Sample fixing jig

Abstract

The sample, which is in liquid and has poor shape retention, is firmly fixed and grasped. [Solution] When the sample S is sucked into and fixed in the adsorption hole 11, the adsorption hole 11 is closed, and the suction of water W from the adsorption hole 11 stops. As a result, the sample S is fixed to the head part 10. Water W is sucked in from the adsorption hole 11 until this state is reached, but this water W remains in the liquid trap 70 and does not adversely affect the vacuum pump 30 or the like on the suction side. In this way, the sample fixing jig 1 can fix the sample S (mollusk) in water W to the head part 10.

Description

Technical Field

[0001] The present invention relates to a sample fixing jig capable of temporarily fixing and transporting a soft sample.

Background Art

[0002] There is known a vacuum chuck which is a jig for adsorbing a sample (such as a semiconductor wafer) to a plurality of small suction holes made negative by a vacuum pump or the like and transporting the sample. Further, as described in Patent Document 1, a jig having a configuration capable of gripping a film-like sample having a thickness of several μm which is thin and easily curved, unlike a semiconductor wafer, can also be realized using a similar configuration.

[0003] By using such a jig, compared with the case of gripping and holding a sample with an ordinary chuck or the like, it is possible to easily perform transportation, observation, inspection, processing, utilization of surface functions, etc. of the sample while suppressing damage, warpage, and deformation.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The above-described jig is effective for samples that can be easily vacuum-adsorbed in the atmosphere, such as semiconductor wafers and films of resin materials. On the other hand, for samples that are in a liquid and have low formability, such as soft-bodied animals in water (for example, organs, biological tissues, regenerated tissues, foods, etc.), there may be cases where it is also desired to fix and grip them in the same manner, but it has not been easy to grip such samples using the above-described jig.

[0006] This invention has been made in view of the above-mentioned problems, and aims to provide an invention that solves the above-mentioned problems. [Means for solving the problem]

[0007] In order to solve the above problems, the present invention has the following configuration. The sample fixing jig of the present invention is a sample fixing jig for fixing a sample to an adsorption surface by vacuum adsorption, comprising a head portion having an adsorption surface with a plurality of adsorption holes, each of which is vacuum-suctioned via the exhaust pipe, and an exhaust pipe whose interior is vacuum-suctioned, fixed to the head portion, wherein a liquid trap is provided in the exhaust pipe on the outside of the head portion to collect liquid flowing in from the exhaust pipe and to pass gas flowing in from the exhaust pipe to the suction side. The head portion may be provided with a sample placement area capable of containing the liquid and the sample contained in the liquid, and the adsorption surface may be formed in the sample placement area. On the adsorption surface, grooves may be formed on the outside of the adsorption holes in a plan view, where the adsorption surface is excavated. On the adsorption surface, a protrusion may be formed that locally projects from the adsorption surface on at least one of the outer or inner sides of the adsorption hole in a plan view. In a plan view, the adsorption holes may have a polygonal or star-shaped polygonal form. In a plan view, the adsorption hole may have a configuration in which a circle, polygon, or star polygon is divided into multiple sections. [Effects of the Invention]

[0008] As described above, the present invention can fix and grasp samples that are in liquid and have poor shape retention. [Brief explanation of the drawing]

