Expanding device and method for manufacturing chips

Abstract

To provide an expander and a chip manufacturing method that can uniformly expand an expanded sheet without depending on the ease of stretching in a particular direction. [Solution] The expanding device 1 comprises a frame holding unit 10, a first pressing unit 20, and a second pressing unit 30. The first pressing unit 20 has a pair of roller portions 22 that locally press the annular region 115 of the expanded sheet 110 between the inner circumference of the frame 120 held by the frame holding unit 10 and the outer circumference of the workpiece 100 from the back surface 112 side, sandwiching the workpiece 100. The second pressing unit 30 has a pressing surface 32 that presses the workpiece 100, which is placed in the opening 121 of the frame 120 held by the frame holding unit 10, from the back surface 104 side via the expanded sheet 110.

Description

Technical Field

[0001] The present invention relates to an expand device and a method for manufacturing a chip.

Background Art

[0002] There is known an expand device that expands an expand sheet adhered to the back surface of a workpiece having a division starting point formed therein and supported by a frame having a ring-shaped outer edge, and divides the workpiece along the division starting point (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] For the workpiece, the expand sheet adhered to the back surface is radially and evenly expanded, so that a sufficient interval between the chips formed after division can be ensured. However, the expand sheet has MD (Machine Direction) and TD (Transverse Direction), and the ease of expansion of the expand sheet is different in each direction. Further, even in the case of long chips in which the aspect ratios of the chips formed after division are different, the ease of expansion of the expand sheet is similarly different. Therefore, there has been a demand for an expand device capable of uniformly expanding the expand sheet without depending on the ease of expansion depending on the direction.

[0005] The present invention has been made in view of such problems, and an object thereof is to provide an expand device and a method for manufacturing a chip capable of uniformly expanding an expand sheet without depending on the ease of expansion depending on the direction.

Means for Solving the Problems

[0006] To solve the above-mentioned problems and achieve the objective, the present invention provides an expandable device for expanding an expandable sheet which is attached to the back surface of a workpiece placed in an opening of a frame and whose outer edge is supported by the frame, comprising: a frame holding unit for holding the frame; a first pressing unit having a pair of roller portions for locally pressing the expandable sheet between the inner circumference of the frame held by the frame holding unit and the outer circumference of the workpiece from the back side by sandwiching the workpiece; and a second pressing unit having a pressing surface for pressing the workpiece placed in the opening of the frame held by the frame holding unit from the back side via the expandable sheet, wherein the amount of expansion of the expandable sheet can be adjusted by pressing the expandable sheet with the first pressing unit and the second pressing unit, respectively.

[0007] The pressing surface may have a diameter larger than the diameter of the workpiece.

[0008] To solve the above-mentioned problems and achieve the objective, the present invention provides a method for manufacturing a chip, which involves using the above-described expansion device to divide a workpiece into chips by expanding an expanded sheet attached to the back surface of the workpiece having a dividing starting point located in an opening of a frame, and whose outer edge is supported by the frame, the method comprising: a holding step of holding the frame with a frame holding unit such that a region of the expanded sheet with a small elongation rate overlaps with a region pressed by a pair of roller portions; a first dividing step of locally pressing and expanding the expanded sheet between the inner circumference of the frame held in the holding step and the outer circumference of the workpiece from the back side with a pair of roller portions sandwiching the workpiece; and a second dividing step of pressing the workpiece located in the opening of the frame held in the holding step from the back side via the expanded sheet with the pressing surface to expand the expanded sheet. [Effects of the Invention]

[0009] The present invention allows the expanded sheet to be expanded anisotropically along the direction of less stretching by applying biased force to the expanded sheet along the opposing directions of a pair of rollers using the first pressing unit, and by applying a generally isotropic and uniform force to the expanded sheet using the second pressing unit. Therefore, the present invention allows the amount of expansion of the expanded sheet in various directions to be adjusted using the first and second pressing units. As a result, the present invention can uniformly expand the expanded sheet without depending on the ease of stretching in the direction of the expanded sheet. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a perspective view showing an example of a workpiece that is processed in an expansion device and a chip manufacturing method according to an embodiment of this invention. [Figure 2] Figure 2 is a cross-sectional view showing an example of the configuration of an expanding device according to an embodiment. [Figure 3] Figure 3 is a bottom view showing the main parts of the expansion device shown in Figure 2. [Figure 4] Figure 4 is a flowchart showing the processing procedure for manufacturing a chip according to an embodiment. [Figure 5] Figure 5 is a cross-sectional view illustrating the first division step in Figure 4. [Figure 6] Figure 6 is a cross-sectional view illustrating the second division step in Figure 4. [Modes for carrying out the invention]

[0011] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by those skilled in the art, and those that are substantially the same. In addition, the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention.

