Tilt adjustment device

Abstract

To provide a tilt adjustment device that can improve the accuracy of tilt adjustment. [Solution] The tilt adjustment device 10 includes a device base 20, a swinging body 30 held swingably on the device base 20, a shaft 40 erected on the swinging body 30, a shaft swinging part 60, and a control device 90 that controls the shaft swinging part 60. The shaft swinging part 60 swings the shaft 40 so that the crimping tool end face A1 of the crimping tool A attached to the swinging body 30 is inclined at a desired angle with respect to the reference plane S. The shaft swinging part 60 includes a movable member 61 provided on the shaft 40, an encoder 80, a plurality of permanent magnets 62, and a plurality of coils 64. The plurality of permanent magnets 62 are provided on either the device base 20 or the movable member 61, and the plurality of coils 64 are provided on either the device base 20 or the movable member 61.

Description

Technical Field

[0001] The present invention relates to an inclination adjustment device.

Background Art

[0002] Conventionally, when bonding an IC chip to a substrate, an inclination adjustment device is known that adjusts the end face of a crimping tool for bonding the IC chip to the substrate to a desired angle with respect to a reference plane on which the IC chip and the substrate are placed. For example, in Patent Document 1, a bonding device that is an inclination adjustment device is disclosed. The bonding device includes a spherical base that is a swing body, a reference following portion that is a crimping tool, and an X-Y table mechanism that is a shaft swing portion. The X-Y table mechanism has a horizontal movement table configured to be movable in the X-Y direction. Further, the bonding device has a connection mechanism that connects the X-Y table mechanism and the spherical base. The connection mechanism includes a shaft portion composed of a shaft body and a sphere disposed on the lower surface of the spherical base, a cylindrical portion that slidably supports the shaft body, and a receiving portion that slidably holds the sphere. Then, the bonding device changes the inclination of the spherical base via the connection mechanism by moving the horizontal movement table by the X-Y table mechanism, and adjusts the reference following portion to a desired angle.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In an inclination adjustment device that adjusts the inclination of a swing body by the operation of a shaft swing portion, when members that slide relative to each other are included in a member related to the swing of the swing body by the shaft swing portion, the sliding may affect the swing of the swing body. As a result, there is a risk that the accuracy of inclination adjustment of the swing body in the inclination adjustment device may decrease.

Means for Solving the Problems

[0005] A tilt adjustment device for solving the above problems comprises: a device base having a base engagement surface which is either a concave spherical surface or a convex spherical surface; a oscillating body having an oscillating body engagement surface that engages with the base engagement surface, and being held so as to be oscillating relative to the device base with the oscillating body engagement surface facing the base engagement surface; a shaft erected on the oscillating body; a shaft oscillating unit that oscillates the shaft so that the end face of a crimping tool attached to the oscillating body is tilted at a desired angle with respect to a reference plane; and a control device that controls the shaft oscillating unit, wherein the shaft oscillating unit comprises a movable member provided on the shaft and an engine that measures the displacement of the movable member relative to the device base. The encoder comprises a plurality of permanent magnets provided on either the device base or the movable member, and a plurality of coils provided on the other of the device base or the movable member, each facing the plurality of permanent magnets. The control device is connected to the plurality of coils and configured to control the current value supplied to the coils. The shaft oscillating part moves the movable member by electromagnetic force from the permanent magnets and the coils energized with a current value controlled by the control device, and positions the movable member so that the end face is at the desired angle with respect to the reference plane within the measurement range of the encoder.

[0006] In the tilt adjustment device, the multiple permanent magnets are preferably provided on the movable member, and the multiple coils are preferably provided on the device base. In the tilt adjustment device, the multiple permanent magnets are preferably interposed between the oscillating body and the multiple coils in the axial direction of the device base.

[0007] In the tilt adjustment device, the shaft oscillating portion is composed of a plurality of coils and a plurality of permanent magnets and may have a first drive unit that moves the movable member in a first direction perpendicular to the axial direction, and a second drive unit that is composed of a plurality of coils and a plurality of permanent magnets and moves the movable member in a second direction perpendicular to the axial direction and the first direction, respectively.

[0008] In the tilt adjustment device, the device base has a porous portion that forms the base engagement surface and a bearing air supply / discharge chamber that communicates with the outside of the device base through the porous portion, and it is preferable that the oscillating body can be attracted to the base engagement surface by creating a negative pressure in the bearing air supply / discharge chamber.

[0009] The tilt adjustment device may further have a locking mechanism, the locking mechanism comprising a locking piston provided on the device base so as to be reciprocating in the axial direction, and a locking holding member configured to press the oscillating body against the base engagement surface in conjunction with the locking piston.

[0010] In the tilt adjustment device, the shaft oscillating part has two first drive units and two second drive units, the two first drive units are arranged side by side in the second direction with the shaft interposed between one first drive unit and the other first drive unit, and the two second drive units are arranged side by side in the first direction with the shaft interposed between one second drive unit and the other second drive unit.

[0011] In the tilt adjustment device, the control device is preferably configured to control the current value supplied to each of the plurality of coils included in at least one of the first drive unit and the second drive unit, for each coil.

[0012] In the tilt adjustment device, the oscillating body has one or more anti-rotation pins on its outer circumferential surface, and the device base has an anti-rotation ring having a notch formed therein that engages with the anti-rotation pins, which is rotatably attached to the end of the device base and restricts the rotation of the oscillating body by the engagement of the anti-rotation pins with the notch.

[0013] In the tilt adjustment device, the device base further includes a cover member provided on the opposite side of the end of the device base from the end on which the anti-rotation ring is provided, and the cover member is provided on the surface facing the permanent magnet via the coil and is a magnetic biasing part magnetized by the permanent magnet, and preferably has a magnetic biasing part that presses the anti-rotation pin against the anti-rotation ring by applying magnetic force to the permanent magnet. [Effects of the Invention]

[0014] According to the present invention, the accuracy of tilt adjustment can be improved. [Brief explanation of the drawing]

[0015] [Figure 1] Figure 1 is an exploded perspective view showing the tilt adjustment device. [Figure 2] Figure 2 is a cross-sectional view showing the tilt adjustment device and the reference plane. [Figure 3] Figure 3 is a cross-sectional view showing the tilt adjustment device and the reference plane. [Figure 4] Figure 4 is an enlarged cross-sectional view showing the tilt adjustment device. [Figure 5] Figure 5 is a top view showing the tilt adjustment device. [Figure 6] Figure 6 is a bottom view showing the tilt adjustment device. [Figure 7] Figure 7 is an enlarged cross-sectional view showing the tilt adjustment device in the modified example. [Modes for carrying out the invention]

[0016] Hereinafter, an embodiment of the tilt adjustment device will be described. <Overall view of the tilt adjustment device> As shown in FIGS. 1 and 2, the tilt adjustment device 10 includes a device base 20, a swing body 30, a shaft 40, a lock mechanism 50, a shaft swing portion 60, and a control device 90.

[0017] <Device base> The device base 20 includes a base body 201, a cover member 26, and an encoder installation portion 84. The base body 201 has a block shape. The cover member 26 and the encoder installation portion 84 are fixed to the base body 201.

[0018] The base body 201 defines an accommodation space 20a. The accommodation space 20a penetrates the base body 201. Hereinafter, the central axis of the base body 201, which is the axis along which the accommodation space 20a extends through the base body 201, is defined as the base axis LB. The base axis LB extends parallel to the opening direction of the accommodation space 20a. Further, the direction in which the base axis LB extends is described as the base axis direction D3. The base axis direction D3 is the axial direction of the device base 20. The base body 201 has a first base end face 21 at one end in the base axis direction D3 and a second base end face 22 at the other end in the base axis direction D3. The accommodation space 20a opens to the outside of the base body 201 at each of the first base end face 21 and the second base end face 22. The first base end face 21 is the opposite face of the second base end face 22 in the base axis direction D3. A cover member 26 is attached to the second base end face 22.

[0019] As shown in FIG. 2, the first base end face 21 has a base engagement surface 23. The base engagement surface 23 constitutes the central portion of the first base end face 21 when viewed from the base axis direction D3. The accommodation space 20a opens at the base engagement surface 23 of the first base end face 21.

[0020] The base engagement surface 23 is a concave sphere. In other words, the device base 20 has a base engagement surface 23 that is either a concave sphere or a convex sphere. In this embodiment, the base engagement surface 23 is a concave sphere. The base engagement surface 23 is the portion of the first base end surface 21 that is recessed compared to the surrounding area.

[0021] The device base 20 has a bulge 27. The bulge 27 is formed when a portion of the inner surface of the base body 201 that defines the accommodation space 20a bulges outwards toward the inside of the device base 20, specifically toward the base axis LB. The bulge 27 is formed in the base axis direction D3, near the first base end face 21.

[0022] The device base 20 has a porous portion 24 in the base axial direction D3, closer to the first base end face 21 than the bulging portion 27. The porous portion 24 has a plurality of through holes (not shown). The porous portion 24 is annular. The porous portion 24 has a surface that is exposed to the outside of the housing space 20a, and the base engagement surface 23 is formed by this exposed surface.

[0023] The device base 20 has an air supply and exhaust chamber 20b for the bearing. The porous portion 24 and the bulging portion 27 define the air supply and exhaust chamber 20b for the bearing inside the device base 20. The air supply and exhaust chamber 20b for the bearing is defined by the fact that a recess formed in the bulging portion 27 near the first base end face 21 is closed by the porous portion 24. The air supply and exhaust chamber 20b for the bearing communicates with the outside of the device base 20 via the porous portion 24. The air supply and exhaust chamber 20b for the bearing communicates with the outside of the device base 20 through multiple through holes in the porous portion 24.

[0024] As shown in Figure 1, the device base 20 has four base sides 25 on its outer surface, distinct from the first base end face 21 and the second base end face 22. The device base 20 has a bearing port 25a, a locking port 25b, and an anti-rotation port 25c on one of the base sides 25.

