Axial-cooled metal showerhead for high-temperature processes
The axial cooling and thermal management of the showerhead reduce thermal gradients and maintain a lower temperature, improving process efficiency and throughput in high-temperature applications.
JP2026113595APending Publication Date: 2026-07-07LAM RES CORP
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- LAM RES CORP
- Filing Date
- 2026-04-02
- Publication Date
- 2026-07-07
AI Technical Summary
Technical Problem
Metal showerheads used in high-temperature processes, such as thermal ALD, experience significant thermal gradients due to heat flow from the pedestal, leading to substrate temperature variations and potential damage from thermal coupling.
Method used
The showerhead design incorporates axial cooling through vertical walls and a cooling plate to manage heat flow, combined with a heater coil and thermal choke, reducing radial temperature gradients and maintaining the showerhead at a lower temperature.
Benefits of technology
This design maintains the showerhead at a cooler temperature, protecting corrosion-resistant coatings and reducing precursor consumption, while allowing for a smaller gap with the pedestal, enhancing process efficiency and throughput.
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Smart Images
Figure 2026113595000001_ABST
Abstract
We provide a metal showerhead that is cooled axially for high-temperature processes. [Solution] In the substrate processing system, the base portion 402 of the shower head 400 is made of a first metal material and has a first surface including a gas inlet and a second surface, and includes a plurality of passages that communicate fluid with the gas inlet. The face plate 404 is made of a second metal material and has sides attached to the second surface, and includes a bottom surface that defines a plenum together with the second surface, a vertical wall 416 that extends upward from the bottom surface through the plenum 405 and contacts the second surface, and an outlet arranged along the vertical wall. The heater coil 422 is disposed in a groove 411 along the perimeter of the base portion. The cooling plate 420 is placed on the first surface and includes a conduit 424 for a coolant. Plates 430, 432 are made of a third material having a lower thermal conductivity than the first and second metal materials and are placed between the cooling plate and the base portion.
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