[0012] [Embodiment] An expansion device 1 and a method for manufacturing a chip according to an embodiment of the present invention will be described based on the drawings. Figure 1 is a perspective view showing an example of a workpiece 100 that is the object to be processed in the expansion device 1 and the method for manufacturing a chip according to an embodiment. Figure 2 is a cross-sectional view showing an example of the configuration of the expansion device 1 according to an embodiment. Figure 3 is a bottom view showing the main part of the expansion device 1 of Figure 2. As shown in Figure 2, the expansion device 1 according to an embodiment comprises a frame holding unit 10, a first pressing unit 20, and a second pressing unit 30.

[0013] In the expanded apparatus 1 and chip manufacturing method according to this embodiment, the workpiece 100 to be processed is, as shown in Figure 1, a wafer such as a disc-shaped semiconductor wafer or optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, etc. as the base material. As shown in Figure 2, the workpiece 100 has a flat surface 101 on which a plurality of intersecting (orthogonal in this embodiment) division lines 102 are set. Chip-shaped devices 103 are formed in the regions of the surface 101 of the workpiece 100 that are partitioned by the plurality of intersecting (orthogonal) division lines 102. Furthermore, the workpiece 100 is not limited to the wafer described above, but may also be a circular package substrate having a plurality of devices 103 sealed with resin, a ceramic plate, or a glass plate, etc.

[0014] In this embodiment, device 103 is formed in a rectangular shape in plan view, as shown in Figure 1. In this specification, the direction along the longer side of device 103 is referred to as the longitudinal direction, and the direction along the shorter side of device 103 is referred to as the transverse direction. In this embodiment, the longitudinal direction and the transverse direction are orthogonal to each other.

[0015] In this embodiment, the workpiece 100 has a splitting starting point 108 formed along the planned splitting line 102, as shown in Figure 1. Before carrying out the chip manufacturing method according to this embodiment using the expander 1 according to this embodiment, the workpiece 100 is irradiated with a laser beam of a wavelength that is transparent to the workpiece 100, for example, by aligning the focal point with the interior of the workpiece 100 along the planned splitting line 102, thereby forming a modified layer inside which is the splitting starting point 108 along the planned splitting line 102. Here, the modified layer refers to a region in which the density, refractive index, mechanical strength, and other physical properties are in a state different from those of the surrounding area, and examples include a melted treatment region, a cracked region, a dielectric breakdown region, a refractive index change region, and a region in which these regions are mixed.

[0016] As shown in Figure 1, the workpiece 100 has an expanded sheet 110 attached to the flat back surface 104 side of its surface 101. The expanded sheet 110 is made of, for example, a base sheet made of an expandable resin, with an adhesive layer formed on one side, and the back surface 104 side of the workpiece 100 is attached to the side with the adhesive layer. In this embodiment, the expanded sheet 110 also has heat shrinkability, meaning it shrinks when heated. In this specification, the side of the expanded sheet 110 to which the workpiece 100 is attached and to which the adhesive layer is formed is referred to as the surface 111 of the expanded sheet 110, and the side of the expanded sheet 110 on the back side to which the workpiece 100 is attached, on the base sheet side, is referred to as the back surface 112 of the expanded sheet 110.

[0017] As shown in Figure 1, the workpiece 100 is further mounted by attaching an annular frame 120, which has an opening 121 larger than the outer diameter of the workpiece 100, to the outer edge of the surface 111 of the expanded sheet 110 attached to the back surface 104. The workpiece 100 is thus positioned in the opening 121 of the annular frame 120 and supported and fixed via the expanded sheet 110. In addition, the outer edge of the expanded sheet 110 attached to the back surface 104 of the workpiece 100 is supported by the annular frame 120.

