Positioning device, positioning stage

Abstract

There was a need for a positioning device that could suppress deformation of objects due to horizontal forces when positioning objects for processing or measurement in the vertical direction, and that could accurately position and hold the objects at the target position. [Solution] A positioning device comprising: a first member; a first guide member provided on the upper surface of the first member; a second member having an upper surface and a lower surface that are not parallel to each other and movable on the first guide member; a second guide member provided on the upper surface of the second member; and a third member movable on the second guide member, wherein the third member is supported by the second guide member so as to move vertically in conjunction with the movement of the second member, without being restricted by the horizontal position of the second member.

Description

Technical Field

[0001] The present invention relates to a positioning device for vertically positioning and holding an object to be mounted, and the like.

Background Art

[0002] In recent years, in the fields of machine tools, measuring instruments, etc., in order to perform processing and measurement with high precision, it has been required to move an object in the vertical direction or the tilt direction and position and hold it at a target position with high precision.

[0003] Patent Document 1 discloses a vertical drive positioning device capable of adjusting the height of a mounted object. Specifically, it describes a Z-axis drive mechanism including a horizontal movement block that moves along a guide member on a base member, and a vertical movement block that has an inclined surface on the lower surface side and can move up and down by the horizontal movement of the horizontal movement block. By driving the horizontal movement block, the vertical positioning of an upper member arranged on the vertical block or a workpiece placed on the upper member can be performed. Further, by using three Z-axis drive mechanisms, the workpiece can be positioned not only in the vertical direction but also in the tilt direction.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In Patent Document 1, the horizontal movement of the vertical movement block on which the workpiece is mounted is restricted by a guide member provided on the inclined surface of the horizontal movement block and a guide member provided vertically on the base member. Therefore, when the workpiece tries to move horizontally at the support point, it cannot be dragged along, and thus deformation may occur in the workpiece.

[0006] In other words, the vertical moving block moves vertically along a vertically positioned guide member as it receives a force that drives the horizontal moving block horizontally on the base member. At this time, the horizontal movement of the vertical moving block is constrained by the guide member that is vertically positioned on the base member.

[0007] Therefore, when configuring a positioning stage that can position the mounted object not only vertically but also tilting using three Z-axis drive mechanisms, the over-confinement of the three Z-axis drive mechanisms prevents the horizontal force transmitted to the workpiece from being dissipated. As a result, the workpiece deforms due to the horizontal force, which undesirably affects the accuracy of machining and measurement after positioning.

[0008] Therefore, there was a need for a positioning device that could suppress deformation of objects due to horizontal forces when positioning objects for processing or measurement in the vertical direction, and that could position and hold them at the target position with high precision. Furthermore, there was a need for a positioning stage that could suppress deformation of objects due to horizontal forces when positioning objects in the tilt direction, and that could position and hold them at the target position with high precision. [Means for solving the problem]

[0009] A first aspect of the present invention is a positioning device comprising: a first member; a first guide member provided on the upper surface of the first member; a second member having an upper surface and a lower surface that are not parallel to each other and movable on the first guide member; a second guide member provided on the upper surface of the second member; and a third member movable on the second guide member, wherein the third member is supported by the second guide member so as to move vertically in conjunction with the movement of the second member, without being restricted by the horizontal position of the second member. [Effects of the Invention]

[0010] According to the present invention, when positioning an object to be processed or measured in the vertical direction, deformation of the object due to horizontal forces is suppressed, and a positioning device is provided that can be positioned and held at a target position with high precision. Furthermore, when positioning an object in the tilt direction, a positioning stage is provided that can be positioned and held at a target position with high precision, while deformation of the object due to horizontal forces is suppressed. [Brief explanation of the drawing]