[0009] [Figure 1] This figure shows the overall configuration of a sample fixing jig according to an embodiment of the present invention. [Figure 2]This is a perspective view of the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 3] This is a perspective view of the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 4] This is a cross-sectional view showing the situation when a sample is adsorbed onto the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 5] This is an example of the arrangement of suction holes in the head section. [Figure 6] This is a perspective view and a partially enlarged view thereof of a first modified example of the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 7] This is a top view of the suction hole of a first modified example of the head portion of a sample fixing jig according to an embodiment of the present invention, and a further modified example thereof. [Figure 8] This is a top view of the suction holes of a second modified example of the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 9] This is a top view of the adsorption holes of the third to sixth modified examples of the head portion of the sample fixing jig according to an embodiment of the present invention. [Figure 10] This is a perspective view showing the structure of the adsorption holes in a seventh modified example of the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 11] These are a top view (a) and a cross-sectional view (b) of an eighth modified example of the head portion of the sample fixing jig according to an embodiment of the present invention. [Figure 12] These are a top view (a) and a cross-sectional view (b) of a ninth modified example of the head portion of the sample fixing jig according to an embodiment of the present invention. [Figure 13] These are a top view (a) and a cross-sectional view (b) of a 10th modified example of the head portion of a sample fixing jig according to an embodiment of the present invention. [Figure 14] These are a top view (a) and a cross-sectional view (b) of an eleventh modified example of the head portion of the sample fixing jig according to an embodiment of the present invention. [Figure 15] These are a top view (a) and a cross-sectional view (b) of a twelfth modified example of the head portion of the sample fixing jig according to an embodiment of the present invention. [Figure 16] Top view (a), cross-sectional view (b) of the 13th modification of the head part in the sample fixing jig according to the embodiment of the present invention, and cross-sectional view (c) of the modification. [Figure 17] Perspective view (a) and cross-sectional view (b) of the 14th modification of the head part in the sample fixing jig according to the embodiment of the present invention. [Figure 18] Cross-sectional view of the 15th modification of the head part in the sample fixing jig according to the embodiment of the present invention. [Figure 19] Structure (a) of the liquid trap in the sample fixing jig according to the embodiment of the present invention, and structures ((b) to (c)) of the modification.

Embodiments for Carrying Out the Invention

[0010] The sample fixing jig according to the embodiment of the present invention will be described. FIG. 1 is a diagram showing a simplified overall configuration of this sample fixing jig 1. This sample fixing jig 1 is configured to be able to grip a sample S in a liquid (for example, water). Examples of the sample S in this case include soft organisms in water with low formability.

[0011] Here, a head part 10 that fixes the sample S by vacuum suction is used. In FIG. 1, a simplified cross-sectional view of the head part 10 is shown. The head part 10 is provided with a plurality of small-diameter suction holes 11, and all the suction holes 11 are connected to an exhaust pipe 20. Therefore, by sucking the inside of the exhaust pipe 20, suction is performed through the suction holes 11. The detailed structure of the head part 10 will be described later.

[0012] The exhaust pipe 20 is sucked at its end by a vacuum pump 30. Between the head section 10 and the vacuum pump 30 in the exhaust pipe 20, a filter 40 for removing foreign matter, a vacuum valve 50 for controlling the on / off of suction, and a pressure gauge 60 for detecting the suction pressure are provided, on the vacuum pump 30 side. However, a liquid trap 70 for accumulating liquid (water) is provided between the pressure gauge 60 and the head section 10. As shown in the figure, the water sucked in from the head section 10 is collected below the liquid trap 70 by gravity, thus preventing this water from being sucked further towards the vacuum pump 30. On the other hand, air (gas) flows over the accumulated water and is therefore drawn towards the vacuum pump 30 side (suction side), and even if water is sucked in from the adsorption holes 11, suction from the adsorption holes 11 in the head section 10 can be maintained stably.

[0013] In Figure 1, apart from the structure of the head unit 10 and the inclusion of the liquid trap 70, the configuration is largely the same as that of conventional vacuum tweezers. The operator can switch between gripping and fixing the sample S and releasing it by opening and closing the vacuum valve 50. The detailed structure of the liquid trap 70 will be described later.

[0014] Next, the specific structure of the head portion 10 will be described. Figure 2 is a perspective view of the head portion 10, and Figure 3 is a perspective view of the head portion 10 from the same direction. Here, the x, y, and z directions are defined as shown in Figure 2. The head portion 10 has a rectangular outer wall portion 13 on top of the rectangular base portion 12 (on the positive z-direction side), which surrounds the central part of the upper surface of the base portion 12 when viewed from the positive z-direction side. The part of the upper surface enclosed by the outer wall portion 13 becomes the adsorption surface 12A to which the sample S is fixed, and multiple small-diameter adsorption holes 11 are arranged on the adsorption surface 12A. The interior enclosed by the outer wall portion 13 is the sample installation area 10A where the liquid (water W) and sample S are placed in Figure 1, and the adsorption surface 12A is its bottom surface. The size of the adsorption surface 12A is set to a size that allows the sample S to be adsorbed and fixed to it.