[0018] In this embodiment, the expandable sheet 110 is wound in a roll shape before being attached to the back surface 104 of the workpiece 100, and has a machine direction (MD) which is the flow direction and a transverse direction (TD) which is perpendicular to the flow direction. In this embodiment, the expandable sheet 106 is more likely to stretch (expand) in the MD direction than in the TD direction. Further, when the expandable sheet 110 is attached to the workpiece 100 on which the rectangular device 103 is formed, it becomes easier to stretch along the longitudinal direction of the device 103 and less likely to stretch along the short side direction of the device 103.

[0019] The expandable sheet 110 has a direction in which it is easy to stretch (high elongation rate) and a direction in which it is difficult to stretch (low elongation rate) depending on MD, TD, and the longitudinal and short side directions of the device 103 formed on the attached workpiece 100. In this specification, the direction in which the expandable sheet 110 is easy to stretch is referred to as the first elongation direction 113 (see FIG. 1), and the direction in which the expandable sheet 110 is difficult to stretch is referred to as the second elongation direction 114 (see FIG. 1). In this embodiment, the first elongation direction 113 and the second elongation direction 114 are perpendicular to each other.

[0020] As will be described later, the expandable sheet 110 is used in the expandable device 1 according to this embodiment to implement the chip manufacturing method according to this embodiment, so that the annular region 115, which is the annular region between the inner circumference of the frame 120 and the outer circumference of the workpiece 100, is pressed and expanded by the first pressing unit 20. Note that the annular region 115 corresponds to the expandable sheet 110 between the inner circumference of the frame 120 and the outer circumference of the workpiece 100 in the present invention.

[0021] In the annular region 115, a portion of a pair of rings facing each other along the first elongation direction 113 with the workpiece 100 in between becomes a region 116 with a greater elongation rate than the average elongation rate of the entire annular region 115. Also, in the annular region 115, a portion of a pair of rings facing each other along the second elongation direction 114 with the workpiece 100 in between becomes a region 117 with a less than average elongation rate of the entire annular region 115. In the pair of regions 116 with a greater elongation rate, the line passing through the center of the workpiece 100 and along the first elongation direction 113 becomes the first centerline 118. In the pair of regions 117 with a less than elongation rate, the line passing through the center of the workpiece 100 and along the second elongation direction 114 becomes the second centerline 119. The central angles θ1 and θ2 of regions 116 and 117 are determined by the MD, TD, and the longitudinal and transverse directions of the device 103 formed on the attached workpiece 100, within a range where the sum of the central angles θ1 and θ2 satisfies 180 degrees. In the example of this embodiment shown in Figure 1, the central angles θ1 and θ2 of regions 116 and 117 are both approximately 90 degrees.

[0022] In this embodiment, the expanded sheet 110 is provided with markings that allow for easy recognition of at least one of the following after the workpiece 100 and the annular frame 120 have been attached: the first elongation direction 113, the second elongation direction 114, the first center line 118 of a pair of regions with high elongation rates 116, and the second center line 119 of a pair of regions with low elongation rates 117. These markings on the expanded sheet 110 are, for example, the outer shape of the attached frame 120 or marks placed on the frame 120.

[0023] The workpiece 100 is divided into individual device 103 chips 109 (see Figures 5 and 6) along the planned division line 102, starting from the division starting point 108, by the expansion of the expanded sheet 110 attached to the back surface 104. In this invention, the division starting point 108 is not limited to the modified layer described above, but can take any form as long as it expands the expanded sheet 110 attached to the workpiece 100, thereby dividing the workpiece 100 into individual chips 109 along the planned division line 102.

[0024] The frame holding unit 10 holds the frame 120 that supports the outer edge of the expanded sheet 110 attached to the workpiece 100. As shown in Figure 2, the frame holding unit 10 is configured to include a frame support part 11 that supports the frame 120 from below, a frame pressing part 12 that presses the frame 120 from above, and a lifting part (not shown).

[0025] Both the frame support portion 11 and the frame pressing portion 12 have openings formed on their inner circumference that are larger than or equal to the inner diameter of the opening 121 of the frame 120 and smaller than the outer diameter of the frame 120 (in the example of this embodiment shown in Figure 2, the opening is the same as the inner diameter of the opening 121 of the frame 120). The frame holding unit 10 holds the frame 120 by supporting it from below with the frame support portion 11 and pressing it from above with the frame pressing portion 12, thereby sandwiching the frame 120 between the frame support portion 11 and the frame pressing portion 12.