[0011] [Figure 1] A schematic side view showing the configuration of the drive positioning device according to Embodiment 1. [Figure 2] A schematic side view showing the configuration of the positioning stage according to Embodiment 2. [Figure 3] A schematic plan view showing the configuration of the positioning stage according to Embodiment 2. [Figure 4] A schematic side view showing the configuration of the positioning stage according to Embodiment 3. [Figure 5] A schematic plan view showing the configuration of the positioning stage according to Embodiment 3. [Figure 6] A schematic side view showing the configuration of the positioning stage according to Embodiment 4. [Figure 7] A schematic plan view showing the configuration of the positioning stage according to Embodiment 4. [Modes for carrying out the invention]

[0012] With reference to the drawings, a positioning device, positioning stage, etc., according to an embodiment of the present invention will be described. The embodiments shown below are illustrative, and for example, those skilled in the art can modify the detailed configuration as appropriate without departing from the spirit of the present invention.

[0013] In the following description of the embodiments, unless otherwise specified, elements denoted with the same reference numerals in the drawings shall have the same functions. In the drawings, when there are multiple identical elements, the assignment of reference numerals and their descriptions may be omitted.

[0014] Also, for the sake of convenience in illustration and description, the drawings may be presented schematically. Therefore, the shapes, sizes, arrangements, etc. of the elements shown in the drawings may not necessarily exactly match the actual objects.

[0015] In the following description, for example, when referring to the X plus direction, it refers to the same direction as the arrow of the X axis in the illustrated orthogonal coordinate system. When referring to the X minus direction, it refers to the direction opposite by 180 degrees to the direction pointed by the arrow of the X axis in the illustrated orthogonal coordinate system. Also, when simply referring to the X direction, it refers to a direction parallel to the X axis regardless of the difference from the direction pointed by the arrow of the X axis shown. The same applies to directions other than X. Also, unless otherwise specified, in the XYZ coordinate system which is an orthogonal coordinate system, the XY plane is the horizontal plane, and the minus direction of the Z axis is the vertical direction (gravity direction).

[0016] [Embodiment 1] FIG. 1 is a schematic side view showing the configuration of the positioning device 1 according to Embodiment 1. The positioning device 1 can perform positioning in the vertical direction of the third member 6, and on the third member 6, for example, an object to be processed or measured, or a stage for placing the object can be arranged.

[0017] The positioning device 1 includes a first member 2 whose lower surface is fixed to a floor surface (not shown), a first guide member 4a installed on the upper surface of the first member 2, and a second member 5 that can move in the D direction on the first guide member 4a.

[0018] As the first member 2, an example in which the upper surface is inclined with respect to the lower surface is shown, but the upper surface and the lower surface may be parallel. As the first guide member 4a, for example, a rolling mechanism such as a cross roller guide may be used, or a guiding mechanism with a low coefficient of friction such as a sliding mechanism may be used. The second member 5 that can move in the D direction on the first guide member 4a is a wedge-shaped member with non-parallel upper and lower surfaces.

[0019] The second member 5 can be urged by the driving part 3 and move (advance and retreat) in the D direction. The driving part 3 may be, for example, a manual feed mechanism such as a push screw, or an automatic feed mechanism using an electric motor and a ball screw. As long as it can urge the second member 5, the driving part 3 may be installed on the first member 2 as shown in the figure, or may be installed on a floor surface or other member not shown in the figure.

[0020] A second guide member 4b is installed on the upper surface of the second member 5, and a third member 6 is mounted on the second guide member 4b. When the second member 5 urged by the driving part 3 moves in the D direction, the third member 6 can move in the vertical direction. At this time, the third member 6 is supported by the second guide member 4b so that it can move in the H direction (horizontal direction), and the horizontal position of the third member 6 is configured not to be restricted by the horizontal position of the second member 5.

[0021] In addition, in the example of FIG. 1, the upper surfaces of the second member 5 and the third member 6 are substantially parallel to the lower surface of the first member 2, but these surfaces do not necessarily have to be parallel. For example, according to the inclination of a floor surface not shown in the figure, the inclination angles of the upper and lower surfaces of the first member 2, the second member 5, and the third member 6 can be set appropriately.