[0025] The four base sides 25 are parallel to the base axis LB. Of the four base sides 25, the direction perpendicular to the base side 25 having the bearing port 25a, the locking port 25b, and the anti-rotation port 25c is described as the first direction D1. The direction perpendicular to both the first direction D1 and the base axis direction D3 is described as the second direction D2.

[0026] As shown in Figure 2, the bearing port 25a communicates with the bearing air supply and exhaust chamber 20b through the inside of the device base 20. The bearing port 25a is connected to a pressure supply source (not shown) located outside the device base 20, and also connects the pressure supply source to the bearing air supply and exhaust chamber 20b.

[0027] The locking port 25b passes through the inside of the device base 20 and communicates with the locking air supply and exhaust chamber 50a, which will be described later. The locking port 25b is connected to a pressure supply source and also connects the pressure supply source to the locking air supply and exhaust chamber 50a.

[0028] The anti-rotation port 25c is connected to an anti-rotation passage 20c formed inside the device base 20. The anti-rotation port 25c connects the anti-rotation passage 20c to a pressure supply source. The anti-rotation passage 20c is open in the portion of the first base end face 21 that is not formed by the base engagement surface 23.

[0029] The bearing port 25a, the locking port 25b, and the anti-rotation port 25c may be connected to a single pressure supply source, or they may be connected to three different pressure supply sources. In this embodiment, it is assumed that the bearing port 25a, the locking port 25b, and the anti-rotation port 25c are connected to a single pressure supply source. This pressure supply source is configured to allow independent control of the pressure supplied to the bearing port 25a, the locking port 25b, and the anti-rotation port 25c.

[0030] The cover member 26 is made of a magnetic material. The cover member 26 is plate-shaped. The thickness direction of the cover member 26 coincides with the base axis direction D3. The cover member 26 is fixed to the device base 20 by four fixing members 26a shown in Figure 1. The cover member 26 closes the portion of the housing space 20a that opens to the second base end face 22.

[0031] The cover member 26 has an inner surface 261. The inner surface 261 is the surface of the cover member 26 that faces the direction of the base body 201 in the thickness direction. As shown in Figure 1, the cover member 26 has a plurality of grooves 262 on its inner surface 261. The grooves 262 are recessed portions of the inner surface 261. The cover member 26 has eight grooves 262. The eight grooves 262 can be divided into four grooves 262 extending in a first direction D1 and four grooves 262 extending in a second direction D2. The eight grooves 262 are formed near the four edges of the cover member 26. In the portion of the cover member 26 near each edge, there is a pair of grooves 262 extending in a direction perpendicular to that edge. In other words, the cover member 26 can also be said to have four pairs of grooves 262.

[0032] The cover member 26 has magnetic biasing portions 263. The function of the magnetic biasing portions 263 will be described in detail later. In Figure 1, the magnetic biasing portions 263 are shown by dashed lines. The cover member 26 has magnetic biasing portions 263 in the portion sandwiched by a pair of grooves 262, and in the portion adjacent to that portion with respect to each groove 262 as the boundary. In other words, the cover member 26 has three magnetic biasing portions 263 for each pair of grooves 262.

[0033] The encoder mounting section 84 is a plate-shaped body provided inside the base body 201. The encoder mounting section 84 is interposed between the cover member 26 and the bulging section 27 in the base axial direction D3. The encoder mounting section 84 is spaced apart from the bulging section 27 and the cover member 26.

[0034] As shown in Figure 2, the device base 20 is provided with a cylindrical retaining member 28. The retaining member 28 is housed in a housing space 20a. The retaining member 28 is attached to the bulging portion 27 and is held by the base body 201. The retaining member 28 holds a retaining magnet 281. The retaining magnet 281 is provided on the portion of the retaining member 28 that is closer to the first base end face 21 in the base axial direction D3.

[0035] <Oscillating body and shaft> The oscillating body 30 is cylindrical. The oscillating body 30 is magnetic. The oscillating body 30 has a tool mounting surface 31 and an oscillating body engagement surface 32 in the direction in which its central axis extends. In the direction in which the central axis of the oscillating body 30 extends, the oscillating body engagement surface 32 is the opposite surface of the tool mounting surface 31. The oscillating body 30 has its oscillating body engagement surface 32 facing the base engagement surface 23. The oscillating body 30 is positioned parallel to the device base 20 in the axial direction of the device base 20. The device base 20 and the oscillating body 30 are aligned on the central axis of the oscillating body 30.

[0036] The oscillating body 30 has a base portion 34 that forms the end of the oscillating body 30 opposite to the oscillating body engagement surface 32. The base portion 34 is the part of the oscillating body 30 that includes the tool mounting surface 31.

[0037] A crimping tool A is mounted on the tool mounting surface 31. The crimping tool A is shown by a dashed line in Figures 1 and 2. The crimping tool A has a crimping tool end face A1 on the opposite side of the surface facing the tool mounting surface 31, which is the end face of the crimping tool A. The tilt adjustment device 10 is positioned such that the crimping tool end face A1 is aligned with the reference surface S in the base axis direction D3.

[0038] The oscillating body engagement surface 32 is a convex spherical surface. The oscillating body engagement surface 32 engages with the base engagement surface 23. The radius of curvature of the base engagement surface 23 and the radius of curvature of the oscillating body engagement surface 32 are the same. Both the base engagement surface 23 and the oscillating body engagement surface 32 are parts of a sphere centered at the point where the central axis of the oscillating body 30 intersects with the end face A1 of the crimping tool.

[0039] As shown in Figure 1, the oscillating body 30 has one or more anti-rotation pins 33 on its outer circumferential surface. In this embodiment, the oscillating body 30 has two anti-rotation pins 33. Note that only one of the two anti-rotation pins 33 is shown in Figure 1. The anti-rotation pins 33 are cylindrical bodies protruding from the outer circumferential surface of the oscillating body 30. The anti-rotation pins 33 are magnetic. The central axis of the anti-rotation pins 33 is perpendicular to the central axis of the oscillating body 30. The extension of the central axis of one anti-rotation pin 33 is located on the extension of the central axis of the other anti-rotation pin 33.

[0040] As shown in Figure 2, the oscillating body 30 has a locking oscillating body chamber 30a. The locking oscillating body chamber 30a is open at the oscillating body engagement surface 32. The oscillating body 30 has a locking oscillating body inner surface 35 in a portion of the inner surface that defines the locking oscillating body chamber 30a. The locking oscillating body inner surface 35 is oriented in the direction of the base portion 34 in the direction in which the central axis of the oscillating body 30 extends.

[0041] The shaft 40 is cylindrical. The shaft 40 is erected on the oscillating body 30. The shaft 40 has a base end attached to the base portion 34, and a tip that protrudes from the oscillating body engagement surface 32 to the outside of the locking oscillating body chamber 30a. The tip of the shaft 40 protrudes from the locking oscillating body chamber 30a and is inserted into the housing space 20a by passing through the inside of the retaining member 28.

[0042] The oscillating body 30 is held relative to the device base 20 by the magnetic force of the holding magnet 281, with the tip of the shaft 40 inserted into the housing space 20a. The outer surface of the shaft 40 is spaced apart from other members within the housing space 20a. Therefore, the shaft 40 can oscillate within the housing space 20a without contacting other members. As the shaft 40 oscillates, the oscillating body 30 oscillates along the base engagement surface 23. In other words, the oscillating body 30 is held so as to be able to oscillate relative to the device base 20.

[0043] The oscillating body 30 oscillates around the pivot axis C as its pivot center. The pivot axis C is an axis that passes through the center of curvature of the oscillating body engagement surface 32 and is perpendicular to the base axis LB. In other words, the pivot axis C is an axis that passes through the point where the central axis of the oscillating body 30 intersects with the crimping tool end face A1 and is perpendicular to the base axis LB. Figures 2, 3, and 6 illustrate an example of a pivot axis C, showing a pivot axis C extending in the second direction D2. In the cases of Figures 2, 3, and 6, the oscillating body 30 oscillates in the first direction D1 around the pivot axis C as its pivot center. Note that the direction in which the pivot axis C extends is not limited to the second direction D2. The direction in which the pivot axis C extends is arbitrary as long as it is perpendicular to the base axis LB. In other words, the oscillating body 30 is held in relation to the device base 20 so as to be able to swing around an axis that intersects the base axis LB with the crimping tool end face A1, and is perpendicular to the base axis LB.

[0044] <Locking mechanism> As shown in Figure 2, the locking mechanism 50 includes a locking piston 51, a locking shaft 52, and a locking retaining member 53.

[0045] The locking piston 51 has a piston body portion 511 housed in a housing space 20a and a piston connecting portion 512 erected in the center of the piston body portion 511. The locking piston 51 is mounted on the device base 20 so as to be able to reciprocate in the base axis direction D3.

[0046] The piston body portion 511 is a plate-shaped body. The thickness direction of the piston body portion 511 coincides with the base axis direction D3. The piston body portion 511 is aligned with the bulge portion 27 in the base axis direction D3. The piston body portion 511 has a first sealing member 54. The first sealing member 54 seals the space between the piston body portion 511 and the device base 20. The piston connecting portion 512 has male threads formed on its outer circumference and is a cylindrical body with the base axis LB as its central axis. The piston connecting portion 512 penetrates the holding member 28, and the end on the oscillating body 30 side is inserted into the locking oscillating body chamber 30a.

[0047] The locking shaft 52 is cylindrical. The locking shaft 52 is connected to the outer surface of the piston connecting portion 512 by an internal thread on its inner surface. This allows the locking shaft 52 to move in conjunction with the locking piston 51. The locking shaft 52 passes through the retaining member 28, and the end on the oscillating body 30 side is inserted into the locking oscillating body chamber 30a. The space between the locking shaft 52 and the retaining member 28 is sealed by the second sealing member 55. The locking shaft 52 has a locking convex spherical surface 521 on the outer surface of the end inserted into the locking oscillating body chamber 30a.

