Ultrasonic coupling device

Abstract

The present invention provides an ultrasonic bonding apparatus that can suppress crack formation in ultrasonic bonding using an asymmetrical model in which the transducer is attached to one side of the bonding tool. [Solution] The ultrasonic bonding apparatus of the embodiment comprises a transducer that vibrates in one direction, a bonding tool connected such that the one direction and the processing direction intersect, a connecting part that connects the transducer and the bonding tool, at least two or more protrusions on the bonding tool that are positioned along the one direction at the tip in the processing direction, and a lifting part that drives the bonding tool in a direction perpendicular to the one direction, wherein the protrusion is furthest from the transducer in the one direction. The first projection located on the side is characterized in that the lower limit of the amplitude in the perpendicular direction is set to be smaller than the lower limit of the amplitude in the perpendicular direction of the second projection adjacent to the first projection in the same direction.

Description

Technical Field

[0004] , , , , ,

[0001] Embodiments of the present invention relate to an ultrasonic bonding apparatus.

Background Art

[0002] Ultrasonic bonding technology is widely used for bonding joined objects made of the same or dissimilar metal materials, such as thin metal foils or semiconductor wire bonding. In an ultrasonic bonding apparatus, a bonding tool for applying ultrasonic vibration is pressed against a joined object placed on a fixed table called an anvil. The bonding tool is connected to a vibrator that generates ultrasonic vibration, and a protrusion is provided at the tip of the bonding tool. When the bonding tool is pressed against the joined object, an indentation (pressure mark) corresponding to the shape of the protrusion occurs at the contact portion of the joined object. This indentation (pressure mark) concentrates the vibration on the bonding surface of the joined object and suppresses the slip between the protrusion provided at the tip when ultrasonic vibration is applied and the joined object. By such a method, under appropriate pressing, both the joined object and the bonding tool vibrate ultrasonically, inducing plastic deformation on the bonding surface and realizing solid-phase bonding. However, in an ultrasonic bonding apparatus, when bonding, an external force exceeding the strength limit of the joined object is applied, causing the material to break and generate cracks. The generation of cracks reduces the strength and durability of the bonded portion. Therefore, an ultrasonic bonding apparatus for suppressing the generation of cracks and achieving a strong bond is required.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

[0005] The problem that this invention aims to solve is an asymmetrical model in which a vibrator is attached to one side of the joining tool. To provide an ultrasonic bonding apparatus that can suppress the occurrence of cracks in ultrasonic bonding. It is. [Means for solving the problem]

[0006] To solve the above problems, the ultrasonic bonding apparatus of the embodiment includes a transducer that vibrates in one direction, A joining tool connected such that the aforementioned one direction and the processing direction intersect, the vibrator and the joining A connecting portion for connecting tools, and the tip of the joining tool in the machining direction, along the one direction At least two or more protrusions arranged in such a manner, and the joining tool perpendicular to the one direction It comprises a lifting and lowering part that drives in the direction, and in the projection, the one direction from the vibrator The lower limit of the amplitude in the perpendicular direction of the first projection located on the farthest side is the first The amplitude of the projection and the second projection adjacent in the same direction is smaller than the lower limit of the amplitude in the direction perpendicular to it. It is characterized by being designed to prevent this from happening. [Brief explanation of the drawing]

[0007] [Figure 1] This is a conceptual schematic diagram of an ultrasonic bonding apparatus according to the first embodiment. [Figure 2] This is an enlarged cross-sectional view of the tip of the joining tool according to the first embodiment. [Figure 3]It is a diagram showing the vertical vibration of the tip 2a according to the first embodiment. [Figure 4] It is a cross-sectional view of the contact part before applying vibration in the prior art. [Figure 5] It is a cross-sectional view of the contact part before and after applying vibration according to the first embodiment. [Figure 6] It is a cross-sectional view before and after pressing the tip 2a according to the second embodiment. [Figure 7] It is an enlarged cross-sectional view of the tip of the joining tool according to the third embodiment. [Figure 8(A)] It is an enlarged view of the tip of the joining tool according to the fourth embodiment. [Figure 8(B)] It is an enlarged cross-sectional view of the tip of the joining tool according to the fourth embodiment. [Figure 9] There is an enlarged view of the tip of the joining tool as viewed from the yz plane according to the fourth embodiment. [Figure 10(A)] An enlarged cross-sectional view of a joining tool suitable as an embodiment. [Figure 10(B)] An enlarged cross-sectional view of a joining tool suitable as an embodiment. [Figure 11(A)] An enlarged cross-sectional view of a joining tool not suitable as an embodiment. [Figure 11(B)] An enlarged cross-sectional view of a joining tool not suitable as an embodiment.

Mode for Carrying Out the Invention

[0008] Hereinafter, embodiments will be described with reference to the drawings. In the drawings, the same components are given the same reference numerals and detailed descriptions are omitted as appropriate. (First Embodiment)

[0009] FIG. 1 is a schematic diagram of a secondary plane showing the overall configuration of the ultrasonic bonding apparatus 1 according to the first embodiment. For clarity of explanation, an x-axis, a y-axis, and a z-axis are provided at the lower left of FIG. 1. As shown in the figure , the ultrasonic bonding apparatus 1 includes a bonding tool 2, a connecting portion 3, a vibrator 4, a control portion 5, and an The structure features a building 7 and a lifting section 8, and an asymmetrical structure with a vibrator 4 attached to one side of the joining tool 2. To use as a sign.

[0010] In the ultrasonic bonding apparatus 1, the bonding tool 2 has a tip that is the cross-section of the structure, as shown in Figure 1, for example. It has a shape that slopes toward (such as a rod shape or tapered shape). Joining tool 2 The tip is provided with a tip portion 2a. In the joining tool 2, the direction toward the tip portion 2a is processed. This is defined as direction. The part located on the opposite side from the tip 2a of the joining tool 2 is the connecting part 3. They are mechanically connected in a way that intersects. The connecting part 3 contains a steel material such as steel. For example, it has a rod shape as shown in Figure 1. One end intersects with the joining tool 2. It is mechanically connected to the other end, and the other end is mechanically connected to the transducer 4. The transducer 4 is It is mechanically connected to the connecting part 3 and electrically connected to the control unit 5. Joining tool 2 The connecting part 3 and the vibrator 4 are integrated by mechanical connection, and the lifting part 8 moves in the z-axis direction. Its position is fixed. The lifting unit 8 is electrically connected to the control unit 5. The anvil 7 is at the tip. It is located at the point where it makes contact when part 2a is lowered. The object to be joined 6 is placed on the anvil 7. It is designed to allow this.