[0022] The positioning device 1 includes a first member 2, a first guide member 4a provided on the upper surface of the first member 2, a second member 5 mounted on the first guide member 4a, a second guide member 4b provided on the upper surface of the second member 5, and a third member 6 mounted on the second guide member 4b. The second member 5 is a wedge-shaped member whose upper and lower surfaces are not parallel. When the second member 5 moves on the first guide member 4a, the third member 6 moves vertically along with it, but because it is mounted on the second guide member 4b, its horizontal position is not restricted by the second member 5.

[0023] Since the third member 6 is not restricted in its movement by the horizontal movement of the second member 5, it is possible to position the object mounted on the third member 6 vertically while preventing horizontal external forces that would cause deformation from being applied to the object.

[0024] [Embodiment 2] As Embodiment 2, a positioning stage equipped with three positioning devices 1 according to Embodiment 1 is presented as an example. Figure 2 is a schematic side view showing the configuration of the positioning stage according to Embodiment 2, and Figure 3 is a plan perspective view. Regarding the drive positioning device, the explanation will be simplified or omitted for matters that are common to Embodiment 1.

[0025] The positioning stage is equipped with a stage top plate 10 that can be positioned vertically and tilted around the XY rotation axis. The stage top plate 10 is supported by three positioning devices 1. Specifically, a sliding mechanism 9 consisting of a conical groove member 7 and a hemispherical member 8 is attached to the third member 6 of each positioning device 1, and the stage top plate 10 is supported by the hemispherical member 8 of the sliding mechanism 9.

[0026] The three positioning devices 1 are installed on a floor (not shown) as shown in Figure 3 in plan view. Here, the direction of movement in plan view of the support point (or center of the third member 6) of the third member 6 supporting the stage top plate 10 moving on the second guide member 4b is defined as the H direction (horizontal movement direction). In this embodiment, as shown in Figure 3, the three positioning devices 1 are installed so that the H directions intersect at one point. The movement of the third member 6 is constrained by each other, making it possible to position the stage top plate 10 in the XY direction.

[0027] By mounting an object to be processed or measured (not shown) on the stage top plate 10 and independently driving three positioning devices 1, it becomes possible to position the object in both the vertical and tilt directions. Driving the three positioning devices 1 by the same amount results in vertical positioning, while driving them by different amounts results in tilt positioning.

[0028] The sliding mechanism 9 has rotational degrees of freedom due to the conical groove member 7 and the hemispherical member 8, and can therefore perform attitude control operations around the XY rotation axis with two degrees of freedom. This allows for avoidance of deformation associated with the tilt of the stage top plate 10 during tilt positioning. Instead of the sliding mechanism 9, a mechanism with rotational degrees of freedom such as a ball joint may be used.

[0029] When performing processing or measurement, if the tilt direction of the object is to be positioned, the position of the hemispherical member 8, which is the support point of the stage top plate 10, will attempt to move relative to the positioning device 1. However, the movement of the hemispherical member 8 can be avoided by the movement of the third member 6. This makes it possible to suppress deformation caused by the transmission of external forces generated in the positioning device 1 to the stage top plate 10.

[0030] As described above, the positioning stage according to this embodiment makes it possible to determine the position with high precision in the vertical direction and the tilt direction around the XY rotation axis without causing deformation due to external forces to the object to be processed or measured mounted on the stage top plate 10.

[0031] [Embodiment 3] As Embodiment 3, a positioning stage equipped with two drive positioning devices according to Embodiment 1 is presented as an example. Figure 4 is a schematic side view showing the configuration of the positioning stage according to Embodiment 3, and Figure 5 is a plan perspective view. Regarding the drive positioning device, the explanation of matters common to Embodiment 1 will be simplified or omitted.

[0032] The positioning stage is equipped with a stage top plate 10 that can be positioned in the tilt direction around the XY rotation axis. The stage top plate 10 is supported by two positioning devices 1 and one stage top plate support member 11. Specifically, a sliding mechanism 9 consisting of a conical groove member 7 and a hemispherical member 8 is attached to the third member 6 of each positioning device 1 and the stage top plate support member 11, and the stage top plate 10 is supported by the hemispherical member 8 of the sliding mechanism 9.