[0048] The device base 20 has a locking air supply and discharge chamber 50a. The locking air supply and discharge chamber 50a is defined by a bulge 27, a retaining member 28, a locking piston 51, and a locking shaft 52. The first sealing member 54 and the second sealing member 55 prevent the exchange of air between the locking air supply and discharge chamber 50a and the housing space 20a.

[0049] The shaft 40 passes through the locking piston 51 and the locking shaft 52. The inner surfaces of the locking piston 51 and the locking shaft 52 surround the shaft 40 while being spaced apart from its outer surface. In other words, the shaft 40 can swing without contacting the locking piston 51 and the locking shaft 52.

[0050] The locking retaining member 53 is provided at the end of the locking shaft 52 that is inserted into the locking oscillating body chamber 30a. The locking retaining member 53 is housed in the locking oscillating body chamber 30a. The locking retaining member 53 has a retaining flange portion 56. The retaining flange portion 56 is formed by a bulge in a portion of the outer circumferential surface of the locking retaining member 53. The retaining flange portion 56 has a contact surface 561 that faces the inner surface 35 of the locking oscillating body.

[0051] The locking retaining member 53 has a locking concave spherical surface 531 on its inner circumferential surface. The locking concave spherical surface 531 engages with the locking convex spherical surface 521. Therefore, the locking retaining member 53 is pivotably mounted on the locking shaft 52. The locking convex spherical surface 521 and the locking concave spherical surface 531 are each a part of a sphere centered at the point where the base axis LB intersects with a virtual plane having a contact surface 561 in part.

[0052] <Anti-rotation ring> As shown in Figures 1 and 2, the device base 20 has an anti-rotation ring 57. The anti-rotation ring 57 is an annular shape. The anti-rotation ring 57 is installed on the first base end face 21 of the device base 20. Therefore, it can be said that the cover member 26 is installed on the opposite side of the end of the device base 20 from where the anti-rotation ring 57 is installed. The anti-rotation ring 57 surrounds the oscillating body 30. The anti-rotation ring 57 has a ring end face 571 that faces the first base end face 21. The anti-rotation ring 57 has a flange formed on it to enlarge the area of ​​the ring end face 571. The ring end face 571 and the first base end face 21 are configured to form a metal-to-metal seal between the ring end face 571 and the first base end face 21.

[0053] As shown in Figures 1 and 6, the anti-rotation ring 57 is attached to the device base 20 by two ring-retaining pins 58. The ring-retaining pins 58 are made of magnetic material. The ring-retaining pins 58 penetrate the anti-rotation ring 57, with their tips inserted into the device base 20 from the first base end face 21, and their base ends have flange portions 581 as shown in Figure 6. The holes in the anti-rotation ring 57 through which the ring-retaining pins 58 penetrate are elongated holes extending radially to the anti-rotation ring 57. These elongated holes are formed in the flange of the anti-rotation ring 57. The anti-rotation ring 57 is slidable relative to the device base 20, with its inner circumferential surface defining the elongated hole aligned with the ring-retaining pins 58.

[0054] The anti-rotation ring 57 is immovably attached to the end of the device base 20. The anti-rotation ring 57 is attached to the device base 20 so as to be able to reciprocate in the direction in which the ring retaining pin 58 extends. The anti-rotation ring 57 can be in two states: one in which the opposite side of the ring end face 571 is supported by the flange portion 581 of the ring retaining pin 58 and is separated from the device base 20, and another in which the ring end face 571 is in contact with the first base end face 21. The anti-rotation ring 57 transitions from one state to the other by reciprocating in the direction in which the ring retaining pin 58 extends.

[0055] As shown in Figure 2, the anti-rotation ring 57 has a ring groove 573 at its ring end face 571 that opens toward the first base end face 21. The ring groove 573 is formed around the entire circumference of the anti-rotation ring 57. A portion of the ring groove 573 is aligned with the portion of the first base end face 21 that is opened by the anti-rotation passage 20c, in the base axis direction D3.

[0056] As shown in Figures 1 and 6, the anti-rotation ring 57 has two notches 574 formed by cutting out the opposite side of the ring end face 571. Note that in Figure 1, only one of the two notches 574 is shown. In the anti-rotation ring 57, the line connecting the two notches 574 is perpendicular to the line connecting the two elongated holes. An anti-rotation pin 33 is inserted through each of the two notches 574.

[0057] The anti-rotation ring 57 has two notches 574, and each notch 574 engages with one anti-rotation pin 33. In other words, the anti-rotation ring 57 has notches 574 formed therein that engage with each of the two anti-rotation pins 33. The anti-rotation pins 33 engage with the notches 574 and their tips protrude from the notches 574 on the outer circumferential surface of the anti-rotation ring 57.

[0058] As shown in Figure 6, the anti-rotation ring 57 has two first anti-rotation magnets 575 and two second anti-rotation magnets 576. The first anti-rotation magnets 575 are provided in the circumferential direction of the anti-rotation ring 57, adjacent to each notch 574. The first anti-rotation magnets 575 attract the portion of the anti-rotation pin 33 that protrudes from the notch 574 by magnetic force. The two first anti-rotation magnets 575 are arranged so as to rotate the oscillating body 30 in the circumferential direction of the anti-rotation ring 57 by this magnetic force. In other words, when the anti-rotation ring 57 is viewed from the base axis direction D3, each first anti-rotation magnet 575 is interposed between the two notches 574 in the circumferential direction of the anti-rotation ring 57.

[0059] The second anti-rotation magnet 576 is located on the opposite side of the ring end face 571, in the circumferential direction of the anti-rotation ring 57, adjacent to the two ring-retaining pins 58. The second anti-rotation magnet 576 attracts the adjacent ring-retaining pins 58 by magnetic force. When the anti-rotation ring 57 is viewed from the base axis direction D3, each second anti-rotation magnet 576 is interposed between the two ring-retaining pins 58 in the circumferential direction of the anti-rotation ring 57. The second anti-rotation magnet 576 attempts to rotate the anti-rotation ring 57 in the circumferential direction by magnetic force. Due to this magnetic force, the anti-rotation ring 57 presses the inner circumferential surface of the elongated hole against the ring-retaining pins 58.

[0060] <Shaft oscillating part> As shown in Figures 1 and 2, the shaft oscillating section 60 includes a movable member 61, two first drive units 71, two second drive units 72, and an encoder 80. The shaft oscillating section 60 is located in the portion of the housing space 20a closer to the second base end face 22.

[0061] As shown in Figure 1, the movable member 61 is a plate-like body. The movable member 61 has a cross shape with portions extending in a first direction D1 and a second direction D2. The movable member 61 is provided on the shaft 40. The thickness direction of the movable member 61 coincides with the direction in which the central axis of the shaft 40 extends.

[0062] As shown in Figure 2, the movable member 61 is attached to the tip of the shaft 40 and is housed in the housing space 20a. Hereafter, the portion of the housing space 20a in which the movable member 61 is housed will be referred to as the gap 20d. The gap 20d is the portion of the housing space 20a closer to the end face 22 of the second base.

[0063] The movable member 61 is interposed between the cover member 26 and the locking piston 51 in the base axial direction D3. The movable member 61 is attached to the portion of the shaft 40 that protrudes from the locking piston 51.

[0064] As shown in Figure 1, the movable member 61 has two first mounting portions 611 and two second mounting portions 612 that face the direction of the cover member 26 in the thickness direction. The two first mounting parts 611 are aligned in the second direction D2. The two first mounting parts 611 are spaced apart in the second direction D2. The two first mounting parts 611 are provided near the two edges of the movable member 61 in the second direction D2.

[0065] The two second mounting parts 612 are aligned in the first direction D1. The two second mounting parts 612 are spaced apart in the first direction D1. The two second mounting parts 612 are provided near the two edges of the movable member 61 in the first direction D1.

[0066] As shown in Figures 1 and 2, the first drive unit 71 is composed of a plurality of permanent magnets 62 installed on the first mounting unit 611, and a plurality of coils 64 facing these permanent magnets 62. The second drive unit 72 is composed of a plurality of permanent magnets 62 installed on the second mounting unit 612, and a plurality of coils 64 facing these permanent magnets 62. In other words, the shaft oscillating unit 60 has a plurality of permanent magnets 62 and a plurality of coils 64.

[0067] In this embodiment, the shaft oscillating section 60 has 12 permanent magnets 62 and 8 coils 64. In this specification, a loop-shaped body in which a conductor is wound one or more times around a single axis is counted as one coil 64.

[0068] Of the two first drive units 71, the permanent magnet 62 and coil 64 constituting one first drive unit 71 are different from the permanent magnet 62 and coil 64 constituting the other first drive unit 71. Similarly, of the two second drive units 72, the permanent magnet 62 and coil 64 constituting one second drive unit 72 are different from the permanent magnet 62 and coil 64 constituting the other second drive unit 72. Furthermore, the permanent magnet 62 and coil 64 constituting the two first drive units 71 are different from the permanent magnet 62 and coil 64 constituting the two second drive units 72.

[0069] In the shaft oscillating section 60, multiple permanent magnets 62 are provided on either the device base 20 or the movable member 61, and multiple coils 64 are provided on the other of the device base 20 or the movable member 61. In this embodiment, multiple permanent magnets 62 are provided on the movable member 61, and multiple coils 64 are provided on the device base 20.

[0070] <Permanent Magnet> The permanent magnet 62 is a long plate-shaped body. Of the two faces of the permanent magnet 62 in the thickness direction, one face is the north pole and the other face is the south pole. Three permanent magnets 62 provided in one first mounting section 611 constitute one first drive section 71, and three permanent magnets 62 provided in the other first mounting section 611 constitute the other first drive section 71. Multiple permanent magnets 62 constituting the second drive section 72 are provided in the second mounting section 612. Permanent magnets 62 provided in one second mounting section 612 constitute one second drive section 72, and permanent magnets 62 provided in the other second mounting section 612 constitute the other second drive section 72.

