employ electrodes to conduct high discharge currents into the plasma. These electrodes, typically in contact with high-temperature plasma, can melt and create significant debris, which is highly undesirable as it can greatly reduce the useful life of the source.

[0015]

[0023] Electrode-free techniques for generating EUV are desirable and would meet considerable market needs. Such sources are available, for example, from Energetiq, a Hamamatsu Company in Wilmington, MA. These sources are based on Z-pinch plasma but completely avoid electrodes by inductively coupling current to the plasma. The plasma in these EUV sources is magnetically confined away from the source walls, minimizing thermal load, reducing debris, and providing excellent open-loop spatial stability and stable, repeatable power output. One challenge with known Z-pinch plasma chambers is that high-voltage regions of the chamber walls obscure one side of the Z-pinch region (referred to herein as the back side). This makes it difficult or impossible to modify the chamber to provide back-side access, as ground potential cannot be achieved in the high-voltage region while the plasma is running.

[0016]

[0024] One feature of the EUV sources of the present teachings is that they support a wide variety of applications across multiple aspects. For example, the EUV source operating conditions are user-adjustable. In particular, the EUV sources of the present teachings improve upon known Z-pinch designs in that their peak power or peak brightness can be optimized as required by the user for a particular application. The plasma size may typically be less than 1 mm in diameter under typical operating conditions. This design supports a simple and flexible optical interface provided to the user on one side of the system housing for connection to the application equipment. Custom interfaces may also be accommodated for particular applications.

[0017]

[0025] Another feature of the EUV sources of the present teachings is that they accommodate two-sided optical access to the plasma chamber. This feature is provided at least in part by appropriate modification to the high voltage chamber used to generate the Z-pinch system conditions.

[0018]

[0026] FIG. 1 illustrates a plasma chamber 100 according to the present teachings for a Z-pinch ultraviolet light source. Chamber 100 includes an interface 102 for passing target gas 104 into chamber 100. A pump 106 is used to evacuate chamber region 108 to a desired operating pressure and / or to control the gas flow in chamber 100.

[0019]

[0027] Port 110 is provided to allow EUV radiation generated by the plasma to pass through. Port 110 may include an EUV output port that allows desired EUV radiation to pass through. Port 110 may also be configured to include a filter structure that blocks undesirable radiation. In some embodiments, port 110 is configured not to allow visible light to pass through. For example, in various embodiments, the EUV transparent port 110 is an aperture that may include a spectral purification foil. Typically, port 110 is a beamline aperture port that allows radiation propagating along the beamline to pass through. The port may also be configured to have a desired diameter to physically block light propagating in a particular direction. Furthermore, the diameter of the aperture may be selected to provide a desired pressure difference.

[0020]

[0028] In various systems, port 110 is configured to allow the user to adapt it to application systems (not shown) where EUV radiation passes directly through port 110. The plasma generation region 112 defines the plasma confinement region 113, which is described in more detail below, using magnetic induction. The plasma confinement region 113 is formed by pulse formation and power delivery regions 115 that carry a current to excite the operating core (not shown). A high-voltage region 114 is attached to the plasma generation region 112.

[0021]

[0029] A grounding region 116 is attached to the high-voltage region 114. The grounding region 116 has an outer surface that is connected to ground at a first location 118. An insulating vacuum pipe 120 containing a dielectric breakdown 122 is positioned adjacent to the first location 118. The insulating material forming the dielectric breakdown 122 may be made of ceramic, or one or more other high-temperature insulating materials such as polytetrafluoroethylene (PTFE), or similar materials. The vacuum pipe 120 is grounded at a post-dielectric breakdown 122 location 124 near the input / output port 126 of the chamber 100. The insulating vacuum pipe 120 plays a role in causing a dielectric breakdown that reduces the negative potential in order to attract ions to further downstream components (not shown) as desired during operation.

[0022]

[0030] Chamber 100 also includes regions 128, 130 for positioning magnets that provide an induced current for Chamber 100 during operation. The last region of Chamber 100, i.e., the first location 118, is also grounded. Collectively, the grounded insulated vacuum pipe 120 with dielectric breakdown 122 and the grounded region 124 at the output port 126 may be referred to as the insulated region 129. One feature of the insulated region 129 of the chamber described herein is that it provides a safe, grounded external area of ​​the chamber that allows access by users and / or other downstream equipment from outside Chamber 100.