[0033] The two positioning devices 1 and the stage top support member 11 are installed on a floor (not shown) as shown in Figure 5 in plan view. Here, the direction of movement in plan view of the support point (or center of the third member 6) of the third member 6 supporting the stage top 10 moving on the second guide member 4b is defined as the H direction (horizontal movement direction). In this embodiment, as shown in Figure 5, the two positioning devices 1 are installed so that the H directions intersect on the stage top support member 11. The movement of the third member 6 is constrained by each other, making it possible to position the stage top 10 in the XY direction.

[0034] By mounting the object to be processed or measured (not shown) on the stage top plate 10 and independently driving the two positioning devices 1, it becomes possible to position the object in the tilt direction. If the two positioning devices 1 are driven by the same amount, positioning is performed around the Y rotation axis; if they are driven by different amounts, positioning is performed around the X rotation axis.

[0035] The sliding mechanism 9 has degrees of freedom in the rotational direction due to the conical groove member 7 and the hemispherical member 8, and can perform attitude control operations around the XY rotation axis with two degrees of freedom. This makes it possible to avoid deformation caused by the tilting of the stage top plate 10 when positioning in the tilt direction. Instead of the sliding mechanism 9, a hinge mechanism may be used in combination, or a deformation mechanism such as a spring may be used.

[0036] When performing processing or measurement, if the tilt direction of the object is to be positioned, the position of the hemispherical member 8, which is the support point of the stage top plate 10, will attempt to move relative to the positioning device 1. However, the movement of the hemispherical member 8 can be avoided by the movement of the third member 6. This makes it possible to suppress deformation caused by the transmission of external forces generated in the positioning device 1 to the stage top plate 10.

[0037] As described above, the positioning stage according to this embodiment makes it possible to determine the position with high precision in the tilt direction around the XY rotation axis without causing deformation due to external forces to the object to be processed or measured mounted on the stage top plate 10.

[0038] [Embodiment 4] As Embodiment 4, a positioning stage equipped with one drive positioning device according to Embodiment 1 is presented as an example. Figure 6 is a schematic side view showing the configuration of the positioning stage according to Embodiment 4, and Figure 7 is a plan perspective view. Regarding the drive positioning device, the explanation of matters common to Embodiment 1 will be simplified or omitted.

[0039] The positioning stage is equipped with a stage top plate 10 that can be positioned in the tilt direction around the Y rotation axis. The stage top plate 10 is supported by one positioning device 1 and two stage top plate support members 11. Specifically, a sliding mechanism 9 consisting of a conical groove member 7 and a hemispherical member 8 is attached to the third member 6 of the positioning device 1 and each stage top plate support member 11, and the stage top plate 10 is supported by the hemispherical member 8 of the sliding mechanism 9.

[0040] One positioning device 1 and two stage top support members 11 are installed on a floor (not shown) as shown in Figure 7 in plan view. Here, the direction of movement in plan view of the support point (or center of the third member 6) of the third member 6 supporting the stage top 10 moving on the second guide member 4b is defined as the H direction (horizontal movement direction). In this embodiment, as shown in Figure 7, the two stage top support members 11 are installed so that the H direction intersects perpendicularly at approximately the midpoint of the rotation axis connecting the support points of the two stage top support members 11. This makes it possible to position the placed stage top 10 in the tilt direction around the Y rotation axis.

[0041] By placing an object to be processed or measured (not shown) on the stage top plate 10 and driving the positioning device 1, it becomes possible to position the object in the tilt direction around its Y rotation axis.

[0042] The sliding mechanism 9 has degrees of freedom in the rotational direction due to the conical groove member 7 and the hemispherical member 8, and can perform attitude control operations around the XY rotation axis with two degrees of freedom. This makes it possible to avoid deformation caused by the tilting of the stage top plate 10 when positioning in the tilt direction. Instead of the sliding mechanism 9, a hinge mechanism may be used in combination, or a deformation mechanism such as a spring may be used.

