Purge equipment and storage shelves

Abstract

The present invention provides a purging device and storage rack that allow for easy attachment of an elastic cylindrical member to a nozzle. [Solution] The purging device 20 comprises a supply pipe section 23, an air supply nozzle 30 having a nozzle base section 31 and a cylindrical nozzle body section 32, and an elastic cylindrical member 40 fitted to the outer circumference of the nozzle body section 32 and protruding above the tip 32a of the nozzle body section 32. The nozzle body section 32 includes a base cylindrical section 36 and an enlarged diameter section 37 having an outer diameter larger than that of the base cylindrical section 36. The base end 42 of the cylindrical member 40 is in close contact with at least one of the outer circumferential surfaces of the base cylindrical section 36 and the enlarged diameter section 37.

Description

Technical Field

[0001] The present disclosure relates to a purging device and a storage shelf.

Background Art

[0002] As described in Patent Document 1, a gas purging unit that blows a purifying gas into the inside of a purging target container through an air supply port of the purging target container is known. This unit includes an air supply nozzle, a cylindrical member having a base end fixed to the air supply nozzle and being elastically deformable, and a contact member provided at the tip of the cylindrical member. The contact member contacts the lower surface of the air supply port and adheres to the lower surface over the entire circumference.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above-described conventional unit, the base end of the cylinder body (cylindrical member) is embedded and fixed to the upper end of the air supply nozzle. In order to embed the base end of the cylinder body in the upper end of the air supply nozzle, it is necessary to previously form, for example, a cylindrical groove or the like in the upper end.

[0005] The present disclosure describes a purging device and a storage shelf in which a cylindrical member having elasticity can be easily attached to a nozzle.

Means for Solving the Problems

[0006] [1] One aspect of the present disclosure is a purging device for supplying purge gas into a container through an air supply port formed on the bottom surface of the container to be purged, comprising: an air supply nozzle having a supply pipe for supplying purge gas; a nozzle base connected to the supply pipe; and a cylindrical nozzle body protruding upward from the nozzle base and having a gas flow path formed therein along a central axis; and an elastic cylindrical member fitted to the outer circumference of the nozzle body and protruding upward from the tip of the nozzle body, wherein the nozzle body includes a base cylindrical portion extending along a central axis and an enlarged diameter portion having an outer diameter larger than that of the base cylindrical portion or a concave portion having an outer diameter smaller than that of the base cylindrical portion, and a space larger than the outer diameter of the base end of the cylindrical member is provided around the nozzle body, and the base end of the cylindrical member is in close contact with at least one of the outer surfaces of the base cylindrical portion and the enlarged diameter portion or the concave portion.

[0007] [1] In the purging device, a cylindrical member is fitted onto the outer circumference of the nozzle body. Since the cylindrical member is elastic, the tip of the cylindrical member that protrudes upward can be deformed according to the orientation of the container. Therefore, the air supply nozzle and the air supply port are connected in an airtight manner, and purge gas can be supplied from the air supply nozzle to the air supply port at a predetermined pressure. The cylindrical member has excellent sealing properties because it is elastic. When fitting the cylindrical member onto the nozzle body, the space provided around the nozzle body makes it easy to align the nozzle body and the cylindrical member. This makes the installation of the cylindrical member easy. Furthermore, the nozzle body is not a simple cylinder with a constant outer diameter, but includes an enlarged diameter section or a concave section. Since the base end of the cylindrical member fits into the nozzle body with such a concave shape, the cylindrical member is securely and firmly installed.

[0008] [2] In the purging device described in [1] above, the nozzle body includes an enlarged diameter portion formed at the tip of the base cylinder portion, and the base end of the cylindrical member may include a bottom cylinder portion having an inner diameter that fits the outer surface of the base cylinder portion and an upper cylinder portion having an inner diameter that fits the outer surface of the enlarged diameter portion. With this configuration, the base cylinder portion at the base is constricted relative to the enlarged diameter portion. The bottom cylinder portion fits into the base cylinder portion, and the enlarged diameter portion fits into the upper cylinder portion. Therefore, the stability of the mounting of the cylindrical member is improved. The cylindrical member is less likely to come off even when external force is applied.

[0009] [3] In the purging device described in [1] or [2] above, the cylindrical member has a tip portion formed continuously with the base end and protruding above the tip of the nozzle body, and the tip portion may have a bellows-like shape in which annular convex portions and annular concave portions are formed alternately in the vertical direction. The bellows-like tip portion is easily compressed in the vertical direction and easily adheres to the air supply port. Furthermore, the sealing characteristics are improved.

