Probe card

Abstract

The present invention provides a probe that suppresses short circuits and plastic deformation between adjacent probes. [Solution] The probe comprises first and second tip portions and a body portion connecting the first tip portion and the second tip portion. The body portion comprises a first end connected to the first tip portion, a second end connected to the second tip portion, columnar first and second arms arranged in parallel and spaced apart from each other between the first and second ends, and a separating component interposed between the first and second arms.

Description

Technical Field

[0001] The present invention relates to a probe used for inspecting the electrical characteristics of a test object.

Background Art

[0002] In order to inspect the electrical characteristics of a test object such as a semiconductor integrated circuit without separating it from the wafer, a probe that contacts the test object is used. In the inspection using the probe, a method of applying a load to the probe so that the probe that contacts the test object elastically deforms may be used. By the elastic deformation of the probe, the contact between the test object and the probe can be ensured by the elastic force of the probe. In order to adjust the pressing of the probe that contacts the test object, a probe having a structure in which a plurality of columnar arms are arranged in parallel has been studied (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, when a probe having a configuration in which a plurality of arms are arranged in parallel is brought into contact with a test object and a load is applied to the probe, the interval between the arms widens or narrows. For this reason, a short circuit occurs between adjacent probes, or plastic deformation of the probe occurs due to bending of the arms.

[0005] An object of the present invention is to provide a probe that suppresses short circuits and plastic deformation between adjacent probes.

Means for Solving the Problems

[0006] According to one aspect of the present invention, a probe is provided comprising first and second tip portions and a body portion connecting the first tip portion and the second tip portion. The body portion comprises a first end connected to the first tip portion, a second end connected to the second tip portion, columnar first and second arms arranged in parallel and spaced apart from each other between the first and second ends, and a separating component interposed between the first and second arms. [Effects of the Invention]

[0007] According to the present invention, it is possible to provide a probe that suppresses short circuits and plastic deformation between adjacent probes. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a schematic diagram showing the configuration of a probe according to the first embodiment of the present invention. [Figure 2] Figure 2 is a schematic diagram showing the configuration of a probe card having a probe according to the first embodiment of the present invention. [Figure 3A] Figure 3A is a schematic diagram showing another configuration of the probe according to the first embodiment of the present invention. [Figure 3B] Figure 3B is a schematic diagram showing yet another configuration of the probe according to the first embodiment of the present invention. [Figure 4] Figure 4 is a schematic diagram showing the configuration of a probe according to a modified example of the first embodiment of the present invention. [Figure 5] Figure 5 is a schematic diagram showing the configuration of a probe according to another modification of the first embodiment of the present invention. [Figure 6] Figure 6 is a schematic diagram showing the configuration of a probe according to a second embodiment of the present invention. [Figure 7] Figure 7 is a schematic diagram showing the probe shown in Figure 6 with a load applied to it. [Figure 8] Figure 8 is a schematic diagram showing another example of a probe separation component according to a second embodiment of the present invention. [Figure 9] Figure 9 is a schematic diagram showing the configuration of a probe according to a modified example of the second embodiment of the present invention. [Figure 10] FIG. 10 is a schematic diagram showing another configuration of a probe according to a modified example of the second embodiment of the present invention. [Figure 11] FIG. 11 is a schematic diagram showing still another configuration of a probe according to a modified example of the second embodiment of the present invention. [Figure 12] FIG. 12 is a schematic diagram showing a probe according to another embodiment of the present invention. [Figure 13A] FIG. 13A is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13B] FIG. 13B is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13C] FIG. 13C is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13D] FIG. 13D is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13E] FIG. 13E is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13F] FIG. 13F is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13G] FIG. 13G is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13H] FIG. 13H is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13I] FIG. 13I is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention. [Figure 13J] FIG. 13J is a schematic diagram showing an example of a pair of beam portions of a probe according to another embodiment of the present invention.

MODE FOR CARRYING OUT THE INVENTION

[0009] Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the ratios of the thicknesses of each part are different from the actual ones. Also, it is natural that there are parts where the dimensional relationships and ratios are different between the drawings. The embodiments shown below illustrate devices and methods for embodying the technical idea of this invention, and the embodiments of this invention do not specify the materials, shapes, structures, arrangements, and manufacturing methods of the components as follows.

