Swivel mechanism, positioning device, and electrical inspection device

Abstract

This disclosure aims to provide a pivoting mechanism that can improve movement accuracy. [Solution] The swivel mechanism 1 of this disclosure comprises a first rotating body 10 having a first mass portion 11, a first shaft portion 12 and a first opposing portion 13, a second rotating body 20 having a second mass portion 21, a second shaft portion 22 and a second opposing portion 23, a fixing member 30 that rotatably holds the first shaft portion 12 and the second shaft portion 22 coaxially, and a connecting structure 4 that connects the first rotating body 10 and the second rotating body 20 while restricting relative movement in the rotational direction. The connection structure 40 comprises a shaft member 41 connecting the first opposing portion 13 and the second opposing portion 23, a first elastic member 42 covering the shaft member 41 between the first opposing portion 13 and the second opposing portion 23, and a second elastic member 43 covering the shaft member 41 outside the first opposing portion 13, wherein the first elastic member 42 and the second elastic member 43 are compressed in accordance with the relative distance between the first opposing portion 13 and the second opposing portion 23.

Description

Technical Field

[0001] The present disclosure relates to a turning mechanism, a positioning device, and an electrical inspection device.

Background Art

[0002] For example, in an electrical inspection device for inspecting the conductivity of a printed circuit board or the like, it is desired to be able to position an electrical inspection jig at high speed and with high precision with respect to an inspection site (measurement point).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] Patent Document 1 describes a technique for suppressing the bulkiness of wiring and reducing the weight of a movable part by reducing the number of wirings connecting the movable part and the fixed part, and improving the moving speed and moving accuracy of the movable part.

[0005] However, on the other hand, in recent years, due to the miniaturization of printed circuit boards to be inspected and the increase in the number of connection points, the mass of the connection switching device in the electrical inspection device has been increasing.

[0006] Patent Document 2 describes an electrical inspection device including a first mass part and a second mass part that are each independently rotatably held with respect to a fixed part. Patent Document 2 describes that by providing a connection structure that connects the first mass part and the second mass part so as to regulate the relative movement in the circumferential direction of the rotation of the first mass part and the second mass part while allowing the relative movement in the axial direction and the radial direction of the rotation, positioning can be performed with high precision and in a short time.

[0007] Today, miniaturization and other advancements are being further promoted in printed circuit boards. As a result, the mass of equipment and other components placed in the moving parts has increased, and the impact of vibrations in the moving parts on the accuracy of movement has become greater.

[0008] One aspect of this disclosure aims to provide a pivoting mechanism that can improve movement accuracy. [Means for solving the problem]

[0009] A pivoting mechanism according to one aspect of the present disclosure comprises a first rotating body having a first mass portion and a first shaft portion, a second rotating body having a second mass portion and a second shaft portion, a fixing member that holds the first shaft portion and the second shaft portion rotatably on the same axis, and a connecting structure that connects the first rotating body and the second rotating body while restricting relative movement in the rotational direction, wherein the first rotating body and the second rotating body have a first opposing portion and a second opposing portion that are spaced apart and face each other in the rotational axis direction, and a through hole is formed in the first opposing portion, The connection structure includes a shaft member that connects the first opposing portion and the second opposing portion while passing through the through hole, a first elastic member positioned between the first opposing portion and the second opposing portion to cover the circumference of the shaft member, and a second elastic member positioned on the side of the first opposing portion opposite to the second opposing portion to cover the circumference of the shaft member, wherein the first opposing portion is movable in the axial direction of the shaft member, and the first elastic member and the second elastic member are compressed in accordance with the relative distance between the first opposing portion and the second opposing portion. [Effects of the Invention]

[0010] A pivoting mechanism according to one aspect of this disclosure can improve movement accuracy. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a schematic cross-sectional view showing a swivel mechanism and an electrical inspection device equipped with the swivel mechanism according to one embodiment of the present disclosure. [Figure 2]Figure 2 is a schematic side view showing the connection structure in the slewing mechanism of Figure 1. [Figure 3] Figure 3 is a schematic exploded perspective view of the connection structure shown in Figure 2. [Figure 4] Figure 4 is a cross-sectional view of the connection structure in Figure 2, taken from the positive side in the Y-axis direction. [Figure 5] Figure 5 is a cross-sectional view of the VV line in the connection structure shown in Figure 2. [Figure 6] Figure 6 is a cross-sectional view corresponding to Figure 4, showing the behavior of the first and second elastic members when the first and second opposing parts move apart in the connection structure of Figure 2. [Figure 7] Figure 7 is a cross-sectional view corresponding to Figure 4, showing the behavior of the first and second elastic members when the first and second opposing parts approach each other in the connection structure of Figure 2. [Figure 8] Figure 8 is a schematic plan view showing a positioning device according to one embodiment of the present disclosure. [Figure 9] Figure 9 is a cross-sectional view corresponding to Figure 4, showing a first modified example of the connection structure in Figure 2. [Figure 10] Figure 10 is a cross-sectional view corresponding to Figure 4, showing a second modified example of the connection structure in Figure 2. [Figure 11] Figure 11 is a cross-sectional view corresponding to Figure 4, showing a third modified example of the connection structure in Figure 2. [Modes for carrying out the invention]

[0012] [Description of Embodiments in this Disclosure] First, the embodiments of this disclosure will be listed and described.