[0010] [4] In any one of the purging devices described in [1] to [3] above, the cylindrical member may have a tip portion formed continuously with the base end and protruding above the tip of the nozzle body, and a contact member may be attached to the tip portion, which includes a flat contact surface extending perpendicular to the central axis and covering the tip portion, and a through hole formed along the central axis and opening to the contact surface. With this configuration, even if a part of the bottom surface of the container (for example, a misaligned air supply port) comes into contact with the flat contact surface of the contact member, the position of the part does not become fixed and is easily movable. When the position of the container is guided by a positioning pin or the like, the contact of the part does not cause any problems and smooth guidance is achieved.

[0011] [5] In the purging device described in [4] above, the frictional resistance at the contact surface of the contact member may be less than the frictional resistance at the tip of the cylindrical member. With this configuration, a part of the bottom surface of the container described above is prone to sliding on the contact surface of the contact member.

[0012] [6] In another aspect of the present disclosure, a storage rack may be provided comprising any one of the purge devices described in [1] to [5] above, and a shelf having an opening through which at least a cylindrical member of the purge device is inserted. In the storage rack, a plurality of positioning pins are erected on the upper surface of the shelf, and when a container is supported by the positioning pins, the cylindrical member is compressed in the vertical direction. With this storage rack, the horizontal and vertical positions of the container can be maintained by the positioning pins. In addition, because the cylindrical member is compressed, the sealing characteristics with respect to the air supply port are excellent, and leakage of purge gas is less likely to occur. [Effects of the Invention]

[0013] According to this disclosure, a cylindrical member can be easily attached to the nozzle body. [Brief explanation of the drawing]

[0014] [Figure 1] Figure 1 shows the overall configuration of a storage shelf equipped with a purging device according to one embodiment of the present disclosure. [Figure 2] Figure 2 is a perspective view showing the purging device and storage racks, and the overhead transport vehicle. [Figure 3] Figure 3 is a magnified perspective view of the shelf portion of a storage rack. [Figure 4] Figure 4 is a bottom view of the container. [Figure 5] Figure 5 is a plan view showing the supply pipe section and a pair of air supply nozzles of the purge device. [Figure 6] Figure 6(a) is a plan view of the air supply nozzle, and Figure 6(b) is a cross-sectional view along the VIB-VIB line in Figure 6(a). [Figure 7] Figure 7 is an exploded cross-sectional view of the shelf and air supply nozzle. [Figure 8] Figure 8 is a cross-sectional view showing the container supported by positioning pins and the air supply nozzle and air supply port connected. [Figure 9] Figure 9 shows an example of lateral transfer of containers using an overhead transport vehicle. [Figure 10]FIG. 10 is a side view of a state in which a container is supported by a positioning pin and an air supply nozzle and an air supply port are connected, as viewed from the side of the container. [Figure 11] FIG. 11 is a side view showing a purge stocker provided with a purge device according to a modified form of the present disclosure. MODE FOR CARRYING OUT THE INVENTION

[0015] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the description of the drawings, the same reference numerals are assigned to the same elements, and duplicate descriptions are omitted. The terms "X direction", "Y direction" and "Z direction" are based on the directions shown in the drawings and are for convenience.

[0016] As shown in FIGS. 1 and 2, the storage shelf 1 is arranged, for example, along a track 5 of an overhead carrier 3 that constitutes a semiconductor transfer system S in a semiconductor manufacturing factory. The storage shelf 1 temporarily stores a container F such as a FOUP or a reticle pod. The storage shelf 1 is an overhead buffer (OHB). The storage shelf 1 may be a side track buffer (STB) arranged on the side of the track 5. The storage shelf 1 is configured to purge the inside of the container F with a purge gas (fluid) such as nitrogen.

[0017] As shown in FIG. 1, the semiconductor transfer system S includes a plurality of storage shelves 1 suspended from a ceiling 100, a distribution board 2 that supplies power to the storage shelves 1 via a power supply wiring 6, a monitoring stand 4 that monitors the oxygen concentration in the factory, and a gas supply pipe 8 laid on the ceiling 100 that supplies a purge gas to each storage shelf 1. A purge gas adjusted to a desired pressure is supplied to the gas supply pipe 8. The distribution board 2 and the monitoring stand 4 are installed, for example, on the floor 9. The distribution board 2 may be provided with an emergency stop button 2a for stopping the supply of the purge gas to the storage shelf 1 in an emergency or the like. Further, the monitoring stand 4 is provided with an oxygen concentration sensor 4a. The monitoring stand 4 may be provided with an emergency stop button 4b for stopping the supply of the purge gas when the oxygen concentration decreases or the like.