[0010] (First Embodiment) The probe 10 according to the embodiment shown in FIG. 1 is used for inspecting the electrical characteristics of a test object. The probe 10 includes a first tip 11 and a second tip 12, and a body portion 20 that connects the first tip 11 and the second tip 12. The body portion 20 has a first end 201 connected to the first tip 11, a second end 202 connected to the second tip 12, and columnar first and second arms 21 and 22 that are spaced apart from each other and arranged in parallel between the first end 201 and the second end 202. Further, the body portion 20 includes at least one separation component 30 interposed between the first arm 21 and the second arm 22 so as to hold a space between the first arm 21 and the second arm 22. The separation component 30 of the probe 10 shown in FIG. 1 bridges between the first arm 21 and the second arm 22.

[0011] In FIG. 1, the boundaries between the first tip 11, the second tip 12, and the body portion 20 are clearly shown, but the first tip 11, the second tip 12, and the body portion 20 may be integrally formed. For example, the probe 10 may be manufactured using photolithography technology. That is, a mask pattern may be formed on the surface of one material, and the probe 10 in which the first tip 11, the second tip 12, and the body portion 20 are integrated may be manufactured by etching using this mask pattern as an etching mask.

[0012] In the following, the first arm 21 and the second arm 22 will be collectively referred to as "arms." The separating component 30 that bridges the gap between the first arm 21 and the second arm 22 will also be referred to as the "bridging section." The bridging section is continuous between the first arm 21 and the second arm 22.

[0013] In the probe 10 shown in Figure 1, multiple spaced-out components 30 are arranged spaced apart from each other along the axial direction of the body 20. Hereafter, the axial direction of the body 20 will be simply referred to as the "axial direction." The direction in which the first arm 21 and the second arm 22 are arranged will be referred to as the "width direction." Furthermore, the direction perpendicular to the axial direction and the width direction will be referred to as the "thickness direction." In Figure 1, the axial direction is shown as the X-axis direction, the width direction as the Y-axis direction, and the thickness direction as the Z-axis direction (the same applies below).

[0014] The separation component 30 of the probe 10 shown in Figure 1 has a V-shape when viewed from the thickness direction. In other words, the part of the separation component 30 that connects to the arm is connected to the arm at an angle with respect to the axial direction.

[0015] Below, to explain the function of probe 10, we will describe the probe card, which includes the probe head that holds probe 10.

[0016] Figure 2 shows a probe card 1 equipped with probes 10. The probe card 1 is used to test the characteristics of an object under test 2. The object under test 2 is, for example, a semiconductor integrated circuit formed on a semiconductor substrate. The probe card 1 includes a probe head 200 that holds the probes 10 with a first tip 11 facing the object under test 2, and a wiring board 300. The number of probes 10 held by the probe head 200 can be arbitrarily set according to the number of terminals of the object under test 2 or the number of objects under test 2 to be tested simultaneously.

[0017] The second tip 12 of the probe 10 is connected to a land 310 placed on the wiring board 300. The land 310 is made of a conductive material such as metal, and the land 310 is electrically connected to an inspection device such as a tester (not shown). An electrical signal is propagated between the inspection device and the object under test 2 via the probe card 1. The wiring board 300 is, for example, a printed circuit board (PCB) or an interposer (IP) board. The probe 10, through which the electrical signal is propagated, is made of a highly conductive material such as metal.

[0018] The probe head 200 has a plurality of guide plates, each having a through hole (hereinafter also referred to as a "guide hole") through which the probe 10 passes. The probe head 200 shown in Figure 2 has a bottom guide plate 210 facing the object to be inspected 2, a top guide plate 220 facing the wiring board 300, and an MGC guide plate 230 positioned between the bottom guide plate 210 and the top guide plate 220. The MGC guide plate 230 is positioned close to the bottom guide plate 210. By placing a spacer 240 between the outer edge region of the bottom guide plate 210 and the outer edge region of the top guide plate 220, a hollow region 250 is formed between the top guide plate 220 and the MGC guide plate 230 inside the probe head 200. The material of the probe head 200 is, for example, ceramic.

[0019] When viewed from the direction normal to the surface of the main surface of the guide plate where the guide hole opening is formed, the position of the guide hole in the top guide plate 220, through which the same probe 10 penetrates, and the position of the guide holes in the bottom guide plate 210 and MGC guide plate 230 are offset in a direction parallel to the main surface. Due to this arrangement of guide holes (offset arrangement), the probe 10 bends due to elastic deformation in the hollow region 250. As a result, when the probe 10 comes into contact with the object to be inspected 2, it buckles, and the probe 10 comes into contact with the object to be inspected 2 with a predetermined pressure.