[0013] (1) The swivel mechanism according to one aspect of the present disclosure includes a first rotating body having a first mass portion and a first shaft portion, a second rotating body having a second mass portion and a second shaft portion, a fixing member that rotatably holds the first shaft portion and the second shaft portion coaxially, and a connection structure that connects the first rotating body and the second rotating body while restricting relative movement in the rotational direction. The first rotating body and the second rotating body have first opposing portions and second opposing portions that face each other with a gap in the rotational axis direction. A through hole is formed in the first opposing portion. The connection structure includes a shaft member that connects the first opposing portion and the second opposing portion in a state of passing through the through hole, a first elastic member that is disposed so as to cover the periphery of the shaft member between the first opposing portion and the second opposing portion, and a second elastic member that is disposed so as to cover the periphery of the shaft member on the surface side of the first opposing portion opposite to the second opposing portion. The first opposing portion is movable in the axial direction of the shaft member, and the first elastic member and the second elastic member are compressed corresponding to the relative distance between the first opposing portion and the second opposing portion.

[0014] (2) In the above (1), the first elastic member and the second elastic member may be compressed in the axial direction of the shaft member in the reference state.

[0015] (3) In the above (2), the connection structure further includes a first spacer disposed between the peripheral surface of the shaft member and the first elastic member, and a second spacer disposed between the peripheral surface of the shaft member and the second elastic member. In the reference state, the compression amount of the first elastic member may be determined by the axial length of the first spacer, and the compression amount of the second elastic member may be determined by the axial length of the second spacer.

[0016] (4) In any one of the above (1) to (3), the connection structure further includes a ring member fixed to the peripheral surface of the shaft member in the through hole, and the outer peripheral surface of the ring member may be spherical.

[0017] (5) In any of (1) to (4) above, the through hole may restrict the relative movement of the shaft member in the rotational direction and allow the relative movement of the shaft member in the radial direction perpendicular to the rotational direction.

[0018] (6) In any of (1) to (5) above, the connecting structure further comprises a first sliding member disposed between the first opposing portion and the first elastic member, and a second sliding member disposed between the first opposing portion and the second elastic member, wherein the first sliding member has a first sliding surface that is in surface contact with the first opposing portion, and the second sliding member has a second sliding surface that is in surface contact with the first opposing portion.

[0019] (7) In any of (1) to (6) above, the connecting structure further comprises a support member that supports the second elastic member from the opposite side of the first opposing portion, wherein the support member has a support surface that is in surface contact with the second elastic member.

[0020] (8) A positioning device according to another aspect of the present disclosure comprises a pivoting mechanism according to any of (1) to (7) above and a positioning mechanism for positioning the pivoting mechanism in three dimensions.

[0021] (9) An electrical inspection device according to another aspect of the present disclosure comprises any of the swivel mechanisms described in (1) to (7) above.

[0022] In this disclosure, "reference state" means the state in which the first and second rotating bodies are not rotating relative to the fixed member. "In the reference state, the amount of compression of the first elastic member is determined by the axial length of the first spacer" means that in the reference state, the first elastic member is positioned in a compressed state at a certain position in the axial direction of the first spacer, and "In the reference state, the amount of compression of the second elastic member is determined by the axial length of the second spacer" means that in the reference state, the second elastic member is positioned in a compressed state at a certain position in the axial direction of the second spacer. "Restricting relative movement in the rotational direction" means preventing misalignment between the first and second rotating bodies in the rotational direction. "No misalignment" means that, depending on the precision required for the device, the maximum amount of misalignment between the first and second rotating bodies in the rotational direction may be 1 degree or 0.5 degrees. "Allowing relative movement of shaft members" means that relative movement of shaft members is not hindered during normal operation of the device.

[0023] [Details of the embodiments of this disclosure] The embodiments of this disclosure will be described in detail below. Note that the figures are schematic and may not correspond to actual dimensions, proportions, etc. In this disclosure, the designations "First," "Second," etc., are for distinguishing the components to which they are attached and do not limit the number, order, priority, etc.

[0024] [First Embodiment] A pivoting mechanism 1 and an electrical inspection device 100 equipped with the pivoting mechanism 1 according to one aspect of the present disclosure will be described with reference to Figures 1 to 7.

[0025] <Swivel mechanism> As shown in Figure 1, the rotation mechanism 1 comprises a first rotating body 10 having a first mass portion 11 and a first shaft portion 12, a second rotating body 20 having a second mass portion 21 and a second shaft portion 22, a fixing member 30 that holds the first shaft portion 12 and the second shaft portion 22 rotatably and coaxially, and a connecting structure 40 that connects the first rotating body 10 and the second rotating body 20 while restricting relative movement in the rotational direction (around the θ axis in Figure 1). The first rotating body 10 and the second rotating body 20 have a first opposing portion 13 and a second opposing portion 23 that are spaced apart and face each other in the rotational direction (the direction in which the first shaft portion 12 and the second shaft portion 22 extend; the Z axis direction in Figure 1). The first opposing portion 13 is provided on the first rotating body 10, and the second opposing portion 23 is provided on the second rotating body 20. A through hole 13a is formed in the first opposing portion 13.