[0026] The lifting mechanism of the frame holding unit 10 is provided on the frame support section 11 and the frame pressing section 12, and moves the frame support section 11 and the frame pressing section 12 relatively up and down in the vertical direction (Z-axis direction in Figure 2) relative to the first pressing unit 20.

[0027] In the example of this embodiment shown in Figure 2, the frame holding unit 10 holds the frame 120 and the outer edge of the expanded sheet 110 to which the frame 120 is attached by clamping them with the frame support portion 11 and the frame pressing portion 12. However, the present invention is not limited to this, and the frame 120 may be held by clamping only it. The frame holding unit 10 holds the frame 120 with the back surface 112 side of the expanded sheet 110 facing the direction in which the first pressing unit 20 and the second pressing unit 30 are arranged relative to the frame holding unit 10 (upwards in the example of this embodiment shown in Figure 2).

[0028] In this embodiment, the frame holding unit 10 is provided with markings that make it easy to recognize the centerlines 25 of the pair of roller sections 22 (described later) and the lines that substantially (approximately) overlap each other in a plan view (viewed from the vertical direction). These markings on the frame holding unit 10 include, for example, the outer shapes of the frame support section 11 and the frame pressing section 12, or marks attached to the frame support section 11 and the frame pressing section 12.

[0029] The first pressing unit 20 has a pair of roller sections 22 that locally press the expanded sheet 110 (annular region 115) between the inner circumference of the frame 120 held by the frame holding unit 10 and the outer circumference of the workpiece 100 from the back surface 112 side, sandwiching the workpiece 100. In this embodiment, the first pressing unit 20 is configured to have a cylindrical body 21 and a pair of roller sections 22, as shown in Figures 2 and 3.

[0030] The cylindrical body 21 is formed in a cylindrical shape with an inner diameter larger than the outer diameter of the workpiece 100 and an outer diameter smaller than the inner diameter of the opening 121 of the frame 120, and has an opening on its inner circumference. The cylindrical body 21 is provided on the inner circumference and coaxially with the opening of the frame holding unit 10. At one end of the cylindrical body 21 (the lower end in the example shown in Figure 2), a pair of roller sections 22 are formed, facing each other in the horizontal direction (the X-axis direction in Figures 2 and 3) with the opening in between. The pair of roller sections 22 consists of a region where rollers 23 are arranged and the arranged rollers 23.

[0031] As shown in Figure 3, the pair of roller sections 22, within a horizontal plane (in the XY plane in Figures 2 and 3) including one end, have a center line 25 that passes through the center of the opening of the cylindrical body 21 and runs along the opposing directions of the pair of roller sections 22 (in the X-axis direction in Figures 2 and 3). The central angle Θ of the pair of roller sections 22 (see Figure 3) is preferably set to match the central angle θ2 of the region 117 with low elongation. In the example of this embodiment shown in Figure 2, it is set to approximately 90 degrees, the same as the central angle θ2 of the region 117 with low elongation. However, the central angle Θ of the pair of roller sections 22 is not limited to this in the present invention and can be any angle as long as it is less than 180 degrees and a pair of regions are formed between the pair of roller sections 22 where no rollers 23 are arranged. The central angle Θ of the pair of roller sections 22 is preferably 30 degrees or more and 150 degrees or less, and preferably 60 degrees or more and 120 degrees or less. Each pair of roller sections 22 is arranged in an annular shape along the circumferential direction, and each is provided with a plurality of rollers 23 having the same outer diameter, which are rotatable around a rotation axis along the circumferential direction.

[0032] The frame holding unit 10 uses a lifting mechanism to move (raise) the frame support portion 11 and the frame pressing portion 12 that hold the frame 120 toward the side where the first pressing unit 20 is located (upwards in the example of this embodiment shown in Figure 2). As a result, the first pressing unit 20 simultaneously brings the multiple rollers 23 provided on the pair of roller portions 22 into local contact with the annular region 115 of the expanded sheet 110 supported by the frame 120 held by the frame holding unit 10, from the back surface 112 side. The first pressing unit 20 brings the multiple rollers 23 into contact with a portion of the annular region 115 (opposing region) that faces the pair of roller portions 22 in the vertical direction, from the back surface 112 side. Here, the opposing regions of the annular region 115 of the expanded sheet 110 that the multiple rollers 23 contact are a pair of opposing regions that sandwich the workpiece 100 to which the expanded sheet 110 is attached, according to the structure in which the multiple rollers 23 are provided on a pair of roller portions 22 that straddle the opening of the cylindrical body 21.