[0043] When performing processing or measurement, if the tilt direction of the object is to be positioned, the position of the hemispherical member 8, which is the support point of the stage top plate 10, will attempt to move relative to the positioning device 1. However, the movement of the hemispherical member 8 can be avoided by the movement of the third member 6. This makes it possible to suppress deformation caused by the transmission of external forces generated in the positioning device 1 to the stage top plate 10.

[0044] As described above, the positioning stage according to this embodiment makes it possible to determine the position with high precision in the tilt direction around the Y rotation axis without causing deformation due to external forces to the object to be processed or measured mounted on the stage top plate 10.

[0045] [Other embodiments] It should be noted that the present invention is not limited to the embodiments described above, and many modifications are possible within the technical concept of the present invention. For example, all or part of the different embodiments described above may be combined and implemented.

[0046] The present invention can also be realized by supplying a program that implements one or more of the functions of the embodiments to a system or device via a network or storage medium, and by having one or more processors in the computer of that system or device read and execute the program. It can also be realized by a circuit (e.g., an ASIC) that implements one or more functions.

[0047] Furthermore, if this specification contains a statement such as "A is B," even if it omits a statement such as "A is not B," it can be said that this specification discloses that "A is not B." This is because the statement "A is B" implies that the case where "A is not B" is being considered.

[0048] This specification discloses at least the following: [Matter 1] First member and A first guide member provided on the upper surface of the first member, A second member having upper and lower surfaces that are not parallel to each other and movable on the first guide member, A second guide member provided on the upper surface of the second member, The device comprises a third member that is movable on the second guide member, The third member is supported by the second guide member so as to move vertically in conjunction with the movement of the second member, without being restricted by the horizontal position of the second member. A positioning device characterized by the following features. [Matter 2] The device includes a drive unit for moving the second member, A positioning device as described in item 1, characterized by the features described above. [Matter 3] Three positioning devices as described in item 1 or 2, The system comprises a stage top plate supported by the third member of the three positioning devices, A positioning stage characterized by the following features. [Matter 4] In each of the three positioning devices, when the direction of movement in a plan view of the support point of the third member supporting the stage top plate moves in conjunction with the movement of the second member, The three positioning devices are arranged such that the horizontal movement directions intersect at a single point in a plan view. A positioning stage as described in item 3, characterized by the features described above. [Matter 5] The stage top plate can be positioned in the vertical and tilt directions by the three positioning devices. A positioning stage as described in item 3 or 4, characterized by the features described above. [Matter 6] The stage top plate is supported by each of the three positioning devices via a sliding mechanism. A positioning stage according to any one of items 3 to 5, characterized in that it is a positioning stage. [Matter 7] Each of the three positioning devices' second members can be moved independently, and the stage top plate can be positioned in the vertical and tilt directions. A positioning stage according to any one of items 3 to 6, characterized in that it is a positioning stage. [Matter 8] Two positioning devices as described in item 1 or 2, Tabletop support member, The stage top plate is supported by the third member of the two positioning devices and the top plate support member. A positioning stage characterized by the following features. [Matter 9] In each of the two positioning devices, when the direction of movement in a plan view of the support point of the third member supporting the stage top plate moves in conjunction with the movement of the second member, The two positioning devices are arranged such that their horizontal movement directions intersect at the position of the top plate support member in a plan view. A positioning stage as described in item 8, characterized by the features described above. [Matter 10] The stage top plate can be positioned in the tilt direction by the two positioning devices. A positioning stage according to item 8 or 9, characterized by the features described above. [Matter 11] The stage top plate is supported by each of the two positioning devices and the top plate support member via a sliding mechanism. A positioning stage according to any one of items 8 to 10, characterized in that [Matter 12] Each of the two positioning devices can move its second member independently, and the stage top plate can be positioned in the tilt direction. A positioning stage according to any one of items 8 to 11, characterized in that [Matter 13] A positioning device as described in item 1 or 2, Two tabletop support members, The positioning device comprises the third member, the two top plate support members, and a stage top plate supported by them. A positioning stage characterized by the following features. [Matter 14] In the positioning device, when the direction of movement in a plan view of the support point of the third member supporting the stage top plate moving in conjunction with the movement of the second member is defined as the horizontal movement direction, The positioning device is arranged such that its horizontal movement direction intersects perpendicularly with the line connecting the two top plate support members in a plan view. A positioning stage as described in item 13, characterized by the features described herein. [Matter 15] The stage top plate can be positioned in the tilt direction by the positioning device. A positioning stage as described in item 13 or 14, characterized by the features described herein. [Matter 16] The stage top plate is supported by the positioning device and each of the two top plate support members via a sliding mechanism. A positioning stage according to any one of items 13 to 15, characterized by the features described herein. [Explanation of symbols]