[0023]

[0031] One feature of this instruction is that the input / output port 126, defined by the insulated vacuum pipe 120, is configured for flexible connection of various downstream components (not shown). This feature supports various custom and semi-custom configurations of the chamber 100 to address different applications. For example, the input / output port 126 may form a gas supply port that provides gas to the plasma generation region 112. The input / output port 126 may form a plasma diagnostic port, which allows, for example, optical imaging, spectroscopy, and / or electron probing of the plasma in the plasma generation region 112 from the input / output port 126 during operation. The input / output port 126 may form an aperture for allowing ultraviolet light generated from the plasma to pass through. The input / output port 126 may include a mirror positioned adjacent to the ground position 124. The mirror (not shown) may be fully or partially reflective and oriented as desired to reflect at least some of the light generated in the plasma generation region 112 back to the plasma generation region 112. In some embodiments, the mirror is partially transparent so that some of the light generated in the plasma generation region 112 passes through the input / output port 126 and some of the light is reflected back. In some embodiments, this light is EUV radiation generated in the plasma generation region, and in some embodiments, this light may also include, for example, laser light or other light that interacts with and / or probes the plasma.

[0024]

[0032] Figure 2A illustrates the ultraviolet light source 200 according to this teaching, which includes a plasma confinement region 202, a high-voltage region 204, a grounded region 206, and an isolation region 208. The source 200 is an inductive design that uses magnetic confinement of the plasma in the plasma confinement region 202, away from the components of the chamber 210, to provide high reliability and stability. The target gas 212 enters the chamber 210 through the interface 214. In some embodiments, the target gas is xenon. A pump 216 is used to evacuate the chamber region 218 to a desired operating pressure. A port 220 is provided to allow EUV radiation, i.e., EUV light 236 generated by the plasma, to pass through.

[0025]

[0033] The pulse formation and power delivery area 222 is driven using a parallel-connected capacitor 224 and pulse generator 226 that drive current through area 222 to ground. The pulse generator 226 applies a negative high-voltage pulse to the capacitor. In some embodiments, the capacitor 224 is a collection of multiple capacitors. Thus, the pulse formation and power delivery area 222 of the chamber 210 has a high-voltage side 228 and a ground side 230. The inner magnetic core 232 and outer magnetic core 234, excited by the current pulses flowing through the pulse formation and power delivery area 222, generate at least three inductively coupled plasma loops (not shown) that converge in the plasma generation area 202, forming a magnetically confined Z-pinch. The loops flow through the area between the inner core 232 and the outer core 234, and through the plasma generation area 202.

[0026]

[0034] During operation, a voltage pulse from the pulse generator 226 charges the capacitor 224. During the charging time, a small leakage current from cores 232 and 234 sustains the plasma loop. The pinch operation requires a sustained loop because it requires ionized gas for proper function. The outer core 234 saturates, driving its impedance to zero. The capacitor then discharges. This results in beneficial pulse compression. The inner core 232 couples the current pulse into the plasma loop, resulting in a large pulse in the plasma current known as a Z-pinch.

[0027]

[0035] The plasma generation region 202 generates and emits nearly 100% of the EUV radiation produced by the plasma. The plasma loop does not generate EUV light. As a result, source 200 generates a high-quality, relatively small source of EUV light 236 from a distinct and stable pinch plasma confinement region 238 in the plasma generation region 202. By driving and including the plasma using pulse formation and power delivery region 222, source 200 operates without the use of electrodes commonly used in known systems to conduct discharge current to the plasma.

[0028]

[0036] Known Z-pinch plasma chambers have electrical continuity between the high-voltage region 204 and the plasma generation region 202. Consequently, when the outside of the chamber 210 is at a high potential voltage, it is difficult or impossible to have rear access to the chamber.