[0071] Each permanent magnet 62 is installed on the movable member 61 such that the thickness direction of the permanent magnet 62 coincides with the thickness direction of the movable member 61. Each permanent magnet 62 has one pole surface exposed and the other pole surface, which is the opposite side of the exposed pole surface, facing the movable member 61. The three permanent magnets 62 in each first mounting section 611 consist of one permanent magnet 62 with its north pole surface exposed and two permanent magnets 62 with their south pole surfaces exposed. In each first mounting section 611, the one permanent magnet 62 with its north pole surface exposed is interposed between the two permanent magnets 62 with their south pole surfaces exposed in the first direction D1.

[0072] Each second mounting section 612 consists of three permanent magnets 62, one with its north pole exposed and two permanent magnets 62 with their south poles exposed. In each second mounting section 612, the one permanent magnet 62 with its north pole exposed is interposed between the two permanent magnets 62 with their south poles exposed in the second direction D2.

[0073] <coil> Multiple coils 64 are provided on a substrate 63 installed on a cover member 26. The thickness direction of the substrate 63 coincides with the base axis direction D3. The multiple coils 64 are provided on the surface of the substrate 63 opposite to the surface facing the cover member 26.

[0074] The substrate 63 and the multiple coils 64 are interposed between the permanent magnet 62 and the cover member 26 in the base axis direction D3. In other words, the multiple permanent magnets 62 are interposed between the multiple coils 64 and the oscillating body 30 in the base axis direction D3.

[0075] Multiple coils 64 are provided on the substrate 63 at positions facing multiple permanent magnets 62. Two coils 64 constituting the first drive unit 71 are installed on the portion of the substrate 63 facing each first mounting portion 611. The two coils 64 face the three permanent magnets 62 installed on the first mounting portion 611 facing the two coils 64. The two coils 64 are aligned in a first direction D1 on the substrate 63. The two first drive units 71 are aligned in a second direction D2. A shaft 40 is interposed between one first drive unit 71 and the other first drive unit 71.

[0076] Two coils 64 constituting the second drive unit 72 are installed on the portion of the substrate 63 facing each second mounting portion 612. The two coils 64 face three permanent magnets 62 installed on the second mounting portion 612 facing the two coils 64. The two coils 64 are aligned in the second direction D2 on the substrate 63. The two second drive units 72 are aligned in the first direction D1. A shaft 40 is interposed between one second drive unit 72 and the other second drive unit 72.

[0077] Thus, four pairs of coils 64, each included in the first drive unit 71 or the second drive unit 72, are provided on the substrate 63. Each pair of coils 64 faces the three permanent magnets 62 in the base axis direction D3.

[0078] As shown in Figure 5, each permanent magnet 62 is aligned in the base axis direction D3 with the portion of the opposing coil 64 that extends in the longitudinal direction of the permanent magnet 62. More specifically, in the case of the three permanent magnets 62 installed in the first installation section 611, each permanent magnet 62 is directly facing in the thickness direction with the portion of the opposing coil 64 that extends in the second direction D2. Similarly, in the case of the three permanent magnets 62 installed in the second installation section 612, each permanent magnet 62 is directly facing in the thickness direction with the portion of the opposing coil 64 that extends in the first direction D1. Note that in Figure 5, the cover member 26 is not shown, and the substrate 63 is indicated by a dashed line.

[0079] As shown in Figure 1, the substrate 63 has a portion that protrudes outside the housing space 20a by penetrating the base side surface 25, which is provided with bearing ports 25a, locking ports 25b, and anti-rotation ports 25c. The substrate 63 has a substrate connection portion 631 in the portion that protrudes from the housing space 20a. Power is supplied to the substrate 63 via the substrate connection portion 631. The power supplied to the substrate 63 is then supplied to each coil 64.

[0080] When power is supplied to the coil 64 constituting the first drive unit 71, the permanent magnet 62 of the first mounting unit 611 is subjected to the magnetic force of the permanent magnet 62 and the electromagnetic force caused by the current flowing in the second direction D2 of the opposing coil 64. The magnetic field lines originating from the permanent magnet 62 extend in the base axis direction D3 from the exposed magnetic pole surface. Therefore, an electromagnetic force in the first direction D1 acts on the permanent magnet 62. In other words, an electromagnetic force in the first direction D1 acts on the permanent magnet 62 constituting the first drive unit 71. As a result, the first drive unit 71 moves the movable member 61 in the first direction D1.

[0081] When power is supplied to the coil 64 constituting the second drive unit 72, the permanent magnet 62 of the second mounting unit 612 is subjected to an electromagnetic force caused by the magnetic force of the permanent magnet 62 and the current flowing in the first direction D1 of the opposing coil 64. The magnetic field lines originating from the permanent magnet 62 extend in the base axis direction D3 from the exposed magnetic pole surface. Therefore, an electromagnetic force in the second direction D2 acts on the permanent magnet 62. In other words, an electromagnetic force in the second direction D2 acts on the permanent magnet 62 constituting the second drive unit 72. As a result, the second drive unit 72 moves the movable member 61 in the second direction D2.

[0082] Magnetic flux from the permanent magnet 62 flows through the cover member 26. The cover member 26 and the permanent magnet 62 constitute a magnetic circuit. For example, the magnetic flux emitted from the permanent magnet 62 with its north pole exposed passes through the cover member 26 and enters the permanent magnet 62 adjacent to it, which has its south pole exposed. Therefore, the portion of the cover member 26 facing the permanent magnet 62 has a magnetic pole opposite to the magnetic pole of the surface of the permanent magnet 62 that is exposed.

[0083] The magnetic biasing portion 263 is provided on the surface of the cover member 26 that faces the permanent magnet 62 via the coil 64. The cover member 26 has one magnetic biasing portion 263 for each permanent magnet 62. Each magnetic biasing portion 263 is magnetized by the corresponding permanent magnet 62. For example, the magnetic biasing portion 263 corresponding to a permanent magnet 62 with its north pole exposed has its south pole facing the permanent magnet 62. Similarly, the magnetic biasing portion 263 corresponding to a permanent magnet 62 with its south pole exposed has its north pole facing the permanent magnet 62.

[0084] As shown in Figure 1, each magnetic biasing portion 263 is positioned so as to be slightly offset from the portion of the cover member 26 that is directly opposite the permanent magnet 62 in the thickness direction of the permanent magnet 62. More specifically, each magnetic biasing portion 263 is positioned in the cover member 26 so as to be displaced by a certain angle around the base axis LB relative to the corresponding permanent magnet 62.

[0085] <Encoder> As shown in Figure 1, the encoder 80 includes an encoder substrate 81, a first detection unit 821, a second detection unit 822, a first encoder scale 831, and a second encoder scale 832. The encoder 80 is optical. The encoder 80 is mounted on the device base 20. The encoder 80 is interposed between the locking piston 51 and the movable member 61 in the base axial direction D3.

[0086] The encoder board 81 is installed in the encoder mounting section 84. The encoder mounting section 84 is provided on the base body 201 and is interposed between the locking piston 51 and the movable member 61 in the base axis direction D3. The encoder mounting section 84 has the encoder board 81 on a surface facing the direction of the movable member 61 in the base axis direction D3. In other words, the encoder board 81 is interposed between the encoder mounting section 84 and the movable member 61.

[0087] The encoder board 81 and encoder mounting section 84 are positioned so as to be spaced apart from the locking piston 51 and the movable member 61 in the base axis direction D3. The encoder board 81 and encoder mounting section 84 are positioned so as not to interfere with the operation of the movable member 61 and the locking piston 51. The shaft 40 passes through the encoder board 81 and encoder mounting section 84.

[0088] The first detection unit 821 and the second detection unit 822 are installed on the surface of the encoder substrate 81 facing the movable member 61. The first detection unit 821 is aligned with one of the two second mounting units 612 in the base axis direction D3. The second detection unit 822 is aligned with one of the two first mounting units 611 in the base axis direction D3.

[0089] The first encoder scale 831 and the second encoder scale 832 are installed on the movable member 61. The first encoder scale 831 and the second encoder scale 832 are installed on the portion of the movable member 61 facing the encoder substrate 81. The first encoder scale 831 and the second encoder scale 832 are elongated plate-shaped bodies. The thickness direction of the first encoder scale 831 coincides with the thickness direction of the movable member 61, and the longitudinal direction of the first encoder scale 831 coincides with the first direction D1. The thickness direction of the second encoder scale 832 coincides with the thickness direction of the movable member 61, and the longitudinal direction of the second encoder scale 832 coincides with the second direction D2.

[0090] The first encoder scale 831 is aligned with the first detection unit 821 in the base axis direction D3. The second encoder scale 832 is aligned with the second detection unit 822 in the base axis direction D3.

[0091] The first detection unit 821 and the first encoder scale 831 are positioned on the centerline of the movable member 61 extending in the first direction D1 when viewed from the base axis direction D3. The second detection unit 822 and the second encoder scale 832 are positioned on the centerline of the movable member 61 extending in the second direction D2 when viewed from the base axis direction D3.

[0092] The encoder 80 measures the displacement of the movable member 61 relative to the device base 20. The encoder 80 measures the displacement of the movable member 61 in a first direction D1 using the first detection unit 821 and the first encoder scale 831. The encoder 80 measures the displacement of the movable member 61 in a second direction D2 using the second detection unit 822 and the second encoder scale 832. The encoder 80 measures the displacement of the movable member 61 by measuring the encoder value and reference value, which will be described later, in each of the first direction D1 and the second direction D2.