[0020] The probe card 1 shown in Figure 2 is a vertical-movement probe card, in which the probe card 1 and the object under inspection 2 move relative to each other along the X-axis, and the first tip 11 of the probe 10 comes into contact with the object under inspection 2. Figure 2 shows the state in which the probe 10 is not in contact with the object under inspection 2. Note that although Figure 2 shows the case where the curvature of the body portion 20 is in the width direction, the curvature of the body portion 20 may also be in the thickness direction.

[0021] With a probe 10 having a separation component 30 interposed between the first arm 21 and the second arm 22, even when the probe 10 is bent, it is possible to prevent the distance between the first arm 21 and the second arm 22 from becoming too wide or too narrow.

[0022] For example, the gap between the first arm 21 and the second arm 22 is widened, preventing the probes 10 from coming into contact with each other within the probe head 200. Furthermore, contact between the probe 10 and the inner wall surface of the guide hole in the guide plate, caused by the widened gap between the first arm 21 and the second arm 22, can be prevented. Therefore, damage to the probe 10 and the guide plate due to contact between the probe 10 and the guide plate can be suppressed.

[0023] On the other hand, if the distance between the first arm 21 and the second arm 22 becomes too narrow, the body portion 20 may undergo plastic deformation, potentially causing the probe 10 to lose its elasticity. However, in a probe 10 that maintains space between the first arm 21 and the second arm 22 using the separating component 30, plastic deformation of the body portion 20 can be suppressed.

[0024] Furthermore, by positioning the separation component 30 between the first arm 21 and the second arm 22, the load on the curved probe 10 can be concentrated at the connection point between the separation component 30 and the arm, thereby further increasing the elasticity of the probe 10. The needle pressure of the probe 10 in contact with the object being inspected can be adjusted by setting the number and spacing of the separation components 30.

[0025] The number and spacing of the separation components 30 can be set arbitrarily. The more separation components 30 there are, the more space there is between the first arm 21 and the second arm 22, allowing the tracking force of the probe 10 to be lowered. On the other hand, by reducing the number of separation components 30, the tracking force of the probe 10 can be increased. The spacing of the separation components 30 may be equal, or there may be a mixture of areas with narrow spacing and areas with wide spacing.

[0026] For example, in the probe 10 shown in Figure 3A, the spacing between the separating parts 30 is widened in the curved portion of the body 20 to lower the tracking force. In contrast, in the probe 10 shown in Figure 3B, the tracking force is increased by eliminating the space between the first arm 21 and the second arm 22 in the curved portion of the body 20. In this way, the tracking force of the probe 10 can be adjusted by setting the space between the separating parts 30.

[0027] Furthermore, because the separation component 30 does not widen the gap between the first arm 21 and the second arm 22, it is easy to insert the probe 10 into the through hole of the guide plate when attaching the probe 10 to the probe head 200.

[0028] <Variation> In the modified probe 10 shown in Figure 4, rectangular separation components 30 are arranged perpendicular to the axial direction when viewed from a direction perpendicular to the width direction. Therefore, the shape of the space between the first arm 21 and the second arm 22 between the separation components 30 is rectangular. Thus, the shape of the separation components 30 is not limited to a V-shape.

[0029] In the modified probe 10 shown in Figure 5, the separating component 30 is V-shaped, and the connection points of the separating component 30 with the first arm 21 and the second arm 22 are rounded. If the corners of the separating component 30 are sharp, stress will concentrate at the corners of the separating component 30, making the probe 10 prone to breakage. By rounding the corners of the connection points between the separating component 30 and the arms, the stress at the connection points, which tend to concentrate, can be distributed. Therefore, the probe 10 shown in Figure 5 can suppress probe breakage.

[0030] (Second Embodiment) The probe 10 according to the second embodiment shown in Figure 6 has a pair of beam sections 30a that are not continuous between the first arm 21 and the second arm 22 as a separating component 30. The pair of beam sections 30a has a first beam section 301 and a second beam section 302. The first beam section 301 is a cantilever beam structure in which one end is connected to the first arm 21 and the other end is a free end. The second beam section 302 is a cantilever beam structure in which one end is connected to the second arm 22 and the other end is a free end. When no axial load is applied to the probe 10 (hereinafter also referred to as the "unloaded state"), the free end of the first beam section 301 and the free end of the second beam section 302 are close together.