[0018] As shown in Figures 1 and 2, each storage rack 1 comprises, for example, two base frames 10, 10 suspended from the ceiling 100, and two beam members 14, 14 spanning between the two base frames 10, 10. Each base frame 10 has, for example, two suspension parts 11 suspended from the ceiling 100 and extending in the vertical Z direction, and one support part 12 spanning across the lower ends of the suspension parts 11 and extending in the horizontal Y direction. The Y direction is perpendicular to the X direction, which is the direction in which the overhead transport vehicle 3 travels, and is also horizontal. The Y direction is also the direction of lateral transfer by the overhead transport vehicle 3 (see Figure 9).

[0019] In each storage rack 1, a flat shelf 15 is mounted on a beam 14. The shelf 15 is a plate member that, for example, is approximately the same size as the bottom surface Fa of the container F (see Figure 4) in a plan view, or slightly smaller than the bottom surface Fa. Notches or openings may be formed in the shelf 15 at positions other than the positioning pins 17 and the opening 15e. The shelf 15 extends horizontally, for example. Three positioning pins 17 are erected on the upper surface 15a of the shelf 15 for positioning the container F. The three positioning pins 17 are positioned at locations corresponding to the vertices of a triangle and are provided to protrude from the shelf 15. The three positioning pins 17 protrude in the Z direction. The three positioning pins 17 support the container F to be purged. The positioning pins 17 are also called kinematic pins.

[0020] The shelf board 15 and positioning pins 17 constitute a plurality (four in Figures 1 and 2) of mounting sections 7 on which the container F is placed. The bottom surface Fa of the container F is provided with grooves Fg (see Figure 4) for receiving the positioning pins 17, for example. The positioning pins 17 are cylindrical in shape with a diameter according to a specified standard and are erected vertically on the upper surface 15a of the shelf board 15. The grooves Fg have a width greater than the diameter of the positioning pins 17. The container F is placed in a predetermined position on the mounting section 7 of the storage shelf 1 by these alignment mechanisms. The mounting section 7 is configured so that the container F can be placed horizontally on it. Specifically, three positioning pins 17 set at the same height position are inserted into three grooves Fg formed at the same height position, depth, and shape on the bottom surface Fa of the container F, and each positioning pin 17 abuts against the bottom wall surface (wall surface formed at the upper end) of the groove Fg. As a result, the container F is supported by the three positioning pins 17 in a horizontal position.

[0021] Next, the storage rack 1 equipped with the purging device 20 of this embodiment will be described in detail. As shown in Figure 2, four purging devices 20 are attached to one storage rack 1. Each purging device 20 comprises the shelf board 15 described above, a plurality of air supply nozzles 30 attached to the lower surface of the shelf board 15, a gas distribution pipe 8a that branches off from the gas supply pipe 8 and is connected to the air supply nozzles 30, and a gas control device 21 provided at the branching point of the gas distribution pipe 8a. Two air supply nozzles 30 are provided on one mounting section 7 (see Figure 5).

[0022] As shown in Figure 1, for example, one gas supply pipe 8 is laid for one storage shelf 1, and four gas distribution pipes 8a branch off from the one gas supply pipe 8, corresponding to four mounting sections 7 (purge devices 20). The gas control device 21 has a rectangular parallelepiped housing and is mounted at an appropriate position on the storage shelf 1. The gas control device 21 includes a flow controller, a control board, a regulator, and solenoid valves, etc. (none of which are shown). One gas control device 21 is responsible for eight air supply nozzles 30. The gas control device 21 detects the presence or absence of containers F in each mounting section 7 of the storage shelf 1. The gas control device 21 controls the gas supply to supply purge gas to the mounting section 7 (container F) that requires purge gas supply, according to the storage status of one or more containers F in the storage shelf 1.

