Airflow generating device with differential modulation drive and asymmetric initial deflection

The airflow generating device with differential pressure regions and asymmetric initial deflection in MEMS technology addresses the challenge of generating significant airflow, enhancing efficiency and performance in heat dissipation applications.

JP2026116265APending Publication Date: 2026-07-09XMEMS LABS INC

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
XMEMS LABS INC
Filing Date
2025-12-26
Publication Date
2026-07-09

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Abstract

We provide an airflow generating device capable of providing a significant airflow. [Solution] The airflow generating device 7 includes a first cell located in a first region and a second cell located in a second region. The first cell generates a first air pressure having a first polarity in the first region, and the second cell generates a second air pressure having a second polarity in the second region. The second polarity is opposite to the first polarity. One of the cells, the first and the second, includes a membrane structure 12 including a flap pair 102. The flap pair 102 includes a first flap 101 and a second flap 103 that face each other. The flap pair 102 has an initial displacement difference or exhibits an average displacement difference between the first flap and the second flap. The flap pair 102 operates at an ultrasonic frequency, thereby the airflow generating device 7 generates a plurality of air pulses at an ultrasonic pulse rate.
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