[0011] The body to be joined 6 is made of the same material as the body to be joined 6a, which is mainly made of any metal material. It consists of a superimposed structure made of metal materials, including dissimilar materials, on top of a bonded body 6b. In the wave bonding apparatus 1, the number of metal materials that can be bonded in one processing step is the number of materials to be bonded. The shape and material properties of the base material, the magnitude of the added ultrasonic vibration frequency, and other factors can cause variations. This embodiment considers the case where only the objects to be joined, 6a and 6b, are joined.

[0012] The joining tool 2 includes materials such as steel and cemented carbide. Figure 2 is an enlarged cross-sectional view of the tip portion 2a. As shown in the figure, the tip portion 2a in this embodiment has cone-shaped projections 21 and It has a projection 22 and a projection 23. The projections 21, 22, and 23 are They are arranged along the x-axis direction as shown in Figure 1. Here, the oscillator 4 and the connecting part 3 are The connected surfaces are defined as "connecting surfaces". Three protrusions (protrusion 21, protrusion 22, Among the protrusions 23, the protrusions 23 are located on the transducer 4 (for example, on the connecting surface or on the transducer 4). The position closest to the oscillator 4 side in Figure 1, i.e., the position closest to the x-axis distance from any point (pointing to an arbitrary point). These are positioned protrusions. Similarly, the protrusion 21 is positioned such that the distance in the x-axis direction from the oscillator 4 is the greatest. This is a projection located at a distant position, i.e., at the end opposite to the oscillator 4 in Figure 1. (Protrusion 2) 2 is positioned between projection 21 and projection 23.

[0013] In this embodiment, we will explain the three protrusions shown in Figure 2, but the shape, number, and The arrangement pattern depends on how ultrasonic vibrations are applied, and the shape and material properties of the base material to be joined. It may be modified as appropriate depending on the characteristics, etc.

[0014] The projection 21 has a height smaller than that of projection 22, and the amplitude of projection 21 in the z-axis direction is The lower limit is set to be smaller than the lower limit of the amplitude of the projection 22 in the z-axis direction. ru.

[0015] In this embodiment, the ultrasonic bonding apparatus 1 is shown in Figure 1 as the object to be bonded, which is placed on the anvil 7. The distance between the body 6 and the joining tool 2 in the z-axis direction can be adjusted by driving the lifting unit 8. It can be done. Furthermore, the lifting section 8 is equipped with a pressurizing function that allows a load to be applied in the z-axis direction. Lifting section 8 The control is performed by the control unit 5. By controlling the elevator 8, the joining tool 2 is equipped The tip portion 2a is brought into contact with the object to be joined 6a, and the object to be joined 6 is pressed while applying a predetermined load. In the joining tool 2, the tip portion 2a is the part that comes into contact with the object to be joined 6a. Depending on wear and tear and the characteristics of the base material of the object to be joined 6, it can be removed from the joining tool 2 and replaced as needed. It is also acceptable. The anvil 7 has sufficient strength to withstand the load from the elevator 8 and the supported joined body 6b. It serves to fix the joint in place so that it does not move during joining. In Figure 1, a part of the anvil 7 is recessed. Although it's represented by a convex shape, this uneven surface functions as an anti-slip feature, securing the placed object in place.

[0016] Here, the surface formed by overlapping the joined objects 6a and 6b will hereafter be referred to as the "joint surface." In wave bonding, the tip 2a of the bonding tool 2 is brought into contact with the object to be bonded 6 and pressed, and then the vibrator 4 This generates a predetermined ultrasonic vibration. The vibration generated here acts as an external force on the connecting part 3 and the joint. The voltage is transmitted to the bonding surface via tool 2. The oscillator 4 is a piezoelectric element that expands and contracts when voltage is applied. Piezoelectric elements (PZT: Piezoelectric Element, Piezoelectric Device, etc.) are used. When a predetermined voltage is applied, this expansion and contraction motion generates a unique ultrasonic vibration. In this embodiment, The direction of the ultrasonic vibrations generated by the transducer 4 is defined as being parallel to the x-axis direction shown in Figure 1. (Hereafter, this direction will be referred to as the vibration direction). Also, in the z-axis direction of the figure, the lifting section 8 applies a load. It is defined as a direction. Furthermore, in the same figure, the direction perpendicular to the z-axis and x-axis, respectively, is defined as the y-axis. The control unit 5 performs the adjustment of the predetermined voltage supplied to the oscillator 4 (i.e., the adjustment of the vibration frequency). It breaks.

[0017] Here, the part where the object to be joined 6 and the tip portion 2a come into contact is called the "contact area". Joining tool 2 As shown in Figure 2, it has three protrusions at its tip 2a, so when pressed against the object to be joined 6a In this case, indentations (indentations) corresponding to the shape of each protrusion occur at the contact point. The degree (depth) of the indentation formed at the contact point depends on the load from the lifting section 8. It is adjustable. The depth of the indentation formed at the contact portion of the joined body 6a is controlled by each protrusion. This is equal to the maximum reach in the z-axis direction. In this embodiment, when each projection is pressed The maximum depth reached shall not exceed the thickness of the joined object 6a, that is, it shall not penetrate the joined object 6a. Then I will give the explanation.

[0018] In the aforementioned contact area, the indentation of the joined body 6a formed by pressing from the tip portion 2a The (indentation) creates a physical "engagement" with the projection at tip 2a. This physical "engagement" means: The projection on the tip portion 2a sinks into the indentation formed on the joined object 6 by the pressure, deepening the indentation. This refers to a state where it is pushed in. Due to this "engagement" action, the joined object 6a is pressed against the tip 2a The movement (ultrasonic vibration) becomes easier to follow in the movement of the attached body 6. On the other hand, the anvil 7 is connected to the attached body 6. It functions to fix b in the position where it is placed. Therefore, it moves in accordance with the movement of the tip portion 2a. The joined object 6a and the joined object 6b, whose position is fixed by the anvil, rub against each other at the joining surface. By overlapping, efficient joining is achieved.