[0026] As shown in Figures 2 to 5, the connection structure 40 includes a shaft member 41 that connects the first opposing portion 13 and the second opposing portion 23 while passing through the through hole 13a, a first elastic member 42 positioned between the first opposing portion 13 and the second opposing portion 23 to cover the periphery of the shaft member 41, and a second elastic member 43 positioned on the side of the first opposing portion 13 opposite to the second opposing portion 23 to cover the periphery of the shaft member 41. The first opposing portion 13 is movable in the axial direction of the shaft member 41 (in the Z-axis direction in Figures 2 to 5), and the first elastic member 42 and the second elastic member 43 are compressed in accordance with the relative distance between the first opposing portion 13 and the second opposing portion 23.

[0027] The pivot mechanism 1, in which the first shaft portion 12 and the second shaft portion 22 are rotatable coaxially with respect to the fixed member 30, can restrict the relative movement of the first rotating body 10 and the second rotating body 20 in the rotational direction, while further improving the movement accuracy of the first rotating body 10 and the second rotating body 20. More specifically, in the pivot mechanism 1, the first opposing portion 13 and the second opposing portion 23 are connected by a shaft member 41. The shaft member 41 has a first end portion 41a and a second end portion 41b. The first end portion 41a is held on the outside of the second elastic member 43 (opposite the side facing the first opposing portion 13; the negative side in the Z-axis direction in Figures 2 to 5). The second end portion 41b is positioned on the second opposing portion 23, or held on the outside of the second opposing portion 23 (opposite the side facing the first opposing portion 13). In this configuration, the pivot mechanism 1 has a first elastic member 42 positioned between the first opposing part 13 and the second opposing part 23, and a second elastic member 43 positioned between the first opposing part 13 and the first end portion 41a. In the pivot mechanism 1, the amount of compression of the first elastic member 42 and the second elastic member 43 changes when the first opposing part 13 and the second opposing part 23 move away from each other and when the first opposing part 13 and the second opposing part 23 move closer together. As shown in Figure 6, in the pivot mechanism 1, the second elastic member 43 is compressed when the first opposing part 13 and the second opposing part 23 move away from each other, and as shown in Figure 7, the first elastic member 42 is compressed when the first opposing part 13 and the second opposing part 23 move closer together. As a result, the pivot mechanism 1 can reduce the influence of vibrations of the first mass part 11 and the second mass part 21 on the movement accuracy, and consequently improve the movement accuracy. Furthermore, the swivel mechanism 1 makes it possible to improve movement accuracy while reducing the number of parts. Moreover, the swivel mechanism 1 makes it easier to achieve both improved movement accuracy and movement speed.

[0028] As shown in Figures 2 to 5, the connection structure 40 may include a first spacer 44 positioned between the circumferential surface of the shaft member 41 and the first elastic member 42, and a second spacer 45 positioned between the circumferential surface of the shaft member 41 and the second elastic member 43. The connection structure 40 may also include a ring member 46 fixed to the circumferential surface of the shaft member 41 within the through hole 13a. The connection structure 40 may also include a first sliding member 47 positioned between the first opposing portion 13 and the first elastic member 42, and a second sliding member 48 positioned between the first opposing portion 13 and the second elastic member 43. The connection structure 40 may also include a support member 49 that supports the second elastic member 43 from the opposite side of the first opposing portion 13 (the negative side in the Z-axis direction in Figures 2 to 5).

[0029] The following describes the details of each part of the slewing mechanism 1. Note that the following description will focus on the case where the slewing mechanism 1 constitutes part of the electrical inspection device 100.

[0030] (First rotational body) The first rotating body 10 has a first mass portion 11 and a first shaft portion 12. The first mass portion 11 is fixed to the first shaft portion 12 and rotates together with the first shaft portion 12 around the θ axis. In this embodiment, the first mass portion 11 includes an electrical inspection head 11a. The electrical inspection head 11a has a plurality of electrical contacts (probes). The first mass portion 11 may also include a drive unit 11b that rotates the first shaft portion 12. The first rotating body 10 checks the electrical characteristics of the printed circuit board P by aligning the first rotating body 10 with the printed circuit board P at an angle around the θ axis and bringing the plurality of electrical contacts into contact with the measurement point. In this disclosure, "fixed" includes cases where it is directly fixed and cases where it is indirectly fixed by sandwiching other members.