[0093] The range in which the encoder 80 can measure the displacement of the movable member 61 is the range in which the first detection unit 821 and the first encoder scale 831 overlap when viewed from the base axis direction D3, and the range in which the second detection unit 822 and the second encoder scale 832 overlap.

[0094] The encoder board 81 has a portion that protrudes outside the housing space 20a by penetrating the base side surface 25, which is provided with bearing ports 25a, locking ports 25b, and anti-rotation ports 25c. The encoder board 81 has a signal output section 811 in the portion that protrudes from the housing space 20a. The signal output section 811 outputs the displacement of the movable member 61 in the first direction D1 and the second direction D2, as measured by the encoder 80.

[0095] The displacement of the movable member 61 is the distance from the movable member 61 in the reference state to the movable member 61 in the state that has moved from the reference state. In this embodiment, the reference state is the state in which the thickness direction of the movable member 61 coincides with the base axis direction D3. However, the setting of the reference state is not limited to this.

[0096] The encoder 80 measures the displacement of the movable member 61 by acquiring a reference value indicating the position of the movable member 61 in a reference state and an encoder value indicating the position of the movable member 61 at each time interval measured at regular intervals. The time interval at which the encoder 80 acquires the encoder value is arbitrary. The reference value and the encoder value are defined by axes extending in the first direction D1 and the second direction D2, respectively.

[0097] In the shaft oscillating section 60, the multiple permanent magnets 62, multiple coils 64, and encoder 80 are spaced apart from each other in the base axis direction D3. Therefore, the movable member 61 can operate within the gap 20d shown in Figure 2 in the first direction D1, the second direction D2, and the base axis direction D3 without sliding against other members of the tilt adjustment device 10.

[0098] The range in which the shaft oscillating unit 60 operates the movable member 61 in the first direction D1 and the second direction D2 is the range in which the displacement of the movable member 61 can be measured by the first detection unit 821 and the second detection unit 822.

[0099] <Control device> As shown in Figures 2 and 3, the control device 90 includes a drive amount calculation unit 91 and a current control unit 92. The control device 90 is connected to a sensor (not shown) and is configured to receive the measured values ​​from the sensor. In this embodiment, the measured values ​​from the sensor are the inclination direction and inclination angle of the crimping tool end face A1 with respect to the reference plane S. Alternatively, the measured values ​​from the sensor may be the distances from the reference plane S at multiple points on the crimping tool end face A1. In this case, the control device 90 is configured to calculate the inclination direction and inclination angle of the crimping tool end face A1 with respect to the reference plane S from the input distances.

[0100] The sensor can be installed at any location as long as it is capable of measuring the desired value. For example, the sensor may be installed on the crimping tool A, or on the reference surface S. Alternatively, the sensor may be installed outside the tilt adjustment device 10 and in a location different from the reference surface S. In short, the sensor just needs to be installed in a location that allows the control device 90 to obtain the amount necessary to determine the tilt direction and tilt angle of the crimping tool end face A1 relative to the reference surface S.

[0101] The control device 90 is connected to the circuit board 63. More specifically, the control device 90 is connected to the circuit board connection part 631 and controls the current value supplied to the circuit board 63. By controlling the current value supplied to the circuit board 63, the control device 90 controls the current flowing through the coil 64. In this way, the control device 90 controls the electromagnetic force in the movable member 61. In other words, the control device 90 controls the operation of the movable member 61. In this manner, the control device 90 controls the shaft oscillating part 60.

[0102] The control device 90 is connected to the encoder 80. The control device 90 is connected to the signal output unit 811, and the displacement of the movable member 61 output from the signal output unit 811 is input to the control device 90. Specifically, the control device 90 receives the reference value and encoder value of the movable member 61 as input. The encoder value is input to the control device 90 each time the encoder 80 measures the encoder value of the movable member 61. The control device 90 controls the movement of the movable member 61 by referring to the displacement of the movable member 61 via the encoder 80, thereby positioning the movable member 61.

[0103] The control device 90 has a processor and a memory unit. The processor may be, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a DSP (Digital Signal Processor). The memory unit includes RAM (Random Access Memory) and ROM (Read Only Memory). The memory unit stores program code or instructions configured to cause the processor to execute processing. The processor in the control device 90 functions as a drive amount calculation unit 91 and a current control unit 92 by executing the program code or instructions in the memory unit. The memory unit, i.e., the computer-readable medium, includes any available medium accessible by a general-purpose or dedicated computer. The control device 90 may also be composed of hardware circuits such as an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array). The control device 90, which is a processing circuit, may include one or more processors operating according to a computer program, one or more hardware circuits such as an ASIC or FPGA, or a combination thereof.

[0104] The drive amount calculation unit 91 calculates the amount by which the movable member 61 moves in order to tilt the crimping tool end face A1 to a desired angle with respect to the reference surface S, based on the measured value input from the sensor. Hereafter, the position that the movable member 61 should reach by moving based on the amount calculated by the drive amount calculation unit 91 will be referred to as the target value. In other words, the target value is a value relating to the position of the movable member 61 when the crimping tool end face A1 is tilted to a desired angle with respect to the reference surface S. The target value is defined by the axes extending in the first direction D1 and the second direction D2, respectively. Before calculating the amount by which the movable member 61 moves as described above, a reference value is set for the target value in the drive amount calculation unit 91.

[0105] The control device 90 is connected to a plurality of coils 64 and is configured to control the current value supplied to the coils 64. The control device 90 controls the current value supplied to each coil 64 by the current control unit 92. In this specification, "current value" means information including the magnitude and direction of the current.

[0106] The current value that the current control unit 92 supplies to each coil 64 is calculated by the drive amount calculation unit 91. The drive amount calculation unit 91 calculates the current value to supply to each coil 64 so that the movable member 61 moves in a direction that reduces the difference between the target value and the encoder value. The drive amount calculation unit 91 individually calculates the current value to be supplied to the coil 64 included in the first drive unit 71 and the coil 64 included in the second drive unit 72. The current control unit 92 supplies current to each coil 64 based on the results calculated by the drive amount calculation unit 91.

[0107] The drive amount calculation unit 91 calculates the above-mentioned current values ​​for each of the first drive unit 71 and the second drive unit 72. In other words, the drive amount calculation unit 91 individually calculates the current value to be supplied to the coil 64 included in the first drive unit 71 and the current value to be supplied to the coil 64 included in the second drive unit 72. The control device 90 may separately include a drive amount calculation unit 91 that calculates the current value corresponding to the first drive unit 71 and a drive amount calculation unit 91 that calculates the current value corresponding to the second drive unit 72.

[0108] The current control unit 92 supplies current to the first drive unit 71 and the second drive unit 72, respectively. The control device 90 may separately include a current control unit 92 that controls the current supplied to the first drive unit 71 and a current control unit 92 that controls the current supplied to the second drive unit 72.

[0109] When the control device 90 maintains the reference state of the movable member 61, the drive amount calculation unit 91 and the current control unit 92 perform positioning servo control to prevent the movable member 61 from moving from the reference state. As will be described in detail later, the movable member 61 operates by electromagnetic force due to the current supplied to each coil 64 and the magnetic force of the permanent magnet 62. The control device 90, with the current control unit 92, supplies current to each coil 64 so that the deviation between the encoder value and the reference value is less than or equal to a specified value when the movable member 61 has been positioned to the reference state. Here, the "deviation" between the two values ​​is the magnitude of the difference between the two values. The "specified value" is a preset value and corresponds to the amount of deviation that is allowed in that deviation.

[0110] In this specification, "positioning servo control" refers to a control method in which the control device 90 supplies current to each coil 64 for the positioning of the movable member 61. <Operation of the tilt adjustment device> As shown in Figures 2 and 3, the tilt adjustment device 10 uses a shaft oscillating section 60 to oscillate the shaft 40 so that the end face A1 of the crimping tool A attached to the oscillating body 30 is tilted at a desired angle with respect to the reference plane S. The shaft oscillating section 60 positions the movable member 61 in the first direction D1 and the second direction D2 by operating the movable member 61 in the first direction D1 and the second direction D2. By operating and positioning the movable member 61, the tilt of the end face A1 of the crimping tool with respect to the reference plane S is adjusted. In this embodiment, the desired angle is zero degrees. In other words, the shaft oscillating section 60 oscillates the shaft 40 so that the end face A1 of the crimping tool is parallel to the reference plane S. The operation of the tilt adjustment device 10 to make the end face A1 of the crimping tool parallel to the reference plane S will be described below. The tilt adjustment device 10 with the end face A1 of the crimping tool parallel to the reference plane S is shown in Figure 3.

[0111] In the initial position shown in Figure 2, the tilt adjustment device 10 is positioned such that the crimping tool end face A1 and the reference surface S are aligned on the base axis LB, and the crimping tool end face A1 and the reference surface S are spaced apart. A sensor (not shown) measures the tilt direction and tilt angle of the crimping tool end face A1 with respect to the reference surface S in the initial position. The sensor outputs the measured values ​​to the control device 90. In this embodiment, the reference surface S is tilted with respect to the crimping tool end face A1 in the initial position only in a plan view from the second direction D2.

[0112] In the initial position, a pressure supply source (not shown) pressurizes the bearing air supply / exhaust chamber 20b via the bearing port 25a, thereby pressurizing the space between the base engagement surface 23 and the oscillating body engagement surface 32. As a result, the oscillating body 30 is separated from the device base 20. The oscillating body 30 is attracted to the device base 20 by the magnetic force of the holding magnet 281. A magnetic force acts on the oscillating body 30, along with the shaft 40 and the movable member 61, from the permanent magnet 62 and the cover member 26, in the direction from the first base end surface 21 to the second base end surface 22. As a result, the oscillating body 30 maintains a state in which the oscillating body engagement surface 32 is slightly separated from the base engagement surface 23.

[0113] In the initial position, the pressure supply source creates negative pressure in the locking air supply / exhaust chamber 50a via the locking port 25b. As a result, the locking piston 51 is in contact with the bulge portion 27. The locking retaining member 53 is separated from the oscillating body 30 in the base axial direction D3.