[0033] The frame holding unit 10 further moves (rises) the frame support portion 11 and the frame pressing portion 12, which hold the frame 120, in the same direction using the lifting portion. As a result, the first pressing unit 20 uses the multiple rollers 23 provided on the pair of roller portions 22 to locally press the pair of opposing regions of the annular region 115 of the expanded sheet 110, which is supported by the frame 120 held by the frame holding unit 10, from the back side 112. In this way, the first pressing unit 20 uses the multiple rollers 23 provided on the pair of roller portions 22 to locally press the annular region 115 of the expanded sheet 110, which is supported by the frame 120 held by the frame holding unit 10, from the back side 112, sandwiching the workpiece 100 between them.

[0034] The first pressing unit 20, by locally pressing the annular region 115 of the expanded sheet 110 in this manner, can apply a greater force to the expanded sheet 110 along the opposing directions of the pair of roller portions 22 (the X-axis direction in Figures 2 and 3, the direction in which the center line 25 extends) compared to other directions, that is, it can apply a biased force along the opposing directions of the pair of roller portions 22, thereby anisotropically expanding the expanded sheet 110.

[0035] The second pressing unit 30 has a pressing surface 32 that presses the workpiece 100, which is placed in the opening 121 of the frame 120 held by the frame holding unit 10, from the back surface 104 side via the expanded sheet 110. In this embodiment, as shown in Figures 2 and 3, the second pressing unit 30 is configured to have a disc-shaped body 31, a pressing surface 32, and a lifting and lowering part (not shown).

[0036] The disc-shaped body 31 is formed in a disc shape, with an outer diameter slightly smaller than the inner diameter of the opening of the cylindrical body 21 of the first pressing unit 20. The disc-shaped body 31 is provided on the inner circumference and coaxially with the opening of the cylindrical body 21 of the first pressing unit 20. As shown in Figure 2, the disc-shaped body 31 may be provided so that its outer circumferential surface contacts the inner circumferential surface of the opening of the cylindrical body 21 of the first pressing unit 20, that is, so that it fits into the inner circumferential side of the opening of the cylindrical body 21 of the first pressing unit 20.

[0037] The disc-shaped body 31 has a circular pressing surface 32 formed at one end (the lower end in the example shown in Figure 2) that is parallel to the horizontal plane and flat. The disc-shaped body 31 may have an outer diameter larger than the diameter (outer diameter) of the workpiece 100, as shown in Figure 2. That is, the pressing surface 32 may have a diameter larger than the diameter (outer diameter) of the workpiece 100. The lifting and lowering unit is provided connected to the side of the disc-shaped body 31 opposite to the side on which the pressing surface 32 is formed, and moves the second pressing unit 30 up and down relative to the frame holding unit 10 and the first pressing unit 20 in the vertical direction (Z-axis direction in Figure 2).

[0038] The second pressing unit 30 is moved (lowered) by a lifting mechanism toward the side where the frame holding unit 10 is located (downward in the example of this embodiment shown in Figure 2). As a result, the second pressing unit 30 brings its pressing surface 32 into contact with the back surface 104 of the workpiece 100, which is placed in the opening 121 of the frame 120 held by the frame holding unit 10, via the expanded sheet 110.

[0039] The second pressing unit 30 is further moved (lowered) in the same direction by the lifting mechanism. As a result, the second pressing unit 30 presses the workpiece 100, which is placed in the opening 121 of the frame 120 held by the frame holding unit 10, from the back side 104 via the expanded sheet 110 with its pressing surface 32.

[0040] The second pressing unit 30 can expand the expand sheet 110 by uniformly pressing the workpiece 100 through the expand sheet 110 in this manner, thereby applying a generally isotropic and uniform force in the planar direction.

[0041] The expanding device 1 can expand the expanded sheet 110 anisotropically by applying a biased force to the expanded sheet 110 along the opposing directions of a pair of roller sections 22 using the first pressing unit 20, and can also expand the expanded sheet 110 by applying a generally isotropic and uniform force to the expanded sheet 110 using the second pressing unit 30. Therefore, the expanding device 1 can adjust the amount of expansion of the expanded sheet 110 in various directions by, for example, aligning a predetermined direction of the expanded sheet 110 with the opposing directions of the pair of roller sections 22 and applying force to the expanded sheet 110 with the first pressing unit 20 and the second pressing unit 30.