[0023] Next, the purge device 20 will be described in more detail with reference to Figures 2 to 8. The purge device 20 supplies purge gas to the inside of the container F through two air supply ports Fp (see Figure 4) formed on the bottom surface Fa of the container F to be purged. As shown in Figure 4, although this is just one example, two dummy ports Fc and two grooves Fg are formed on the bottom surface Fa of the container F in the area close to the lid Fb (front side). One of the dummy ports Fc may be used as an exhaust port. The remaining dummy port Fc is an unused port, but both dummy ports Fc may also be unused ports. Two air supply ports Fp and one groove Fg are formed on the bottom surface Fa of the container F in the area farther from the lid Fb (rear side). The two air supply ports Fp are aligned in the X direction when the container F is in the correct position and orientation, as shown in Figure 2.

[0024] Each of the two air supply ports Fp has a cylindrical body, also known as a grommet, for example. Each of the air supply ports Fp has a flat bottom surface, for example, that is substantially flush with the bottom surface Fa (see Figure 8). The purging device 20 has two air supply nozzles 30 corresponding to the two air supply ports Fp.

[0025] As shown in Figures 3, 5, 6(a), and 6(b), the purge device 20 is connected to the downstream side of the gas distribution pipe 8a described above and comprises individual distribution pipes 24 provided for each mounting section 7, and two supply pipe sections 23 connected to the downstream side of the individual distribution pipes 24 via branch sections 25. The supply pipe sections 23 are connected to introduction channels 38 provided on the connection side 35 of the air supply nozzle 30 and supply purge gas to the air supply nozzle 30. Note that the shelves 15 are not shown in Figures 5, 6(a), and 6(b).

[0026] The purge device 20 further comprises an elastic cylindrical member 40 fitted onto the air supply nozzle 30 and a contact member 50 attached to the tip 43 of the cylindrical member 40. As shown in Figure 3, a portion of the cylindrical member 40 protrudes upward (in the Z direction) through an opening 15e formed in the shelf plate 15, and the contact member 50 is positioned higher than the upper surface 15a. The purge gas supplied to the air supply nozzle 30 is supplied to the air supply port Fp through the internal flow path 49 of the cylindrical member 40 and the through hole 59 of the contact member 50 (see Figure 8).

[0027] As shown in Figures 6(a), 6(b), and 7, each air supply nozzle 30 has a block-shaped nozzle base portion 31 connected to the supply pipe portion 23, and a cylindrical nozzle body portion 32 that protrudes upward from the nozzle base portion 31 and has a gas flow path 39 formed therein that extends along the central axis L. The central axis L is, for example, parallel to the Z direction (vertical direction). The air supply nozzle 30 is a metal member made of, for example, stainless steel. The shape of the air supply nozzle 30 is not particularly limited, but at least the nozzle body portion 32 includes a base cylindrical portion 36 (see Figure 7) that extends along the central axis L. The base cylindrical portion 36 is a cylindrical body having a constant outer diameter, but the nozzle body portion 32 further includes, for example, an enlarged diameter portion 37 having an outer diameter larger than that of the base cylindrical portion 36. In this embodiment, the enlarged diameter portion 37 is formed at the tip of the base cylindrical portion 36. The nozzle body portion 32 in this embodiment has a mushroom shape.

[0028] As shown in Figures 6(b) and 7, a cylindrical space 34 larger than the outer diameter of the base end 42 of the cylindrical member 40 is provided around the nozzle body 32. The cylindrical member 40 is fitted onto the outer circumference of the nozzle body 32, and the space 34 facilitates the installation of the cylindrical member 40. The space 34 is defined, for example, between the cylindrical projection 33 and the nozzle body 32. For example, with the air supply nozzle 30 fixed to the lower surface of the shelf 15, the worker holds the cylindrical member 40 and inserts the base end 42 into the opening 15e. Then, the worker aligns the base end 42 with the nozzle body 32, making it easier to position the base end 42 with the nozzle body 32. The space 34 also accommodates the worker's fingertips. After the nozzle body 32 is installed, a space (part of the space 34, i.e., the outer circumference) still exists on the outer circumference of the nozzle body 32.

[0029] The cylindrical member 40 is, for example, a one-piece molded product made of a material such as silicone rubber. The cylindrical member 40 may also be made of other elastic materials (i.e., elastically deformable materials).

[0030] The cylindrical member 40 includes a base end portion 42 that is fitted into the nozzle body portion 32, and a tip portion 43 (see Figure 8) that is formed continuously above the base end portion 42 and protrudes above the tip 32a of the nozzle body portion 32.