[0031] The other configurations of the probe 10 shown in Figure 6 are the same as those of the probe 10 according to the first embodiment. Although Figure 6 shows a case where multiple pairs of beam sections 30a are arranged on the body section 20, there may be only one pair of beam sections 30a.

[0032] As shown in Figure 6, when inspecting the object under inspection, the probe 10 is positioned inside the through-hole of the support substrate 400. In the probe 10 having a pair of beam sections 30a as a separating component 30, as will be described later, when a load is applied between the first tip section 11 and the second tip section 12 and the body section 20 is curved, the first arm 21 and the second arm 22 are connected via the separating component 30.

[0033] In the probe 10 shown in Figure 6, multiple pairs of beam sections 30a are arranged spaced apart from each other along the axial direction. When the fuselage section 20 is curved, at least one of the multiple pairs of beam sections 30a interposes between the first arm 21 and the second arm 22 as a separating component 30, where the free end of the first beam section 301 and the free end of the second beam section 302 are in contact. As a result, a space is formed between the first arm 21 and the second arm 22 in the axially curved fuselage section 20.

[0034] Figure 6 shows the unloaded state where no load is applied between the first tip 11 and the second tip 12, and the body 20 is not curved. In this unloaded state, the beam pair 30a is not continuous between the first arm 21 and the second arm.

[0035] Figure 7 shows the probe 10 in contact with the object to be inspected (not shown) and an axial load applied between the first tip 11 and the second tip 12. When an axial load is applied, the body 20 becomes curved (hereinafter also referred to as the "curved state").

[0036] In the curved state, as shown in Figure 7, a portion of the body 20 widens in the width direction between the first arm 21 and the second arm 22. When the widened portion of the body 20 comes into contact with the inner wall surface of the through hole in the support base plate 400, it does not widen any further in the width direction. As a result, a load is applied to the portion of the body 20 that is not in contact with the inner wall surface of the through hole, causing a portion of the space between the first arm 21 and the second arm 22 to narrow in the width direction.

[0037] In this case, in the probe 10 which has a pair of beam sections 30a as a separating component 30, the first arm 21 and the second arm 22 are connected via the separating component 30. That is, the first arm 21 and the second arm 22 approach each other so that the free ends of the first beam section 301 and the second beam section 302 are connected, and the pair of beam sections 30a bridges the space between the first arm 21 and the second arm 22. The pair of beam sections 30a is positioned such that the load is concentrated on the separating component 30 when the first beam section 301 and the second beam section 302 are connected. In this way, the pair of beam sections 30a is positioned so that a space is created between the first arm 21 and the second arm 22 when the probe is curved. Therefore, the probe 10 can prevent the body section 20 from undergoing plastic deformation.

[0038] As shown in Figure 6, the multiple separation components 30 of the fuselage section 20 may be composed solely of beam pairs 30a. Alternatively, as shown in Figure 8, beam pairs 30a and separation components 30 of the bridge section may be mixed and arranged along the axial direction of the fuselage section 20.

[0039] Otherwise, the probe 10 according to the second embodiment is substantially the same as that of the first embodiment, and redundant descriptions are omitted.

[0040] <Variation> As shown in Figures 9 and 10, the separating component 30 may be a cantilever beam structure in which a fixed end is connected to one of the first arm 21 and the second arm, and a free end is close to the other of the first arm 21 and the second arm 22. Figure 9 shows a cantilever beam structure in which the separating component 30 has a fixed end connected to the first arm 21 and a free end close to the second arm 22. Figure 10 shows a cantilever beam structure in which the separating component 30 has a fixed end connected to the second arm 22 and a free end close to the second arm 22. As shown in Figure 11, separating components 30 with fixed ends connected to the first arm 21 and separating components 30 with fixed ends connected to the second arm 22 may be mixed and arranged along the axial direction of the body 20. It is easy to bring the free end of the separating component 30 into contact with an arm with a large surface area.

[0041] (Other embodiments) Although the present invention has been described above by embodiments, the descriptions and drawings that constitute part of this disclosure should not be understood as limiting the invention. Various alternative embodiments, examples, and operational techniques will become apparent to those skilled in the art from this disclosure.

[0042] For example, although the above description shows a fuselage 20 having multiple separating parts 30, the fuselage 20 may have only one separating part 30. Also, although the description of the probe 10 having two arms in the fuselage 20 was made, the probe 10 may have three or more arms.