[0029]

[0037] In contrast, in the configuration shown in Figure 2A, the high-voltage region 204 is electrically connected to the high-voltage side 228 of the pulse formation and power delivery region 222, while the ground region 206 is coupled to the high-voltage region 204. In particular, the ground region 206 has an outer surface that is coupled to ground at the first location 240. Furthermore, an insulating vacuum pipe is present in the insulating region 208, which includes the dielectric breakdown 242. In this configuration, the insulating region 208 is grounded at location 244 after the dielectric breakdown 242, near the output 246 of the chamber 210. As a result, the insulating region 208 plays a role in bringing about a dielectric breakdown that reduces the negative potential that attracts ions to further downstream components during operation as desired.

[0030]

[0038] The current-preventing induction core 248 is positioned at the boundary between the high-voltage region 204 and the grounding region 206 of the chamber 210. The hard ground connected to positions 240 and 244 in the grounding region 206, and the ground connected to the grounding side 230 are electrically connected. A bias current is applied to the current-preventing induction core 248. This bias current reduces the current flowing from the high-voltage region 204 to the grounding region 206.

[0031]

[0039] During operation, some pulsed leakage current flows through the induction core 248 along the pipe (118 or 240) adjacent to the end of the chamber. The time variation of the current in the pipe (118, 240) results in a time variation of the magnetic flux flowing circumferentially around the core 248. The time variation of the magnetic flux causes a reverse current to flow in the pipe (118 or 240) adjacent to the end of the chamber. As a result, the leakage current is canceled out by the resulting induced current, thereby preventing the leakage current from flowing further. When the voltage on the high-voltage side 228 swings from negative to positive, the current-preventing core 248 automatically resets.

[0032]

[0040] Various embodiments may use elements of different dimensions in the chamber 210. Generally, the width of the grounding area is 250W. G The plasma generation area is 202, width 251W. PGIt is larger than. In some embodiments, the cross-sectional area of ​​the current-preventing induction core 248 perpendicular to the magnetic flux is larger than that of the inner core 232. In some embodiments, the cross-sectional area of ​​the current-preventing induction core 248 is at least twice that of the inner core 232. In this case, the width of the high-voltage region is 252W. HV The grounding area width is 250W. G Larger than that. In some configurations, the high-voltage range has a width of 252W. HV The grounding area width is 250W. G It is at least twice that amount.

[0033]

[0041] As with the input / output port 126 described in relation to Figure 1, the input / output port 246 may be configured for multi-purpose connections to various downstream components to support custom and semi-custom configurations of the source 200 and address a number of different applications. The generated EUV radiation 236 may also be directed to the back side of the pinch confinement region 238 (backside EUV radiation is not shown). The output 246 may be configured to collect this backside EUV radiation and project it to downstream components. For example, the input / output port 246 may be configured to enhance the EUV radiation using a multilayer mirror at the output. The input / output port 246 may also be used for optical access and gas fuel supply purposes. All or some of these configurations of the input / output port 246 may be combined in similar ways. Some of these configurations are described in more detail below.

[0034]

[0042] For example, in one particular embodiment, the power source 200 is 8 W / mm 2The system is configured to generate 13.5 nm wavelength EUV radiation at approximately 20 watts in 2-pi steradians with a brightness of -sr. The source radiation may also be a relatively high pulse, such as approximately 2.5 kHz, and the emissivity may be user-configurable. The plasma confinement region 238 for such a source may be less than 1 mm in diameter, or even less than 0.5 mm in diameter. In some ways of operation, the actual position of the plasma confinement region 238 differs by less than a few microns per pulse.

[0035]

[0043] Figure 2B illustrates graph 290 from an oscilloscope showing the pulsed operation of the embodiment of the ultraviolet light source of this teaching. The first trace 292 illustrates the capacitor discharge used to create the Z-pinch plasma. The second trace 294 illustrates the voltage measured at pipe position 240 to ground (Figure 2A). Both of these voltages are large, with negative high voltage amplitudes of 500V or more. The third trace 296 is the voltage measured at pipe position 244 to ground (Figure 2A).