[0114] In the initial position, the pressure supply source does not apply pressure to the anti-rotation passage 20c via the anti-rotation port 25c. In the initial position, the movable member 61 is in a reference state. In the initial position, the control device 90 supplies current to multiple coils 64. Specifically, the control device 90 performs positioning servo control so that the movable member 61 maintains the reference state. At this time, the drive amount calculation unit 91 has a reference value set as the target value.

[0115] The drive amount calculation unit 91 of the control device 90 calculates a target value for the movable member 61 required for the crimping tool end face A1 to be parallel to the reference plane S, based on the input measurement value. In the drive amount calculation unit 91, the target value is updated from the reference value to the target value for the movable member 61 required for the crimping tool end face A1 to be parallel to the reference plane S. When the target value is updated, the current control unit 92 changes the direction and magnitude of the current supplied from a power supply (not shown) to the substrate 63 via the substrate connection unit 631. As a result, the movable member 61 moves from the reference value toward the target value.

[0116] The control device 90 moves the movable member 61 until the encoder value of the movable member 61 matches the target value within a specified range. Specifically, as the movable member 61 moves, the control device 90 calculates the deviation between the target value and the encoder value each time an encoder value is input from the encoder 80 using the drive amount calculation unit 91. The control device 90 then compares this deviation with a specified value using the drive amount calculation unit 91. When the deviation is greater than the specified value, the drive amount calculation unit 91 calculates the current value to supply to each coil 64 so that the value of the deviation becomes smaller. The current control unit 92 supplies current to each coil 64 from a power supply (not shown) based on the current value calculated by the drive amount calculation unit 91.

[0117] The control device 90 controls the current supplied by the current control unit 92 to move the movable member 61 so that the encoder value of the movable member 61 becomes the target value. The movement by the control device 90 is carried out until the deviation between the encoder value and the target value falls below a specified value.

[0118] When the deviation between the encoder value and the target value falls below a specified value, the control device 90 controls the current supplied to each coil 64 to maintain the movable member 61 in the target value position. In other words, the control device 90 performs positioning servo control so that the movable member 61 does not move once the encoder value reaches the target value.

[0119] As described above, the shaft oscillating section 60 positions the movable member 61 such that the crimping tool end face A1 is at a desired angle with respect to the reference plane S within the measurement range of the encoder 80. During the operation of the tilt adjustment device 10, current flows through the multiple coils 64 included in the shaft oscillating section 60 via the substrate 63. In other words, the multiple coils 64 are energized. The current value flowing through each coil 64 is controlled by the control device 90, and therefore differs depending on whether the coil 64 is included in the first drive unit 71 or the second drive unit 72.

[0120] An electromagnetic force acts on the permanent magnet 62 included in the first drive unit 71, corresponding to the magnitude of the current flowing through the coil 64 included in the first drive unit 71. Here, the magnetic force of the permanent magnet 62 does not change due to the operation of the tilt adjustment device 10. Therefore, the magnitude of the electromagnetic force is determined by the value of the current flowing through the coil 64. Similarly, an electromagnetic force acts on the permanent magnet 62 included in the second drive unit 72, corresponding to the magnitude of the current flowing through the coil 64 included in the second drive unit 72. Since the permanent magnet 62 is fixed to the movable member 61, the electromagnetic force acting on the permanent magnet 62 also acts on the movable member 61. In this way, the movable member 61 moves due to the electromagnetic force from the permanent magnet 62 and the energized coil 64.

[0121] The first drive unit 71 moves the movable member 61 in a first direction D1 by the electromagnetic force acting on the permanent magnet 62. The second drive unit 72 moves the movable member 61 in a second direction D2 by the electromagnetic force acting on the permanent magnet 62. As the movable member 61 moves in the first direction D1 and the second direction D2, it causes the shaft 40 and the oscillating body 30 to oscillate. As a result, the crimping tool A oscillates in a direction in which the end face A1 of the crimping tool becomes parallel to the reference plane S.

[0122] When the oscillating body 30 is oscillated by the shaft oscillating part 60, the first mounting part 611 and the second mounting part 612 of the movable member 61 move slightly in the base axis direction D3 due to this oscillating motion. The movable member 61 moves slightly in the base axis direction D3 within the gap 20d without sliding against other members. In this way, the shaft oscillating part 60 absorbs the movement of the movable member 61 in the base axis direction D3 by the gap 20d.

[0123] <Operation of the locking mechanism> As shown in Figures 3 and 4, the tilt adjustment device 10 uses a locking mechanism 50 to restrict the movement of the oscillating body 30 relative to the device base 20 in order to maintain the state in which the crimping tool end face A1 is parallel to the reference plane S. In other words, the locking mechanism 50 maintains the oscillating body posture of the oscillating body 30, which is tilted at a desired angle with respect to the reference plane S. The oscillating body posture is the posture that the oscillating body 30 takes relative to the device base 20 when the crimping tool end face A1 is tilted at a desired angle with respect to the reference plane S. The oscillating body 30, whose movement relative to the device base 20 is restricted by the locking mechanism 50, is shown in Figure 4.

[0124] First, with the crimping tool end face A1 parallel to the reference plane S, the pressure supply source creates negative pressure in the bearing air supply / exhaust chamber 20b via the bearing port 25a. As a result, the oscillating body 30 is attracted to the base engagement surface 23 of the device base 20. In other words, the device base 20 is configured to attract the oscillating body 30 to the base engagement surface 23 by creating negative pressure in the bearing air supply / exhaust chamber 20b. By being attracted to the device base 20, the oscillating body 30 relative to the device base 20 is restricted.

[0125] After the oscillating body 30 is attracted to the device base 20, the pressure supply source creates positive pressure in the locking air supply / exhaust chamber 50a via the locking port 25b. As a result, the locking piston 51, the locking shaft 52, and the locking retaining member 53 move in the direction from the first base end face 21 to the second base end face 22 in the base axial direction D3. The locking retaining member 53 presses the inner surface 35 of the locking oscillating body 30 against the device base 20 by pressing it against the inner surface 35 of the locking oscillating body with the contact surface 561 of the retaining flange portion 56. As a result, the oscillating body 30 is pressed against the base engagement surface 23. In other words, the locking retaining member 53 is configured to press against the base engagement surface 23 in conjunction with the locking piston 51.

[0126] As the oscillating body 30 is pressed against the device base 20, a normal force acts on the oscillating body 30 from the device base 20. Due to the static friction caused by this normal force, the oscillating body 30 is restricted from swinging relative to the device base 20.

[0127] <Operation related to preventing rotation of the oscillating body> During the operation of the tilt adjustment device 10 to make the crimping tool end face A1 parallel to the reference plane S, the anti-rotation ring 57 restricts the rotation of the oscillating body 30 by engaging the anti-rotation pin 33 with the notch 574.

[0128] For example, consider the case where the oscillating body 30 oscillates around the pivot axis C as the pivot point. In this case, the oscillating body 30 moves in a second direction D2, with the two anti-rotation pins 33 pushing the anti-rotation ring 57 in the direction of movement of the oscillating body 30, while the ring-holding pin 58 moves along the inner surface of the elongated hole. In the process of the anti-rotation ring 57 moving in the second direction D2, the anti-rotation ring 57 moves relative to the two anti-rotation pins 33 and the ring-holding pin 58, thereby restricting the rotation of the oscillating body 30. In other words, the anti-rotation ring 57 allows linear motion associated with the oscillating body 30, while restricting the rotation of the oscillating body 30 around the central axis of the shaft 40 as the center of rotation.

[0129] In the tilt adjustment device 10, the magnetic biasing unit 263 applies a magnetic force in a direction that causes the movable member 61 to rotate around the base axis LB. The magnitude of this magnetic force is adjusted by the distance between each permanent magnet 62 in the first direction D1 and the second direction D2 and the magnetic biasing unit 263 corresponding to the permanent magnet 62. The magnetic biasing unit 263 attempts to rotate the oscillating body 30 around the base axis LB via the movable member 61 and the shaft 40. As a result, the oscillating body 30 presses the anti-rotation pin 33 against the inner surface defining the notch 574. In other words, the magnetic biasing unit 263 presses the anti-rotation pin 33 against the anti-rotation ring 57 by applying a magnetic force to the permanent magnet 62.

[0130] After the crimping tool end face A1 becomes parallel to the reference plane S by the tilt adjustment device 10, the pressure supply source creates negative pressure in the anti-rotation passage 20c via the anti-rotation port 25c, thereby causing the anti-rotation ring 57 to adhere to the first base end face 21. Furthermore, the pressure supply source creates negative pressure in the ring groove 573 which communicates with the anti-rotation port 25c. As a result, the anti-rotation ring 57 restricts the movement of the oscillating body 30 while also restricting its movement relative to the device base 20.

[0131] The first anti-rotation magnet 575, provided on the anti-rotation ring 57, attracts the anti-rotation pin 33 of the oscillating body 30. As a result, the anti-rotation pin 33 is pressed against the inner surface defining the notch 574. The second anti-rotation magnet 576, also provided on the anti-rotation ring 57, presses the inner circumferential surface of the anti-rotation ring 57 that defines the elongated hole against the ring holding pin 58.

[0132] [Effects of this embodiment] The effects of this embodiment will now be explained. (1) The shaft oscillating section 60 is operated by a plurality of permanent magnets 62 provided on either the device base 20 or the movable member 61, and a plurality of coils 64 provided on the other of the device base 20 or the movable member 61. The shaft oscillating section 60 operates the movable member 61 and oscillates the oscillating body 30 by the electromagnetic force from the plurality of permanent magnets 62 and the plurality of coils 64.