[0015] An exhaust pipe 20 is connected to the negative x-direction side of the base 12. As shown in Figure 3, all suction holes 11 communicate with the inside of the exhaust pipe 20 via the intake chamber 14, which is a space within the base 12. Therefore, the vacuum pump 30 in Figure 1 can draw air from the upper side of the suction surface 12A through each suction hole 11.

[0016] Furthermore, in Figure 2, a fixing hole 15 is provided on the outside of the outer wall portion 13 for passing a fixing device (such as a screw) through to a base (not shown) located on the lower side (negative side in the z direction) of the head portion 10. This allows the sample S to be fixed to the head portion 10, and the head portion 10 to be fixed to various measuring devices for measurement.

[0017] Figures 4(a) to 4(c) schematically illustrate the situation when a sample S, which is a soft-bodied organism in water, is fixed to the head unit 10, corresponding to the configuration in Figure 1. Here, only the configuration from the head unit 10 to the liquid trap 70 in Figure 1 is schematically shown. In the liquid trap 70, solid arrows indicate the flow of liquid, and dotted arrows indicate the flow of gas. Here, first, as shown in Figure 1(a), water W and the sample S contained within it are introduced into the sample placement area 10A. In this state, the vacuum valve 50 is closed, no suction is performed, and the sample S is suspended in the water W.

[0018] Subsequently, as shown in Figure 4(b), when the vacuum valve 50 is opened and suction is started, water W is drawn in through the adsorption holes 11 and flows through the exhaust pipe 20, but this water W remains in the liquid trap 70. At this time, in the sample placement area 10A, the sample S is also drawn into the adsorption holes 11 along with the water W.

[0019] Subsequently, the sample S is drawn into and fixed in the adsorption hole 11, thereby closing the adsorption hole 11 and stopping the suction of water W from the adsorption hole 11, resulting in the state shown in Figure 4(c). This fixes the sample S to the head unit 10. While water W is drawn in from the adsorption hole 11 between the state shown in Figure 4(b) and the state shown in Figure 4(c), this water W remains in the liquid trap 70 and does not adversely affect the vacuum pump 30 or other components further down the suction side. Even in the state shown in Figure 4(c), if the adsorption hole 11 is not completely closed and water W is still drawn in, the water W can be retained in the liquid trap 70 by ensuring a sufficiently large capacity for the liquid trap 70.

[0020] Thus, with this sample fixing jig 1, a sample S (mollusk) in water W can be fixed to the head part 10. A certain shapely object can be used as the sample S, but in this case, it is not necessary to introduce water W (liquid) into the sample placement area 10A. In addition, a liquid other than water can be used instead of water W, depending on the sample S. Furthermore, the sample S and water W do not need to be mixed before adsorption; for example, the sample S alone may be adsorbed onto the adsorption surface 12A without adding water W, and then water W may be added to the sample placement area 10A. Such a procedure can be appropriately set according to the characteristics of the sample S.

[0021] In the head portion 10, it is preferable to have a large number of adsorption pores 11 in order to reliably adsorb the sample S, which is a soft-bodied organism with particularly poor shape. Furthermore, in order to adsorb such a poorly shaped sample S, it is preferable that the adsorption pores and their surroundings be arranged in a configuration in which the adsorption pores 11 are dispersed over a range corresponding to the size of the sample S. Figures 5(a) and 5(b) show an example of such an arrangement of adsorption pores 11 in the sample placement area 10A viewed from the positive z-direction. In this example, the adsorption pores 11 are circular in shape, but this shape may be elliptical, rectangular, or even a complex shape as described later. Also, it is not necessary for all adsorption pores to be the same shape and size.

[0022] Furthermore, in the above example, the adsorption pores 11 were small-diameter circular in shape. However, in order to more firmly adsorb a soft sample S with low shape consistency using the adsorption pores, different characteristics are required compared to, for example, vacuum adsorption of a semiconductor wafer with high shape consistency using vacuum tweezers.