[0036]

[0044] Therefore, the configuration described in Figure 2A reduces the leakage voltage at pipe position 244 to a relatively low voltage level that is safe for the operator to maintain and reconfigure. Since the plasma current flows only when the voltage swings from low to high, the main current pulses are always in the same direction. Since the negative voltage is always greater while the capacitor voltage swings positively, the current-preventing induction core 248 may be negatively charged after each pulse and also reset by the positive applied voltage.

[0037]

[0045] Figure 3 illustrates an embodiment of the ultraviolet light source 300 according to this teaching, including a gas supply port 302 coupled to an insulating region 308. Similar to the source 200 described in relation to Figure 2A and the chamber 100 described in relation to Figure 1, the source 300 includes many common components, such as a chamber 301, a high-voltage region 304, a grounding region 306, an insulating region 308, a plasma confinement region 310, a port 314 for passing EUV radiation 312, an inner core 316, an outer core 318, a current-preventing core 320, and a pump 322.

[0038]

[0046] Gas 324 is supplied to the plasma confinement region through a gas supply port 302 to the chamber 301. In some embodiments, gas 324 is xenon gas. Gas 324 flows through the chamber 301 and exits from the pump 322, as illustrated by the dashed line 326. In some embodiments, the gas supply port 302 supports the insertion of a gas jet to deliver gas 324 to the plasma generation region. One advantage of mounting the gas supply port 302 to the insulating region 308 is that such a configuration improves the fueling of the plasma produced in the plasma confinement region 310. Such improvement may lead to a higher plasma density, which in turn results in higher power and / or higher brightness of the EUV radiation 312. In some embodiments, the gas supply port 302 is the only gas port in the chamber 301. In some embodiments, two or more gas ports are used.

[0039]

[0047] Figure 4A illustrates an embodiment of the ultraviolet light source 400 according to this teaching, including a diagnostic probe port 402 coupled to an insulating region 408. Similar to the source 200 described in relation to Figure 2A and the chamber 100 described in relation to Figure 1, the source 400 includes many common components, such as a chamber 401, a high-voltage region 404, a ground region 406, an insulating region 408, a plasma confinement region 410, a port 414 for passing EUV radiation 412, an inner core 416, an outer core 418, a current-preventing core 420, and a pump 422.

[0040]

[0048] The diagnostic probe port 402 includes an optical port 424. The optical port 424 passes light 426 collected from the back of the plasma generation region 410. This light 426 may be useful for detecting plasma properties, such as optical output power as a function of position and / or time. Port 424 may also pass probe light 428 into the chamber 401. The probe light 428 may be directed towards the plasma confinement region, and the resulting light 426 collected from the back of the plasma generation region 410 returning to port 424 may be detected to determine various plasma properties. The probe light 428 may also be used for a number of other purposes, such as determining the properties of a gas. One feature of the chamber according to this teaching is that it is very desirable for safety reasons to have the optical port 424 at ground potential.

[0041]

[0049] Figure 4B illustrates another embodiment of the ultraviolet light source 450 according to this teaching, which includes a laser source 430 having an output that is optically coupled to an insulating region 408 so that light passes through the chamber and enters the plasma confinement region. Similar to the source 200 described in relation to Figure 2A, the chamber 100 described in relation to Figure 1, and the source 400 described in relation to Figure 4A, the source 450 includes many common components, such as a chamber 401, a high-voltage region 404, a ground region 406, an insulating region 408, a plasma confinement region 410, a port 414 for passing EUV radiation 412, an inner core 416, an outer core 418, a current-blocking core 420, and a pump 422.

[0042]

[0050] As in the configuration described in relation to Figure 4A, the diagnostic probe port 402 includes an optical port 424 that allows radiation at a desired frequency to pass through. The optical port may include a filter that allows only the desired radiation to pass through. The optical port 424 in Figure 4B is generally configured to allow laser radiation generated by the laser 430 to pass through. Additionally, the optical port 402 may be used for diagnostic purposes to detect characteristics and / or probe the plasma, as described in relation to Figure 4A.