[0031] As shown in Figure 7, the base end portion 42 of the cylindrical member 40 has two different inner diameters corresponding to the shape of the nozzle body portion 32. The base end portion 42 includes a bottom cylindrical portion 44 having an inner diameter that fits the outer circumferential surface of the base cylindrical portion 36, and an upper cylindrical portion 45 having an inner diameter that fits the outer circumferential surface of the enlarged diameter portion 37. That is, the inner diameter of the upper cylindrical portion 45 is larger than the inner diameter of the bottom cylindrical portion 44. To explain the significance of "fitting," the above configuration includes a configuration in which the outer circumferential surface of the base cylindrical portion 36 or the enlarged diameter portion 37 is pressed or in close contact with the inner circumferential surface of the bottom cylindrical portion 44 or the upper cylindrical portion 45, but is not necessarily limited to such a contact state, and also includes a configuration in which a small gap (clearance) is formed between these outer and inner circumferential surfaces. When a gap is formed, the diameter (inner diameter) of the inner circumferential surface of the bottom cylindrical portion 44 or the upper cylindrical portion 45 is slightly larger than the diameter (outer diameter) of the outer circumferential surface of the base cylindrical portion 36 or the enlarged diameter portion 37. The base end portion 42 of the cylindrical member 40 is in close contact with at least one of the outer surfaces of the base cylindrical portion 36 and the enlarged diameter portion 37 over its entire circumference. In this embodiment, for example, the bottom cylindrical portion 44 of the base end portion 42 is in close contact with the base cylindrical portion 36 of the nozzle body portion 32 over its entire circumference. Of course, in addition to that, the upper cylindrical portion 45 of the base end portion 42 may also be in close contact with the enlarged diameter portion 37 of the nozzle body portion 32 over its entire circumference. The larger the contact area, the more securely the cylindrical member 40 will fit into the nozzle body portion 32.

[0032] As shown in Figure 6(b), the enlarged diameter portion 37 is located below the annular surface parallel to the upper end surface of the base portion 42 (the XY plane formed at the boundary between the base portion 42 and the tip portion 43).

[0033] Furthermore, in the cylindrical member 40 of this embodiment, the tip portion 43 has a bellows-like shape in which annular protrusions 43a and annular recesses 43b are alternately formed in the vertical direction. With this configuration, the tip portion 43 can be compressed freely in the vertical direction (Z direction), and the shape of the tip portion 43 can also be stabilized when compressed. The difference between the natural length of the tip portion 43 in the vertical direction (direction of the central axis L) and the length when it is compressed to its maximum extent corresponds to the deformation stroke range of the tip portion 43. The cylindrical member 40 is, for example, a bellows-like portion in which one recess 43b is formed between two protrusions 43a, but these can be changed as appropriate, and the deformation stroke range can also be set as appropriate. The deformation stroke of the recess 43b in the operating state of the purging device 20 will be described later with reference to Figure 8.

[0034] As shown in Figure 7, the upper end of the tip portion 43 is an annular upper edge 47 with a size corresponding to the diameter of the protrusion 43a. This upper edge 47 corresponds to the largest diameter portion of the cylindrical member 40. An internal flow channel 49 is formed in the base portion 42 and the tip portion 43, penetrating the central axis L, and the upper edge 47 has the largest diameter opening within the internal flow channel 49.

[0035] As shown in Figures 6(b) and 7, a contact member 50 is attached to the tip portion 43, which includes a through hole 59 formed along the central axis L. The contact member 50 includes a donut-shaped main body portion 51 and a flat contact surface 53 provided on the upper part of the main body portion 51. The contact surface 53 extends perpendicularly to the central axis L and covers the upper end edge 47 (tip portion 43) of the cylindrical member 40. The outer peripheral edge 53a of the contact surface 53 protrudes slightly outward from the upper end edge 47. That is, the diameter of the outer peripheral edge 53a of the contact surface 53 is larger than the diameter of the upper end edge 47. The outer peripheral edge 53a of the contact surface 53 may have the same diameter as the upper end edge 47. The outer peripheral edge 53a is chamfered so as not to catch when it comes into contact with the air supply port Fp (grommet). The through hole 59 opens into the contact surface 53. In other words, an opening 59a, which is the end of the through hole 59 (the discharge end of the purge gas), is formed in the center of the contact surface 53.