[0023] First, if the area of ​​the adsorption pores is large, soft samples like these may be partially drawn into the pores. To address this, it is effective to use many adsorption pores, each with a small area. For example, this configuration can be substantially achieved even by using a structure in which adsorption pores that are not small in area are divided.

[0024] If multiple (many) adsorption pores are provided, the suction pressure can be varied for each pore. For example, depending on the characteristics of the sample, the pressure can be made higher on the inside and lower on the outside of the two-dimensional arrangement of adsorption pores, or vice versa. This adjustment can be made, for example, by setting the inner diameter of the flow path connecting the adsorption pores to the intake chamber. The same applies even when the intake port is not a simple circle, as described below.

[0025] In particular, to stably fix samples with poor shape consistency to the head as described above, it is required that the sample does not move laterally from the surface on which it is adsorbed. In this case, it is effective to use a shape that increases the frictional force between the sample and this surface. In this case, the shape can be the shape of the adsorption pores and the shape of the area around the adsorption pores or the shape of the entire adsorption surface.

[0026] Examples of shapes of suction holes or the area around suction holes in the head portion that satisfy these requirements will be described. Figure 6 is a perspective view corresponding to Figure 3 showing the structure of the head portion 110, which is this example (second modification), and an enlarged view of the area around the suction hole 111. Figure 7(a) is a top view of the suction hole 111. As shown in Figure 7(a), the suction hole 111 is constructed by combining a circular opening 111A formed in the suction surface 112A and two beam portions 111B that intersect perpendicularly within it. In the base portion 112 used here, an intake chamber 114 is formed with a shape corresponding to the arrangement of the suction holes 111.

[0027] In this case, even if the diameter of the adsorption hole 111 (circular opening 111A) is increased, the adsorption hole 111 is divided into four parts by the beam portion 111B, and the effective opening diameter after division can be reduced. Furthermore, this division increases the number of edges of the opening of the adsorption hole 111, making it easier to grip soft samples at these edges and increasing the frictional force between the sample and the surface on which the adsorption hole 111 is formed. As a result, it becomes easier to grip soft samples particularly stably with this head portion 110.

[0028] In the examples shown in Figures 6 and 7(a), the circular opening 111A is divided into four sections by two beam sections 111B. As variations, as shown in Figure 7(b), a suction hole 121 is formed by dividing a circular opening 121A in the suction surface 122A into two sections by one beam section 121B, and as shown in Figure 7(c), a suction hole 131 is formed by dividing a circular opening 131A in the suction surface 132A into eight sections by three beam sections 131B. These structures also contribute to the mechanical reinforcement of the suction holes.

[0029] Figure 8 is a top view showing the configuration of an adsorption hole 141, which is a modified example (second modified example) of the adsorption hole 111 (head portion 110) described above. In this adsorption hole 141, similar to the structure in Figure 7(a), two beam portions 141B are similarly formed in the circular opening 141A formed in the adsorption surface 142A, and in addition, a central circular portion 141C is provided in the center. This structure forms substantially four small adsorption holes spaced apart from each other. Similarly, the edges of the adsorption holes 141 can increase the frictional force between them and the sample.

[0030] Figure 9 is a top view showing the structures of the adsorption holes 151(a), 161(b), 171(c), and 181(d) of the head portion, which represent further modifications (modifications 3 to 6). When the shape of the adsorption holes is a star polygon, the sample is more easily locked onto the inwardly protruding portion (the area enclosed by the dotted line in the figure) when adsorbing the sample, thus allowing the sample to be fixed more firmly. This effect is particularly pronounced in the adsorption hole 161 in Figure 9(b), where the angle of this portion is reduced. Similarly, in the adsorption hole 171 in Figure 9(c), which is a divided concentric arc shape, and the adsorption hole 181 in Figure 9(d), which is a divided concentric star shape, the sample can be locked onto the inner end of the adsorption hole. Depending on the manufacturing equipment, one of these structures can be selected that is easy to manufacture.