[0043] Alternatively, as shown in Figure 12, the separating parts 30 of different shapes may be arranged along the axial direction.

[0044] Furthermore, when the probe 10 has a pair of beam sections 30a as a separating component 30, various shapes can be adopted for the pair of beam sections 30a, for example, as shown in Figures 13A to 13J. Figures 13A to 13J show the shapes of the first beam section 301 and the second beam section 302 that constitute the pair of beam sections 30a when viewed from the Z-axis direction (hereinafter referred to as "plan view") (hereinafter also referred to as "beam section shape").

[0045] As shown in Figure 13A, the beam shape may be rectangular. Alternatively, as shown in Figure 13B, the beam shape may be a frame shape with a rectangular outer shape and an internal space.

[0046] As shown in Figures 13C to 13F, the beam shape may be one in which a connecting portion and a tip portion with different widths in the X-axis direction are connected in the Y-axis direction. The "connecting portion" is the part where the first beam portion 301 and the second beam portion 302 connect to the arm, and the "tip portion" is the part connected to the connecting portion and spaced apart from the arm. In the beam shapes shown in Figures 13C to 13E, the width of the connecting portion in the X-axis direction is wider than that of the tip portion. In the beam shape shown in Figure 13C, the tip portion is connected to the center of the connecting portion in the X-axis direction in a plan view. In the beam shapes shown in Figures 13D and 13E, the tip portion is connected to the end of the connecting portion in the X-axis direction in a plan view. In the beam shape shown in Figure 13F, the width of the tip portion in the X-axis direction is wider than that of the connecting portion.

[0047] As shown in Figure 13G, the tip portion may be semicircular. Alternatively, as shown in Figure 13H, the beam portion may be a frame shape with a semicircular outer shape and an empty interior. Furthermore, as shown in Figure 13I, the beam portion may be triangular, gradually tapering in the Y-axis direction from the portion connected to the arm. Alternatively, as shown in Figure 13J, the beam portion may be a frame shape with a triangular outer shape and an empty interior.

[0048] Thus, the present invention naturally includes various embodiments not described herein. [Explanation of Symbols]

[0049] 10…Probe 11...First tip 12...Second tip 20... Torso 21...First Arm 22... Second Arm 30... Separation parts 30a... Beam section pair 201…1st end 202…Second end 301...First beam part 302…Second beam part

Claims

1. A probe used for testing the electrical characteristics of an object under test, First and second tip portions, A body portion connecting the first tip portion and the second tip portion Equipped with, The aforementioned torso section, A first end connected to the first tip, A second end connected to the second tip, The first and second columnar arms are arranged in parallel, spaced apart from each other, between the first and second ends, At least one separation component interposed between the first arm and the second arm and Equipped with, probe.

2. The probe according to claim 1, wherein the separating component bridges the gap between the first arm and the second arm.

3. The probe according to claim 2, wherein a plurality of the separating components are arranged to be spaced apart from each other along the axial direction of the body portion.

4. The separating component is not continuous between the first arm and the second arm in a no-load state where no load is applied between the first tip and the second tip. The probe according to claim 1, wherein, when a load is applied between the first tip and the second tip and the body is curved, the first arm and the second arm are connected via the separating component.

5. The aforementioned separation component is A first beam portion having one end connected to the first arm and the other end being a free end, A second beam section, one end of which is connected to the second arm and the other end of which is a free end, It has, The probe according to claim 4, wherein, in the unloaded state, the free end of the first beam and the free end of the second beam are in close proximity.

6. The probe according to claim 4, wherein the separating component has a cantilever beam structure in which a fixed end is connected to one of the first arm and the second arm and a free end is close to the other of the first arm and the second arm.

7. The probe according to any one of claims 4 to 6, wherein a plurality of the separating components are arranged spaced apart from each other along the axial direction of the fuselage, and in a curved state, at least one of the plurality of separating components is interposed between the first arm and the second arm such that a space is formed between the first arm and the second arm.

8. The probe according to any one of claims 1 to 7, wherein the separating component is V-shaped when viewed from a direction perpendicular to the direction in which the first arm and the second arm are parallel.

9. The probe according to claim 8, wherein the connection points of the separating component with the first arm and the second arm are rounded off.

10. The probe according to any one of claims 1 to 7, wherein the separating component is rectangular when viewed from a direction perpendicular to the direction in which the first arm and the second arm are parallel.

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