[0036] The main body 51 of the contact member 50 fits into the bellows-shaped portion of the tip 43. The radially protruding portion of the main body 51 engages with the recess 43b of the tip 43, thereby attaching the contact member 50 to the cylindrical member 40. The contact member 50 is detachable from the cylindrical member 40, but it will not come off during normal use as a purge device 20.

[0037] The contact member 50 is made of a low-friction material such as PEEK. The frictional resistance at the contact surface 53 is smaller than the frictional resistance at the upper end edge 47 (tip portion 43) of the cylindrical member 40.

[0038] Next, the operating state of the purging device 20 will be described with reference to Figures 8 and 9. Figure 8 is a cross-sectional view showing the state in which the container is supported by the positioning pins 17 and the supply air nozzle 30 and the supply air port Fp are connected. Figure 9 is a diagram showing an example of lateral transfer of the container F by the overhead transport vehicle 3. In particular, Figure 9 shows an example of transferring the container F to the left. When a large number of wafers or the like are contained inside the container F, the total weight of the container F becomes heavy. As shown in Figure 9, when the lateral unit 94 moves the theta unit 95, the lifting drive unit 96 and the holding unit 97 to the left, the left end of the lateral unit 94 cantilever supports the theta unit 95, the lifting drive unit 96 and the holding unit 97 and bends downward. As a result, the left end of the lifting drive unit 96 bends downward. As a result, the lid Fb of the container F, i.e., the front side, becomes lower, but nothing is provided on the part of the shelf 15 facing the dummy port Fc. For example, conventional dummy nozzles for height adjustment are not provided. Therefore, the three positioning pins 17 enter the three grooves Fg before the front side of the container F comes into contact with anything. The container F is guided by the positioning pins 17 and stops at a predetermined position.

[0039] When the container F is supported by the three positioning pins 17, as shown in Figure 10, the cylindrical member 40 is compressed vertically, and the outer edge 53a of the contact member 50 is in close contact with the lower surface of the air supply port Fp. The three positioning pins 17 are in contact with the uppermost part of the three grooves Fg, and in this state, a gap exists between the bottom surface Fa of the container F and the upper surface 15a of the shelf plate 15.

[0040] In the purging device 20 of this embodiment, a cylindrical member 40 is fitted onto the outer circumference of the nozzle body 32. Since the cylindrical member 40 is elastic, the tip 43 of the cylindrical member 40 that protrudes upward can be deformed according to the posture of the container F. Therefore, the air supply nozzle 30 and the air supply port Fp are connected in an airtight state, and purge gas can be supplied from the air supply nozzle 30 to the air supply port Fp at a predetermined pressure. Since the cylindrical member 40 is elastic, it has excellent sealing characteristics. When fitting the cylindrical member 40 into the nozzle body 32, the space 34 provided around the nozzle body 32 makes it easy to align the nozzle body 32 and the cylindrical member 40. This makes the installation of the cylindrical member 40 easy. Furthermore, the nozzle body 32 is not a simple cylinder with a constant outer diameter, but includes an enlarged diameter portion 37. Since the base end portion 42 of the cylindrical member 40 is fitted into the nozzle body portion 32 which has such an uneven shape, the cylindrical member 40 is securely and firmly attached.

[0041] Furthermore, in the storage shelf 1, multiple positioning pins 17 are erected on the upper surface 15a of the shelf board 15, and when the container F is supported by the positioning pins 17, the cylindrical member 40 is compressed in the vertical direction. With this storage shelf 1, the horizontal and vertical position of the container F can be maintained by the positioning pins 17. In addition, because the cylindrical member 40 is compressed, it has excellent sealing characteristics with respect to the air supply port Fp, and leakage of purge gas is less likely to occur.

[0042] In the above embodiment, the nozzle body portion 32 and the cylindrical member 40 are configured such that the base cylindrical portion 36 at the base is constricted relative to the enlarged diameter portion. The bottom cylindrical portion 44 fits into the base cylindrical portion 36, and the enlarged diameter portion 37 fits into the upper cylindrical portion 45. As a result, the stability of the cylindrical member 40 is improved. The cylindrical member 40 is less likely to come off even when external force is applied.

[0043] The bellows-shaped tip 43 is easily compressed in the vertical direction and adheres well to the air intake port Fp. This also improves sealing characteristics.

[0044] In this configuration, where the contact member 50 is attached to the cylindrical member 40, even if a part of the bottom surface Fa of the container F (for example, a misaligned air supply port Fp) comes into contact with the flat contact surface 53 of the contact member 50, the position of that part does not become fixed and is easily movable. When the position of the container F is guided by a positioning pin 17 or the like, the contact of that part does not cause any problems, and smooth guidance is achieved.