[0031] Figure 10 is a perspective view showing the structure of an adsorption hole 191, which is a modified example (seventh modified example) of the adsorption hole 141 described above. Figure 10(a) shows a perspective view from the positive z-direction side (upper side), and Figure 10(b) shows a perspective view from the negative z-direction side (lower side: adsorption chamber side). In this case as well, two beam sections 191B and a central circular section 191C are provided in the circular opening 191A formed in the adsorption surface 192A. However, as shown in Figure 10(a), on the adsorption surface 192A side, the central circular section 191C is formed on the same plane as the adsorption surface 192A, but the beam sections 191B are formed only at a deeper position when viewed from this plane. Therefore, in this adsorption pore 191, the actual shape of the adsorption pore is the annular portion inside the circular opening 191A and outside the central circular portion 192A. Since the sample is adsorbed over the entire circumferential region within a narrow radial area of ​​this annular shape, the actual suction area is larger than that of the adsorption pore 141.

[0032] On the other hand, the beam portion 191B mainly contributes to mechanically supporting the central circular portion 191C, and by providing the beam portion 191B only on the side deeper than the adsorption surface 192A, the beam portion 171B suppresses excessive pulling of soft samples.

[0033] The structures in Figures 6 to 10 were mainly characterized by the structure of the adsorption pores, but we will now describe an example in which the structure of the adsorption surface around the adsorption pores is changed according to the adsorption pores. Figure 11 is a top view (a) and a cross-sectional view (b) in the AA direction showing the structure of such a head portion 200 (eighth modified example). Here, small rectangular adsorption pores 201 are arranged in a 3x3 pattern (adsorption pore group), and as shown in Figure 11(b), each adsorption pore 201 communicates with the lower intake chamber 14.

[0034] On the other hand, in Figure 11(a), the area around the adsorption pores is surrounded by grooves 203. As shown in Figure 11(b), the grooves 203 are formed shallowly in the head portion 200 so as not to communicate with the intake chamber 14. This allows the sample to be adsorbed onto the adsorption surface 202A by the adsorption pores 201 (adsorption pore group) and then locked in place by the surrounding grooves 203. In this case, by arranging the combination of adsorption pores and grooves 203 on the adsorption surface 202A as shown in Figure 11(a), a large sample can be fixed to the adsorption surface 202A with uniform strength.

[0035] Figure 12 shows a top view (a) and a cross-sectional view (b) in the BB direction of the head portion 210 of a further modified example (the ninth modified example). As shown in Figure 12(a), a small circular suction hole 211 is formed on the suction surface 212A, and a star-shaped (star-shaped polygon) groove 213 is formed around the suction hole 211, surrounding it. Similar to the structure in Figure 11, the groove 213 is formed shallowly so as not to communicate with the intake chamber 14. As shown in Figure 12(b), the central suction hole 211 has an outer wall portion 211A on its outer circumference that is at the same height as the suction surface 212A.

[0036] In this structure, the suction effect of the adsorption pores 211 is the same as in the structure shown in Figure 5, but the effect of locking the sample by the star polygon in the structure of Figure 9 is obtained by the groove 213. In the structure of Figure 9, the sample is locked at the inner end of the adsorption pore that directly performs suction, whereas in this structure, the part of the sample that is locked is outside the adsorption pores 211, so the force applied to the sample is weaker than in the structure of Figure 9, making the sample less likely to be damaged during locking.

[0037] In the structures shown in Figures 11 and 12, the formation of grooves (recesses) around the adsorption pores on the adsorption surface allows for more secure fixation of the sample. In these cases, the grooves and adsorption pores are formed independently, and adsorption occurs solely through the adsorption pores. However, it is also possible to connect the adsorption pores and grooves to allow the sample to be adsorbed from the grooves as well.

[0038] Figure 13 shows a top view (a) and a cross-sectional view (b) in the CC direction of a modified example (10th modified example) having the same structure as in Figure 12, of the head portion 220. In this adsorption surface 222A, the groove 223 is formed by connecting two concentric grooves 223A and a cross-shaped groove 223B. Since the adsorption pore 221 is formed at the intersection (center) of the groove 223B, the groove 223 essentially functions as an adsorption pore throughout its entire surface. On the other hand, the effect of the groove 223 in locking the sample is the same as in the previous example. This structure is effective for samples with a large area and a highly uniform shape.