[0043]

[0051] The laser optics element 423 is positioned relative to the output of the laser 430 to direct the laser radiation generated by the laser 430 into the plasma confinement region. For example, the laser optics element 432 may be a mirror or array of mirrors, as shown, that directs the laser radiation from the output of the laser 430 into the plasma confinement region. In other embodiments, the laser optics element 430 may include a penetrating lens that passes the laser radiation into the plasma confinement region and focuses it. In various embodiments, the laser 430 generates sufficient power at a desired wavelength to heat the plasma to form a Z-pinch plasma. As described in connection with Figure 4A, one feature of the chamber is that it includes an optical port 424 that is at ground potential for safety reasons.

[0044]

[0052] Figure 5 illustrates an embodiment of the ultraviolet light source 500 according to this teaching, which includes a port 502 having a transparent region for passing generated ultraviolet light coupled to an insulating region 508. Similar to the source 200 described in relation to Figure 2A and the chamber 100 described in relation to Figure 1, the source 500 includes many common components, such as a chamber 501, a high-voltage region 504, a ground region 506, an insulating region 508, a plasma confinement region 510, a port 514 for passing EUV radiation 512, an inner core 516, an outer core 518, a current-preventing core 520, and a pump 522.

[0045]

[0053] Port 502 is configured to allow EUV radiation 524 generated in the plasma generation region 510 to pass through from the back. Port 502 is also configured to interface with a beamline assembly system, which may be a customer supply system to the chamber 501. In some embodiments, this system may be a sealed system that interfaces with port 520 to maintain a desired pressure in the operating chamber. In other embodiments, a transparent port seals the port, and light is transmitted through the port to the attached system. One feature of source 500 is that EUV radiation appears as both front-side EUV radiation 512 and back-side EUV radiation 524. This feature allows two systems to be supplied from the same source 500, one with front access and the other with back access. In various embodiments, the two systems may be the same system or different systems.

[0046]

[0054] Figure 6 illustrates an embodiment of the ultraviolet light source 600 according to this teaching, which includes a mirror 602 for reflecting the generated ultraviolet light back to the plasma confinement region. Similar to the source 200 described in relation to Figure 2A and the chamber 100 described in relation to Figure 1, the source 600 includes many common components, such as a chamber 601, a high-voltage region 604, a ground region 606, an insulating region 608, a plasma confinement region 610, a port 614 for passing EUV radiation 612, an inner core 616, an outer core 618, a current-blocking core 620, and a pump 622. The mirror 602 reflects back at least some of the emitted EUV radiation 624 from the plasma generation region 610 toward the front of the chamber so as to copropage with the EUV radiation 612 from the front. In some configurations, the mirror 602 is formed in a parabolic shape or some other curved shape to focus the reflected light back to the plasma generation region. Mirror 602 may be configured to be highly reflective to EUV radiation 624. In these configurations, mirror 602 can provide a significant improvement in the optical power available from source 600 at port 614. This improvement can be nearly double. In other configurations, mirror 602 is a partially reflective mirror.

[0047]

[0055] The mirror 602 may be constructed in numerous ways, such as by using a multilayer structure of molybdenum and silicon. The mirror 602 may be held and / or positioned by a fixing member 626 attached to the insulating region 608. The fixing member 626 may include a port that transmits EUV radiation 624.

[0048]

[0056] One feature of the high-voltage chamber configuration for the EUV source according to this teaching is that it allows for safe and flexible access to the other end of a Z-pinch plasma source emitting radiation from one end. Another feature of the chamber configuration according to this teaching is that it supports the necessary high-voltage drive protocol, as well as the system components required to generate and sustain the Z-pinch and associated plasma loop using induction coils to drive the plasma current.

[0049]

[0057] It should be understood that the EUV sources described in this instruction can support a wide range of test and measurement capabilities, which may be supplied initially with the source or added at a later point in the system lifecycle. Another advantage of the EUV sources described in this instruction is that they can support highly flexible access to plasma-generated EUV radiation, resulting in many more possible configurations than known EUV systems. In addition, the EUV sources described in this instruction can provide more interaction with and control of the plasma using one or more optical excitations, optical probes, and supply gas management. Furthermore, the EUV sources described in this instruction can support more flexible EUV optical beamforming and management by incorporating various types of optical elements within and / or near the back access area of ​​this configuration.