[0045] The frictional resistance at the contact surface 53 of the contact member 50 is smaller than the frictional resistance at the tip portion 43 of the cylindrical member 40. With this configuration, a portion of the bottom surface Fa of the container F described above can easily slide (slide) on the contact surface 53 of the contact member 50.

[0046] Next, with reference to Figure 11, a modified example of a purge stocker 1A as a storage rack will be described. As shown in Figure 11, the purge stocker 1A is a storage rack for storing a plurality of containers 150. The purge stocker 1A has a purging device for filling the inside of the containers 150 with purge gas (purging process). The containers 150 are the same as container F in the above embodiment. The purge stocker 1A is installed, for example, in a clean room. The purge stocker 1A mainly consists of a partition 103, a rack 107, a crane 109, an OHT (Overhead Hoist Transfer) port 121, and a manual port 123.

[0047] Inside the partition 103, a storage area for storing containers 150 is formed. The rack 107 is the part for storing the containers 150. Each rack 107 has multiple mounting sections 7A formed along the x-direction and the vertical z-direction for placing and storing the containers 150. The mounting sections 7A are also called purge shelves. Multiple mounting sections 7A are arranged in a row along the z-direction and multiple mounting sections are arranged in a row along the x-direction.

[0048] The crane 109 is a transport device that loads and unloads the container 150 to and from the mounting section 107A, and also moves the container 150 between the mounting section 107A and the OHT port 121 and manual port 123. The crane 109 is positioned in the area between the opposing racks 107, 107. The crane 109 moves along a running rail (not shown) placed on the floor surface along a predetermined direction x in which the racks 107 extend. The crane 109 has a guide rail 109A extending in the vertical direction z, and a loading platform 109B that can be raised and lowered along the guide rail 109A. The transport of the container 150 by the crane 109 is controlled by a crane controller 160.

[0049] The loading and unloading of containers 150 into and out of the purge stocker 1A is performed from the OHT port 121 and the manual port 123. The OHT port 121 is the part where containers 150 are transferred between the overhead transport vehicle (OHT) 127, which travels on rails 125 laid on the ceiling, and the purge stocker 1A. The OHT port 121 has a conveyor 121A for transporting the containers 150. The manual port 123 is the part where containers 150 are transferred between the worker and the purge stocker 1A. The manual port 123 has a conveyor 123A for transporting the containers 150.

[0050] In the purge stocker 1A, a purge device is provided, similar to the purge device 20 of the storage shelf 1. That is, each mounting section 107A is equipped with the same configuration as shown in Figures 5 to 8. The purge stocker 1A provides the same operation and effect as the storage shelf 1 and purge device 20 in the previous embodiment.

[0051] Although embodiments of the present disclosure have been described above, the present invention is not limited to the above embodiments. For example, the nozzle body portion 32 may be provided with a plurality of diameter-enlarged portions. The diameter-enlarged portions may be provided at locations other than the tip of the base cylindrical portion 36, for example, at the center in the direction of the central axis L. Alternatively, the diameter-enlarged portions may not be provided, and the base cylindrical portion 36 may be provided with one or more annular concave portions (or grooves). The outer diameter of the concave portion is smaller than the outer diameter of the base cylindrical portion 36. Corresponding to the concave portion (or groove), an annular projection, or a plurality of projections spaced apart in the circumferential direction, may be provided on the inner circumferential surface of the base end of the cylindrical member. The annular projection or the plurality of projections fit into the concave portion. As a result, the base end of the cylindrical member is in close contact with the outer circumferential surface of the concave portion. A plurality of concave portions may be provided spaced apart in the circumferential direction. At least one of the diameter-enlarged portions and the concave portions may be provided at multiple locations in the direction of the central axis L. The enlarged diameter portion and the concave portion improve the stability of the attachment of the base end portion 42 of the cylindrical member 40.

[0052] The deformation stroke range of the tip portion 43 can be changed as appropriate. The tip 32a (expanded diameter portion 37, etc.) of the nozzle body portion 32 may protrude above the upper cylinder portion 45 (base portion 42). In that case, when the tip portion 43 is compressed in the vertical direction, the tip 32a may move (rise) relative to the inside of the tip portion 43. Even in that case, when the deformation stroke is at its maximum (when the vertical size is at its minimum), the tip 32a is located below the upper edge 47.