[0133] The movement of the movable member 61 is guided by the swing of the oscillating body 30 via the shaft 40 provided on the movable member 61 and the oscillating body 30. The shaft swinging part 60 can swing the oscillating body 30 in the process of positioning the movable member 61 by operating the movable member 61, without including any members that slide against the shaft 40 and the movable member 61. For example, unlike the case where the movement of the movable member 61 in the base axis direction D3 caused by the swing of the oscillating body 30 is absorbed by a member that slides against the movable member 61, the shaft swinging part 60 can avoid the sliding affecting the swing of the oscillating body 30. As a result, the shaft swinging part 60 can position the movable member 61 with high precision. Therefore, the tilt adjustment device 10 can improve the accuracy of tilt adjustment. Furthermore, since the tilt adjustment device 10 does not have any sliding members relative to the shaft 40 and the movable member 61 during the operation of the shaft oscillating part 60, wear that occurs with each operation within the tilt adjustment device 10 can be reduced. As a result, the durability of the tilt adjustment device 10 can be improved.

[0134] (2) The shaft oscillating section 60 oscillates the oscillating body 30 by moving a movable member 61 provided on the shaft 40 in a first direction D1 and a second direction D2. For example, compared to a case where a member that moves in the first direction D1 and a member that moves in the second direction D2 are stacked and these two members operate the shaft 40 and the oscillating body 30, the shaft oscillating section 60 is miniaturized in the base axis direction D3. As a result, the tilt adjustment device 10 can be made smaller.

[0135] (3) In the shaft oscillating section 60, a plurality of permanent magnets 62 are provided on the movable member 61, and a plurality of coils 64 are provided on the device base 20. Let's consider the case where a plurality of coils 64 are provided on the movable member 61 and a plurality of permanent magnets 62 are provided on the device base 20. In this case, for example, the wiring connecting the circuit board 63 and the external power supply moves together with the movement of the movable member 61. Furthermore, the circuit board 63 moves together with the coils 64 due to the movement of the movable member 61. Compared to this case, the tilt adjustment device 10 has the coils 64 and the circuit board 63 on the device base 20, which is not linked to the movable member 61. Therefore, in the tilt adjustment device 10, the wiring connected to the circuit board 63 does not move in response to the movement of the movable member 61, so interference with the device base 20 due to the movement of the wiring can be avoided.

[0136] If the wiring interferes with the movement of the movable member 61, for example, a reaction force will act on the movable member 61 due to the interference between the wiring and the device base 20. The tilt adjustment device 10 can position the movable member 61 while avoiding interference with the wiring, and therefore can position the movable member 61 with greater precision compared to the case where the wiring interferes. Similarly, if the wiring moves in response to the movement of the movable member 61, for example, a reaction force from bending and stretching the wiring itself will act on the movable member 61 as a resistive force. The tilt adjustment device 10 avoids the reaction force from bending and stretching the wiring itself acting as a resistive force on the movable member 61 because the wiring connected to the substrate 63 does not move. For this reason, the tilt adjustment device 10 can position the movable member 61 with greater precision compared to the case where the wiring moves.

[0137] Furthermore, by providing the coil 64 and circuit board 63 on the device base 20, the tilt adjustment device 10 can avoid repeated bending of the wiring with each operation. As a result, the tilt adjustment device 10 can suppress wire breakage caused by repeated bending of the wiring. In this way, the durability of the tilt adjustment device 10 can be improved by providing the coil 64 and circuit board 63 on the device base 20.

[0138] (4) Because the movable member 61 is equipped with a permanent magnet 62, no wiring for connecting to an external power source is installed on the movable member 61. As a result, the movable member 61 operates under less resistance compared to the case where such wiring is installed. For example, the movable member 61 can operate with less electromagnetic force compared to the case where the resistance of the wiring is added to the operation of the movable member 61. Since the magnitude of the electromagnetic force is determined by the current value in the coil 64, it can also be said that the movable member 61 can operate with a smaller current value compared to the above case. The tilt adjustment device 10 can suppress heat generation in the coil 64 and thermal deformation of the coil 64 and the device base 20 caused by such heat generation by reducing the current value required to operate the movable member 61. Deformation in the coil 64 may change the direction of the current flowing through the coil 64 and the direction of the electromagnetic force related to that current. Also, deformation in the device base 20 may change the position of the base engagement surface 23 and the oscillating body engagement surface 32 of the oscillating body 30. As described above, the tilt adjustment device 10 can position the movable member 61 with higher precision compared to the case where the coil 64 is provided on the movable member 61, by suppressing thermal deformation of the coil 64 and the device base 20 through the provision of a permanent magnet 62 on the movable member 61.

[0139] (5) Multiple permanent magnets 62 are interposed between the oscillating body 30 and multiple coils 64 in the base axis direction D3. As a result, the multiple permanent magnets 62 orient their magnetic poles in the direction from the first base end face 21 toward the second base end face 22 within the device base 20. For example, consider a situation where the multiple permanent magnets 62 on the movable member 61 have their magnetic poles orienting in the direction from the second base end face 22 toward the first base end face 21. In this situation, a magnetic force may be generated between the movable member 61 and other members in the housing space 20a or the device base 20, and a magnetic force may act on the movable member 61 in the direction from the second base end face 22 toward the first base end face 21. By having multiple permanent magnets 62 between the oscillating body 30 and multiple coils 64, the tilt adjustment device 10 can suppress a decrease in the accuracy of tilt adjustment caused by the oscillating body 30 moving excessively away from the device base 20 due to the magnetic force.

[0140] (6) The shaft oscillating section 60 has two first drive units 71 and two second drive units 72. As a result, the shaft oscillating section 60 can reduce the torque applied to the movable member 61 for rotation around the central axis of the shaft 40, compared to, for example, the case where it has one first drive unit 71 and one second drive unit 72. In other words, the tilt adjustment device 10 can adjust the tilt of the oscillating body 30 with higher precision by operating the movable member 61 with the shaft oscillating section 60 which has two first drive units 71 and two second drive units 72.

[0141] (7) The device base 20 has an anti-rotation ring 57 and a cover member 26. Furthermore, the device base 20 has a magnetic biasing part 263 on the cover member 26. The magnetic biasing part 263 applies a magnetic force to the movable member 61 in a direction that causes the oscillating body 30 to rotate around the central axis of the shaft 40. As a result, the oscillating body 30 presses the anti-rotation pin 33 against the inner circumferential surface of the notch 574. This pressing reduces the rattle caused by the oscillating body 30 moving relative to the anti-rotation ring 57. As a result, the tilt adjustment device 10 can suppress the decrease in the accuracy of tilt adjustment caused by this rattle.

[0142] Furthermore, unlike the first anti-rotation magnet 575 and the second anti-rotation magnet 576, the magnetic biasing unit 263 can prevent a decrease in the function of suppressing rattling in the tilt adjustment device 10 due to it falling off the outside of the device base 20.

[0143] (8) The anti-rotation ring 57 has two first anti-rotation magnets 575. The anti-rotation ring 57 can attract the anti-rotation pin 33 of the oscillating body 30 to the first anti-rotation magnets 575. This allows the tilt adjustment device 10 to reduce the rattle of the oscillating body 30 relative to the anti-rotation ring 57.

[0144] (9) The anti-rotation ring 57 has two second anti-rotation magnets 576. The anti-rotation ring 57 is pressed against the ring retaining pin 58 by the magnetic force between the second anti-rotation magnets 576 and the ring retaining pin 58. This allows the tilt adjustment device 10 to reduce rattle of the anti-rotation ring 57 relative to the device base 20.

[0145] (10) The encoder 80 has a first detection unit 821 and a first encoder scale 831 on the central axis of the movable member 61 that extends in the first direction D1 when viewed from the base axis direction D3. For example, consider the case where the first detection unit 821 and the first encoder scale 831 are positioned off the central axis. Compared to this case, the encoder 80 can accurately measure the displacement of the movable member 61 in the first direction D1 even if there is some rotation in the movable member 61. The encoder 80 also has a second detection unit 822 and a second encoder scale 832 on the central axis of the movable member 61 that extends in the second direction D2 when viewed from the base axis direction D3. The encoder 80 can accurately measure the displacement of the movable member 61 in the second direction D2, similar to the case of the first detection unit 821 and the first encoder scale 831.

[0146] [Example of changes] The above embodiment can be implemented with the following modifications. The above embodiment and the following modifications can be combined with each other to the extent that they do not contradict each other technically.

[0147] ○ The control device 90 may be configured to control the current value supplied to each of the plurality of coils 64 included in at least one of the first drive unit 71 and the second drive unit 72, on a coil-by-coil basis. For example, the control device 90 controls the current value supplied to each of the plurality of coils 64 included in the first drive unit 71 on a coil-by-coil basis. More specifically, the control device 90 makes the current value supplied to the coil 64 included in one of the first drive unit 71 different from the current value supplied to the coil 64 included in the other first drive unit 71. In this case, the encoder 80 has two first detection units 821 and two first encoder scales 831. The encoder 80 measures the displacement of the movable member 61 by one of the first drive units 71 using one first detection unit 821, and measures the displacement of the movable member 61 by the other first drive unit 71 using the other first detection unit 821.

[0148] The control device 90, configured as described above, can suppress the rotation of the movable member 61 around the central axis of the shaft 40 when operating the movable member 61. More specifically, the control device 90 can control the current values ​​supplied to the two first drive units 71 so that the values ​​measured by the two first detection units 821 match with desired accuracy. As a result, the control device 90 can suppress the rotation of the movable member 61 caused by the difference in displacement of the movable member 61 by the two first drive units 71. Consequently, the tilt adjustment device 10 can suppress the deterioration of the measurement accuracy of the encoder 80 and the decrease in the accuracy of tilt adjustment due to such rotation.