[0050]

[0058] Those skilled in the art will understand that there are numerous methods for generating ultraviolet light according to this teaching. These methods generally involve supplying a gas to a plasma confinement region in a plasma chamber. Some methods also involve applying the gas to a port located in one or more of various locations, such as adjacent to an insulating region. A high voltage is applied to a high-voltage region connected to the plasma confinement region in the plasma chamber. A grounded region is electrically connected to the high-voltage region. A series of voltage pulses is applied to at least one capacitor electrically connected to an outer magnetic core surrounding an inner magnetic core located around the plasma confinement region. The voltage pulses charge at least one capacitor so that the outer magnetic core saturates, and as a result, the discharging capacitor(s) couple current pulses to the inner core into the plasma confinement region, thereby forming a plasma in a loop sustained between voltage pulses by leakage current. The plasma generates ultraviolet light that propagates through a transparent port located adjacent to the plasma confinement region.

[0051]

[0059] Numerous performance advantages are achieved by providing an insulating region that is grounded and coupled to the ground region to reduce the attraction of ions generated in the plasma loop to the ground region. To reduce the current to the ground region, current is applied to an induction core surrounding a portion of the ground region of the plasma chamber.

[0052]

[0060] In addition, some methods include the step of back-reflecting a portion of the generated ultraviolet light entering the ground region back to the plasma generation region in order to increase the brightness of the ultraviolet light passing through a transparent port located adjacent to the plasma confinement region. Some methods also include the step of passing a portion of the generated ultraviolet light entering the ground region through a transparent port located adjacent to the insulating region. Some methods also include the step of characterizing the generated ultraviolet light that has passed through the transparent port located adjacent to the insulating region. Some methods also pass a diagnostic probe beam through a transparent port located adjacent to the insulating region to the plasma generation region. Some methods measure the properties of the plasma in response to the interaction between the diagnostic probe beam and the plasma. Equivalents