[0049] 1. Positioning device / 2. First member / 3. Drive unit / 4a. First guide member / 4b. Second guide member / 5. Second member / 6. Third member / 7. Conical groove member / 8. Hemispherical member / 9. Sliding mechanism / 10. Stage top plate / 11. Stage top plate support member

Claims

1. First member and A first guide member provided on the upper surface of the first member, A second member having upper and lower surfaces that are not parallel to each other, and which is movable on the first guide member, A second guide member provided on the upper surface of the second member, The device comprises a third member that is movable on the second guide member, The third member is supported by the second guide member so as to move in the vertical direction as the second member moves, without being restricted by the horizontal position of the second member. A positioning device characterized by the following features.

2. The device includes a drive unit for moving the second member, The positioning device according to feature 1.

3. Three positioning devices according to claim 1 or 2, The system comprises a stage top plate supported by the third member of the three positioning devices, A positioning stage characterized by the following features.

4. In each of the three positioning devices, when the direction of movement in a plan view of the support point of the third member supporting the stage top plate moving in conjunction with the movement of the second member is defined as the horizontal movement direction, The three positioning devices are arranged such that their horizontal movement directions intersect at a single point in a plan view. The positioning stage according to feature 3.

5. The stage top plate can be positioned in the vertical and tilt directions by the three positioning devices. The positioning stage according to feature 3.

6. The stage top plate is supported by each of the three positioning devices via a sliding mechanism. The positioning stage according to feature 3.

7. Each of the three positioning devices' second members can be moved independently, and the stage top plate can be positioned in the vertical and tilt directions. The positioning stage according to feature 3.

8. Two positioning devices according to claim 1 or 2, Tabletop support member, The stage top plate is supported by the third member of the two positioning devices and the top plate support member. A positioning stage characterized by the following features.

9. In each of the two positioning devices, when the direction of movement in a plan view of the support point of the third member supporting the stage top plate moving in conjunction with the movement of the second member is defined as the horizontal movement direction, The two positioning devices are arranged such that their horizontal movement directions intersect at the position of the top plate support member in a plan view. The positioning stage according to feature 8.

10. The stage top plate can be positioned in the tilt direction by the two positioning devices. The positioning stage according to feature 8.

11. The stage top plate is supported by each of the two positioning devices and the top plate support member via a sliding mechanism. The positioning stage according to feature 8.

12. Each of the two positioning devices can move its second member independently, and the stage top plate can be positioned in the tilt direction. The positioning stage according to feature 8.

13. A positioning device according to claim 1 or 2, Two tabletop support members, The positioning device comprises the third member and the two top plate support members, and a stage top plate supported by them. A positioning stage characterized by the following features.

14. In the positioning device, when the direction of movement in a plan view of the support point of the third member supporting the stage top plate moving in conjunction with the movement of the second member is defined as the horizontal movement direction, The positioning device is arranged such that its horizontal movement direction intersects perpendicularly with the line connecting the two top plate support members in a plan view. The positioning stage according to feature 13.

15. The stage top plate can be positioned in the tilt direction by the positioning device. The positioning stage according to feature 13.

16. The stage top plate is supported by the positioning device and each of the two top plate support members via a sliding mechanism. The positioning stage according to feature 13.

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