[0149] Furthermore, the control device 90 may apply torque to the movable member 61 by making the current value supplied to one of the coils 64 in the first drive unit 71 different from the current value supplied to the other coil 64 in the first drive unit 71. In other words, the control device 90 may apply torque to the movable member 61 that is related to rotation around the central axis of the shaft 40 as the center of rotation. In this case, the control device 90 can use this torque to press the anti-rotation pin 33 of the oscillating body 30 against the inner circumferential surface of the notch 574. As a result, the control device 90 can reduce rattle caused by its relative operation to the anti-rotation ring 57. Consequently, the tilt adjustment device 10 can suppress the decrease in the accuracy of tilt adjustment caused by this rattle.

[0150] ○ The arrangement of the two first anti-rotation magnets 575 in the anti-rotation ring 57 is not limited to the embodiment. For example, the two first anti-rotation magnets 575 may be arranged such that the magnetic force between each first anti-rotation magnet 575 and the anti-rotation pin 33 moves the anti-rotation ring 57 radially. Specifically, the two first anti-rotation magnets 575 may be arranged such that the anti-rotation ring 57 moves radially in the direction in which the oscillating body 30 and the anti-rotation ring 57 attract each other. In this case, the two first anti-rotation magnets 575 are arranged interposed between the two notches 574 in the circumferential direction of the anti-rotation ring 57.

[0151] ○ The arrangement of the two second anti-rotation magnets 576 in the anti-rotation ring 57 is not limited to the embodiment. For example, the two second anti-rotation magnets 576 may be arranged such that the anti-rotation ring 57 is moved radially by the magnetic force between each second anti-rotation magnet 576 and the ring retaining pin 58. In this case, the two second anti-rotation magnets 576 are arranged to be interposed between the two ring retaining pins 58 in the circumferential direction of the anti-rotation ring 57.

[0152] ○ The anti-rotation ring 57 does not necessarily have to have a notch 574. For example, the anti-rotation ring 57 may have a through hole, and the anti-rotation pin 33 of the oscillating body 30 may be inserted into the through hole.

[0153] ○ The number of anti-rotation pins 33 on the oscillating body 30 is not limited to this embodiment. The oscillating body 30 only needs to have one or more anti-rotation pins 33. In this case, the anti-rotation ring 57 should be provided with a portion that engages with the anti-rotation pins 33, in proportion to the number of anti-rotation pins 33.

[0154] ○ The tilt adjustment device 10 does not necessarily have a rotation-preventing ring 57. In this case, the control device 90 may restrict the rotation of the movable member 61, shaft 40, and oscillating body 30 around the central axis of the shaft 40 by controlling the current values ​​supplied to the multiple coils 64.

[0155] ○ The locking mechanism 50 does not necessarily have a locking shaft 52. For example, a locking retaining member 53 may be attached to the locking piston 51. In this case, the locking convex spherical surface 521 is formed at the end of the piston connecting portion 512. Also in this case, the second sealing member 55 seals the space between the piston connecting portion 512 and the retaining member 28.

[0156] ○ The tilt adjustment device 10 does not need to have a locking mechanism 50. In this case, the tilt adjustment device 10 restricts the movement of the oscillating body 30 only by attracting the oscillating body 30 to the base engagement surface 23 by creating a negative pressure in the bearing air supply and discharge chamber 20b.

[0157] ○ The cover member 26 may have a projection instead of a groove 262, thereby forming a magnetic biasing portion 263 in the portion adjacent to the projection. ○ The cover member 26 does not necessarily have to have a magnetic biasing portion 263.

[0158] ○ The number of first drive units 71 and second drive units 72 in the shaft oscillating unit 60 is not limited to the embodiment. For example, the shaft oscillating unit 60 may have one first drive unit 71 and one second drive unit 72. The shaft oscillating unit 60 may have different numbers of first drive units 71 and second drive units 72. For example, the shaft oscillating unit 60 may have one first drive unit 71 and two second drive units 72.

[0159] ○ The shaft oscillating section 60 may have a third drive unit (not shown) in addition to the first drive unit 71 and the second drive unit 72. In this case, for example, when the movable member 61 is viewed from the base axis direction D3, the first drive unit 71, the second drive unit 72, and the third drive unit are arranged to surround the shaft 40. In other words, the shaft oscillating section 60 may move the movable member 61 along three axes using the first drive unit 71, the second drive unit 72, and the third drive unit.

[0160] The number of permanent magnets 62 and coils 64 in the shaft oscillating section 60 is not limited to the embodiment. The number of permanent magnets 62 and coils 64 in the first drive unit 71 is not limited to the embodiment. The number of permanent magnets 62 and coils 64 in the second drive unit 72 is not limited to the embodiment. The number of permanent magnets 62 and coils 64 can be appropriately changed depending on, for example, the dimensions of the tilt adjustment device 10 and the magnitude of the electromagnetic force required in the shaft oscillating section 60.

[0161] ○ The multiple permanent magnets 62 do not necessarily have to be interposed between the oscillating body 30 and the multiple coils 64 in the base axis direction D3. For example, as shown in Figure 7, the multiple permanent magnets 62 may be installed on the surface of the movable member 61 that faces the direction of the first base end face 21 in the base axis direction D3, and the multiple coils 64 may be installed together with the substrate 63 in the encoder installation section 84. In this case, the encoder 80 is installed on the cover member 26.

[0162] ○ Multiple permanent magnets 62 may be provided on the device base 20, and multiple coils 64 may be provided on the movable member 61. ○ The base engagement surface 23 may be a convex spherical surface. In this case, the oscillating body engagement surface 32 is a concave spherical surface. [Explanation of Symbols]

[0163] 10...Tilt adjustment device, 20...Device base, 20b...Air supply and exhaust chamber for bearing, 23...Base engagement surface, 24...Porous part, 26...Cover member, 30...Oscillating body, 32...Oscillating body engagement surface, 33...Anti-rotation pin, 40...Shaft, 50...Locking mechanism, 51...Locking piston, 53...Locking holding member, 57...Anti-rotation ring, 60...Shaft oscillating part, 61...Movable member, 62...Multiple permanent magnets, 64...Multiple coils, 71...First drive unit, 72...Second drive unit, 80...Encoder, 90...Control device, 263...Magnetic biasing unit, 574...Notch, A...Crimping tool, A1...Crimping tool end face as end face, D1...First direction, D2...Second direction, D3...Base axis direction as axial direction, S...Reference surface.

Claims

1. A device base having a base engagement surface that is either a concave sphere or a convex sphere, A rocking body having a rocking body engagement surface that engages with the base engagement surface, and being held so as to be able to rock with respect to the base of the device while the rocking body engagement surface faces the base engagement surface, A shaft erected on the aforementioned oscillating body, A shaft oscillating part that oscillates the shaft so that the end face of the crimping tool attached to the oscillating body is inclined at a desired angle with respect to the reference plane, An inclination adjustment device having a control device for controlling the shaft oscillation part, The aforementioned shaft oscillating part is, A movable member provided on the shaft, An encoder for measuring the displacement of the movable member relative to the base of the device, A plurality of permanent magnets provided on either the base of the device or the movable member, The device is provided on either the base of the device or the movable member, and comprises a plurality of coils, each facing a plurality of permanent magnets, The control device is configured to connect to a plurality of the coils and to control the current value supplied to the coils. The shaft oscillating part moves the movable member by electromagnetic force from the permanent magnet and the coil energized with a current value controlled by the control device, and positions the movable member so that the end face is at the desired angle with respect to the reference plane within the measurement range of the encoder.

2. Multiple permanent magnets are provided on the movable member, The tilt adjustment device according to claim 1, wherein the plurality of coils are provided on the base of the device.

3. The tilt adjustment device according to claim 2, wherein the plurality of permanent magnets are interposed between the oscillating body and the plurality of coils in the axial direction of the base of the device.

4. The aforementioned shaft oscillating part is, A first drive unit comprising a plurality of coils and a plurality of permanent magnets, which moves the movable member in a first direction perpendicular to the axial direction, The tilt adjustment device according to claim 3, comprising a plurality of coils and a plurality of permanent magnets, and a second drive unit that moves the movable member in a second direction perpendicular to the axial direction and the first direction, respectively.

5. The aforementioned device base is, The porous portion forming the base engagement surface, It has a bearing air supply and exhaust chamber that communicates with the outside of the device base via the porous portion, The tilt adjustment device according to claim 4, wherein the bearing air supply and discharge chamber is made negatively pressurized, thereby enabling the oscillating body to be attracted to the base engagement surface.

6. It also has a locking mechanism, The locking mechanism is A locking piston is provided on the base of the device so as to be able to reciprocate in the axial direction, The tilt adjustment device according to claim 5, further comprising a locking holding member configured to press the oscillating body against the base engagement surface in conjunction with the locking piston.

7. The shaft oscillating section has two first drive units and two second drive units. The two first drive units are arranged side by side in the second direction with the shaft interposed between one first drive unit and the other first drive unit. The tilt adjustment device according to claim 4 or claim 6, wherein the two second drive units are arranged side by side in the first direction with the shaft interposed between one second drive unit and the other second drive unit.

8. The tilt adjustment device according to claim 7, wherein the control device is configured to control the current value supplied to each of the plurality of coils included in at least one of the first drive unit and the second drive unit for each coil.

9. The oscillating body has one or more anti-rotation pins on its outer surface, The aforementioned device base is, The tilt adjustment device according to claim 7, comprising: a rotation-retaining ring having a notch formed therein that engages with the rotation-retaining pin, which is rotatably attached to the end of the base of the device, and which restricts the rotation of the oscillating body by the engagement of the rotation-retaining pin and the notch.

10. The device base further includes a cover member provided on the opposite side of the end of the device base from the end on which the anti-rotation ring is provided, The tilt adjustment device according to claim 9, wherein the cover member is provided on a surface facing the permanent magnet via the coil and is magnetized by the permanent magnet, and has a magnetic biasing portion that presses the anti-rotation pin against the anti-rotation ring by applying magnetic force to the permanent magnet.

Images