[0039] Figure 14 shows a top view (a) and a cross-sectional view (b) in the DD direction of a head portion 230, which is a further modified version (11th modified version) of the head portion 210 (9th modified version) described above. Here, the cross-sectional structure in the BB direction is the same as in Figure 12(b). Here as well, a star-shaped groove 213 and an adsorption hole 211 in the center are formed on the adsorption surface 212A. However, while in Figure 12(a) the outer wall portion 211A of the adsorption hole is formed around the entire circumference of the adsorption hole 211, here, as shown in Figure 14(a), the outer wall portion 231A of the adsorption part is partially removed on the left and right sides in the figure and is divided into upper and lower sections, and Figure 14(b) corresponds to the cross-section of this removed portion. In this case as well, the adsorption hole 211 and the groove 213 are in communication, and the entire groove 213 can function as an adsorption hole.

[0040] In Figures 11 to 14, the adsorption surface is composed of adsorption pores and surrounding grooves (recesses). In contrast, in the following structure, protrusions are formed around the adsorption pores.

[0041] Figure 15 shows a top view (a) and a cross-sectional view (b) in the EE direction of a head portion 240 (12th modified example) that incorporates this structure. As shown in Figure 15(a), a small circular suction hole 241 is formed on the suction surface 242A with its outer circumference protruding, and four protrusions 243 are provided around the suction hole 241.

[0042] In this structure, the suction effect by the adsorption holes 241 is the same as in the structure shown in Figure 5, but since the sample is locked by the protrusions 243, the sample can be fixed more firmly to the adsorption surface 242A, similar to the case where grooves are used. In this case, the number, arrangement, and shape of the protrusions 243 can be set as appropriate, and the protrusions only need to be formed on the inner surface of the adsorption surface or outer wall, and there are no particular restrictions on the positional relationship between them and the adsorption holes. When grooves are used, the soft sample is locked by being pulled below the adsorption surface, whereas in this case, the part of the sample that is locked is on the upper side of the adsorption surface.

[0043] Figure 16 shows a top view (a) of the head portion 250 (13th modified example) having a similar structure, a cross-sectional view (b) of the same in the FF direction, and a modified example of this cross-sectional structure (c). As shown in Figure 16(a), a small circular adsorption hole 251 is formed on the adsorption surface 252A, and multiple concentric peaks 253 are formed around the adsorption hole 251, with their peaks being circular with the adsorption hole 251 at their apex. This structure also allows the sample to be held in place at the peaks of the peaks 253 during adsorption. As shown in Figure 16(b), the height of the adsorption hole 251 is the same as that of the adsorption surface 252A, and the peaks 253 are positioned above and protruding from these. This structure can be easily formed by grinding a flat adsorption surface.

[0044] Figure 16(c) shows a modified version of the structure in Figure 14(b), where the peaks 253 and the recesses (valleys) between the peaks 253 are reversed compared to Figure 16(b). This structure is formed by creating recesses 254 on the adsorption surface through grinding, and is substantially the same as the structure in Figure 16(b), thus achieving the same effect. The cross-sectional shapes of the peaks and recesses (valleys) are arbitrary, as long as they restrict the horizontal movement of the sample.

[0045] Furthermore, the protrusion can also be provided inside the suction hole. Figure 17 shows a perspective view (a) of the structure of the head portion 260 (14th modified example) having such a structure, viewed from above (positive z-direction), and a cross-sectional view (b) perpendicular to the central axis of the protrusion. In this structure, a circular suction hole 261 is formed on the suction surface 262A, and a cylindrical protrusion 263 is formed at the center of the suction hole 261 in a plan view, extending upward from the bottom surface 264A of the intake chamber 264. The height of the protrusion 263 is set higher than the suction surface 262A. Therefore, this protrusion 263 also functions in the same way as the aforementioned protrusion.