[0042] The expander 1 according to this embodiment includes a control unit (not shown). The control unit controls the operation of each component of the expander 1 to cause the expander 1 to perform various processes, including the chip manufacturing method according to this embodiment. In this embodiment, the control unit includes a computer system. The computer system included in the control unit includes an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing unit of the control unit performs arithmetic processing according to a computer program stored in the storage device of the control unit and outputs control signals for controlling the expander 1 to each component of the expander 1 via the input / output interface device of the control unit.

[0043] Figure 4 is a flowchart showing the processing procedure for a chip manufacturing method according to the embodiment. The chip manufacturing method according to the embodiment is an example of an operation process using the expander 1 according to the embodiment. The chip manufacturing method according to the embodiment is a method of manufacturing a chip 109 by expanding an expanded sheet 110, which is attached to the back surface 104 of a workpiece 100 having a dividing starting point 108 placed in an opening 121 of a frame 120 and whose outer edge is supported by the frame 120, using the expander 1 to divide the workpiece 100. As shown in Figure 4, the chip manufacturing method according to the embodiment comprises a holding step 1001, a first dividing step 1002, and a second dividing step 1003.

[0044] The holding step 1001 is a step in which the frame 120 is held by the frame holding unit 10 such that the pair of areas 117 of the expanded sheet 110 with a low elongation rate overlap with the areas pressed by the pair of roller portions 22 of the first pressing unit 20, as shown in Figure 2.

[0045] In the holding step 1001, in this embodiment, first, as shown in Figure 2, the workpiece 100, the expanded sheet 110, and the frame 120 are positioned relative to the expanding device 1 such that the second centerlines 119 of a pair of less elongated regions 117 of the annular region 115 of the expanded sheet 110 to which the workpiece 100 and the frame 120 are attached are aligned approximately parallel to the centerlines 25 (X-axis direction) of the pair of roller portions 22, and they approximately overlap each other in a plan view (viewed from the vertical direction). In other words, the workpiece 100, the expanded sheet 110, and the frame 120 are positioned relative to the expander 1 such that the second elongation direction 114 (the direction in which the second centerline 119 extends), in which the pair of regions 117 with low elongation rates face each other, and the X-axis direction (the direction in which the centerline 25 extends), in which the pair of roller sections 22 face each other, are aligned approximately parallel to each other, and they approximately overlap each other in a plan view (viewed from the vertical direction).

[0046] In the holding step 1001, in this embodiment, such positioning can be easily achieved by adjusting the positional relationship between the mark on the expanded sheet 110 and the mark on the frame holding unit 10. In the holding step 1001, if the mark on the expanded sheet 110 represents the second extension direction 114 (the direction in which the second center line 119 extends) and the mark on the frame holding unit 10 represents the X-axis direction (the direction in which the center line 25 extends), such positioning can be easily achieved by aligning them with each other.

[0047] In the holding step 1001, with the workpiece 100, the expanded sheet 110, and the frame 120 positioned relative to the expander 1 in this manner, the frame holding unit 10 holds the frame 120 and the outer edge of the expanded sheet 110 to which the frame 120 is attached by the frame support portion 11 and the frame pressing portion 12. In the holding step 1001, by holding the frame 120 with the frame holding unit 10 in this manner, the pair of regions 117 of the expanded sheet 110 with a small elongation rate and the region pressed by the pair of roller portions 22 substantially overlap and face each other in the direction in which the frame holding unit 10 and the first pressing unit 20 (pair of roller portions 22) move relative to each other.

[0048] In this embodiment, the central angle θ2 of the pair of low-elongation regions 117 of the expanded sheet 110 and the central angle Θ of the pair of roller portions 22 are both approximately 90 degrees, and are roughly the same. In this example, the pair of low-elongation regions 117 of the expanded sheet 110 and the region pressed by the pair of roller portions 22 largely overlap and face each other. The present invention is not limited to this form, and the central angle θ2 may be larger than the central angle Θ. In this case, the pair of low-elongation regions 117 protrude on both sides of the region pressed by the pair of roller portions 22, so that a part of the pair of low-elongation regions 117 and the region pressed by the pair of roller portions 22 largely overlap and face each other. Furthermore, the central angle θ2 may be smaller than the central angle Θ. In this case, the area pressed by the pair of roller sections 22 extends on both sides of the pair of areas with low elongation 117, and the pair of areas with low elongation 117 and a portion of the area pressed by the pair of roller sections 22 substantially overlap and face each other.