[0031] The first rotating body 10 has a first opposing portion 13 that faces the second opposing portion 23 of the second rotating body 20. The material of the first opposing portion 13 is not particularly limited, but a highly tough material with excellent durability is preferred. Examples of such highly tough materials include hardened steel and other high-hardness metal materials. The first opposing portion 13 is fixed to the first shaft portion 12 and rotates together with the first shaft portion 12 around the θ axis. The first opposing portion 13 is, for example, plate-shaped. The plate surface of the first opposing portion 13 is positioned perpendicular to the axis of the first shaft portion 12 (i.e., positioned in the XY plane direction in Figures 1 to 5). In Figure 1, the first opposing portion 13 is positioned away from the first shaft portion 12 in a plan view (view in the Z-axis direction in Figures 1 to 5). However, in this disclosure, the first opposing portion 13 may be positioned directly above or below the first shaft portion 12 in a plan view, or directly above or below the second shaft portion 22 in a plan view.

[0032] A through hole 13a is formed in the first opposing portion 13. The through hole 13a penetrates the first opposing portion 13 in the thickness direction. As shown in Figure 5, the through hole 13a is elongated in plan view. The through hole 13a has a minor axis Ma equal in length to the diameter of the ring member 46, and a major axis La perpendicular to this minor axis Ma. The minor axis Ma extends along the rotation direction of the first rotating body 10 and the second rotating body 20. The major axis La extends along the radial direction (radial direction centered on the θ axis) perpendicular to the rotation direction. The through hole 13a is configured to be movable along the major axis La while holding the ring member 46 in a direction parallel to the minor axis Ma. The specific planar shape of the through hole 13a is not particularly limited; for example, it may be a rectangle or an ellipse (a shape in which the ends of two parallel sides are connected by an arc).

[0033] The first rotating body 10 may have a wiring holding portion 14 that holds wiring W, etc., which electrically connects the first rotating body 10 and the second rotating body 20. The first opposing portion 13 may be fixed to the wiring holding portion 14.

[0034] (Second rotational body) The second rotating body 20 rotates around the θ axis in synchronization with the first rotating body 10. The second rotating body 20 has a second mass portion 21 and a second shaft portion 22. The second mass portion 21 is fixed to the second shaft portion 22 and rotates together with the second shaft portion 22 around the θ axis. In this embodiment, the second mass portion 21 may include, for example, a switching unit capable of switching the connection of multiple probes.

[0035] The second rotating body 20 has a second opposing portion 23 that faces the first opposing portion 13 of the first rotating body 10. The second opposing portion 23 is fixed to the second shaft portion 22 and rotates together with the second shaft portion 22 around the θ axis. The second opposing portion 23 is, for example, plate-shaped. The plate surface of the second opposing portion 23 is positioned perpendicular to the axis of the second shaft portion 22 (i.e., positioned in the XY plane direction in Figures 1 to 5).

[0036] (Fixing member) The fixing member 30 includes a first bearing 30a that rotatably supports the first shaft portion 12, a second bearing 30b that rotatably supports the second shaft portion 22, and a main body 30c on which the first bearing 30a and the second bearing 30b are arranged. In the fixing member 30, the first bearing 30a and the second bearing 30b are provided coaxially in the design, although strict precision is not required.

[0037] (Connection structure) [Shaft member] The shaft member 41 has a first end 41a and a second end 41b. The first end 41a is flanged in diameter. The second end 41b is positioned so as not to move axially with respect to the second opposing portion 23 (i.e., the second end 41b is positioned so as not to move relative to the second opposing portion 23 in the axial direction). The second end 41b may be circumferentially rotatable or imrotable with respect to the second opposing portion 23. The second end 41b may be fixed to the second opposing portion 23, for example, by welding, bonding, or screwing.

[0038] The shaft member 41 is positioned such that the second end 41b does not move relative to the second opposing portion 23 in the axial direction, and the portion between the first end 41a and the second end 41b passes through the through hole 13a of the first opposing portion 13, with the first end 41a held outside the first opposing portion 13. With this configuration, the first opposing portion 13 is positioned to be movable in the axial direction of the shaft member 41 between the first end 41a and the second end 41b.

[0039] [Elastic material] The first elastic member 42 and the second elastic member 43 are annular in shape, each having a through hole through which the shaft member 41 passes. The first elastic member 42 and the second elastic member 43 may also be circular in shape. The first elastic member 42 and the second elastic member 43 are configured to be compressible in the thickness direction. Examples of materials for the first elastic member 42 and the second elastic member 43 include resin and rubber.

[0040] The first elastic member 42 and the second elastic member 43 do not necessarily have to be compressed in the axial direction of the shaft member 41 in the reference state, but it is preferable that they be compressed in the axial direction of the shaft member 41. Because the first elastic member 42 and the second elastic member 43 are pre-compressed, when one of the first elastic member 42 or the second elastic member 43 is further compressed, the other of the first elastic member 42 or the second elastic member 43 can expand (see Figures 6 and 7). Therefore, it is easy to keep the first opposing part 13 and the second opposing part 23 constantly pressed by the first elastic member 42 and the second elastic member 43. As a result, the influence of vibration of the first mass part 11 and the second mass part 21 on the movement accuracy can be more reliably reduced.

[0041] [Sliding parts] In the connection structure 40, a first sliding member 47 is positioned between the first opposing portion 13 and the first elastic member 42. A second sliding member 48 is positioned between the first opposing portion 13 and the second elastic member 43. As shown in Figures 2 and 4, the first opposing portion 13, the first sliding member 47, and the first elastic member 42 are directly stacked in this order. Similarly, the first opposing portion 13, the second sliding member 48, and the second elastic member 43 are directly stacked in this order.