[0061] The applicant's teachings will be described in conjunction with various embodiments, but the applicant's teachings are not intended to be limited to such embodiments. In contrast, the applicant's teachings include various alternative forms, modifications, and equivalents that will be understood by those skilled in the art, which can be made herein without departing from the spirit and scope of the teachings. This specification contains the following provisions: [Clause 1] It is a plasma chamber, a) A plasma generation region that defines the plasma confinement region, b) A port located adjacent to the first side of the plasma generation region, which allows the generated light to pass through and exit the chamber, c) A high-voltage region coupled to the plasma generation region, d) A plasma chamber comprising: a grounding region coupled to the high-voltage region, the grounding region having an outer surface defined to be coupled to ground and dimensionally determined to receive a surrounding induction core. [Clause 2] The plasma chamber according to Clause 1, wherein the width of the high-voltage region is greater than the width of the grounded region. [Clause 3] The plasma chamber according to Clause 1, wherein the width of the high-voltage region is at least twice as large as the width of the grounded region. [Clause 4] The plasma chamber according to Clause 1, wherein the width of the plasma generation region is smaller than the width of the grounding region. [Clause 5] The plasma chamber according to Clause 1, further comprising an insulating region having a first end connected to the grounding region and a second end configured to be connected to the ground potential. [Clause 6] The plasma chamber according to clause 5, wherein the second end of the insulating region is provided with a port. [Clause 7] The plasma chamber according to Clause 6, further comprising a gas supply port located at the port at the second end of the insulating region, wherein the gas supply port supplies gas to the plasma generation region. [Clause 8] The plasma chamber according to Clause 6, wherein the port at the second end of the insulating region comprises a plasma diagnostic port. [Clause 9] The plasma chamber according to Clause 6, wherein the port at the second end of the insulating region comprises an aperture for transmitting light. [Clause 10] The plasma chamber according to Clause 1, further comprising a mirror positioned adjacent to the grounding region, which is oriented to reflect at least some of the light generated in the plasma generation region back to the plasma generation region. [Clause 11] The plasma chamber according to clause 10, wherein the mirror partially transmits some of the light generated in the plasma so that it passes through the port at the second end of the insulating region. [Article 12] The plasma chamber according to Clause 1, further comprising a gas supply port located in close proximity to the plasma generation region. [Clause 13] The plasma chamber according to Clause 1, further comprising a vacuum pump port located in close proximity to the plasma generation region. [Clause 14] a) Plasma chamber, i) A plasma generation region that defines the plasma confinement region, ii) A port located adjacent to the first end of the plasma generation region, which allows the generated light to pass through and exit the chamber, iii) A high-voltage region coupled to the second end of the plasma generation region, iv) A plasma chamber comprising a ground region coupled to the high-voltage region, b) An insulating region having a first end connected to the grounding region and a second end configured to be connected to the ground potential, wherein the insulating region reduces the negative potential adjacent to the grounding region in order to reduce the attraction of ions generated in the plasma generation region. c) An inner induction core positioned around the plasma generation region, which couples the current to the plasma loop. d) an outer guide core positioned around the inner guide core, and e) A light source comprising an induction core positioned around a portion of the grounding area and configured to prevent current from flowing through the grounding area. [Article 15] The light source according to Clause 14, wherein the width of the high-voltage region is greater than the width of the grounding region. [Clause 16] The light source according to Clause 14, wherein the width of the high-voltage region is at least twice as large as the width of the grounding region. [Article 17] The light source according to Clause 14, wherein the width of the plasma generation region is smaller than the width of the grounding region. [Clause 18] The light source according to clause 14, wherein the second end of the insulating region is provided with a port. [Article 19] The light source according to Clause 18, further comprising a gas supply port located at the port at the second end of the insulating region, wherein the gas supply port supplies gas to the plasma generation region. [Clause 20] The light source according to Clause 18, wherein the port at the second end of the insulating region comprises a plasma diagnostic port. [Article 21] The light source according to Clause 18, wherein the port at the second end of the insulating region comprises an aperture for transmitting light. [Article 22] The light source according to Clause 14, further comprising a mirror positioned adjacent to the grounding region, which is oriented to reflect at least a portion of the light generated in the plasma generation region back to the plasma generation region. [Article 23] The light source according to Clause 22, wherein the mirror partially transmits light such that some of the light generated in the plasma passes through the port. [Article 24] The light source according to clause 14, further comprising a gas supply port located in close proximity to the plasma generation region. [Article 25] The light source according to clause 14, further comprising a vacuum pump port located in close proximity to the plasma generation region. [Article 26] A method for generating light, a) The step of supplying a supply gas to the plasma confinement region in the plasma chamber, b) The step of applying a high-voltage pulse to a high-voltage region connected to the plasma confinement region in the plasma chamber, c) The step of grounding the grounding region that is electrically connected to the high-voltage region, d) A step of applying a series of voltage pulses to at least one capacitor electrically connected to an outer magnetic core surrounding an inner magnetic core positioned around the plasma confinement region, wherein the voltage pulses charge the at least one capacitor so that the outer magnetic core saturates, and as a result the at least one capacitor discharges, it couples current pulses to the inner core and the plasma confinement region, thereby forming a plasma in a loop where the plasma is sustained between voltage pulses by leakage current, and the plasma generates light propagating through a transparent port positioned adjacent to the plasma confinement region, e) The step of grounding the insulating region coupled to the grounding region, thereby reducing the attraction of ions generated in the plasma loop to the grounding region, f) A method comprising the step of applying a current to an induction core surrounding a portion of the grounded area of ​​the plasma chamber, thereby reducing the current to the grounded area. [Article 27] The method according to clause 26, further comprising the step of back-reflecting a portion of the generated light entering the grounding region and returning it to the plasma generation region in order to increase the brightness of the light passing through a transparent port positioned adjacent to the plasma confinement region. [Article 28] The method according to clause 26, further comprising the step of passing a portion of the generated light that enters the grounding area through a transparent port located adjacent to the insulating area. [Article 29] The method according to clause 28, further comprising the step of characterizing the generated light that has passed through the transparent port located adjacent to the insulating region. [Clause 30] The method according to clause 26, further comprising the step of passing a diagnostic probe beam through a transparent port positioned adjacent to the insulating region to the plasma generating region. [Article 31] The method according to clause 30, further comprising the step of measuring the properties of the plasma in response to the interaction between the diagnostic probe beam and the plasma. [Article 32] The method according to clause 26, further comprising the step of applying a gas to a port located adjacent to the insulating region.