[0049] Figure 5 is a cross-sectional view illustrating the first splitting step 1002 of Figure 4. As shown in Figure 5, the first splitting step 1002 is a step in which the expanded sheet 110 (annular region 115) between the inner circumference of the frame 120 held in the holding step 1001 and the outer circumference of the workpiece 100 is locally pressed and expanded by a pair of roller portions 22 of the first pressing unit 20, sandwiching the workpiece 100 from the back surface 112 side.

[0050] In the first division step 1002, the frame holding unit 10 is first moved (raised) toward the side (upward) where the first pressing unit 20 is located, and the multiple rollers 23 provided on the pair of roller sections 22 are brought into local contact from the back surface 112 side with a pair of low-elongation regions 117 of the annular region 115 of the expanded sheet 110 supported by the frame 120 held by the frame holding unit 10. In the first division step 1002, the frame holding unit 10 is then further moved (raised) in the same direction, and the multiple rollers 23 provided on the pair of roller sections 22 are brought into local contact with the pair of low-elongation regions 117.

[0051] Here, in the holding step 1001 performed earlier, the area 117 of the expanded sheet 110 with a low elongation rate overlaps with the area pressed by the pair of roller portions 22 of the first pressing unit 20. Therefore, in the first splitting step 1002, the multiple rollers 23 provided on the pair of roller portions 22 can be brought into local contact with the area 117 with a low elongation rate and pressed.

[0052] In the first splitting step 1002, the multiple rollers 23 provided on the pair of roller sections 22 locally press against the pair of regions 117 with low elongation rates. In the first splitting step 1002, a greater biased force can be applied to the expanded sheet 110 in the direction of the X-axis of the pair of roller sections 22 that is, along the second elongation direction 114 in which the pair of regions 117 with low elongation rates face each other, compared to other directions. In the first splitting step 1002, by applying such a biased force, the expanded sheet 110 can be expanded anisotropically along the second elongation direction 114, which is the direction in which it is less likely to stretch.

[0053] Figure 6 is a cross-sectional view illustrating the second splitting step 1003 of Figure 4. As shown in Figure 6, the second splitting step 1003 is a step in which the workpiece 100, placed in the opening 121 of the frame 120 held in the holding step 1001, is pressed from the back surface 104 side with the pressing surface 32 of the second pressing unit 30 via the expanded sheet 110 to expand the expanded sheet 110.

[0054] In the second division step 1003, first, the second pressing unit 30 is moved (lowered) toward the side (downward) where the frame holding unit 10 is located, and the pressing surface 32 of the second pressing unit 30 is brought into contact with the back surface 104 of the workpiece 100, which is placed in the opening 121 of the frame 120 held by the frame holding unit 10, via the expanded sheet 110. Next, in the second division step 1003, the second pressing unit 30 is moved (lowered) further in the same direction, and the pressing surface 32 presses the back surface 104 of the workpiece 100 via the expanded sheet 110.

[0055] In the second division step 1003, by pressing with the pressing surface 32 in this manner, a force that is generally isotropic and uniform in the planar direction can be applied to the expanded sheet 110. In the second division step 1003, by applying a force that is generally isotropic and uniform in the planar direction in this manner, the expanded sheet 110 can be expanded with a relatively large expansion rate along the first elongation direction 113, which is the direction in which it is easier to stretch, and with a relatively small expansion rate along the second elongation direction 114, which is the direction in which it is harder to stretch, with an expansion rate corresponding to the ease of stretching in each direction.

[0056] In the chip manufacturing method according to the embodiment, in the first division step 1002 and the second division step 1003, the expanded sheet 110 attached to the back surface 104 of the workpiece 100 is expanded, so that, as shown in Figures 5 and 6, the workpiece 100 is divided into individual device 103 chips 109 along the division line 102, starting from the division starting point 108, thereby manufacturing the chips 109.

[0057] In the chip manufacturing method according to the embodiment, in the example shown in Figures 5 and 6, the first division step 1002 is performed first, followed by the second division step 1003, but the present invention is not limited to this. The second division step 1003 may be performed first, followed by the first division step 1002, or the first division step 1002 and the second division step 1003 may be performed simultaneously, or the timing of the performance may partially overlap.