[0042] The first sliding member 47 has a first sliding surface 47a that makes surface contact with the first opposing portion 13. The second sliding member 48 has a second sliding surface 48a that makes surface contact with the first opposing portion 13. With this configuration, the first sliding member 47 and the second sliding member 48 improve the smoothness of the movement of the shaft member 41 in the direction of the plate surface of the first opposing portion 13.

[0043] The first sliding member 47 and the second sliding member 48 are annular in shape, each having a through hole through which the shaft member 41 passes. The first sliding member 47 and the second sliding member 48 may also be circular in shape. The material of the first sliding member 47 and the second sliding member 48 is not particularly limited as long as it has superior sliding properties against the first opposing portion 13 compared to the first elastic member 42 and the second elastic member 43, but a high-toughness material is preferred from the viewpoint of durability against contact with the first opposing portion 13. Examples of the high-toughness material include high-hardness metal materials such as hardened steel.

[0044] Preferably, the first sliding member 47 is in surface contact with the first elastic member 42, and the second sliding member 48 is in surface contact with the second elastic member 43. In this case, it is preferable that the first elastic member 42 is in surface contact with the first sliding member 47 over the entire surface facing the first opposing portion 13, and it is preferable that the second elastic member 43 is in surface contact with the second sliding member 48 over the entire surface facing the first opposing portion 13. According to this embodiment, the compression area of ​​the first elastic member 42 and the second elastic member 43 can be easily and reliably increased. As a result, the influence of vibrations of the first mass portion 11 and the second mass portion 21 on the movement accuracy can be more reliably reduced.

[0045] As shown in Figure 4, the peripheral portions of the first sliding surface 47a and the second sliding surface 48a may be rounded. According to this embodiment, the sliding properties of the first sliding surface 47a and the second sliding surface 48a with respect to the first opposing portion 13 can be improved.

[0046] [Spacer] In the connection structure 40, a first spacer 44 is positioned between the circumferential surface of the shaft member 41 and the first elastic member 42. In this embodiment, the first spacer 44 extends to the space between the circumferential surface of the shaft member 41 and the inner circumferential surface of the first sliding member 47. In other words, the first spacer 44 is positioned in the gap between the circumferential surface of the shaft member 41 and the inner circumferential surface of the first elastic member 42 and the inner circumferential surface of the first sliding member 47. Both ends of the first spacer 44 are in contact with the second opposing portion 23 and the ring member 46. In the reference state, the first spacer 44 is held between the first opposing portion 13 and the second opposing portion 23. The first spacer 44 is configured such that when the first opposing portion 13 and the second opposing portion 23 move closer to each other, the end of the first spacer 44 on the first opposing portion 13 side is inserted into the through hole 13a.

[0047] Furthermore, in the connection structure 40, a second spacer 45 is positioned between the circumferential surface of the shaft member 41 and the second elastic member 43. In this embodiment, the second spacer 45 extends to the space between the circumferential surface of the shaft member 41 and the inner circumferential surface of the second sliding member 48. In other words, the second spacer 45 is positioned in the gap between the circumferential surface of the shaft member 41 and the inner circumferential surface of the second elastic member 43 and the inner circumferential surface of the second sliding member 48. Both ends of the second spacer 45 are in contact with the support member 49 and the ring member 46. In particular, in this embodiment, one end of the second spacer 45 is connected to the support member 49, and as a result, the second spacer 45 and the support member 49 are integrally formed. The integral formation of the second spacer 45 with the support member 49 improves handling when assembling the connection structure 40. In the standard state, the second spacer 45 is held between the first opposing part 13 and the support member 49. The second spacer 45 is configured such that when the first opposing portion 13 and the second opposing portion 23 move away from each other, the end on the first opposing portion 13 side is inserted into the through hole 13a.

[0048] The first spacer 44 and the second spacer 45 are each cylindrical. The shaft member 41 passes through the inside of the first spacer 44 and the second spacer 45. The first spacer 44 and the second spacer 45 may be fixed in the axial direction of the shaft member 41. Examples of materials for the first spacer 44 and the second spacer 45 include metal or alloy.

[0049] In the standard state, the amount of compression of the first elastic member 42 is determined by the axial length of the first spacer 44. Also, in the standard state, the amount of compression of the second elastic member 43 is determined by the axial length of the second spacer 45. More specifically, in the standard state, the first elastic member 42 and the first sliding member 47 are arranged on the outer circumferential surface of the first spacer 44. In the standard state, the combined axial length of the first elastic member 42 and the first sliding member 47 is equal to the axial length of the first spacer 44. Therefore, if the thickness of the first elastic member 42 (thickness in the uncompressed state) is A1, the thickness of the first sliding member 47 is B1, and the axial length of the first spacer 44 is C1, then A1 + B1 > C1, and the amount of compression D1 of the first elastic member 43 in the standard state is D1 = A1 + B1 - C1. Also, in the standard state, the second elastic member 43 and the second sliding member 48 are arranged on the outer circumferential surface of the second spacer 45. In the standard state, the combined axial length of the second elastic member 43 and the second sliding member 48 is equal to the axial length of the second spacer 45. Therefore, if the thickness of the second elastic member 43 (thickness in the uncompressed state) is A2, the thickness of the second sliding member 48 is B2, and the axial length of the second spacer 45 is C2, then A2 + B2 > C2, and the amount of compression D2 of the second elastic member 43 in the standard state is D2 = A2 + B2 - C2.