[0053] The shape of the contact member 50 may be changed as appropriate. The outer peripheral edge 53a of the contact member 50 may protrude radially outward from the upper edge 47. The upper edge 47 may have a top surface, and the outer peripheral edge 53a of the contact member 50 may be located radially inward from the upper edge 47. The air supply nozzle 30, the cylindrical member 40, and the contact member 50 as a whole should maintain airtightness to prevent leakage of purge gas. The frictional resistance of the contact surface 53 of the contact member 50 may be about the same as or greater than the frictional resistance at the tip portion 43.

[0054] The contact member 50 may be omitted. In that case, the upper edge 47 of the elastic cylindrical member 40 will be in close contact with the air supply port Fp of the container F, depending on the orientation of the container F.

[0055] A single purging device 20 may have only one air supply nozzle 30. In that case, there is also only one air supply port Fp provided on the bottom surface Fa of the container F.

[0056] In addition to the semiconductor transport system S and purge stocker described above, the purging device and storage rack of this disclosure may also be applied. [Explanation of Symbols]

[0057] 1...Storage shelf, 1A...Purge stocker (storage shelf), 3...Overhead transport vehicle, 15...Shelf board, 15a...Top surface, 15e...Opening, 20...Purge device, 23...Supply pipe section, 30...Air supply nozzle, 31...Nozzle base section, 32...Nozzle body section, 32a...Tip, 33...Protruding part, 34...Space, 36...Base cylinder section, 37...Enlarged diameter section, 39...Gas flow path, 40...Cylindrical member, 42...Base end section, 43...Tip section, 43a...Convex part, 43b...Concave part, 44...Bottom cylinder section, 45...Upper cylinder section, 47...Upper edge, 49...Internal flow path, 50...Contact member, 53...Contact surface, 59...Through hole, 150...Container, F...Container, Fa...Bottom surface, Fb...Lid, Fg...Groove section, Fp...Air supply port, L...Central axis.

Claims

1. A purging device that supplies purge gas into the interior of a container through an air supply port formed on the bottom surface of the container to be purged, The supply pipe section for supplying the purge gas, An air supply nozzle having a nozzle base portion connected to the supply pipe portion, and a cylindrical nozzle body portion that protrudes upward from the nozzle base portion and has a gas flow path formed along the central axis, The nozzle body comprises an elastic cylindrical member that is fitted onto the outer circumference of the nozzle body and protrudes above the tip of the nozzle body, The nozzle body includes a base cylindrical portion extending along the central axis and a retractable portion formed at least at one location in the direction of the central axis, having an enlarged outer diameter larger than the base cylindrical portion or a concave portion having an outer diameter smaller than the base cylindrical portion. A space larger than the outer diameter of the base end of the cylindrical member is provided around the nozzle body. A purging device wherein the base end of the cylindrical member is in close contact with at least one of the outer circumferential surface of the base cylindrical portion and the enlarged diameter portion or the concave portion.

2. The nozzle body portion includes the enlarged diameter portion formed at the tip of the base cylindrical portion, The purge device according to claim 1, wherein the base end of the cylindrical member includes a bottom cylindrical portion having an inner diameter that fits the outer circumferential surface of the base cylindrical portion and an upper cylindrical portion having an inner diameter that fits the outer circumferential surface of the enlarged diameter portion.

3. The cylindrical member is formed continuously with the base end and has a tip portion that protrudes above the tip of the nozzle body portion. The purging device according to claim 1 or 2, wherein the tip portion has a bellows-like shape in which annular convex portions and annular concave portions are alternately formed in the vertical direction.

4. The cylindrical member is formed continuously with the base end and has a tip portion that protrudes above the tip of the nozzle body portion. The purge device according to claim 1 or 2, wherein a contact member is attached to the tip portion, the contact member including a flat contact surface extending perpendicularly to the central axis and covering the tip portion, and a through hole formed along the central axis and opening to the contact surface.

5. The purging device according to claim 4, wherein the frictional resistance at the contact surface of the contact member is smaller than the frictional resistance at the tip of the cylindrical member.

6. A purging device according to claim 1 or 2, The system comprises a shelf with an opening through which at least a cylindrical member of the purging device is inserted, Multiple positioning pins are erected on the upper surface of the shelf board. A storage shelf in which the cylindrical member is compressed vertically when the container is supported by the positioning pin.

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