[0019] The ultrasonic bonding device 1 adjusts the degree of pressure applied to the bonding tool 2 without providing a protrusion on the tip portion 2a. It is possible to achieve bonding by applying ultrasonic vibrations in conjunction with the process. However, By providing a projection at end 2a, the aforementioned engagement effect can be expected during joining, Ultrasonic vibrations can be concentrated on the contact area where the protrusion is embedded. As shown in Figure 1. In this embodiment, the ultrasonic bonding apparatus 1 has a contact portion between the tip portion 2a and the object to be bonded 6a. The joint surface between the joined parts 6a and 6b is located directly below this position. By concentrating ultrasonic vibrations on the contact area, the vibrations are concentrated directly below the contact area (lifting section). Near the joint surface located in the direction of the load (8), a stronger joint is achieved.

[0020] In this embodiment, the ultrasonic bonding apparatus 1 is asymmetrical, with a transducer 4 attached to one side of the bonding tool 2. It has a structure. The oscillator 4 converts electrical energy into mechanical energy, and this mechanical energy Energy is transmitted to the joining tool 2 via the connecting part 3. In Figure 1, the vibrator 4 vibrates in the x-axis direction. The movement of the connecting part 3 and the joining tool 2 is shown by three pairs of bifurcated parts aligned in the x-axis direction. Directional arrows indicate the connection. The connecting part 3 and the joining tool 2 are subjected to external force from the vibrator 4. It undergoes elastic deformation. Elastic deformation is the deformation of a material when an external force is applied, and when that force is removed, it returns to its original state. This property returns to its original shape. This deformation is an internal property of metal materials such as the connecting part 3 and joining tool 2. It is caused by the generation of stress and strain in that region.

[0021] The connecting part 3 vibrates mainly in the x-axis direction due to the periodic external force applied from the oscillator 4. To reiterate, the joining tool 2, which is connected so as to intersect with the connecting part 3, transmits the outside from the connecting part 3. It is affected by force. The tip portion 2a, which is affected by elastic deformation due to the combination of such vibrations, vibrates Although the vibration is mainly from sub-element 4 (in the x-axis direction), it also vibrates in the z-axis direction. The tip 2a vibrates The vibration in the z-axis direction changes depending on the distance in the x-axis direction from the rotor. To demonstrate this, Below, we focus on the protrusions located on the tip 2a and their positions based on actual measurements. This explains the vibration in the z-axis direction.

[0022] Figure 3 shows the z-axis direction of protrusions 21 and 23 when a predetermined ultrasonic vibration is applied. This figure shows the vibration. In this figure, the vertical axis represents the amplitude [μm] in the z-axis direction. The horizontal axis represents time [ms]. The "■" marks indicate the position of the projection 21 at each time point. The "●" mark indicates the position of projection 23 at each time point. In creating this figure, projection 21 And a reference point is provided on each of the protrusions 23, and the time displacement of these reference points in the z-axis direction, In other words, vibrations were captured with a camera and plotted. As time progressed, the "■" and "●" marks... Comparing the approximate curves connecting them, the amplitude of the protrusion 21 in the z-axis direction is equal to that of the protrusion 23. It can be seen that the amplitude is greater than the amplitude in the z-axis direction. This is because the tip portion 2a has 3 Of the two protrusions, protrusion 2 is located at the position furthest from the oscillator 4 in the x-axis direction. 1 is another protrusion (a protrusion located closer to the oscillator 4 in the x-axis direction). This is because it is more greatly affected by elastic deformation. In Figure 3, for illustrative purposes, a projection 21 The amplitude of the z-axis direction of the projection 23 is shown and can be compared. The magnitude of the z-axis amplitude of 2 is within a range smaller than the z-axis amplitude of the projection 23. This is the projection located at the position furthest from the oscillator 4 in the x-axis direction. After the oscillator 21, the next thing that is greatly affected by elastic deformation is the distance in the x-axis direction from the oscillator 4. This is because it is the projection 23 located in the closest position.

[0023] Thus, in the ultrasonic bonding apparatus 1 according to this embodiment, all differences in amplitude in the z-axis direction It is caused by a protrusion.

[0024] From the above discussion, the tip portion 2a is more affected by elastic deformation than the other protrusions in the z-axis direction The largest vibration occurs in the projection located at the position furthest from the oscillator 4 in the x-axis direction. This is object 21. Each projection has a lower limit of amplitude in the z-axis direction as the amplitude in the z-axis direction increases. The value will increase.

[0025] The "lower limit of amplitude" refers to, for example, the vibration of the protrusion 21 in Figure 3, with respect to the vertical axis (z-axis). At that time, it refers to the lowest point that the projection 21 can reach by vibration. When the tip 2a is brought into contact with 6a and vibration is applied, the projection 21 is deeper than the other projections. The indentation penetrates deeply (the indentation becomes deeper), and at this time the maximum depth reached is formed on the joined body 6a. The size depends on the lower limit of the amplitude of the protrusion 21.

[0026] In the ultrasonic bonding apparatus 1 according to this actual embodiment, "the projection 22 provided on the tip portion 2a has a height of the projection." It is larger than the protrusion 21, and the difference in height between the protrusions 22 and 21 is at least ultrasonic. It is designed so that the amplitude of the projection 22 in the z-axis direction is greater than the amplitude of the projection 22 when vibration is applied." This was the conclusion. Below, we will focus on the relationship between protrusions 21 and 22 and the effects obtained by this design. Explain.