[0050] As shown in Figure 6, when the first opposing part 13 and the second opposing part 23 move away from each other, a portion of the second spacer 45 is inserted into the through hole 13a, and the second elastic member 43 is compressed between the first opposing part 13 and the support member 49. Also, as shown in Figure 7, when the first opposing part 13 and the second opposing part 23 move closer together, a portion of the first spacer 44 is inserted into the through hole 13a, and the first elastic member 42 is compressed between the first opposing part 13 and the second opposing part 23. With this configuration, the pivoting mechanism 1 can easily reduce the influence of vibrations of the first mass part 11 and the second mass part 21 on the accuracy of movement.

[0051] [Ring component] Within the through hole 13a of the first opposing portion 13, a ring member 46 is fixed to the circumferential surface of the shaft member 41. The ring member 46 is directly fixed to the circumferential surface of the shaft member 41. As shown in Figures 3 and 4, the outer circumferential surface of the ring member 46 is spherical. In this embodiment, the ring member 46 has a shape obtained by cutting a sphere with two planes perpendicular to the axis of the shaft member 41. Because the outer circumferential surface of the ring member 46 is spherical, the pivot mechanism 1 can prevent interference between the inner circumferential surface of the through hole 13a and the outer circumferential surface of the ring member 46 when the shaft member 41 is tilted relative to the reference state. Therefore, the shaft member 41 can be easily tilted relative to the reference state. As a result, the pivot mechanism 1 can improve the accuracy of movement while reducing the load applied to the pivot mechanism 1. The ring member 46 may come into contact with the inner circumferential surface of the through hole 13a when the first rotating body 10 and the second rotating body 20 are rotating. From this perspective, a high-toughness material is preferred for the ring member 46. Examples of such high-toughness materials include hardened steel and other high-hardness metal materials.

[0052] In the connection structure 40, the through hole 13a restricts the relative movement of the shaft member 41 in the rotational direction (around the θ axis) of the first rotating body 10 and the second rotating body 20, and allows the relative movement of the shaft member 41 in the radial direction perpendicular to the rotational direction. In the pivot mechanism 1, as described above, the through hole 13a is elongated, and the ring member 46 can move along the long axis La of the through hole 13a. As a result, the shaft member 41 can move relative to the shaft member in the radial direction within the through hole 13a. On the other hand, in the pivot mechanism 1, movement of the shaft member 41 in the direction along the short axis Ma within the through hole 13a is prevented. As a result, the relative movement of the shaft member 41 in the rotational direction within the through hole 13a is restricted.

[0053] The through-hole 13a is provided to restrict the relative movement of the shaft member 41 in the rotational direction and to allow the relative movement of the shaft member 41 in the radial direction perpendicular to the rotational direction, thereby improving the movement accuracy of the pivot mechanism 1 while reducing the load applied to the pivot mechanism 1.

[0054] [Support members] In the connection structure 40, the support member 49 supports the second elastic member 43 while being supported from the outside by the first end portion 41a. The support member 49 has a support surface 49a that is in surface contact with the second elastic member 43. By having a support surface 49a, the support member 49 can easily and reliably increase the compression area of ​​the second elastic member 43. As a result, the influence of vibrations of the first mass portion 11 and the second mass portion 21 on the movement accuracy can be reduced more reliably. From the viewpoint of increasing the compression area of ​​the second elastic member 43, it is preferable that the second elastic member 43 is in surface contact with the support surface 49a over its entire surface facing the support member 49.

[0055] The support member 49 is annular in shape and has a through hole through which the shaft member 41 passes. The support member 49 may also be circular in shape. Examples of materials for the support member 49 include metal or alloy.

[0056] As described above, in this embodiment, the support member 49 is integrally formed with the second spacer 45. More specifically, the second spacer 45 protrudes cylindrically from the inner peripheral edge of the support member 49 toward the first opposing portion 13.

[0057] <Electrical inspection equipment> As described above, in the swivel mechanism 1, the first mass section 11 includes an electrical inspection head 11a. With this configuration, the swivel mechanism 1 is incorporated as part of the electrical inspection device 100.

[0058] The electrical inspection device 100 can inspect the electrical characteristics of the printed circuit board P by rotating the first rotating body 10 and the second rotating body 20 around the θ axis in accordance with the measurement points of the printed circuit board P, and by bringing multiple probes into contact with the measurement points.