[0046] In the example shown in Figure 17, a single protrusion 263 is provided for a single suction hole 261, but multiple similar protrusions may be provided within a single suction hole. Furthermore, the shape of the protrusion may be other than cylindrical, such as the beam-like shape shown in Figures 6 and 7.

[0047] Furthermore, in the above examples, the adsorption pores were provided only on the planar adsorption surface, but depending on the sample, adsorption pores may also be provided on the inner surface of the outer wall.

[0048] In the examples shown in Figures 6 to 10, the structure of the adsorption pores is primarily designed to more firmly fix soft samples. In the examples shown in Figures 11 to 14, the structure of the recesses around the adsorption pores is primarily designed to more firmly fix the recesses around the adsorption pores. In the examples shown in Figures 15 to 17, the structure of the protrusions is primarily designed to more firmly fix the soft samples. In this case, for example, if the sample can be firmly fixed, it may also be more susceptible to damage. Therefore, these configurations are appropriately set according to the characteristics of the sample (mainly mechanical properties) and the operations performed while the sample is fixed to this sample fixing jig. Furthermore, these adsorption pore structures and structures around the adsorption pores can also be combined as appropriate.

[0049] Furthermore, in the above example, the adsorption pores are formed by machining each one on the head (base) or by resin molding that includes the adsorption pores. In contrast, by constructing the entire adsorption surface from a porous material, it is possible to create a structure with a large number of essentially fine adsorption pores.

[0050] Figure 18 is a cross-sectional view corresponding to Figure 1, showing the structure of the head portion 270 (15th modified example) of this structure. In this head portion 270, a porous layer 275 made of a porous material is provided above the intake chamber 274 in the base portion 272, and the surface of the porous layer 275 is the adsorption surface 272A. This allows a sample on the adsorption surface 272A to be similarly adsorbed and fixed. In this case, since the surface of the porous material is generally composed of fine irregularities, a certain effect can also be obtained in which the sample is held in place using the aforementioned recesses and protrusions. In this case, a beam structure or the like that may be appropriately provided on the lower side (intake chamber 274 side) of the porous layer 275 to mechanically reinforce it.

[0051] In addition, regardless of which head unit is used, the configuration other than the head unit 10 in Figure 1 is the same. For this reason, a configuration in which one of the multiple types of head units described above can be selected and used depending on the type of sample is particularly preferable.

[0052] Figures 5 to 18 show examples of the structure of the head section (adsorption holes, etc.) in Figure 1. In contrast, the structure of the liquid trap 70 in Figure 1 and its modified forms will be described below. Figure 19(a) is an enlarged view of the structure of the liquid trap 70 in Figure 1. In Figure 19, the flow of liquid is indicated by solid arrows, and the flow of gas is indicated by dotted arrows. Here, the lid 71 of the liquid trap 70 is provided on the upper side (positive z-direction side) of the trap body 72, and both the exhaust pipe 20 on the head section 10 side (sample side exhaust pipe 20A) and the exhaust pipe 20 on the vacuum pump 30 side (pump side exhaust pipe 20B) are installed to penetrate the lid 71 from top to bottom. In this case, due to gravity, water W accumulates at the bottom of the trap body 72, while the gaseous components accumulate at the top. By positioning the ends of the sample-side exhaust pipe 20A and the pump-side exhaust pipe 20B at a sufficiently high position within the trap body 72, only water W can be collected at the bottom of the trap body 72, and the sample-side exhaust pipe 20A can be drawn in without drawing water W into the pump-side exhaust pipe 20B.

[0053] Figure 19(b) similarly shows the structure of a liquid trap 370, which is a second modified example of the liquid trap 70. In this liquid trap 370, a lid 371 is provided on the lower side, and the sample-side exhaust pipe 20A and the pump-side exhaust pipe 20B pass through the lid 371 from the bottom to the top, with their ends located on the upper side of the trap body 372. In this case as well, as in the case of Figure 19(a), it is possible to draw water W into the sample-side exhaust pipe 20A without drawing water W into the pump-side exhaust pipe 20B. Which of the two forms in Figure 19(a) or (b) is used is appropriately determined according to the overall configuration of the sample fixing jig.