[0027] First, as a point of comparison with this embodiment, we will discuss the design of the tip portion 2a that has been widely used in the prior art. Let's consider the calculation. Here, let's assume that the projection 21 on the tip portion 2a is newly called "projection 21o". Define that the heights of projections 21ο, 22, and 23 are all equal. Figure 4 This refers to the case where the heights of the projections 21ο and 22 on the tip portion 2a are equal, and vibration This is a cross-sectional view of the contact area before and after vibration is applied. Figure 4(A) shows the joint tool 2 contacting the contact area before vibration is applied. This represents the state in which pressure is applied, and the pressure causes a portion of each projection provided on the tip portion 2a to be covered. It can be seen that it is pressed into the joint 6a. Figure 4(B) shows the joint after vibration is applied. This shows the state where the rotor 2 is separated from the contact area. From the state in Figure 4(A), the oscillator 4 vibrates. When added, the protrusion 21 is located at the point furthest from the oscillator 4 in the x-axis direction. ο will vibrate more in the z-axis direction than projection 22. In other words, projection 21ο Since the lower limit of the amplitude in the z-axis direction is greater than that of the protrusion 22, excessive stress is placed on the joined body 6a. Applying a load causes a crack 60a to form the joined object 6a, as shown in Figure 4(B). This can cause the protrusion 21 to bite into the joined body 6a after vibration is applied. Focusing on the depth of the indentation, the projection 22 has formed a recess in the joined body 6a. The (indentation) depth is increased by the difference in the lower limit of the amplitude in the z-axis direction compared to the depth of the indentation.

[0028] Next, let's consider the case where the tip portion 2a is the embodiment. In this embodiment, the projection 2 1 is when the height of the protrusion is smaller than that of the protrusion 22, and the lower limit of the amplitude of the protrusion 21 in the z-axis direction is It was assumed that the projection 22 is provided such that its amplitude in the z-axis direction is smaller than the lower limit of the projection 22. Figure 5 is a cross-sectional view of the contact area before and after vibration is applied in this embodiment. Figure 5(A) shows vibration This shows the state in which the joining tool 2 is pressed against the contact area before dynamic application, and the tip portion 2a is the same as in Figure 2. The tip of each part is being pressed into the joined body 6a by the pressure. Figure 5(B) shows vibration. This shows the state after the joining tool 2 has been removed from the contact area after dynamic application. From the discussion in Figure 3, Figure 5(A) When vibration is applied by the vibrator 4 from this state, the protrusion 21 moves more in the z-axis direction than the other protrusion 22. It vibrates greatly. Taking this effect into consideration, the lower limit of the amplitude of the protrusion 21 in the z-axis direction is set to the protrusion The height of the protrusion 21 is set low enough so as not to exceed the lower limit of the amplitude of 22 in the z-axis direction. Therefore, even if the protrusion 21 vibrates more than the protrusion 22, the protrusion 21 is joined. The depth of the indentation (indentation) formed on the body 6a is determined by the depth of the projection 22 formed on the body 6a to be joined. The projection 21 will not become larger than the depth of the indentation (indentation). Therefore, the projection 21 is in the prior art. This method does not impose excessive load on the joined body 6a, and suppresses the occurrence of cracks. Joining can be performed more efficiently.

[0029] Further details will be explained in the seventh embodiment, but for this embodiment to be valid, the projection 21 The amplitude of the z-axis direction of the projection must be greater than the amplitude of the z-axis direction of the projection 22. be.

[0030] The height of the protrusion should also be discussed. In this embodiment, the protrusion 2 There is no limit to the maximum possible reduction in height of 1. The predetermined vibration frequency supplied from the vibrator 4, the shape of the joining tool 2 and connecting part 3, and the joined object 6 are combined. This is because it changes depending on the growth, etc. However, the reason for providing a protrusion at the tip is, The tip portion 2a and the joined body 6a engage at the contact point, thereby suppressing slippage. In addition to the effect of adding vibration, it concentrates at the joint surface directly below the contact point where the protrusion is embedded. This is because it is expected to have the effect of adding vibration to the target. Therefore, taking these effects into consideration Therefore, it is desirable to set the height of the protrusions to the level that allows for the most efficient joining.

[0031] For the purpose of simplifying the explanation, the following points are not emphasized in Figures 4(B) and 5(B). However, there is an indentation (indentation) formed in the joined body 6a by the projection 22, and projection 23 Between the indentation (indentation) formed in the joined body 6a, and the respective z-axis directions, The difference in the depth of the indentation is equal to the difference in the maximum depth reached. That is, the difference between projection 22 and projection 23 If the heights of the protrusions are equal, the indentation formed by the protrusion 23 is formed by the protrusion 22. The resulting indentation will be deeper than that formed by conventional ultrasound. However, as shown in Figure 4(B), conventional ultrasound is generally used. In the joining device, cracks are formed in the joined object 6a by the projection 21. It is from the vicinity of the indentation (indentation). Therefore, in the above, the indentation between projection 21 and other projections The explanation focused solely on depth.

[0032] The example shown in Figure 5 can also be explained by replacing protrusion 22 with protrusion 23, as shown in the results of Figure 3. It is possible. Considering the relationship between projection 21 and projection 23, "Projection 21 is a projection The height is smaller than that of projection 23, and the lower limit of the amplitude of projection 21 in the z-axis direction is the same as that of projection 23. It may also be set so that it is smaller than the lower limit of the amplitude in the z-axis direction. External factors also exist, and these will be explained in detail in the seventh embodiment. (Second Embodiment)

[0033] Next, a second embodiment will be described using Figure 6. Note that the common points with the first embodiment are significant. Further explanation is omitted. The ultrasonic bonding apparatus 1 of this embodiment is the ultrasonic bonding apparatus 1 of the first embodiment. In this configuration, multiple metal foils are layered to form the joined parts 6a and 6b that constitute the joined part 6. This is a change to a combined multilayer foil 6c. In the first embodiment, when each protrusion is pressed... Although it was explained that the maximum depth reached does not exceed the thickness of the joined body 6a, this is not always the case. The following explains the changes made.

[0034] Figure 6(A) is a cross-sectional view of the tip portion 2a before pressing according to the second embodiment. Similarly, the anvil 7 is provided on which the object to be joined 6 is placed. However, in this implementation The joined body 6 in the form includes a multilayer foil 6c mainly composed of any metal material. It has a structure in which multiple metal foils are layered together. Figure 6(B) shows the first embodiment of the second embodiment. This is a cross-sectional view after pressing the end portion 2a. In Figure 6(B), each projection provided on the tip portion 2a is The multilayer foil 6c is pressed against the surface. As a result, the multilayer foil 6c is subjected to pressure according to the shape of each protrusion. An indentation (indentation) occurs at the contact area (Note that in the first embodiment, the definition of the contact area is...) (This is defined as "the part where the body to be joined 6 and the tip portion 2a come into contact.") As shown in the figure, multilayer foil 6c has as many bonding surfaces as there are overlapping metal foils. Therefore, in a single bonding, simultaneously The work must be performed under predetermined settings to achieve bonding at multiple bonding interfaces.