[0059] Since the electrical inspection device 100 is equipped with the pivot mechanism 1, its movement accuracy can be improved. Furthermore, since the electrical inspection device 100 is equipped with the pivot mechanism 1, it can achieve both improved movement accuracy and movement speed. As a result, the electrical inspection device 100 can improve the efficiency of electrical inspections.

[0060] <Positioning device> Next, with reference to Figure 8, a positioning device 110 according to one aspect of the present disclosure will be described. The positioning device 110 comprises a pivoting mechanism 1 and a positioning mechanism 120 for positioning the pivoting mechanism 1 in three dimensions.

[0061] (Positioning mechanism) The specific configuration of the positioning mechanism 120 is not particularly limited as long as it can position the slewing mechanism 1 in three dimensions. The positioning mechanism 120 may, for example, include a fixed part 121 to which the slewing mechanism 1 is fixed, a movable body 122 for positioning the fixed part 121 in the horizontal direction, and a lifting mechanism 123 for positioning the movable body 122 in the vertical direction.

[0062] Since the positioning device 110 is equipped with the pivoting mechanism 1, the accuracy of movement can be improved.

[0063] [Other embodiments] The embodiments described above do not limit the configuration of the present invention. Therefore, the embodiments may omit, substitute, or add components of each part of the embodiments based on the description herein and common technical knowledge, and all such additions should be interpreted as falling within the scope of the present invention.

[0064] In this disclosure, the term "mass part" is not particularly limited as long as it is capable of generating vibration during rotation due to its mass, and can be configured according to the intended use of the device.

[0065] In the above embodiment, a case was described in which the first rotating body has an electrical inspection head and the second rotating body has a switching unit. However, in this disclosure, the first and second rotating bodies are not defined in relation to any specific function. Therefore, for example, it is also possible for the first rotating body to have a switching unit and the second rotating body to have an electrical inspection head.

[0066] In the above embodiment, the second end of the shaft member was positioned so as not to move relative to the second opposing portion in the axial direction. However, in this disclosure, the second end may be positioned to move relative to the second opposing portion in the axial direction on the outside of the second opposing portion (on the side opposite to the side facing the first opposing portion). In this case, the pivot mechanism may have a third elastic member that surrounds the shaft member between the second end and the second opposing portion. For example, as shown in Figure 9, the pivoting mechanism 50 may include, in addition to the first elastic member 42, second elastic member 43, first spacer 44, second spacer 45, ring member 46, first sliding member 47, second sliding member 48, and support member 49 of Figure 4, a third elastic member 53 positioned on the side of the second opposing portion 23 opposite to the first opposing portion 13 so as to cover the periphery of the shaft member 41, a third sliding member 58 positioned between the second opposing portion 23 and the third elastic member 53, a third spacer 54 positioned between the circumferential surface of the shaft member 41 and the third elastic member 53 and third sliding member 58, and a second support member 59 that supports the third elastic member 53 from the side opposite to the second opposing portion 23. In Figure 9, the second support member 59 is fixed to the shaft member 41 so as not to move relative to the shaft member 41 in the axial direction. According to this configuration, (a) when an external force acts downward (downward in the Z-axis direction) on the first opposing part 13, a compressive force acts on the second elastic member 43 and the third elastic member 53; (b) when an external force acts upward (upward in the Z-axis direction) on the first opposing part 13, a compressive force acts on the first elastic member 42; (c) when an external force acts downward on the second opposing part 23, a compressive force acts on the first elastic member 42; and (d) when an external force acts upward on the second opposing part 23, a compressive force acts on the second elastic member 43 and the third elastic member 53. The rotation mechanism 50 can also improve its movement accuracy by this configuration.

[0067] In this pivoting mechanism, it is possible to omit one or more of the first spacer, second spacer, ring member, first sliding member, second sliding member, and support member, depending on the required movement accuracy, etc. Furthermore, the pivoting mechanism may also be configured to include members other than the first spacer, second spacer, ring member, first sliding member, second sliding member, and support member.

[0068] In this pivoting mechanism, any two or more members can be formed integrally or separately. For example, in this pivoting mechanism, the elastic members (first elastic member and second elastic member) and the sliding members (first sliding member and second sliding member) can be bonded together with an adhesive or the like. It is also possible to form the support member integrally with the shaft member. Furthermore, although the above embodiment described a case in which the second spacer and the support member are formed integrally, as shown in Figure 10, the second spacer 65 and the support member 69 may be formed separately.

[0069] In the above embodiment, a configuration was described in which, in the reference state, the amount of compression of the first elastic member is determined by the axial length of the first spacer, and the amount of compression of the second elastic member is determined by the axial length of the second spacer. On the other hand, as shown in Figure 11, the pivot mechanism 70 can also be configured such that, for example, the maximum amount of compression of the first elastic member 72 is determined by the axial length of the first spacer 74, and the maximum amount of compression of the second elastic member 73 is determined by the axial length of the second spacer 75. In this pivot mechanism 70, the axial length of the first spacer 74 is smaller than the distance between the first opposing part 13 and the second opposing part 23 in the reference state, and the axial length of the second spacer 75 is smaller than the distance between the first opposing part 13 and the support member 49 in the reference state. Furthermore, in the pivot mechanism 70, the first spacer 74 is always held between the first opposing part 13 and the second opposing part 23, and the second spacer 75 is always held between the first opposing part 13 and the support member 49 (that is, the ends of the first spacer 74 and the ends of the second spacer 75 are not inserted into the through hole 13a). With this configuration, the pivot mechanism 70 may be configured such that the first elastic member 72 can be compressed until its combined axial length with the first sliding member 47 is equal to the axial length of the first spacer 74, and the second elastic member 73 can be compressed until its combined axial length with the second sliding member 48 is equal to the axial length of the second spacer 75.