[0058] In the chip manufacturing method according to the embodiment, the expanded sheet 110 is expanded anisotropically along the second elongation direction 114, which is the direction in which it is less stretchable, in the first division step 1002, and the expanded sheet 110 is expanded in the second division step 1003 with an expansion rate corresponding to the ease of stretching in each direction. In the chip manufacturing method according to the embodiment, by expanding the expanded sheet 110 in the first division step 1002 and the second division step 1003 in this way, the expanded sheet 110 can be expanded isotropically and uniformly, without depending on the ease of stretching in each direction, by expanding it in all directions and by applying a stronger force along the direction in which it is less stretchable (second elongation direction 114).

[0059] In the expanded device 1 and chip manufacturing method according to the embodiment having the above configuration, the first pressing unit 20 (first division step 1002) applies a biased force to the expanded sheet 110 along the opposing directions of the pair of roller portions 22, allowing the expanded sheet 110 to expand anisotropically along the second extension direction 114, which is the direction in which it is less likely to stretch. At the same time, the second pressing unit 30 (second division step 1003) applies a generally isotropic and uniform force to the expanded sheet 110, allowing it to expand. Therefore, in the expanded device 1 and chip manufacturing method according to the embodiment, the amount of expansion of the expanded sheet 110 in various directions can be adjusted using the first pressing unit 20 (first division step 1002) and the second pressing unit 30 (second division step 1003). As a result, the expandable device 1 and the chip manufacturing method according to the embodiment have the effect of being able to uniformly expand the expandable sheet 110 without depending on the direction of the expandable sheet 110.

[0060] Furthermore, in the expandable device 1 and chip manufacturing method according to the embodiment, the pressing surface 32 of the second pressing unit 30 used in the second pressing unit 30 (second division step 1003) has a diameter larger than the diameter of the workpiece 100. Therefore, in the expandable device 1 and chip manufacturing method according to the embodiment, in the inner circumference of the area pressed by the first pressing unit 20 (first division step 1002) of the expandable sheet 110, in addition to the area to which the workpiece 100 is attached, the area outside the area to which the workpiece 100 is attached can also be expanded by applying a generally isotropic and uniform force.

[0061] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. [Explanation of Symbols]

[0062] 1. Expanding device 10 Frame holding unit 20 First pressing unit 22 Roller section 30 Second pressing unit 32 Pressing surface 100 Workpiece 104,112 back side 108 Split starting point 109 chips 110 Expandable Sheet 115 Circular Region 116,117 areas 120 frames 121 Aperture 1001 Holding step 1002 First division step 1003 Second division step

Claims

1. An expander for expanding an expandable sheet, which is attached to the back surface of a workpiece placed in an opening of a frame and whose outer edge is supported by the frame, A frame holding unit that holds the frame, A first pressing unit having a pair of roller portions that locally press the expanded sheet between the inner circumference of the frame held by the frame holding unit and the outer circumference of the workpiece from the back side, sandwiching the workpiece between them, A second pressing unit having a pressing surface that presses the workpiece, which is placed in an opening of the frame held by the frame holding unit, from the back side through the expanded sheet, Equipped with, An expandable device capable of adjusting the amount of expansion of an expandable sheet by pressing the expandable sheet with the first pressing unit and the second pressing unit, respectively.

2. The pressing surface is The expanding device according to claim 1, characterized in that it has a diameter larger than the diameter of the workpiece.

3. A method for manufacturing a chip by expanding an expandable sheet, which is attached to the back surface of a workpiece having a dividing starting point located in an opening of a frame and whose outer edge is supported by the frame, using the expandable device described in claim 1, thereby dividing the workpiece and manufacturing a chip, A holding step in which the frame is held by the frame holding unit such that the region of the expanded sheet with a small elongation rate overlaps with the region pressed by the pair of rollers, A first splitting step involves locally pressing and expanding the expanded sheet between the inner circumference of the frame held in the holding step and the outer circumference of the workpiece with a pair of roller portions from the back side, sandwiching the workpiece between them. A second splitting step involves pressing the workpiece, which is placed in the opening of the frame held in the holding step, from the back side through the expand sheet with the pressing surface to expand the expand sheet, A method for manufacturing chips, characterized by comprising the following features.

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