[0035] This prevents cracking of the metal foil due to excessive load, and the joints that become partially integrated during the joining process. The bonding surface of the multilayer foil 6c located directly below the contact point (in the direction of the load) while suppressing crack formation. By applying concentrated ultrasonic vibrations to the vicinity, a strong bond can be achieved. (Third embodiment)

[0036] Next, a third embodiment will be described using Figure 7. In the first embodiment, as shown in Figure 2... I have explained the three protrusions arranged in a row, but the number can be changed as appropriate. For example... Figure 7 is an enlarged cross-sectional view of the tip of the joining tool according to the third embodiment. For example, the tip portion 2a in this embodiment is a cone-shaped projection 21 described in the first embodiment and In addition to projections 22 and 23, it also has projections 24 and 25. In this configuration, each projection is positioned along the x-axis direction on the tip portion 2a, Object 25 is a projection positioned closest to the oscillator 4 in the x-axis direction. As such, the number of protrusions is not limited to three; it can be increased or decreased as needed, as long as there are two or more. .

[0037] However, as with the first embodiment, restrictions are placed on the height of the protrusion 21 and other protrusions. Therefore, at least in this embodiment, the amplitude of the projection 21 in the z-axis direction is The limit is set to be smaller than the lower limit of the amplitude in the z-axis direction of the adjacent protrusion 22. This embodiment has five protrusions, but how many protrusions can there be? Therefore, the point that is most affected by elastic deformation is the distance in the x-axis direction from the oscillator 4. These are protrusions located at a considerable distance.

[0038] From this point onward, in order to accommodate the increasing number of protrusions, two or more are positioned along the x-axis. In the protrusions, the protrusion located at the position furthest from the oscillator 4 in the x-axis direction is " This is called the "first projection" (corresponding to projection 21 in Figure 7). It is also positioned along the x-axis. In the case of two or more protrusions, the protrusion adjacent to the first protrusion is called the "second protrusion" (Figure) In 7, this corresponds to projection 22). Furthermore, for two or more projections arranged along the x-axis In this context, the projection positioned closest to the oscillator 4 in the x-axis direction is called the "third projection." This is called an "object" (corresponding to projection 25 in Figure 7).

[0039] If the total number of protrusions is 2, then the second protrusion adjacent to the first protrusion is the third protrusion. It can also be interpreted as follows: Taking this situation into account, "In this embodiment, the z-axis direction of the first projection" The lower limit of the amplitude is set to be smaller than the lower limit of the amplitude of the third projection in the z-axis direction. It would also be acceptable to say "it is being done."

[0040] This allows for the creation of cracks that may occur when the number of protrusions is increased and a predetermined ultrasonic vibration is applied. This allows for efficient joining while suppressing the occurrence of defects. Further details are provided in the seventh embodiment. As explained below, for this embodiment to work, the amplitude of the first projection in the z-axis direction must be: It needs to be larger than the amplitude of the second projection in the z-axis direction. (Fourth embodiment)

[0041] Next, a third embodiment will be described using Figures 8(A) and 8(B). In the description, we explained the five conical protrusions arranged as shown in Figure 7, but the protrusions The shape of the object may be changed as appropriate. For example, Figure 8 shows the view from the xz plane according to the fourth embodiment. This is an enlarged cross-sectional view of the tip portion 2a. As shown in Figure 8(A), the tip portion 2a is a semicircular projection. Object 214, pointed projection 224, bicornered rectangular projection 234, pointed protrusion It has a raised object 244 and a rectangular projection 254. Also, Figure 8(B) shows z according to this embodiment. This is an enlarged cross-sectional view of the tip portion 2a as seen from the y-plane. Figures (a), (b), and (c) show the same thing. As shown, the shape of the projection on the tip 2a as viewed from the zy plane is conical, pyramidal. They can take on a variety of shapes, such as circular shapes.

[0042] Thus, protrusions can be set to a variety of shapes, and these are collectively called protruding shapes. However, as with the first and third embodiments, restrictions will be placed on the height of the protrusions. In this embodiment, the projection 214 is the first projection, and the projection 214 The lower limit of the amplitude in the z-axis direction is the lower limit of the amplitude in the z-axis direction of the second protrusion, protrusion 224. It is set to be smaller than the value.

[0043] This can lead to cracks that may occur when the shape of a protrusion is changed and a predetermined ultrasonic vibration is applied. This allows for efficient joining while suppressing the occurrence of [unclear]. Further details are provided in the seventh embodiment. As explained below, for this embodiment to work, the amplitude of the first projection in the z-axis direction must be: It needs to be larger than the amplitude of the second projection in the z-axis direction. (Fifth embodiment)

[0044] Next, a fifth embodiment will be described using Figure 9. In the first embodiment, as shown in Figure 2... I have explained the arrangement of the three protrusions that are aligned along the x-axis, but the arrangement of the protrusions The pattern may be changed as appropriate. For example, Figure 9 is a bottom view of the tip portion 2a according to this embodiment. In this embodiment, the tip portion 2a has an α row, a β row, and a γ row enclosed by a dotted line. These three columns are arranged parallel to the x-axis, and the spacing between the columns is such that they are aligned in the y-axis direction. Assume that the intervals are equal.

[0045] In column α, protrusions 21α, 22α, and 23α are arranged along the x-axis. Similarly, in the β row, there are projections 21β, 22β, and 23β. They are arranged along the x-axis. Similarly, in the γ column, there are projections 21γ and projections 22 γ and the projection 23γ are arranged along the x-axis. In each row, The first projections are projection 21α, projection 21β, and projection 21γ.

[0046] Each protrusion is arranged along the x-axis, but the spacing between them can be irregular. Therefore, For example, tip portions 21α, 21β, and 21γ are arranged in a line along the y-axis direction. This is not necessarily the case. Here, for each row, as in the first embodiment, the height of the protrusion A constraint is imposed on this. Specifically, the amplitude of the protrusion 21α in the z-axis direction in the α row of this embodiment. The lower limit is set to be smaller than the lower limit of the amplitude of the protrusion 22α in the z-axis direction. Similarly, the lower limit of the amplitude of projection 21β in the z-axis direction in the β column is the same as that of projection 22β. It is set so that it is smaller than the lower limit of the amplitude in the z-axis direction. Similarly, the protrusion in the γ column The lower limit of the amplitude of the protrusion 21β in the z-axis direction is less than the lower limit of the amplitude of the projection 22γ in the z-axis direction. It is designed to be as small as possible.