[0054] Furthermore, Figure 19(c) shows the structure of a liquid trap 380, which is a modified example (third modified example) of the trap 70 described above, and Figure 19(d) shows the structure of a liquid trap 390, which is a modified example (fourth modified example) of the liquid trap 370 described above. In both cases, the end of the pump-side exhaust pipe 20B is located at the top of the trap body, while the end of the sample-side exhaust pipe 20A is located at the bottom of the trap body (in the water W).

[0055] In these structures, gaseous components other than air, bacteria, cells, etc., that are present due to the sample S and other factors and are drawn in from the sample placement area can be absorbed into the water W, thereby preventing these components from being drawn into the vacuum pump 30. In this case, conversely, the accumulated water W (liquid component) can be returned to the sample placement area by pressurizing the pump-side exhaust pipe 20B. This procedure may be effective depending on the sample S. Alternatively, the sample S can be properly fixed by repeating the operation of returning such liquid components to the sample placement area and the operation of drawing in the sample placement area (adsorption surface) as described above.

[0056] Furthermore, in any of the structures shown in Figure 19, it is undesirable for the trap body to be filled with water W and for gaseous components to be unable to exist. For this reason, in these structures, it is preferable to provide a sensor that recognizes the liquid level inside the trap body and a drain that discharges the liquid according to this level.

[0057] The present invention has been described above based on embodiments. These embodiments are illustrative, and it will be understood by those skilled in the art that various modifications are possible in the combination of these components, and that such modifications also fall within the scope of the present invention. [Explanation of Symbols]

[0058] 1. Sample fixing jig 10, 110, 200, 210, 220, 230, 240, 250, 260, 270 Head section 10A Sample placement area 11, 111, 121, 131, 141, 151, 161, 171, 181, 191, 201, 211, 221, 241, 251, 261 Adsorption hole 12, 112, 272 base 12A, 112A, 122A, 132A, 142A, 192A, 202A, 212A, 222A, 242A, 252A, 262A, 272A Adsorption surface 13 Exterior wall 14, 264, 274 intake chambers 15 fixing hole 20 Exhaust pipe 20A Sample-side exhaust pipe 20B Pump-side exhaust pipe 30 Vacuum pumps 40 filters 50 Vacuum Valves 60 Pressure gauge 70, 370, 380, 390 Liquid Trap 71, 371 Lid 72,372 Trap body 111A, 121A, 131A, 141A, 191A Circular opening 111B, 121B, 131B, 141B, 191B Beam section 141C, 191C Central circular section 203, 213, 223, 223A, 223B groove 211A, 231A Suction hole outer wall 243, 263 Convex part 253 Yamabe 254 recesses 264A Bottom 275 Porous layer S sample W Water (liquid)

Claims

1. A sample fixing jig for fixing a sample to an adsorption surface by vacuum adsorption, The device comprises a head portion having a suction surface with a fixed exhaust pipe through which the interior is vacuum-suctioned, and a plurality of suction holes provided, each of which is vacuum-suctioned via the exhaust pipe, A sample fixing jig characterized in that the exhaust pipe on the outside of the head portion is provided with a liquid trap that collects liquid flowing in from the exhaust pipe and allows gas flowing in from the exhaust pipe to pass to the suction side.

2. The sample fixing jig according to claim 1, characterized in that the head portion is provided with a sample placement area capable of containing the liquid and the sample in the liquid, and the adsorption surface is formed in the sample placement area.

3. The sample fixing jig according to claim 1 or 2, characterized in that a groove is formed on the outside of the adsorption hole in a plan view of the adsorption surface, the adsorption surface being excavated.

4. The sample fixing jig according to claim 1 or 2, characterized in that, on the adsorption surface, a protrusion is formed that locally protrudes from the adsorption surface on at least one of the outer or inner sides of the adsorption holes in a plan view.

5. The sample fixing jig according to claim 1 or 2, characterized in that, in a plan view, the adsorption holes have a polygonal or star-shaped polygon.

6. The sample fixing jig according to claim 1 or 2, characterized in that, in a plan view, the adsorption holes have a configuration in which a circle, polygon, or star polygon is divided into multiple parts.

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