[0070] A fluid such as oil may be injected into one or both of the first and second elastic members. This embodiment makes it easier to improve the vibration suppression effect.

[0071] The shape of the through-hole formed in the first opposing portion is not limited to the shape described in the above embodiment. For example, if it is not necessary to allow relative movement of the axial member in all directions in a plan view, the through-hole may be square or circular in a plan view.

[0072] In the above embodiment, a case in which the swivel mechanism constitutes part of an electrical inspection device was described. However, in this disclosure, the swivel mechanism may constitute part of a device other than an electrical inspection device. [Explanation of symbols]

[0073] 1, 50, 70 Swivel Mechanism 10. First Rotating Body 11 1st mass part 11a Electrical inspection head 11b Drive unit 12 First shaft section 13. First opposing section 13a Through hole 14 Wiring holding part 20. Second Rotating Body 21 2nd mass part 22 Second shaft section 23 Second opposing section 30 Fixing member 30a First bearing 30b Second bearing 30c main body 40 Connection Structure 41 Shaft member 41a First end 41b Second end 42, 72 First elastic member 43, 73 Second elastic member 44, 74 First Spacer 45, 65, 75 Second spacer 46 Ring member 47 First sliding member 47a First sliding surface 48 Second sliding member 48a Second sliding surface 49, 69 Support members 49a Support surface 53 Third Elastic Member 54 Third Spacer 58 Third sliding member 59 Second support member 100 Electrical inspection equipment 110 Positioning device 120 Positioning mechanism 121 Fixed part 122 Mobile Unit 123 Lifting mechanism La through hole long axis Short axis of the through hole P Printed Circuit Board W wiring

Claims

1. A first rotating body having a first mass portion and a first shaft portion, A second rotating body having a second mass portion and a second shaft portion, A fixing member that holds the first shaft portion and the second shaft portion coaxially so as to be rotatable, A connecting structure that connects the first rotating body and the second rotating body while restricting their relative movement in the rotational direction. Equipped with, The first rotating body and the second rotating body have a first opposing part and a second opposing part that are spaced apart and facing each other in the direction of the rotation axis, A through hole is formed in the first opposing portion. The aforementioned connection structure is A shaft member that connects the first opposing portion and the second opposing portion while passing through the aforementioned through hole, A first elastic member is positioned between the first opposing portion and the second opposing portion so as to cover the circumference of the shaft member, A second elastic member is positioned on the side of the first opposing portion opposite to the second opposing portion, so as to cover the circumference of the shaft member. It has, The first opposing portion is movable in the axial direction of the shaft member, and the first elastic member and the second elastic member are a pivoting mechanism that compresses in accordance with the relative distance between the first opposing portion and the second opposing portion.

2. The pivot mechanism according to claim 1, wherein the first elastic member and the second elastic member are compressed in the axial direction of the shaft member in a reference state.

3. The aforementioned connection structure is A first spacer is disposed between the circumferential surface of the shaft member and the first elastic member, A second spacer is disposed between the circumferential surface of the shaft member and the second elastic member. Furthermore, it has, The pivot mechanism according to claim 2, wherein in a standard state, the amount of compression of the first elastic member is determined by the axial length of the first spacer, and the amount of compression of the second elastic member is determined by the axial length of the second spacer.

4. The aforementioned connection structure is Within the through hole, there is further a ring member fixed to the circumferential surface of the shaft member. The pivot mechanism according to claim 1, wherein the outer surface of the ring member is spherical.

5. The pivot mechanism according to claim 1, wherein the through hole restricts the relative movement of the shaft member in the rotational direction and allows the relative movement of the shaft member in the radial direction perpendicular to the rotational direction.

6. The aforementioned connection structure is A first sliding member is disposed between the first opposing portion and the first elastic member, A second sliding member is disposed between the first opposing portion and the second elastic member. Furthermore, it has, The first sliding member has a first sliding surface that makes surface contact with the first opposing portion, The pivot mechanism according to claim 1, wherein the second sliding member has a second sliding surface that is in surface contact with the first opposing portion.

7. The aforementioned connection structure further includes a support member that supports the second elastic member from the side opposite to the first opposing portion. The pivot mechanism according to claim 1, wherein the support member has a support surface that is in surface contact with the second elastic member.

8. A pivot mechanism according to any one of claims 1 to 7, A positioning mechanism for positioning the aforementioned rotation mechanism in three dimensions A positioning device equipped with the following features.

9. An electrical inspection device comprising a swivel mechanism according to any one of claims 1 to 7.

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