[0047] This suppresses the occurrence of cracks that may occur when a predetermined ultrasonic vibration is applied, This allows vibrations to be transmitted to a wider surface area than in the first embodiment, enabling bonding. Oh, the details will be explained in the seventh embodiment, but for this embodiment to be valid, each arbitrary column The magnitude of the amplitude in the z-axis direction of the first projection is equal to the amplitude in the z-axis direction of the second projection located in the same row. It needs to be larger than the width. (Sixth Embodiment)

[0048] Next, the sixth embodiment will be described. In the fifth embodiment, as shown in Figure 9, the α column, β The columns and γ are arranged parallel to the x-axis. The columns are spaced equally apart, and each Each row has three protrusions arranged along the x-axis. Between the arrangement of each protrusion The spacing can be irregular, but the number and arrangement of any row and the protrusions they possess are important. Turns can be changed as needed.

[0049] In this embodiment, the number of columns may span multiple columns, as long as there is at least one. Each column is always parallel to the x-axis, and may extend across multiple columns. In this case, the spacing between each column in the y-axis direction does not need to be unequal. Each row contains at least two protrusions, which are arranged along the x-axis. As long as they are arranged in a certain way, the spacing between them can be irregular.

[0050] However, as in the first embodiment, a constraint is placed on the height of the protrusions for each row. In the n rows (n=0,1,2,3,,,) provided at the tip of the embodiment, the first projection is a projection Let object 21n be defined as object 21n, and the second projection as projection 22n. Between these projections, projection 2 The lower limit of the amplitude of 1n in the z-axis direction is smaller than the lower limit of the amplitude of protrusion 22n in the z-axis direction. A relationship is established in which they are arranged in such a way that they become smaller. Also, the other protrusions in each row Regarding the protrusions, the relationship between the heights of adjacent protrusions is the relationship between protrusion 21n and protrusion 22n. You can set it up the same way as for the staff.

[0051] This allows you to set the spacing between adjacent rows and the spacing of the protrusions, enabling you to create various shapes. This change allows for bonding over a wider surface area while suppressing the occurrence of cracks. In this embodiment, the number and arrangement pattern of any row and the protrusions they have can be changed as appropriate. Furthermore, as shown in the third embodiment, the size and shape of the protrusions can also be changed. Yes. Further details will be explained in the seventh embodiment, but for this embodiment to be valid, each The magnitude of the z-axis amplitude of the first projection in the row is the z-axis amplitude of the second projection in the same row. It needs to be greater than the magnitude of the amplitude in the direction. (Seventh Embodiment)

[0052] Next, a seventh embodiment will be described. In the embodiments introduced so far, the tip portion 2a The number and arrangement patterns of the protrusions on the x-axis of the object are as appropriate. It was stated that it could be changed. However, in order to suppress the occurrence of cracks during joining, the height of the protrusions In contrast, there are cases where the aforementioned restrictions can be applied and exceptional cases where they cannot. Yes, they exist. Therefore, the details of the embodiments in each case are described below in order.

[0053] Figures 10 and 11 show five protrusions in any row (protrusion 217, protrusion 227, The tip portion 2a and the joining tool 2 are equipped with protrusions 237, 247, and 257. This is a cross-sectional view. In this figure, projection 217 is the first projection. Projection 227 is the second projection. It is a protruding object. The projection 257 is the third projection. As shown in the fourth embodiment, each projection The shape of the object may be changed as appropriate. Also, similar to the first embodiment, the tip portion 2a is a joining tool 2 It may be possible to remove it and replace it as needed.

[0054] In the figure, the dotted line indicates the point where the amplitude in the z-axis direction is smallest when vibration is applied to the tip portion 2a. This represents the boundary line, which is called boundary line 200. For example, when joining tool 2 is in the same figure... If the shape is symmetrical with respect to the machining direction, the central axis of the joining tool 2 in the machining direction is the boundary. It can be considered the same as boundary line 200. On the tip portion 2a, it approaches boundary line 200. We believe that the vibration in the z-axis direction decreases as the value decreases.

[0055] In this embodiment, we focus on the boundary line 200 and the locations where each protrusion is positioned. Here, the central axis The distance from 200 (dotted line) to the furthest point of the first projection along the x-axis is called the "first boundary line distance". It is defined as "F". Similarly, the second projection along the x-axis from the central axis 200 (dotted line) is The distance to the apoceleal point is defined as the "second boundary line distance M". Similarly, the central axis 200 (dotted line) The distance to the furthest point of the third projection along the x-axis is defined as the "distance between third boundaries N". The embodiments described so far consider the effect of elastic deformation on each protrusion, based on the results in Figure 3. With this in mind, the height of the protrusions was set according to the magnitude of the lower limit of each amplitude. In order to suppress excessive load on the joined body 6 during joining, each protrusion (i.e., the first protrusion and its Between (other protrusions), "the amplitude of the first protrusion in the z-axis direction > the amplitude of other protrusions in the z-axis direction" The relationship between the amplitude in the z-axis direction and the amplitude in the z-axis direction must hold true. In this embodiment, when the appropriate magnitude relationship regarding the size is satisfied, "the height of the first projection is It is smaller than the third projection, and the lower limit of the amplitude of the first projection in the z-axis direction is the same as that of the third projection in the z-axis direction. It is stated that it is set to be smaller than the lower limit of the amplitude in the direction.

[0056] This embodiment shows the lower limit of the amplitude in the z-axis direction of the first projection and the lower limit of the amplitude in the z-axis direction of the third projection It relates to the height of the protrusion with respect to the value. Therefore, replace the part of "other protrusions" with "third protrusion" and describe by focusing on the first protrusion and the third protrusion. Replace it with the "third protrusion" and describe by focusing on the first protrusion and the third protrusion.