Claims

1. A plasma chamber for a light source, a) A plasma generation region that defines the plasma confinement region, b) A port located adjacent to the first side of the plasma generation region, which allows the generated light to pass through and exit the plasma chamber, c) A current-preventing induction core located at the boundary between a high-voltage region positioned around a portion of the plasma chamber and electrically connected to the plasma generation region, and a ground region of the plasma chamber electrically connected to the ground potential. Plasma chamber.

2. The plasma chamber according to claim 1, wherein the width of the high-voltage region is greater than the width of the grounded region.

3. The plasma chamber according to claim 1, wherein the width of the high-voltage region is at least twice as large as the width of the grounded region.

4. The plasma chamber according to claim 1, wherein the width of the plasma generation region is smaller than the width of the grounding region.

5. The plasma chamber according to claim 1, further comprising an insulating region electrically connected to the grounding region.

6. The plasma chamber according to claim 5, wherein the end of the insulating region is provided with a port.

7. The plasma chamber according to claim 6, further comprising a gas supply port located at the port at the end of the insulating region, wherein the gas supply port supplies gas to the plasma generation region.

8. The plasma chamber according to claim 6, wherein the port at the end of the insulating region comprises a plasma diagnostic port.

9. The plasma chamber according to claim 6, wherein the port at the end of the insulating region is provided with an aperture for transmitting light.

10. The plasma chamber according to claim 1, further comprising a mirror positioned adjacent to the ground area, which is oriented to reflect at least a portion of the light generated in the plasma generation area back to the plasma generation area.

11. The plasma chamber according to claim 10, wherein the mirror is partially transparent.

12. The plasma chamber according to claim 1, further comprising a gas supply port located in close proximity to the plasma generation region.

13. The plasma chamber according to claim 1, further comprising a vacuum pump port located in close proximity to the plasma generation region.

14. a) A plasma chamber, i) A plasma generation region that defines the plasma confinement region, ii) A port located adjacent to the plasma generation region that allows the generated light to pass through and exit the plasma chamber, iii) A high-voltage region coupled to the plasma generation region, iv) A plasma chamber comprising a ground region coupled to the high-voltage region, b) An inner induction core positioned around the plasma generation region, which couples the current to the plasma loop. c) An outer guide core positioned around the inner guide core, and d) A light source comprising an induction core positioned around a portion of the grounding region and configured to prevent current from flowing through the grounding region.

15. The light source according to claim 14, further comprising an insulating region having a first end connected to the grounding region and a second end electrically connected to the ground potential, wherein the insulating region reduces the negative potential adjacent to the grounding region in order to reduce the attraction of ions generated in the plasma generation region.

16. The light source according to claim 15, wherein the second end of the insulating region is provided with a port.

17. The light source according to claim 16, further comprising a gas supply port located at the port at the second end of the insulating region, wherein the gas supply port supplies gas to the plasma generation region.

18. The light source according to claim 16, wherein the port at the second end of the insulating region comprises a plasma diagnostic port.

19. The light source according to claim 16, wherein the port at the second end of the insulating region is provided with an aperture for transmitting light.

20. The light source according to claim 14, wherein the width of the high-voltage region is greater than the width of the grounded region.

21. The light source according to claim 14, wherein the width of the high-voltage region is at least twice as large as the width of the grounded region.

22. The light source according to claim 14, wherein the width of the plasma generation region is smaller than the width of the grounding region.

23. The light source according to claim 14, further comprising a mirror positioned adjacent to the grounding region, which is oriented to reflect at least a portion of the light generated in the plasma generation region back to the plasma generation region.

24. The light source according to claim 23, wherein the mirror is partially transparent so that some of the light generated in the plasma passes through the port.

25. The light source according to claim 14, further comprising a gas supply port positioned in close proximity to the plasma generation region.

26. The light source according to claim 14, further comprising a vacuum pump port positioned in close proximity to the plasma generation region.

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