[0057] Figure 10(A) is a cross-sectional view of the tip portion 2a when F≥N. In the figure, the distance F between the central axes of the first protrusions and the distance N between the central axes of the third protrusions are of the same magnitude, and the relationship F≥N holds. For example, this can be regarded as the same as the shape of the tip of the joining tool 2 shown in Fig. 8(A). Therefore, the influence of the elastic deformation received by the first protrusion (protrusion 217) is greater than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) is maintained. In such a case, it is suitable as this embodiment. For example, this can be regarded as the same as the fourth embodiment shown in Fig. 8(A). Therefore, the influence of the elastic deformation received by the first protrusion (protrusion 217) is greater than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) is maintained. In such a case, it is suitable as this embodiment. For example, this can be regarded as the same as the shape of the tip of the joining tool 2 shown in Fig. 8(A). Therefore, the influence of the elastic deformation received by the first protrusion (protrusion 217) is greater than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) is maintained. In such a case, it is suitable as this embodiment. For example, this can be regarded as the same as the shape of the tip of the joining tool shown in Fig. 8(A). Therefore, the influence of the elastic deformation received by the first protrusion (protrusion 217) is greater than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) is maintained. In such a case, it is suitable as this embodiment. For example, this can be regarded as the same as the shape of the tip of the joining tool shown in Fig. 8(A). Therefore, the influence of the elastic deformation received by the first protrusion (protrusion 217) is greater than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) is maintained. In such a case, it is suitable as this embodiment. For example, this can be regarded as the same as the shape of the tip of the joining tool shown in Fig. 8(A). Therefore, the influence of the elastic deformation received by the first protrusion (protrusion 217) is greater than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) is maintained. In such a case, it is suitable as this embodiment.

[0058] Figure 10(B) is a cross-sectional view of the tip portion 2a when F > N. In the figure, the first protrusions (protrusions 217) are arranged at the positions closest to the boundary line 200 among the respective protrusions. On the other hand, the third protrusions (protrusions 257) are arranged at the positions closest to the central axis 200. Therefore, the influence of the elastic deformation received by the first protrusions is greater than that of the third protrusions, and the relationship of "the magnitude of the amplitude of the first protrusions in the z-axis direction > the magnitude of the amplitude of the third protrusions in the z-axis direction" between the above-mentioned protrusions (the first protrusions and the third protrusions) is maintained. In such a case, it is suitable as this embodiment. On the other hand, the third protrusions (protrusions 257) are arranged at the positions closest to the central axis 200. Therefore, the influence of the elastic deformation received by the first protrusions is greater than that of the third protrusions, and the relationship of "the magnitude of the amplitude of the first protrusions in the z-axis direction > the magnitude of the amplitude of the third protrusions in the z-axis direction" between the above-mentioned protrusions (the first protrusions and the third protrusions) is maintained. In such a case, it is suitable as this embodiment. On the other hand, the third protrusions (protrusions 257) are arranged at the positions closest to the central axis 200. Therefore, the influence of the elastic deformation received by the first protrusions is greater than that of the third protrusions, and the relationship of "the magnitude of the amplitude of the first protrusions in the z-axis direction > the magnitude of the amplitude of the third protrusions in the z-axis direction" between the above-mentioned protrusions (the first protrusions and the third protrusions) is maintained. In such a case, it is suitable as this embodiment. On the other hand, the third protrusions (protrusions 257) are arranged at the positions closest to the central axis 200. Therefore, the influence of the elastic deformation received by the first protrusions is greater than that of the third protrusions, and the relationship of "the magnitude of the amplitude of the first protrusions in the z-axis direction > the magnitude of the amplitude of the third protrusions in the z-axis direction" between the above-mentioned protrusions (the first protrusions and the third protrusions) is maintained. In such a case, it is suitable as this embodiment. On the other hand, the third protrusions (protrusions 257) are arranged at the positions closest to the central axis 200. Therefore, the influence of the elastic deformation received by the first protrusions is greater than that of the third protrusions, and the relationship of "the magnitude of the amplitude of the first protrusions in the z-axis direction > the magnitude of the amplitude of the third protrusions in the z-axis direction" between the above-mentioned protrusions (the first protrusions and the third protrusions) is maintained. In such a case, it is suitable as this embodiment. On the other hand, the third protrusions (protrusions 257) are arranged at the positions closest to the central axis 200. Therefore, the influence of the elastic deformation received by the first protrusions is greater than that of the third protrusions, and the relationship of "the magnitude of the amplitude of the first protrusions in the z-axis direction > the magnitude of the amplitude of the third protrusions in the z-axis direction" between the above-mentioned protrusions (the first protrusions and the third protrusions) is maintained. In such a case, it is suitable as this embodiment.

[0059] Figure 11(A) is a cross-sectional view of the tip portion 2a when F < N. In the figure, the first protrusions (protrusions 217) are arranged closer to the boundary line 200 than the third protrusions (protrusions 257). placed (i.e., in the state of F < N). Therefore, the influence of the elastic deformation received by the first protrusion is smaller than that of the third protrusion, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z- axis direction" may be disrupted. In such a case, it is not suitable as this embodiment. Note that in this figure, it is necessary to pay attention to the fact that the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" is not necessarily disrupted.

[0060] FIG. 11(B) is a cross-sectional view of the tip 2a in the case of F < N. In this figure, the first protrusion (protrusion 217) is arranged closer to the central axis 200 than the second protrusion (protrusion 227) and the third protrusion (protrusion 257). Therefore, the influence of the elastic deformation received by the first protrusion is smaller than that of the other protrusions, and the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" between the above-mentioned protrusions (the first protrusion and the third protrusion) may be disrupted. In such a case, it is not suitable as this embodiment.

[0061] Therefore, in this embodiment, if the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the third protrusion in the z-axis direction" is satisfied, then "the height of the first protrusion is smaller than that of the third protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction is set to be smaller than the lower limit value of the amplitude of the third protrusion in the z-axis direction".

[0062] The other embodiments described above so far relate to the heights of the first protrusion and the second protrusion. In such a case, "each protrusion (i.e., the first protrusion and the other protrusions) ​​​​​​​​​between them, the relationship of "the magnitude of the amplitude of the first protrusion in the z-axis direction > the magnitude of the amplitude of the other protrusions in the z-axis direction" must hold.」 Replace the "other protrusions" part in this sentence with "second protrusions" and explain by focusing on the first protrusion and the second protrusion. The "second protrusions" part is replaced with "second protrusions", and an explanation is given by focusing on the first protrusion and the second protrusion. Here, in FIGS. 11(A) and 11(B), a supplementary explanation is also added regarding how the magnitude of the second boundary line distance affects other embodiments. For example, FIGS. 11(A) and

[0063] Here, in FIGS. 11(A) and 11(B), a supplementary explanation is also added regarding how the magnitude of the second boundary line distance affects other embodiments. For example, FIGS. 11(A) and 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, 11(B) are assumed to be "F ≦ M". In such a case, depending on the magnitude of the second boundary line distance M, the second protrusion is more greatly affected by elastic deformation than the first protrusion, and the lower limit value of the amplitude of the first protrusion in the z-axis direction becomes larger than the lower limit value of the amplitude of the second protrusion in the z-axis direction. That is, <​​​​​​​​​​​​The relationship is "The amplitude of the first projection in the z-axis direction > The amplitude of the third projection in the z-axis direction" Because it is maintained, it is suitable as one of the other embodiments described above.

[0065] Furthermore, if "F≧N", the z-axis of the first protrusion is between each protrusion (the first protrusion and the second protrusion). The relationship "magnitude of amplitude in the direction > magnitude of amplitude in the z-axis direction of the third projection" is maintained, This is a suitable example of the other embodiments described above.

[0066] Furthermore, the present invention is not limited to the embodiments described above, and may deviate from the spirit of the present invention. Of course, various modifications can be made within the limits of the present invention. Although these embodiments have been described, they are presented as examples only and do not limit the scope of the invention. It is not intended that these novel embodiments may be implemented in various other forms. It is possible to make various omissions, substitutions, and modifications without departing from the gist of the invention. This is possible. These embodiments and their variations are included in the scope and gist of the invention, and are patentable. The invention described in the claims and its equivalents are included within the scope of the claims. [Explanation of symbols]

[0067] 1...Ultrasonic bonding equipment 2. Joining Tools 2a...Tip 3...Connection part 4. Transducer 5. Control Unit 6, 6a, 6b... object to be joined 7. Anvil 8. Lifting section 21, 22,23, 21ο, 24, 25, 214, 224, 234, 244, 254, 2 1α, 22α, 23α, 21β, 22β, 23β, 21γ, 22γ, 23γ, 227, 2 37, 247, 257...Protrusions 60a...crack 6c...Multilayer foil α, β, γ, n... row 200... Boundary line F... Distance between first boundary lines M... Distance between second boundary lines N...Distance between third boundary lines

Claims

1. A vibrator that vibrates in one direction, A joining tool connected such that the aforementioned one direction and the processing direction intersect, A connecting portion that connects the vibrator and the joining tool, In the joining tool, at least one of the following is positioned at the tip in the machining direction so as to be aligned with the one direction. Two or more protrusions, A lifting mechanism that drives the joining tool in a direction perpendicular to the aforementioned one direction, Equipped with, In the projection, the first projection is located on the side that is furthest from the vibrator in that one direction. The lower limit of the amplitude of the object in the perpendicular direction is the second projection adjacent to the first projection in the same direction. The projection is provided such that its amplitude is smaller than the lower limit of the amplitude in the direction perpendicular to the projection. A distinctive ultrasonic bonding device.

2. A vibrator that vibrates in one direction, A joining tool connected such that the aforementioned one direction and the processing direction intersect, A connecting portion that connects the vibrator and the joining tool, In the joining tool, at least one of the following is positioned at the tip in the machining direction so as to be aligned with the one direction. Two or more protrusions, A lifting mechanism that drives the joining tool in a direction perpendicular to the aforementioned one direction, Equipped with, In the projection, the first projection is located on the side that is furthest from the vibrator in that one direction. The lower limit of the amplitude of the object in the perpendicular direction is when the distance from the oscillator in that one direction is closest. The third projection located on the right side is set to be smaller than the lower limit of the amplitude in the perpendicular direction. An ultrasonic bonding apparatus characterized by being kicked.

3. Multiple rows are arranged, with two or more of the aforementioned protrusions provided at the tip along the aforementioned one direction. The ultrasonic bonding apparatus according to claim 1 or 2, characterized by having [a certain feature].

4. The magnitude of the amplitude of the first projection in the perpendicular direction is the same as the magnitude of the amplitude of the second projection in the perpendicular direction. The ultrasonic bonding apparatus according to claim 1, characterized in that the amplitude is greater than the magnitude of the function.

5. The magnitude of the amplitude of the first projection in the perpendicular direction is the same as the amplitude of the third projection in the perpendicular direction. The ultrasonic bonding apparatus according to claim 2, characterized in that the amplitude is greater than the magnitude of the function.

6. A process of driving the joining tool in the machining direction, The joining tool is vibrated in a direction intersecting the processing direction to deform the joining tool. The process, The lower limit of the amplitude of two or more protrusions provided on the tip of the joining tool along the vibration direction is predetermined An ultrasonic bonding method having a step to control vibrations so that the size is determined.

7. A process of driving in one direction and in a direction perpendicular to it, A step of vibrating the vibrator in the aforementioned one direction, The joining tool, connected so that the aforementioned one direction and the processing direction intersect, is elastically deformed, and the joining At least two or more are arranged along the one direction at the tip of the tool in the machining direction. The upper projection is the first projection located on the side that is furthest from the oscillator in that one direction. The magnitude of the amplitude in the perpendicular direction is the same as that of the first projection and the second projection adjacent in the same direction. Controlling the vibration of the oscillator so that it is greater than the amplitude in the perpendicular direction. A distinctive ultrasonic bonding method.

8. A process of driving in one direction and in a direction perpendicular to it, A step of vibrating the vibrator in the aforementioned one direction, The joining tool, connected so that the aforementioned one direction and the processing direction intersect, is elastically deformed, and the joining At least two or more are arranged along the one direction at the tip of the tool in the machining direction. The upper projection is the first projection located on the side that is furthest from the oscillator in that one direction. The magnitude of the amplitude in the perpendicular direction is closest to the side closest to the oscillator in that direction. Vibration is applied such that it is greater than the amplitude of the perpendicular direction of the third projection. An ultrasonic bonding method characterized by the following.

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